KR101749949B1 - Mass Flow Controller Having a Hole Making Flows to Bypass Valve - Google Patents

Mass Flow Controller Having a Hole Making Flows to Bypass Valve Download PDF

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KR101749949B1
KR101749949B1 KR1020150157880A KR20150157880A KR101749949B1 KR 101749949 B1 KR101749949 B1 KR 101749949B1 KR 1020150157880 A KR1020150157880 A KR 1020150157880A KR 20150157880 A KR20150157880 A KR 20150157880A KR 101749949 B1 KR101749949 B1 KR 101749949B1
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South Korea
Prior art keywords
flow rate
flow
hole
mass
flow meter
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KR1020150157880A
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Korean (ko)
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KR20170055114A (en
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민병광
이상진
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엠케이프리시젼 주식회사
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0655—Lift valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)

Abstract

The present invention relates to a mass flow meter in which the flow rate is controlled by a flow control valve, more specifically, includes a bypass hole for bypassing before and after a flow rate control valve so that a flow rate exceeding a certain level can be ensured even in a low- And a through-hole for bypass.
The flow control valve is a flow control valve. A flow control valve is provided between the front end (11) and the rear end (12) of the flow control valve, and a through hole 13. A mass flow meter comprising a through hole for bypass characterized in that a certain level of flow passes through the flow rate regulator even if the flow rate control valve is closed.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a mass flow controller having a bypass hole,

The present invention relates to a mass flow meter in which the flow rate is controlled by a flow control valve, and more specifically, a through hole for bypass which bypasses the flow control valve is included so that a flow rate exceeding a certain level can be secured even in a low pressure and low flow rate region And a through-hole for bypass.

Typically, flowmeters for measuring the flow rate of gas or gas include differential pressure flowmeters, vortex flowmeters, turbine flowmeters, ultrasonic flowmeters, area flowmeters and thermal mass flowmeters using orifices.

Among them, a thermal mass flowmeter uses a principle that, when a heated object is placed in a flowing fluid, heat exchange occurs between the fluid and the heated object to cool the heated object, and the cooling rate is a function of the flow rate. It is a flowmeter that measures the flow rate and the flow rate according to the measurement.

The thermal mass flowmeter has been widely used in the semiconductor manufacturing process due to its high accuracy and has recently been effectively applied to the chemical reaction process, the petrochemical field, the environmental field, and the building air conditioning field.

Figure 1 shows a conventional thermal mass flowmeter.

The conventional thermal type mass flow meter generally comprises a flow rate detector for measuring the flow rate and a flow rate controller for controlling the flow rate. The flow rate detector detects the flow rate of the fluid flowing into the inlet 1, 3), and to exit to the hollow portion 11. [0031] As shown in Fig.

The sensor tube 4 is connected to the front and rear of the bypass 3 so that a part of the fluid is bypassed and a heater 5 is attached to the sensor tube 4 to heat the fluid to be bypassed.

On the other hand, a resistance thermometer 6 is disposed before and after the heater 5, and the total flow rate through the bypass 3 of the flow rate detecting unit is estimated using the resistance difference caused by the temperature difference in the resistance thermometer 6 .

On the other hand, the flow rate of the fluid passing through the hollow portion 11 is adjusted while passing through the flow rate control portion.

The flow rate regulating portion of the conventional thermal mass flow meter includes a flow rate controlling valve seat 8 between the hollow portion 11 and the outlet 2 of the flow rate detecting portion. The valve disc 7 is provided on the upper portion of the valve seat 8 and the valve disc 7 is moved by the solenoid 9 which is turned on and off according to the electrical signal of the mass flowmeter control unit And moves up and down together to intermittently block the nozzle hole (8a in Fig. 2) formed in the valve seat 8 to adjust the flow rate.

2 shows a state in which the valve disc 7 moves upward and is separated from the valve seat 8 in the conventional mass flowmeter.

The nozzle disk 8a of the valve seat 8 is opened while the valve disk 7 is lifted along the moving path 10 by the solenoid 9 to complete the entire flow path.

