KR101776093B1 - Laser resonator module with easily fixed alignment - Google Patents

Laser resonator module with easily fixed alignment Download PDF

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Publication number
KR101776093B1
KR101776093B1 KR1020150060783A KR20150060783A KR101776093B1 KR 101776093 B1 KR101776093 B1 KR 101776093B1 KR 1020150060783 A KR1020150060783 A KR 1020150060783A KR 20150060783 A KR20150060783 A KR 20150060783A KR 101776093 B1 KR101776093 B1 KR 101776093B1
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KR
South Korea
Prior art keywords
laser
laser medium
contact
base
resonator module
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KR1020150060783A
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Korean (ko)
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KR20160128815A (en
Inventor
이영우
김종섭
탁인선
김회영
김영민
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(주)옵토닉스
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1053—Comprising an active region having a varying composition or cross-section in a specific direction

Abstract

More particularly, the present invention relates to a laser resonator module in which an optical component constituting a laser resonator module for generating and amplifying laser light has a junction surface processed to have a right angle, The present invention relates to a laser resonator module in which alignment and maintenance are facilitated, in which optical components are easily aligned and held by bonding mutually contacting surfaces to each other.
A laser resonator module according to the present invention is a laser resonator module including a laser source unit and a mirror disposed on each of both sides of the laser source unit. The laser resonator module includes parallel and parallel sides, Wherein the bottom surface of the bottom portion and the top surface of the sidewall portion are formed in parallel to each other so as to be joined to each other so that the sidewall portion protrudes at the same height from both sides of the bottom portion, The laser source unit includes a laser medium portion in which both ends of the laser medium are protruded to both sides and a surface of each end portion of the laser medium is a junction surface. Both ends of the laser medium in the laser medium portion are joined to each other, Wherein the support is in contact with the upper surface of the side wall portion, Of the bottom surface is bonded in contact with the top surface of the base, the mirror respectively, is characterized in that the lower end of one side thereof The one side surface side is a contact face to be bonded are brought into contact with both side surfaces, respectively of said base.

Description

TECHNICAL FIELD [0001] The present invention relates to a laser resonator module,

More particularly, the present invention relates to a laser resonator module in which an optical component constituting a laser resonator module for generating and amplifying laser light has a junction surface processed to have a right angle, The present invention relates to a laser resonator module in which alignment and maintenance are facilitated, in which optical components are easily aligned and held by bonding mutually contacting surfaces to each other.

Generally, a laser resonator has a structure in which mirrors are disposed on both sides of a laser medium so that the photons are reciprocated through a laser medium. One of the mirrors disposed on both sides is designed so that the possible reflectance is close to 100%, and the other mirror has a reflectance of less than 100%, so that some transmitted light becomes a laser beam.

Optical alignment between optical components such as a laser medium and a mirror is very important in order to efficiently generate and control a laser beam in a laser resonator module as in other laser optical systems.

Typically, the optical alignment between the optical components in the laser resonator module is performed in a process of being mounted on a mount or a base supporting each optical component, or after mounting on a mount or a base, and the optical components aligned on the mount or the base, It is coupled to the mount or base using mechanical parts or adhesives embedded in the mount or base. The above-mentioned coupling using mechanical parts or adhesives is performed by optically aligning the optical components and mechanically fixing or adhering the optical components in the optimum alignment state. Korean Patent No. 10-0795473 discloses a laser resonator module Discloses a 'laser oscillator rail' that includes a basic structure in the form of a straight bar for alignment of optical components.

However, the optical alignment by the mechanical or adhesive method as described above is not easy to maintain the alignment state permanently, the alignment is finely twisted by the external impact or vibration, and the alignment state is maintained in response to the change of temperature or humidity . That is, the 'rail for a laser oscillator' disclosed in Korean Patent No. 10-0795473 has a rail having a length L that is relatively longer than a width W and a height H, In the case of an alloy, it is liable to cause small deformation by an external factor, for example, warping, expansion, warping in the longitudinal direction, and the like.

Such deformation due to impact, vibration and temperature and humidity causes the alignment of the optical components of the laser oscillator to be disturbed, and ultimately, the laser output is lowered.

