KR101790950B1

KR101790950B1 - Image stabilizing coil unit and manufacturing method of this, and actuator for stabilizing image

Info

Publication number: KR101790950B1
Application number: KR1020150190182A
Authority: KR
Inventors: 여인재
Original assignee: 주식회사 액트로
Priority date: 2015-12-30
Filing date: 2015-12-30
Publication date: 2017-10-30
Also published as: KR20170080853A

Abstract

In order to change the position of the optical lens module or the image sensor in the camera shake correcting actuator, when the position of the permanent magnet is changed by the electromagnetic force according to the application of the power source, the position of the permanent magnet The present invention relates to a camera shake correcting coil unit and a camera shake correcting coil unit which can reduce the magnitude of the magnetic flux applied to the hall sensor for detecting the camera shake and improve the motion control performance according to the motion of the permanent magnet, .
To this end, the hand-shake correction coil unit includes a bottom layer that forms a floor, an insulating layer that is laminated on the bottom layer, and a driving coil that is connected to the insulating layer in a state where two or more are stacked.

Description

TECHNICAL FIELD [0001] The present invention relates to a camera shake correcting coil unit, a manufacturing method of the shake correcting coil unit, and an actuator for correcting camera shake using the camera shake correcting coil unit and the camera shake correcting coil unit.

The present invention relates to a camera shake correcting coil unit, a manufacturing method of a shake correcting coil unit, and an actuator for correcting camera shake using the same. More specifically, the present invention relates to an actuator for correcting camera shake, It is possible to reduce the magnitude of the magnetic flux applied to the hall sensor for sensing the position of the permanent magnet by the electromagnetic force and to improve the operation control performance according to the motion of the permanent magnet And an actuator for compensating for camera shake using the camera shake correction coil unit.

In general, the adoption of a camera device in a mobile communication terminal is becoming commonplace. Since the photographing using the mobile communication terminal is performed during the movement, the camera device of the mobile communication terminal essentially requires the hand shake correction device for correcting the vibration such as the hand trembling to obtain the high quality image.

In particular, since the camera device is provided with the shaking motion correction device, a clear image can be obtained in an environment having a slow shutter speed due to a lack of light as in a dark room or at night.

For example, the optical image stabilizer (OIS) in the hand shake correction unit changes the position of the optical lens module or the image sensor through the driving unit, so that even if the shaking of the photographing apparatus occurs, The image plays a role of compensating for no shaking.

However, according to the conventional art, the position of the optical lens module or the image sensor coupled to the permanent magnet can be changed by changing the position of the permanent magnet by the electromagnetic force according to the application of the power source. At this time, the Hall sensor for sensing the position of the permanent magnet is affected by the induced magnetic field generated by the electromagnetic force, so that the electromagnetic force acts as noise in the Hall sensor and lowers the sensitivity of the Hall sensor.

Korean Patent Registration No. 10-1075710 (entitled "Optical Anti-Shake Correction Device and Manufacturing Method Thereof," issued on Oct. 21, 2011)

SUMMARY OF THE INVENTION It is an object of the present invention to solve the problems of the prior art, and it is an object of the present invention to provide a camera shake correcting coil unit which, when changing the position of an optical lens module or an image sensor, A shake correcting coil unit and a shake correcting coil unit capable of reducing the magnitude of the magnetic flux applied to the hall sensor for detecting the position of the permanent magnet by the electromagnetic force and improving the operation control performance according to the movement of the permanent magnet, And an actuator for compensating for camera shake using the same.

According to another aspect of the present invention, there is provided a method of manufacturing a shake correction coil unit, comprising: forming a bottom member for forming a bottom layer on a base; A bottom surface treatment step of surface-treating the bottom member having undergone the bottom formation step for enhancing adhesion strength; A driving coil including a divided coil arranged to be spaced apart from the front coil in a state where a pair of the front coil and the pair of front coils are spaced apart from each other in a state where an insulating member for forming an insulating layer is laminated on the bottom member, A drive coil forming step of embedding the drive coil; And a shape cutting step of cutting the bottom member and the insulating member corresponding to the drive coil. An iterative control step of determining a work order of the drive coil forming step corresponding to the drive coils before the drive coil forming step; And an iterative finishing step of selecting whether or not to terminate the operation sequence according to the repetitive control step. The driving coil forming step is performed according to the selection of the repeated finishing step, or the shape cutting step is performed.

Here, the driving coil may include a front coil extending in a spiral shape from a front central region to an edge, a first coil connecting portion formed in the front central region, and a pair of first coil connecting portions, A second coil connecting portion formed on one of the pair of divided coils, and a second coil connecting portion extending from the divided center region of the first coil connecting portion to the first coil connecting portion, Wherein the driving coil forming step includes the steps of: connecting electrodes for connecting the divided coil and the second coil connecting part to each other; and driving electrodes connected to the other one of the pair of divided coils and the second coil connecting part, respectively, Wherein a coil insulating member for forming a front insulating layer is laminated on the bottom member, And the front coil forming step of embedding the first coil connection portion; Wherein a coil insulating member for forming a split insulating layer is formed on a coil insulating member for forming a split insulating layer so as to form a split insulating layer on the coil insulating member for forming the front insulating layer, A split coil forming step of incorporating a connection portion; A coil insulation member for forming the front insulation layer and a coil insulation member for forming the division insulation layer are laminated or an interlayer insulation member for forming an interlayer insulation layer is laminated, An insulating layer forming step of laminating a finishing insulating member for forming a finishing layer on the insulating layer; And a coil connecting step of forming the connecting electrode on the interlayer insulating member and forming the driving electrode on the finishing insulating member, wherein the repeated finishing step includes forming a driving electrode on the finishing insulating member The shape cutting step is performed.

The driving coil may include a front coil extending in a helical shape extending from a front central region to an edge of the front coil, and a pair of front coils spaced from the front coil in a divided state, A plurality of first divided coils extending in a direction from the second divided central region toward a periphery of the first divided coil in a state where a pair of the divided coils is divided to correspond to a pair of the first divided coils, And a drive electrode connected to the pair of second split coils, wherein the drive unit includes: a first split coil, a second split coil, a connection electrode for interconnecting the front coil, the first split coil and the second split coil, The coil forming step may include forming a coil insulation member for forming a front insulation layer in a state that a coil insulation member for forming a front insulation layer is laminated on the bottom member, A front coil forming step of incorporating a coil; Wherein a coil insulating member for forming the first split insulating layer is formed by laminating a coil insulating member for forming a first divided insulating layer on a coil insulating member for forming the front insulating layer, A coil insulation member for forming a second divisional insulation layer in a state in which a coil insulation member for forming a second divisional insulation layer is laminated on the coil insulation member for forming the first divisional insulation layer, A split coil forming step of embedding a pair of the second divided coils in the first and second divided coils; And an interlayer insulating member for forming a first interlayer insulating layer and a second interlayer insulating layer are laminated between the coil insulating members, or a coil insulating member for forming the second divided insulating layer An insulating layer forming step of laminating a finishing insulating member; And a coil connecting step of forming the connecting electrode on the interlayer insulating member and forming the driving electrode on the finishing insulating member, wherein the repeated finishing step includes forming a driving electrode on the finishing insulating member The shape cutting step is performed.

The driving coil may include a first front coil extending in a spiral shape from the first front center area toward the edge, and a second front coil extending from the second front center area toward the edge A first front coil, a first front coil, a first front coil, a first front coil, a first front coil, a first front coil, and a second front coil. A second divided coil which is stacked on the first divided coil in a state where a pair is divided so as to correspond to the coil and extends in a spiral shape from each second divided central region toward the edge; A pair of first split coils, and a pair of second split coils, wherein the first and second split coils are connected to each other, And a drive electrode connected to the pair of second split coils, wherein the drive coil forming step includes a step of forming a drive coil in a state where a coil insulating member for forming a first front insulating layer is laminated on the bottom member The coil insulation member for forming the first front insulation layer may be formed by embedding the first front coil in the coil insulation member for forming the first front insulation layer or by separating the coil insulation member for forming the second front insulation layer from the coil member for forming the first front insulation layer A front coil forming step of embedding the second front coil and the penetrating electrode in a coil insulating member for forming a second front insulating layer in a laminated state; Wherein a coil insulating member for forming the first split insulating layer is formed by laminating a coil insulating member for forming a first divided insulating layer on a coil insulating member for forming the second front insulating layer, A coil for forming a second split insulating layer in a state in which a coil insulating member for forming a second split insulating layer is layered on the coil insulating member for forming the first split insulating layer, A divided coil forming step of embedding a pair of the second divided coils into the insulating member; An insulating interlayer for forming a first interlayer insulating layer, a second interlayer insulating layer and a third interlayer insulating layer is laminated between the coil insulating members, or a coil insulating member for forming the second divided insulating layer An insulating layer forming step of laminating a finishing insulating member for forming a finishing layer; And a coil connecting step of forming the connecting electrode on the interlayer insulating member and forming the driving electrode on the finishing insulating member, wherein the repeated finishing step includes forming a driving electrode on the finishing insulating member The shape cutting step is performed.

The shake correction coil unit according to the present invention comprises a bottom layer for forming a bottom; A front insulating layer stacked on the bottom layer; An interlayer insulating layer stacked on the front insulating layer; A split insulating layer laminated on the interlayer insulating layer; A finishing insulation layer laminated on the split insulation layer; A front coil inserted into the front insulating layer and extending in a helical shape from the front central region toward the edge; A first coil connecting portion inserted into the front center region in the front insulating layer; A pair of split coils inserted into the split insulating layer so as to be spaced apart from each other and extending in a spiral shape from each divided central region toward an edge; A second coil connecting portion inserted into an edge of one of the pair of split coils in the split insulating layer; A connecting electrode inserted in the interlayer insulating layer and interconnecting the front coil, the first coil connecting portion, the pair of divided coils and the second coil connecting portion; And driving electrodes inserted in the finishing insulating layer and connected to the other one of the pair of divided coils and the second coil connecting portion, respectively.

The shake correction coil unit according to the present invention comprises a bottom layer for forming a bottom; A front insulating layer stacked on the bottom layer; A first interlayer insulating layer stacked on the front insulating layer; A first split insulating layer laminated on the first interlayer insulating layer; A second interlayer insulating layer stacked on the first divided insulating layer; A second divisional insulating layer laminated on the second interlayer insulating layer; A finishing insulation layer laminated on the second split insulation layer; A front coil inserted into the front insulating layer and extending in a helical shape from the front central region toward the edge; A first divided coil inserted in the first divided insulating layer so as to be spaced apart from each other and extending in a spiral shape from each first divided central region toward an edge thereof; A split coil including a pair of split coils inserted into the second split insulating layer so as to be spaced apart from each other and extending in a spiral shape from an edge of each second divided center region; A connecting electrode inserted in the first interlayer insulating layer and the second interlayer insulating layer and interconnecting the front coil, a pair of the first divided coils and a pair of the second divided coils; And driving electrodes inserted in the finishing insulating layer and connected to the pair of second divided coils, respectively.

