KR101768537B1 - Device for controlling lithography and laser apparatus having dual bus - Google Patents

Device for controlling lithography and laser apparatus having dual bus Download PDF

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KR101768537B1
KR101768537B1 KR1020150106999A KR20150106999A KR101768537B1 KR 101768537 B1 KR101768537 B1 KR 101768537B1 KR 1020150106999 A KR1020150106999 A KR 1020150106999A KR 20150106999 A KR20150106999 A KR 20150106999A KR 101768537 B1 KR101768537 B1 KR 101768537B1
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control
driving
information
units
motion
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KR1020150106999A
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Korean (ko)
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KR20170014139A (en
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김형문
김수한
백종휘
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주식회사 필옵틱스
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3042—Imagewise removal using liquid means from printing plates transported horizontally through the processing stations
    • G03F7/3071—Process control means, e.g. for replenishing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

An exposure laser apparatus control system for controlling an exposure laser apparatus, discloses a control system having an architecture that can be reused. The control system includes a server, a main controller, a driver, and an auxiliary controller. Depending on the performance of the required control system, the availability of the auxiliary control device and the data processing capabilities of the auxiliary control device may be determined. Even when one of the server, the main controller, the driving device, and the auxiliary control device is changed, the other devices can be reused. To effectively design such a control system, a dual bus is introduced.

Figure R1020150106999

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a control device for an exposure laser device having a dual-

To a control apparatus for controlling an exposure laser apparatus.

Each part of the exposure laser apparatus having the exposure part and the laser part is moved or moved in position by the drive motor according to the purpose. However, the reliability of the exposure laser apparatus may be degraded if the respective drive motors of the exposure laser apparatus to operate with high precision are not operated in synchronization with each other, and there is a delay between drive signals for controlling the respective drive motors.

In order to precisely control each of the driving units of the exposure laser apparatus, a method of feedback controlling information about each constituent part of the exposure laser apparatus, for example, an encoder, a motor, a laser interferometer, . However, this feedback information may have a very large amount of data. According to the prior art, there is a problem in that a control system for controlling each driving part of the exposure laser device has a bus structure which is not suitable for processing such a large amount of data have.

Further, there is a need to provide various levels of precision of the control system for controlling the exposure laser apparatus, as the user needs. However, if only a part of each component constituting the control system can be replaced by performing a similar function, it is possible to increase the reusability of other components. However, according to the related art, since such a control system is provided integrally, Reusability is not being considered.

In the present invention, there is provided an apparatus for controlling an exposure laser apparatus, the apparatus having an architecture capable of replacing modules according to various control levels and having an internal bus structure suitable for synchronizing and controlling a plurality of driving units of the exposure laser apparatus .

It is possible to provide a main controller for generating a set of control signals for controlling the driving apparatus 2 having a plurality of driving motors according to an aspect of the present invention. The main controller includes: a plurality of motion controllers; Motion control host; Control bus; And a traffic bus. The motion control host generates control information for controlling operations of the plurality of motion control units based on a control command provided from a server and provides the control information to the plurality of motion control units via the control bus . And the plurality of motion control units generate control signals for controlling the plurality of drive motors included in the drive unit according to the control information, respectively. And a control unit for controlling the plurality of motion control units so that the plurality of motion control units generate the control signal through the traffic bus, the observation information measuring the result of the operation of the driving unit, So that the control signal flows.

At this time, the driving device may be a device for driving the moving part of the exposure laser device.

Here, the main controller may further include a first switch unit, and the first switch unit is controlled to sequentially transmit the set of control signals composed of the control signals generated by the plurality of motion control units to the driving unit .

At this time, the observation information is transmitted from the driving device or transmitted from an auxiliary control device that processes information sensed by a separate sensing part that senses the state of a predetermined part of the target device driven by the driving device .

