KR101763515B1 - Method and apparatus for detecting dna using graphene/silicon bio-sensor - Google Patents
Method and apparatus for detecting dna using graphene/silicon bio-sensor Download PDFInfo
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Abstract
Description
The present invention relates to an apparatus and method for detecting DNA using a graphene / silicon biosensor, and more particularly to a method and apparatus for detecting DNA using graphene / silicon biosensor, The present invention relates to a DNS detection apparatus and method for identifying a DNA according to whether a target DNA pair is paired with a predetermined probe DNA using a biosensor.
In recent years, nanostructures have been of great interest in fundamental scientific research as well as the potential for industrial applications. In particular, vertically aligned silicon nanostructures are considered to be ideal nano-based materials as next generation devices that perform functions such as condensing, power generation, energy storage, and sensors because of their high volume-to-area ratio obtained from their vertical structure.
In order to realize the physico-chemical properties required for practical application as a future device using a silicon nanostructure, it is necessary to realize smooth electrical contact between the vertically aligned nanostructures and the electrode.
Conventional biosensors use a method of detecting DNA using a single silicon nanostructure, or spotting a single or double stranded DNA prepared in advance on a predetermined region of a substrate.
However, in the conventional biosensor, there is a high possibility that the attached biomolecules are randomly arranged on the substrate, and the density of the attached region is low.
In addition, the conventional biosensor has a limitation in that the reliability of DNA detection to be measured is low and the reactivity thereof is very low, such as several nA, by using a single silicon nanostructure.
The present invention relates to a DNA detection method using a graphene / silicon biosensor capable of detecting DNA having strong reactivity by vertically bonding a graphene layer having high electrical conductivity and flexibility while being able to contact a plurality of uniformly aligned silicon nanostructures, Apparatus and method therefor.
The present invention also relates to a method of coating a functional material containing at least one of 3-aminopropyltriethoxysilane (3-APTES) and glutaraldehyde on a silicon nanostructure, And a DNA detection apparatus and method using the pin / silicon biosensor.
The present invention also provides a DNA detection apparatus and method using a graphene / silicon biosensor capable of precisely detecting and detecting DNA with high binding density by attaching probe DNA to a silicon nanostructure coated with a functional substance .
The present invention also provides a graphene / silicon biosensor comprising a silicon nanostructure having a probe DNA attached thereto and detecting a change in an amount of current depending on whether the probe DNA is attached to a target DNA pairing with the probe DNA, / DNA detection apparatus using silicon biosensor and method thereof.
A graphene / silicon biosensor according to an embodiment of the present invention includes a substrate, at least one of 3-aminopropyltriethoxysilane (3-APTES) and glutaraldehyde A plurality of silicon nanostructures on which the functional material including the functional material is coated, a graphene layer disposed on the silicon nanostructure, and an electrode formed on the bottom of the substrate and the graphene layer, respectively, DNA is identified according to whether or not target DNA (target DNA) forming a pair is attached to a predetermined probe DNA attached to the surface of the nanostructure.
The silicon nanostructure may be coated with the functional material for binding force of the probe DNA and the functional material may form a strong covalent bond between the surfaces of the silicon nanostructure so that the surface of the silicon nanostructure and the probe DNA Or < / RTI >
The electrode may be formed of at least one of silver (Ag), gold (Au), copper (Cu), aluminum (Al), platinum (Pt), and alloys thereof.
A DNA detection apparatus using a graphene / silicon biosensor according to an embodiment of the present invention includes a substrate, at least one of 3-aminopropyltriethoxysilane (3-APTES) and glutaraldehyde A plurality of silicon nanostructures coated with a functional material containing one of them, a graphene layer disposed on the silicon nanostructure, and an electrode formed on the bottom of the substrate and on the top of the graphene layer, respectively, And a detector for identifying the DNA according to whether or not a target DNA pair forming a pair with the predetermined probe DNA attached to the surface of the silicon nanostructure through the functional material is attached.
The detection unit may detect the DNA by detecting a change in the amount of current depending on whether the probe DNA and the target DNA are attached from the electrode included in the graphen / silicon biosensor.
According to the embodiment of the present invention, DNA having strong reactivity can be detected by vertically bonding a graphene layer having high electrical conductivity and flexibility while being able to contact with a plurality of uniformly aligned silicon nanostructures.
