KR101719701B1

KR101719701B1 - A forming device of a pipe

Info

Publication number: KR101719701B1
Application number: KR1020160154418A
Authority: KR
Inventors: 김철순; 김종국
Original assignee: 주식회사 우진아이엔에스; 주식회사 지은기계
Priority date: 2016-11-18
Filing date: 2016-11-18
Publication date: 2017-04-05

Abstract

The present invention relates to a method of manufacturing a semiconductor device, in which a flange is formed on a pipe to be applied to a semiconductor manufacturing facility, and when an end portion of a pipe cut in the field is formed in accordance with a space to be installed in the installation site, So as to obtain precise piping quality by automating the molding process in particular;
A pipe forming apparatus for forming a flange by bending an end of a pipe, the pipe forming apparatus comprising: A machine body having a work table in the form of a plate; And a power transmission member for transmitting the rotation power generated by the motor to the rotation shaft. The power transmission device according to claim 1, A rotating means for rotating the rotating means; Fixing means for fixing the inside of the pipe to be worked and fixed to the rotary shaft and rotating in the same direction; A support means provided on the worktable while adjusting an interval between the rotation shaft and the support shaft and having a support roller adapted to support a bottom surface of the pipe; A winding means having a pair of winding rollers movably provided on the workbench while adjusting an interval between the winding shaft and the rotating shaft and winding up and fixing the end of the pipe; And bending means for bending the end of the pipe to form a right angle by rotating the winding means to form a flange.

Description

[0001] A forming device of a pipe [

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pipe forming apparatus for forming a flange at an end of a piping, and more particularly, to a pipe forming apparatus for forming a flange in a piping applied to a semiconductor manufacturing facility, And more particularly, to a piping molding apparatus which can achieve precise piping quality by automating a molding process, and more particularly, to a piping molding apparatus capable of forming a coating layer coated on a surface thereof in a stable manner without damaging it, .

Generally, in a semiconductor manufacturing process or an LCD manufacturing process, a variety of gas supply facilities are provided for supplying stable and safe various kinds of reaction gases to a process chamber in a clean room section in a constant quality state.

Typically, the gas supplied through the gas supply facility of the semiconductor and LCD manufacturing processes includes a generic gas called the "bulk gas" and a special material gas called the "process gas".

For example, the bulk gas is mainly composed of a common gas which is consumed in a relatively large amount, such as dry air, nitrogen, oxygen, hydrogen, argon, helium, etc., and the process gas includes monosilane, phosphine, nitrogen trifluoride, Ammonia, and so on.

Particularly, in the case of the process gas, unreacted gas and subsidiary gas are discharged. Therefore, toxicity, corrosiveness and flammability are very strong, so that a harmful gas such as a vacuum pump or an exhaust gas treatment device (scrubber) It must be purified into a harmless state and released into the atmosphere.

Therefore, the gas supply facilities of the semiconductor and LCD manufacturing processes require special piping facilities with sufficient cleanliness, corrosion resistance and strength to prevent contamination and leakage while maintaining the high purity of the gas while reaching the process equipment.

Such piping facilities are selected in consideration of quality, stability, maintenance, and economical efficiency. In general, stainless steel pipes having excellent corrosion resistance due to toxicity and corrosiveness of exhaust gas are mainly used.

However, the process exhaust gas of the semiconductor and LCD manufacturing process contains a large amount of reaction products and fine particles such as dust, so that the exhaust gas is rapidly powdered due to external temperature change during the process of moving to the vacuum pump or the exhaust gas treatment device, And is immersed or adhered to the inside.

In order to minimize this phenomenon, the piping of the process gas, which is more toxic and corrosive than the general gas, is coated with polytetrafluoroethylene (PTFE), which is called Teflon, ) Layer on the surface of the substrate.

Korean Patent Registration No. 10-1320550 (name: stainless steel resin composite duplex pipe and manufacturing method thereof) discloses a general technique of a pipe coated with a fluororesin.

In order to form a pipe to be applied to a semiconductor manufacturing facility, a pipe made of stainless steel is first cut to a predetermined length, and then the body is first formed. Then, the end of the body is formed and bent through a molding apparatus, .

When the coating layer is formed through a separate fluorocarbon resin coating device as described above, the manufacture of the pipe is completed.

Korean Patent Registration No. 10-0488485 (titled "Pipe Fitting Method") discloses a general technique of a forming (forming) method of forming flanges at both ends of a body constituting a hunger or an anus.

