KR101719433B1 - Slit mask for generating laser-generated surface wave using elastic tube - Google Patents

Slit mask for generating laser-generated surface wave using elastic tube Download PDF

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Publication number
KR101719433B1
KR101719433B1 KR1020150184050A KR20150184050A KR101719433B1 KR 101719433 B1 KR101719433 B1 KR 101719433B1 KR 1020150184050 A KR1020150184050 A KR 1020150184050A KR 20150184050 A KR20150184050 A KR 20150184050A KR 101719433 B1 KR101719433 B1 KR 101719433B1
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KR
South Korea
Prior art keywords
elastic tube
guide member
film
screening
slit mask
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KR1020150184050A
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Korean (ko)
Inventor
장경영
서호건
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한양대학교 산학협력단
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Priority to KR1020150184050A priority Critical patent/KR101719433B1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/041—Analysing solids on the surface of the material, e.g. using Lamb, Rayleigh or shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0007—Applications not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Combustion & Propulsion (AREA)
  • Laser Beam Processing (AREA)

Abstract

A slit mask for generating a laser excited surface wave using an elastic tube is disclosed. The disclosed slit mask includes a slit having a hole at the center of the slit; And at least one elastic tube positioned on the hole and having a volume changed.

Description

[0001] The present invention relates to a slit mask for generating a laser excitation surface wave using an elastic tube,

Embodiments of the present invention relate to a slit mask capable of modulating a spatial intensity distribution of a laser in real time without changing a slit mask by dynamically changing an open portion using an elastic tube.

Laser excitation surface wave technology uses a laser to generate a surface wave in a non-contact manner on the surface of an object to perform inspection. At this time, a linear array slit mask or an arcuate slit mask is utilized as a method for manipulating characteristics of a fundamental frequency and a harmonic component frequency of a surface wave excited by a laser.

FIG. 1 is a view showing an example of generating a laser excited surface wave using a conventional linear array slit mask, and FIG. 2 is a diagram showing an example of generating a laser excited surface wave using a conventional array slit mask.

Referring to FIGS. 1 and 2, the slit opening portion and the closing portion are processed and disposed between the laser and the inspection object. In the opening portion of the slit, the laser passes therethrough and the laser does not pass through the closed portion. At the point of contact with the surface, the spatial distribution of the laser becomes the shape of the open part of the slit.

3 is a table showing the characteristics of various conventional slit masks. That is, FIG. 3 summarizes the directivity, focusing characteristics, and frequency characteristics of the laser excitation ultrasonic wave according to the spatial intensity distribution of the laser.

Referring to FIG. 3, when the intensity distribution of the laser is a line, the directivity of the laser excitation surface wave is improved as compared with the point. In addition, in the case of an arrayed line, not only the linearity is maximized but also the frequency characteristics are determined according to the interval (d) between the slits and the width (w) of the open part. . In the case of arrayed-arcs, the laser excited surface waves are converged to a specific point on the specific propagation path according to the curvature of the arc, and the amplitude due to superimposition of the surface waves is maximized at the converging point.

However, since the conventional slit masks are disposed between the laser and the inspection body in a state in which the geometry of the open portion and the closed portion is completed, once it is so arranged, the geometric shape of the opening portion and the closed portion of the slit can no longer be physically controlled .

Therefore, in order to manipulate the frequency characteristics of the laser excited surface wave or the propagation characteristics such as the focal point, it is necessary to process a new slit corresponding to the frequency and to physically replace the slit every time.

In addition, as the thickness and the interval of the slit become narrower, the precision required for machining the slit mask increases, and it takes a lot of time and cost to process the slit mask. Furthermore, it is also impractical to prepare the slits for all frequency conditions and for all cases corresponding to all focal points.

In order to solve the problems of the prior art as described above, the present invention proposes a slit mask capable of modulating the spatial intensity distribution of the laser in real time without changing the slit mask by dynamically changing the open part using the elastic tube .

Other objects of the invention will be apparent to those skilled in the art from the following examples.

According to an aspect of the present invention, there is provided a slit mask including a plurality of slits for generating an excitation surface wave of a laser, the slit mask having a hole at the center thereof; And at least one resilient tube located on the hole and whose volume is changed.

In the elastic tube, an injection material is injected to change the volume, and the elastic tube includes an inner elastic tube and an outer elastic tube, and the injection material can be injected into the inner elastic tube.

The at least one elastic tube may slide on the hole.

