KR101786473B1 - Multilayer ceramic capacitor - Google Patents
Multilayer ceramic capacitor Download PDFInfo
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- KR101786473B1 KR101786473B1 KR1020150126075A KR20150126075A KR101786473B1 KR 101786473 B1 KR101786473 B1 KR 101786473B1 KR 1020150126075 A KR1020150126075 A KR 1020150126075A KR 20150126075 A KR20150126075 A KR 20150126075A KR 101786473 B1 KR101786473 B1 KR 101786473B1
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- external electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
- H01G4/0085—Fried electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
- H01G4/2325—Terminals electrically connecting two or more layers of a stacked or rolled capacitor characterised by the material of the terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
Abstract
The multilayer ceramic capacitor 1 is an element which forms hydrogen and a covalent bond hydride between the plating layer 13c of the outermost layer constituting the external electrode 13 and the dielectric layer 10 constituting the ceramic body 11 However, the element which generates a hydride having a boiling point of less than 125 ° C is excluded) and hydrogen and at least one element forming a hydride of the boundary region. As a result, it is possible to reduce the influence of hydrogen generated in the plating process and to prevent deterioration of the insulation resistance.
Description
BACKGROUND OF THE
The multilayer ceramic capacitor includes a ceramic body composed of a plurality of laminated dielectric layers, a plurality of internal electrodes respectively disposed between the dielectric layers, and a pair of external electrodes formed on the ceramic body so as to conduct the internal electrodes. The surface of the external electrode is plated with Ni for preventing solder leaching during mounting. In order to improve solderability during soldering, Sn plating is applied on the Ni plated film. This plating of Ni, Sn, or the like is usually performed by electrolytic plating.
Japanese Patent Application Laid-Open No. 1-80011 discloses a method in which hydrogen ions are generated by a chemical reaction in a plating process and the hydrogen ions are occluded in internal electrodes to gradually reduce the surrounding dielectric layer, Thereby causing problems such as deterioration of resistance and the like. In the case of using an internal electrode containing a noble metal (for example, Ag-Pd alloy) as a main component, a metal (for example, Ni) for inactivating the absorption of hydrogen is added to the internal electrode .
However, in recent years, in order to reduce the material cost, a base metal such as Ni is used rather than a noble metal such as Ag or Pd as the material of the internal electrode. Japanese Patent Application Laid-Open No. 1-80011 discloses that Ni is a "metal that deactivates the absorption of hydrogen ", but according to research by the inventors and the like, even when the internal electrode is Ni, Which leads to deterioration of the device.
An object of the present invention is to provide a multilayer ceramic capacitor capable of reducing the influence of hydrogen generated in a plating process and preventing deterioration of insulation resistance.
As described above, conventionally, hydrogen generated in the plating process is thought to affect the deterioration of the insulation resistance. The inventors of the present invention have studied the deterioration of the insulation resistance described above and found that most of the hydrogen generated in the plating process is temporarily stored in the external electrode or the internal electrode and spread when the temperature is added and the voltage is applied to the multilayer ceramic capacitor, And reached the dielectric layer. The inventors of the present invention have completed the present invention by repeatedly experimenting and examining based on these findings.
A multilayer ceramic capacitor based on the first aspect of the present invention includes a ceramic body, a plurality of internal electrodes, and a pair of external electrodes. The ceramic body includes a plurality of laminated dielectric layers, and has both end faces opposing to each other and a plurality of side faces connecting the both end faces. The plurality of internal electrodes contain a base metal as a main component, are disposed between the stacked dielectric layers, and are alternately drawn out to both end faces. The pair of external electrodes includes an external electrode body formed on the ceramic body so as to be electrically connected to the internal electrodes extended to the both end faces of the ceramic body and at least one plating layer formed outside the external electrode body. In the multilayer ceramic capacitor according to the first aspect of the present invention, an element which forms a covalent hydride with hydrogen between the plating layer of the outermost layer and the dielectric layer of the plating layer (however, The element forming the hydride is excluded) and at least one element forming hydrogen and the hydride of the boundary region.
