KR101701318B1 - A capacitive sensing unit of plan position measuring device - Google Patents

A capacitive sensing unit of plan position measuring device Download PDF

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Publication number
KR101701318B1
KR101701318B1 KR1020150084738A KR20150084738A KR101701318B1 KR 101701318 B1 KR101701318 B1 KR 101701318B1 KR 1020150084738 A KR1020150084738 A KR 1020150084738A KR 20150084738 A KR20150084738 A KR 20150084738A KR 101701318 B1 KR101701318 B1 KR 101701318B1
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South Korea
Prior art keywords
sensing
units
electrodes
sensing unit
axis direction
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KR1020150084738A
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Korean (ko)
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KR20160148147A (en
Inventor
미하일 티아프킨
겐나디 트야프킨
알렉산드르 발코보이
갈리나 슬리빈스카야
빅토르 차첸킨
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하이윈 마이크로시스템 코포레이션
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby

Abstract

The present invention relates to a capacitance sensing unit of a planar position measuring apparatus and has a submicron resolution measurement technique capable of simultaneously measuring a rotational angle relative to a two-dimensional position and a planar object, And the position and rotation angle of the rotor relative to the stator surface.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a capacitive sensing unit of a planar position measuring device,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position measuring technique, and more particularly, to a capacitance detecting unit of a planar position measuring apparatus.

U.S. Patent No. RE27436 relates to a specific technology of an improved planar motor, which is a basic structure of a planar motor composed of a planar steel plate and a rotor moving on the steel plate surface, wherein the rotor has a plurality of The stator teeth interact with the magnetic field formed by the stator teeth so that the stator moves quickly and quickly on the surface of the steel plate but the position is measured by the laser interferometer, There is a disadvantage that the application range of the planar motor is greatly restricted.

In the prior art, different sensing techniques have been disclosed to provide a suitable technique for sensing and measuring the position of the stator of a planar motor.

U.S. Patent No. 6476601 provides a magnetic compensation sensor based on a Hall Effect Sensor but is limited in specific applications because it is sensitive to the residual magnetization of the stator tooth.

U.S. Patent No. 6175169 discloses an improved electromagnetic sensor integrated in a rotor that has sub-micron level sensing capability, but the accuracy is affected by the crossmodulation effect, the influence of rotor flux, There are still some areas that need to be improved because they are lowered depending on the defect.

U.S. Pat. No. 5,818,039, which is based on optical sensing technology, detects changes in position through fluorescence but is bulky in volume and difficult to focus on rotor components, limiting its use in the field of planar motors. Also, since it is difficult to provide a uniform dyeing density, noise of the position signal can not be blocked and it is difficult to measure the exact position.

Since the above conventional sensing techniques have inherent disadvantages, they fail to provide an optimal technique for measuring the position of a plane motor. However, due to the development of planar motor manufacturing technology, the planar motor air gap has stabilized, and the stable air gap has become the basis of the capacitance measurement technique. Therefore, a capacitance measurement technique which is not sensitive to the nanorevel resolution and flux has been developed. Can be used.

In this regard, U.S. Patent No. 642911 relates to a rotating linear capacitance sensor, which controls the position through a special type of electrode, but is difficult to use in a motor that moves in a plane linear due to the morphological specificity.

In addition, U.S. Patent No. 4893071 relates to a capacitance measurement technique using a stator tooth as a measurement reference, but the accuracy is greatly reduced due to harmonic distortion of the position detection signal, and the sensor control technique for the calibration and relative movement position is excessively complicated It is difficult to integrate them into the rotor armature of the rotor.

In the present invention, by providing a capacitance sensing unit of a planar position measuring device, it is desired to enable measurement of uniaxial, multiaxial or rotational position angle with high accuracy and high resolution.

The present invention relates to a capacitive sensing unit of a planar position measuring apparatus, which includes a movable body and a sensing unit, wherein the sensing unit senses a virtual sensing axis in a one-dimensional direction, Electrodes are provided on one plane of the body with a long axis perpendicular to the sensing axis and spaced parallel to each other, and the mutual distances between both ends of each sensing electrode are different from 180 °.