And at least one guide member C for controlling the sliding movement of the at least one elastic tube.

The guide member C may be inserted between the inner elastic tube and the outer elastic tube.

Each of the at least one elastic tube may further include a guide supporter connected to the inner surface of the inner elastic tube or the outer surface of the outer elastic tube and for preventing the guide member from being detached.

The curtain film may include a first curtain film; A second screening film spaced apart from the first screening film; A third shielding film connecting one end of the first shielding film and one end of the second shielding film; And a fourth screening film connecting the other end of the first screening film and the other end of the second screening film.

Wherein the first and second screens are movable in a linear or arcuate fashion and the third and fourth screens are slidably movable, and the material of the third and fourth screens is an elastic material. .

A guide member (A) for controlling the sliding movement of the third thin film; And a guide member B for controlling the sliding movement of the fourth screening film.

The guide member A, the guide member B, and the at least one guide member C may be made of a bendable material.

Wherein the slit is formed by the position of the first screening film, the position of the second screening film, the position of the third screening film, the position of the fourth screening film, the position of the at least one elastic tube, the volume of the at least one elastic tube, The degree of bending of each of the guide member A, the guide member B, and the at least one guide member C may be set.

According to another embodiment of the present invention, there is provided a slit mask to be used which includes a plurality of slits for generating an excitation surface wave of a laser, the slit mask comprising: a first screen layer; A second screening film spaced apart from the first screening film; A third shielding film connecting one end of the first shielding film and one end of the second shielding film; A fourth screening film connecting the other end of the first screening film and the other end of the second screening film; And at least one elastic tube which is located on the hole set by the first to fourth skin layers and whose volume is changed.

According to the present invention, there is an advantage that the spatial part of the laser intensity can be modulated in real time without changing the slit mask by changing the open part dynamically.

1 is a view showing an example of generating a laser excited surface wave using a conventional linear array slit mask.
2 is a view showing an example of generating a laser excited surface wave using a conventional arcuate slit mask.
3 is a table showing the characteristics of various conventional slit masks.
4 is a view showing a schematic configuration of a slit mask according to an embodiment of the present invention.
5 is a view showing a detailed configuration of an elastic tube and a guide member C according to an embodiment of the present invention.
6 to 8 are views for explaining an application example of a slit mask according to an embodiment of the present invention.

As used herein, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. In this specification, the terms "comprising ", or" comprising "and the like should not be construed as necessarily including the various elements or steps described in the specification, Or may be further comprised of additional components or steps. Also, the terms "part," " module, "and the like described in the specification mean units for processing at least one function or operation, which may be implemented in hardware or software or a combination of hardware and software .

The terms "first "," second ", and the like can be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. The term "and / or" includes any combination of a plurality of related listed items or any of a plurality of related listed items.

Various embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

4 is a view showing a schematic configuration of a slit mask according to an embodiment of the present invention.

Referring to FIG. 4, a slit mask 400 according to an exemplary embodiment of the present invention generates a laser excitation surface wave. The slit mask 400 includes a curtain 410, at least one elastic tube 420, a guide member A 430, A guide member B (440) and at least one guide member C (450).

First, the curtain wall 410 is a member having a hole at the center thereof. At this time, the laser can pass alone.

Here, the shielding film 410 includes the first shielding film 411, the second shielding film 412, the third shielding film 413, and the fourth shielding film 414, and the holes are shielding films 411, 412, 413, 414 ). ≪ / RTI > That is, the holes are set by the curtain films 411, 412, 413, and 414.

More specifically, the first curling film 411 and the second curling film 412 are spaced apart from each other. At this time, the first screening film 411 and the second screening film 412 are movable members. For example, the first screening film 411 and the second screening film 412 may have a rectangular shape. For example, the first screening film 411 and the second screening film 412 may move in a line shape or in an arc shape.

The fourth thin film 414 is a member for connecting one end of the first thin film 411 and one end of the second thin film 412. The fourth thin film 414 is a member for connecting the other end of the first thin film 411, And the other end of the shielding film 412 is connected. At this time, the third thin film 413 and the fourth thin film 414 may be located at the top or bottom of the first thin film 411 and the second thin film 412.

The third and fourth curtain films 413 and 414 can be slidingly moved while being connected to the first curtain film 411 and the second curtain film 412. At this time, the guide member A 430 and the guide member B 440 are components for controlling the sliding movement. That is, the guide member A 430 is connected to the third thin film 413 and controls the sliding movement of the third thin film 413 through the linear motion, and the guide member B 440 is connected to the fourth thin film 414 And controls the sliding movement of the fourth screen 414 through the linear movement. The third thin film 413 and the fourth thin film 414 may be made of an elastic material.

