KR101788098B1 - Transfer method of 2d material - Google Patents

Abstract

A method of transferring a two-dimensional material according to an embodiment of the present invention includes: forming a two-dimensional material layer on a foil by synthesizing a two-dimensional material on a foil; Transferring a solid polymer film to the two-dimensional material layer; Removing the foil; Transferring the polymer film and the two-dimensional material layer to a substrate; And removing the polymeric film from the two-dimensional material layer. Since the method of transferring a two-dimensional material according to this embodiment uses a polymer film in a solid state, there is no polymer residue in the two-dimensional material layer transferred to the substrate, and a two-dimensional material layer And the polymer film in a solid state can be easily removed from the two-dimensional material layer.

Description

[0001] TRANSFER METHOD OF 2D MATERIAL [0002]

The present invention relates to a transfer method, and more particularly to a method of transferring a two-dimensional material onto a predetermined substrate.

A 2D material is defined as a single layer material consisting of a single atom and a single compound. Since the first graphene was announced in 2004, it has been used for many years, including graphyne, borophene, germanene, silicene, stanene, phosphorene, Hundreds of materials have been reported, including boron nitride, transition metal di-chalcogenides (TMDCs), single layer palladium (Pd), and rhodium (Rh). These two-dimensional materials can be applied to various optoelectronic devices such as transparent electrodes, transparent devices, and flexible devices because they exhibit properties different from those of the three-dimensional state, or have transparency and mechanical properties to light.

However, the two-dimensional material requires a process of being transferred to a predetermined substrate after synthesis in a high-temperature environment, that is, a transfer process. As an example of graphene among two-dimensional materials, graphene is synthesized in a high-temperature (about 1000 degrees Celsius) environment on a catalyst substrate such as copper. On the other hand, conventionally, there has also been reported a method of not depositing copper on a predetermined substrate and then synthesizing graphene to avoid the transfer process. However, considering the temperature at which graphene is synthesized, available substrates are extremely limited.

In the method of synthesizing graphene at a high temperature after depositing copper on a predetermined substrate, there is a high possibility that elements manufactured by a previous process step on a predetermined substrate are damaged by high temperature. In order to solve this problem, a process of synthesizing graphene on a predetermined substrate at a low temperature has been conventionally reported, but the performance of graphene synthesized at a low temperature is significantly lowered compared with a case where the graphene is synthesized at a high temperature . Therefore, in order to apply the graphene of high quality to various substrates, it is reasonable to transfer the graphene synthesized at a proper temperature after the graphene is synthesized in a high temperature environment to a predetermined substrate.

Various transfer methods for transferring graphene to a predetermined substrate have been reported so far. For example, mechanical exfoliation, Au-assisted transfer, stamp-assisted transfer, direct transfer, and a transfer method using a polymer membrane polymer-assisted transfer).

The mechanical separation method can be used to transfer a single crystal graphene by removing it from graphite using a scotch tape and then dipping it on a substrate, but it is possible to transfer very small pieces (several micrometers in size) It has a disadvantage that it is difficult to place the graphene and it is not suitable for being practically used in industry.

The method of transferring using gold is a method of depositing gold on graphene and then transferring it to gold, which does not leave any impurities on the graphene, so there is little damage to the characteristics of graphene. But it is economically costly.

The transfer method using a stamp is a method of stamping graphene, transferring graphene, and then removing only the stamp. In this case, the stamps mainly used are made of polydimethylsiloxane (PDMS) which is chemically very stable substance. Since the graphene is supported by the van der Waals force, it is easy to remove after the transferring process is finished . However, it is difficult to apply to large area.

The direct transfer method is a method in which a metal foil having a graphene structure is brought into contact with a substrate and then transferred in a high temperature, high pressure, and high voltage environment. The direct transfer method has the advantage of reusing the metal foil, but the substrate may be damaged due to the high temperature and high pressure environment. In particular, when a substrate to be transferred with graphene is a polymer-based flexible substrate, the surface of the substrate may be deformed to increase the surface roughness. When a rigid substrate such as a wafer is used, the substrate may be broken by mechanical pressure.

The transfer method using the polymer film will be described with reference to Fig.

1 is a process sectional view corresponding to each step of a process flow chart and a process flow chart of a graphene transfer method using a conventional polymer film.

Referring to FIG. 1, in a graphene transfer method using a polymer membrane, a liquid polymer solution is coated on a copper foil synthesized with graphene and dried to form a polymer film. Remove the copper foil by floating the graphene / copper foil coated with the polymer film on a copper etchant. Then, the polymer membrane and graphene float in the copper removal solution. Then, the polymer film and the graphene are transferred to a target substrate, and then the polymer film is removed. At this time, the polymer membrane is removed by dissolving using an organic solvent.