Korean Patent No. 10-0795473 (Rail for Laser Oscillator)

It is an object of the present invention to provide a laser resonator module for generating and amplifying a laser beam, the optical component having a junction surface processed to have a right angle, The present invention is to provide a laser resonator module in which alignment and maintenance can be facilitated in which optical components are easily aligned and held by bonding mutually contacting surfaces to each other.

According to an aspect of the present invention, there is provided a laser resonator module including a laser source unit for generating laser light and a mirror disposed on each side of the laser source unit, Wherein the bottom surface of the bottom portion and the top surface of the side wall portion are parallel to each other at both sides of the bottom portion, Wherein the laser source unit comprises a laser medium portion in which both ends of the laser medium are protruded to both sides and both end portions of the laser medium are joined to each other, Both ends of the medium have their end faces joined to each other, And the bottom surface of the bottom portion is brought into contact with the upper surface of the base so as to be brought into contact with the top surface of the base, and the one side surface of each of the mirrors is in contact with the lower surface of the base, So as to be joined.

The laser resonator module according to the present invention is characterized in that the junctions between the junction surfaces which are brought into contact with each other and are bonded to each other are coupled to each other by optical contact bonding.

The laser resonator module according to the present invention is characterized in that a queue switch for obtaining pulsed laser output light is disposed between the laser medium and the mirror and the bottom surface thereof is brought into contact with and bonded to the upper surface of the base .

According to another aspect of the present invention, there is provided a laser resonator module, wherein the laser source unit further includes a pumping light source unit for supplying energy into the laser medium, And the cooling medium is adhered to the laser medium to cool the laser medium.

According to the present invention, there is provided a laser resonator module which is easy to align and maintain according to the present invention, wherein an optical component constituting a laser resonator module for generating and amplifying laser light has a junction surface processed to have a right angle, It is easy to arrange the optical components so that the optical components are easily aligned and held.

FIG. 1 is a perspective view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention. FIG.
FIG. 2 is an exploded perspective view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention. FIG.
FIG. 3 is a front view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention.
Fig. 4 is a side view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention

Hereinafter, the laser resonator module according to the present invention will be described in more detail with reference to the embodiments shown in the drawings.

FIG. 1 is a perspective view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention, FIG. 2 is an exploded perspective view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention And FIG. 3 is a front view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention, and FIG. 4 is a side view showing a laser resonator module which is easy to maintain alignment according to an embodiment of the present invention .

Referring to the drawings, a laser resonator module according to an embodiment of the present invention includes a base 10, a support 20, a laser source unit 30, a pair of mirrors 40 and 50, and a cue switch 60 .

The present invention is characterized in that the bonding surfaces provided on the base 10 and the support 20 and the bonding surfaces provided on the laser medium 311 and the mirrors 40 and 50 of the laser source unit 30 are bonded to each other Thereby facilitating the alignment.

Particularly, the present invention is characterized in that the joining surfaces are bonded to each other by a normal mechanical method or an optical contact joining without using an adhesive.

The base 10 is configured such that mirrors 40 and 50 are bonded to both sides of the base 10 at the same time, and the support 20 is bonded to the base 10 at the same time. That is, the base 10 has a structure in which the laser medium 311 and the mirrors 40 and 50 supported on the support 20 are aligned and bonded together.

Referring to the drawings, the base 10 is a plate-shaped member having both side surfaces 12 and 13 parallel to each other and both side surfaces 12 and 13 and the upper surface 11 being formed to be perpendicular to each other. Each of the opposite side surfaces 12 and 13 of the base 10 is a joint surface to be joined to the joint surfaces 41 and 51 provided on the mirrors 40 and 50. The upper surface 11 of the base 10, Which is a joint surface to be joined to the joint surface of the support body 20, that is, the bottom surface 211. The figure shows an embodiment in which the base 10 constructed as described above is placed on the bottom plate 1 and supported.