The shake correction coil unit according to the present invention comprises a bottom layer for forming a bottom; A first front insulating layer laminated on the bottom layer; A first interlayer insulating layer stacked on the first front insulating layer; A second front insulating layer laminated on the first interlayer insulating layer; A second interlayer insulating layer stacked on the second front insulating layer; A first split insulating layer laminated on the second interlayer insulating layer; A third interlayer insulating layer stacked on the first divided insulating layer; A second split insulating layer which is laminated on the third interlayer insulating layer; A finishing insulation layer laminated on the second split insulation layer; A first front surface coil inserted in the first front insulating layer and extending in a spiral form from the first front center area toward the edge; a second front surface coil inserted in the second front insulating layer, A front coil including a second front coil extending in the form of a front coil; A first divided coil inserted in the first divided insulating layer so as to be spaced apart from each other and extending in a spiral shape from each first divided central region toward an edge thereof; A split coil including a pair of split coils inserted into the second split insulating layer so as to be spaced apart from each other and extending in a spiral shape from an edge of each second divided center region; A penetrating electrode inserted into the second front insulating layer and formed at an edge of the second front coil; And a second interlayer insulating layer interposed between the first front coil, the second front coil, the penetrating electrode, a pair of the first divided coils, and a second interlayer insulating layer interposed between the first interlayer insulating layer, A connecting electrode interconnecting the pair of second divided coils; And driving electrodes inserted in the finishing insulating layer and connected to the pair of second divided coils, respectively.

Here, the spiral direction of the front coil is formed to be identical to the spiral direction of one of the pair of split coils.

Here, the helical directions of the pair of split coils are formed opposite to each other.

The camera shake correcting actuator according to the present invention is a camera shake correcting actuator for moving an optical lens module or an image sensor built in the camera according to camera shake, and is a permanent magnet to which the optical lens module or the image sensor is coupled; A shake hole sensor which is disposed on the bottom of the permanent magnet and senses a change in magnetic flux due to the horizontal movement of the permanent magnet with respect to a virtual plane parallel to the bottom of the permanent magnet; A shake correction coil unit disposed between the permanent magnet and the shake hole sensor and generating a shaking electromagnetic force so that the optical lens module or the image sensor is horizontally moved in the virtual plane; And a shake drive unit for applying power to the shake correction coil unit.

The camera shake correction actuator according to the present invention further includes a drive control unit for controlling the shake drive unit through a signal transmitted from the shake hole sensor.

A camera shake correction actuator according to the present invention includes a focus correction coil which is disposed on a side surface of the permanent magnet and generates focal electromagnetic force so as to be moved up and down in the virtual plane; A focus driving unit for applying power to the focus correction coil; And a focus hole sensor which is disposed on a bottom surface of the permanent magnet or on a side surface of the permanent magnet and detects a change in magnetic flux due to the lifting movement of the permanent magnet with respect to the virtual plane, Controls the shake drive unit through a signal transmitted from the shake hall sensor, and controls the focus driver through a signal transmitted from the focus hole sensor.

Here, the bottom center of the permanent magnet coincides with the center of the shake correction coil unit and the center of the shake hole sensor.

According to the camera shake correcting coil unit, the manufacturing method of the shake correcting coil unit, and the camera shake correcting actuator using the camera shake correcting coil unit, the position of the optical lens module or the image sensor in the camera shake correcting actuator is changed by the electromagnetic force It is possible to reduce the magnitude of the magnetic flux on the hall sensor for detecting the position of the permanent magnet by the electromagnetic force and to improve the motion control performance according to the motion of the permanent magnet by changing the shake correction coil unit when the position of the magnet is changed have.

Further, in the present invention, the drive coils are stacked in two tiers and separated into a front coil and a pair of split coils, and an electromagnetic force can be generated by a power source applied to the drive coils. At this time, the front coil and the pair of split coils can be connected in series in a simple manner, and the direction of the direct current power can be stabilized.

Further, according to the present invention, the driving coils are stacked in three tiers, and the front coil, the pair of first sub-coils and the pair of second sub-coils are separated and an electromagnetic force can be generated by a power source applied to the driving coils. At this time, the front coil, the pair of first split coils and the pair of second divided coils can be connected in series, and the direction of the direct current power can be stabilized.

According to the present invention, the driving coils are stacked in four stages to separate the first front coil, the second front coil, the pair of first sub-coils and the pair of second sub-coils, and generate an electromagnetic force . At this time, the first front coil, the second front coil, the pair of first divided coils and the pair of second divided coils can be connected in series, and the direction of the direct current power can be stabilized.

Further, according to the present invention, the magnitude of the magnetic flux due to the electromagnetic force can be offset in accordance with the spiral direction between the front coil and the divided coil, and the magnitude of the magnetic flux applied to the Hall sensor by the electromagnetic force can be reduced.

In addition, the present invention can prevent the image from being shaken by hand shake.

In addition, the present invention can prevent the shaking of the image due to the shaking motion and automatically adjust the focus of the image.

Further, the present invention can simplify the manufacture of the hand-shake correction coil unit, reduce the manufacturing cost thereof, and essentially eliminate the occurrence of defects, thereby stabilizing the electrical connection between the coils.

In addition, the present invention improves the sensitivity of the Hall sensor and sensitively senses changes in magnetic flux generated by the movement of the permanent magnet in the Hall sensor.

Fig. 1 is a developed view of a main part showing a camera-shake correction coil unit according to a first embodiment of the present invention.
Fig. 2 is a developed view of a main part showing a shake correction coil unit according to a second embodiment of the present invention.
Fig. 3 is a developed view of the main part showing the shaking motion correction coil unit according to the third embodiment of the present invention.
4 is a view showing a method of manufacturing a shake correction coil unit according to an embodiment of the present invention.
FIG. 5 is a view showing a state according to each step in a method of manufacturing a shake correction coil unit according to an embodiment of the present invention.
6 is a perspective view illustrating an actuator for correcting camera shake according to an embodiment of the present invention.
7 is a front view of Fig. 6. Fig.

Hereinafter, a camera shake correcting coil unit, a method of manufacturing a camera shake correcting coil unit, and an embodiment of the camera shake correcting actuator using the camera shake correcting coil unit according to the present invention will be described with reference to the accompanying drawings. Here, the present invention is not limited or limited by the examples. Further, in describing the present invention, a detailed description of well-known functions or constructions may be omitted for clarity of the present invention.

In describing the present invention, the shake correction coil unit according to the embodiment of the present invention is manufactured by the manufacturing method of the shake correction coil unit according to the embodiment of the present invention, Will be described as applied to an actuator.

FIG. 1 is a developed view of a main part showing a camera-shake correction coil unit according to a first embodiment of the present invention, FIG. 2 is a developed view of a main part showing a camera-shake correction coil unit according to a second embodiment of the present invention, 4 is a view showing a method of manufacturing the shake correcting coil unit according to an embodiment of the present invention, and FIG. 5 is a cross-sectional view illustrating a shake correcting coil unit according to a third embodiment of the present invention. Fig. 8 is a diagram showing a state according to each step in the method of manufacturing the shake correction coil unit according to the embodiment. Fig.

1, 4, and 5, the shake correction coil unit according to the first embodiment of the present invention includes a bottom layer 10 forming a bottom, an insulating layer stacked on the bottom layer 10, And driving coils 50 connected to each other in a stacked state and embedded in the insulating layer.

The insulating layer according to the first embodiment of the present invention includes a front insulating layer 21 stacked on the bottom layer 10, an interlayer insulating layer 30 stacked on the front insulating layer 21, A split insulating layer 22 laminated on the insulating layer 30 and a finished insulating layer 40 laminated on the split insulating layer 22. [ Here, the front insulating layer 21 and the split insulating layer 22 form a coil insulating layer 20.

The driving coil 50 according to the first embodiment of the present invention includes a front coil 60 inserted into the front insulating layer 21 and extending in a spiral shape from the front central region 601 toward the edge, A first coil connecting portion 63 inserted into the front central region 601 of the front insulating layer 21 and a pair of second insulating film portions 63a and 62b inserted into the divided insulating layer 22, And a second coil connecting portion (73) inserted into one of the pair of divided coils (70) in the split insulating layer (22) And a pair of split coils 70 and a plurality of second coil connecting portions 73 which are inserted into the interlayer insulating layer 30 and which are connected to the front coil 60 and the first coil connecting portion 63, And a connection electrode (90) for connecting the other one of the pair of divided coils (70) inserted into the finishing insulation layer (40) And a driving electrode 80 connected to the second coil connecting portion 73, respectively. Here, the driving electrodes 80 are respectively exposed on the finishing insulating layer 40 to apply power.

The front insulating layer 21 is formed with a front coil hole 211 through which the front coil 60 and the first coil connecting portion 63 are inserted. The interlayer insulating layer 30 is formed with two interlayer via holes 30a through which the connection electrode 90 is inserted and a first connection via hole 30c and a second connection via hole 30d. A split coil hole 221 through which the split coil 70 is inserted is formed in the split insulating layer 22. A first driving via hole 41 and a second driving via hole 42 through which the driving electrode 80 is inserted are formed in the finish insulating layer 40, respectively.

The connection electrode 90 is inserted into one of the interlayer via holes 30a to connect one end of the front coil 60 and one end of the other of the pair of split coils 70 1 connecting electrodes 91 and one end of one of the pair of split coils 70 inserted into and supported by the other of the interlayer via holes 30a to connect the other end of the front coil 60 to one end of one of the pair of divided coils 70, (7) connecting one end of one of the pair of split coils (70) inserted into the first connection via hole (30c) to one end of the first coil connecting portion (63) And an eighth connecting electrode (98) inserted in the second connecting via hole (30d) to connect the other end of the first coil connecting portion (63) and one end of the second coil connecting portion (73) ).

The driving electrode 80 includes a first driving electrode 81 inserted into and supported by the first driving via hole 41 and connected to the other end of the other one of the pair of divided coils 70, And a second driving electrode 82 inserted into the second driving via hole 42 and connected to the other end of the second coil connecting portion 73. The first driving electrode 81 and the second driving electrode 82 are exposed in the finishing insulating layer 40, respectively.

The front coil 60 and the divided coil 70 are electrically connected to the first coil connecting portion 63 and the second coil connecting portion 73 via the connecting electrode 90 and the driving electrode 80 They can be connected in series.

In the first embodiment of the present invention, the helical directions of the pair of divided coils 70 may be formed to be equal to each other. Although not shown, the helical directions of the pair of split coils 70 can be formed opposite to each other.

The spiral direction of the front coil 60 may be the same as the spiral direction of any one of the pair of divided coils 70. Although not shown, the spiral direction of the front coil 60 may be formed to be opposite to the spiral direction of any one of the pair of divided coils 70.

According to the first embodiment of the present invention, the spiral direction can be changed in various forms by combining the spiral directions. Then, the magnetic flux due to the electromagnetic force is amplified or canceled, so that the sensitivity of the magnetic flux according to the change in the position of the permanent magnet 130 described later at the center of the Hall sensor described later can be improved.

A method of manufacturing a shake correction coil unit according to a first embodiment of the present invention is a method of manufacturing a shake correction coil unit according to a first embodiment of the present invention, A floor surface processing step S2 for surface-treating the bottom member 10a through the bottom forming step S1 for enhancing adhesion strength; a bottom surface forming step S1 for applying a bottom member 10a; A divided coil 70 is disposed on the insulating member so as to be spaced apart from the front coil 60 in a state where a pair of the front coil 60 and the pair of front coils 60 are spaced apart from each other while an insulating member for forming an insulating layer is laminated on the member 10a. (S3) for embedding a driving coil (50) including the driving coil (50) in the insulating member, and a shape cutting step (S3) for cutting the bottom member (10a) and the insulating member S4), and prior to the drive coil forming step (S3) A repetitive control step (S10) of determining a working order of the driving coil forming step (S3) corresponding to the base coil (50), and a repetitive finishing step of selecting whether to end the working order according to the repetitive controlling step And further includes step S11. Here, the bottom surface treatment step S2 may surface-treat the bottom member 10a in the oxygen plasma region.