The major disadvantage of the graphene transfer method using the conventional polymer membrane shown in FIG. 1 is that the polymer membrane is not completely removed from the organic solvent. In order to remove the polymer membrane, multiple solvent treatment method, high temperature solvent treatment method, and high temperature heat treatment method have been reported, but reported methods do not completely remove the polymer membrane.

The graphene transfer method using the conventional polymer membrane shown in FIG. 1 can transfer the large-area graphene economically easily. However, since the residue of the polymer film is left on the graphene, do.

As described above, in the method of transferring the two-dimensional material including graphene to a predetermined substrate, it is economical and economical, and it is possible to reduce the damage of the substrate on which the two-dimensional material is to be transferred, You need a way.

It is an object of the present invention to provide a method of transferring a two-dimensional material capable of transferring a two-dimensional material to a predetermined substrate at room temperature.

There is also provided a method for transferring a two-dimensional material in which a polymer residue is not left on the surface of a two-dimensional material when transferring the two-dimensional material to a predetermined substrate.

The present invention also provides a method for transferring a two-dimensional material, which can overcome all the disadvantages of conventional transfer methods of two-dimensional materials.

A method of transferring a two-dimensional material according to an embodiment of the present invention includes: forming a two-dimensional material layer on a foil by synthesizing a two-dimensional material on a foil; Transferring a solid polymer film to the two-dimensional material layer; Removing the foil; Transferring the polymer film and the two-dimensional material layer to a substrate; And removing the polymeric film from the two-dimensional material layer. Since the method of transferring a two-dimensional material according to this embodiment uses a polymer film in a solid state, there is no polymer residue in the two-dimensional material layer transferred to the substrate, and a two-dimensional material layer And the polymer film in a solid state can be easily removed from the two-dimensional material layer.

In the method of transferring a two-dimensional material according to the above embodiment, between the step of transferring the polymer film and the two-dimensional material layer to the substrate and the step of removing the polymer film from the two-dimensional material layer, Applying to the polymer film, and patterning the applied photosensitive material; Patterning the polymer film and the two-dimensional material layer using the patterned photosensitive material as a mask; And removing the photosensitive material. The method of transferring a two-dimensional material according to this embodiment has an advantage in that a two-dimensional material layer can be patterned into a desired shape, and it can be utilized as an electronic device and a sensor.

A method of transferring a two-dimensional material according to an embodiment of the present invention includes: forming a two-dimensional material layer on a foil by synthesizing a two-dimensional material on a foil; Transferring a solid polymer film to the two-dimensional material layer; Removing the foil; The polymer film and the two-dimensional material layer are transferred to the same kind of two-dimensional material layer synthesized on the foil and then the other foil is removed at least once, thereby forming a multi-layered two- ; Transferring the polymer film and the multi-layered two-dimensional material layer onto a substrate; And removing the polymeric film from the two-dimensional material layer of the multi-layer structure. Since the method of transferring a two-dimensional material according to this embodiment uses a polymer film in a solid state, a polymer residue does not occur in the two-dimensional material layer of the multi-layer structure transferred to the substrate, Dimensional material layer can be transferred, and the polymer film in the solid state can be easily removed from the two-dimensional material layer of the multi-layer structure. Further, there is an advantage that a two-dimensional material layer having various thicknesses can be obtained.

A method of transferring a two-dimensional material according to an embodiment of the present invention includes: forming a two-dimensional material layer on a foil by synthesizing a two-dimensional material on a foil; Transferring a solid polymer film to the two-dimensional material layer; Removing the foil; Dimensional material layer synthesized on the foil and the other two-dimensional material layer synthesized on the foil and then removing the other foil is repeated at least once or more to form a heterogeneous two-dimensional material composite layer ; Transferring the polymer film and the heterogeneous two-dimensional material composite layer onto a substrate; And removing the polymer film from the heterogeneous two-dimensional material composite layer. Since the method of transferring a two-dimensional material according to this embodiment uses a polymer film in a solid state, a polymer residue is not generated in a heterogeneous two-dimensional material composite layer transferred onto a substrate, The two-dimensional material composite layer can be transferred, and the solid polymer film can be easily removed from the two-dimensional material composite layer. In addition, there is an advantage that different kinds of two-dimensional material layers can be transferred onto one substrate.

A method of transferring a two-dimensional material according to an embodiment of the present invention includes: forming a two-dimensional material layer on a foil by synthesizing a two-dimensional material on a foil; Transferring a solid polymer film to the two-dimensional material layer; Separating the foil from the two-dimensional material layer using an electrochemical method; Transferring the polymer film and the two-dimensional material layer to a substrate; And removing the polymeric film from the two-dimensional material layer. The method of transferring a two-dimensional material according to this embodiment can significantly reduce the damage of the two-dimensional material layer because the polymer film protects the two-dimensional material layer even if the two-dimensional material layer is separated from the foil using an electrochemical method There is an advantage that can be completely prevented. Further, since the foil is not completely dissolved, it is possible to reuse the separated foil for the synthesis of two-dimensional material, which has the advantage of reducing manufacturing process cost.