The pressure of the inlet 1 is kept higher than the pressure of the outlet 2 so that the fluid which has entered the inlet 1 by the pressure difference passes through the bypass 3 and passes through the hollow portion 11, And again enters the valve seat 8 through the nozzle hole 8a. The fluid that has flowed into the valve seat 8 is discharged to the outlet 2 along the guide path 12 connected to the lower portion of the valve seat 8. [

When the flow rate is unnecessary, the solenoid 9 is operated in response to a signal from a control unit (not shown) to lower the movable section 10, so that the valve disc 7 also descends to the nozzle hole 8a ).

In the conventional mass flowmeter, when the pressure difference between the inlet (1) and the outlet (2) exceeds a certain level and the pressure difference is considerable, a large amount of flow occurs, so that the accuracy of the flow control is relatively good.

However, when the pressure applied between the inlet port 1 and the outlet port 2 is small, the flow rate becomes small, which leads to a problem that the flow rate control of the flow control valve becomes inaccurate.

Even if the valve disc 7 of the flow control valve is interrupted, the flow rate is not controlled linearly with the opening time of the nozzle hole 8a.

Particularly, the bypass 3 of the conventional mass flowmeter is formed of a narrow tube and has a very large flow path resistance. In addition, the bypass space 3 of the conventional mass flowmeter passes through the nozzle space 8a of the valve disk 7, The flow path leading to the inside of the valve seat 8 has a large number of curved tubes and a narrow flow path, which further increases the flow path resistance, so that it is practically impossible to accurately control the flow rate at a low pressure.

Accordingly, although a mass flowmeter having a large size may be employed in order to secure a certain level of flow rate under a low pressure condition, there may be an environment where a mass flowmeter of a large size can not be installed, and a desired flow rate It is not easy and is not a practical solution because of its low accuracy.

To solve the above problems, the present invention provides a mass flowmeter including a through-hole for bypass bypassing a flow control valve, so that not only a certain amount of flow rate can be secured even at a low pressure, but also a control accuracy can be increased .

In order to achieve the above object, the present invention provides a mass flow meter having a flow rate detector and a flow rate controller, wherein the flow rate controller is a flow rate control valve, And a through hole (13) for bypassing the flow control valve, wherein a certain level of flow passes through the flow control section even if the flow control valve is closed.

Here, it is preferable that the predetermined level of flow rate is determined according to the following formula (1) according to the size of the through hole.

[Equation 1]

Figure 112015109689216-pat00001

Where Q is the flow rate

K is the flow meter number of the mass flow meter

D is the hydraulic diameter of the through hole

g is the gravitational acceleration

ΔP is the pressure difference at the inlet and outlet of the mass flowmeter

ρ is the density of the fluid

The through hole 13 may further include an insertion tube 14 that can be fitted to the through hole 13 so that the flow rate of the predetermined level is advantageously changed as the insertion tube 14 is detached .

Furthermore, it is more advantageous that the insertion tube 14 is a plurality of insertion tube 14a and another insertion tube 14b are fitted to each other in a customized manner.

On the other hand, a main control on / off solenoid valve 16 is provided at the front end or the rear end of the product along the flow direction of the mass flowmeter, and the main control on / off solenoid valve 16 is connected to the control unit of the mass flowmeter It is more advantageous to be controlled in the same way.

If the mass flow meter having the bypass hole provided in the present invention is adopted, there is an advantage that the flow rate over a certain level can be continuously secured even in the case where it is difficult to secure the flow rate due to the low pressure difference.

In addition, the mass flow meter having the through-hole for bypass according to the present invention has an advantage that the control accuracy of the flow control valve is increased because the flow rate fluctuation is controlled up and down with respect to the flow rate in a state in which a basic flow rate over a certain level is ensured.

1 is a side sectional view for explaining the structure of a conventional mass flowmeter
2 is a side sectional view for explaining a flow control operation state of a conventional mass flow meter
3 is a side sectional view showing a mass flow meter having a through-hole for by-pass of the present invention
4 is a graph for explaining a flow rate situation controlled by a mass flow meter having a through-hole for by-pass of the present invention
5 is a side sectional view for explaining a mass flow meter having a bypass through-hole according to a second embodiment of the present invention
6 is a side perspective view for explaining a mass flow meter having a bypass through-hole according to a third embodiment of the present invention;

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 3 is a side sectional view showing a mass flow meter having a through-hole for bypass according to the present invention, FIG. 4 is a graph for explaining a flow rate situation controlled by a mass flow meter having a through- And FIG. 5 is a side sectional view for explaining a mass flow meter having a bypass through-hole according to a second embodiment of the present invention. 6 is a side perspective view illustrating a mass flow meter having a through-hole for bypass according to a third embodiment of the present invention.