The method of manufacturing a camera shake correction coil unit according to the first embodiment of the present invention includes a base preparation step S6 for positioning the base B on which the bottom member 10a is stacked, (S7) for surface-treating the base (B) to enhance the adhesion of the base (B). Here, the base surface treatment step (S7) may surface-treat the base (B) in a hexafluoro-sulfur (SF6) plasma region.

The method of manufacturing an unintentional hand movement correction coil unit according to the first embodiment of the present invention includes separating the base B from the bottom member 10a between the shape cutting step S4 and the repeated finishing step S11 , The volume of the finished shake correction coil unit can be reduced and the base B can be prevented from being damaged in the shape cutting step S4.

In addition, the method of manufacturing the shake correction coil unit according to the first embodiment of the present invention may further include a base cleaning step (S9) of surface-treating the base (B) separated from the bottom member (10a). The base B can be reused in the base preparation step S6 by passing through the base separation step S8 or the base cleaning step S9. Here, the base cleaning step S9 may surface-treat the base B in a hexafluoro-sulfur (SF6) plasma region.

With the above-described additional configuration, the provision of the base B facilitates the lamination of the bottom member 10a and the insulating member, and the flatness of each member can be maintained.

The manufacturing method of the shake correction coil unit according to the first embodiment of the present invention further includes a packaging step (S5) of packaging the shake correction coil unit completed by cutting through the shape cutting step (S4) .

Here, in the driving coil forming step S3, the driving coil 50 may be formed in the insulating member according to the first embodiment of the present invention. Accordingly. The driving coil 50 includes a front coil 60 extending in a helical shape from the front central region 601 toward the edge and a first coil connecting portion 63 formed in the front central region 601 A divided coil 70 which is stacked on the front coil 60 in a state where the pair of the divided coils 60 are divided and extends in a spiral shape from each divided central region 701 toward the edge, A second coil connecting part 73 formed at one of the edges of the first coil connecting part 63 and the second coil connecting part 70; And a driving electrode 80 connected to the other one of the pair of divided coils 70 and the second coil connecting portion 73. [

The driving coil forming step S3 includes a front coil forming step S31, a divided coil forming step S32, an insulating layer forming step S34, and a coil connecting step S33.

Then, the repetitive control step S10 includes a step S31 of forming a front coil, a step S32 of forming a divided coil, a step S34 of forming an insulating layer, a step S34 of forming an insulating layer, S33). More specifically, the driving coil forming step (S3) includes a front coil forming step (S31), an insulating layer forming step (S34) performed one time and an insulating layer forming step (S33), a divided coil forming step (S32), a second insulating layer forming step (S34), and a second inter-coil connecting step (S33) are sequentially performed .

The front coil forming step S31 includes a step of forming a coil insulating member 20a for forming the front insulating layer 21 in a state that the coil insulating member 20a for forming the front insulating layer 21 is laminated on the bottom member 10a, The front coil 60 and the first coil connecting portion 63 are embedded in the member 20a. The front coil forming step S31 sequentially performs the first etching step S311, the first surface treatment step S315, and the first electrode forming step S316.

The first etching step S311 includes a first coating step S312 of applying a coil insulating member 20a for forming the front insulating layer 21 to the bottom member 10a, The front coil 60 and the first coil connection 63 are removed by removing a part of the coil insulation member 20a for forming the front insulation layer 21 so that the first coil connection part 63 and the first coil connection part 63 are inserted, And a first developing step S314 through which the front coil hole 211 to be inserted is formed so that the first mask M1 is laminated on the coil insulating member 20a for forming the front insulating layer 21 And a first exposure step (S313) of exposing the coil insulating member 20a for forming the front insulating layer 21. [ Accordingly, the first etching step S311 may use either a laser or an etching solution.

In the first surface treatment step S315, the surface of the coil insulation member 20a having the front coil holes 211 penetrated is subjected to a surface treatment for enhancing the adhesion. In the first surface treatment step S315, the coil insulating member 20a having the front coil hole 211 formed therein may be surface-treated in an oxygen plasma region. Accordingly, the front coil 60 and the first coil connecting portion 63 can be stably fixed in the front coil hole 211.

In the first electrode formation step S316, the front coil 60 and the first coil connection 63 are formed in the front coil hole 211. The first electrode forming step S316 is a step of forming a first seed coating layer 60b on the front coil hole 211 by applying a front seed material 60b to be a material of the front coil 60 and the first coil connecting part 63 A first seed growth step S318 of growing the front seed member 60b through the first seed application step S317 to form a front coil member 60a; The upper part of the front coil member 60a formed through the first seed growth step S318 is removed so that the upper part of the front coil 60 and the first coil connection part 63 are exposed, 1 surface removal step (S319).

In the first seed growth step S318, a current application method of applying a current by combining a forward current for plating and a reverse current for plating one or more times in succession (in a combination of currents, Can be used). Also, in the first seed growth step (S318), a method using a plating inhibitor may be used. In the first seed growth step (S318), a plating promoter may be used.

In the first surface removing step (S319), the uppermost portion may be cleaned and the interlayer insulating member 30a for forming the interlayer insulating layer 30 may be stably fixed.

The insulating layer forming step S34 is performed in a one-time sequence by stacking an interlayer insulating member 30a for forming the interlayer insulating layer 30 on the coil insulating member 20a for forming the front insulating layer 21 do. The insulating layer forming step S34 is performed after the first electrode forming step S316 is completed. The coil insulating member 20a for forming the front insulating layer 21 is formed on the interlayer insulating layer 30 ) Is formed on the interlayer insulating member 30a. Here, the interlayer insulating member 30a is formed such that the front coil 60 and the first coil connecting portion 63 embedded in the front insulating layer 21 are connected to the divided coil 70 ) And the second coil connecting portion (73).

In the inter-coil connection step (S33), which is performed one time, the connection electrode (90) is formed on the interlayer insulating member (30a) for forming the interlayer insulating layer (30) A via forming step S331 for forming two interlayer via holes 30a and the first connecting via holes 30c and the second connecting via holes 30d through the interlayer insulating member 30a applied through step S34, And the first connection electrode 91 and the second connection electrode 30b are formed in the two interlayer via holes 30a formed through the via formation step S331 and the first connection via hole 30c and the second connection via hole 30d, And a connecting electrode forming step (S332) of forming the second connecting electrode 92, the seventh connecting electrode 97, and the eighth connecting electrode 98. Here, the via forming step S331 may use either a laser or an etchant.

In the split coil forming step S32, the coil insulating member 20a for forming the split insulating layer 22 is laminated on the interlayer insulating member 30a for forming the interlayer insulating layer 30, A pair of the divided coils 70 and the second coil connecting portions 73 are embedded in the coil insulating member 20a for forming the layer 22. [ The divided coil forming step S32 sequentially performs the second etching step S321, the second surface treatment step S325, and the second electrode forming step S326.

The second etching step S321 includes a second coating step S322 of applying a coil insulating member 20a for forming the split insulating layer 22 to the interlayer insulating member 30a, A part of the coil insulating member 20a for forming the split insulating layer 22 is removed so that the first coil connecting portion 70 and the second coil connecting portion 73 are inserted and the divided coil 70 and the second coil connecting portion 73 And a second developing step S324 for forming a split coil hole 221 through which the insulating layer 22 is inserted and a second mask M2 is formed on the coil insulating member 20a for forming the split insulating layer 22. [ And a second exposure step (S323) for exposing the coil insulating member (20a) for forming the split insulating layer (22). Accordingly, the second etching step S321 may use either a laser or an etching solution.

In the second surface treatment step S325, the coil insulation member 20a having the divided coil holes 221 formed therein is subjected to surface treatment for enhancing the adhesion. Accordingly, the divided coil 70 and the second coil connecting portion 73 can be stably fixed in the divided coil hole 221.

In the second electrode forming step S326, the divided coil 70 and the second coil connecting part 73 are formed in the divided coil hole 221. [ The second electrode forming step S326 is a step of forming a second seed coating for coating the split coil member 70 and the split seed member 70b which is a material of the second coil connecting portion 73, A second seed growth step (S328) of growing the split seed member (70b) through the second seed application step (S327) to form a divided coil member (70a) The upper part of the divided coil member 70a formed through the second seed growth step S328 is removed so as to expose the upper part of the split coil member 70 and the second coil connection part 73, 2 surface removal step (S329).

In the second seed growth step S328, a current application method of applying a current by combining a forward current for plating and a reverse current for plating one or more times in succession (in a combination of currents, Can be used). In the second seed growth step (S328), a plating inhibitor may be used. In the second seed growth step S328, a plating promoter may be used.

In the second surface removing step S329, the uppermost portion may be cleaned to stably fix the finishing insulating member 40a for forming the finishing insulating layer 40. [

The insulation layer forming step (S34), which is performed twice, is a step of laminating a finishing insulation member (40a) for forming a finishing insulation layer (40) on the coil insulation member (20a) for forming the split insulation layer . After the second electrode formation step S326 is completed, the insulation layer formation step S34 is performed twice. The insulation insulation layer 40a is formed on the coil insulation member 20a for forming the split insulation layer 22, (Not shown). Here, the finishing insulating member 40a can prevent the split coil 70 and the second coil connecting portion 73 from being exposed.

The inter-coil connection step (S33), which is performed twice, forms the driving electrode (80) on the finishing insulating member (40a) for forming the finishing insulating layer (40) A via forming step S331 for forming the first driving via hole 41 and the second driving via hole 42 through the finishing insulating member 40a applied through the step S34 and the via forming step S331 (S332) for forming the first driving electrode (81) and the second driving electrode (82) on the first driving via hole (41) and the second driving via hole (42) . Here, the via forming step S331 may use either a laser or an etchant.

After the driving coil forming step (S3) is completed, the shape cutting step (S4) or the base separating step (S8) is performed when the work procedure is completed according to the selection of the repeated finishing step (S11) If the work order is not terminated in accordance with the selection of the repeat finishing step S11, the process returns to the drive coil forming step S3 and proceeds to the detailed step corresponding to the work order.

2, 4 and 5, the shake correction coil unit according to the second embodiment of the present invention includes a bottom layer 10 forming a bottom, an insulating layer stacked on the bottom layer 10, And a driving coil 50 connected in a laminated state and embedded in the insulating layer.

The insulating layer according to the second embodiment of the present invention includes a front insulating layer 21 stacked on the bottom layer 10, a first interlayer insulating layer 31 stacked on the front insulating layer 21, A first interlayer insulating layer (24) laminated on the first interlayer insulating layer (31), a second interlayer insulating layer (32) laminated on the first divided insulating layer (24) A second split insulating layer 26 laminated on the first split insulating layer 32 and a finished insulating layer 40 stacked on the second split insulating layer 26. Here, the front insulating layer 21, the first split insulating layer 24, and the second divided insulating layer 26 form a coil insulating layer 20.