In the two-dimensional material transfer methods according to various embodiments described above, the step of transferring the solid polymer film to the two-dimensional material layer may be performed at room temperature. In this case, there is an advantage that the substrate and the substrate can be prevented from being damaged by heat beforehand.

In the method of transferring two-dimensional materials according to the above-described various embodiments, the step of transferring the solid polymer film to the two-dimensional material layer may include transferring the polymer film to the two- Can be performed at a temperature greater than 0 degrees Celsius and less than 100 degrees Celsius. When performed at a temperature greater than 0 degrees Celsius and less than 100 degrees Celsius, there is an advantage that damage to the two-dimensional material layer can be prevented.

In the method of transferring two-dimensional materials according to the above-described various embodiments, the step of transferring the solid polymer film to the two-dimensional material layer may include transferring the polymer film to the two- The water may further contain a predetermined organic solvent and an inorganic solvent. When water further contains an organic solvent and an inorganic solvent, there is an advantage that the surface tension of water can be controlled.

In the method of transferring two-dimensional materials according to the above-described various embodiments, the step of transferring the solid polymer film to the two-dimensional material layer may include transferring the polymer film to the two- The polymer film and the two-dimensional material layer may be put into a vacuum chamber, and air in the vacuum chamber may be withdrawn by a pump. Since the air pressure in the vacuum chamber drops when the air in the vacuum chamber is removed, there is an advantage that the drying time of water as a transfer medium can be shortened further than the standard air pressure.

In the two-dimensional material transfer methods according to various embodiments described above, the two-dimensional material is selected from the group consisting of graphene, graphyne, borophene, germanene, silicide, stannene, phosphorene, boron nitride, transition metal di-chalcogenides (TMDCs), single layer palladium (Pd) and rhodium .

The use of the method of transferring a two-dimensional material according to the embodiment of the present invention has an advantage that the substrate is hardly damaged because it proceeds at room temperature.

In addition, the method of transferring a two-dimensional material according to the embodiment of the present invention is advantageous in that it is economical and can be applied to a large area because a solid polymer film is used.

In addition, the method of transferring a two-dimensional material according to an embodiment of the present invention does not leave a polymer residue on the surface of a two-dimensional material, so that it can be utilized for high-speed electronic devices, chemical sensors, and biosensor sensors.

In addition, since the method of transferring a two-dimensional material according to an embodiment of the present invention is compatible with an electrochemical separation method, there is an advantage that a process cost can be reduced.

1 is a process sectional view corresponding to each step of a process flow chart and a process flow chart of a graphene transfer method using a conventional polymer film.
2 is a process flow chart for explaining a transfer method of a two-dimensional material according to the first embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart.
FIG. 3 is a process flow chart for explaining a method of forming the solid polymer membrane 300 shown in FIG. 2 and a process sectional view corresponding to each step of the process flow chart.
FIG. 4 is a micrograph of a two-dimensional material produced by the transfer method of the two-dimensional material shown in FIG.
FIG. 5 is a graph showing the results of X-ray photoelectron spectroscopy (XPS) and XPS measurement of a polymer film used in graphene transfer.
FIG. 6 is a graph showing the relationship between the thickness of the substrate and the thickness of the substrate (silicon oxide film) using a method of transferring the two-dimensional material shown in FIG. 2, using graphene as a two-dimensional material and poly- methyl methacrylate (PMMA) ). ≪ / RTI >
FIG. 7 is a process flow chart for explaining a transfer method of a two-dimensional material according to the second embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart. FIG.
8 is a process flow chart for explaining a transfer method of a two-dimensional material according to the third embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart.
9 is a process flow chart for explaining a transfer method of a two-dimensional material according to the fourth embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart.
Figs. 10 to 12 are photographs of actual experiments during the step S930 in the method of transferring a two-dimensional material according to the fourth embodiment shown in Fig.
13 is a photograph of an actual experiment after performing the step S930 in the method of transferring a two-dimensional material according to the fourth embodiment shown in Fig.
Fig. 14 is a result of XPS measurement of a two-dimensional material layer transferred to a substrate by the transfer method of the two-dimensional material according to the fourth embodiment shown in Fig.
15 is a process sectional view corresponding to each step of a process flow chart and a process flow chart for explaining a transfer method of a two-dimensional material according to a fifth embodiment of the present invention.

Hereinafter, a detailed description of preferred embodiments of the present invention will be given with reference to the accompanying drawings. It should be noted that in the drawings, the same reference numerals and the same elements are denoted by the same reference numerals even though they are shown on different drawings. In the following description, well-known functions or constructions are not described in detail to avoid unnecessarily obscuring the subject matter of the present invention.

The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. Also, the size of each component does not entirely reflect the actual size.