That is, as described in the publication, a stainless steel pipe is cut to a predetermined length to primarily manufacture a body portion constituting a pipe fitting, and then the body portion is fixed to the rotary device and rotated, and the flange portion is required to be formed The heated body is inserted into a mold and then the ball pressing part is inserted through the tip of the body so that the tip of the body part is inclined at a predetermined angle. And the flange portion is formed at the tip of the body portion by punching the front end portion with a flat pushing face having a bottom face by inserting it from the form frame.

On the other hand, in Korean Patent Registration No. 10-1488963 (name: flange forming apparatus), as described in the publication, in a flange forming apparatus for forming a circular flange by molding a long base material, Body; A horizontal actuator mounted on the horizontal guide formed on the bottom of the body and having one side fixed to the body, a driving body mounted on the horizontal actuator and moving along the horizontal guide, Two drive rollers including a hydraulic motor installed, and a drive roller coupled to the hydraulic motor rotary shaft; A vertical actuator mounted on a horizontal guide formed on a body perpendicularly to the connecting line of the two driving roller sets and having one side fixed to the body, a pressing body mounted on the vertical actuator operating part and moving along the vertical guide, A pressure roller set including a pressure roller rotatably fixed to a rotary shaft formed on the pressing body; A hydraulic device for generating hydraulic pressure; A valve body for supplying the hydraulic pressure generated in the hydraulic pressure device to the driving roller set and the pressure roller set; And a control device for controlling the valve body and the hydraulic device, wherein the drive roller and the pressure roller have a bending groove formed therein, and a fixing part coupled to the rotation shaft for changing the width of the bending groove, A moving part moving in the axial direction to the fixed part, and an adjusting part adjusting the moving part.

That is, after the end portion of the tubular body is positioned between the rotating rollers, the end portion is bent by the pressure of the rotating roller to form the flange.

In Korean Patent Laid-Open No. 10-2011-0011527 (name: flange portion forming machine), as disclosed in the publication, a machining device for forming a flange portion at an end portion of a pipe member, A roller support member for rotatably supporting the roller, and a roller support member for supporting the roller so that the sliding contact portion of the roller with the end portion of the pipe member contacts the root of the roller An arm which rotates the roller supporting member in the forward and backward directions so as to gradually move the end portion in a direction in which the diameter gradually increases, while slowly moving the roller toward the root side, and means for rotating the arm so that the roller revolves along the end portion of the tube A flange portion molding machine having a flange portion is disclosed.

In addition, in Korean Patent Registration No. 10-0510838 (name: a pipe manufacturing method with a connecting portion), as described in the publication, a diameter enlarging portion is formed and a proper portion of the pipe is connected to a pipe chuck Securing the pipe by clamping the pipe; Coupling a connector having an inner diameter extended through hole to one end of the pipe; And caulking one end of the pipe to a diameter expanding tool to extend the diameter of the pipe and to caulk one end of the pipe to the inner surface of the connector, When a plastic deformation is imparted to the pipe end by the tool, the pipe deformation absorbing portion, which is the relief space of the pipe material, is formed in advance on a part of the inner surface of the connector, so that the excess pipe material is absorbed by the pipe deformation absorbing portion, There is disclosed a pipe manufacturing method in which a diameter expansion portion is formed at one end of a pipe, the length of which is reduced and automatically adjusted to a predetermined length.

1. Korean Patent Registration No. 10-1320550 2. Korean Patent Registration No. 10-0488485 3. Korean Patent Registration No. 10-1488963 4. Korean Patent Publication No. 10-2011-0011527 5. Korean Patent Registration No. 10-0510838

However, the conventional pipe forming apparatuses can be manufactured by easily forming a flange at the end of the pipe at the manufacturing site of the pipe, but in the installation site of the pipe, There is a problem that the flange can not be stably formed at the end of the flange.

In other words, there is a problem that the movement to the installation site of the pipe is limited, the work is not performed, the work is performed after the pipe is transported to the manufacturing site, and the efficiency of work to be re-transported is low.

In addition, when the flange is formed at the end of the cut pipe, the coating layer coated on the surface of the pipe is destroyed, so that the quality of the pipe applied to the equipment can not be stably secured. .

The present invention has been made in order to solve the above-mentioned problems of the related art, and an object of the present invention is to provide a method of manufacturing a semiconductor device, The present invention is to provide a piping molding apparatus capable of stably forming a coating layer coated on a surface of a cut pipe without damaging it, and more particularly, by automating a molding process to obtain precise piping quality.