The support 20 is configured to align the laser medium 311 of the laser medium 31 while supporting the laser medium 31 of the laser source unit 30. Referring to the drawing, the supporting body 20 has a bottom 21 formed at its center, and the side walls 22 and 23 protrude upward at the same height from both sides of the bottom 21, . That is, in the support 20, the sidewall portions 22 and 23 are vertically extended from the both sides of the bottom portion 21, and have a substantially ┗ ┛ shape. The upper surfaces 221 and 231 of the side walls 22 and 23 should be formed to have the same height so as to support the laser medium 311 horizontally and the upper surfaces 221 and 231 of the side walls 22 and 13, Should be formed parallel to the bottom surface 211 of the bottom portion 21. The bottom surface 211 of the bottom portion 21 of the supporting body 20 formed as described above is a bonding surface to be bonded to the top surface 11 of the base 10 and the top surface of the side walls 22, 221 and 231 serve as bonding surfaces to which the surfaces 311a and 311b at both ends of the laser medium 311 are bonded. The body of the laser medium portion 31 is accommodated between the side wall portions 22 and 23 and protruded to both sides of the body of the laser medium portion 31 on the upper surfaces 221 and 231 of the side wall portions 22 and 23 Both ends of the laser medium 311 are covered and the surfaces 311a and 311b at both ends thereof are bonded to the upper surfaces 221 and 231 of the side wall portions 22 and 13. The supporting body 20 supporting the laser medium 31 is bonded to the upper surface 11 of the base 10 so that the bottom surface 21 of the supporting body 20 is bonded to both sides of the base 10 Alignment with the mirrors 40 and 50 is performed.

The laser source unit 30 includes a laser medium portion 31 and a pumping light source portion 32.

The laser medium unit 31 of the laser source unit 30 is provided with a laser medium 311 for amplifying laser light, and laser light is emitted and incident on both ends thereof. As the laser medium 311, Nd: YAG is mainly applied. Referring to the drawing, the laser medium portion 31 has a structure in which both ends of the laser medium 311 protrude from both sides. The surfaces of both end portions of the laser medium 311 protrude from the upper surface of the support body 20 221, and 311, respectively. The laser medium 31 is supported by the side wall portions 22 and 23 of the support body 20 such that both end portions of the laser medium 311 are supported by the side wall portions 22 and 23 (Not shown).

The pumping light source unit 32 generates light and causes the pumping light source unit 32 to enter the laser medium 311. The pumping light source unit 32 includes a side plate 2 vertically erected from the side of the bottom plate 1, Lt; RTI ID = 0.0 > a < / RTI >

The mirrors 40 and 50 are arranged on both sides of the laser source unit 30 so as to reflect all or part of the laser light L emitted from the laser medium 311 of the laser source unit 30 . Each of the mirrors 40 and 50 is a contact surface where one side surface 41 and 51 are bonded to the opposite side surfaces 12 and 13 of the base 10, respectively. Accordingly, the mirrors 40 and 50 are aligned while the lower ends of the side surfaces 41 and 51 are in contact with the side surfaces 12 and 13 of the base 10, respectively.

The Q-switch 60 is a configuration for obtaining pulsed laser output light from the laser resonator module. That is, the cue switch 60 is positioned between the laser source unit 30 and the mirror 50, and switches the transmitted laser light to have a pulse of a predetermined period. For the optical alignment, the cue switch 60 is fabricated such that both sides of the cue switch L where the laser light L is incident and emitted are parallel to each other and both sides thereof are perpendicular to the bottom surface, and the bottom surface thereof is a joint surface, 10).

On the other hand, the present invention is characterized in that a method of using an adhesive or mechanical means is unnecessary because the bonding between bonding surfaces to be bonded to each other is made by optical contact bonding. The optical contact bonding utilizes the bonding force generated by the contact between the precision machined surfaces, and the bonding force is such that it uses a near-intermolecular bonding force such as Van der Waal's force.

The present invention is based on the use of such optical contact bonding to provide a combination of the base 10, the support 20 and the optical components (laser source unit 30, mirrors 40, 50, queue switch 60) The bonding surfaces of the base 10, the support 20 and the optical components 30, 40, 50 and 60 are excellent in flatness and extremely low in roughness . For example, the bonding surface of the base 10, the support 20, and the optical components 30, 40, 50, and 60 has a peak to valley flatness of 1 / has a 50 to 1 of 2, root mean square roughness (root mean square roughness, rms value) is preferably formed to have a 0.2 × 10 -10 m (0.2Å) to about 2 × 10 -10 m (2Å) . Further, in order to perform the photo-induced contact bonding, it is preferable that the bonding surface is subjected to a cleaning treatment so that foreign substances having a diameter of 5 占 퐉 or more are not present.

