KR101790343B1 - Substrate for inspecting a production line of flat panel display, ispection system and method using the same - Google Patents

Abstract

The present invention relates to a substrate for inspection of a manufacturing line of a flat panel display device for collecting information on the state of equipment in a manufacturing line, and an inspection system and method using the same, wherein the inspection substrate includes a plurality of sensors ; A circuit board mounted on the substrate; And a battery mounted on the substrate and supplying power to the circuit board. The sensors, the circuit board, and the substrate on which the battery is mounted are put into the equipment of the FPD manufacturing line. The circuit board transmits information on equipment of the FPD manufacturing line collected through the sensors to the outside through a wired / wireless interface.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for inspecting a manufacturing line of a flat panel display,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for inspection of a manufacturing line of a flat panel display device for collecting information on the state of equipment of a manufacturing line, and an inspection system and method using the same.

Various flat panel displays (hereinafter referred to as "FPD") capable of reducing weight and volume, which are disadvantages of cathode ray tubes, have been developed. Such a flat panel display device includes a liquid crystal display (LCD), a plasma display panel (PDP), an electroluminescence element including an inorganic electroluminescence element and an organic light emitting diode (OLED) Device, EL, a field emission display, and an electrophoresis display.

The FPD manufacturing line includes various equipment for processing processes such as cleaning, drying, thin film coating, thin film deposition, exposure, and development. If the equipment of the FPD manufacturing line malfunctions or operates out of the optimal process range, it causes the display panel to fail. Therefore, if a problem occurs in the manufacturing equipment, the operation state of the manufacturing equipment can be measured and analyzed using the measuring machine. For example, there is a vibration meter for measuring vibration of a coater or an exposure apparatus. The vibration measuring instrument is composed of a measuring module, a cable, and a vibration sensor. The cable electrically connects the vibration sensor and the measurement module, and the vibration sensor is attached to the manufacturing equipment. However, these instruments can not measure the operating conditions inside the equipment due to the cable. Also, since the length of the cable is limited and the movement of the meter is not free, the measurementable space is narrow.

In order to accurately understand the operation status of the equipment, it is necessary to know the internal state of the substrate felt by the substrate of the display panel. However, the existing equipment measurement method could not measure the internal state of the equipment. Therefore, there is no space limitation in order to reduce the manufacturing process defects, and a method for measuring the operation state inside the equipment is desperately required.

The present invention provides a substrate for inspection of a manufacturing line of a flat panel display device which is free from a limitation in a measurement space and can measure the internal state of the substrate felt by the substrate of the display panel, and an inspection system and method using the same.

The inspection substrate of the present invention includes a plurality of sensors mounted on a substrate so as to be dispersedly disposed; A circuit board mounted on the substrate; And a battery mounted on the substrate and supplying power to the circuit board. The sensors, the circuit board, and the board on which the battery is mounted are put into equipment of the FPD manufacturing line or moved along the FPD manufacturing line. The circuit board transmits information on equipment of the FPD manufacturing line collected through the sensors to the outside through a wired / wireless interface.
The circuit board includes a signal transmitter for transmitting a signal received through the wired / wireless interface to the outside, a sensor signal receiver for converting an output signal of the sensors into digital data, A memory connected to the control unit, and a power switching unit for supplying power of the battery to the signal transmitter, the sensor signal receiver, the controller, and the memory when light is received.
The inspection board of the present invention may further include a transparent protective layer covering the sensors, the circuit board, and the battery.
The thickness of the inspection substrate may be between 1.6 mm and 3.8 mm.
The substrate may be either a glass substrate or an acrylic substrate.
The substrate may include an engraved portion of a predetermined size, and the circuit board and the battery may be disposed on the engraved portion of the substrate.
Each of the sensors may include at least one of a vibration sensor, a displacement sensor, a flow sensor, a temperature sensor, a magnetic sensor, a capacitance sensor, and a pressure sensor.
The inspection system of the present invention includes a plurality of sensors mounted on a substrate so as to be dispersedly disposed, a circuit board mounted on the substrate, and a battery mounted on the substrate to supply power to the circuit board, An inspection board that is inserted into the equipment of the FPD manufacturing line or moves along the FPD manufacturing line to collect information on the equipment of the FPD manufacturing line; And a host system connected to the inspection board through a wired / wireless interface and analyzing a signal received from the wired / wireless interface to determine whether the FPD manufacturing line has equipment abnormality.
The inspection system of the present invention may further comprise a computer for controlling the equipment of the FPD production line, and the host system may transmit an alarm signal to the computer according to the signal analysis result.
An inspection method of the present invention is an inspection method comprising an inspection board including a plurality of sensors mounted on a substrate so as to be dispersedly arranged, a circuit board mounted on the board, and a battery for supplying power to the circuit board, Collecting information on the equipment of the FPD manufacturing line by inputting it into the equipment of the manufacturing line or moving along the FPD manufacturing line; And analyzing the information collected by the inspection board to determine whether the FPD manufacturing line is equipped with equipment or not.
The inspection method of the present invention may further include transmitting an alarm signal to a computer controlling equipment of the FPD manufacturing line according to the information analysis result.