Here, the mutual distances between both ends of each of the sensing electrodes are relatively preferably obtuse, and the shape of the sensing electrode is set to a slope of " ".

Wherein each of the sensing electrodes has the same width and is spaced at equal intervals.

In order to increase the accuracy of the measurement, the number of the sensing units may be increased to one side of the body.

Here, each of the sensing units may be arranged in order along a straight-line arrangement axis direction, and may be arranged separately along the non-linear alignment axis direction of the " Z " It is possible to increase the accuracy of detection by expanding the range of detection as much as possible under certain conditions.

Here, the detection axis sensed by each sensing unit is parallel to the arrangement axis direction, and the sensing progression direction is the same axis direction, so one-dimensional sensing can proceed.

More preferably, each of the sensing units may intersect in a stepwise manner along the arrangement axis direction in order to enlarge the sampling quantity and the range.

When the sensing axes sensed by two sensing units adjacent to each other vertically correspond to each other, it is possible to perform position sensing in at least a two-dimensional direction based on the sensing axes.

Also, in order to increase the accuracy of the rotational angle measurement, at least two sensing portions may be provided, which are symmetrical to one plane of the body relative to the geometric center.

Here, the oblique directions of the sensing electrodes of the sensing portions are opposite to each other.

Here, the sensing units of the two sensing units correspond to the geometric centers of the sensing electrodes at the oblique direction.

1 is a plane explanatory view of a comparatively preferred embodiment 1 in the present invention;
Fig. 2 is a use explanatory diagram of a comparatively preferred embodiment 1 in the present invention; Fig.
Figure 3 is a cross-sectional view of Embodiment 1 which is relatively preferred in the present invention;
4 is a plan explanatory view of a second preferred embodiment of the present invention;
Fig. 5 is a bottom view of a comparatively preferred embodiment 2 in the present invention; Fig.
6 is a bird's-eye view of Embodiment 2 which is relatively preferable in the present invention;
FIG. 7 is an explanatory diagram of the second preferred embodiment and the processing circuit combination in the present invention; FIG.
FIG. 8 is a sine wave explanatory diagram obtained through the processing circuit output of the second embodiment which is relatively preferable in the present invention; FIG.
Fig. 9 is a stereoscopic view of comparatively preferred Embodiment 3 in the present invention; Fig.
10 is a plan view of a comparatively preferred embodiment 3 in the present invention;
11 is a plane explanatory view of a comparatively preferred fourth embodiment of the present invention.

1, a comparatively preferred embodiment 1 of the present invention relates to a capacitance sensing unit 10 of a planar position measuring apparatus, in which one movable body 20 and one sensing section 30, .

The body 20 is an appropriately sized circuit board and has a connection line used for installing the sensing unit 30 and electrically connecting the sensing unit 30 to the outside.

The sensing unit 30 includes four sensing electrodes 31, 32, 33, and 34 having the same width and the same width, and the sensing electrodes are installed on one plane of the body 20 at regular intervals Quot; shape in which a narrow angle a of an obtuse angle is formed between both ends of a long axis of each of the sensing electrodes 31, 32, 33 and 34, and a long axis central point extends in both oblique directions.

In the planar position measuring apparatus of the electrostatic capacity sensing unit 10, as shown in Figs. 2 and 3, one plane motor 40 is integrated into a rotor (not shown in the figure) The planar motor 40 is used to sense the position of the plate-shaped stator 41 with respect to the displacement between the stator 41 and the plate-shaped stator 41. The planar motor 40 has a stator 41, And the surface of the stator 41 is flattened and at the same time the stator teeth 411 are adequately protected and an insulating material such as an epoxy resin or the like is formed. The surface of the stator 41 is flattened by compensating for the clearance 412 between the stator teeth 411 by using the stator 411 to stabilize the air gap size formed with the rotor.

The electrostatic capacity sensing unit 10 is installed directly to the rotor through the body 20 so that the sensing unit 30 faces one end face of the stator 41 in the rotor with each other, And the electrostatic capacitance C is formed between the sensing electrodes 31 and the conductive stator tooth 411 by the air gap so as to form a corresponding electrostatic capacitance C, The signal processing technique is not a major technical characteristic of the present invention and will not be described in detail.

