JP2003037986A - Motor drive device, stage device and exposure device having the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a motor drive device capable of eliminating low frequency beat noises generated when a plurality of motors are driven, a stage device and an exposure device having the same. SOLUTION: The motor drive device 22 for driving a plurality of motors 31, 32 is provided with supply parts 33, 34 which have a plurality of current control parts of a pulse width modulation system and supply the output signals to be generated respectively by a plurality of current control parts to the plurality of motors 31, 32, and one reference signal generating part 35 for generating periodical reference signals. Furthermore, the plurality of current control parts are respectively provided with a pulse width modulation part for performing the pulse width modulation using the one reference signal to be generated by the reference signal generating part 35.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motor drive device,
The present invention relates to a stage device and an exposure apparatus provided with the same, and more particularly to a motor drive device suitable for use under conditions with strict positioning accuracy such as semiconductor manufacturing technology.

[0002]

2. Description of the Related Art Conventionally, there has been known a motor drive device provided with a pulse width modulation (PWM) type current control device (Japanese Patent Application Laid-Open No. 10-271876 and Japanese Patent Application Laid-Open No. 8-126).
374, etc.). This motor drive device, for example,
It is mounted in an exposure apparatus used in the manufacturing process of semiconductor devices, liquid crystal devices, etc., and is used for driving a motor of a stage that moves a wafer (exposure target), a reticle (mask), and the like.

A PWM type current control device is a circuit for generating an output signal which is substantially proportional to an input signal by pulse width modulation. When a feedback mechanism is provided, for example, a deviation amount between the input signal and the output signal is generated. Is generated, and the PWM signal is generated by comparing the error signal with a reference, for example, a triangular wave signal.

For this reason, in the motor drive device equipped with the PWM type current control device, in addition to the current control device, P
A circuit that oscillates a triangular wave signal that is a reference when generating a WM signal (hereinafter referred to as “oscillation circuit”) is also provided. Then, the motor drive device 71 (FIG. 4) including the current control device and the oscillation circuit described above supplies the output signal from the current control device to the motor 72 to drive the motor 72.

Further, in a device provided with a plurality of motors 72, when the plurality of motors 72 are driven (FIG. 5), the above-mentioned motor drive device 71 (of the PWM system) is provided for each motor 72. (Including a current control device and an oscillation circuit) are connected one by one, and an output signal obtained from the current control device of each motor drive device 71 is supplied to each motor 72.

[0006]

By the way, in the above-mentioned prior art, since one motor drive device 71 (including a PWM type current control device and an oscillation circuit) is connected to one motor 72, a plurality of motor drive devices 71 are connected. Motor 721,7
A device equipped with 22 (FIG. 5) includes a plurality of motor drive devices 7.
11, 712 are provided, and each of the plurality of motor drive devices 711, 712 is provided with an oscillation circuit.

These oscillator circuits are constructed so that the frequencies of the triangular wave signals (signals that serve as a reference when generating a PWM signal) oscillated from each of them have the same value. However, the frequencies of the triangular wave signals oscillated from the plurality of oscillation circuits do not become exactly the same even if they are precisely controlled to be equal, and in general, the frequencies f ₁ on the right side of FIG.
As exaggeratedly shown in f ₂ , a slight deviation is unavoidable.

Therefore, a plurality of motor drive devices 71
When a plurality of motors 721 and 722 are driven by using 1,712 (Fig. 5), a low-frequency beat (beat) of a frequency corresponding to the frequency difference (f ₁ -f ₂ ) between the plurality of oscillation circuits is used. ) Will occur. Then, this low frequency beat is superimposed as noise on the output signals obtained from the current control devices of the respective motor drive devices 711 and 712. Therefore, an output signal containing low-frequency beat noise is supplied to each of the motors 721 and 722, causing speed unevenness (ripple) in the operation of the motors, which deteriorates the position accuracy of the motors 721 and 722. I was letting it.

It is an object of the present invention to provide a motor drive device, a stage device, and an exposure apparatus equipped with the motor drive device, which can remove low-frequency beat noise when driving a plurality of motors.