It is preferable that the component having the bonding surface, that is, the base 10, the support 20, the mirrors 40 and 50, and the cue switch 60 are made of a material having a low thermal expansion coefficient, It is also possible to use a fused silica or a glass material, which is a general optical glass series. When a material having a low thermal expansion coefficient is used for a component having the above-mentioned bonding surface, it is preferable to use any of zerodur and ULE materials having a thermal expansion coefficient of 0.001 x 10 -6 K or lower in the range of -20 캜 to 80 캜 It is preferable to use one.

The laser resonator module described above and easy to maintain alignment shown in the drawings is only one embodiment for implementing the present invention and should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is defined only by the matters set forth in the following claims, and the embodiments improved and changed without departing from the gist of the present invention are obvious to those having ordinary skill in the art to which the present invention belongs It will be understood that the invention is not limited thereto.

10 base
20 support
30 laser source block
31 laser medium portion
311 Laser medium
32 pumping light source
40,50 mirror
60 queue switches

Claims (4)

A laser resonator module comprising a laser source unit for generating laser light and a mirror disposed on each side of the laser source unit,
A base having both side surfaces parallel to each other and being formed so that both side surfaces and upper surfaces are perpendicular to each other so that each of the both side surfaces and the upper surface are bonded to each other, and a side wall portion protruding from each of both sides of the bottom portion upward at the same height, And the upper surface is further provided with a supporting member formed parallel to the bonding surface,
Wherein the laser source unit comprises a laser medium portion in which both end portions of the laser medium in the direction of the optical axis are protruded to both sides of the body and the lower surface of both end portions of the laser medium is a joint surface,
The laser medium portion is positioned and accommodated between the side wall portions of the support, and the both ends of the laser medium are joined to each other by the lower surface of the end portion being a joining surface and the lower surface of both ends contacting the upper surface of the side wall portion ,
Wherein the bottom of the bottom portion is in contact with the upper surface of the base,
Each of the mirrors has one side surface as a contact surface, and a lower end of one side surface of the mirror is in contact with both sides of the base,
The bonding surface formed on the upper surface of the base, the bottom surface of the support, the upper surface of the side wall of the support, the lower surface of both ends of the laser medium, and one side of each of the mirrors has a peak to valley flatness And has a root mean square roughness (rms value) of 0.2 x 10 -10 m (0.2 Å) to 2 x 10 -10 m (2 Å). Respectively,
Wherein the optical resonator module is coupled by optical contact between the contact surfaces that are in contact with each other. delete The method according to claim 1,
A cue switch for obtaining pulsed laser output light is disposed between the laser medium and the mirror, a bottom surface of the cue switch is a contact surface to be brought into contact with the top surface of the base,
The junction surface of the cue switch has a peak to valley flatness of 1/50 to 1/2 of the wavelength? Of the laser light and a root mean square roughness (rms value) of 0.2 X 10 -10 m (0.2 Å) to 2 × 10 -10 m (2 Å)
And the junction between the junction surface of the cue switch and the junction surface of the base is coupled by optical contact bonding. The method according to claim 1 or 3,
The laser source unit further includes a pumping light source unit for supplying energy into the laser medium,
Wherein the laser medium is bonded to the laser medium to cool the laser medium.
KR1020150060783A 2015-04-29 2015-04-29 Laser resonator module with easily fixed alignment KR101776093B1 (en)

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KR101776093B1 true KR101776093B1 (en) 2017-09-19

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001053360A (en) 1995-10-17 2001-02-23 Universal Laser Syatems Inc Glass slab laser
JP2002111099A (en) * 2000-09-29 2002-04-12 Miyachi Technos Corp Laser oscillator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100795473B1 (en) 2006-07-20 2008-01-21 박충범 Rail for use in a laser oscillator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001053360A (en) 1995-10-17 2001-02-23 Universal Laser Syatems Inc Glass slab laser
JP2002111099A (en) * 2000-09-29 2002-04-12 Miyachi Technos Corp Laser oscillator

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