However, the sizes of the sensing electrodes 31, 32, 33, and 34 and the stator teeth 411 have a corresponding relationship in the present embodiment. More specifically, the sizes of the stator teeth 411, When the sum of the adjacent tooth gap 412 is one stator teeth period 42 and the sum of the distance widths of one sensing electrode and the adjacent sensing electrodes is one electrode period 35, Corresponds to 3/4 of the stator tooth cycle 42 and the detection unit 30 jumps over exactly three stator tooth cycles 42. [

In addition, the thickness 36 of each sensing electrode 31 is minimized to provide a smoothing surface to reduce the stray capacitance. As shown in FIG. 2, the sensing electrodes 31, 32, The first capacitance C1 has the maximum value and the third capacitance C3 has the minimum value in the capacitances C1, C2, C3, and C4 formed by the capacitors C1, C2, C3, and C4.

In addition, each of the sensing electrodes 31, 32, 33, and 34 has a slope of " " to reduce harmonic distortion and maintain the linear state, The unique shape helps improve the accuracy and sensitivity of position sensing.

When the electrostatic capacity sensing unit 10 of the planar position measuring device is concentrated by the rotor and displaced with respect to the stator 41, the sensing unit 30 senses the direction of the imaginary sensing axis a The sensing axis a is in parallel with the connecting line of the long axis center points of the sensing electrodes 31, 32, 33 and 34, and the narrow axis the sensing axis a corresponds to the long axis of each of the sensing electrodes 31, 32, 33, and 34, respectively.

As shown in FIG. 4, since a large number of the respective stator teeth 411 'can be easily damaged or warped, which affects the stability of the air gap size to generate spatial noise, once the stator teeth 411' The accuracy of the capacitance position measured by the sensing unit 30 'can be greatly reduced by influencing the reference of the measurement size, and further, Can also affect the accuracy of detection. In the comparatively preferred embodiment 2 of the present invention, the electrostatic capacity sensing units 10 'having five water quantities are arranged in order along the arrangement axis direction b' extending in one straight line, (A ') of the sensing axis (a') is parallel to the arrangement axis direction (b ') and is arranged in a stepwise manner along the arrangement axis direction. By increasing the number of measurement points and extending the sensing range to both sides after a stepwise cross-over, the number of samples detected can be greatly increased, reducing the effect of the deformation described above on detection accuracy.

In this embodiment, the one-dimensional sensing structure 1 ', in which the sensing axes a' of the plurality of sensing units 10 'are arranged in parallel with each other, The processing circuit 50 'processes the electronic signal generated in the one dimensional sensing structure, but the progressive position sensing is based on the corresponding voltage without directly measuring each capacitance value. More specifically, the sensing electrodes 31 ', 32', 33 ', and 34' of each sensing unit 30 'are formed of two sets of two resistances of the two bridges 51' and 52 ' 511 ', 512', 521 ', 522' and the low point of each bridge 51 ', 52' is grounded to the surface of each stator 41 ', and the high point is connected to an oscillator 53 ', And the voltage balance separated from each of the bridges 51' and 52 'is measured by one of the amplifiers 54' and 55 '.

When the one-dimensional sensing structure moves along the movement of the rotor, the corresponding respective capacitances also change, and the voltage balance of each bridge 51 ', 52' is also changed on the basis of the changed capacitance, A sinusoidal signal is generated as shown in Fig. 8, which is the basis of the position measurement calculation.

9 and 10, in the comparatively preferred embodiment 3 of the present invention, a plurality of one-dimensional sensing structures 1 "provided in the comparatively preferable embodiment 2 are detected in a three-dimensional direction in a suitable structure And is used to measure the position and rotation angle of the plane.

More specifically, the present embodiment is a one-dimensional sensing structure (1a ", 1b", 1c ") having three quantities and is arranged in order along the arrangement axis direction (b" The first one-dimensional sensing structure 1b "and the one third one-dimensional sensing structure 1c " corresponding to both sides are made parallel to the arrangement axis direction b" Are parallel to each other and perpendicular to the arrangement axis direction b ".