[0010]

A motor drive device of the present invention is a motor drive device for driving a plurality of motors,
A supply unit that has a plurality of pulse width modulation type current control units, supplies the output signals respectively generated by the plurality of current control units to each of the plurality of motors, and one reference signal that generates a periodic reference signal. And a generator. further,
Each of the plurality of current control units described above is provided with a pulse width modulation unit that performs pulse width modulation using one reference signal generated by the reference signal generation unit.

In the stage device of the present invention, the above-mentioned motor drive device is used as the drive part of the stage part. An exposure apparatus of the present invention is an exposure apparatus that forms a predetermined pattern on a substrate using an exposure optical system, and includes the above stage device.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

Embodiments of the present invention are defined in claims 1 to 3.
Corresponding to. Before describing the motor drive device according to the present embodiment in detail, the overall structure of a stage device and an exposure apparatus incorporating the motor drive device will be briefly described. As shown in FIG. 1, the exposure apparatus 10 is provided with a stage 11 on which a semiconductor wafer 12 to be exposed is mounted, and a stage controller 15 that controls the stage 11. A projection optical system 13 is provided above the stage 11, and a reticle stage 13b is provided above the projection optical system 13. The reticle stage 13b is for mounting the reticle 13a.

Further, the exposure apparatus 10 includes a stage controller 16 for controlling the reticle stage 13b and a TTR.
(Through the reticle) type position measuring unit 14a, 1
4b, TTL (through-the-lens) type position measuring units 14c and 14d, and off-axis type position measuring units 14e and 14f. Position measuring unit 14
Reference numerals a and 14b are for observing the mark on the reticle 13a and the alignment mark on the stage 11 side in an overlapping manner via the reticle 13a and the projection optical system 13. The position measuring units 14c and 14d are for observing the alignment mark on the stage 11 side via the projection optical system 13. The position measuring units 14e and 14f are for directly observing the alignment mark on the stage 11 side without going through the projection optical system 13 or the like.

Further, the exposure apparatus 10 includes a position controller 21 for independently controlling the stage controllers 15 and 16, and a stage 11 and a reticle stage 13 for the position controller 21.
An upper control unit (not shown) for outputting the target position information of b is provided. The position control unit 21 includes the position measurement units 14a to 14a.
Based on the current position information from 4f and the target position information from a higher-order control unit (not shown), it is necessary to determine the speed and position accuracy when bringing the stage 11 closer to the target position, and to realize this. The motor thrust (a required thrust to the motor unit 23 described later) is determined. Then, the position control unit 21 generates an input voltage signal for wafer position control based on the motor thrust force (request thrust force to the motor unit 23) determined as described above, and outputs this to the stage control unit 15. .

Further, the position control section 21 determines the speed and the position accuracy when the reticle stage 13b is brought close to the target position based on the above-mentioned current position information and target position information, and is necessary for realizing this. The motor thrust (a required thrust to the motor unit 26 described later) is determined. Then, the position control unit 21 generates an input voltage signal for reticle position control based on the motor thrust force (request thrust force to the motor unit 26) determined as described above, and outputs this to the stage control unit 16. .

The input voltage signals output from the position control unit 21 to the stage control units 15 and 16 are three-phase (U-phase, V-phase, W-phase) AC voltage signals (U-phase, V-phase, W-phase) having different phases by 120 degrees. Sine wave). The required thrust force on the motor units 23 and 26 is represented by the amplitude of the input voltage signal. Also,
The stage control unit 15 includes a motor drive device 22 for the stage 11, a motor unit 23, and a positioning mechanism 24. The motor drive device 22 for the stage 11 is
Based on the input voltage signal (the signal representing the required thrust force to the motor unit 23) from the position control unit 21 described above, the motor unit 2
3 is driven (details will be described later). Then, the positioning mechanism 24 uses the motor unit 23 as a power source for the stage 11
Are driven in a two-dimensional direction to position the semiconductor wafer 12.

On the other hand, the stage control section 16 includes a motor driving device 25 for the reticle stage 13b and a motor section 26.
And a positioning mechanism 27. The motor driving device 25 for the reticle stage 13b drives the motor unit 26 based on the input voltage signal (a signal representing the required thrust force to the motor unit 26) from the position control unit 21 described above.
(Details will be described later). Then, the positioning mechanism 27 drives the reticle stage 13b in the two-dimensional direction by using the motor unit 26 as a power source to position the reticle 13a.

