KR101785039B1 - Dark Field Microscope with Partial Dark Field Module - Google Patents

Abstract

An embodiment of the present invention is a night vision microscope, which comprises a light source for emitting light of a certain intensity toward a sample, a partial dark field module for transmitting only light generated in the light source to a specific region, And an objective lens for forming a primary image of the sample, wherein the light condensing unit includes a diaphragm whose center is blocked so that the light source can not be transmitted, and a light condenser for adjusting the illumination and transmitting light to the objective lens, The module has a circular plate shape and is composed of six regions having 60 degrees from the center, and each region has a feature in which light transmitting regions and non-transmitting regions are sequentially arranged. Therefore, it is possible to intuitively identify the portion where the difference in crystal direction appears in the dense structure in which the spherical particles are arranged in the double membrane, and the crystal orientation of the double membrane of the spherical particle can be accurately identified.

Description

Field of the Invention [0001] The present invention relates to a dark field microscope including a partial dark field module,

Field of the Invention [0002] The present invention relates to a dark field microscope, and more particularly, to a dark field microscope capable of easily identifying a region boundary due to a difference in alignment direction of a micro spherical particle double layer using a partial dark field module.

When the nano- or micron-sized spherical particles made of dielectric are concentrated as much as possible on the substrate, a regular structure having hexagonal symmetry can be obtained. It can be used as a template for various nanostructure fabrication because it can easily produce regular nanostructure over a large area. In recent years, studies are being conducted to fabricate more complex nanostructures using a double membrane type template instead of a single membrane.

Scanning electron microscopy (SEM) is often used to confirm the quality of the template for such use. This method is described in Korean Patent Laid-Open Publication No. 10-2013-0135541 entitled " Scanning Electron Microscope "Lt; / RTI >
In this case, despite the advantages of high resolution, there is a disadvantage that it is impossible to re-use and hassle due to a separate sample processing process such as metal coating for the measurement. Therefore, a method using an optical microscope It is more advantageous.

In the conventional measurement method using an optical microscope, it is possible to identify the center position of individual particles using a bright-field or a dark-field optical microscope and confirm the alignment state thereof. However, due to the resolution limit of the optical microscope, it becomes more difficult to grasp the position of each structure over a large area as the particle size becomes smaller.

In particular, in the case of a non-single membrane, there are two cases in which the two-dimensional crystal orientation is the same in the crystal structure but the three-dimensional crystal arrangement is different. This structure changes the focus of the microscope, It is not easy to distinguish the relative positions of the individual particles from each other. Therefore, the analysis time due to the focus adjustment is long, and the process is difficult to automate.

The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide a microscope microscope structure capable of easily confirming the boundary between regions by maximizing the contrast of each region according to the difference in alignment direction in dense micro spherical particle double- The purpose of this paper is to propose

An embodiment of the present invention relates to a night vision microscope, which comprises: a light source unit for emitting light of a predetermined intensity toward a sample; A partial dark field module which transmits the light generated by the light source only in a specific region; A light collecting part for converging the transmitted light toward the sample placed on the ground; And an objective lens for forming a primary image of the sample, wherein the light condensing unit includes an annular diaphragm for blocking the light source from being transmitted and a condenser for condensing the remaining transmitted light into a sample on the ground, Is formed in a circular plate shape and has a plurality of sector areas divided at a predetermined angle from the center, and each sector area can be sequentially arranged with light transmitting area and not transmitting area.

Each of the areas constituting the partial dark field module may be symmetrical with respect to the center of the partial dark field module.

In addition, the partial dark field module may be formed of six sectors having an angle of 60 degrees from the center, and the light transmitting region may be formed at an interval of 120 degrees.

The partial dark field module may be disposed between the light source unit and the light condensing unit, and may be inserted in such a manner that the central portion thereof can be rotated while being fixed.

The partial dark field module darkens a part of the image formed on the objective lens and observes the dense structure of the spherical particles composed of the double-layered film, so that the region having different three-dimensional structures depending on the arrangement state of the upper spherical particles And has a feature of emphasizing contrast.