According to an embodiment of the present invention, a functional material including at least one of 3-aminopropyltriethoxysilane (3-APTES) and glutaraldehyde is coated on a silicon nanostructure, .
Further, according to the embodiment of the present invention, by attaching the probe DNA to the silicon nanostructure coated with the functional material, the binding density can be high, and accurate DNA detection and sensing can be performed.
Also, according to the embodiment of the present invention, a change in the amount of current depending on whether or not the probe DNA is attached to the target DNA pairing with the probe DNA is detected in a graphene / silicon biosensor including the silicon nanostructure having the probe DNA attached thereto, can do.
1 shows an example of a graphene / silicon biosensor according to an embodiment of the present invention.
2A to 2D are schematic views of a method of manufacturing a graphene / silicon biosensor according to an embodiment of the present invention.
FIG. 3 illustrates a functional material attached to a surface of a silicon nanostructure of a graphene / silicon biosensor according to an embodiment of the present invention.
4A to 4C show examples of the mechanism of a graphene / silicon biosensor according to an embodiment of the present invention.
5 is a block diagram of a DNA detection apparatus using a graphene / silicon biosensor according to an embodiment of the present invention.
FIGS. 6A to 6D show scanning electron microscopy (SEM) images of a graphene / silicon biosensor according to an embodiment of the present invention.
FIG. 7A is a graph showing the current change curve with respect to the concentration of the probe DNA according to the embodiment of the present invention, and FIG. 7B is a graph showing the current change according to the attachment of the target DNA and the dummy DNA to the probe DNA according to the embodiment of the present invention Curve and response diagrams.
FIG. 8 is a graph showing a result of a recycling characteristic of a graphene / silicon biosensor according to an embodiment of the present invention.
FIGS. 9A to 9C illustrate fluorescence characteristic images according to the adhesion of DNA applied to a graphene / silicon biosensor according to an embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings and accompanying drawings, but the present invention is not limited to or limited by the embodiments.
The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. It is noted that the terms "comprises" and / or "comprising" used in the specification are intended to be inclusive in a manner similar to the components, steps, operations, and / Or additions.
As used herein, the terms "embodiment," "example," "side," "example," and the like should be construed as advantageous or advantageous over any other aspect or design It does not.
Also, the term 'or' implies an inclusive or 'inclusive' rather than an exclusive or 'exclusive'. That is, unless expressly stated otherwise or clear from the context, the expression 'x uses a or b' means any of the natural inclusive permutations.
Also, the phrase "a" or "an ", as used in the specification and claims, unless the context clearly dictates otherwise, or to the singular form, .
Furthermore, the terms first, second, etc. used in the specification and claims may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs. Also, commonly used predefined terms are not ideally or excessively interpreted unless explicitly defined otherwise.
In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. The terminology used herein is a term used for appropriately expressing an embodiment of the present invention, which may vary depending on the user, the intent of the operator, or the practice of the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification.
1 shows an example of a graphene / silicon biosensor according to an embodiment of the present invention.
The graphene /
The graphene /
The
The
The
Also, the plurality of
According to an embodiment, the
The
The n-type impurity may include a
The
The
Depending on the embodiment, the
Electrodes 140 are formed on the bottom of the
For example, the electrode 140 may be a metal electrode, and the metal may include silver (Ag), gold (Au), copper (Cu), aluminum (Al), platinum have.
The graphene /
The probe DNA may be a single stranded DNA containing a nucleotide sequence in a sample DNA extracted from a sample cell, and the target DNA may be a single stranded DNA paired with a nucleotide sequence in the sample DNA .
In addition, the graphene /
Hereinafter, the manufacturing process of the graphene /
2A to 2D are schematic views of a method of manufacturing a graphene / silicon biosensor according to an embodiment of the present invention.
Referring to FIG. 2A, a method of fabricating a graphene / silicon biosensor according to an embodiment of the present invention includes forming a
Referring to FIG. 2B, a method of fabricating a graphene / silicon biosensor according to an embodiment of the present invention includes forming a plurality of
2B, an electrochemical etching method for fabricating a graphene / silicon biosensor according to an embodiment of the present invention includes a step of forming a mixed solution of silver nitrate (AgNO 3 ) and hydrofluoric acid (HF) And coating the silver particle on the silicon particle surface, and treating the silver particle coated
In addition, the
When the
The silver particles placed on the silicon have a high electric affinity property, so they take the electrons from the silicon surface in contact with the silver particles rather than the silicon surface exposed to the solution, and the hydrogen peroxide in the solution is reduced to water by the electrons, .