In the description of the embodiments according to the present invention, in the case where an element is described as being formed on "on or under" another element, the upper (upper) or lower (lower) (On or under) all include that the two elements are in direct contact with each other or that one or more other elements are indirectly formed between the two elements. Also, when expressed as "on or under", it may include not only an upward direction but also a downward direction with respect to one element.

Among the conventional methods of transferring two-dimensional materials, a transfer method using a polymer membrane causes a chemical bond with a two-dimensional material in a drying and heating step of the polymer solution. In the subsequent process, the chemically bonded polymer film and the two- It was impossible to obtain a two-dimensional material.

However, in the methods of transferring two-dimensional materials according to the embodiments of the present invention, in transferring the solid polymer film to the two-dimensional material layer synthesized in the foil, the solid polymer film and the two- But by physical adsorption. Therefore, the transfer methods according to various embodiments proposed in the present invention exclude the chemical bonding, so that there is an advantage that only the polymer film can be almost completely removed from the two-dimensional material layer. Hereinafter, methods of transferring a two-dimensional material according to specific embodiments will be described in detail.

≪ First Embodiment >

2 is a process flow chart for explaining a transfer method of a two-dimensional material according to the first embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart.

2, the method of transferring a two-dimensional material according to the first embodiment includes a step S210 of synthesizing a two-dimensional material to the foil 200, a step of synthesizing the polymer film 300 in two dimensions A step S230 of transferring the polymer film 300 and the two-dimensional material layer 100 to the substrate 400, a step S240 of transferring the polymer film 300 and the two-dimensional material layer 100 to the substrate 400, And removing the polymer film 300 (S250). Each step will be described in detail below.

The step S210 of synthesizing a two-dimensional material on the foil 200 includes the steps of forming a two-dimensional material layer 100 on one side of the foil 200 by synthesizing a two- to be. A method of synthesizing a two-dimensional material on one side of the foil 200 can be performed by a variety of known conventional methods, and therefore, a detailed description thereof will be omitted.

In step S210 of synthesizing a two-dimensional material to the foil 200, the foil 200 may be copper (Cu), but is not limited thereto, and any metal is possible as long as it can replace copper. One side of the foil 200 is the upper surface of the foil 200 in Fig. 2, but may be the lower surface of the foil 200, not the upper surface of the foil 200. The two-dimensional material 100 may be formed of a material selected from the group consisting of graphene, graphyne, borophene, germanene, silicene, stanene, phosphorene, Boron nitride, transition metal di-chalcogenides (TMDCs), single layer palladium (Pd), and rhodium (Rh).

A description will be given of a method of forming the polymer film 300 in a solid state before the step S220 of transferring the polymer film 300 to the two-dimensional material layer 100 will be described with reference to FIG.

FIG. 3 is a process flow chart for explaining a method of forming the solid polymer membrane 300 shown in FIG. 2 and a process sectional view corresponding to each step of the process flow chart.

Referring to FIG. 3, a method of forming a solid polymer film 300 includes the steps of preparing a sacrificial layer substrate 500 (S310), forming a polymer film 300 on the sacrificial layer substrate 500 (S320) and removing the sacrificial layer substrate 500 (S330).

In step S320 of forming the polymer membrane 300 on the sacrificial layer substrate 500 prepared in step S310, the solid polymer membrane 300 is coated with a liquid polymer solution on the top surface of the sacrificial layer substrate 500 And dried.

In the step of removing the sacrificial layer substrate 500 (S330), the sacrificial layer substrate 500 may be removed with a predetermined removing solution. Here, the predetermined removing solution is preferably a solution that does not chemically damage the polymer membrane 300.

Step S220 will now be described with reference to FIG. When the solid polymer film 300 is prepared by the method shown in FIG. 3, the polymer film 300 in a solid state is transferred to the upper surface of the two-dimensional material layer 100 through water. In order to adjust the surface tension of water, water may further contain a predetermined organic solvent and an inorganic solvent. The polymer film 300 including the water and the two-dimensional material layer 100 may be dried at room temperature to remove water as a transfer medium. As the water is removed by drying, the polymer membrane 300 and the two-dimensional material layer 100 are adsorbed to each other by capillary phenomenon. Here, the temperature at which the water is dried may be less than 0 degrees (占 폚) and less than 100 degrees (占 폚). If the temperature at which the water is dried is less than 0 degree (C), the two-dimensional material layer 100 may be damaged because the water freezes. If the temperature at which the water is dried is 100 degrees C or more, The two-dimensional material layer 100 can be damaged because it expands. Therefore, it is preferable that the temperature at which the water dries is less than 0 degrees (占 폚) and less than 100 degrees (占 폚). More preferably, the time during which the water is dried may be higher than room temperature and less than 100 degrees (占 폚). The drying time of the water existing between the polymer membrane 300 and the two-dimensional material layer 100 can be further shortened at room temperature if the drying time of the water is higher than room temperature and less than 100 degrees Celsius. On the other hand, it is also possible to lower the humidity and dry the transfer medium water.