When observing spherical particles, the partial dark-field module changes the area of a plurality of arcs that do not transmit light in an image of spherical particles appearing as a bright ring under a dark background to darken a bright arc and a dark arc sequentially .

The upper spherical particles superimposed on the upper center of the three closely packed spherical particles are relatively bright when the portion of the arc imaged on the lower three spherical particles directly below the upper spherical particle contains a bright arc , It may appear relatively dark when the arc imaged on the bottom three spherical particles contains a dark arc.

In addition, the image of the upper spherical particle is changed in brightness as the partial dark field module is rotated, and the contrast of the upper spherical particle can be maximized when rotated by 0 ° and 60 °.

The image of the spherical particle composed of six arcs is rotated together with the partial dark field module, and when the particle is rotated by 60 degrees, the density distribution of the dense spherical particle double layer is reversed. Therefore, by measuring the rotation angle of the partial dark field module, the crystal orientation of the spherical particle double layer in the corresponding region can be grasped

The embodiment can quickly and accurately confirm the quality related to the uniformity of the crystallographic direction of the sample without adding the focus shift of the microscope or the correction of the measured optical image by adding a configuration that is easy to be coupled to the conventional darkfield microscope.

The embodiment can easily detect the occurrence of defects in the initial fabrication process of a sample made of a nanofibrous particle or a microsphere particle with a double membrane structure, and thus can guarantee the quality of a sample actually used.

1 is a view showing an optical system of a conventional dark field microscope
Figure 2 shows two different three-dimensional structures that can appear for the same two-dimensional crystal orientation in dense spherical particle bilayers
3 is a view showing an optical system of a dark field microscope according to the embodiment
4 is a diagram illustrating a partial dark field module according to an embodiment;
FIG. 5 is a view showing an image of spherical particles observed using a bright field microscope, a dark field microscope, and a partial dark field module of the embodiment;
6 is a view showing an image of a spherical particle mono-layer film observed by a dark-field microscope of the conventional and the embodiment
7 is a plan view showing an image according to the arrangement state of spherical particles when the partial dark field module is applied.
8 is a view showing a case where a partial dark field module is applied to a densely packed spherical particle film having a double film structure
9 is a graph showing the contrast change of a densely packed spherical particle double film according to the rotational direction of the partial dark field module;
Fig. 10 is a graph showing that the lightness and darkness of each region vary in accordance with the rotational direction of the partial dark field module in a double-layer film formed of compact spherical particles having a small size of 0.5 탆 in diameter

The embodiments of the present invention will be described in detail with reference to the accompanying drawings, but the present invention is not limited to these embodiments. In describing the present invention, a detailed description of well-known functions or constructions may be omitted for the sake of clarity of the present invention.

In order to confirm the quality of the double-layered micro-spherical particle, the spherical particle made of a transparent material has a relatively large contrast in the dark-field microscope than the bright-field microscope, Since it is easier to confirm than a microscope, it is assumed that a dark field microscope is used, and a general dark field microscope is improved so that the object of the present invention can be accomplished.

A dark field microscope is a microscope that collects only light that is scattered or refracted by an object without receiving the light passing through it, using incident light in a direction tilted with respect to the sample through a diaphragm in the form of a ring in a condenser. Has the opposite property.

1 is a view showing an optical system of a conventional dark field microscope. Referring to FIG. 1, the optical system of the night vision microscope 100 may include a light source 110, a light collecting unit 120, a platform 130, and an objective lens 140.

The light source unit 110 may be an LED or a halogen lamp as an illumination device that emits light of a predetermined intensity toward the sample. The light collecting unit 120 may include condensers 121 and 123 and a diaphragm 122. The light collectors 121 and 123 are constituted by parts of an optical system for focusing light from a light source and pass through a diaphragm to allow light to pass through the rest of the sample in a maximum amount to clearly identify the shape of the sample And may be formed in various types and numbers depending on conditions.