In the structure of the present embodiment, the position of each of the different directions is measured through each one-dimensional sensing structure 1 ", wherein each sensing portion 30 " The precise position can be sensed by avoiding mutual influence between the one-dimensional sensing structures corresponding to each other in the present embodiment.

In addition, in order to obtain better rotation measurement accuracy, except for the above-mentioned relatively preferable structure of the third embodiment, in the comparative preferred embodiment 4 of the present invention shown in Fig. 11 as the electrostatic capacity sensing unit 10 '' ' Likewise, the number of the sensing units 30 '' 'may be increased to two based on the comparative preferred embodiment 1, and the sensing unit a' '' may be provided to the sensing units 30 '' ' '' Are symmetrically arranged on one side of the body (20 '' ') with one geometrical center being the axis, and the first sensing (30' '' The same stator tooth cycle 42 '' 'is measured, with electrodes 31' '' positioned on both sides of the geometric center.

In the figure,
1 ", 1 ", la ", 1b ", and 1c &
10, 10 'and 10 ": Capacitive sensing unit
20, 20 'and 20 ": body
21 ': Connecting cable
22 ': connecting ball
23 ': One side of the square
30, 30 ', 30 "and 30 "':
31, 32, 33, 34, 31 ', 32', 33 ', 34'
35: electrode cycle
36: Sensing electrode thickness
40: Planar motor
41: Stator
411 and 411 ': stator teeth
412: Clearance
42, 42 'and 42 ": stator tooth cycle
43: height of stator teeth
50 ': processing circuit
51 'and 52': bridge
511 ', 512', 521 'and 522': resistance
53 ': oscillator
54 'and 55': an amplifier
a, a ', a "and a "':
b 'and b ": array axis direction
C1, C2, C3 and C4: Capacitance
(α): is the narrow angle.

Claims (13)

A capacitance detection unit of a planar position measuring device,
A movable body and a sensing portion,
The sensing unit may include a plurality of sensing electrodes in the form of a plurality of strip-shaped sensing electrodes. The sensing unit may include a plurality of sensing electrodes arranged in a plane perpendicular to the sensing axis, And the mutual distances between both ends of each sensing electrode are different from each other by 180 °. The method according to claim 1,
Wherein the mutual distance between both ends of each sensing electrode is an obtuse angle. The method according to claim 1,
Wherein each of the sensing electrodes has a "" shape. The method according to claim 1, 2, or 3,
Wherein the sensing electrodes are equal in width and spaced apart at equal intervals. The method according to claim 1, 2, or 3,
Wherein a number of the sensing units is plural, and the sensing units are installed on one surface of the body. 6. The method of claim 5,
Wherein each of the sensing units is disposed on one surface of the body in order along one array axis direction. The method according to claim 6,
Wherein the sensing axis sensed by each sensing unit is parallel to the array axis direction. 8. The method of claim 7,
Wherein the sensing units are sequentially crossed in a stepwise manner along the array axis direction. 6. The method of claim 5,
Wherein the sensing axes sensed by the two adjacent sensing units are perpendicular to each other. 10. The method of claim 9,
Wherein the number of the sensing units is three. The method according to claim 1, 2, or 3,
Wherein the number of the sensing units is two, is relative to one geometrical center, and is symmetrical to one plane of the body. 12. The method of claim 11,
Wherein the sense units of the sensing unit sense electrodes are opposite in direction to each other. 13. The method of claim 12,
Wherein each of the two sensing units has one sensing electrode at an oblique direction end corresponding to the geometric center.
KR1020150084738A 2015-06-16 2015-06-16 A capacitive sensing unit of plan position measuring device KR101701318B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841225A (en) 1986-11-13 1989-06-20 Meyer Hans Ulrich Capacitive sensor for measuring a displacement
JP2013024701A (en) 2011-07-20 2013-02-04 Ckd Corp Position sensor, measuring system, and plane stage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
JPH0617798B2 (en) * 1988-08-10 1994-03-09 株式会社ミツトヨ Displacement detection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841225A (en) 1986-11-13 1989-06-20 Meyer Hans Ulrich Capacitive sensor for measuring a displacement
JP2013024701A (en) 2011-07-20 2013-02-04 Ckd Corp Position sensor, measuring system, and plane stage

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