It is also possible to shorten the drying time by controlling the air pressure. For example, by putting the polymer film 300 containing water and the two-dimensional material layer 100 into a vacuum chamber and extracting the air in the vacuum chamber by a pump, the drying time of water as a transfer medium is made longer than the standard atmospheric pressure Can be shortened.

In the step S230 of removing the foil 200, a removing solution capable of chemically removing only the foil 200 from the polymer film 300, the two-dimensional material layer 100 and the foil 200 is used to remove the foil 200 200 are removed.

The step S240 of transferring the polymer film 300 and the two-dimensional material layer 100 to the substrate 400 is a step of transferring the lower surface of the two-dimensional material layer 100 to the upper surface of the substrate 400. [ Here, the process of transferring the lower surface of the two-dimensional material layer 100 to the upper surface of the substrate 400 and then drying it may be further performed.

The step of removing the polymer film 300 (S250) is a step of removing the polymer film 300 from the two-dimensional material layer 100. Since the solid polymer film 300 is in contact with the two-dimensional material layer 100 by physical attraction or van der Waals force, the bonding force between the polymer film 300 and the two-dimensional material layer 100 is weak . Accordingly, the polymer film 300 can be detached from the two-dimensional material layer 100 using an adhesive such as a scotch tape.

2, since a polymer film 300 in a solid state is used instead of a liquid state, a removing solution for removing the polymer film 300 is not required. Thus, there is an advantage in that there is no need for a polymer residue, which is economical due to the absence of a removal solution, and which is a problem caused by the use of the removal solution in conventional transfer processes. In addition, since the two-dimensional material layer 100 is transferred to the substrate 400 at room temperature, there is an advantage that the possibility that the substrate 400 and other elements previously formed on the substrate 400 are damaged by heat is very low. In addition, there is an advantage that the two-dimensional material layer 100 can be stably transferred to the substrate 400 having a large area.

FIG. 4 is a photomicrograph of a two-dimensional material produced by the transfer method of the two-dimensional material shown in FIG.

In order to obtain a sample in the micrograph of FIG. 4, graphene was used as a two-dimensional material, and poly-vinylidene fluoride-trifluoroethylene (P (VDF- TrFE) was used as a substrate, silicon oxide was used as a substrate, and hydrofluoric acid (HF) was used as a substrate removal solution.

The photomicrograph of FIG. 4 shows the transfer of graphene onto a silicon oxide (SiO2) deposited wafer of about 300 nm thickness, and a comparison of graphene transfer sites Is selected.

Referring to FIG. 4, it can be seen that no polymer residue remained.

FIG. 5 is a view showing a result of XPS (X-ray photoelectron spectroscopy) measurement of a sample in the micrograph of FIG. 4 and an XPS measurement of a polymer film used in graphene transfer. FIG. 5A shows the XPS measurement result of the sample in the micrograph shown in FIG. 4, and FIG. 5B shows the XPS measurement result of the polymer thin film (P (VDF-TrFE) thin film). FIG. 5 (b) is a graph to be compared for confirming the polymer residue in the sample in the microscope photograph of FIG.

If the polymer (P (VDF-TrFE)) remains in the sample in the micrograph of FIG. 4, the peak indicating CF ₂ , CH ₂ and CFH, as shown in FIG. 5 (b) 5 (a), but no peak appeared as shown in FIG. 5 (a). Therefore, according to the transfer method of the two-dimensional material shown in FIG. 2, it can be seen that there is no polymer residue in the two-dimensional material layer transferred to the substrate.

FIG. 6 is a graph showing the relationship between the thickness of the substrate and the thickness of the substrate (silicon oxide film) using a method of transferring the two-dimensional material shown in FIG. 2, using graphene as a two-dimensional material and poly- methyl methacrylate (PMMA) ). ≪ / RTI >

Referring to the graph of FIG. 6, since no carbon bonds are confirmed, the method of transferring the two-dimensional material shown in FIG. 2 can be applied irrespective of the type of the polymer film, and the graphene- It can be confirmed that adhesion by phosphorus adsorption or Van der Waals force has been established.

≪ Second Embodiment >

FIG. 7 is a process flow chart for explaining a transfer method of a two-dimensional material according to the second embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart. FIG.

7, a method of transferring a two-dimensional material according to a second embodiment includes a step (S710) of synthesizing a two-dimensional material to a foil 200, a step (S710) of synthesizing a polymer film 300 A step S730 of removing the foil 200, a step S730 of forming a two-dimensional material layer 100 'having a multilayer structure, a step S735 of forming a two-dimensional material layer 100' (S740) of transferring the two-dimensional structure layer 100 'of the multi-layer structure to the substrate 400 and removing the polymer film 300 (S750).