The driving coil 50 according to the second embodiment of the present invention includes a front coil 60 inserted into the front insulating layer 21 and extending in a helical shape from the front central region 601 toward the edge, A first divided coil 71 inserted into the first divided insulating layer 24 so as to be spaced apart from each other and extending in a spiral shape from each first divided central region 711 toward the edge, One pair is inserted into the second split insulating layer 26 so as to correspond to the first divided coil 71 of the first split central coil 721 and extended from each second divided central region 721 in the form of a spiral toward the edge And a second interlayer insulating layer 32 which is inserted into the first interlayer insulating layer 31 and the second interlayer insulating layer 32 so as to be in contact with the front coil 60, A connecting electrode 90 for connecting the pair of first divided coils 71 and the pair of second divided coils 72 to each other, Insert (40) and includes a driving electrode 80 each connected to a pair of the second divide coil 72. Here, the driving electrodes 80 are respectively exposed on the finishing insulating layer 40 to apply power.

Here, a front coil hole 211 through which the front coil 60 is inserted is formed in the front insulating layer 21. In addition, the first interlayer insulating layer 31 is formed with two first interlayer via holes 31a through which the connection electrodes 90 are inserted. In addition, the second interlayer insulating layer 32 is formed with two second interlayer-formed via holes 32a through which the connecting electrodes 90 are inserted. The first split insulation layer 24 is formed with a divided coil hole 221 through which the first divided coil 71 is inserted. A split coil hole 221 through which the second split coil 72 is inserted is also formed in the second split insulating layer 26. A first driving via hole 41 and a second driving via hole 42 through which the driving electrode 80 is inserted are formed in the finish insulating layer 40, respectively.

At this time, the connection electrode 90 is inserted into one of the first interlayer via holes 31a and connected to one end of the front coil 60 and one end of the pair of first split coils 71 And a second connection electrode 91 connected to the other one of the first interlayer via holes 31a and connected to the other end of the front coil 60 and the other of the pair of first divided coils 71. [ A second connecting electrode 92 connecting one end of the first divided coil 71 and a pair of first divided coils 71 inserted into one of the second interlayer via holes 32a, A third connection electrode 93 connecting one end of any one of the second split coils 72 of the first split coil 72 and a pair of first split coils 71) and a fourth connecting electrode (94) connecting one end of the other one of the pair of second split coils (72) The.

The driving electrode 80 includes a first driving electrode 81 inserted into and supported by the first driving via hole 41 and connected to the other end of one of the pair of second divided coils 72, And a second driving electrode 82 connected to the other end of the other of the pair of second divided coils 72. The first driving electrode 81 and the second driving electrode 82 are exposed in the finishing insulating layer 40, respectively.

Accordingly, the front coil 60, the first divided coil 71 and the second divided coil 72 may be connected in series through the connecting electrode 90 and the driving electrode 80.

In the second embodiment of the present invention, the helical directions of the pair of first divided coils 71 may be formed opposite to each other. Although not shown, the helical directions of the pair of first divided coils 71 may be formed to be equal to each other.

Further, the helical directions of the pair of second split coils 72 may be formed opposite to each other. Although not shown, the helical directions of the pair of second divided coils 72 may be formed to be equal to each other.

In addition, the spiral direction of the first divided coil 71 and the spiral direction of the second divided coil 72 corresponding to the height direction may be reversed. Although not shown, the spiral direction of the first divided coil 71 and the spiral direction of the second divided coil 72 corresponding to each other in the height direction may be formed to be equal to each other.

The spiral direction of the front coil 60 may be the same as the spiral direction of any one of the pair of first divided coils 71 and the pair of second divided coils 72. Although not shown, the spiral direction of the front coil 60 may be formed to be opposite to the spiral direction of any one of the pair of first divided coils 71 and the pair of second divided coils 72.

According to the second embodiment of the present invention, the spiral direction can be changed in various forms by combining the spiral directions. Then, the magnetic flux due to the electromagnetic force is amplified or canceled, so that the sensitivity of the magnetic flux according to the change in the position of the permanent magnet 130 described later at the center of the Hall sensor described later can be improved.

A method for manufacturing a shake correction coil unit according to a second embodiment of the present invention includes the steps of forming a base layer (B) on a base (B) A floor surface processing step S2 for surface-treating the bottom member 10a through the bottom forming step S1 for enhancing adhesion strength; a bottom surface forming step S1 for applying a bottom member 10a; A divided coil 70 is disposed on the insulating member so as to be spaced apart from the front coil 60 in a state where a pair of the front coil 60 and the pair of front coils 60 are spaced apart from each other while an insulating member for forming an insulating layer is laminated on the member 10a. (S3) for embedding a driving coil (50) including the driving coil (50) in the insulating member, and a shape cutting step (S3) for cutting the bottom member (10a) and the insulating member S4), and prior to the drive coil forming step (S3) A repetitive control step (S10) of determining a working order of the driving coil forming step (S3) corresponding to the base coil (50), and a repetitive finishing step of selecting whether to end the working order according to the repetitive controlling step And further includes step S11. Here, the bottom surface treatment step S2 may surface-treat the bottom member 10a in the oxygen plasma region.

The method of manufacturing a camera shake correction coil unit according to the second embodiment of the present invention includes a base preparing step S6 for positively positioning a base B on which the bottom member 10a is stacked, (S7) for surface-treating the base (B) to enhance the adhesion of the base (B). Here, the base surface treatment step (S7) may surface-treat the base (B) in a hexafluoro-sulfur (SF6) plasma region.

The method of manufacturing the camera shake correction coil unit according to the second embodiment of the present invention is characterized in that the base B is separated from the bottom member 10a between the shape cutting step S4 and the repeated finishing step S11 , The volume of the finished shake correction coil unit can be reduced and the base B can be prevented from being damaged in the shape cutting step S4.

The method for manufacturing the shake correction coil unit according to the second embodiment of the present invention may further include a base cleaning step S9 for surface-treating the base B separated from the bottom member 10a. The base B can be reused in the base preparation step S6 by passing through the base separation step S8 or the base cleaning step S9. Here, the base cleaning step S9 may surface-treat the base B in a hexafluoro-sulfur (SF6) plasma region.

The manufacturing method of the shake correction coil unit according to the second embodiment of the present invention further includes a packaging step S5 of packaging the shake correction coil unit completed by cutting through the shape cutting step S4 .

Here, in the driving coil forming step S3, the driving coil 50 may be formed in the insulating member according to the second embodiment of the present invention. Accordingly. As described above, the driving coil 50 includes a front coil 60 extending in a helical shape from the front central region 601 toward the edge, a pair of the front coil 60 and the front coil 60, A first divided coil 71 extending in a spiral shape from each of the first divided central regions 711 toward an edge thereof and a second divided coil 71 extending from the first divided central region 711 in a state where a pair is divided to correspond to the pair of first divided coils 71, A second divided coil 72 which is stacked on the first divided coil 71 and extends in a spiral form from each of the second divided central regions 721 toward an edge thereof, A connection electrode 90 connecting the split coil 71 and the second split coil 72 and a drive electrode 80 connected to the pair of second split coils 72,

Then, the repetitive control step S10 includes the steps of forming one front coil (S31), two divided coil forming steps (S32), three insulating layer forming steps (S34), three inter- S33). More specifically, the driving coil forming step (S3) includes a front coil forming step (S31), an insulating layer forming step (S34) performed one time and an insulating layer forming step (S33), a divided coil forming step (S32) performed in one step, an insulating layer forming step (S34) performed in a second step, and a coil connecting step (Step S33) for forming a divided coil, a divided coil forming step S32 for performing a second round, an insulating layer forming step (step S34) for performing a third round, and a coil connecting step S33 for a third round do.

The front coil forming step S31 includes a step of forming a coil insulating member 20a for forming the front insulating layer 21 in a state that the coil insulating member 20a for forming the front insulating layer 21 is laminated on the bottom member 10a, And the front coil 60 is embedded in the member 20a. The front coil forming step S31 sequentially performs the first etching step S311, the first surface treatment step S315, and the first electrode forming step S316.

The first etching step S311 includes a first coating step S312 of applying a coil insulating member 20a for forming the front insulating layer 21 to the bottom member 10a, A first developing step S314 of removing a part of the coil insulating member 20a for forming the front insulating layer 21 to insert the front coil 60 into the front coil hole 211 to insert the front coil 60, A coil insulating member 20a for forming the front insulating layer 21 is formed by laminating a first mask M1 on a coil insulating member 20a for forming the front insulating layer 21, And a first exposure step (S313) for exposing the exposed portion. Accordingly, either the laser or the etching solution may be used in the first etching step S311.

In the first electrode formation step S316, the front coil 60 is formed in the front coil hole 211. The first electrode forming step S316 includes a first seed applying step S317 of applying a front seed member 60b to be a material of the front coil 60 to the front coil hole 211, A first seed growth step S318 of growing the front seed member 60b through the seed applying step S317 to form a front coil member 60a; And a first surface removing step S319 for forming the front coil 60 by removing an upper portion of the front coil member 60a formed through the first seed growth step S318.

In the first surface removing step (S319), the uppermost portion may be cleaned and the interlayer insulating member 30a for forming the first interlayer insulating layer 31 may be stably fixed.

The insulating layer forming step S34 of performing the one-time insulating layer forming step includes interlayer insulating members 30a for forming the first interlayer insulating layer 31 on the coil insulating member 20a for forming the front insulating layer 21, . The insulating layer forming step S34 is performed in a single cycle. After the first electrode forming step S316 is completed, the coil insulating member 20a for forming the front insulating layer 21 is formed with the first interlayer insulating layer 21a, (30a) for forming the insulating layer (31). The interlayer insulating member 30a is formed such that the front coil 60 embedded in the front insulating layer 21 is insulated from the first divided coil 71 embedded in the first divided insulating layer 24 .

In the inter-coil connection step (S33), which is performed one time, the connecting electrode (90) is formed in the interlayer insulating member (30a) for forming the first interlayer insulating layer (31) A via forming step S331 for forming two first interlayer via holes 31a through the interlayer insulating member 30a to be applied through the layer forming step S34 and the second forming step S331 for forming through the via forming step S331, (S332) for forming the first connection electrode (91) and the second connection electrode (92) on the first interlayer via hole (31a). Here, the via forming step S331 may use either a laser or an etchant.

The split coil forming step S32 is performed in a one-turn manner by forming a coil insulating member (not shown) for forming the first split insulating layer 24 on the interlayer insulating member 30a for forming the first interlayer insulating layer 31 A pair of the first divided coils 71 are embedded in the coil insulating member 20a for forming the first divided insulating layer 24 in a state where the first divided coils 71a, The divided coil forming step S32, which is performed in one cycle, sequentially performs the second etching step S321, the second surface treatment step S325, and the second electrode forming step S326.

The second etching step S321 is performed in a single cycle to form a coil insulation member for forming the first divisional insulation layer 24 in the interlayer insulation member 30a for forming the first interlayer insulation layer 31 A second coating step (S322) of applying the first divisional coil (20a) to the first divisional coil (71) and removing a part of the coil insulation member (20a) for forming the first divisional insulation layer (24) And a second development step (S324) of forming a split coil hole (221) into which the one-piece split coil (71) is inserted. The coil insulation member (20a) for forming the first split insulation layer And a second exposure step (S323) of laminating the second mask (M2) and exposing the coil insulation member (20a) for forming the first split insulation layer (24). Accordingly, either the laser or the etching solution can be used in the second etching step (S321) performed one time.