The diaphragm 122 is a member for limiting light from the condenser 121. In the dark field microscope, the center of the diaphragm 122 is shielded from being transmitted through the light source so that only the light of a certain angle or more enters the sample.

The flooring 130 may include a horizontal plate for fixing the sample, a hole through which light can pass in the center, and a fixing plate for fixing the sample to the sample.

The objective lens 140 is a lens for forming the first phase of the sample and may be composed of several single lenses depending on the magnification. Although not shown, a tube lens that transmits the image magnified by the objective lens to the eye or the camera can be constructed.

FIG. 2 shows two different three-dimensional crystal structures that can appear for the same two-dimensional crystal orientation in dense spherical particle double films. Referring to FIG. 2, the cause of the defect in the bilayer film is that the spherical particles constituting the upper layer can not be disposed over all the gaps formed by the spherical particles of the lower layer due to their sizes. Therefore, even for the same underlayer film, the two structures A and B having different relative positions of the spherical particles of the underlayer film with respect to one upper layer film spherical particle can be generated at the same probability. At this time, when the two structures of A or B are generated at the same time in the process of forming the upper layer film, space is formed between the spherical particles of the upper layer at the portion where the two regions meet.

When these two different three-dimensional structures are used as templates for the fabrication of nanostructures, a defect is created because a plurality of nanostructures are mixed in one flat plate. In the dark-field microscope as shown in FIG. 1, since there is no difference in contrast between the three-dimensional structures as described above, it is not easy to identify the corresponding regions. The embodiment is intended to propose a dark field microscope for easier identification of regions where the three-dimensional structure differs.

3 is a diagram showing an optical system of a dark field microscope according to the embodiment. Referring to FIG. 3, the optical system of the night vision microscope 200 may include a light source 210, a light collecting unit 220, a ground unit 230, and an objective lens 240. Since the above-described configuration is the same as the purpose and role in the configuration described above, a detailed description will be omitted.

The optical system of the night vision microscope 200 according to the embodiment is characterized in that a partial dark field module 250 is provided between the light source unit 210 and the light condensing unit 220. The partial dark field module 250 may be formed in a circular plate shape as a member for blocking a part of the light transmitted from the light source unit 210. The partial dark field module 250 is disposed between the light source unit and the light collecting unit, So as to be rotatable while being fixed, and a specific shape will be described with reference to FIG.

4 is a diagram illustrating a partial dark field module according to an embodiment. Referring to FIG. 4, the partial dark field module 250 of the embodiment is formed in a circular plate shape, and partially transmits light. Specifically, the partial dark field module can be divided into six fan-shaped regions with the center as a center, and each region can be formed to form 60 degrees from the center, and each region is symmetrical with respect to the center Respectively. The six regions may be formed by alternating the first region 251 through which light is not transmitted and the second region 252 through which light is transmitted. That is, the second region 252 through which light is transmitted may be spaced apart by 120 degrees with respect to the center of the partial dark field module.

Hereinafter, the principle of identifying boundaries of regions having a difference in three-dimensional structure in a densely packed spherical particle double film using a dark field microscope using the partial dark field module as in the embodiment will be described.

FIG. 5 is a view showing an image of a single spherical particle obtained using a bright field microscope to which a partial dark field module of a bright field microscope, a dark field microscope, and an embodiment is applied. 5 (a) shows a spherical particle image using a bright field microscope, wherein spherical particles appear in the form of dark rings under a light background because most of the light scattered at the spherical particle surface is not detected by the objective lens to be. On the other hand, as shown in (b), when using a dark-field microscope, spherical particles appear as bright rings under a dark background because only oblique light is captured by the objective lens as opposed to a bright field microscope.

In an image through a darkfield microscope, a bright ring is formed by light condensed by the lens effect of spherical particles, as in (d), rather than being formed by light directly dispersed at the spherical particle surface. Depending on the size and the refractive index of the spherical particle, the condensed light can be formed very close to the surface of the spherical particle, and the condensation by the spherical particle can cause the initial direction of the light to be inclined. Lt; / RTI > Further, a part of the condensed light can be dispersed at the spherical particle surface when the focal point is very close to the spherical particle surface, and such dispersed light can be detected by the objective lens.