2, step S720 is the same as step S220 shown in FIG. 2, step S730 is the same as step S230 shown in FIG. 2, step S750 corresponds to step S220 shown in FIG. Since it is the same as step S250, detailed description is omitted. Steps S735 and S740 will be described below.

The step S735 of forming the two-dimensional material layer 100 'of the multi-layer structure is performed by transferring the polymer film 300 and the two-dimensional material layer 100 to a layer of the same kind of two- Is repeated at least once or more to form a two-dimensional material layer 100 'having a multilayer structure. If the number of layers of the two-dimensional material layer 100 'desired by the user is two, step S735 is repeated one more time. If the number of layers of the two-dimensional material layer 100' desired by the user is three, step S735 is repeated two more times do. That is, if the number of layers of the two-dimensional material layer 100 'desired by the user is n (n is a natural number of 2 or more) layers, step S735 is repeated (n-1) times.

The step of transferring the polymer film 300 and the two-dimensional material layer 100 'having a multi-layer structure to the substrate 400 (S740) And transferred onto the upper surface. Here, the process of transferring the lower surface of the two-dimensional material layer 100 'to the upper surface of the substrate 400 and then drying it may be further performed.

The method of transferring a two-dimensional material according to the second embodiment shown in Fig. 7 not only has the effect of the transfer method of the two-dimensional material according to the first embodiment shown in Fig. 2, There is an advantage that the material layer can be transferred to the substrate without polymer residue.

≪ Third Embodiment >

8 is a process flow chart for explaining a transfer method of a two-dimensional material according to the third embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart.

8, a method of transferring a two-dimensional material according to a third embodiment includes a step (S810) of synthesizing a two-dimensional material to a foil 200, a step of synthesizing a polymer film 300 in a two-dimensional Dimensional material composite layer 100 "(S835); transferring the polymeric material 300 to the polymeric layer 300 (S820); removing the foil 200 (S830) (Step S840) of transferring a different kind of two-dimensional material composite layer 100 '' to the substrate 400 and removing the polymer film 300 (S850).

2, step S820 is the same as step S220 shown in FIG. 2, step S830 is the same as step S830 shown in FIG. 2, step S850 corresponds to step S220 shown in FIG. Since it is the same as step S250, detailed description is omitted. Steps S835 and S840 will be described below.

The step of forming a heterogeneous two-dimensional material composite layer 100 '' (S835) includes the steps of transferring the polymer film 300 and the two-dimensional material layer 100 onto different kinds of two-dimensional material layers synthesized in different foils, The process of removing the foil is repeated to form a heterogeneous two-dimensional material composite layer 100 ". If the number of different kinds of two-dimensional material composite layers 100 " desired by the user is two, the step S835 is repeated one more time, and the number of different kinds of two-dimensional material composite layers 100 " , The step S835 is repeated two more times. That is, if the number of layers of a different kind of two-dimensional material composite layer 100 "desired by the user is n (where n is a natural number of 2 or more), step S835 is repeated (n-1) times.

The step of transferring the polymer film 300 and the different kind of two-dimensional material composite layer 100 '' to the substrate 400 (S840) And then transferred onto the upper surface of the substrate 400. Here, the process of transferring the lower surface of the two-dimensional material composite layer 100 '' to the upper surface of the substrate 400 and then drying it may be further performed.

The method for transferring a two-dimensional material according to the third embodiment shown in Fig. 8 not only has the effect of the transfer method of the two-dimensional material according to the first embodiment shown in Fig. 2, There is an advantage that a heterogeneous two-dimensional material composite layer composed of two-dimensional material layers can be transferred onto a substrate without a polymer residue.

≪ Fourth Embodiment &

9 is a process flow chart for explaining a transfer method of a two-dimensional material according to the fourth embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart.

9, the method of transferring a two-dimensional material according to the fourth embodiment includes a step (S910) of synthesizing a two-dimensional material to the foil 200, a step (S910) of synthesizing the polymer film 300 into two- A step S930 of transferring the polymer film 300 and the two-dimensional material layer 100 to the substrate 400, a step S940 of transferring the polymer film 300 and the two-dimensional material layer 100 to the substrate 400, And removing the polymer film 300 (S950).

Among the above steps, the remaining steps except step S930 are the same as the steps shown in FIG. 2, so that the description is omitted. The step S930 will be described below.

Step S930 of separating the foil 200 is performed by separating only the foil 200 out of the polymer film 300, the two-dimensional material layer 100 and the foil 200 from the two-dimensional material layer 100 by an electrochemical method .