The second surface treatment step (S325), which is performed in a single cycle, includes a coil insulating member 20a through which the divided coil hole 221 formed through the second etching step S321, Surface treatment. Accordingly, the first divided coil 71 can be stably fixed in the divided coil hole 221.

In the second electrode formation step (S326), which is performed one time, the first split coil (71) is formed in the split coil hole (221). In the second electrode forming step S326, which is carried out once, a second seed applying step S327 for applying a split seed member 70b serving as a material of the first divided coil 71 to the divided coil hole 221 A second seed growth step (S328) of growing the split seed member (70b) through the second seed application step (S327) to form a split coil member (70a); and a second seed growth step (S329) of removing the upper portion of the divided coil member 70a formed through the second seed growth step S328 to form the first divided coil 71 so that the upper surface of the split coil member 70 is exposed, .

In the second seed growth step (S328) performed one time, a current application method in which a forward current for plating and a reverse current for plating are sequentially combined one or more times to apply a current The current density may vary). In the second seed growth step (S328) performed one time, a method using a plating inhibitor may be used. Also, in the second seed growth step (S328) performed one time, a method using a plating promoter can be used.

In the second surface removing step (S329), which is performed one time, the uppermost portion is cleaned and the interlayer insulating member 30a for forming the second interlayer insulating layer 32 can be stably fixed.

The insulating layer forming step (S34) of performing the second cycle is performed by forming an interlayer insulating member (32) for forming the second interlayer insulating layer (32) on the coil insulating member (20a) for forming the first divided insulating layer 30a. After the second electrode formation step S326, which is performed one time, is performed, the insulation layer formation step S34 is performed twice, and then the coil insulation member 20a for forming the first split insulation layer 24 is formed An interlayer insulating member 30a for forming the second interlayer insulating layer 32 is applied. The interlayer insulating member 30a is formed such that the first divided coil 71 embedded in the first divided insulating layer 24 is electrically connected to the second divided coil 72 built in the second divided insulating layer 26, .

In the inter-coil connection step (S33), which is performed twice, the connection electrode (90) is formed in the interlayer insulating member (30a) for forming the second interlayer insulating layer (32) A via forming step S331 for forming two of the second interlayer via holes 32a in the interlayer insulating member 30a to be applied through the layer forming step S34, (S332) for forming the third connection electrode (93) and the fourth connection electrode (94) on the second interlayer via hole (32a). Here, the via forming step S331 may use either a laser or an etchant.

The split coil forming step (S32), which is performed twice, is a step of forming a coil insulating member (26) for forming the second split insulating layer (26) on the interlayer insulating member (30a) for forming the second interlayer insulating layer 20a are laminated, a pair of the second divided coils 72 are embedded in the coil insulating member 20a for forming the second divided insulating layer 26. [ The divided coil forming step S32, which is performed in the second cycle, sequentially performs the second etching step S321, the second surface treatment step S325, and the second electrode forming step S326.

The second etching step (S321), which is performed twice, is a step of forming a coil insulating member (26) for forming the second divisional insulating layer (26) on the interlayer insulating member (30a) for forming the second interlayer insulating layer A second coating step (S322) of applying the second split insulation layer (20a) to the second split insulation layer (26), and removing a part of the coil insulation member (20a) And a second developing step (S324) for forming a split coil hole (221) through which the two split coils (72) are inserted. The coil insulating member (20a) for forming the second split insulating layer And a second exposure step (S323) of laminating the second mask (M2) and exposing the coil insulating member (20a) for forming the second split insulating layer (26). Accordingly, the second etching step (S321) performed twice may use either a laser or an etching solution.

The second surface treatment step (S325), which is performed twice, is performed by winding the coil insulating member (20a) through the divided coil hole (221) formed through the second etching step (S321) . Accordingly, the second divided coil 72 can be stably fixed in the divided coil hole 221.

In the second electrode formation step S326, which is performed twice, the second split coil 72 is formed in the split coil hole 221. [ The second electrode forming step S326 of performing the second cycle is a second seed applying step S327 for applying the split seed member 70b serving as the material of the second split coil 72 to the split coil hole 221 , A second seed growth step (S328) of growing the split seed member (70b) through the second seed application step (S327) to form a split coil member (70a), and a second seed growth step (S329) of removing the upper portion of the divided coil member 70a formed through the second seed growth step S328 to form the second divided coil 72 so that the upper part of the divided coil member 26 is exposed .

In the second seed growth step (S328) performed in the second cycle, a current application method in which a forward current for plating and a reverse current for plating are sequentially combined one or more times to apply a current The current density may vary for each application). Also, in the second seed growth step (S328) performed twice, a plating inhibitor may be used. Also, in the second seed growth step (S328) performed twice, a plating promoter may be used.

The finishing insulation member 40a for forming the finishing insulation layer 40 may be stably fixed by cleaning the uppermost portion in the second surface removing step S329 which is performed twice.

The insulating layer forming step S34 of performing the third turn is performed by forming a finishing insulating member 40a for forming the finishing insulating layer 40 on the coil insulating member 20a for forming the second split insulating layer 26, . The insulating layer forming step S34 is performed three times. The coil insulating member 20a for forming the second split insulating layer 26 is formed after the second electrode forming step S326, which is performed twice, A finishing insulating member 40a for forming the finishing insulating layer 40 is applied. Here, the finishing insulating member 40a can prevent the second divided coil 72 from being exposed.

The inter-coil connection step (S33), which is carried out three times, forms the driving electrode (80) on the finishing insulating member (40a), and the finishing step is performed through the insulating layer forming step (S34) A via forming step S331 of forming an insulating member 40a through the first driving via hole 41 and the second driving via hole 42 and the first driving via hole 42 formed through the via forming step S331, (S332) for forming the first driving electrode (81) and the second driving electrode (82) on the first driving via hole (41) and the second driving via hole (42), respectively. Here, the via forming step S331 may use either a laser or an etchant.

3 to 5, the shake correction coil unit according to the third embodiment of the present invention includes a bottom layer 10 forming a bottom, an insulating layer stacked on the bottom layer 10, And a driving coil 50 connected to the insulating layer and embedded in the insulating layer.

The insulating layer according to the third embodiment of the present invention includes a first front insulating layer 23 stacked on the bottom layer 10 and a first interlayer insulating layer 23 stacked on the first front insulating layer 23 31, a second front insulating layer 25 stacked on the first insulating interlayer 31, a second interlayer insulating layer 32 stacked on the second front insulating layer 25, A first interlayer insulating layer 24 laminated on the two-layer insulating layer 32; a third interlayer insulating layer 33 laminated on the first divided insulating layer 24; And a finishing insulation layer 40 laminated on the second split insulation layer 26. The second divisional insulation layer 26 is formed on the second insulation layer 26, Here, the first front insulating layer 23, the second front insulating layer 25, the first divided insulating layer 24, and the second divided insulating layer 26 form a coil insulating layer 20 do.

The driving coil 50 according to the third embodiment of the present invention is inserted into the first front insulating layer 23 and extends from the first front central region 611 to the first front side And a front coil 60 inserted into the second front insulating layer 25 and including a second front coil 62 extending in a helical shape from the second front central region 621 toward the edge, A first divided coil 71 inserted into the first divided insulating layer 24 so as to be spaced apart from each other and extending in a spiral shape from each first divided central region 711 toward an edge, , A pair is inserted in the second split insulating layer 26 so as to correspond to a pair of the first split coils 71, and the second split central coil 721 is spirally wound from each second divided central region 721 toward the edge A split coil 70 that includes a second split coil 72 extending in the form of a first split insulating layer 72, A penetrating electrode 95 formed at an edge of the first front coil 62 and a penetrating electrode 95 formed at the edge of the first front coil 62 and a second penetrating electrode 95 formed on the first interlayer insulating layer 31 and between the second interlayer insulating layer 32 and the third interlayer insulating layer 33 And a pair of first split coils 71 and a pair of second split coils 71, which are inserted into the first front coil 61, the second front coil 62, the penetrating electrode 95, And a driving electrode 80 inserted in the finishing insulating layer 40 and connected to the pair of second divided coils 72, respectively. Here, the driving electrodes 80 are respectively exposed on the finishing insulating layer 40 to apply power.

Here, a front coil hole 211 through which the first front coil 61 is inserted is formed in the first front insulating layer 23. The second front insulating layer 25 is also formed with a front coil hole 211 through which the second front coil 62 and the penetrating electrode 95 are inserted and a through via hole 30b. In addition, the first interlayer insulating layer 31 is formed with two first interlayer via holes 31a through which the connection electrodes 90 are inserted. In addition, the second interlayer insulating layer 32 is formed with two second interlayer-formed via holes 32a through which the connecting electrodes 90 are inserted. In addition, the third interlayer insulating layer 33 is formed with two third interlayer-formed via holes 33a through which the connecting electrodes 90 are inserted. The first split insulation layer 24 is formed with a divided coil hole 221 through which the first divided coil 71 is inserted. A split coil hole 221 through which the second split coil 72 is inserted is also formed in the second split insulating layer 26. A first driving via hole 41 and a second driving via hole 42 through which the driving electrode 80 is inserted are formed in the finish insulating layer 40, respectively.

At this time, the connection electrode 90 is inserted into any one of the first interlayer via holes 31a and the second interlayer via hole 32a, and is connected to the first interlayer via hole 32a via the penetrating electrode 95, A first connection electrode 91 for connecting one end of the pair of first split coils 71 to one end of one of the pair of first split coils 71 and a second connection electrode 91 for being inserted and supported in the other of the first interlayer via holes 31a A sixth connection electrode 96 connecting the other end of the first front coil 61 and one end of the second front coil 62 and a second connection electrode 96 inserted into and supported by the other of the second interlayer via holes 32a, A second connection electrode 92 connecting the other end of the second front coil 62 to one end of the other one of the pair of first split coils 71 and a second interconnection electrode 92 connecting one end of the third interlayer via hole 33a So that one end of one of the pair of first divided coils 71 and one end of one of the pair of second divided coils 72 And the other end of the other one of the pair of first divided coils 71 and the other end of the other of the pair of the first divided coils 71. [ And a fourth connecting electrode 94 connecting one end of the other one of the coils 72.

Accordingly, the first front coil 61, the second front coil 62, the first divided coil 71 and the second divided coil 72 are electrically connected to the penetrating electrode 95 and the connecting electrode 90 ) And the driving electrode (80).

In the third embodiment of the present invention, the helical directions of the pair of first divided coils 71 may be formed opposite to each other. Although not shown, the helical directions of the pair of first divided coils 71 may be formed to be equal to each other.

The spiral direction of the first front coil 61 or the second front coil 62 may be formed by connecting one of the pair of first divided coils 71 and the pair of second divided coils 72, Direction. Although not shown, the spiral direction of the first front coil 61 or the second front coil 62 may be any one of a pair of the first divided coil 71 and the pair of second divided coils 72 As shown in FIG.

The spiral direction of the first front coil 61 may be opposite to the spiral direction of the second front coil 62. Although not shown, the spiral direction of the first front coil 61 may be the same as the spiral direction of the second front coil 62.