According to another aspect of the present invention, an exposure laser apparatus control system for controlling the exposure laser apparatus can be provided. The system may be a device consisting of a plurality of devices that can be separated from each other. The system comprises: a server; Main controller; And a driving device. The main control unit includes: a plurality of motion control units; Motion control host; Control bus; And a traffic bus. The motion control host generates control information for controlling operations of the plurality of motion control units based on a control command provided from the server and provides the control information to the plurality of motion control units via the control bus have. The plurality of motion control units generate control signals for controlling the plurality of driving motors included in the driving device, respectively. And a control unit for controlling the plurality of motion control units so that the plurality of motion control units generate the control signal through the traffic bus, the observation information measuring the result of the operation of the driving unit, So that the control signal flows.

At this time, the driving device includes a driving unit control device; A plurality of drivers; And the plurality of driving motors respectively controlled by the plurality of driving units. The driving unit control device may receive the generated control signal for controlling the plurality of driving motors, and control the plurality of driving units at the same time.

At this time, the system may further include an auxiliary control device. Wherein said auxiliary control device is adapted to receive said set of fine sensing information from a sensing section for sensing a state of predetermined portions of said exposure laser device and producing a set of precision sensing information, The main control unit may provide the main control unit with a set of auxiliary information generated by processing the precision detection information into a form that can be used by the plurality of motion control units.

At this time, the observation information may be transmitted from the driving apparatus.

At this time, the observation information may be the set of auxiliary information.

According to still another aspect of the present invention, there is provided an exposure laser apparatus control system for controlling an exposure laser apparatus. This exposure laser apparatus control system comprises: a server; A main control unit including a plurality of motion control units and a motion control host; And a driving device. The motion control host generates control information for controlling operations of the plurality of motion control units based on a control command provided from the server, and provides the control information to the plurality of motion control units. And the plurality of motion control units generate control signals for controlling the plurality of driving motors included in the driving apparatus based on the control information, respectively. The plurality of motion control units may generate observation information using the observation information measured by the external device such as the driving device or the auxiliary control device and measure the result of the operation of the driving device to generate a control signal . And the generated control signal is provided to the driving device so as to control the plurality of driving motors.

According to the present invention, there is provided an apparatus for controlling an exposure laser apparatus, the apparatus having an architecture capable of replacing modules according to various control levels and having an internal bus structure suitable for synchronously controlling a plurality of driving units of the exposure laser apparatus, Can be provided.

1 shows a structure of an exposure laser apparatus control system according to an embodiment of the present invention.
2 illustrates a structure of a server according to an embodiment of the present invention.
3 shows a structure of a driving apparatus according to an embodiment of the present invention.
4 illustrates a structure of a main controller according to an embodiment of the present invention.
5 illustrates a structure of an auxiliary control apparatus according to an embodiment of the present invention.
FIG. 6 is an illustration of the integrated information shown in FIG. 1 to FIG. 5.
FIG. 7 is a flowchart showing an operation sequence of the exposure laser apparatus control system according to an embodiment of the present invention.
8 is a flowchart showing an operation sequence of the exposure laser apparatus control system according to another embodiment of the present invention.
9 is a flowchart showing an operation sequence of the exposure laser apparatus control system according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein, but may be implemented in various other forms. The terminology used herein is for the purpose of understanding the embodiments and is not intended to limit the scope of the present invention. Also, the singular forms as used below include plural forms unless the phrases expressly have the opposite meaning.

<Overview of Exposure Laser Device Control System>

Fig. 1 shows the structure of an exposure laser apparatus control system 10 according to an embodiment of the present invention.

An exposure laser apparatus control system 10 according to an embodiment of the present invention includes a main control unit 1 (MCS), an auxiliary control unit 3 (ICS), a server 4, And a driving device 2. The drive may be referred to by the name Optical PAC System (OPS), for example. The 'auxiliary control device' may be referred to by another name such as 'high precision calculation module'. Each component shown in FIG. 1 can be replaced with an enhanced version and has an architecture that is compatible with other components that are not replaced even when replaced.