The movement of the curtains 411, 412, 413, and 414 will be described in more detail with reference to FIGS. 6 to 8. FIG.

Next, at least one elastic tube 420 is a member which is located on the hole and whose volume is changed. At this time, the width and the interval of the slit, that is, the open portion are adjusted by the hole and the at least one elastic tube (420).

More specifically, the resilient tube 420 may be infused with an implant, e.g., a gas, to change its volume. That is, the elastic tube 420 may be thick or thin depending on the gas pressure of the gas. That is, the volume of the elastic tube 420 can be adjusted by manipulating the volume and pressure of the injected material. To this end, the resilient tube 420 may include an inner resilient tube and an outer resilient tube.

And, at least one elastic tube 420 can slide on the hole. To this end, at least one guide member C 450 is disposed. That is, each of the at least one guide member C 450 controls the sliding movement of the elastic tube 420 through linear motion.

Meanwhile, the guide member A 430, the guide member B 440 and the at least one guide member C 450 may be made of a material that can be bent, that is, a material of an elastic material. At this time, when at least one guide member C (450) is bent, the elastic tube 420 connected to the guide member C (450) is also bent into the same shape.

5 is a view showing a detailed configuration of the elastic tube 420 and the guide member C 450 according to an embodiment of the present invention.

Referring to FIG. 5, the elastic tube 420 surrounds the inner elastic tube 421, and the outer elastic tube 422 is located. At this time, gas is injected into the inner elastic tube 421, and the volume of the elastic tube 420 changes.

The guide member C (450) can be inserted between the inner elastic tube (421) and the outer elastic tube (422). At this time, the elastic tube 420 may include at least one guide support 423 for preventing the guide member C (450) from coming off. That is, the guide supporter 423 supports the guide member C 450 sandwiched between the elastic tubes 420 so as not to move upward or downward. Here, it is preferable that the guide member C (45) is slidable and the guide support 423 does not obstruct the flexure of the elastic tube 420 due to contraction or expansion or curvature.

At this time, the guide supporter 423 includes an upper guide supporter 4231 and a lower guide supporter 4232. Also. The guide supporter 423 can be connected to the outer surface of the inner elastic tube 421 or the inner surface of the outer elastic tube 422 and the outer surface of the inner elastic tube 421 or the inner surface of the outer elastic tube 422 It can be located at three points (both ends and the central part).

In other words, the slit mask 400 according to an embodiment of the present invention includes the position of the first screening film 411, the position of the second screening film 412, the position of the sliding movement of the third screening film 413, (Degree of bending) of each of the guide member A (430), the guide member B (440) and the at least one guide member C (450), the position of the sliding movement of the at least one elastic tube The laser beam can have a structure capable of changing the shape of the slit through which the laser can pass, that is, the shape of the open portion.

In other words, depending on the geometric area of the opening portion, which changes depending on the position of the curtains 411, 412, 413, and 414, the curvature of the guide members 430, 440, and 450 and the volume of the elastic tube 420, The laser beam 400 can pass the laser beams having different spatial intensity distributions.

According to the embodiment of the present invention, the position of the first screening film 411, the position of the second screening film 412, the position of the sliding movement of the third screening film 413, The curvature (degree of bending) of each of the guide member A 430, the guide member B 440, and at least one guide member C 450 can be set. Accordingly, it is possible to dynamically adjust the width and the interval of the slits (opening portions), and to manipulate the harmonic characteristics, directivity, and house characteristics of the laser excited surface waves

Hereinafter, an application example of the slit mask according to an embodiment of the present invention will be described with reference to FIGS. 6 to 8. FIG.

6, the first and second screening films 411 and 412 move in a line shape and include a guide member A 430, a guide member B 440, at least one guide member C 450 ) Also have a line shape. That is, the slit mask 400 has the open portion of the line array.

7 and 8, the first and second screening films 411 and 412 move in the arc shape and include a guide member A 430, a guide member B 440, at least one guide Member C 450 is bent. That is, the slit mask 400 has an open portion in the arc array.

Although not shown in FIG. 4, the slit mask 400 may further include a transparent member.