That is, the present invention can provide a piping system that can be easily moved to a site where the piping is installed because the piping system is simple in structure and light in weight and good in mobility, and secondly, the end portion of the piping cut is not damaged And a third object of the present invention is to provide a piping molding apparatus having the technical features of being able to obtain accurate piping quality by automating the molding process.

In order to achieve the above object, the present invention provides a pipe forming apparatus for forming a flange by bending an end of a pipe, the pipe forming apparatus comprising: A machine body having a work table in the form of a plate; And a power transmission member for transmitting the rotation power generated by the motor to the rotation shaft. The power transmission device according to claim 1, A rotating means for rotating the rotating means; Fixing means for fixing the inside of the pipe to be worked and fixed to the rotary shaft and rotating in the same direction; A support means provided on the worktable while adjusting an interval between the rotation shaft and the support shaft and having a support roller adapted to support a bottom surface of the pipe; A winding means having a pair of winding rollers movably provided on the workbench while adjusting an interval between the winding shaft and the rotating shaft and winding up and fixing the end of the pipe; And bending means for bending the end of the pipe so as to form a right angle by rotating the winding means to form a flange.

In the pipe forming apparatus of the present invention, the end of the pipe is fixed to the rotary shaft through the fixing means while rotating the pipe, and the winding means for winding and fixing the end of the pipe is rotated through the rotary means, So that the coating layer applied on the surface is not damaged and the flange is formed stably, so that the pipe quality can be stably secured.

In addition, since the entire structure can be automated based on the data set through the control means, it is possible to obtain more accurate piping quality even through unskilled persons.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic front sectional view showing a pipe molding apparatus according to an embodiment of the present invention. FIG.
Fig. 2 is a schematic plan view showing a pipe molding apparatus according to the present embodiment. Fig.
3 is a schematic side view showing a pipe molding apparatus according to the present embodiment.
Fig. 4 is a partial schematic enlarged example showing a part of a pipe molding apparatus according to the embodiment. Fig.
5 to 11 are schematic views showing a process of forming a flange at an end of a pipe by applying the pipe forming apparatus according to the present embodiment.

Hereinafter, a pipe forming apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention can be modified in various forms, and the scope of the present invention should not be construed as being limited to the embodiments described in detail below. This embodiment is provided to more fully describe the present invention to those skilled in the art. Therefore, the shapes and the like of the elements in the drawings can be exaggeratedly expressed to emphasize a clearer description. It should be noted that in the drawings, the same members are denoted by the same reference numerals. Detailed descriptions of well-known functions and constructions which may be unnecessarily obscured by the gist of the present invention are omitted.

1 to 11 are diagrams showing a pipe forming apparatus according to an embodiment of the present invention. In the pipe forming apparatus 1 according to the present embodiment, the end of the pipe 10 is bent to form a flange 11, In particular, when the piping 10 applied to a semiconductor manufacturing facility is installed at the installation site, the end of the piping 10 cut at the site in accordance with the installation space is formed to form the flange 11 .

At this time, the coating layer coated on the surface of the pipe 10 is stably formed without being damaged, so that the quality of the pipe can be stably ensured.

The piping molding apparatus 1 according to the present embodiment is structurally simple and has a structure in which the piping 10 is easily moved to the installation site because of its light weight and good mobility.

In addition, the pipe forming apparatus 1 according to the present embodiment has a configuration in which the end portion of the cut pipe 10 can be formed so that the coating layer coated on the surface is not damaged.

The piping molding apparatus 1 according to the present embodiment has a machine body 2 having a work table 21 in the form of a plate and a motor A rotary shaft 32 rotatably fixed to the work table 21 of the machine body 2 in a vertical direction and a rotary shaft 32 adapted to transmit the rotary power generated by the motor 31 to the rotary shaft 32 And a rotating means (3) including a power transmitting member (33).

That is, a part of the rotary shaft 32 is disposed at the center of the work table 21 so as to protrude upward, and is rotated by receiving the rotational power of the motor 31.

In this case, it is preferable that the work table 21 is positioned with a predetermined height on the ground so that the worker can stably work in an upright state; Most preferably, the motor 31 is fixed to the lower portion of the work table 21 in the machine body 2.

The power transmitting member 33 includes a first pulley fixed to the shaft of the motor 21, a second pulley axially coupled to the rotating shaft, and a second pulley coupled to the first pulley and the second pulley, And a conveying belt; Most preferably, the belt comprises a chain belt.