At the same time as the electrons are taken away, the silicon that acquires the holes is oxidized and the oxidized silicon can be removed by hydrofluoric acid. In this continuous reaction, the thin film coated with the silver particles is etched with silicon and the
For example, when the mixed solution having a volume ratio of HF / H 2 O 2 / H 2 O of 1 / 0.2 / 2 to the
However, if the volume ratio of HF / H 2 O 2 / H 2 O is varied, the length of the final
2B, a method of manufacturing a graphene / silicon biosensor according to an embodiment of the present invention includes the steps of forming 3-aminopropyltriethoxysilane (3-APTES) and glutaraldehyde (Glutaraldehyde) may be coated on the functional material.
The functional material may be a material that improves adhesion so that the DNA is well adhered to the surface of the
Referring again to FIG. 2C, a method of fabricating a graphene / silicon biosensor according to an embodiment of the present invention includes joining a
The
More specifically, in the preparation of graphene by chemical vapor deposition, copper (or nickel) to be used as a catalyst layer is deposited on a substrate and reacted with a mixed gas of methane and hydrogen at a high temperature to deposit an appropriate amount of carbon in the catalyst layer Or adsorbed on the surface of the catalyst layer, and the carbon atoms contained in the catalyst layer are crystallized on the surface to form a graphene crystal structure on the metal.
Thereafter, the catalyst layer is removed from the synthesized graphene thin film to separate graphene from the substrate.
Then, PMMA (polymethylmethacrylate) mixed with polymethyl methacrylate (PMMA) and benzene was spin-coated on the synthesized graphene, and PMMA was coated through the coating with ammonium persulfate ) Solution can be used to hold the graphene and fix it when removing the copper foil.
Thereafter, the copper foil is removed from the ammonium persulfate solution, the ammonium persulfate solution remaining on the graphene is washed with DI water, the washed graphene is transferred onto the
Next, the bonding force between the
Referring to FIG. 2D, a method of fabricating a graphene / silicon biosensor according to an embodiment of the present invention includes forming
The electrode 140 may be a metal electrode and may include silver (Ag), gold (Au), copper (Cu), aluminum (Al), platinum (Pt), or an alloy thereof.
A thermal evaporation method, an electron beam evaporation method, a sputtering evaporation method, or the like may be used to deposit the electrode 140 on the
A specific embodiment of manufacturing a graphene / silicon biosensor according to an embodiment of the present invention is as follows.
≪ Fabrication of silicon nano structure >
The silicon to be used for etching was a p-type silicon wafer which was doped with boron and had a resistance of 1-10 Ohm / cm, and the organic substances on the surface of the silicon wafer were removed by a 3: 1 mixture of sulfuric acid and hydrogen peroxide And washed with deionized water.
As a first step to fabricate silicon nanostructures, silicon wafers were immediately mixed with a 0.005M solution of AgNO 3 and 5M hydrofluoric acid for 1 minute at a slow rate to form phosphorous particles with an etch catalyst on the silicon surface Air atmosphere. The remaining solution on the prepared silicon wafer was sufficiently diluted with deionized water and removed.
In the second step, the silicon wafer with the silver particles on the surface was immersed in a mixture of hydrofluoric acid, hydrogen peroxide and deionized water and etched at room temperature for 10 minutes. The concentration of the etching solution was adjusted so that the volume ratios of HF / H 2 O 2 / H 2 O were 1 / 0.2 / 2, 1 / 0.5 / 2, 1 / 0.75 / 2 and 1/1/2.
< Graphene Production>
Generally, a large area of graphene was produced by using a well-known chemical vapor deposition (CVD) method. First, copper to be used as a catalyst layer is deposited on the substrate, and a methane-hydrogen mixed gas is reacted at a high temperature of about 1000 ° C. so that an appropriate amount of carbon is dissolved or adsorbed in the catalyst layer. After cooling, the carbon atoms contained in the catalyst layer are crystallized on the surface to form a graphene crystal structure.
The thus-synthesized graphene can be separated from the substrate by removing the catalyst layer, and then used for a desired application. Detailed manufacturing and transcription processes are described in previous studies. [J. Appl. Phys. 113, 064305 (2013).