The drive unit 2 may be an apparatus for driving each part of the exposure laser apparatus 5 having an exposure unit and a laser optical unit. That is, the drive unit 2 is connected to each drive part of the exposure laser apparatus 5 And various motors that drive each of the driving parts in a manner such as linear motion, rotational motion, and piston motion. The driving device 2 can measure its state and provide it to the main controller 1.

The main control apparatus 1 can generate a control signal to be inputted to the driving apparatus 2 and provide it to the driving apparatus 2. [ The main control apparatus 1 can use the information fed back by the driving apparatus 2 for generating the control signal. Communication can be performed between the main control device 1 and the auxiliary control device 3 and / or between the main control device 1 and the driving device 2 using an optical medium, but the communication medium is not limited thereto.

The server 4 may provide a 'command' to the main control unit 1 via the 'command channel' 411 to cause the main control unit 1 to generate the control signal. The main control apparatus 1 is adapted to operate in accordance with an instruction received from the server 4 and an operator of the exposure laser apparatus control system 10 can store a predetermined algorithm by a person in the server 4. [ The server 4 may generate the command according to the stored algorithm and provide the command to the main control unit 1. [ Communication between the server 4 and the main control device 1 may be performed using, for example, the TCP / IP protocol, but the communication protocol is not limited thereto.

The auxiliary control unit 3 transmits additional auxiliary information for allowing the main control unit 1 to more finely control the driving unit 2 through the auxiliary information channels 71 to 74 ). The auxiliary control device 3 can obtain the sensing data relating to the state of each part of the exposure laser apparatus 5 from the sensing part 6. [ The sensing section 6 can precisely detect the state of each part of the exposure laser apparatus 5. The auxiliary control device 3 can provide the main control device 1 with the additional auxiliary information created by processing the obtained sensing data.

The auxiliary control device 3 may be omitted in the optical laser device control system according to the embodiment.

<Server>

2 shows a structure of a server 4 according to an embodiment of the present invention. The server 4 may be configured to include software 41 for providing a user interface and software 42 for managing the contents of the functional service. The software 41 may also be referred to as a SOMT (Stage Operator Management Terminal). The software 41 may mean, for example, a platform that can be used universally for other apparatuses other than the exposure laser apparatus 5 as well. The software 41 may support different operating systems such as Windows, Linux, and Unix.

<Driving device>

3 shows a structure of a driving apparatus 2 according to an embodiment of the present invention.

The driving apparatus 2 includes a driving unit controller 22 (PAC), a plurality of driving units 231 to 234, a plurality of driving motors 241 to 244, and a fifth interface 21 .

The fifth interface 21 can receive the control signal from the main control unit 1 via the control signal channel 91. [ The fifth interface 21 may transmit the received control signal to the driving unit controller 22. The control signal may include information directly required for controlling the plurality of driving motors. The driving unit controller 22 can control the driving currents output from the respective driving units 231 to 234 according to the control signal. Each of the driving units 231 to 234 may be responsible for the operation of the respective driving motors 241 to 244. The operation of the driving motors 241 to 244 can be controlled by the driving current provided from the driving units 231 to 234. [ Each of the driving parts of the exposure laser apparatus 5 can be driven by the driving motors 241 to 244.

Each of the drive motors 241 to 244 can provide information including its state to the drive controller 22. The driving unit control device 22 can prepare 'feedback information' using the information. The driving unit control device 22 and the fifth interface 21 can transmit the feedback information to the main control device 1 via the feedback channel 99. [

<Main control device>

4 shows the structure of the main controller 1 according to an embodiment of the present invention.