The pipe forming apparatus 1 according to the present embodiment as described above has a fixing means 4 that fixes the inside of a pipe 10 to be worked and is fixed to the rotary shaft 32 and rotates in the same direction .

That is, the pipe 10 is fixed to the rotation shaft 32 through the fixing means 4 in the pipe 10 so that the pipe 10 rotates when the rotation shaft 32 rotates.

The fixing means 4 comprises a fixing plate 41 fixed to the rotary shaft 32 and a plurality of stator fixedly movably fixed to the fixing plate 41 and arranged radially around the rotary shaft 32 And a fixing body 43 for fixing the stator 42 to the fixing plate 41. [

The piping forming apparatus 1 according to the present embodiment thus configured is provided in the work table 21 while adjusting the distance between the piping 10 and the rotating shaft 32, Supporting means (5) having rollers (51); A winding means (not shown) having a pair of winding rollers 61 movably provided on the work table 21 while adjusting an interval between the rotation shaft 32 and the rotating shaft 32 and winding and fixing the end of the pipe 10 6).

That is, the flange 11 is formed by bending the end portion of the pipe 10 wound around the winding rollers 61 while supporting the pipe 10 rotating through the support rollers 51.

The support roller 51 is fixed to the stationary bracket 52 fixed to the work table 21 so as to be idle; The fixing bracket 52 is detachably installed at a desired position in a fixing table 22 disposed on the work table 21 in the radial direction about the rotary shaft 32, It is preferable to fix the gap while adjusting the interval between them.

Accordingly, the position of the support roller 51 is selectively arranged according to the diameter of the pipe 10, and the support roller 51 is stably supported.

The winders 61 are preferably rotatably fixed to a moving table 71 which is made to reciprocate linearly in the direction of the rotary shaft 32 on the work table 21; It is most preferable that they are disposed with a space therebetween in a rotating table 62 rotatably fixed to the moving table 71.

One of the winding rollers 61 is rotatably fixed to the rotating table 62 and the other one of the winding rollers 61 is fixed movably in the rotating table 62, It is preferable that the take-up rollers 61 are spaced apart from and close to each other.

The other winding roller 61 comes close to the outer circumferential surface of the pipe 10 in the state where the one winding roller 61 is located inside the pipe 10 and supports the inner circumferential surface of the pipe 10, The end of the pipe 10 is fixedly inserted between the winding rollers 61 and wound.

The rotating table 62 is provided with a winding cylinder 64 for reciprocating the reciprocating table 63 to which the one winding roller 61 is freely rotatably mounted. It is preferable to reciprocate.

The work table 21 is preferably provided with a moving means 7 for linearly reciprocating the moving table 71 in the direction of the rotating shaft 32; The moving means 7 includes a handle 72 fixed to the work table 21 so as to be rotatable in the direction of the rotary shaft 32 and capable of idling at the end thereof, A screw rod 73 and a nut pipe 74 which is screwed to the screw rod 73 and is axially coupled and fixed on a part of the moving rod 71.

Accordingly, when the operator holds the handle 72 by the hand and rotates the screw rod 73, the nut tube 74 is moved on the screw rod 73 so that the movable table 71 is moved in a linear reciprocating motion .

Therefore, the winding means 6 is brought close to and spaced apart from the rotating shaft 32 as necessary.

The piping forming apparatus 1 according to the present embodiment thus constructed is a pipe forming apparatus 1 according to the present embodiment in which the rotating table 62 of the winding means 6 is rotated to wind the pipe 10 wound around the winding rollers 61, And a bending means (8) for bending the end portion to form a right angle at the outside to form the flange (11).

That is, the end of the pipe 10 is bent by rotating the winding means 6 for fixing the end of the pipe 10 by rotating the swivel base 72 through the bending means 8.

Thereby, the flange 11 is formed in the pipe 10.

The bending means 8 preferably comprises a bending cylinder 81 having a rod 82 on which a part of the rotating table 62 is rotatably pivotally connected to the moving table 71, ; It is most preferable that the bending cylinder 81 is installed on the moving table 71 and is moved in the same manner as moving the moving table 71.

Hereinafter, the operation and effect of the pipe forming apparatus 1 according to the present embodiment will be described in detail.

When the flange 11 is to be formed at the end of the pipe 10 through the pipe forming apparatus 1 according to the present embodiment, the support rollers 51 are first moved to the predetermined position And the moving table 71 is moved and positioned so as to locate the end of the pipe 10 between the winding rollers 61 of the winding means 6 through the moving means 7.