According to the third embodiment of the present invention, the spiral direction can be changed in various forms by combining the spiral directions. Then, the magnetic flux due to the electromagnetic force is amplified or canceled, so that the sensitivity of the magnetic flux according to the change in the position of the permanent magnet 130 described later at the center of the Hall sensor described later can be improved.

A method of manufacturing a shake correction coil unit according to a third embodiment of the present invention includes the steps of forming a base layer B on a base B, A floor surface processing step S2 for surface-treating the bottom member 10a through the bottom forming step S1 for enhancing adhesion strength; a bottom surface forming step S1 for applying a bottom member 10a; A divided coil 70 is disposed on the insulating member so as to be spaced apart from the front coil 60 in a state where a pair of the front coil 60 and the pair of front coils 60 are spaced apart from each other while an insulating member for forming an insulating layer is laminated on the member 10a. (S3) for embedding a driving coil (50) including the driving coil (50) in the insulating member, and a shape cutting step (S3) for cutting the bottom member (10a) and the insulating member S4), and prior to the drive coil forming step (S3) A repetitive control step (S10) of determining a working order of the driving coil forming step (S3) corresponding to the base coil (50), and a repetitive finishing step of selecting whether to end the working order according to the repetitive controlling step And further includes step S11. Here, the bottom surface treatment step S2 may surface-treat the bottom member 10a in the oxygen plasma region.

The method of manufacturing a camera shake correction coil unit according to the third embodiment of the present invention includes a base preparing step S6 for positively positioning a base B on which the bottom member 10a is stacked, (S7) for surface-treating the base (B) to enhance the adhesion of the base (B). Here, the base surface treatment step (S7) may surface-treat the base (B) in a hexafluoro-sulfur (SF6) plasma region.

The method of manufacturing the camera shake correcting coil unit according to the third embodiment of the present invention is characterized in that the base B is separated from the bottom member 10a between the shape cutting step S4 and the repeated finishing step S11 , The volume of the finished shake correction coil unit can be reduced and the base B can be prevented from being damaged in the shape cutting step S4.

The method for manufacturing the shake correction coil unit according to the third embodiment of the present invention may further include a base cleaning step S9 for surface-treating the base B separated from the bottom member 10a. The base B can be reused in the base preparation step S6 by passing through the base separation step S8 or the base cleaning step S9. Here, the base cleaning step S9 may surface-treat the base B in a hexafluoro-sulfur (SF6) plasma region.

The manufacturing method of the camera shake correcting coil unit according to the third embodiment of the present invention further includes a packaging step S5 of packaging the shake correcting coil unit completed by cutting through the shape cutting step S4 .

Here, in the driving coil forming step S3, the driving coil 50 may be formed in the insulating member according to the third embodiment of the present invention. Accordingly. The driving coil 50 includes a first front coil 61 extending in a spiral shape from the first front central region 611 toward the edge and a second front coil 61 extending from the first front central region 611 to the first front coil 61, A second front coil 62 extending in a helical shape from the second front central region 621 toward the edge and a second front coil 62 extending from the second front central region 621 in a state where the pair of the front coils 62 are separated from the second front coil 62, A first divided coil 71 extending in a spiral shape from the region 711 toward the edge and a second divided coil 71 extending in the direction of the edge from the first divided coil 71 in a state in which a pair is divided to correspond to the pair of first divided coils 71, A second split coil 72 extending in a helical shape extending from each second divided central region 721 toward an edge thereof and a penetrating electrode 95 formed at an edge of the second front coil 62, And a pair of the first front coil 61, the second front coil 62, and the penetrating electrode 95, A connecting electrode 90 for connecting the first divided coil 71 and the pair of second divided coils 72 of the first divided coil 72 to each other, 80).

Then, the repetitive control step S10 includes two steps of forming a front coil (S31), two divided coil forming steps (S32), four insulating layer forming steps (S34), four inter- S33). More specifically, the driving coil forming step (S3) includes a front coil forming step (S31) performed one time and an insulating layer forming step (S31) performed one time S34), a coil connection step S33 performed one time, a front coil forming step S31 performed two times, an insulating layer forming step S34 performed two times, and a second round (S33), a divided coil forming step (S32) performed one time, an insulating layer forming step (S34) performed three times, a coil connecting step (S33) performed three times, , A divided coil forming step (S32) performed twice, an insulating layer forming step (S34) performed four times, and a coil connecting step (S33) performed four times.

In the step of forming the front coil (S31), which is performed once, the coil insulation member (20a) for forming the first front insulation layer (23) is laminated on the bottom member (10a) The first front coil 61 is embedded in the coil insulation member 20a to form the first front coil 61 and the second front coil 61. [ The front coil forming step S31, which is performed in one cycle, sequentially performs the first etching step S311, the first surface treatment step S315, and the first electrode forming step S316.

The first etching step (S311), which is performed one time, includes a first coating step (S312) of applying a coil insulating member (20a) for forming the first front insulating layer (23) to the bottom member (10a) A portion of the coil insulating member 20a for forming the first front insulating layer 23 is partially removed to insert the first front coil 61 so that the front coil hole And a first development step (S314) of forming a first front insulating layer (231) through a first insulating layer (211), wherein a first mask (M1) is laminated on a coil insulating member (20a) And a first exposure step (S313) of exposing the coil insulating member 20a for forming the insulating layer 23. [ Accordingly, either the laser or the etchant may be used in the first etching step S311 performed one time.

The first surface treatment step (S315), which is performed one time, includes a step of forming a coil insulating member (20a) having the front coil hole (211) formed through a first etching step (S311) Surface treatment. In the first surface treatment step S315, the coil insulating member 20a having the front coil hole 211 formed therein may be surface-treated in an oxygen plasma region. Accordingly, the first front coil 61 can be stably fixed in the front coil hole 211.

In the first electrode formation step S316, which is performed one time, the first front coil 61 is formed in the front coil hole 211. [ The first electrode forming step S316 of performing the first round of coating is a first seed applying step S317 of applying a front seed material 60b to be the material of the first front coil 61 to the front coil hole 211 A first seed growth step S318 of growing the front seed member 60b through the first seed applying step S317 to form a front coil member 60a; Removing the upper portion of the front coil member 60a formed through the first seed growth step S318 so that the upper surface of the front coil member 23 is exposed to form the first front coil 61 .

In the first seed growth step (S318) performed one time, a current application method in which a forward current for plating and a reverse current for plating are sequentially added one or more times to apply a current The current density may vary). Also, in the first seed growth step (S318) performed one time, a method using a plating inhibitor can be used. Also, in the first seed growth step (S318) performed one time, a method using a plating promoter may be used.

In the first surface removing step (S319), which is performed in a single cycle, the uppermost portion is cleaned, and the interlayer insulating member 30a for forming the first interlayer insulating layer 31 can be stably fixed.

The insulating layer forming step S34 of performing the one-time insulating layer forming step is performed by forming an interlayer insulating member 31 for forming the first interlayer insulating layer 31 on the coil insulating member 20a for forming the first front insulating layer 23 30a. The insulating layer forming step S34 is performed in a single cycle. After the first electrode forming step S316 is performed, the coil insulating member 20a for forming the first front insulating layer 23 is formed An interlayer insulating member 30a for forming the first interlayer insulating layer 31 is applied. Here, the interlayer insulating member 30a is formed such that the front coil 60 embedded in the first front insulating layer 23 is electrically connected to the second front coil 62, which is embedded in the second front insulating layer 25, To be insulated from the penetrating electrode (95).

In the inter-coil connection step (S33), which is performed one time, the connecting electrode (90) is formed in the interlayer insulating member (30a) for forming the first interlayer insulating layer (31) A via forming step S331 for forming two first interlayer via holes 31a through the interlayer insulating member 30a to be applied through the layer forming step S34 and the second forming step S331 for forming through the via forming step S331, (S332) for forming the first connection electrode (91) and the sixth connection electrode (96) on the first interlayer via hole (31a). Here, the via forming step S331 may use either a laser or an etchant.

The front coil forming step S31 of performing the second turn is a step of forming a coil insulating member 30 for forming the second front insulating layer 25 on the interlayer insulating member 30a for forming the first interlayer insulating layer 31 The second front coil 62 and the penetrating electrode 95 are embedded in the coil insulating member 20a for forming the second front insulating layer 25 in a state in which the first front coil 20a is laminated. The front coil forming step S31, which is performed in the second cycle, sequentially performs the first etching step S311, the first surface treatment step S315, and the first electrode forming step S316.

The first etching step S311 is performed twice in order to form a coil insulation member for forming the second front insulating layer 25 on the interlayer insulating member 30a for forming the first interlayer insulating layer 31 A coil insulating member 20a for forming the second front insulating layer 25 so that the second front coil 62 and the penetrating electrode 95 are inserted; And a first developing step of passing through the front coil hole 211 and the through via hole 30b through which the second front coil 62 and the penetrating electrode 95 are inserted, A first mask M1 is laminated on a coil insulating member 20a for forming a front insulating layer 25 and a coil insulating member 20a for exposing a coil insulating member 20a for forming the second front insulating layer 25, And an exposure step (S313). Accordingly, either the laser or the etching solution may be used in the first etching step S311 performed twice.

The first surface treatment step (S315), which is performed in the second cycle, includes a step of performing a first etching step (S311) performed twice in order to strengthen the adhesive force so that the front coil hole (211) and the through via hole The insulating member 20a is surface-treated. The second front coil 62 and the penetrating electrode 95 can be stably fixed in the front coil hole 211 and the through via hole 30b.

In the first electrode forming step S316, which is performed twice, the second front coil 62 and the penetrating electrode 95 are formed in the front coil hole 211 and the through via hole 30b. The first electrode forming step S316 is performed twice in order to form the front seed 61 as the material of the second front coil 62 and the penetrating electrode 95 in the front coil hole 211 and the through via hole 30b. A first seed applying step S317 for applying a member 60b to the front seed member 60a and a second seed applying step S317 for growing the front seed member 60b through the first seed applying step S317 to form the front coil member 60a, The upper surface of the front coil member 60a is removed by removing the upper surface of the front coil member 60a formed through the first seed growth step S318 so that the upper surface of the second front insulating layer 25 is exposed, And a first surface removing step (S319) of forming the penetrating electrode (95).

In the first seed growth step (S318) performed in the second cycle, a current application method in which a forward current for plating and a reverse current for plating are sequentially combined one or more times to apply a current The current density may vary). In addition, in the first seed growth step (S318) performed twice, a method using a plating inhibitor can be used. Also, in the first seed growth step (S318) performed twice, a plating promoter may be used.

In the first surface removing step (S319), which is performed twice, the uppermost portion is cleaned, and the interlayer insulating member 30a for forming the second interlayer insulating layer 32 can be stably fixed.

The insulating layer forming step S34 of performing the second cycle is a step of forming an insulating interlayer insulating member for forming the second interlayer insulating layer 32 on the coil insulating member 20a for forming the second front insulating layer 25 30a. The insulating layer forming step S34 of performing the second cycle is performed after the first electrode forming step S316 is performed twice and then the coil insulating member 20a for forming the second front insulating layer 25 is formed An interlayer insulating member 30a for forming the second interlayer insulating layer 32 is applied. The interlayer insulating member 30a may be formed in such a manner that the front coil 60 and the penetrating electrode 95 embedded in the second front insulating layer 25 are electrically connected to the first So as to be insulated from the divided coil 71.

