KR101742744B1 - Apparatus and method for the plasma coating of a substrate, in particular a press platen - Google Patents

Abstract

There is provided an apparatus for plasma coating a substrate (2), particularly a press platen, comprising a vacuum chamber (3) and divided electrodes (400, 409) arranged inside the chamber, each electrode segment (500. .512 have a dedicated connection 6 for electrical energy sources 700-702. Also provided is a method of operating the apparatus, wherein the substrate (2) to be coated in the apparatus comprises at least one energy source (700.706) located opposite the electrode and assigned to the electrode segment (500..512) Is activated. Furthermore, a gas having an effect of causing plasma-enhanced chemical vapor deposition on the substrate 2 is introduced.

Description

Field of the Invention [0001] The present invention relates to an apparatus and a method for plasma coating a substrate, particularly a press platen,

The invention relates to a substrate, in particular a device for plasma coating of a press platen, comprising a vacuum chamber and electrodes arranged in a chamber which is oriented essentially parallel to the substrate and the opposite side of the substrate to be coated in the operating state. Furthermore, a method of producing a substrate, particularly a press platen, is provided. Finally, the present invention also relates to a method of producing a laminate with or without a single layer or multilayer board-like material, especially plastic material, wood material and overlay paper.

Apparatuses and methods of the kind described above are predominantly known. For example, document EP 1 417 090 B1 discloses a method of processing and producing a surface of a material having a reproducible gloss and a pressing tool for use in the same method. To increase the useful life of the pressing tool, a pressing tool having a coating composed of carbon with a diamond-like layer is provided. This results in frictional wear of the surface of the pressing tool when machining a high friction-resistant material, such as for example the manufacture of floorboards having a corundum on the surface layer, thereby significantly reducing the service life.

The diamond-like layers described above are also known as "diamond like carbon" (DLC). The layers can be characterized by high hardness and high resistance to wear and can be produced using plasma enhanced chemical vapor deposition (PECVD). In this regard, the plasma is ignited onto the material in the manufacturing process to be coated and transferred to the material in the manufacturing process where the plasma ionized component is to be coated.

Because there is a trend for materials (e.g., floorboards, chipboards, fiberboards, etc.) in the above-described types of manufacturing processes having permanently long formats, a corresponding large press platen . In this case, the problem is that the layers applied to the press platens can be produced in a very narrow tolerance range and can therefore only be reproduced to some extent. This is caused by processing conditions that are heterogeneous or difficult to affect. For example, the concentration of ions in a plasma across a press platen is very different and difficult to control, which causes the plasma to have different velocities during deposition, even at events where the field strength and current intensity across the electrode is constant . It is not possible in practice to achieve a constant distribution or a current distribution that is constant or, in any case, extended to a narrow tolerance range, leading to undesired differences in the deposition rates of the layers to be applied.

Unfortunately, the above-mentioned variations further cause vibration phenomena as well as instability in the process. Due to the increased conductivity, for example, locally increased ion concentrations in the plasma will cause locally increased current intensities to cause an increased deposition rate for the layer to be applied, as well as, in extreme cases, (flashover). Normally, this high current destroys the surface of the press platen to such an extent that it must be processed. This means that both the basic material of the press platen and the latter processing (e.g., a photolithographic mask or surface creation, or more precisely, a photolithographic mask using an inkjet, screen printing, offset, or calender printing method) Is very expensive and causes high economic damage. Also, the larger the press platen, the greater the likelihood that one of the above-mentioned errors will occur.

It is therefore an object of the present invention to provide an improved apparatus and an improved method for plasma coating of substrates, especially press platens. The possibility will be provided to apply a layer on the substrate and to suppress electrical flashover in the plasma, or to mitigate its effect, especially within narrow tolerance ranges. It is a further object of the present invention to provide an improved manufacturing process for single-layer or multilayer board-type materials. Will facilitate or enable the manufacture of large-format plates in particular.

The object of the present invention is achieved by an apparatus of the type described above, wherein the electrode is divided and each of the electrode segments has a dedicated connection for an electrical energy source.

Furthermore, the object of the present invention is achieved by a method of manufacturing a substrate, particularly a press platen, comprising the steps of:

a) disposing a substrate to be coated in a vacuum chamber on the opposite side of the divided electrode disposed in the vacuum chamber, aligning the electrode substantially parallel to the electrode,

b) activating at least one energy source assigned to the electrode segment, and

c) introducing a gas causing plasma-enhanced chemical vapor deposition onto the substrate (e.g., a press platen blank).