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The present invention introduces a substrate for inspection having a thickness similar to that of the FPD display panel and having a function of signal collection and signal transmission to the FPD manufacturing line. As a result, the present invention can measure the internal state of the equipment, which is not limited by the measurement space, and can be sensed by the substrate of the display panel.

1 is a view showing a manufacturing line inspection system of a flat panel display according to an embodiment of the present invention.
FIG. 2 is a detailed circuit board configuration of the test board shown in FIG. 1. FIG.
3 is a cross-sectional view showing a cross section of a test substrate according to a first embodiment of the present invention.
4 is a cross-sectional view showing a cross section of a test board according to a second embodiment of the present invention.
5 is a cross-sectional view showing a cross section of a test board according to a third embodiment of the present invention.
6 is a flowchart illustrating a manufacturing line inspection method of a flat panel display according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Like reference numerals throughout the specification denote substantially identical components. In the following description, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

Referring to FIG. 1, a manufacturing line inspection system for a flat panel display according to an exemplary embodiment of the present invention includes a test substrate 100 and a host system 200.

The inspection substrate 100 includes a substrate, a plurality of sensors 10 formed on the substrate, a circuit board 20 formed on the substrate, a battery 30 mounted on the substrate, and the like, And transmits information collected from the sensors to the external host system 200 via the wired / wireless interface.

Sensors 10 formed on the test substrate 100 are dispersed and arranged on the test substrate 100. The sensors 10 include at least one of a vibration sensor (acceleration sensor), a displacement sensor, a flow sensor, a temperature sensor, a magnetic sensor, a capacitance sensor, and a pressure sensor, have. The types of the sensors 10 can be selected according to inspection items of the FPD manufacturing line. Equipment in the FPD manufacturing line includes process equipment such as cleaning equipment, drying equipment, thin film coating equipment, thin film deposition equipment, exposure equipment, development equipment, and transport equipment such as conveying robots and conveyors.

The test substrate 100 is fabricated to a thickness equal to or less than the thickness of the display panel substrate of the FPD. The inspection board 100 is installed in a specific equipment causing a defect in the FPD manufacturing line at a predetermined time interval by the operator or when a defect is found in the manufacturing process of the display panel, Move along the line and measure the operating condition of each of the equipment.

The host system 200 analyzes frequency, amplitude, and the like of a signal received from the test board 100 through a wired / wireless interface and compares the analysis result with a preset reference value to determine whether the device is abnormal or a device malfunction point . Here, the reference value is stored in advance in the host system 200 as a frequency characteristic and an amplitude characteristic obtained when each of the devices constituting the FPD manufacturing line operates in the optimum operation state. In another embodiment, the host system 200 analyzes the frequency, amplitude, and the like of a signal received from the test board 100 via a wired / wireless interface and compares the analysis result with previously received signals to determine whether the equipment is abnormal And equipment failure point can be judged. The equipment failure point means a device position determined to have a high possibility of abnormal operation due to a characteristic different from a preset reference value or a previous signal characteristic.

The host system 200 stores the results of the analysis of the received signals, the abnormality of each of the devices, the device abnormality points, and the like in the database to manage the device inspection history. The host system 200 manages the vibration of the equipment, the displacement of the equipment, the flow rate of the equipment, the temperature of the equipment, the capacitance of the equipment, the pressure in the equipment, and the like in a database by inspection items for each of the equipment. Further, the host system 200 can analyze vibration, displacement, and the like of the factory building where the FPD manufacturing line is installed based on the information of the equipment collected from the inspection board 100, and manage the result of the analysis by the database.

The host system 200 may be connected to the computers 300 that control each of the devices constituting the FPD manufacturing line. The host system 200 can send an alarm signal to the malfunctioning machine's computer 300 through signal analysis and comparison evaluation received from the test board 100. The computer 300 receiving the alarm signal may display an alarm message on the monitor and generate an alarm sound through the speaker. Accordingly, the operator can know whether there is an abnormality in the equipment to which the operator is assigned according to the alarm signal input from the host system 200. [

2 is a detailed view showing the configuration of the circuit board 20 of the test board 100. As shown in FIG.

