KR101762127B1 - Method for Manufacturing Heat Insulation Sheet of Metal Multipore using Imprint - Google Patents
Method for Manufacturing Heat Insulation Sheet of Metal Multipore using Imprint Download PDFInfo
- Publication number
- KR101762127B1 KR101762127B1 KR1020150066234A KR20150066234A KR101762127B1 KR 101762127 B1 KR101762127 B1 KR 101762127B1 KR 1020150066234 A KR1020150066234 A KR 1020150066234A KR 20150066234 A KR20150066234 A KR 20150066234A KR 101762127 B1 KR101762127 B1 KR 101762127B1
- Authority
- KR
- South Korea
- Prior art keywords
- metal
- imprint
- polymer structure
- curable resin
- nil
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 39
- 239000002184 metal Substances 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000009413 insulation Methods 0.000 title description 7
- 238000001127 nanoimprint lithography Methods 0.000 claims abstract description 15
- 239000011148 porous material Substances 0.000 claims abstract description 14
- 229920000642 polymer Polymers 0.000 claims abstract description 13
- 239000011347 resin Substances 0.000 claims abstract description 9
- 229920005989 resin Polymers 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 238000000151 deposition Methods 0.000 claims abstract description 6
- 238000005498 polishing Methods 0.000 claims abstract description 4
- 239000000853 adhesive Substances 0.000 claims abstract description 3
- 230000001070 adhesive effect Effects 0.000 claims abstract description 3
- 230000002787 reinforcement Effects 0.000 claims abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 229920006254 polymer film Polymers 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000001465 metallisation Methods 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000002512 chemotherapy Methods 0.000 abstract description 2
- 239000012774 insulation material Substances 0.000 description 7
- 239000004964 aerogel Substances 0.000 description 3
- 239000003365 glass fiber Substances 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011490 mineral wool Substances 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
- B32B5/18—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by features of a layer of foamed material
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/62—Insulation or other protection; Elements or use of specified material therefor
- E04B1/74—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls
- E04B1/76—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only
- E04B1/78—Heat insulating elements
- E04B1/80—Heat insulating elements slab-shaped
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Acoustics & Sound (AREA)
- Electromagnetism (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Laminated Bodies (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
The present invention relates to a method for producing a metal multi-layered heat insulating sheet using an imprint, comprising the steps of: applying a curable resin after treating an adhesive reinforcement on a substrate; and performing a nanoimprint lithography (NIL) Depositing a metal on the polymer structure; exposing an ultraviolet lamp to the deposited metal to shrink the polymer structure to form pores; and forming a first metal layer And then planarizing the second metal by a CMP (Chemo Mechanical Polishing) process.
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat insulating sheet, and more particularly, to a method of manufacturing a heat insulating sheet using an imprint.
In recent years, VIP (Vacuum Insulation Panel) and aerogels have been attracting attention. VIM (Vacuum Insulation Material), DIM (Dynamic Insulation Material) and so on have been attracting attention as insulation materials for energy saving of buildings, traditionally used for insulation materials such as mineral wool and polyurethane. Are being studied with future technologies.
VIPs and aerogels with very low thermal conductivity have the advantage of reducing energy consumption compared to existing insulation materials and thus can greatly expand the residential area. In particular, aerogels can be made of translucent and transparent materials, very big.
In addition, in the conventional vacuum insulation material in which the core part is formed in a reduced pressure state, a vacuum insulation material is proposed in which the envelope material includes at least one nonwoven fabric layer. In this case, the core of the vacuum insulation sheet is made of glass fiber, polyurethane, polyester, polypropylene and polyethylene, but the pore size inside the glass fiber aggregate is not suitable for trapping air, And the glass fiber has a complicated and difficult manufacturing process. In addition, although there is elasticity, there is a problem that the absorbency to water is large and the performance is rapidly deteriorated over time.
In order to solve the above problems, an object of the present invention is to provide a method for manufacturing a metal multi-ply insulation sheet using imprint to maximize heat insulation efficiency by forming nano- or micro-sized pores in a multi-layered metal by using an imprint have.
According to another aspect of the present invention, there is provided a method of manufacturing a metal multi-layer thermal insulation sheet using an imprint, comprising the steps of: (a) applying an adhesive reinforcement on a substrate and then applying a curable resin; (b) performing a NIL (nanoimprint lithography) process on the curable resin to form a polymer structure; (c) depositing a first metal on the polymer structure; (d) exposing an ultraviolet lamp to the deposited first metal to shrink the polymer structure to form pores; (e) depositing a second metal on the first metal and planarizing the metal by a chemical mechanical polishing (CMP) process; And (f) repeating the steps (a) to (e) to form pores in the multi-layered metal.
In the present invention, the substrate is a polymer film.
In the present invention, the NIL (nanoimprint lithography) process may include: preparing a stamp or a master wafer having a hole or pillar structure; And contacting the stamp or master wafer with a curable resin to apply pressure to expose ultraviolet light.