Finally, it is an object of the present invention to provide a method of producing a laminate with or without a single layer or multilayer board-type material, especially plastic material, wood material and overlay paper, Is achieved by the manufacturing method in which the material is used.

In the context of the present invention, the electrode segment is defined by the fact that the electrode segment will reach a significantly different potential than other segments without significant compensation for the current flowing through it. In other words, a high insulation resistance is provided between the individual segments. Within the meaning of the present invention, segmentation will be understood in terms of electricity and need not necessarily be understood in terms of construction. The term "connection" will be broadly defined, and it is primarily possible to consider a connection as a possibility for the electrical connection of any type of design.

According to the present invention, it is possible to locally diversify the energy supply to the electrode or to supply the electric energy in a different manner by the division. This not only makes it possible to distribute the electric field strength or current as predefined throughout the substrate, but it is also possible to easily maintain predetermined values within a narrow tolerance range due to the division of the electrodes. For example, the energy supply per electrode segment can be individually adjusted. Furthermore, the gaps between the individual segments lead the process gas to the substrate more easily, so that the ion concentration across the substrate can be kept within a constant or narrow tolerance range.

Finally, the possibility of flashover occurring in the plasma is significantly reduced, or the latter effect is significantly mitigated. Splitting does not allow electrical energy to "draw off" from other sections of the electrode and does not allow it to be focused at a point, as in the case of unpartitioned electrodes. In this case, the flashover causes the energy or power available to coat the entire substrate to be concentrated at one point, resulting in severe damage to the substrate.

However, if an electrode segment is provided, only the electrical energy or power provided to coat the substrate of this site can be concentrated at one point, and the energy or power at that site will, of course, / Less than power. The finer the division, the smaller the amount of energy or power mentioned above. Thus, by a corresponding fine division, the power per electrode segment can be greatly reduced to such an extent that the electrical energy in the segment is no longer sufficient to cause flashover, with a constant power per area. In any case, the effect of the flashover can be mitigated and thus the damage of the substrate surface by the flashover is only marginal, so that the substrate can be easily repaired continuously or with very little effort.

In most cases, a general goal is to coat the substrate as uniformly as possible. In such a case, the measures described above can be used to achieve a distribution of the current intensity, as well as the electric field strength, as well as the concentration of the ions in the plasma as equal as possible. Alternatively, it is possible that the goal of the process is an inhomogeneous coating of the substrate. In such a case, the above-mentioned measurements may be used to achieve heterogeneity so as to be a distribution of the current intensity, not only the electric field intensity but also the concentration of the ions in the plasma, but the heterogeneous distribution is narrowly within the predetermined tolerance range.

In providing the aforementioned substrates or press platens, the production of large plate materials is also easily carried out or made possible. Within the scope of the present invention, a large plate is regarded as a plate having a size of at least 1 m ² , in particular a plate having a size of at least 5 m ² , and in a specific case a plate having a size of at least 10 m ² . This allows, for example, a board-type material having a standard size of 2 X 5 m to be produced in one working step.

Advantageous embodiments and developments of the invention result from sub-claims as well as techniques relating to the figures.

It is advantageous if the individual electrode segments are insulated from each other. So that it is possible to achieve that no substantial compensation current can flow between the segments.

Other advantages are achieved if the individual electrode segments are connected together via a narrow web or a defined ohm resistor. If a narrow web is provided between the segments, this may allow a low, defined compensation current between the segments, or the electrodes may be formed in one piece despite the segmentation.

Additional advantages are achieved when the individual electrode segments are connected to the at least one energy source through a narrow web or defined ohmic resistor. In providing different resistances for the individual electrode segments, this variant can advantageously allow the electrode segments to be differently energized by only one energy source. In addition, the latter effect is significantly mitigated because the probability of occurrence of electrical flashover in the plasma is significantly reduced, or the resistance hinders the concentration of electrical energy in the individual electrode segments.

It is particularly advantageous if the apparatus comprises a plurality of energy sources which can be controlled open-loop / closed-loop independently of one another and connected to the electrode segments through the above-mentioned connection . This makes it possible to supply the different electrode segments with energy independent of each other. For example, a specific current and / or specific potential may be provided for the latter and may be adhered using various procedural conditions in the case where the energy source is closed-loop controlled.