Here, as an example of the electrochemical method, a negative electrode and a positive electrode are inserted into an electrolyte solution, and a foil 200 having a two-dimensional material layer 100 formed thereon is connected to a negative electrode do. The positive electrode is formed of a metal that does not react with the electrolyte solution. When a voltage is applied to the two electrodes, the electrolyte solution causes an electrochemical reaction at each electrode. The two-dimensional material layer 100 synthesized on the surface of the foil 200 is separated from the foil 200 together with the polymer film 300 while hydrogen is generated in the negative (-) electrode.

9, since the polymer film 300 has been transferred to the two-dimensional material layer 100 in step S920, which is before step S930, the method of transferring the two-dimensional material according to the fourth embodiment shown in FIG. Even if the foil 200 is separated by an electrochemical method because the polymer film 300 protects the two-dimensional material layer 100 even if the layer 100 is separated from the foil 200, There is an advantage that the damage can be significantly reduced or prevented completely.

Figs. 10 to 12 are photographs of actual experiments during the step S930 in the method of transferring a two-dimensional material according to the fourth embodiment shown in Fig. 9, and Fig. In the method of transferring a two-dimensional material, it is a photograph of an actual experiment after performing step S930.

10 to 13, the two-dimensional material was graphene and the foil 200 was a copper foil. Polymer membrane / graphene / copper foil was connected to the positive (+) electrode and the polymer film / graphene / copper foil to the negative (-) electrode.

Referring to FIG. 10, it is confirmed that bubbles are generated in the negative (-) electrode by an electrochemical method. The bubbles generated are hydrogen.

11 to 12, the polymer membrane / graphene floating in the electrolyte solution can be identified.

Referring to Fig. 13, a copper foil (right electrode) is recovered by an electrochemical method. The recovered copper foil can be reused in the synthesis of graphene, thus reducing the cost of transcription.

Fig. 14 is a result of XPS measurement of a two-dimensional material layer transferred to a substrate by the transfer method of the two-dimensional material according to the fourth embodiment shown in Fig. The results in Fig. 14 are obtained using graphene as a two-dimensional material.

Referring to FIG. 14, it can be seen that there is no polymer residue in the graphene layer transferred to the substrate.

≪ Embodiment 5 >

FIG. 15 is a process flow chart for explaining a transfer method of a two-dimensional material according to the fifth embodiment of the present invention and a process sectional view corresponding to each step of the process flow chart. FIG.

15, a method of transferring a two-dimensional material according to a fifth embodiment includes a step (S1510) of synthesizing a two-dimensional material to a foil 200, a step (S1510) of synthesizing a polymer film 300 into a two- A step S1530 of transferring the polymer film 300 and the two-dimensional material layer 100 to the substrate 400, a step S1540 of transferring the polymer film 300 and the two-dimensional material layer 100 to the substrate 400, A step S1550 of applying a photosensitive material to the polymer film 300 and a patterning of the photosensitive material 600, a step S1560 of patterning the polymer film 300 and the two-dimensional material layer 100, (S1570), and removing the polymer membrane 300 (S1580).

In step S1510, step S210 shown in FIG. 2, step S1520 corresponds to step S220 shown in FIG. 2, step S1530 corresponds to step S230 shown in FIG. 2, step S1540 corresponds to step S240 And step S1580 are the same as those of step S250 shown in FIG. 2, and a description thereof will be omitted. Steps S1550, S1560, and S1570 will be described below.

In the step S1550 of applying the photosensitive material to the polymer film 300 and patterning the photosensitive material 600, a liquid photosensitive material is coated on the upper surface of the polymer film 300, And performing a patterning process for forming a predetermined shape pattern. Here, the photosensitive material 600 may be patterned using ultraviolet rays. When the photosensitive material 600 is patterned by ultraviolet rays, the polymer film 300 is exposed.

The patterning step S1560 of the polymer film 300 and the two-dimensional material layer 100 may include patterning the polymer film 300 and the two-dimensional material layer 100 using the patterned photosensitive material 600 as a mask to be. The polymer film 300 and the two-dimensional material layer 100 can be simultaneously patterned by using an oxygen plasma process.

The step of removing the photosensitive material 600 (S1570) is a step of removing the photosensitive material 600 present on the upper surface of the patterned two-dimensional material layer 100. [ The photosensitive material 600 can be selectively removed by using the photosensitive material 600 removing solution.

The method of transferring a two-dimensional material according to the fifth embodiment shown in FIG. 15 is a method in which a two-dimensional material layer 100 is patterned using a photosensitive material 600 composed of a polymer material, There is an advantage that no residue of the photosensitive material 600 remains in the two-dimensional material layer 100. [ This is possible because the photosensitive material 600 is applied to the polymer film 300 rather than the two-dimensional material layer 100. [ That is, since the polymer film 300 blocks the direct contact of the photosensitive material 600 with the two-dimensional material layer 100, the two-dimensional material layer 100 transferred to the substrate 100 has the photosensitive material 600 There is no residue left.