≪ Silicon nanostructure - Graphene layer Fabrication of bonding structure>
A large area of graphene fabricated by chemical vapor deposition (CVD) was supported on PMMA, placed in deionized water, and transferred onto a silicon nanostructure. The transferred sample on the silicon nanostructure was placed on a hot plate, dried at room temperature for 1 hour or more, and further dried at 60 to 100 degrees for 3 hours or more.
≪ Silicon nanostructure - Graphene layer Fabrication of electrode with bonded structure >
Electrodes (Au, Ag, Pt, etc.) were deposited on the graphene layer by thermal evaporation, electron beam evaporation, sputtering, or the like on the dried silicon nano structure-graphene layer. In one embodiment of the present invention, gold (Au) is deposited on the top and silver (Ag) is deposited on the bottom electrode.
FIG. 3 illustrates a functional material attached to a surface of a silicon nanostructure of a graphene / silicon biosensor according to an embodiment of the present invention.
Referring to FIG. 3, the surface (Si NW surface) of the
In addition, the surface of the
(3-APTES) material containing NH 2 may be coated on the surface of the
For example, the 3-aminopropyltriethoxysilane (3-APTES) material produces a strong covalent bond between the surfaces of the
Also, the glutaraldehyde substance is a chemically modifying agent of a protein that reacts with and bridge with an amino group (-NH 2 ), and is coated on the surface of the
3, the surface of each of the plurality of
Hereinafter, the process of identifying DNA using the graphene / silicon biosensor will be described in detail with reference to FIGS. 4A to 4C.
4A to 4C show examples of the mechanism of a graphene / silicon biosensor according to an embodiment of the present invention.
Referring to FIG. 4A, a probe DNA, a target DNA, and a dummy DNA can be used to detect DNA using a DNA detection apparatus using a graphene / silicon biosensor.
According to an embodiment, the probe DNA is a single stranded DNA including a nucleotide sequence of a DENND2D promoter, which is a human gene, for example, 5'-tta-gcg-cgg-agt-tgg -gag-cgg-gag-tcg < / RTI >
In addition, the target DNA is a single stranded DNA that forms a pair of the probe DNA and the nucleotide sequence. For example, the nucleotide sequence of aat-cgc-ccg-act-cca-ctc-ccg-ctc-cga- Lt; / RTI > DNA.
In addition, the dummy DNA is a single stranded DNA which forms a nucleotide sequence pair completely different from the probe DNA. For example, the base sequence of 5'-tct-tgc-aca-agt-tta-aga-ggg-aaa-gga Lt; / RTI > DNA.
Referring to FIG. 4B, a probe DNA extracted from a DENND2D promoter, which is a human gene, is applied to a graphene / silicon biosensor and can be attached to the surface of a plurality of
According to the embodiment, on the surface of the
Referring to FIG. 4C, at least one of the target DNA and the dummy DNA may be applied to a graphene / silicon biosensor to which the probe DNA extracted from the DENND2D promoter is attached.
A DNA detection apparatus using a graphene / silicon biosensor can be applied to a graphene / silicon biosensor in which probe DNA is attached to the surface of the
For example, a probe DNA that is a single stranded DNA having a nucleotide sequence in the sample DNA extracted from the DENND2D promoter is applied and attached to a graphene / silicon biosensor, and a measurement target (for example, a patient or a clinical subject ) Can be applied to a graphene / silicon biosensor having a probe DNA attached thereto, in which single-stranded DNA having a nucleotide sequence in the target DNA extracted from the target cells of the target DNA.
Here, when the DNA of the single strand having the nucleotide sequence of the target DNA is a target DNA that forms a pair of the probe DNA and the nucleotide sequence extracted from the DENND2D promoter, the probe DNA and the target DNA may be attached to each other, but the nucleotide sequence If the DNA of a single helix is a dummy DNA that forms a completely different nucleotide sequence from the probe DNA, the probe DNA and the dummy DNA may not be attached.
Therefore, the DNA detection apparatus using the graphene / silicon biosensor according to the embodiment of the present invention can identify the DNA depending on whether the probe DNA is attached to the target DNA or the dummy DNA.
5 is a block diagram of a DNA detection apparatus using a graphene / silicon biosensor according to an embodiment of the present invention.
Referring to FIG. 5, a
The graphene /
The structure and structure of the graphene /
The
For example, the
The probe DNA may be a single stranded DNA comprising a nucleotide sequence including a nucleotide sequence of a sample DNA extracted from a sample cell, and the target DNA may be a single stranded DNA strand that is paired with a nucleotide sequence Can be referred to as DNA.