(c) shows images of spherical particles observed by applying the partial dark field module as in the embodiment. Unlike the full bright ring of the conventional dark field microscope image, the partial dark field module limits the incident light in three directions, It can be seen that the bright arc and the dark arc alternate at intervals.

6 is a view showing an image of a densely packed spherical particle single-layer film observed by a dark-field microscope in the conventional and the embodiment.

(a) is an image of a spherical particle mono-layer obtained by a conventional dark-field microscope. In this image, we can see images with dense spherical particles with a bright ring shape under a dark background.

(b) shows an image of a spherical particle monolayer film obtained by applying a partial dark field module to a dark field microscope as in the embodiment. FIG. 5 (c) is an image formed by densely arranging ring-shaped spherical particle images sequentially arranged at intervals of 60 degrees between the bright arc and the dark arc observed in FIG. 5 (c). By matching the crystal direction of dense spherical particles with the direction of the partial dark- (b), we can obtain a bright triangle image at the depression between the three contacted spherical particles. At this time, half of the dents that are evenly distributed throughout the film appear as bright triangles and the other half appear dark.

At this time, when the partial dark field module is rotated by 60 degrees, as shown in (d), a bright triangle image appears in the dark part before the dark part of the spherical particle, and a dark triangle area appears.

On the other hand, when the partial dark field module is rotated by 30 degrees as shown in (c), the bright arc of the spherical particles contacting each other is continuously positioned, and the brightness at the recessed portion between the spherical particles is (b) d). < / RTI >

This phenomenon can be more easily confirmed in the schematic diagram of FIG. In Fig. 7, a portion indicated by a thick line around the spherical particle represents a portion brightly illuminated by the partial dark field module. At this time, as the direction of the relative arrangement of the spherical particles varies with respect to the direction of the same partial dark field module, the recessed triangular part between the spherical particles may (a) appear bright or (b) dark.

8 is a view showing a case in which a partial dark field module is applied in a dense spherical particle structure of a double-film structure. When spherical particles are formed as a double layer, the arrangement state of three-dimensional spherical particles may be different from each other depending on where the spherical particles of the upper layer are located in the same two-dimensional crystal direction. (a), when the spherical particles of the upper layer film are disposed on the bright triangular portion of the lower layer film, the bright triangular portion of the lower layer film serves as a light source for illuminating the spherical particles of the upper layer film, so that the spherical particles of the upper layer film are brightly imaged. On the other hand, when the spherical particles of the upper layer film are arranged on the dark part of the lower layer film as shown in (b), the spherical particles of the upper layer film are darkened. Therefore, since each spherical particle is imaged brightly or darkly according to the arrangement state of the three-dimensional spherical particles, it is possible to perform visual recognition more easily.

9 is a view showing an image of a dense spherical particle (2 탆 in diameter) double membrane observed by a dark field microscope in the conventional and the embodiment. The A region and the B region have the same two-dimensional crystal orientation, but the positions of the spherical particles of the upper layer film are shifted from each other, and a defect occurs. 9 (a) shows a case where a conventional dark-field microscope is used. Since a small gap exists between the spherical particles located in the upper layer of the A region and the B region, the portion corresponding to the boundary appears as a thin dark line, Is relatively low, and the identification with the naked eye is somewhat difficult.

(b), (c) and (d) are images obtained by imaging a spherical particle double-layer while applying a partial dark field module to a dark-field microscope. The relative difference in the two-dimensional crystal orientation between the partial dark field module and the spherical particle double- The brightness of the spherical particle double film changes continuously. In particular, as shown in FIG. 8, when the direction of the partial dark field module and the two-dimensional crystal orientation of spherical particles are properly matched, the brightness of the spherical particle double film becomes maximum (A) or minimum (B) (B). In addition, when the partial dark field module is further rotated by 60 degrees, the portion having the maximum brightness is minimized and the portion having the minimum brightness is reversed to the maximum brightness (d). Therefore, by locating the direction in which the partial dark field module is continuously rotated and finding the direction in which the contrast of the two areas is maximized, not only the identification of the area boundary is facilitated, but also from the rotation position of the partial dark field module when the specific area becomes darkest The two-dimensional crystal orientation of the region can be accurately known.