The element forming the covalent bond hydride with hydrogen (except for the element which generates hydride having a boiling point of less than 125 ° C) is a boron group (excluding In, Tl), carbon Group, nitrogen, oxygen, and halogen. The element forming hydrogen and the hydride in the boundary region is an element that forms a hydrogen-covalent hydride and an element that forms a metal-like hydride with hydrogen And refers to an element belonging to the boron group (excluding Al and Ga),
The plating layer of the outermost layer and the dielectric layer include not only the internal electrode and the external electrode body but also the interface between the plating layer of the outermost layer and the external electrode body, the interface between the external electrode body and the internal electrode, And the conductor is formed at the interface between the dielectric layer and the dielectric layer.
The element may be present between the outermost layer of the plated layer and the dielectric layer in its elemental form, or may be bonded to another element between the outermost plated layer and the dielectric layer. The hydrogen includes any of hydrogen, hydrogen, hydrogen, isotopes of hydrogen, and the like. The hydrogen referred to herein is mainly hydrogen generated by electrolysis in the plating process, but also includes water generated by a plating solution or condensation, or hydrogen present as water vapor in the atmosphere.
Here, in the multilayer ceramic capacitor based on the first aspect of the present invention, when the element is contained in the external electrode body, hydrogen is held in the external electrode body to suppress diffusion of hydrogen from the external electrode body It becomes possible.
In the multilayer ceramic capacitor according to the first aspect of the present invention, when the element is contained in the internal electrode, hydrogen is held in the internal electrode to suppress diffusion of hydrogen from the internal electrode to the dielectric layer It becomes possible.
A multilayer ceramic capacitor based on the second aspect of the present invention includes a ceramic body, a plurality of internal electrodes, and a pair of external electrodes. The ceramic body includes a plurality of laminated dielectric layers, and has both end faces opposed to each other and a plurality of side faces connecting the end faces. The plurality of internal electrodes contain a base metal as a main component, are disposed between the stacked dielectric layers, and are alternately drawn out to both end faces. The pair of external electrodes includes an external electrode body formed on the ceramic body so as to be electrically connected to the internal electrodes extended to the both end faces of the ceramic body and at least one plating layer formed outside the external electrode body. The multilayer ceramic capacitor according to the second aspect of the present invention is characterized in that an interface between the internal electrode and the external electrode body, an external surface of the external electrode body, an interior of the external electrode body, an interface between the internal electrode and the dielectric layer, An element that forms a covalent bond hydride with hydrogen at the interface between the plating layer on the outermost layer and the plating layer on the inner side when the plating layer includes a plurality of layers And a hydrogen holding film containing at least one of hydrogen and an element forming a hydride in the boundary region.
In the above, the hydrogen retention film may be formed continuously, or may be partially present, or may exist in the form of a mesh, a line, or the like.
In the multilayer ceramic capacitor according to the first and second aspects of the present invention, the element may be at least one selected from the group consisting of Sn, Bi, Al, Ag, Zn, Au, In, Ga, It is desirable to be species.
The diffusion of hydrogen to the dielectric layer can be suppressed since Sn, Bi, Al, Ag, Zn, Au, In, Ga, Ge and Si are bonded to hydrogen after they are held.
On the other hand, among these elements, Sn, Bi and Al are particularly preferable elements because they have a low melting point and are easy to form an alloy.
The multilayer ceramic capacitor based on the first aspect of the present invention is an element which forms hydrogen and a covalent bond hydride between the plated layer of the outermost layer and the dielectric layer (except for an element which generates hydride having a boiling point of less than 125 캜) And at least one element forming hydrogen and a hydride in the boundary region. Therefore, hydrogen generated in the plating process can be maintained between the plating layer and the dielectric layer in the outermost layer. As a result, diffusion of hydrogen to the dielectric layer can be suppressed, and deterioration of the insulation resistance IR can be prevented.