It is particularly advantageous if one electrode segment is connected to one respective energy source and can be independently open-loop / closed-loop controlled for another energy source. Thus, one energy source operates per electrode segment and is independently open-loop / closed-loop controlled for the remaining energy sources. So that it is possible to supply energy independently of each other to almost all of the electrode segments. It is possible, for example, to be provided with a dedicated current intensity and / or potential for each electrode segment and, if the energy source is closed-loop controlled, using various process conditions.

Wherein the device is configured to alternately switch one energy source to one electrode segment of one group of electrode segments and to connect the connection of the remaining electrode segments of the group to the first- - state. ≪ / RTI > Thus, one energy source is switched to one electrode segment of one group of electrode segments, respectively, and the connection of the remaining electrode segments of this group is switched from the first mentioned electrode segment to an isolated open-state. Thus, it is possible to independently supply energy to all the electrode segments with a small number of energy sources. In this case, one electrode segment of a group of electrode segments is each connected to an energy source and the current and / or potential is pre-determined in the latter case. The remaining electrode segments of this group are switched to an open-state when insulated from an energy source or an electrode segment connected thereto. As a result, the current for the above-described electrode segments may be zero, or only a low compensation current may flow between the segments. Thus, the potential can have virtually any value ("floating potential"). Once a certain period of time has elapsed, the energy source is connected to the other electrode segments of the group and the previously connected electrode segments are also switched to the open-state. So that it is possible to alternately connect the energy source to all the electrode segments of the group. This is not absolutely necessary for the electrode segments to be connected to the energy source in the same order in each cycle. For example, it is possible that one electrode segment is connected to the energy source several times during one cycle process to apply a thicker coating to the substrate.

The electrode segments assigned to the activated energy source may be the result of arbitrary selection. This avoids effects that may result from one successive iteration and the same cycle.

It is also particularly advantageous to alternately supply electrical energy to the electrode segments arranged along the black squares of the chess plate and the electrode segments arranged along the white squares of the chess board. In this variation, the electrode segments disposed in the matrix are alternately activated. In the first period of time, the above-mentioned segments are activated with the sum of the same line and column index as the even number. In the second period of time, the above-mentioned segments are activated with the sum of the same line and column index as the odd number. Immediately followed by the first section of another time.

It is advantageous if the area of the electrode segment is 1 m ² or less. It is more advantageous if the same area is less than 0.25 m ² . The above values constitute an excellent compromise which allows for the coating of the substrate to be well formed by the subdivision of the not so high electrode. Although the stated values have proven to be advantageous, the present invention will naturally not be limited to the latter. Of course, it is also possible for other values to be chosen in the context of the benefits produced by the invention.

It is advantageous if the energy sources are provided in the form of a current source. This allows the deposition rate to be set according to the coating to be applied to the substrate.

In this context, it is advantageous if the maximum current intensity per electrode segment (peak current) is 150 A or less. It is more advantageous if the current intensity is 15 A or less. The above values constitute an excellent intermediate which allows for the coating of the substrate to be well formed with a very low risk of destructive electrical flashover between the electrode and the substrate. Although the stated values have proven to be advantageous, the present invention will naturally not be limited to the latter. Of course, it is also possible for other values to be chosen in the context of the benefits produced by the invention.

It is also advantageous if the electrode segments are implemented in a grid-like manner. This leads to the substrate to be coated in a particularly preferred manner.

It is further advantageous if the electrode in the edge region of the device is bent in the direction of the substrate to be coated. In this way it is possible to compensate for the drop in field strength in the plasma at the edge of the electrode, since this is caused by the plate-type electrode and the distance of the electrode from the plate to the substrate is the same at every point.

An advantageous variation of the method of coating the substrate is also provided when measuring the voltage between the electrode segment and the substrate to be coated and limiting or energizing the energy supply when the above-mentioned drop in voltage is detected. If the voltage drops very rapidly to a relatively low value, it can be inferred that an electrical flashover is occurring between the product and the electrode in the manufacturing process. Limiting or even completely stopping the energy supply of the associated electrode segments in order to limit the harmful effects of the energy supply or to completely block the effect.