That is, the target DNA may be a single strand of DNA extracted from a cell to be measured.
The
For example, the
FIGS. 6A to 6D show scanning electron microscopy (SEM) images of a graphene / silicon biosensor according to an embodiment of the present invention.
6A to 6D are cross-sectional views of a graphene / silicon biosensor according to an embodiment of the present invention shown in FIGS. 2A to 2D, FIG.
6A is a scanning electron microscope image of a gold mesh formed on a substrate formed of silicon as shown in FIG. 2A. Referring to FIG. 6A, a porous gold mesh array is formed of silicon (Si). ≪ / RTI >
FIG. 6B is a scanning electron microscope image of a plurality of silicon nanostructures formed on a substrate as shown in FIG. 2B. Referring to FIG. 6B, it can be seen that a plurality of silicon nanostructures are formed.
FIGS. 6C and 6D are SEM images of a front surface and a side surface of a graphen / silicon biosensor including a substrate, a silicon nanostructure formed on the substrate, and a graphene layer formed on the silicon nanostructure, 6C and 6D, a plurality of silicon nano structures (Si NWs) having a constant height are arranged on a substrate formed of silicon (Si), and a graphene layer covering a partial area of a plurality of silicon nano structures .
FIG. 7A is a graph showing the current change curve with respect to the concentration of the probe DNA according to the embodiment of the present invention, and FIG. 7B is a graph showing the current change according to the attachment of the target DNA and the dummy DNA to the probe DNA according to the embodiment of the present invention Curve and response diagrams.
More specifically, FIG. 7A shows the current change according to the concentration of single-stranded probe DNA containing a nucleotide sequence of DNA extracted from the DENND2D promoter.
Referring to FIG. 7A, it can be seen that the amount of current flowing through the graphene / silicon biosensor increases as the concentration of the probe DNA increases. When the concentration of the probe DNA is about 500 nM, the amount of current indicates saturation .
FIG. 7B is a graph showing the relationship between target DNA and dummy DNA in a graphene / silicon biosensor having a probe DNA attached to a single helix including a nucleotide sequence of DNA extracted from a DENND2D promoter, In the case of applying the coating solution.
Referring to FIG. 7B, when the target DNA paired with the probe DNA is applied to the graphene / silicon biosensor coated with the probe DNA, the amount of current flowing through the graphene / silicon biosensor It can be confirmed that it increases sharply.
However, when the dummy DNA not attached to the probe DNA is applied to the graphene / silicon biosensor coated with the probe DNA, it can be confirmed that the amount of current flowing through the graphene / silicon biosensor is reduced.
In addition, as shown in FIG. 7B, it can be seen that the degree of reactivity when the target DNA paired with the probe DNA is applied varies by about 0.6 mA in absolute value, and it is found that the degree of reactivity changes to about 120%.
Therefore, the graphene / silicon biosensor according to the embodiment of the present invention can identify the DNA by detecting the amount of current depending on whether the probe DNA, the target DNA, or the dummy DNA is attached.
FIG. 8 is a graph showing a result of a recycling characteristic of a graphene / silicon biosensor according to an embodiment of the present invention.
More specifically, FIG. 8 is a graph showing the change in the characteristics of a graphene / silicon biosensor according to an embodiment of the present invention, The DNA attached to the surface is removed, and the DNA detection characteristics of the graphene / silicon biosensor are evaluated again.
Referring to FIG. 8, the graphene / silicon biosensor according to an embodiment of the present invention performs a stable DNA detection function at about 0.1% of the target DNA at a minimum concentration of about 20% while driving a recycling cycle of 10 times . Therefore, it can be seen that the graphene / silicon biosensor according to the embodiment of the present invention is easy to be recycled.
FIGS. 9A to 9C illustrate fluorescence characteristic images according to the adhesion of DNA applied to a graphene / silicon biosensor according to an embodiment of the present invention.
More specifically, FIGS. 9A to 9C illustrate a method of applying a probe DNA, a target DNA, and a dummy DNA having fluorescence colors to a graphene / silicon biosensor according to an embodiment of the present invention, It is an image observed with a microscope.
As shown in FIG. 9A, the reddish probe DNA was applied to a graphene / silicon biosensor, and the surface of the silicon nanostructure was observed under a fluorescence microscope. As a result, it was found that the probe DNA adhered well to the surface of the silicon nanostructure Can be confirmed.