In the multilayer ceramic capacitor according to the second aspect of the present invention, the interface between the inner electrode and the outer electrode body, the outer surface of the outer electrode body, the inner surface of the outer electrode body, the interface between the inner electrode and the dielectric layer, (Except for an element which generates a hydride having a boiling point of less than 125 deg. C) and hydrogen (hydrogen) at the interface between the outermost layer of the plated layer and the plating layer on the inner side thereof, And a hydrogen-retaining film containing at least one of the elements forming hydrides in the boundary region. Therefore, hydrogen can be held by the hydrogen retention film to suppress diffusion of hydrogen to the dielectric layer.
On the other hand, the hydrogen-retaining film may be formed by a combination of an interface between the internal electrode and the dielectric layer, an interface between the internal electrode and the external electrode body, an external surface of the external electrode body, an interface between the internal electrode and the dielectric layer, It may be disposed at one of the interface between the outermost layer of the plated layer and the inner plated layer. However, it is also possible to arrange them in two or more.
These and other objects, features, aspects and advantages of the present invention will become apparent from the following detailed description of the invention, which is to be understood in connection with the accompanying drawings.
1 is a cross-sectional view of a multilayer ceramic capacitor according to
2 is a view for explaining a junction between internal electrodes and external electrode bodies of a multilayer ceramic capacitor according to
3 is a mapping diagram of Sn obtained by analyzing a cross-section of a multilayer ceramic capacitor according to
4 is a cross-sectional view of a multilayer ceramic capacitor according to Embodiment 2 of the present invention.
5 is a cross-sectional view of a multilayer ceramic capacitor according to Embodiment 3 of the present invention.
6 is a cross-sectional view of a multilayer ceramic capacitor according to Embodiment 4 of the present invention.
7 is a cross-sectional view of a multilayer ceramic capacitor according to
[Embodiment 1]
A multilayer
The
The
The
The plating layers 13b and 13c are composed of a
In the multilayer
Particularly, in the multilayer ceramic capacitor of this embodiment, the external electrode
Here, the
The element forming the covalent bond hydride with hydrogen (except for the element which generates hydride having a boiling point of less than 125 캜) is a boron group of the long period periodic table (such as B, Al, Ga ), Carbon (C, Si, Ge, Sn, Pb), nitrogen (N, P, As, Sb, Bi), oxygen (O, S, Se, Te, Po) I, At). The element forming hydrogen and the hydride in the boundary region is an element at the boundary between an element forming hydrogen and a covalent bond hydride and an element forming hydrogen and a metal bond hydride, Refers to an element belonging to the boron group (In, Tl except Al and Ga), Group 11 (Cu, Ag, Au), Group 12 (Zn, Cd, Hg). These elements form stable compounds with hydrogen. That is, once bound to hydrogen, energy is required to release the hydrogen, which makes it difficult to release hydrogen. By using this property, hydrogen generated in the plating process can be held in the
In order to contain the hydrogen holding element in the external electrode
On the other hand, the hydrogen-retaining metal may be present in the outer electrode
Here, the cross section of the multilayer
Fig. 3 is a graph showing the results of analysis of the cross-section of the multilayer
The sample for analysis is obtained by polishing the multilayer
Acceleration voltage: 15.0 kV
Irradiation current: 5 × 10 -8 A
Magnification: 3000 times
DwellTime (acquisition time in one pixel): 40 ms
Analysis depth: 1 ~ 2㎛
As a result, as shown in FIG. 3, Sn is present in the
≪ Evaluation test >
In order to confirm the significance of the multilayer
On the other hand, detailed specifications of the conductive paste were as follows.