10 is an image obtained by observing a double membrane made of spherical particles of a small size so that it is difficult to precisely grasp the position of each spherical particle using a conventional dark field microscope and a dark field microscope according to the embodiment. As shown in the figure, the dark field microscope according to the embodiment can easily identify the region boundaries according to the difference in arrangement of spherical particles even in a large image area from a clear contrast. On the other hand, as shown in (b), a gray region having a medium brightness in addition to the brightest region and the dark region is visible, which has a two-dimensional crystal orientation different from that of the surrounding region, thereby precisely matching the direction of the partial dark field module It is an area that is not. When the partial dark field module is rotated, this gray area appears again as the brightest or darkest area at a certain angle. (C) By measuring this angle, the crystal orientation in a specific area can be grasped.

The dark field microscope according to the embodiment can discriminate the boundary region of the spherical particle even with a light source of low intensity as compared with other microscopes. Since a bright arc formed on the surface of a spherical particle observed with a dark-field microscope is basically formed by focusing of incident light by spherical particles, a sufficiently bright image is formed even using a weak light source, Sufficient contrast can be given to distinguish the boundary region of the film.

The dark field microscope to which the partial dark field module is applied as in the embodiment can distinguish defective or bad state depending on the difference in crystal arrangement of the double-layered micro-spherical particle due to the remarkable contrast, so that the spherical particle film can be used as a template It is advantageous in improving the quality in the nanostructure production process.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be understood that various modifications and applications other than those described above are possible. For example, each component specifically shown in the embodiments of the present invention can be modified and implemented. It is to be understood that all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (8)

A light source for emitting light of a predetermined intensity toward a sample;
A partial dark field module which transmits the light generated by the light source only in a specific region;
A light collecting part for converging the transmitted light toward the sample placed on the ground; And
And an objective lens for forming a primary image of the sample,
The condenser includes a diaphragm whose center is blocked so that the light source can not be transmitted, and a condenser that adjusts the illumination and transmits light to the objective lens,
Wherein the partial dark-field module has a circular plate shape and is composed of a plurality of sector-shaped regions divided from a center by a predetermined angle, and each region is sequentially arranged with a light-transmitting region and a non-
The partial dark field module darkens a part of the image formed on the objective lens to observe the dense structure of the spherical particles made of the double-layered film, so that the region having different three- A dark field microscope. The method according to claim 1,
Wherein each of the areas constituting the partial dark field module is symmetrical with respect to the center of the partial dark field module. The method according to claim 1,
Wherein the partial dark field module comprises six sectoral areas having an angle of 60 degrees from the center, and the light transmitting area is formed at an interval of 120 degrees. The method according to claim 1,
Wherein the partial dark field module is disposed between the light source unit and the light condensing unit, and is inserted so that the central portion thereof can be rotated while being fixed. delete The method according to claim 1,
The partial dark-field module is a dark-field dark-field module that darkens the area of a plurality of arcs that do not transmit light in an image of spherical particles appearing as a bright ring under a dark background, microscope. The method according to claim 6,
The upper spherical particles superimposed on the middle of the densely packed three spherical particles are relatively bright when the portion located directly under the upper spherical particle among the arcs imaged in the lower three spherical particles contains a bright arc, A dark-field microscope that appears relatively dark when an arc imaged on three spherical particles contains dark arcs. 8. The method of claim 7,
Wherein the image of the upper spherical particle is changed in brightness as the partial dark field module is rotated, and the contrast of the upper spherical particle is maximized when rotated by 0 ° and 60 °.

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