As shown in FIG. 9B, the target DNA having an orange color was applied to a graphene / silicon biosensor having a probe DNA attached thereto, and the surface of the silicon nanostructure was observed under a fluorescence microscope. As a result, It can be confirmed that the silicon nanostructure adheres well to the surface of the attached silicon nanostructure.
9C, dummy DNA having a green color was applied to a graphene / silicon biosensor having a probe DNA attached thereto, and the surface of the silicon nanostructure was observed with a fluorescence microscope. As a result, It can be confirmed that they do not adhere well to the surface of the silicon nanostructure and are deposited and precipitated with each other.
9a to 9c, the target DNA pairing with the nucleotide sequence of the probe DNA shows a high affinity with the probe DNA, whereas the dummy DNA having completely different nucleotide sequence pairs is not attached to the probe DNA Thus, more accurate DNA can be identified from the graphene / silicon biosensor using the adhesion characteristics between these DNAs.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.
Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.
100: Graphene / Silicon Biosensor
110: substrate
120: Silicon nanostructure
130: graphene layer
140a, 140b:
Claims (6)
A plurality of silicon nanostructures aligned and bonded to the substrate and coated with a functional material including at least one of 3-aminopropyltriethoxysilane (3-APTES) and glutaraldehyde;
A graphene layer disposed on the silicon nanostructure; And
Electrodes formed on the lower portion of the substrate and the upper portion of the graphene layer,
/ RTI >
Detecting a change in an amount of current depending on whether or not a target DNA (pair of target DNAs) is attached to a predetermined probe DNA attached to the surface of the silicon nanostructure through the functional material,
The surface of the silicon nanostructure is
Generating a covalent bond and to the 3-aminopropyl containing silane and NH 2, an amino group (-NH 2) and a chemical modification reaction agent of the glutaraldehyde binding proteins bridge is coupled to the coupling force between the probe DNA Graphene / Silicon biosensor to increase.
The silicon nanostructure includes
Wherein the functional material for binding the probe DNA is coated on the graphene / silicon biosensor.
The functional material
Wherein the graphene / silicon biosensor is a material that attaches the probe DNA to the surface of the silicon nanostructure by generating a strong covalent bond between the surfaces of the silicon nanostructure.
The electrode
Wherein the graphene / silicon biosensor is formed of at least one material selected from silver (Ag), gold (Au), copper (Cu), aluminum (Al), platinum (Pt) and alloys thereof.
And a detector for detecting a change in an amount of current depending on the presence or absence of a pair of target DNAs attached to a predetermined probe DNA attached to the surface of the silicon nanostructure through the functional material to identify the DNA,
The surface of the silicon nanostructure is
Generating a covalent bond and to the 3-aminopropyl containing silane and NH 2, an amino group (-NH 2) and a chemical modification reaction agent of the glutaraldehyde binding proteins bridge is coupled to the coupling force between the probe DNA To heighten
DNA detection device using graphene / silicon biosensor.
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Cited By (3)
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US11415577B2 (en) | 2018-10-31 | 2022-08-16 | Electronics And Telecommunications Research Institute | Method of detecting bio-material |
WO2024076193A1 (en) * | 2022-10-06 | 2024-04-11 | 한국생명공학연구원 | Localized surface plasmon resonance sensor with improved sensitivity and manufacturing method therefor |
WO2024080388A1 (en) * | 2022-10-11 | 2024-04-18 | 엘지전자 주식회사 | Biosensor |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11415577B2 (en) | 2018-10-31 | 2022-08-16 | Electronics And Telecommunications Research Institute | Method of detecting bio-material |
WO2024076193A1 (en) * | 2022-10-06 | 2024-04-11 | 한국생명공학연구원 | Localized surface plasmon resonance sensor with improved sensitivity and manufacturing method therefor |
KR20240048301A (en) * | 2022-10-06 | 2024-04-15 | 한국생명공학연구원 | Localized surface plasmon resonance sensor with improved sensitivity and manufacturing method thereof |
KR102665267B1 (en) | 2022-10-06 | 2024-05-13 | 한국생명공학연구원 | Localized surface plasmon resonance sensor with improved sensitivity and manufacturing method thereof |
WO2024080388A1 (en) * | 2022-10-11 | 2024-04-18 | 엘지전자 주식회사 | Biosensor |
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