It is advantageous if the electrode segments located at the edge of the electrode are set to a potential greater than the inner segment. In this way, the electric field intensities within the plasma can be compensated, such as the field strength resulting from plate-shaped electrodes aligned parallel to the substrate.

It is also advantageous if the electrode segments located at the edge of the electrode are set or adjusted to a greater current intensity than the inner segments. Thus, the edge of the substrate can be coated with a thicker layer. The above-mentioned parts of the substrate are always subjected to the greatest stress during the manufacture of the plate-shaped material.

Finally, it is advantageous if the plate-like material contains particles or corundum or aluminum oxide Al ₂ O ₃ , each having a Vickers hardness of 1000 to 1800, in particular in the surface region facing the press platen . The advantage of coated press platens is very evident, especially at this stage, because the coating ensures a very useful life of the press platens in spite of the corrosive components contained in the material to be produced. Press platens for large board-type materials according to prior art provide such a long useful life.

The variations described for the coating apparatus at this stage and the advantages obtained therefrom can also be altered as a method for coating the substrate and vice versa in terms of meaning.

For a better understanding of the invention, the latter is explained in more detail with reference to the following figures.
Figure 1 schematically shows an apparatus for plasma coating of a substrate;
Figure 2 is a first schematic illustration of an electrode having segments completely insulated with respect to each other;
Figure 3 is a second schematic illustration of an electrode with interconnected segments;
Figure 4 shows a further schematic illustration of a grid-like electrode;
Figure 5 is a further schematic illustration of an electrode having different types of segments;
Figure 6 shows a further schematic illustration of an electrode bent at the edge-region of the electrode;
Figure 7 is an example of a control unit switching the energy source to different electrode segments;
8 shows an example of an electrode having segments arranged and adjusted according to the pattern of the chess plate;
Figure 9 shows an illustrative example in which one electrode segment is each coupled to one energy source;
Figure 10 shows another illustrative example in which the voltage between the electrode segment and the substrate is measured;
Figure 11 shows a schematic example in which the segments located at the edge of the electrode are set / set to a higher potential or set / closed-loop controlled to a higher current intensity than the inner segment
Figure 12 shows a schematic example in which the electrical segments are connected to the energy supply via a resistor.

First, the same part as described in other embodiments is meant by the same reference numeral and the same component name, and the disclosures made throughout the specification are intended to refer to the same reference numeral and the same reference numerals Quot; in " Also, details relating to the same position, such as top, bottom, side, etc., used in the specification will relate to the presently described and presented drawing and will be adjusted to a new position in the case of a position change . Individual features or combinations of features from the other embodiments illustrated and described will be understood as independent inventive solutions, or, of course, solutions proposed by the present invention.

All statements relating to a range of values herein will be understood in such a manner that they encompass any range and all ranges derived from the range of values. For example, the expression of 1 to 10 is a range starting from the lower limit value 1 to all the partial ranges of the upper limit value 10, that is, all the partial ranges ending at one or more lower limit values and upper limit values of 10 or less, for example, 1 to 1.7 or 3.2 to 8.1 or 5.5 10, < / RTI >

Figure 1 shows an apparatus 100 for plasma coating of a substrate 2 comprising a vacuum chamber 3 and an electrode 400 disposed within the chamber oriented to be essentially parallel to the substrate 2 and the opposite side of the side to be coated with the substrate. With regard to the discussion below, it will be appreciated that the substrate is a press platen 2. It is naturally possible to switch to the next instruction for another substrate.

The electrode 400 is subdivided and each electrode segment 500 has a dedicated connection 6 for an electrical energy source 700, which is set as a power source in an embodiment of the present invention. For example, it is naturally possible to realize an energy source as a voltage supply. Finally, Figure 1 also, for example, also shows the connection 8 for introducing a process gas (e.g., CH ₄₎ into the third vacuum chamber to substantially the pressure of 1 mbar exists.

Preferably, the area of the electrode segment 500 is 1 m ² or less, and the current intensity of the power source 700 is 150 A or less. The above values are excellent intermediates in which excellent results of the coating of the press platen 2 are achieved while the electrode 400 is not too thickened and the risk of destructive electrical flashover between the electrode 400 and the press platen 2 is not too high.