Solid content: 25 vol%
The ratio of the Cu powder in the solid component: 70 vol%
The ratio of the glass in the solid content: 25 vol%
The ratio of the additive metal powder in the solid content: 5 vol%
Particle size of Cu powder: 3 탆
Glass particle size: 2 탆
Composition of glass: BaO-SrO-B 2 O 3 -SiO 2 glass frit (glass frit containing 10 to 50 wt% of BaO, 3 to 30 wt% of B 2 O 3 , SiO 2 : 3 to 30 wt% glass is used)
In preparing samples of samples Nos. 1 to 5, the conductive paste was applied to the
Thereafter, a
As a result,
The multilayer ceramic capacitor thus manufactured is usually a capacitor having a capacity of 10 kV, a rated voltage of 6.3 V, a length of 1.0 mm, a width of 0.5 mm and a height of 0.5 mm, and the thickness of the
The samples of Sample Nos. 1 to 5 of Table 1 thus produced were subjected to a PCBT test.
The PCBT test was conducted under the conditions of a temperature of 125 ° C, a relative humidity of 95%, an applied voltage of 3.2 V, and a load time of 72 hours. The insulation resistance (IR) was measured for each sample. When the IR value at the end of the test was 0.5 lower than the IR value at the start of the test, the IR deterioration was regarded as Log IR. On the other hand, the number of each sample is 20.
The results are shown in Table 1.
In Table 1, the samples of Sample Nos. 1 to 3 satisfy the requirements of the present invention, and the samples of Sample Nos. 4 and 5 do not satisfy the requirements of the present invention.
As shown in Table 1, the sample of Sample No. 1 containing Sn in the
On the other hand, in the sample of the sample No. 4 containing Pd in the external electrode
As described above, since the multilayer
On the other hand, in the present invention, good results can be obtained even when the hydrogen-retaining element such as Sn is present inside the
In the present invention, it is preferable that at least one of Sn, Bi, and Al as the hydrogen holding element is largely segregated at the junction portion of the
Here, the above-described junction between the
That is, at least one of Sn, Bi, and Al is largely segregated at the junction between the
In this embodiment, the external electrode
[Embodiment 2]
A multilayer
In the multilayer
The
≪ Evaluation test >
In order to confirm the significance of the multilayer
On the other hand, the thickness of the external electrode
Samples Nos. 6 to 13 of Table 2 thus prepared were tested under the same conditions as those of the PCBT test conducted in the above-described
The results are shown in Table 2.
In Table 2, the samples of Sample Nos. 6 to 10 satisfy the requirements of the present invention, and the samples of Sample Nos. 11 to 13 do not satisfy the requirements of the present invention.
As shown in Table 2, IR deterioration was not observed in the specimen No. 6 having the Sn film as the
As a result, a sample of the sample No. 11 in which the Pd film was formed by the spatter, and a sample of the sample No. 12 in which the Ti film was formed was found to have a high IR deterioration. In particular, in the sample of the sample No. 13 in which the spatter was not applied, IR deterioration was recognized in many cases.
Even when the
Although the hydrogen-holding
[Embodiment 3]
5 is a view showing a multilayer
The hydrogen retention film 13f is formed by mixing a hydrogen-retaining metal with a conductive paste for forming the second
The ratio of the hydrogen-retaining metal added to the conductive paste is preferably in the range of 1 to 40 vol%.
≪ Evaluation test >
In order to confirm the significance of the multilayer
On the other hand, the addition amount of the metal powder to the conductive paste for forming the second external electrode
On the other hand, the specification of the conductive paste for forming the first external electrode
Solid content: 15 vol%
The proportion of the components in the solid content: 40 vol%
The ratio of the glass in the solid content: 25 vol%
Particle size of Ni powder: 0.5 탆
Particle size of the blank: 100 nm to 500 nm
The samples of Sample Nos. 14 to 19 of Table 3 thus prepared were tested under the same conditions as the PCBT test in the above-mentioned
The results are shown in Table 3.