In the present invention, the ultraviolet lamp has a strength of 25 to 2000 mW / cm 2 and is exposed to a dose of 10000 to 100000 mJ / cm 2 .
In the present invention, the first and second metal depositions are formed to a thickness of 20 nm to 50 nm.
In the present invention, the first and second metals may be any one of silver (Ag) and aluminum (Al).
As described above, since the heat insulating sheet of the present invention forms nano- or micro-sized pores in the multi-layered metal, the heat insulating efficiency can be maximized.
In addition, the present invention can be applied to an ultra-thin and ultra-slim electronic product since thermal delay and heat insulation are possible and the thickness can be reduced.
FIGS. 1A to 1D show steps of manufacturing a metal multi-layer heat insulating sheet using an imprint according to an embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention may be readily understood and practiced by those skilled in the art.
Hereinafter, a method for manufacturing a metal porous heat insulating sheet using an imprint according to an embodiment of the present invention will be described in detail.
FIGS. 1A to 1D show steps of manufacturing a metal multi-layer heat insulating sheet using an imprint according to an embodiment of the present invention.
Referring to FIG. 1A, first, an adhesion promoter is surface-treated with a vapor deposition method or a liquid deposition method on a
Next, the
Here, the NIL (nanoimprint lithography) process is performed by contacting a curable resin using a stamp or a master wafer having a hole or pillar structure having a diameter of 50 nm to 1 um or a diameter of 100 nm to 1 um, The
Next, a
Subsequently, the reference to Figure 1b when exposed to a dose (Dose) of 10000 ~ 100000mJ / cm 2 using a UV lamp with an intensity of 25 ~ 2000mW / cm 2 for the first metal (30). At this time, the
Next, referring to FIG. 1C, a
Finally, referring to FIG. 1d, the processes of FIGS. 1A to 1C are repeated on the planarized
In the NIL process, nano or micro pores are formed in a multi-layer metal according to the stamp or the pattern size of the master wafer. Due to these pores, the heat insulating sheet of the present invention has a very high heat insulating effect, and can be used for buffering and soundproofing, thereby making it possible to reduce the thickness of building materials and the like, so that it can be applied to ultra thin and ultra slim electronic products.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, the same is by way of illustration and example only and is not to be taken by way of limitations in the spirit and scope of the invention as defined by the appended claims. And it is to be understood that such modified embodiments also fall within the scope of the present invention defined by the appended claims.
10: substrate 20: polymer structure
30: first metal 40: second metal
100: Groundwork
Claims (6)
(b) performing a NIL (nanoimprint lithography) process on the applied curable resin to form a polymer structure;
(c) depositing a first metal on the polymer structure;
(d) exposing an ultraviolet lamp to the deposited first metal to shrink the polymer structure to form pores;
(e) depositing a second metal on the first metal and planarizing the metal by a chemical mechanical polishing (CMP) process; And
(f) repeating the steps (a) to (e) to form pores in the multi-layered metal.
Wherein the substrate is a polymer film. ≪ RTI ID = 0.0 > 11. < / RTI >
The NIL (nanoimprint lithography)
Preparing a stamp or master wafer having a hole or pillar structure; And
Contacting the stamp or master wafer with a curable resin to apply pressure and expose ultraviolet light to the mold.
The ultraviolet lamp 25 to have the intensity of 2000mW / cm 2, 10000 ~ 100000mJ / cm 2 dose (Dose) the method of manufacturing a metal multi-pore heat insulating sheet using an imprint, characterized by exposing a.
Wherein the first and second metal depositions are formed to a thickness of 20 nm to 50 nm.
Wherein the first and second metals are one of silver (Ag) and aluminum (Al).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150066234A KR101762127B1 (en) | 2015-05-12 | 2015-05-12 | Method for Manufacturing Heat Insulation Sheet of Metal Multipore using Imprint |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150066234A KR101762127B1 (en) | 2015-05-12 | 2015-05-12 | Method for Manufacturing Heat Insulation Sheet of Metal Multipore using Imprint |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160133613A KR20160133613A (en) | 2016-11-23 |
| KR101762127B1 true KR101762127B1 (en) | 2017-08-02 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020150066234A KR101762127B1 (en) | 2015-05-12 | 2015-05-12 | Method for Manufacturing Heat Insulation Sheet of Metal Multipore using Imprint |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR101762127B1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102143688B1 (en) * | 2018-06-27 | 2020-08-11 | 한양대학교 에리카산학협력단 | The porous structure comprising modified-surface, the porous structure comprising cured pattern and fabricating method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101345750B1 (en) | 2013-02-27 | 2013-12-27 | (주)에이피앤 | Method for manufacturing nano electronic device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101283728B1 (en) | 2009-12-30 | 2013-07-08 | (주)엘지하우시스 | Vacuum isolation panel and manufacturing method thereof |
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- 2015-05-12 KR KR1020150066234A patent/KR101762127B1/en active IP Right Grant
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101345750B1 (en) | 2013-02-27 | 2013-12-27 | (주)에이피앤 | Method for manufacturing nano electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160133613A (en) | 2016-11-23 |
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