Generally, it is possible to supply DC or AC to the energy source 700. A particularly good coating of press platen 2 is achieved by impulse-type current. In this case, the current amplitude of the impulse is preferably less than 150 A. The polarity of the pulse can be reversed occasionally if, for example, electrically insulating layers are being applied, if the away electrical rod is drawn in the applied layer. For example, it is possible for a 1/10 pulse to have a different polarity.

Fig. 2 shows a segment 501 of the electrode completely insulated with respect to each other, as an example of the electrode 401. Fig. Thus, the individual segments 501 are only provided in the form of conductive plates that are spaced apart from one another. For example, the segments described above may be applied to a non-conductive substrate for easier manipulation of the electrode 401. [ The electrode 401 may have holes so that the process gas can more easily reach the press platen 2, particularly through the recesses in the above-described substrate at the portion between the segments 501. For example, the holes described above may be provided in the form of elongated holes (see also Fig. 3).

3 shows a segment 502 of electrodes connected to each other through small webs 9, resulting in no (high) Ohm resistance, as another example of electrodes 402. Thus, for example, it is generally possible that the electrode 402 is provided in one, by milling, cutting, nibbling or laser-cutting the corresponding recess 10 into one sheet.

Figure 4 shows a further example of an electrode 403 where the electrode segment 503 is set to grid-like. This makes it very easy for the process gas to reach the press platen 2.

FIG. 5 illustrates another example of an electrode 404 formed from a circular electrode segment 504 and a check-shaped electrode segment 505. This is only an illustrative example and is intended to show that it is absolutely not required that the electrode 400 be provided in the form of a rectangular electrode segment 500. In addition to the shapes illustrated in FIG. 5, a number of other non-rectangular shapes may be used.

Figure 6 shows an example of an electrode 405 present at the edge portion bent in the direction of the press platen 2 to be coated. In a specific case, the electrode segment 506 is arranged in parallel with the press platen 2, but the electrode segment 507 is tilted in the direction of the press platen 2, or - in an embodiment of the invention - in the direction of the press platen 2 It is curved. Also, in this manner, to such an extent that it originates from plate-shaped electrodes present in the edge region of the press platen 2 oriented parallel to the latter, a drop in the field strength in the plasma can be compensated for.

Alternatively, or additionally to the embodiment shown in FIG. 6, it is also possible for the segment 500 (see FIG. 11) located, for example, at the edge of the electrode 400 to be arranged more closely with the press platen 2 than the inner segment Do. In particular, all the segments 500 may be arranged in parallel with the press platen 2.

The method of manufacturing press platen 2 now includes the following steps:

a) placing a press platen 2 to be coated in the vacuum chamber 3 opposite to the divided electrode 400 disposed in the vacuum chamber 3, aligning it essentially parallel to the electrode,

b) driving at least one energy source 700 assigned to the electrode segment 500 and

c) introducing a gas causing plasma-enhanced chemical vapor deposition onto the press platen blank 2;

For completeness, it will be indicated at this stage that step c) can be carried out naturally before step b).

It is only for exemplary reasons that FIG. 1 shows only one single energy source 700 that is connected to the electrode segment 500. This can be mainly connected to the other electrode segment 500 alternately. Alternatively, it is also understood that the apparatus for plasma coating of the press platen 2 includes various energy sources 700 that can be independently open-loop / closed-loop controlled with respect to each other, And may be connected to the electrode segment 500 through the electrode segment 500. [

To this end, FIG. 7 shows that the control unit 1101 of the device 101 (here illustrated as a vacuum chamber-free example) switches one energy source 701, 702 to one of the groups 1301, 1302 of electrode segments 508 with the help of switches 1201, And set to switch to the electrode segment 508 and to switch the connection of this group of other electrode segments 508 from the first-mentioned electrode segment 508 to the isolated open-state. (In these and other embodiments The press platen 2 is connected to the ground). 7, the electrode segment 508 is divided into two groups 1301 and 1302, the first group 1301 includes three electrode segments 508 of the same size, and the second group 1302 includes And five electrode segments 508 of different sizes. The division is merely an example symbol and it proves that the electrode segment 508 of the electrode 406 need not be the same size. Further, FIG. 7 shows that the electrode segments 508 need not have a quadratic shape, but may have a general rectangular shape. In particular, the electrode segments 508 may be embodied in the form of bands, rods, and / or strips. The first energy source 701 is now switched to one electrode segment 508 of group 1301 and the second energy source 702 is switched to one electrode segment 508 of group 1302. [ The other electrode segment 508 is switched to the open-state.