2, the circuit board 20 of the inspection board 100 includes a power switching unit 23 mounted on a printed circuit board (PCB), a sensor signal receiving unit 24, a signal transmitting unit 25 A control unit 21, a memory 22, and the like.

The power supply switching unit 23 outputs a voltage from the battery 30 to the control unit 21, the memory 22, the sensor signal receiving unit 24, the signal transmitting unit 25 ) To drive the circuits. The power switching unit 23 can directly supply the power of the battery 30 to the circuits of the circuit board 20 when the light is received and adjust the power supply voltage of the battery 30 appropriately using the regulator, To the circuit of FIG. The power switching unit 23 turns off the battery power supplied to the circuit board when the light is received again. Accordingly, the operator can turn on / off the power of the test substrate 100 by irradiating the test substrate 100 with a light source such as an LED (Light Emitting Diode).

In the case of a switch operating with the same physical force as a conventional DIP switch, the thickness of the test substrate 100 can be increased because of its relatively large thickness. Also, if a switch operated by force is used, the thin test board 100 may be damaged due to the force applied during the switch operation. The present invention can reduce the thickness of the test substrate 100 and prevent the test substrate 100 from being damaged by switching the power source of the test substrate 100 with light.

The sensor signal receiving unit 24 converts the output signals of the sensors 10 into digital data recognizable by the control unit 21 and supplies the digital data to the control unit 21.

The control unit 21 may be implemented as a central processing unit (CPU). The control unit 21 supplies the sensor data input from the sensor signal receiving unit 24 to the signal transmitting unit 25. The memory 22 temporarily stores the sensor data input from the control unit 21 and supplies the sensor data stored at the request of the control unit 21 to the control unit 21. [

The signal transmitter 25 converts the sensor data inputted from the controller 21 according to the transmission standard of the wire / wireless interface and transmits the sensor data to the external host system 200 through the wire / wireless interface. A radio frequency (RF) communication channel of 2.4 GHz band may be used as a wireless interface.

The battery 30 is implemented as a thin and high capacity battery, for example, a lithium polymer battery, to supply power to the circuit board 20.

3 and 4 are cross-sectional views showing a cross section of the test substrate 100 according to the embodiment of the present invention.

3 and 4, a test board 100 includes a board 40 on which a circuit board 20, a battery 30, a power line 31 and the like are mounted, Layer 50,60.

The inspection board 100 must have a thickness similar to that of the FPD display panel substrate so that the equipment of the FPD manufacturing line can recognize the same as the FPD display panel and the chemical resistance of the inspection board 100 is not damaged by various chemicals used in the FPD manufacturing line. Should have.

For this purpose, the substrate 40 is made of a thin and chemical resistant material. For example, the substrate 40 may be a glass substrate or an acrylic substrate having a thickness between 1 mm and 2 mm. The thickness of the circuit board 20 and the battery 30 arranged so as not to be stacked on the PCB has a thickness between 0.5 mm and 1.5 mm. The protective layers 50 and 60 are made of a transparent material having a thickness between 0.1 mm and 0.3 mm and having chemical resistance. The protective layers 50 and 60 may be made of a silicone tape as shown in FIG. 3, or may be made of a transparent resin that hermetically seals the entire surface of the test substrate 40, as shown in FIG. The protective layer 50 is adhered to the substrate 40 so as to cover the sensors 10, the circuit board 20, the power line 31, the battery 30, and the like. The protective layer 50 may be detachably adhered to the substrate 40 so that a battery can be exchanged.

The total thickness t of the test substrate 100 has a thickness between 1.6 mm and 3.8 mm of the substrate 40, the circuit board 20 and the battery 30. [

5, the surface of the substrate 40 is etched or mechanically processed to form a depressed surface on the surface of the substrate 40, and the circuit board 20 and the battery (not shown) (30) may be disposed. When the substrate 40 is made of an acrylic substrate, the engraved angle can be formed by NC (Numerically Controlled Lathe) processing. The sensors 10 omitted in FIG. 5 may be formed on the engraved portion of the substrate 40 or on the raised portion of the substrate 40. When the substrate 40 is made of an acrylic substrate, the engraved angle can be formed by NC (Numerically Controlled Lathe) processing. 5, the thickness t of the test substrate 100 can be further reduced by the thickness of the substrate 40. In this case,

6 is a flowchart illustrating a manufacturing line inspection method of a flat panel display according to an embodiment of the present invention.