The stage 11 and the stage controller 15 described above correspond to the "stage device" in the claims. Similarly, the reticle stage 13b and the stage control unit 16 also correspond to the "stage device" in the claims. The exposure apparatus 10 configured as described above is the semiconductor wafer 1
Since the second stage 11 and the reticle stage 13b for the reticle 13a are independently movable, they can be used for both the scanning type and the fixed type.

Next, the configuration of the motor drive device 22 for the stage 11 and the configuration of the motor section 23 driven by the motor drive device 22 will be described with reference to FIG.
This will be described in detail with reference to FIG. Since the configuration of the motor drive device 25 for the reticle stage 13b and the configuration of the motor unit 26 driven by the motor drive device 25 are the same as those of the motor drive device 22 and the motor unit 23, the description thereof will be omitted. .

The motor unit 23 for the stage 11 is composed of two motors 31 and 32, as shown in FIG. For example, one motor 31 drives the stage 11 at x
The other motor 32 is used to move the stage 11 in the y-axis direction in order to move the stage 11 in the y-axis direction. Motors 31 and 32 are moving magnets (MM)
System or moving coil (MC) system three-phase linear motor, each of which includes a coil unit including a plurality of coils 31a and 32a, and a magnet unit (not shown) that forms a magnetic field having a predetermined magnetic flux density distribution. It is composed of.

In each of the motors 31 and 32,
Each of the plurality of coils 31a and 32a is divided into three groups, and an alternating current having the same phase (any one of U phase, V phase, and W phase) is supplied to each group. In FIG. 2, the coils 31a and 32a of the U-phase group to which the U-phase alternating current is supplied are denoted by the symbol "U", and the coils 31a and 3 of the V-phase group to which the V-phase alternating current is supplied.
Reference numeral 2a denotes a reference numeral "V" and coils 31a and 32a of the W-phase group to which the W-phase alternating current is supplied have a reference numeral "W".

On the other hand, the motor 3 constructed as described above
The motor drive device 22 of the present embodiment that drives 1, 32 (two three-phase linear motors) has two current control units 33,
34 (corresponding to “supply unit” in claims) and one PWM drive signal generating unit 35 (corresponding to “reference signal generating unit” in claims). The current control unit 33 inputs an input voltage signal (a signal representing a required thrust force to the motor 31) from the position control unit 21 described above, generates an output current signal substantially proportional to this input voltage signal, and outputs the obtained output. A current signal is supplied to each coil 31a of the motor 31.

The current controller 34 is the position controller 2 described above.
The input voltage signal from 1 (a signal representing the required thrust to the motor 32) is input, an output current signal that is substantially proportional to this input voltage signal is generated, and the obtained output current signal is applied to each coil 32a of the motor 32. Supply to. The PWM drive signal generation unit 35 generates a PWM drive signal described later and outputs it to each of the current control units 33 and 34. That is, one PWM drive signal generated by the PWM drive signal generation unit 35 is distributed from the PWM drive signal generation unit 35 to each of the current control units 33 and 34.

The current control section 33 is composed of three current control circuits 41, 42 and 43. In each of the current control circuits 41, 42 and 43, the U phase and V phase from the position control section 21 are included. , W-phase AC voltage signal (input voltage signal for motor 31) is input, U-phase, V-phase, W-phase AC current signal (output current signal) is generated, and U-phase, V-phase of motor 31 is generated. ,
The coils are supplied to the coils 31a of the W-phase group.

The current control section 34 is composed of three current control circuits 44, 45 and 46. In each of the current control circuits 44, 45 and 46, the U-phase and V-phase from the position control section 21 are supplied. , W phase AC voltage signal (input voltage signal for the motor 32) is input, U phase, V phase, W phase AC current signal (output current signal) is generated, and the U phase, V phase of the motor 32 is generated. ,
The coils are supplied to the coils 32a of the W-phase group.

As a result, thrust is actually generated in each of the motors 31, 32 (two three-phase linear motors), and the coils 31a, 32 of the coil units (U-phase, V-phase, W-phase groups) are generated.
a) and the magnet unit (not shown) move relatively. The movement direction at this time is (1) V phase delayed by 120 degrees (or 240 degrees advanced) and W phase delayed by 240 degrees with respect to the U phase of the output current signal supplied to the coils 31a and 32a.
(Or 120 degrees ahead) and (2) V phase is 24
It is 0 degree behind (or 120 degrees leading) and the opposite when the W phase is behind 120 degrees (or 240 degrees leading).