The main control device 1 includes a motion control host 15, motion controllers 11 to 14, a first switch 18, a control bus 16, a traffic bus 17, a first interface 191, 2 &lt; / RTI &gt;

The first interface 191 may provide the command received from the server 4 via the command channel 411 to the motion control host 15. The motion control host 15 interprets the command and can transmit the corresponding command part to the motion controllers 11 through 14 via the control bus 16. [ The first interface 191 may be implemented using, for example, the TCP / IP protocol, but the communication protocol is not limited thereto. The first interface 191 may support wired and wireless communication protocols.

Each of the motion control units 11 to 14 may be responsible for controlling the respective drive motors 241 to 244 shown in Fig. That is, for example, the control of the drive motor 241 may be performed by the motion control unit 11, and the control of the drive motor 244 may be performed by the motion control unit 14. Although the number of motion control units 11 to 14 is shown as N in FIG. 4, the number of motion control units 11 to 14 may be variable. That is, each motion control unit may be in the form of a card inserted into any one of a plurality of slots provided in the main control unit 1, and may be detachable as necessary.

The second interface 192 is a portion for inputting and outputting a signal for communicating with the drive device 2 and a signal for communicating with the auxiliary control device 3. [ The communication medium supported by the second interface 192 may be, for example, an optical medium, but is not limited thereto. The second interface 192 may support wired and wireless communication protocols. The bit rate of the information exchanged through the second interface 192 may be larger than the bit rate of the information exchanged through the first interface 191. [

The first switch unit 18 selectively supplies a plurality of signals input and output through the second interface 192 to the traffic bus 17 or a plurality of signals input and output through the traffic bus 17 to the second interface 192 of the first embodiment. Alternatively, according to an embodiment, the first switch unit 18 may exchange a signal input / output through the second interface 192 or a signal input / output through the traffic bus 17 at a time.

The 'control information' exchanged between the motion control units 11 to 14 and the motion control host 15 can be exchanged through the control bus 16 and a plurality of 'control channels' 111 to 114.

The 'traffic information' exchanged between the motion control units 11 to 14 and the second interface 192 may be exchanged by the traffic bus 17 and the plurality of traffic channels 121 to 124.

The information provided from the motion controllers 11 to 14 to the second interface 192 includes the position of the driving motors 241 to 244, the speed of the driving unit of the driving motors 241 to 244, Lt; RTI ID = 0.0 &gt; quantitative &lt; / RTI &gt; The bit rate of the information exchanged over the traffic bus 17 may be larger than the bit rate of the small amount of control information exchanged via the control bus 16. [

The information provided from the second interface 192 of the traffic information to the motion control units 11 to 14 is information on the state of each part of the exposure laser apparatus, And may include quantitative data. Alternatively, the information provided from the second interface 192 of the traffic information to the motion control units 11 to 14 may include the feedback information sent from the driving unit 2, It can be a large amount of information.

The control bus 16 and the traffic bus 17 may be buses conforming to different protocols and may operate with different clocks.

The operation of each part constituting the main control device 1 will be separately described below, and the structure of the auxiliary control device 3 will be described first.

<Auxiliary control device>

5 shows a structure of an auxiliary control device 3 according to an embodiment of the present invention.

The auxiliary control unit 3 may include a measurement value analysis host 33, a measurement value analysis unit 34, a second switch unit 32, a third interface 311 and a fourth interface 312.

The fourth interface 312 is configured to detect the 'precision detection information' about the state (ex: position, velocity, posture, time, etc.) of each part of the exposure laser apparatus 5 that the sensing unit 6 has accurately sensed and generated Through the 'sense channel' (81-84).

The precision detection information may be transmitted to the measurement value analysis host 33 and the measurement value analysis unit 34 and may be converted into the auxiliary information that can be directly used by the main control unit 1. [ The auxiliary information may be provided to the auxiliary information channels 71 to 74 via the third interface 311.

The second switch unit 32 may have a function of sequentially providing each auxiliary information part provided through each of the auxiliary information channels 71 to 74 by time division. The operation of the second switch unit 32 may be controlled by the measurement value analysis host 33. [

FIG. 6 is an illustration of the integrated information shown in FIG. 1 to FIG. 5.