In the inter-coil connection step (S33), which is performed twice, the connection electrode (90) is formed in the interlayer insulating member (30a) for forming the second interlayer insulating layer (32) A via forming step S331 for forming two of the second interlayer via holes 32a in the interlayer insulating member 30a to be applied through the layer forming step S34, (S332) for forming the first connection electrode 91 and the second connection electrode 92 on the second interlayer via-holes 32a of the first interlayer insulating layer 32a. Here, the via forming step S331 may use either a laser or an etchant.

The split coil forming step S32 of performing the one-time division is performed by forming a coil insulating member (not shown) for forming the first split insulating layer 24 on the interlayer insulating member 30a for forming the second interlayer insulating layer 32 A pair of the first divided coils 71 are embedded in the coil insulating member 20a for forming the first divided insulating layer 24 in a state in which the first divided coils 71a, The divided coil forming step S32, which is performed in one cycle, sequentially performs the second etching step S321, the second surface treatment step S325, and the second electrode forming step S326.

The second etching step S321 is performed in a one-time sequence by forming a coil insulating member (not shown) for forming the first divisional insulating layer 24 on the interlayer insulating member 30a for forming the second interlayer insulating layer 32 A second coating step (S322) of applying the first divisional coil (20a) to the first divisional coil (71) and removing a part of the coil insulation member (20a) for forming the first divisional insulation layer (24) And a second development step (S324) of forming a split coil hole (221) into which the one-piece split coil (71) is inserted. The coil insulation member (20a) for forming the first split insulation layer And a second exposure step (S323) of laminating the second mask (M2) and exposing the coil insulation member (20a) for forming the first split insulation layer (24). Accordingly, either the laser or the etching solution can be used in the second etching step (S321) performed one time.

In the second surface treatment step S325, which is carried out once, the surface of the coil insulating member 20a through which the divided coil hole 221 formed through the second etching step is subjected to surface treatment . Accordingly, the first divided coil 71 can be stably fixed in the divided coil hole 221.

The third insulating layer forming step S34 is performed by forming an interlayer insulating member 33 for forming the third interlayer insulating layer 33 on the coil insulating member 20a for forming the first divided insulating layer 24 30a. After the second electrode formation step S326, which is performed one time, is performed, the insulating layer forming step S34 is performed three times. Then, the coil insulating member 20a for forming the first split insulating layer 24 An interlayer insulating member 30a for forming the third interlayer insulating layer 33 is applied. The interlayer insulating member 30a is formed such that the first divided coil 71 embedded in the first divided insulating layer 24 is electrically connected to the second divided coil 72 built in the second divided insulating layer 26, .

In the inter-coil connection step (S33), which is performed three times, the connection electrode (90) is formed in the interlayer insulating member (30a) for forming the third interlayer insulating layer (33) A via forming step S331 for forming two third interlayer via-holes 33a through the interlayer insulating member 30a to be applied via the layer forming step S34, and the via forming step S331 for forming via- (S332) for forming the third connection electrode (93) and the fourth connection electrode (94) on the third interlayer via-holes (33a). Here, the via forming step S331 may use either a laser or an etchant.

The divided coil forming step S32 of performing the second rotation is a step of forming a coil insulation member for forming the second divisional insulating layer 26 in the interlayer insulating member 30a for forming the third interlayer insulating layer 33 20a are laminated, a pair of the second divided coils 72 are embedded in the coil insulating member 20a for forming the second divided insulating layer 26. [ The divided coil forming step S32, which is performed in the second cycle, sequentially performs the second etching step S321, the second surface treatment step S325, and the second electrode forming step S326.

The second surface treatment step (S325), which is performed twice, includes a coil insulating member (20a) through which the divided coil hole (221) formed through the second etching step (S321), which is performed twice in order to strengthen the adhesive force, Surface treatment. Accordingly, the second divided coil 72 can be stably fixed in the divided coil hole 221.

In the second electrode formation step S326, which is performed twice, the second split coil 72 is formed in the split coil hole 221 through the second etching step S321 which is performed twice. The second electrode forming step S326 includes a second seed applying step S327 of applying a split seed member 70b serving as a material of the second divided coil 72 to the divided coil hole 221, A second seed growth step S328 for growing the split seed member 70b through the second seed application step S327 to form a split coil member 70a and a second seed growth step And a second surface removing step S329 for removing the upper portion of the divided coil member 70a formed through the second seed growing step S328 so that the second divided coil 72 is formed.

In the second seed growth step (S328) performed in the second cycle, a current application method in which a forward current for plating and a reverse current for plating are sequentially combined one or more times to apply a current The current density may vary). In the second seed growth step (S328) performed twice, a plating inhibitor may be used. Also, in the second seed growth step (S328) performed twice, a plating promoter may be used.

The insulating layer forming step S34 of performing the fourth turn is performed by forming a finishing insulating member 40a for forming the finishing insulating layer 40 on the coil insulating member 20a for forming the second split insulating layer 26 Laminated. After the second electrode formation step S326, which is performed in the second step, is performed, the insulation layer formation step S34 is performed in the fourth cycle. Then, the coil insulation member 20a for forming the second division insulation layer 26 A finishing insulating member 40a for forming the finishing insulating layer 40 is applied. Here, the finishing insulating member 40a can prevent the second divided coil 72 from being exposed.

The inter-coil connection step (S33), which is performed four times, forms the driving electrode (80) on the finishing insulating member (40a), and finishes by applying the fourth insulating layer forming step (S34) A via forming step S331 of forming an insulating member 40a through the first driving via hole 41 and the second driving via hole 42 and the first driving via hole 42 formed through the via forming step S331, (S332) for forming the first driving electrode (81) and the second driving electrode (82) on the first driving via hole (41) and the second driving via hole (42), respectively. Here, the via forming step S331 may use either a laser or an etchant.

Hereinafter, a camera-shake correction actuator according to an embodiment of the present invention will be described. FIG. 6 is a perspective view showing an actuator for correcting camera shake according to an embodiment of the present invention, and FIG. 7 is a front view of FIG.

1 to 7, the camera shake correcting actuator according to an embodiment of the present invention moves the optical lens module or the image sensor built in the camera according to the camera shake. The optical lens module or the image sensor A permanent magnet 130 disposed on the bottom of the permanent magnet 130 and adapted to move along the horizontal plane of the permanent magnet 130 with respect to a virtual plane parallel to the bottom of the permanent magnet 130; And an image sensor disposed between the permanent magnet (130) and the shake sensor (160) so that the optical lens module or the image sensor is horizontally moved in the virtual plane Shake correction coil unit 110 according to the present invention for generating a shaking electromagnetic force and a shake drive unit 120 for applying power to the shake correction coil unit 110. [

Then, the shaking motion driving unit 120 may horizontally move the optical lens module or the image sensor built in the camera in a plane perpendicular to the direction in which the image is incident, corresponding to the shaking of the camera.

Here, the shaking motion correcting coil unit 110 may be constituted by the shaking motion correcting coil unit according to any one of the first to third embodiments of the present invention. The shake correction coil unit 110 may be manufactured by the manufacturing method of the shake correction coil unit according to any one of the first to third embodiments of the present invention.

The camera shake correction actuator according to an embodiment of the present invention further includes a drive control unit 180 for controlling the shake drive unit 120 through a signal transmitted from the shake hole sensor 160. [ The drive control unit 180 can accurately control the change of the position of the permanent magnet 130. [

The camera shake correcting actuator according to an embodiment of the present invention includes a focus connector coil 140 disposed on a side surface of the permanent magnet 130 and generating focal electromagnetic force to be moved up and down in the virtual plane, A focus driving unit 150 for applying power to the permanent magnet 130 and a permanent magnet 130 disposed on the bottom of the permanent magnet 130 or on a side surface of the permanent magnet 130, And a focus hole sensor 170 for sensing a change in magnetic flux due to the lift movement. At this time, the drive control unit 180 not only controls the shake drive unit 120 through a signal transmitted from the shake hall sensor 160, but also controls the shake drive unit 120 through a signal transmitted from the focus hole sensor 170, (150).

Then, in response to the camera shake, the optical lens module or the image sensor built in the camera can be vertically moved with respect to a plane perpendicular to the direction in which the image is incident.

The bottom center of the permanent magnet 130 is aligned with the center of the shake correction coil unit 110 and the center of the shake hole sensor 160 in the shake correction actuator according to an embodiment of the present invention. The bottom center of the permanent magnet 130 is aligned with the center of the shake correction coil unit 110 and the center of the focus hole sensor 170. Accordingly, the magnetic flux due to the electromagnetic force is amplified or canceled in the shake correction coil unit 110, and the sensitivity of the magnetic flux according to the change of the position of the permanent magnet 130 at the center of the hall sensor can be improved.

According to the above-described camera shake correcting coil unit, the manufacturing method of the shake correcting coil unit, and the camera shake correcting actuator using the camera shake correcting coil unit, the position of the optical lens module or the image sensor in the camera shake correcting actuator is changed by the electromagnetic force, The size of the magnetic flux exerted on the Hall sensor for sensing the position of the permanent magnet 130 is reduced by the electromagnetic force by changing the position of the permanent magnet 130 when the position of the permanent magnet 130 is changed, The motion control performance according to the motion can be improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Modify or modify the Software.

10a: bottom member 10: bottom layer 20a: coil insulation member
20: coil insulation layer 21: front insulation layer 211: front coil hole
22: split insulating layer 221: split coil hole 23: first front insulating layer
24: first split insulating layer 25: second front insulating layer 26: second split insulating layer
301: interlayer insulating member 30: interlayer insulating layer 31: first interlayer insulating layer
32: second interlayer insulating layer 33: third interlayer insulating layer 30a: interlayer via hole
30b: Through via hole 30c: First connection via hole 30d: Second connection via hole
31a: first interlayer via hole 32a: second interlayer via hole 33a: third interlayer via hole
40a: Finishing insulating member 40: Finishing insulating layer 41: First driving via hole
42: second driving via hole 60a: front coil member 60b: front seed member
60: front coil 61: first front coil 62: second front coil
63: first coil connecting portion 601: front center region 611: first front center region
621: second front central region 70a: split coil member 70b: split seed member
70: split coil 71: first split coil 72: second split coil
701: divided center area 711: first divided center area 721: second divided center area
80: Driving electrode 81: First driving electrode 82: Second driving electrode
90: connecting electrode 91: first connecting electrode 92: second connecting electrode
93: third connecting electrode 94: fourth connecting electrode 96: sixth connecting electrode
97: seventh connecting electrode 98: eighth connecting electrode 95: penetrating electrode
M1: first mask M2: second mask B: base
110: camera-shake correction coil unit 120: camera-shake drive unit 130: permanent magnet
140: focus correction coil 150: focus driving unit 160: camera shake hall sensor
170: focus hole sensor 180: drive control unit
S1: bottom forming step S2: bottom surface treating step S3: driving coil forming step
S31: Front coil forming step S311: First etching step S312: First coating step
S313: first exposure step S314: first development step S315: first surface treatment step
S316: First electrode formation step S317: First seed application step S318: First seed growth step
S319: First surface removing step S32: Subdivision coil forming step S321: Second etching step
S322: second coating step S323: second exposure step S324: second developing step
S325: Second surface treatment step S326: Second electrode formation step S327: Second seed application step
S328: first seed growing step S329: second surface removing step S33:
S331: via forming step S332: connection electrode forming step S34: insulating layer forming step
S4: shape cutting step S5: packaging step S6: base preparation step
S7: Base surface treatment step S8: Base separation step S9: Base cleaning step
S10: Repeat control step S11: Repeat finishing step

Claims

A bottom forming step of laminating a bottom member for forming a bottom layer on the base;
A bottom surface treatment step of surface-treating the bottom member having undergone the bottom formation step for enhancing adhesion strength;
A driving coil including a divided coil arranged to be spaced apart from the front coil in a state where a pair of the front coil and the pair of front coils are spaced apart from each other in a state where an insulating member for forming an insulating layer is laminated on the bottom member, A drive coil forming step of embedding the drive coil; And
A shape cutting step of cutting the bottom member and the insulating member corresponding to the driving coil;
An iterative control step of determining a work order of the drive coil forming step corresponding to the drive coils before the drive coil forming step; And
And an iterative finishing step of selecting whether or not to end the work order according to the repetition control step,
Wherein the driving coil forming step is performed or the shape cutting step is performed according to the selection of the repeated finishing step.