Next, the motor drive device 22 of the first embodiment
And PWM control signal generator 35 and current control circuit 4
Each of 1 and 1 will be specifically described. Since the other current control circuits 42 to 46 have the same configuration as the current control circuit 41, the description thereof will be omitted. As shown in FIG. 3, the PWM drive signal generator 35 is composed of an oscillator circuit 51 and a triangular wave generator circuit 52.

The oscillator circuit 51 is a circuit which oscillates a periodic square wave voltage signal having a frequency of 100 kHz and a duty ratio of 50% and outputs it to the triangular wave generating circuit 52 in the subsequent stage. Hereinafter, a square wave voltage signal is referred to as a "square wave signal". The triangular wave generation circuit 52 is an integration circuit (see FIG. 3B) that receives the square wave signal from the oscillation circuit 51 and generates a periodic triangular wave voltage signal. Hereinafter, the triangular wave voltage signal is referred to as a “PWM drive signal”. The basic frequency of the PWM drive signal is 100 kHz. The PWM drive signal corresponds to the "reference signal" in the claims.

Then, one PWM drive signal generated by the triangular wave generating circuit 52 of the PWM drive signal generating section 35 is distributed to each of the current control circuits 41 to 46 in the subsequent stage and output.

On the other hand, the current control circuit 41 includes the input amplifier 6
1, an adder / subtractor 62, an error amplifier 63, a comparator 64, a photocoupler 65, a driver circuit 66,
It is composed of a smoothing circuit 67, a current detection resistor 68, and a current detection amplifier 69. In the current control circuit 41,
The PWM drive signal from the PWM drive signal generator 35 described above is input to the negative input terminal of the comparator 64. Further, the error amplifier 6 is connected to the positive input terminal of the comparator 64.
The error signal from 3 is input. The function of the error amplifier 63 and the error signal will be described later.

The comparator 64 uses the PWM drive signal from the PWM drive signal generator 35 as a reference for comparison, and PWM
This circuit compares the amplitude of the drive signal with the amplitude of the error signal from the error amplifier 63 to generate a PWM signal. The PWM signal is a signal in which the duty ratio (ratio between H level and L level) is modulated according to the amplitude of the error signal, and is output to the photo coupler 65 at the subsequent stage. The comparator 64 corresponds to the “pulse width modulator” in the claims.

The photocoupler 65 is a light emitting diode 65.
It is composed of a and a light receiving transistor 65b. The light emitting diode 65a is an element that converts the PWM signal from the comparator 64 into light. Light receiving transistor 65b
Is an element that converts light from the light emitting diode 65a into an electric signal. Therefore, the PW from the comparator 64
The M signal is once converted into an optical signal via the photocoupler 65 and is output to the driver circuit 66 in the subsequent stage.

Although not shown, the driver circuit 66 is composed of a switch control circuit and two switching elements (FET or IGBT). The switch control circuit is a circuit that alternately controls conduction of the two switching elements according to the PWM signal from the photocoupler 65.
That is, when the PWM signal is at the H level, one of the two switching elements is made conductive and the other is made nonconductive,
When the PWM signal is at L level, one is made non-conductive and the other is made conductive.

In the driver circuit 66 thus constructed, a current flows between the switching element which is in the conductive state and the smoothing circuit 67 in the subsequent stage. As a result, the PWM signal from the photocoupler 65 is power-amplified and output. The smoothing circuit 67 is a circuit that removes the fundamental frequency component and the harmonic component of the PWM signal power-amplified by the driver circuit 66 and smoothes them to generate an output current signal.

As described above, the driver circuit 66 and the smoothing circuit 67 are circuits which function as a current output amplifier.
Then, the output current signal from the smoothing circuit 67 is passed through the minute current detection resistor 68, and each coil 31 a of the motor 31.
(U-phase group coil 31a shown in FIG. 2). On the other hand, the output current signal supplied to each coil 31 a of the motor 31 is fed back to the adder / subtractor 62 by the feedback circuit including the minute current detection resistor 68 and the current detection amplifier 69. The current detection amplifier 69 amplifies the voltage drop in the minute current detection resistor 68 and outputs it as an output current detection signal to the negative input terminal of the adder / subtractor 62.