In Table 3, the samples of Sample Nos. 14 to 17 satisfy the requirements of the present invention, and the samples of Sample Nos. 18 and 19 do not satisfy the requirements of the present invention.
As shown in Table 3, no IR deterioration was found in the sample of Sample No. 14 in which Sn was blended in the external electrode
On the other hand, in the sample of the sample No. 18 in which Pd was blended in the external electrode
5, since the hydrogen generated in the plating process is absorbed by the hydrogen holding film 13f, hydrogen is prevented from passing through the
On the other hand, in the case of Embodiment 3, it is preferable that the hydrogen holding film 13f is a continuous film, but it is not necessarily formed as a continuous film, but is partially present along the surface of the
[Embodiment 4]
6 is a view showing a multilayer
The
≪ Evaluation test >
A sample including a film formed by sputtering another kind of metal (Sn, Bi, Al, Ag, Pd, Ti) to confirm the significance of the multilayer
The samples of Sample Nos. 20 to 26 of Table 4 thus prepared were tested under the same conditions as those of the PCBT test in
The results are shown in Table 4.
In Table 4, the samples of Sample Nos. 20 to 23 satisfy the requirements of the present invention, and the samples of Sample Nos. 24 to 26 do not satisfy the requirements of the present invention.
As shown in Table 4, IR deterioration was not observed in the specimen No. 20 in which the Sn film was provided as the
On the other hand, in the sample of the sample No. 24 in which the Pd film was formed by the sputtering and in the sample of the sample No. 25 in which the Ti film was formed, much IR deterioration was recognized. In addition, in the sample of the sample No. 26 in which the spatter was not applied, the IR deterioration was recognized in many cases.
In the multilayer
[Embodiment 5]
7 is a view showing a multilayer
The
≪ Evaluation test >
In order to confirm the significance of the multilayer
Samples Nos. 27 to 31 of Table 5 thus prepared were tested under the same conditions as those of the PCBT test conducted in the above-described
The results are shown in Table 5.
In Table 5, the samples of Sample Nos. 27 to 29 satisfy the requirements of the present invention, and the samples of Sample Nos. 30 to 31 do not satisfy the requirements of the present invention.
As shown in Table 5, the sample of the sample No. 27 provided with the Sn film, the sample of the sample No. 28 provided with the Bi film, and the sample of the sample No. 29 provided with the Ag film were fewer in IR deterioration as the
On the other hand, in the sample of the sample No. 30 in which the Pd film was formed by the sputtering, IR deterioration was observed to be considerable. In addition, in the sample of the sample No. 31 in which the sputtering was not performed, IR deterioration was observed in many cases.
On the other hand, also in the case of the multilayer
The characteristic constitution of the multilayer ceramic capacitor according to
While the embodiments of the invention have been described, it should be understood that the embodiments disclosed herein are illustrative in all respects and not restrictive. It is intended that the scope of the invention be indicated by the appended claims, and that all changes which come within the meaning and range of equivalency of the claims are intended to be embraced therein.
Claims (5)
A plurality of internal electrodes which are disposed between the stacked dielectric layers and which are alternately drawn out to the both end faces and which contain a base metal as a main component,
An outer electrode body formed on the ceramic body so as to conduct (communicate with) the inner electrode drawn out to both end faces of the ceramic body; and a pair of outer electrodes having a plated layer formed on the outer side of the outer electrode body Which is a multilayer ceramic capacitor,
Wherein at least one of Sn, Bi, Al, and Zn is contained in the external electrode body.
A plurality of internal electrodes which are disposed between the stacked dielectric layers and which are alternately drawn out to both end faces,
An outer electrode body formed on the ceramic body so as to be electrically connected to the inner electrodes drawn to both end faces of the ceramic body; and a pair of outer electrodes having a plurality of plating layers formed on the outer side of the outer electrode body, Lt;
Wherein at least one of Sn, Bi, Al and Zn is contained in at least one of the external electrode main body and the plating layer formed between the plating layer of the outermost layer and the plating layer of the plurality of plating layers and between the external electrode main body Multilayer Ceramic Capacitors.