Although not necessary to understand the technical idea of the invention as a part that is not different from the prior art, it is excluded from the description, but the technical idea and the scope of protection of the present invention are not limited thereto.

(Embodiment 1)

First, a mass flow meter having a through-hole for bypass according to the first embodiment of the present invention will be described in detail with reference to FIG.

The mass flowmeter of the present invention is a mass flowmeter having a flow rate detector and a flow rate controller. The flow rate controller is a flow rate control valve (7, 8, 9, 10) (Q2, hereinafter referred to as " reference flow rate " in the present application) passes through the flow rate control section even if the flow rate control valve is closed .

In the present invention, the reference flow rate Q2 can be adjusted to a designed value by adjusting the hydraulic diameter of the through-hole 13.

For example, when the pressure difference between the inlet (1) and the outlet (2) of the mass flow meter is ΔP, the flow rate is determined by the following equation (1), and thus the flow rate can be controlled by adjusting the size of the through- .

[Equation 1]

Figure 112015109689216-pat00002

Where Q is the flow rate

K is the flow meter number of the mass flow meter

D is the hydraulic diameter of the through hole

g is the gravitational acceleration

ΔP is the pressure difference at the inlet and outlet of the mass flowmeter

ρ is the density of the fluid

In the present invention, the total flow rate Q passing through the mass flow meter is determined by the reference flow rate Q2 by the through-hole 13 and the flow rate controlled by the flow control valve, that is, the valve disc 7 and the valve seat 8 (Q1, hereinafter referred to as " change flow rate " in the present application).

Fig. 4 shows a change in the total flow rate Q by the mass flow meter having the through-hole for by-pass of the present invention.

In the present invention, when the valve disc 7 is closed, only the reference flow rate Q2 flows through the through-hole 13.

4), the solenoid 9 is operated in accordance with the control signal of the control unit (not shown) to raise the valve disc 7, The flow rate Q1 is added so that the total flow rate Q can be controlled by the reference flow rate Q2 by the through hole 13 and by the flow rate control valve And the change flow rate Q1.

The reference flow rate Q2 is typically set to be greater than the change flow rate Q1.

A large amount of flow Q2 flows through the through hole 13 and an appropriate amount Q1 flows through the flow control valve so that even when the size of the product is small, can do.

In the present invention, since the magnitude of the total flow rate Q is detected by the flow rate detecting section composed of the sensor tube 4, the heater 5 and the pair of resistance thermometers 6, there is no problem in the control of the total flow rate.

4), the solenoid 9 is operated in response to the signal of the control unit (not shown) to lower the valve disc 7 to block the nozzle hole 8a The change flow rate Q1 becomes zero and the total flow rate Q is reduced to the reference flow rate Q2.

(Second Embodiment)

In the second embodiment of the present invention, the hydraulic diameter D of the through-hole 13 is changed by the insertion tube 14.

The structure of a mass flow meter having a through-hole for by-pass according to the second embodiment of the present invention will be described in detail with reference to FIG.

In the mass flow meter according to the second embodiment of the present invention, the insertion tube 14 can be further inserted into the through hole 13. [

As shown in FIG. 5B, the insertion tube 14 is provided to be mutually fitted with various diameters, and is detachable according to a required reference flow rate Q2.

For example, when the reference flow rate Q2 of a large flow rate is required, the insertion tube 14 may not be inserted. In the case where a comparatively medium reference flow rate Q2 is required, one insertion tube 14a may be inserted into the through- When the reference flow rate Q2 of a comparatively low flow rate is required, the two insertion tubes 14a and 14b are fitted together into the through hole 13 to adjust the flow rate.

A mass flow meter having a single standard through-hole 13 can be manufactured in large quantities according to the provision of the second embodiment of the present invention and, if necessary, can be applied to various design environments using an insert tube 14 of various sizes Advantages occur and the manufacturing cost can be reduced naturally.