The input voltage signal (U-phase AC voltage signal) from the position controller 21 is input to the positive input terminal of the adder / subtractor 62 via the input amplifier 61. The adder / subtractor 62 is a circuit that generates an error signal based on the difference between the amplitude of the output current detection signal and the amplitude of the input voltage signal, and outputs the error signal to the error amplifier 63 in the subsequent stage. Then, the error amplifier 63 proportionally integrates the error signal from the adder / subtractor 62 and outputs it to the positive input terminal of the comparator 64.

As described above, the current control circuit 41 generates an error signal corresponding to the amplitude difference between the output current detection signal and the input voltage signal, and compares the error signal with the reference PWM drive signal to determine the PWM signal. Therefore, it is possible to always generate an output current signal that is approximately proportional to the input voltage signal (U-phase AC voltage signal) from the position control unit 21 (PW).
M type current control circuit).

The same applies to the other current control circuits 42 and 43 (FIG. 2) constituting the current control unit 33, and the PW is determined by comparing the error signal and the reference PWM drive signal.
Since the M signal is generated, it is always possible to generate the output current signal that is substantially proportional to the input voltage signal (V-phase and W-phase AC voltage signals) from the position control unit 21. As a result, the current control circuits 41 to 43 (current control unit 33) to the coils 31a of the motor 31 (U-phase, V-phase, W-phase group of coils 31a).
In a), the output current signal that is substantially proportional to the input voltage signal (U-phase, V-phase, W-phase AC voltage signal) from the position control unit 21 is always supplied.

The same applies to the current control circuits 44 to 46 that constitute the current control unit 34. Since the PWM signal is generated by comparing the magnitude of the error signal and the reference PWM drive signal, the position control unit 21 is always provided. It is possible to generate an output current signal that is substantially proportional to the input voltage signals (U-phase, V-phase, and W-phase AC voltage signals) for the motor 32 from. as a result,
From the current control circuits 44 to 46 (current control section 34) to the coils 32a (coils 32a of the U-phase, V-phase, W-phase group) of the motor 32, the motor 3 from the position control section 21 is always provided.
Input voltage signal for 2 (U-phase, V-phase, W-phase AC voltage signal)
An output current signal approximately proportional to is supplied.

Therefore, the motors 31, 32 (two three
The thrust force that is actually generated by the phase linear motor has a magnitude that substantially matches the required thrust force from the position control unit 21. As a result, the speed of the stage 11 driven by the motors 31 and 32 as a power source also substantially matches the speed determined by the position control unit 21 based on the current position information and the target position information.

Further, in the motor drive device 22 described above, one PWM drive signal generated by one PWM drive signal generation unit 35 is distributed to each of the current control units 33 and 34, and the current control units 33 and 34 operate. In each comparator 64, pulse width modulation using the same PWM drive signal is performed.

Therefore, when the motor drive device 22 is used to drive the motors 31 and 32 (two three-phase linear motors), an output current signal from the current control unit 33 to the motor 31 and a motor from the current control unit 34 are used. No low frequency beats occur in the output current signal to 32. That is, it is possible to remove low-frequency beat noise when driving the motors 31 and 32 (two three-phase linear motors).

As described above, the motor drive device 22 described above
According to this, since the motors 31 and 32 (two three-phase linear motors) can be driven in a state where low-frequency beat noise is removed, the mover (coil unit or magnet unit) forming the motors 31 and 32 can be driven. ), The speed unevenness (ripple) can be made very small. It should be noted that the motor drive device 25 (FIG. 1) having the same configuration as the motor drive device 22 can also drive the motor unit 26 (two three-phase linear motors) in a state where low-frequency beat noise is removed. it can.

Therefore, these motor drive units 2
In the exposure apparatus 10 (FIG. 1) equipped with 2, 25, the stage 11 for moving the semiconductor wafer 12 and the reticle 13a.
The position of the reticle stage 13b for moving the can be controlled with extremely high accuracy of about 10 nm, and accurate alignment of a fine exposure pattern can be performed. In the above-described embodiment, the triangular wave-shaped voltage signal output from the triangular wave generation circuit 52 (FIG. 3) is used as the PWM drive signal (reference signal) to control the current control units 33 and 34 (current control circuits 41 to 41).
46) has been described as an example, but the present invention is not limited to this configuration.