Once a period of time has elapsed, the assignment between the energy source 701, 702 and the electrode segment 508 changes. This means that the energy source 701 is connected to the other electrode segment 508 of the group 1301 and the previously connected electrode segment 508 is switched to the open-state. In an analogy, the energy source 702 is coupled to the other electrode segment 508 of the group 1302 and the previously connected electrode segment 508 is switched to the open-state. Thus, it is possible to connect all the electrode segments 508 of the groups 1301 and 1302 alternately with the energy sources 701 and 702. This allows all electrode segments 508 to be energized independently of each other using only a small number of energy sources 701, 702.

The electrode segment 508 assigned to the activated energy source 701, 702 may be the result of an arbitrary selection or a result of a predetermined scheme. It is not necessary that the electrode segments 508 be connected to the energy sources 701, 702 in the same order in each cycle. It is also possible that one electrode segment 508 is connected to the energy sources 701, 702 several times during one cycle.

A particularly advantageous method is provided by alternately supplying electrical energy to the electrode segments arranged to correspond to the white squares of the chess plate and the electrode segments arranged to correspond to the black squares of the chess plate. To this end, FIG. 8 shows an illustrative example of an electrode segment 509 disposed in a 6X9 matrix to emphasize that electrode segment 509 is not necessarily required to be placed in an 8X8 matrix as in the case of a chess board. In accordance with this variation, the "white" segment 509 is activated in the first period of time and the "black" segment 509 (illustrated in the hatching line) is activated in the second period of time.

It is easily possible to presume the current intensity and / or the same potential when the energy sources 701, 702 are assigned to the electrode segment 508. [ The remaining electrode segments 508 that are not assigned to the energy sources 701 and 702 are switched to the open state and the remaining electrode segments 508 are insulated from the energy sources 701 and 702 or the electrode segments 508 connected thereto. The current for the above-described electrode segment 508 is consequently zero or it is possible for only a low compensation current to flow between the segments 508 to be present. Thus, the potential may have substantially any value ("floating potential").

FIG. 9 shows an example in which one electrode segment 510 is connected to one energy source 701 and 702, respectively, which can be independently open-loop / closed-loop controlled for the remaining energy sources 701 to 706. In other words, the energy source 701 can be independently open-loop / closed-loop controlled for the energy sources 702..706, and so on. Thus, one energy source 701..706 is activated per electrode segment 501 and is independently open-loop / closed-loop controlled for the remaining energy sources 701..706. Accordingly, it is possible to supply energy to almost all the electrode segments 510 independently of each other. For example, it is possible for each electrode segment 501 to be provided with a specific current intensity and / or a specific potential and may be attached using various process conditions, such as when the energy source 701..706 is closed-loop controlled.

In another example illustrated in Figure 10, the voltage between the electrode segment 511 and the coated press platen 2 is measured with the aid of a voltmeter 14, and if the voltage drop is detected, the energy supply 700 is limited / limited by the control unit 1102 Or the current supply to the electrode segment 511 is stopped using the switch 1200 operated by the control unit 1102. For example, voltmeter 14 may be provided in the form of an analog-to-digital converter, for example, coupled to a microcontroller into which control unit 1102 may be integrated. In this manner, an electrical flashover between the electrode segment 511 and the press platen can be detected and its destructive effect can be limited. Moreover, it is also possible to substantially terminate the flashover by using the above-mentioned measurements. Of course, a common control unit for the functionality of the control unit 1101 illustrated in FIG. 7 and the functionality of the control unit 1102 illustrated in FIG. 10 may also be provided.

FIG. 11 illustrates a press platen 2 (see FIG. 11) that sets and / or sets a segment 512 (indicated by the hatching line) located at the edge of electrode 409 to a potential higher than inner segment 512 Lt; RTI ID = 0.0 > of plasma < / RTI > Thereby compensating for the decrease in the field strength in the plasma - when caused by the board-type electrode 409 arranged parallel to the press platen 2 (see also Fig. 6) and / or by having a thicker layer at the edge of the electrode 409 It is possible to provide a press platen. The above-mentioned parts of the press platen 2 are always subjected to the greatest stress during manufacture of the plate-shaped material.