&Lt; Operation Example 1 of Exposure Laser Device Control System >

FIG. 7 is a flowchart showing an operation sequence of the exposure laser apparatus control system according to an embodiment of the present invention.

The server 4 may transmit the command to the main control device 1 in step S11. The command may be an instruction to control the operation of the driving motors mounted on the main controller 1 in the exposure laser device 5, and may be a command including a predetermined algorithm.

The motion control host 15 instructs the motion control units 11 to 14 to control the drive motors through the control bus 16 and the control channels 111 to 114 so that the motion control units 11 to 14 respectively control the drive motors in step S12. A control command can be transmitted.

In step S13, each of the motion control units 11 to 14 outputs the above-described feedback information sent by the driving apparatus 2 via the feedback channel 99 and the traffic bus 17 and the feedback information supplied from the motion control host 15 Can be used to generate a set of control signals used for control of each drive motor. For example, the first motion control unit 11 may generate a first control signal used for controlling the first driving motor 241, and the Nth motion control unit 14 may control the Nth driving motor 244 Lt; RTI ID = 0.0 &gt; N control signals &lt; / RTI &gt; The first to Nth control signals may collectively be referred to as the set of control signals and the set of control signals may be communicated to the drive 2 via the control signal channel 91 .

The first switch unit 18 can sequentially provide the control signals generated by the motion control units 11 to 14 to the drive unit 2 through the control signal channel 91 in step S14. Here, 'sequential' means that the control signal generated by the second motion control unit 12 is supplied to the drive unit 2, for example, after providing the control signal generated by the first motion control unit 11 to the drive unit 2 And the like.

In step S15, the driving unit control device 22 can collectively collect the plurality of control signals sequentially and synchronously control the plurality of driving motors 241 to 244. Herein, the 'synchronization' means that the driving unit control device 22 controls the plurality of driving units 231 to 244 so that the driving motors 241 to 244 that need to be simultaneously driven can be driven without deviating from the predetermined schedule without time delay to each other. To 234 may be controlled simultaneously.

In step S16, the driving unit control device 22 can sense the state of the driving motors 241 to 244 and transmit the generated feedback information to the main control device 1 through the feedback channel 99. [ At this time, a feedback sensing device for sensing the states of the driving motors 241 to 244 may be provided inside or outside the driving unit control device 22, though not shown in FIG.

The embodiment according to Fig. 7 shows an embodiment in which the auxiliary control device 3 is not involved in the operation of the exposure laser apparatus control system. Therefore, in the embodiment of Fig. 7, the auxiliary control device 3 is not required.

&Lt; Operation Example 2 of Exposure Laser Device Control System >

8 is a flowchart showing an operation sequence of the exposure laser apparatus control system according to another embodiment of the present invention.

Steps S24 to S25 in the flowchart shown in Fig. 8 are modified from steps S14 to S15 in the flowchart shown in Fig. Steps S21 to S23 and S26 in the flowchart shown in Fig. 8 are the same as steps S11 to S13 and S16 in the flowchart shown in Fig. 7, respectively. Therefore, the description of steps S21 to S23 and S26 is omitted.

In step S14, the first switch unit 18 sequentially supplies the respective control signals to the drive unit 2. In step S24, however, the first switch unit 18 collects the respective control signals, 2) at a time. Therefore, in step S15, the drive control unit 22 is adapted to collect a plurality of control signals sequentially provided, but it differs in that it is not necessary in step S25.

The embodiment according to Fig. 8 shows an embodiment in which the auxiliary control device 3 is not involved in the operation of the exposure laser apparatus control system. Therefore, in the embodiment of Fig. 8, the auxiliary control device 3 is not necessary.

&Lt; Operation Example 3 of Exposure Laser Device Control System >

9 is a flowchart showing an operation sequence of the exposure laser apparatus control system according to another embodiment of the present invention.