When the supporting roller 51 and the winding roller 61 are disposed at the predetermined positions in the work table 21 as described above, the pipe 10 to be worked is inserted into the stator 41 of the fixing means 4 When the stator 41 is rotated and the stator 41 is fixed through the fixing body 43, the arrangement of the pipe 10 is completed. ) Is rotated.

At this time, the support roller 51 and the take-up roller 61 that support the end of the pipe 10 are supported while idling, and the take-up roller 61 is moved outwardly When bent, the flange 11 is formed at the end of the pipe 10.

When the forming of the flange 11 is completed at the end of the pipe 10 as described above, the driving of the motor 31 is stopped and the winding roller 61 is moved to the pipe 10 And the stator 41 is separated from the inner peripheral surface of the pipe 10 by separating the fixing body 43 from the stator 41 and then the pipe 10 is separated from the work table 21 When the pipe 10 is taken out and stored and transported to a separate place, the forming operation of the flange 11 of the pipe 10 is completed.

As described above, in the piping forming apparatus 1 according to the present embodiment, at the installation site of the pipe 10, the end of the pipe 10 is rotated (rotated) in the state where the inner and outer peripheral surfaces are engaged by the winding rollers 61 The flange 11 can be formed while maintaining the coating quality without damaging the coating layer coated on the surface of the flange 11. [ .

It will be apparent to those skilled in the art that various modifications and equivalent arrangements may be made therein without departing from the scope of the present invention as defined by the appended claims and their equivalents. . Therefore, it is to be understood that the present invention is not limited to the above-described embodiments. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims. It is also to be understood that the invention includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

1: molding apparatus 10: piping
11: Flange 2: Machine body
21: work table 22:
3: rotating means 31: motor
32: rotating shaft 33: power transmitting member
4: fixing means 41: stator
42: fixing plate 43: fixing member
5: Support means 51: Support roller
52: fixing bracket 6: winding means
61: take-up roller 62:
63: reciprocating unit 64: winding cylinder
7: Moving means 71: Moving stand
72: handle 73: screw rod
74: nut tube 8: bending means
81: bending cylinder 82: rod

Claims

A machine body 2 having a work table 21 in the form of a plate; A rotary shaft 32 rotatably fixed to the work table 21 of the machine body 2 so as to generate rotational power by being supplied with power; (3) including a power transmitting member (33) adapted to transmit the rotational power to the rotary shaft (32); Fixing means (4) fixing the inside of the pipe (10) to be worked and fixed to the rotary shaft (32) and rotating in the same direction; (5) having a support roller (51) provided on the work table (21) while adjusting an interval between the rotation shaft (32) and the bottom surface of the pipe (10); (6) having a pair of winding rollers (61) which are movably provided on the work table (21) while adjusting the interval between the rotating shaft (32) and winding the ends of the pipe )and; And a bending means 8 for bending the end of the pipe 10 to form a right angle by rotating the winding means 6 so as to form a flange 11. The end of the pipe 10 To form the flange (11);
The fixing means (4)
A plurality of stators 42 fixed to the rotary shaft 32 and fixed to the fixed plate 41 so as to be radially arranged around the rotary shaft 32; And a fixing body (43) for fixing the fixing plate (41) to the fixing plate (41);
The support roller (51)
Is rotatably fixed to a stationary bracket (52) fixed to the work table (21);
The fixing bracket (52)
The support table 21 is detachably installed at a desired position on a fixing table 22 disposed on the work table 21 in the radial direction with respect to the rotation shaft 32 to adjust an interval between the rotation shaft 32 and the support roller 51 While being fixed;
The winding rollers 61,
(71) rotatably reciprocated in the direction of the rotary shaft (32) on the work table (21);
One of the winding rollers (61)
Rotatably fixed to a rotating table (62) rotatably fixed to the moving table (71);
The other one of the winding rollers (61)
Is movably fixed in the swivel (62) so that a pair of the winding rollers (61) are spaced apart from and close to each other;
In the rotation table 62,
A winding cylinder 64 is provided so that the one winding roller 61 reciprocates the reciprocating table 63 which is idly fixed;
In the work table 21,
A moving means (7) for making the moving table (71) linearly reciprocate in the direction of the rotating shaft (32);
The moving base (71)
A screw rod 73 having a length in the direction of the rotation axis 32 of the work table 21 so as to be freely rotatable and having a knob 72 for holding and rotating the worker by hand, And a nut pipe (74) which is screwed to the shaft (73) while being axially coupled and fixed on a part of the moving table (71).