KR101694354B1 - Multi-layer tube - Google Patents

Abstract

The present invention relates to a multi-layer tube, comprising: a first tube having a transmittance measured according to JIS K 7361-1 of 73% or more based on a thickness of 1.48 mm; And a second tube formed on at least one of the outside and inside of the first tube and having a transmittance measured by JIS K 7361-1 of less than 73% based on a thickness of 1.47 mm.

Description

Multi-layer tube

The present invention relates to a multi-layer tube in which a plurality of tubes are combined.

Various liquid chemicals or water are frequently used in manufacturing processes for semiconductors and displays. There are acidic solutions such as hydrofluoric acid, sulfuric acid, hydrochloric acid, nitric acid, phosphoric acid, etc., and alkaline solutions containing potassium hydroxide, sodium hydroxide, ammonium and the like, and chemicals used in the cleaning liquid have. Among these, ozonated dilute hydrofluoric acid (ozonated DHF) is used in processes such as cleaning and etching of semiconductor substrates.

These chemicals are transported through a transport system that includes tubes, pipes, etc., where tubes made of fluorinated resins are commonly used. The transparency (light transmittance) of the fluorinated resin tube is preferably high so as to identify the fluid flowing in the tube. In the case of a tube having improved physical properties such as fluid permeability and elasticity, transparency is lowered. That is, the transparency of the fluorine-based resin tube may be different from other physical properties (such as fluid permeability and elastic modulus).

It is an object of the present invention to provide a multi-layer tube capable of simultaneously improving transparency and other physical properties.

In order to achieve the above-mentioned object, the present invention is characterized in that a first tube having a transmittance measured by JIS K 7361-1 of 73% or more based on a thickness of 1.48 mm; And a second tube formed on at least one of the outside and inside of the first tube and having a transmittance measured by JIS K 7361-1 of less than 73% based on a thickness of 1.47 mm.

The multi-layer tube according to an embodiment of the present invention is a multi-layer tube in which a multi-layer tube is composed of a first tube arranged in the inside and a second tube arranged in the outside, or a second tube arranged in the inside and a first tube arranged in the outside Can be a tube.

The multi-layer tube according to another embodiment of the present invention may be a triple tube composed of a first tube, a second tube, a first tube from the inside, or a second tube, a first tube and a second tube from the inside.

In the present invention, at least one of the first tube and the second tube may have a color including a pigment.

In the present invention, the thickness of the first tube may be equal to or greater than the thickness of the second tube, and the thickness of the second tube may be 0.1 to 2 mm.

In the present invention, the first tube and the second tube each independently comprise a tetrafluoroethylene-perfluoro alkyl vinyl ether copolymer having a weight average molecular weight of 500,000 to 700,000, and the first tube The number of carbon atoms in the perfluoroalkyl group of the second tube is 1 to 104 and the number of fluorine atoms may be 1 to 209 in the perfluoroalkyl group of the second tube.

In the present invention, the image clearness measured by JIS K 7374 of the first tube is 98 to 100% based on the width of 2 mm of the optical comb, 96 to 97.9% on the width of 1 mm, , 94 to 96.9% based on the width of 0.5 mm, 91 to 93.9% based on the width of 0.25 mm, and 80 to 90.9% based on the width of 0.125 mm.

In the present invention, the image clearness measured by the JIS K 7374 of the second tube is 92 to 100% based on the width of 2 mm of the optical comb, 83 to 91.9% based on the width of 1 mm, 65 To 82.9%, a width of 48 to 64.9% based on a width of 0.25 mm, and a width of 30 to 47.9% based on a width of 0.125 mm.