Referring to FIG. 6, in the manufacturing line inspection method of the flat panel display device of the present invention, the inspection substrate 100 is supplied to the FPD manufacturing line and power is supplied to the inspection substrate 100 by the non-contact switching method. )

When a signal is received from the sensors 10 arranged on the inspection board 100 to the control unit 21, the control unit 21 transmits the signals collected from the sensors 10 to the host system 200 (S3 And S4)

The host system 200 analyzes the signal received from the test substrate 100, compares and evaluates the signal, and stores the result in the database of the host system 200. (S5) The host system 200 analyzes the received signal, If an abnormal signal is detected in the received signal as a result of the comparison, the alarm signal is transmitted to the computer 300 of the detected equipment. (S6 and S7)

When inspecting the FPD production line by inserting the inspection substrate 100 into the FPD production line, it is preferable that the heater of the high-temperature equipment is not operated in the FPD production line. This is because when the circuit board 20 and the battery 30 of the test board 100 are heated to 90 ° C or higher, the reliability of the circuit board 20 and the battery 30 may deteriorate and be damaged. When inspecting the FPD manufacturing line by inserting the inspection substrate 100 into the FPD manufacturing line, the deposition apparatus and the chamber of the etching apparatus are stacked so that unwanted foreign substances are not deposited on the inspection substrate 100 or the inspection substrate 100 is not etched. It is preferable not to supply the reaction gas into the reaction chamber.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Therefore, the present invention should not be limited to the details described in the detailed description, but should be defined by the claims.

100: test board 200: host system
300: a computer controlling the equipment of the FPD manufacturing line

Claims (11)

A plurality of sensors mounted on the substrate so as to be dispersedly disposed;
A circuit board mounted on the substrate; And
And a battery mounted on the substrate and supplying power to the circuit board,
Wherein the sensors, the circuit board, and the battery-
To the equipment of the FPD manufacturing line, to move along the FPD manufacturing line,
Wherein the circuit board transmits information on equipment of the FPD manufacturing line collected through the sensors to the outside via a wire / wireless interface.
The method according to claim 1,
The circuit board includes:
A signal transmitter for transmitting a signal received through the wired / wireless interface to the outside;
A sensor signal receiver for converting an output signal of the sensors into digital data;
A controller for supplying sensor data input from the sensor signal receiver to the signal transmitter;
A memory connected to the control unit; And
And a power supply switching unit for supplying power of the battery to the signal transmitter, the sensor signal receiver, the controller, and the memory when light is received.
3. The method of claim 2,
Further comprising a transparent protective layer covering the sensors, the circuit board, and the battery.
The method according to claim 1,
Wherein the thickness of the inspection substrate has a thickness between 1.6 mm and 3.8 mm.
The method according to claim 1,
The substrate
Wherein the substrate is one of a glass substrate and an acrylic substrate.
6. The method according to any one of claims 1 to 5,
Wherein the substrate comprises an engraved portion of a predetermined size,
Wherein the circuit board and the battery are disposed at an engraved portion of the substrate.
6. The method according to any one of claims 1 to 5,
Wherein each of the sensors includes at least one of a vibration sensor, a displacement sensor, a flow sensor, a temperature sensor, a magnetic sensor, a capacitance sensor, and a pressure sensor.
A plurality of sensors mounted on the substrate so as to be dispersedly disposed on the substrate, a circuit board mounted on the substrate, and a battery mounted on the substrate to supply power to the circuit board, An inspection board moving along the FPD manufacturing line to collect information on equipment of the FPD manufacturing line; And
And a host system connected to the test board through a wired / wireless interface and analyzing signals received from the wired / wireless interface to determine whether the FPD manufacturing line is out of equipment or not. Inspection system.
9. The method of claim 8,
Further comprising a computer for controlling the equipment of the FPD manufacturing line,
Wherein the host system transmits an alarm signal to the computer according to a result of the signal analysis.
A test board including a plurality of sensors mounted on a substrate so as to be dispersedly arranged, a circuit board mounted on the board, and a battery mounted on the board to supply power to the circuit board, Collecting information on equipment of the FPD manufacturing line while moving along the FPD manufacturing line; And
And analyzing the information collected by the inspection board to determine whether the FPD manufacturing line has an equipment abnormality.
11. The method of claim 10,
Further comprising transmitting an alarm signal to a computer controlling equipment of the FPD manufacturing line according to the information analysis result.

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