Finally, FIG. 12 shows a schematic illustration in which the electrode segment 510 is connected to the energy supply 700 via a resistor 15. By providing another resistor 15, this modification advantageously allows the electrode segment 510 to supply energy differently using only one energy source 700. It is also possible to provide the same resistance 15 naturally. In addition, the probability of occurrence of electrical flashover in the plasma is significantly mitigated, or the latter effect is significantly reduced because resistor 15 interferes with the concentration of electrical energy in one discrete electrode segment 510. The arrangement 103 illustrated in FIG. 12 may be used naturally in combination with the arrangements already exemplified. For example, instead of a single energy source 700, an array of multiple energy sources is possible. Furthermore, it is also possible that a resistor, which is not additionally shown for the example in which the electrode 408 is implemented according to FIGS. 3 and 4, is arranged between the electrode segments 510. Lastly, it is also possible that the resistor 15 is provided in the form of a narrow terminal 6, in particular if a comparatively high current is drawn to the electrode segment 510.

Embodiments illustrated as embodiments illustrate possible variations of apparatus 100..103 for plasma coating of a substrate and are not specifically limited to the specifically illustrated variations of the invention and instead utilize the individual variations in different combinations And it is to be pointed out at this stage that these possible variations are within the perceived scope of those skilled in the art given the disclosed technical teachings. Accordingly, all recognizable design variations that can be obtained by combining the individual details of the described and illustrated design variations are possible and within the scope of the present invention.

It is indicated that the device 100..103 in particular may actually contain more components than the illustrated devices. In particular, it is pointed out that the teachings disclosed are more advantageous in combination with the pressing platen, but can be varied without limitation to other substrates, such as deep drawing, extrusion and general pressing tools.

The described substrate 2 or press platen is particularly suitable for the production of single layer or multilayer board-type materials. This is especially true for press platons charged with cores or corundum or aluminum oxide (Al ₂ O ₃ ) particles with a Vickers hardness of 1000 to 1800 to provide better tribological and abrasion resistance, in particular epoxy resins, polyester resins and phenolic resins Refers to the thermoplastic and duroplastic surfaces encountered. Similarly, it is also possible to provide wood fiber materials such as chipboard, medium-density fiberboard (MDF) and high-density fiberboard. It is particularly possible to coat the above-mentioned wood material with plastic layers or paper of the type described above to produce the laminate. Furthermore, it is also readily possible to provide a glass fiber reinforced plastine or carbon fiber reinforced plastic having a surface structure. Finally, it is also possible to produce artificial stones or "engineered stones" (composite material of stones and resins). The long useful life of the above-described substrate 2 or press platen, especially when using hard stones such as granite, proves advantageous.

In order to provide a clearer understanding of the structure of the apparatus 100..103 for plasma coating of the substrate 2, the apparatus and its component parts may be provided in an unbalanced range and / or an enlarged range And / or a reduced extent.

Goals that form an independent inventive solution can be found in the specification.

100..103 Apparatus for plasma coating
2 Substrate (pressing platen)
3 Vacuum chamber
400.409 Electrode
500..512 Electrode segment
6-electrode connection
700..702 energy source
8 gas connection
9 Web (Web)
10 Recess
1101, 1102 control unit
1201, 1202 switch
1301, 1302 A group of electrode segments
14 voltmeter
15 Ohm Resistance

Claims (25)