A plurality of internal electrodes which are disposed between the stacked dielectric layers and which are alternately drawn out to both end faces,
An external electrode body formed on the ceramic body so as to be electrically connected to the internal electrodes extended to both end faces of the ceramic body; and a pair of external electrodes having at least one layer of plating layer formed outside the external electrode body A ceramic capacitor,
A plating layer of an outermost layer in the case where the plating layer includes a plurality of layers, and a plating layer in the inside of the outer electrode body in the case where the plating layer includes a plurality of layers, And at least one of B, Al, Ga, C, Si, Ge, Sn, Pb, N, P, As, Sb, Bi, O, S, Se, Te, Po, Further comprising a hydrogen holding film containing at least one element selected from the group consisting of I, At, In, Tl, Au, Zn, Cd and Hg.
Wherein the element is at least one selected from the group consisting of Sn, Bi, Al, Zn, Au, In, Ga, Ge and Si.
Applications Claiming Priority (4)
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JPJP-P-2014-182893 | 2014-09-09 | ||
JP2014182893 | 2014-09-09 | ||
JP2015150917A JP2016058719A (en) | 2014-09-09 | 2015-07-30 | Multilayer ceramic capacitor |
JPJP-P-2015-150917 | 2015-07-30 |
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KR101786473B1 true KR101786473B1 (en) | 2017-10-18 |
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KR102059441B1 (en) | 2017-01-02 | 2019-12-27 | 삼성전기주식회사 | Capacitor Component |
KR101992450B1 (en) * | 2017-08-23 | 2019-06-25 | 삼성전기주식회사 | Capacitor Component and Method of Manufacturing the Same |
JP7017893B2 (en) * | 2017-09-25 | 2022-02-09 | 太陽誘電株式会社 | Multilayer ceramic capacitors |
KR102099775B1 (en) | 2018-09-06 | 2020-04-10 | 삼성전기주식회사 | Multi-layered ceramic capacitor |
KR102538893B1 (en) * | 2018-09-06 | 2023-06-01 | 삼성전기주식회사 | Multi-layered ceramic capacitor |
KR102166129B1 (en) * | 2018-09-06 | 2020-10-15 | 삼성전기주식회사 | Multi-layered ceramic capacitor |
KR102192426B1 (en) * | 2019-06-03 | 2020-12-17 | 삼성전기주식회사 | Capacitor Component and Method of Manufacturing the Same |
JP7477073B2 (en) * | 2019-08-01 | 2024-05-01 | 太陽誘電株式会社 | Multilayer ceramic electronic components |
JP2021027095A (en) * | 2019-08-01 | 2021-02-22 | 太陽誘電株式会社 | Laminated ceramic electronic component |
JP2021100020A (en) * | 2019-12-20 | 2021-07-01 | 太陽誘電株式会社 | Multilayer ceramic electronic component and manufacturing method thereof |
KR20220101911A (en) | 2021-01-12 | 2022-07-19 | 삼성전기주식회사 | Multilayered electronic component |
JP2023118628A (en) | 2022-02-15 | 2023-08-25 | 株式会社村田製作所 | Multilayer ceramic capacitor and method for manufacturing multilayer ceramic capacitor |
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JP2002270458A (en) * | 2001-03-08 | 2002-09-20 | Murata Mfg Co Ltd | Ceramic layered capacitor |
JP2013165180A (en) * | 2012-02-10 | 2013-08-22 | Tdk Corp | Electronic component and method of manufacturing electronic component |
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JP2002270458A (en) * | 2001-03-08 | 2002-09-20 | Murata Mfg Co Ltd | Ceramic layered capacitor |
JP2013165180A (en) * | 2012-02-10 | 2013-08-22 | Tdk Corp | Electronic component and method of manufacturing electronic component |
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