(Third Embodiment)

In the third embodiment of the present invention, a main control on / off solenoid valve 16 is added at the front end or the rear end of the mass flow meter product having the bypass through-hole.

6, the structure of a mass flow meter having a through-hole for by-pass according to the third embodiment of the present invention will be described in detail.

Referring to FIG. 6, the mass flow meter according to the third embodiment of the present invention is capable of completely shutting off the flow rate at the rear end of the mass flow meter outlet 2 according to the first or second embodiment, The on-off solenoid valve 16 for main control is tightly connected.

The added on-off solenoid valve 16 for main control can completely shut off the mass flow rate Q of the mass flow meter by the operation of the second solenoid 15 in accordance with the signal of the control unit (not shown) of the mass flow meter. In this case, even the reference flow rate Q2 flowing through the through hole 13 is completely zero.

In order to flow the fluid through the mass flow meter according to the third embodiment of the present invention, the control unit (not shown) of the present invention first opens the main control on-off solenoid valve 16 to circulate the reference flow rate Q2 Flow control is performed through the interaction of the valve disc 7 and the valve seat 8 by the existing solenoid 9.

The on-off solenoid valve 16 for main control may be attached to the front end of the mass flow meter inlet 1 along the fluid flow direction, as needed, unlike in Fig.

According to the provision of the mass flow meter according to the third embodiment of the present invention, the user can completely shut off the flow rate when necessary such as inspection of the equipment to which the mass flow meter is applied, and the utilization is much higher.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

1: inlet 2: outlet
3: Bypass 4: Sensor tube
5: heater 6: resistance thermometer
7: valve disc 8: valve seat
8a: Nozzle hole 9: Solenoid
10: moving part 11: hollow part
12: guide path 13: through hole
14: insertion tube 15: second solenoid
16: On-off solenoid valve for main control

Claims (5)

In a mass flow meter having a flow rate detector and a flow rate controller,
The flow control unit is a flow control valve, and a through hole (13) for bypassing a fluid is disposed between the front end (11) and the rear end (12) of the flow control valve of the flow control valve. The flow rate passing through the flow rate control section;
The through hole 13 further includes an insertion tube 14 that can be fitted to the through hole 13 so that the predetermined level of flow rate is changed as the insertion tube 14 is detached.
The insertion tube (14) has a plurality of insertion tube (14a) and another insertion tube (14b) fitted to each other in a customized manner;
Wherein the predetermined flow rate is determined according to the following equation (1) according to the size of the through hole (13): " (1) "

[Equation 1]
Figure 112017006456889-pat00010


Where Q is the flow rate
K is the flow meter number of the mass flow meter
D is the hydraulic diameter of the through hole
g is the gravitational acceleration
ΔP is the pressure difference at the inlet and outlet of the mass flowmeter
ρ is the density of the fluid
delete delete delete The solenoid valve according to claim 1, wherein a main control on-off solenoid valve (16) is provided at the front end or the rear end of the product along the flow direction of the mass flow meter, A mass flow meter having a through-hole for by-pass, which is characterized by being controlled by a control unit of the flow meter,
KR1020150157880A 2015-11-11 2015-11-11 Mass Flow Controller Having a Hole Making Flows to Bypass Valve KR101749949B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220134194A (en) 2021-03-26 2022-10-05 엠케이프리시젼 주식회사 Mass flow controller including Sensor auxiliary block

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100840866B1 (en) * 2006-04-17 2008-06-23 히타치 긴조쿠 가부시키가이샤 Shutoff valve apparatus and mass flow control device with built-in shutoff valve
KR101488694B1 (en) * 2013-05-20 2015-02-04 주식회사 엔박 a volume perceiving ilquid flow meter program and the ilquid flow rate measuring method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100840866B1 (en) * 2006-04-17 2008-06-23 히타치 긴조쿠 가부시키가이샤 Shutoff valve apparatus and mass flow control device with built-in shutoff valve
KR101488694B1 (en) * 2013-05-20 2015-02-04 주식회사 엔박 a volume perceiving ilquid flow meter program and the ilquid flow rate measuring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220134194A (en) 2021-03-26 2022-10-05 엠케이프리시젼 주식회사 Mass flow controller including Sensor auxiliary block

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