The method of transferring a two-dimensional material according to the fifth embodiment shown in Fig. 15 is a method of transferring a patterned two-dimensional material layer 100 ) Can be utilized as electronic devices and sensors.

The features, structures, effects and the like described in the embodiments are included in one embodiment of the present invention, and are not necessarily limited to one embodiment. Furthermore, the features, structures, effects and the like illustrated in the embodiments can be combined and modified by other persons skilled in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be appreciated that many variations and applications not illustrated are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

100: two-dimensional material layer
200: foil
300: polymer membrane
400: substrate

Claims (11)

Forming a two-dimensional material layer on the foil by synthesizing a two-dimensional material on the foil;
Transferring a solid polymer film to the two-dimensional material layer;
Removing the foil;
Transferring the polymer film and the two-dimensional material layer to a substrate; And
Removing the polymeric film from the two-dimensional material layer;
Lt; / RTI >
The step of transferring the solid polymer film to the two-dimensional material layer includes transferring the polymer film to the two-dimensional material layer via water, wherein the polymer film is carried out at a temperature of more than 0 ° C and less than 100 ° C , A method of transferring a two-dimensional material. The method according to claim 1,
Between the step of transferring the polymer film and the two-dimensional material layer to the substrate and the step of removing the polymer film from the two-dimensional material layer,
Applying a photosensitive material to the polymer film, and patterning the applied photosensitive material;
Patterning the polymer film and the two-dimensional material layer using the patterned photosensitive material as a mask; And
Removing the photosensitive material;
And transferring the two-dimensional material. Forming a two-dimensional material layer on the foil by synthesizing a two-dimensional material on the foil;
Transferring a solid polymer film to the two-dimensional material layer;
Removing the foil;
The polymer film and the two-dimensional material layer are transferred to the same kind of two-dimensional material layer synthesized on the foil and then the other foil is removed at least once, thereby forming a multi-layered two- ;
Transferring the polymer film and the multi-layered two-dimensional material layer onto a substrate; And
Removing the polymeric film from the two-dimensional material layer of the multi-layer structure;
And transferring the two-dimensional material. Forming a two-dimensional material layer on the foil by synthesizing a two-dimensional material on the foil;
Transferring a solid polymer film to the two-dimensional material layer;
Removing the foil;
Dimensional material layer synthesized on the foil and the other two-dimensional material layer synthesized on the foil and then removing the other foil is repeated at least once or more to form a heterogeneous two-dimensional material composite layer ;
Transferring the polymer film and the heterogeneous two-dimensional material composite layer onto a substrate; And
Removing the polymeric film from the heterogeneous two-dimensional material composite layer;
And transferring the two-dimensional material. Forming a two-dimensional material layer on the foil by synthesizing a two-dimensional material on the foil;
Transferring a solid polymer film to the two-dimensional material layer;
Separating the foil from the two-dimensional material layer using an electrochemical method;
Transferring the polymer film and the two-dimensional material layer to a substrate; And
Removing the polymeric film from the two-dimensional material layer;
And transferring the two-dimensional material. The method according to claim 1,
Wherein the water further contains a predetermined organic solvent and an inorganic solvent. 6. The method according to any one of claims 3 to 5,
The step of transferring the solid polymer film to the two-dimensional material layer includes transferring the polymer film to the two-dimensional material layer via water, wherein the polymer film is carried out at a temperature of more than 0 ° C and less than 100 ° C , A method of transferring a two-dimensional material. 6. The method according to any one of claims 3 to 5,
The step of transferring the solid polymer film to the two-dimensional material layer comprises: transferring the polymer film to the two-dimensional material layer through water, wherein the water contains a predetermined organic solvent and an inorganic solvent; Method of transferring material. 6. The method according to any one of claims 3 to 5,
The step of transferring the solid polymer film to the two-dimensional material layer includes transferring the polymer film to the two-dimensional material layer through water, placing the polymer film and the two-dimensional material layer in a vacuum chamber, And drawing air in the vacuum chamber. Forming a two-dimensional material layer on the foil by synthesizing a two-dimensional material on the foil;
Transferring a solid polymer film to the two-dimensional material layer;
Removing the foil;
Transferring the polymer film and the two-dimensional material layer to a substrate; And
Removing the polymeric film from the two-dimensional material layer;
Lt; / RTI >
The step of transferring the solid polymer film to the two-dimensional material layer includes transferring the polymer film to the two-dimensional material layer through water, placing the polymer film and the two-dimensional material layer in a vacuum chamber, And drawing air in the vacuum chamber. 11. The method according to any one of claims 1 to 5 and 10,
The two-dimensional material may be selected from the group consisting of graphene, graphyne, borophene, germanene, silicene, stanene, phosphorene, boron nitride A method of transferring a two-dimensional material, the method comprising the steps of: depositing boron nitride, transition metal di-chalcogenides (TMDCs), single layer palladium (Pd), and rhodium (Rh).

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