A press platen (2) comprising an electrode (400. 409) arranged inside said chamber which is arranged to be essentially parallel with the vacuum chamber (3) and the opposite face of the press platen (2) , Wherein each of the electrode segments (500. 512) is divided into a plurality of electrode segments (500. 512) for dedicated electrical energy sources (700. 702) A device (100..103) having a connection (6), the size of which is selected such that the electrical energy in the electrode segment is not sufficient to cause flashover. The apparatus of claim 1, wherein individual electrode segments (501, 504, 505) of the apparatus (100. 103) are insulated from each other. The device of claim 1, wherein the individual electrode segments (502, 503) of the device (100. 103) are interconnected via a narrow web (9) or a defined ohm resistance. The apparatus of claim 1, wherein the individual electrode segments (510) of the device (100..103) are connected to the at least one energy source (700) through a narrow web or defined ohmic resistor. A device according to any of the claims 1 to 4, characterized in that the device (100..103) can be open-loop or closed-loop independent of one another and can be controlled via the connection (6) And a plurality of energy sources (701, 702) coupled to the plurality of energy sources (500, 512). 6. A device according to claim 5, wherein one electrode segment (510) of the device (100. 103) is connected to one energy source (701 ... 706) Loop or closed-loop control with respect to the control signal. The apparatus of claim 5, wherein the apparatus (100. 103) comprises one energy source (701, 702) in one of the electrode segments (508) of one of the groups (1301, 1302) And the connection 6 of the remaining electrode segments 508 of the groups 1301 and 1302 is connected to the first-mentioned electrode segment 508 in an insulated, open-state And a control unit (1101) set to switch. 5. Device according to any one of the preceding claims, characterized in that the area of the electrode segment (500..512) of the device (100. 103) is less than or equal to 1 m ² . The device according to any one of claims 1 to 4, characterized in that the energy source (700.706) of the device (100..103) is set as a current source. 10. The apparatus of claim 9, wherein the maximum current intensity per electrode segment (500. < RTI ID = 0.0 > 5. A device according to any one of claims 1 to 4, wherein the electrode segments (503) of the device (100..103) are implemented in a grid-like manner. A method according to any of the preceding claims, wherein the electrode (405) at the edge region of the device (100..103) is bent in the direction of the press platen (2) / RTI > A plasma coating method of a press platen (2) characterized by the following steps:
characterized in that a) a press platen (2) to be coated in a vacuum chamber (3) is arranged on the opposite side of the divided electrode (400 ... 409) arranged in the vacuum chamber (3) step,
b) activating at least one energy source (700 ... 706) assigned to an electrode segment (500. 5 12) of the electrode (400 ... 409)
c) introducing a gas causing plasma-enhanced chemical vapor deposition onto the press platen (2) and
d) limiting the power per electrode segment such that the electrical energy in the segment is not sufficient to cause flashover. 14. The method of claim 13, wherein one energy source (701..706) is activated per each electrode segment (501. 512) and independently open-loop or closed-loop control ≪ / RTI > 14. The method of claim 13, wherein one energy source (701, 702) is alternately switched to one electrode segment (508) of electrode segments (508) of one group (1301, 1302) To switch the connection (6) of the remaining electrode segments (508) of the first electrode segment (1302) from the first-mentioned electrode segment (508) to an isolated open-state. 16. The method of claim 15, wherein the electrode segment (508) assigned to the activated energy source (701 ... 702) is a result of random selection. 16. A method according to claim 15, characterized in that electric energy is alternately supplied to the electrode segments (509) arranged to correspond to the white squares of the chessboard and to the electrode segments (509) arranged to correspond to the black squares of the chessboard / RTI > A method according to any one of claims 13 to 17, wherein the voltage between the electrode segment (511) and the press platen (2) to be coated is measured to limit or stop the energy supply when a drop in said voltage is detected wherein the method is switched off. The method according to any one of claims 13 to 17, wherein the electrode segment (512) located at the edge of the electrode (409) is set to a potential greater than the internal electrode segment (512). A method according to any one of claims 13 to 17, characterized in that the electrode segment (512) located at the edge of the electrode (409) is set or adjusted to a current intensity greater than the internal electrode segment (512) Way. A method of making a single layer or multi-layer board type material,
characterized in that a) a press platen (2) to be coated in a vacuum chamber (3) is arranged on the opposite side of the divided electrode (400 ... 409) arranged in the vacuum chamber (3) step,
b) activating at least one energy source (700-706) assigned to an electrode segment (500. 5 12) of the electrode (400, 409)
c) introducing a gas causing plasma-enhanced chemical vapor deposition onto the press platen (2) and
d) limiting the power per electrode segment such that the electrical energy in the segment is not sufficient to cause flashover,
Lt; RTI ID = 0.0 > (2). ≪ / RTI > 22. The method of claim 21 wherein the area of the board-like material produced is at least 1 m ² . 23. The method of claim 21 or 22, wherein the board-type material comprises particles having a Vickers hardness of 1000 to 1800. < Desc / Clms Page number 20 > Claim 21 according to any one of claims 22, wherein the board-type material, the method is characterized by containing corundum (corundum) or aluminum oxide Al ₂ O _3. delete

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