The server 4 may transmit a command to the main control device 1 in step S31. The command may be an instruction to control the operation of the driving motors mounted on the main controller 1 in the exposure laser device 5, and may be a command including a predetermined algorithm.

The motion control host 15 instructs the motion control units 11 to 14 to control the drive motors through the control bus 16 and the control channels 111 to 114 so that the motion control units 11 to 14 respectively control the drive motors in step S32. A control command can be transmitted.

In step S33, each of the motion control units 11 to 14 transmits the sub-control information to the sub-control unit 3 through the auxiliary information channels 71 to 74, the traffic bus 17, and the first switch unit 18, It is possible to generate a control signal used for controlling each driving motor by using the auxiliary information for each part of the driving motor 5.

The first switch unit 18 can sequentially provide the control signals generated by the motion control units 11 to 14 to the drive unit 2 through the control signal channel 91 in step S34. Here, 'sequential' means that the control signal generated by the second motion control unit 12 is supplied to the drive unit 2, for example, after providing the control signal generated by the first motion control unit 11 to the drive unit 2 And the like.

For example, the auxiliary control device 3 may precisely detect the state of the portion that is moved by the first drive motor 241 or the first drive motor 241, for example, in step S33 and step S34, It is possible to acquire a first precision detection information through the first sensing channel 81 and transmit the generated first auxiliary information to the main control apparatus 1 through the first auxiliary information channel 71 using the result . The first switch unit 18 of the main controller 1 may provide the first auxiliary information to the first motion controller 11 through the traffic bus 17. [ The first motion control unit 11 may generate a first control signal for controlling the first driving motor 241 using the first sub information and the command provided by the motion control host 15. [ The generated first control signal may be transmitted to the driving apparatus 2 via the traffic bus 17, the first switch unit 18, and the second interface 192.

Then, the auxiliary control device 3 acquires the K-th precision sensing information on the K-th driving motor through the K-th sensing channel, and generates the K-th auxiliary information generated using the result of the K- To the device. Then, the first switch unit of the main controller may provide the Kth auxiliary information to the Kth motion controller through the traffic bus. The Kth motion control unit may generate a Kth control signal for controlling the Kth driving motor using the Kth auxiliary information and the command provided by the motion control host 15. [ The generated Kth control signal may be provided to the driving unit 2 through the traffic bus 17, the first switch unit 18 and the second interface unit 192 (K = 2, ..., K). ., N)

In step S35, the driving unit controller 22 may collectively receive the plurality of control signals sequentially and control the plurality of driving motors 241 to 244 in synchronization. Herein, the 'synchronization' means that the driving unit control device 22 controls the plurality of driving units 231 to 234 so that the driving motors 241 to 244 that need to be simultaneously driven can be driven without a time delay with respect to each other Can be performed at the same time.

In step S36, the sensing unit 6 senses information on each part of the exposure laser apparatus 5 and provides the sensed information to the auxiliary control unit 3. At this time, a sensing device for sensing the states of the driving motors 241 to 244 is not shown in FIG. 6, but may be provided inside or outside the driving unit control device 22.

The embodiment according to Fig. 9 shows an embodiment in which the auxiliary control device 3 is involved in the operation of the exposure laser apparatus control system. The sensing performance of the sensing unit 6 used in the auxiliary control apparatus 3 may be superior to the feedback sensing apparatus shown in Figs. In FIG. 9, since the auxiliary control device 3 having better performance than the feedback sensing device is used, the feedback information generated from the feedback sensing device may not be used.

&Lt; Advantages of the Present Invention &

The main controller 1 provided according to the present invention has at least two technical advantages.

First, since four modules called the main control unit 1, the driving unit 2, the auxiliary control unit 3, and the server 4 are provided separately and independently, only the performance of either of them is upgraded Or downgrading, it is possible to increase the reusability of the system components by replacing only the corresponding module without changing the entire system.