In addition, for example, a square wave voltage signal output from the oscillation circuit 51 is used as a PWM drive signal (reference signal).
As current control units 33 and 34 (current control circuits 41 to 4
It is conceivable that the distribution is made to each of 6). However, in this case, the current control units 33 and 34 (the current control circuits 41 to
In each of 46), the triangular wave generating circuit 52 is required in the preceding stage of the negative input terminal of the comparator 64.

Further, in the above embodiment, an example of the motor drive device for driving two three-phase linear motors (motors 31, 32) has been described, but it is also possible to drive three or more three-phase linear motors. The present invention can be applied. Furthermore, 3
The present invention is applicable not only to a two-phase linear motor but also to a two-phase linear motor or a four-phase linear motor or more. The present invention is applicable not only to linear motors but also to the driving of other motors (DC motors, etc.). The present invention can be applied even when a sawtooth voltage signal is used instead of the triangular wave voltage signal.

[0048]

As described above, according to the motor drive device of the present invention, low-frequency beat noise when driving a plurality of motors can be removed, so that speed unevenness (ripple) of motor operation can be reduced. Moreover, the positioning accuracy can be surely improved, and the reliability is improved.

Further, in the stage device using the motor drive device of the present invention as the drive part of the stage part, precise positioning control with respect to the stage part is possible, and the overall performance of the stage device is enhanced. Further, in an exposure apparatus using the above stage device as a reticle stage or a wafer stage, it is possible to perform precise positioning control with respect to the stage portion, so that the exposure apparatus as a whole can be made highly functional.

[Brief description of drawings]

FIG. 1 is a diagram showing an overall configuration of an exposure apparatus 10.

FIG. 2 is a diagram showing configurations of a motor drive device 22 and a motor unit 23.

FIG. 3 is a diagram showing configurations of a PWM drive signal generator 35 and a current control circuit 41.

FIG. 4 is a schematic view of a conventional motor drive device 71.

FIG. 5 is a schematic diagram showing a conventional configuration when driving a plurality of motors 72.

FIG. 6 is a diagram illustrating a problem when driving a plurality of motors 72.

[Explanation of symbols]

10 Exposure equipment 11 stages 12 Semiconductor wafer 13a reticle 13b reticle stage 14a to 14f Position measuring unit 15, 16 Stage control unit 21 Position controller 22,25 Motor drive device 23, 26 Motor part 24,27 Positioning mechanism 31,32 motor 31a, 32a coils 33, 34 Current control unit 35 PWM drive signal generator 41-46 Current control circuit 51 oscillator circuit 52 Triangle wave generator 61 Input amplifier 62 adder / subtractor 63 Error amplifier 64 comparator 65 Photo coupler 66 driver circuit 67 Smoothing circuit 68 Current detection resistor 69 Current detection amplifier

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) H02P 6/04 H02P 6/02 301 F term (reference) 5F046 BA04 CC01 CC17 5H540 AA10 BA05 BB07 BB08 BB09 EE05 EE06 EE08 FA14 FC02 5H560 AA10 BB04 BB05 BB12 CC04 DC12 EB01 EC01 RR01 TT05 TT07 UA05 UA06 XA02 XA04 XA05 XA12 5H572 AA14 AA20 BB04 DD09 DD10 EE03 GG01 GG02 GG04 HA09 HA10 HB09 HC07 JJ12 LL22 LL33 PP03

Claims (3)

[Claims] 1. A motor drive device for driving a plurality of motors, comprising a plurality of pulse width modulation type current control units, and outputting output signals respectively generated by the plurality of current control units to each of the plurality of motors. A supply unit for supplying and a reference signal generation unit for generating a periodic reference signal are provided, and one of the reference signals generated by the reference signal generation unit is provided to each of the plurality of current control units. A motor drive device characterized in that a pulse width modulator for performing pulse width modulation is provided. 2. A stage device, wherein the motor drive device according to claim 1 is used as a drive part of a stage part. 3. An exposure apparatus for forming a predetermined pattern on a substrate using an exposure optical system, comprising the stage device according to claim 2.