The method according to claim 1,
Wherein the driving coil includes: a front coil extending in a spiral shape from a front central region to an edge; a first coil connecting portion formed in the front central region; A second coil connecting portion formed at an edge of one of the pair of split coils, and a second coil connecting portion extending from the center coil to the first coil connecting portion and the pair of split portions A connecting electrode for interconnecting the coil and the second coil connecting portion, and a driving electrode connected to the other one of the pair of divided coils and the second coil connecting portion, respectively,
Wherein the drive coil forming step comprises:
A front coil forming step of embedding the front coil and the first coil connecting part in a coil insulating member for forming the front insulating layer in a state that a coil insulating member for forming a front insulating layer is laminated on the bottom member;
Wherein a coil insulation member for forming a split insulation layer is formed on a coil insulation member for forming the front insulation layer, and a coil insulation member for forming the split insulation layer is formed by laminating a coil insulation member for forming a split insulation layer, A divided coil forming step of incorporating a coil connecting portion;
A coil insulation member for forming the front insulation layer and a coil insulation member for forming the division insulation layer are laminated or an interlayer insulation member for forming an interlayer insulation layer is laminated, An insulating layer forming step of laminating a finishing insulating member for forming a finishing layer on the insulating layer; And
And a coil connecting step of forming the connecting electrode on the interlayer insulating member or forming the driving electrode on the finishing insulating member,
Wherein in the repeated finishing step, the shape cutting step is performed by forming driving electrodes on the finishing insulating member.

The method according to claim 1,
Wherein the driving coil includes a front coil extending in a helical shape extending from a front central region to an edge of the front coil, and a pair of front coils spaced apart from the front coil, A first divided coil, a second divided coil, a first divided coil, and a second divided coil, wherein the first divided coil is divided into a first divided coil and a second divided coil, A connection electrode for connecting the front coil, the first split coil and the second split coil to each other, and a driving electrode connected to the pair of second split coils,
Wherein the drive coil forming step comprises:
A front coil forming step of embedding the front coil in a coil insulating member for forming the front insulating layer in a state where a coil insulating member for forming a front insulating layer is laminated on the bottom member;
Wherein a coil insulating member for forming the first split insulating layer is formed by laminating a coil insulating member for forming a first split insulating layer on a coil insulating member for forming the front insulating layer, A coil for forming the second divisional insulating layer in a state in which a coil insulation member for forming a second divisional insulation layer is layered on the coil insulation member for forming the first divisional insulation layer, A divided coil forming step of embedding a pair of the second divided coils into the insulating member;
And an interlayer insulating member for forming a first interlayer insulating layer and a second interlayer insulating layer are laminated between the coil insulating members, or a coil insulating member for forming the second divided insulating layer An insulating layer forming step of laminating a finishing insulating member; And
And a coil connecting step of forming the connecting electrode on the interlayer insulating member or forming the driving electrode on the finishing insulating member,
Wherein in the repeated finishing step, the shape cutting step is performed by forming driving electrodes on the finishing insulating member.

The method according to claim 1,
A first front coil extending in a spiral form from the first front center area toward the edge, a second front coil wound on the first front coil and extending in a spiral shape from the second front center area toward the edge, A first divided coil which is stacked on the second front coil in a state in which a pair of the divided coil is divided and which extends in a spiral shape from each first divided central region toward an edge; A second divided coil which is stacked on the first divided coil in a state where the pair of divided coils are divided so as to correspond to each other and extends in a spiral shape from each second divided central region toward an edge; A connection electrode connecting the first front coil, the second front coil, the penetrating electrode, a pair of the first sub-coils, and a pair of the second sub- And a drive electrode connected to each of the pair of second split coils,
Wherein the drive coil forming step comprises:
The first front coil is embedded in a coil insulating member for forming the first front insulating layer in a state where a coil insulating member for forming a first front insulating layer is laminated on the bottom member, A coil insulation member for forming a second front insulation layer is formed on the coil member for forming the second insulation layer, the coil insulation member for forming the second front insulation layer, A front coil forming step for embedding the front coil;
Wherein a coil insulating member for forming the first split insulating layer is formed by laminating a coil insulating member for forming a first divided insulating layer on a coil insulating member for forming the second front insulating layer, The second split insulation layer is formed in a state in which the first split coil is embedded or a coil insulation member for forming the second split insulation layer is formed on the coil insulation member for forming the first split insulation layer, A step of forming a pair of the second divided coils in a coil insulating member for the divided coil;
An insulating interlayer for forming a first interlayer insulating layer, a second interlayer insulating layer and a third interlayer insulating layer is laminated between the coil insulating members, or a coil insulating member for forming the second divided insulating layer An insulating layer forming step of laminating a finishing insulating member for forming a finishing layer; And
And a coil connecting step of forming the connecting electrode on the interlayer insulating member or forming the driving electrode on the finishing insulating member,
Wherein in the repeated finishing step, the shape cutting step is performed by forming driving electrodes on the finishing insulating member.

An image stabilization coil unit manufactured by the manufacturing method according to any one of claims 1 to 4.

A bottom layer forming a bottom;
A front insulating layer stacked on the bottom layer;
An interlayer insulating layer stacked on the front insulating layer;
A split insulating layer laminated on the interlayer insulating layer;
A finishing insulation layer laminated on the split insulation layer;
A front coil inserted into the front insulating layer and extending in a helical shape from the front central region toward the edge;
A first coil connecting portion inserted into the front center region in the front insulating layer;
A pair of split coils inserted into the split insulating layer so as to be spaced apart from each other and extending in a spiral shape from each divided central region toward an edge;
A second coil connecting portion inserted into an edge of one of the pair of split coils in the split insulating layer;
A connecting electrode inserted in the interlayer insulating layer and interconnecting the front coil, the first coil connecting portion, the pair of divided coils and the second coil connecting portion; And
And a driving electrode inserted in the finishing insulating layer and connected to the other one of the pair of divided coils and to the second coil connecting portion, respectively.

A bottom layer forming a bottom;
A front insulating layer stacked on the bottom layer;
A first interlayer insulating layer stacked on the front insulating layer;
A first split insulating layer laminated on the first interlayer insulating layer;
A second interlayer insulating layer stacked on the first divided insulating layer;
A second divisional insulating layer laminated on the second interlayer insulating layer;
A finishing insulation layer laminated on the second split insulation layer;
A front coil inserted into the front insulating layer and extending in a helical shape from the front central region toward the edge;
A first divided coil inserted in the first divided insulating layer so as to be spaced apart from each other and extending in a spiral shape from each first divided central region toward an edge thereof; A split coil including a pair of split coils inserted into the second split insulating layer so as to be spaced apart from each other and extending in a spiral shape from an edge of each second divided center region;
A connecting electrode inserted in the first interlayer insulating layer and the second interlayer insulating layer and interconnecting the front coil, a pair of the first divided coils and a pair of the second divided coils; And
And a driving electrode inserted in the finishing insulating layer and connected to the pair of second divided coils, respectively.

A bottom layer forming a bottom;
A first front insulating layer laminated on the bottom layer;
A first interlayer insulating layer stacked on the first front insulating layer;
A second front insulating layer laminated on the first interlayer insulating layer;
A second interlayer insulating layer stacked on the second front insulating layer;
A first split insulating layer laminated on the second interlayer insulating layer;
A third interlayer insulating layer stacked on the first divided insulating layer;
A second split insulating layer which is laminated on the third interlayer insulating layer;
A finishing insulation layer laminated on the second split insulation layer;
A first front surface coil inserted in the first front insulating layer and extending in a spiral form from the first front center area toward the edge; a second front surface coil inserted in the second front insulating layer, A front coil including a second front coil extending in the form of a front coil;
A first divided coil inserted in the first divided insulating layer so as to be spaced apart from each other and extending in a spiral shape from each first divided central region toward an edge thereof; A split coil including a pair of split coils inserted into the second split insulating layer so as to be spaced apart from each other and extending in a spiral shape from an edge of each second divided center region;
A penetrating electrode inserted into the second front insulating layer and formed at an edge of the second front coil;
And a second interlayer insulating layer interposed between the first front coil, the second front coil, the penetrating electrode, a pair of the first divided coils, and a second interlayer insulating layer interposed between the first interlayer insulating layer, A connecting electrode interconnecting the pair of second divided coils; And
And a driving electrode inserted in the finishing insulating layer and connected to the pair of second divided coils, respectively.

9. The method according to any one of claims 6 to 8,
Wherein the spiral direction of the front coil is formed to be identical to the spiral direction of any one of the pair of split coils.

9. The method according to any one of claims 6 to 8,
And the spiral directions of the pair of split coils are formed opposite to each other.

An image stabilization actuator for moving an optical lens module or an image sensor built in the camera according to camera shake,
A permanent magnet to which the optical lens module or the image sensor is coupled;
A shake hole sensor which is disposed on the bottom of the permanent magnet and senses a change in magnetic flux due to the horizontal movement of the permanent magnet with respect to a virtual plane parallel to the bottom of the permanent magnet;
The image pickup apparatus according to any one of claims 6 to 8, which is disposed between the permanent magnet and the shake hole sensor and generates a shaking electromagnetic force so that the optical lens module or the image sensor horizontally moves in the virtual plane Coil unit; And
And an electric shake drive unit for applying power to the shake correction coil unit.

12. The method of claim 11,
And a drive control unit for controlling the shake drive part through a signal transmitted from the shake hole sensor.

13. The method of claim 12,
A focus correction coil which is disposed on a side surface of the permanent magnet and generates focal electromagnetic force so as to be moved up and down in the virtual plane;
A focus driving unit for applying power to the focus correction coil; And
And a focus hole sensor which is spaced apart from the bottom of the permanent magnet or the side surface of the permanent magnet and detects a change in magnetic flux due to the lifting movement of the permanent magnet with respect to the virtual plane,
The drive control unit includes:
Wherein the control unit controls the shake drive unit through a signal transmitted from the shake hall sensor, and controls the focus drive unit through a signal transmitted from the focus hole sensor.

12. The method of claim 11,
Wherein the bottom center of the permanent magnet coincides with the center of the camera-shake correction coil unit and the center of the camera-shake hole sensor.