Second, on the basis of the modular architecture as described above, a bus existing in the main control device 1, a traffic bus 17 for processing traffic information having a large data amount, and control information having a relatively small amount of data It is possible to increase the system efficiency of the main control apparatus 1 by separating them from each other by the control bus 16 to be processed. It is possible to obtain a great technical advantage over the prior art in which the control information and the traffic information are exchanged through the same bus.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the essential characteristics thereof. The contents of each claim in the claims may be combined with other claims without departing from the scope of the claims.

Claims (9)

A main control device (1) for generating a set of control signals for controlling a drive device (2) having a plurality of drive motors,
A plurality of motion control units (11-14); A motion control host 15; A control bus 16; And a traffic bus 17,
The motion control host generates control information for controlling operations of the plurality of motion control units based on a control command provided from the server 4 and provides the control information to the plurality of motion control units via the control bus Respectively,
Wherein each of the plurality of motion control units is adapted to generate a control signal for controlling a plurality of drive motors included in the drive unit according to the control information,
Wherein the plurality of motion control units are provided to the plurality of motion control units so that the plurality of motion control units can generate the control signal through observation of the results of the operation of the driving unit, The control signal is made to flow,
Main control device. The main control device according to claim 1, characterized in that the drive device is a device for driving the movable part of the exposure laser device. 2. The apparatus according to claim 1, further comprising a first switch unit (18), wherein the first switch unit sequentially transmits the set of control signals composed of the control signals generated in each of the plurality of motion control units Wherein the main control unit is controlled to transmit the main control signal. 2. The apparatus according to claim 1, wherein the observation information is transmitted from the driving apparatus, or information detected by a separate sensing unit (6) for sensing a state of a predetermined portion of the target apparatus Is transmitted from an auxiliary control device (3) to be processed. An exposure laser apparatus control system for controlling an exposure laser apparatus,
server; Main controller; And a drive device,
The main control unit includes: a plurality of motion control units; Motion control host; Control bus; And a traffic bus,
The motion control host generates control information for controlling operations of the plurality of motion control units based on a control command provided from the server and provides the control information to the plurality of motion control units via the control bus However,
Wherein each of the plurality of motion control units is configured to generate a control signal for controlling a plurality of drive motors included in the driving device,
Wherein the plurality of motion control units are provided to the plurality of motion control units so that the plurality of motion control units can generate the control signal through observation of the results of the operation of the driving unit, The control signal is made to flow,
Exposure laser device control system. 6. The method of claim 5,
The driving device includes a driving unit control device (22); A plurality of driving units 231 to 234; And a plurality of driving motors (241 to 244) respectively controlled by the plurality of driving units,
Wherein the driving unit control device is configured to receive the generated control signal for controlling the plurality of driving motors and simultaneously control the plurality of driving units,
Exposure laser device control system. 6. The method of claim 5,
Further comprising an auxiliary control device,
The auxiliary control device includes:
To receive the set of fine-grained sensing information from a sensing section for sensing a state of predetermined portions of the exposure laser device to produce a set of precision sensing information,
And providing the set of auxiliary information to the main control unit by processing the received set of fine control information into a form usable by the plurality of motion control units,
Exposure laser device control system. 6. The exposure laser apparatus control system according to claim 5, wherein the observation information is transmitted from the driving apparatus. 8. The exposure laser apparatus control system according to claim 7, wherein the observation information is the set of auxiliary information.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002089619A (en) 2000-09-14 2002-03-27 Canon Inc Active vibration resistant device, method of calculation of mode matrix, and exposure device using them
JP2003037986A (en) 2001-07-25 2003-02-07 Nikon Corp Motor drive device, stage device and exposure device having the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002089619A (en) 2000-09-14 2002-03-27 Canon Inc Active vibration resistant device, method of calculation of mode matrix, and exposure device using them
JP2003037986A (en) 2001-07-25 2003-02-07 Nikon Corp Motor drive device, stage device and exposure device having the same

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