The transparent member is located at the lower end of the curtain wall 410 and the guide member A 430, the guide member B 440 and the at least one guide member C 450 are moved on the transparent member in accordance with the frequency of the laser excitation surface wave, The location is displayed. At this time, since the transparent member is made of a transparent material, it does not interfere with the path of the laser passing through the open portion. As a result, it is possible to set a more accurate sliding movement position.

As described above, the present invention has been described with reference to particular embodiments, such as specific elements, and limited embodiments and drawings. However, it should be understood that the present invention is not limited to the above- Various modifications and variations may be made thereto by those skilled in the art to which the present invention pertains. Accordingly, the spirit of the present invention should not be construed as being limited to the embodiments described, and all of the equivalents or equivalents of the claims, as well as the following claims, belong to the scope of the present invention .

Claims (12)

In a slit mask including a plurality of slits for generating an excitation surface wave of a laser,
A screen having a hole at the center thereof; And
And at least one resilient tube located on the hole, wherein the resilient tube is injected and changed in volume,
Wherein the elastic tube comprises an inner elastic tube and an outer elastic tube, wherein the inner elastic tube is injected with an injection material. delete The method according to claim 1,
Wherein the at least one resilient tube slides on the hole. The method of claim 3,
And at least one guide member (C) for controlling the sliding movement of the at least one elastic tube. 5. The method of claim 4,
And the guide member (C) is inserted between the inner elastic tube and the outer elastic tube. 6. The method of claim 5,
Wherein each of the at least one elastic tube is connected to an inner surface of the inner elastic tube or an outer surface of the outer elastic tube and further comprises a guide support for preventing the guide member from separating from the slit mask. . 5. The method of claim 4,
The shroud,
A first screening film; A second screening film spaced apart from the first screening film; A third shielding film connecting one end of the first shielding film and one end of the second shielding film; And a fourth screening membrane connecting the other end of the first screening membrane and the other end of the second screening membrane. 8. The method of claim 7,
Wherein the first and second screens are movable in a line or arc shape and the third and fourth screens are slidable and the material of the third and fourth screens is made of an elastic material Wherein the slit mask is a slit mask. 9. The method of claim 8,
A guide member (A) for controlling the sliding movement of the third thin film; And a guide member (B) for controlling sliding movement of the fourth thin film. 10. The method of claim 9,
Wherein the guide member (A), the guide member (B), and the at least one guide member (C) are made of a bendable material. 11. The method of claim 10,
Wherein the slit is formed by the position of the first screening film, the position of the second screening film, the position of the third screening film, the position of the fourth screening film, the position of the at least one elastic tube, the volume of the at least one elastic tube, Wherein at least one of the guide member (A), the guide member (B), and the at least one guide member (C) is bent. In a slit mask including a plurality of slits for generating an excitation surface wave of a laser,
A first screening film;
A second screening film spaced apart from the first screening film;
A third shielding film connecting one end of the first shielding film and one end of the second shielding film;
A fourth screening film connecting the other end of the first screening film and the other end of the second screening film; And
And at least one elastic tube located on the hole defined by the first to fourth skin layers and injected and changed in volume,
Wherein the elastic tube comprises an inner elastic tube and an outer elastic tube, wherein the inner elastic tube is injected with an injection material.
KR1020150184050A 2015-12-22 2015-12-22 Slit mask for generating laser-generated surface wave using elastic tube KR101719433B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000329613A (en) * 1999-05-24 2000-11-30 Koji Toda Oscillatory displacement detector
KR20060031679A (en) * 2003-07-04 2006-04-12 코닌클리케 필립스 일렉트로닉스 엔.브이. Optical diffraction element
KR101211647B1 (en) * 2012-07-24 2012-12-12 테크밸리 주식회사 Variable slit apparatus for x-ray analysis device
US20150140735A1 (en) * 2013-11-19 2015-05-21 Rofin-Sinar Technologies Inc. Electro/mechanical microchips and method of making with burst ultrafast laser pulses

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000329613A (en) * 1999-05-24 2000-11-30 Koji Toda Oscillatory displacement detector
KR20060031679A (en) * 2003-07-04 2006-04-12 코닌클리케 필립스 일렉트로닉스 엔.브이. Optical diffraction element
KR101211647B1 (en) * 2012-07-24 2012-12-12 테크밸리 주식회사 Variable slit apparatus for x-ray analysis device
US20150140735A1 (en) * 2013-11-19 2015-05-21 Rofin-Sinar Technologies Inc. Electro/mechanical microchips and method of making with burst ultrafast laser pulses

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