In the present invention, the melting point of the first tube according to ASTM D3418 is 300 to 314 占 폚, the crystallization temperature according to ASTM D3418 is 280 to 295 占 폚, the elongation according to ASTM D638 is 370 to 384% at 23 占 폚, 510 to 530 %, The flexural modulus according to ASTM D790 is from 350 to 515 MPa at 23 DEG C, from 40 to 52 MPa at 200 DEG C, the compression modulus according to ASTM D695 is from 350 to 535 MPa at 23 DEG C, from 75 to 90 MPa at 200 DEG C, May have a coefficient of linear expansion of 10 to 12.89 x 10 < ^-5 > / k at 25 to 50 DEG C and 10 to 17.34 x 10 < ^-5 >

In the present invention, the melting point of the second tube according to ASTM D3418 is 315 to 330 占 폚, the crystallization temperature according to ASTM D3418 is 296 to 310 占 폚, the elongation according to ASTM D638 is 385 to 400% at 23 占 폚, 490 to 509 %, The flexural modulus according to ASTM D790 is 516 to 700 MPa at 23 DEG C, 53 to 65 MPa at 200 DEG C, the compression modulus according to ASTM D695 is 536 to 700 MPa at 23 DEG C, 60 to 74 MPa at 200 DEG C, ASTM D696 May have a coefficient of linear expansion of 12.9 to 16 x 10 < ^-5 > / k at 25 to 50 DEG C and 17.35 to 25 x 10 < ^-5 >

In the present invention, the nitrogen permeability of the first tube is 7.6 to 10.5 × 10 ^-11 cm 3 · cm / cm 2 · sec · cm Hg, the hydrogen chloride permeability for 30 days is 2250 to 3300 g · · mm 2 / The change in the weight after 55 days of contact with the photoresist stripping solvent was 18.5 to 21 g / m 2 · day, the Ra roughness was 0.04 to 0.09 μm, the Rz roughness was 0.3 to 0.5 μm , The rupture pressure may be 1.8 to 1.89 MPa at 30 占 폚 and 0.95 to 1.029 MPa at 100 占 폚.

In the present invention, the nitrogen permeability of the second tube is in the range of 4 to 7.5 × 10 ^-11 cm 3 · cm / cm 2 · sec · cm Hg, the hydrogen chloride permeability in 30 days is in the range of 1000 to 2,249 μg · mm / cm 2, contact with the photoresist stripping solvent 55 Day, the weight change was 0.2 to 0.409 g, the change in the transmittance after 55 days of contact with the photoresist stripping solvent was 15 to 18.4 g / m 2 · day, the Ra roughness was 0.01 to 0.039 μm, the Rz roughness was 0.1 to 0.29 μm, May be 1.9 to 2 MPa at 30 DEG C, and 1.03 to 1.2 MPa at 100 DEG C. [

The multi-layer tube according to the present invention can improve transparency and other physical properties at the same time, thereby enhancing the identification of the fluid flowing therein, and improving other properties such as fluid permeability and elastic modulus.

1 is a perspective view of a multi-layer tube according to a first embodiment of the present invention.
2 is a perspective view of a multi-layer tube according to a second embodiment of the present invention.
3 is a perspective view of a multi-layer tube according to a third embodiment of the present invention.
4 is a perspective view of a multi-layer tube according to a fourth embodiment of the present invention.
5 is a perspective view of a multi-layer tube according to a fifth embodiment of the present invention.
6 is a perspective view of a multi-layer tube according to a sixth embodiment of the present invention.

Hereinafter, the present invention will be described in detail.

FIG. 1 is a perspective view of a multi-layer tube according to a first embodiment of the present invention. The multi-layer tube according to this embodiment is composed of a first tube 10 disposed on the outer side and a second tube 20 disposed on the inner side It is a double tube.

The transmittance of the first tube 10 measured by JIS K 7361-1 may be 73% or more, preferably 73 to 90%, and more preferably 75 to 81%, based on 1.48 mm in thickness.

The transmittance of the second tube 20 measured by JIS K 7361-1 may be less than 73%, preferably 55 to 72.9%, more preferably 65 to 71%, based on the thickness of 1.47 mm. That is, the second tube 20 has a lower transmittance than the first tube 10, and thus has lower transparency than the first tube 10.

Table 1 shows the transmittances of the first tube 10 and the second tube 20 which can be particularly preferably used in the present invention. The higher the transmittance, the higher the transparency. Even in the same tube, the transmittance may vary depending on the thickness, and in general, the thinner the thickness, the higher the transmittance can be.

division Transmittance (%) Thickness (mm) The first tube 77.9 1.48 The second tube 68.3 1.47 Test standard: JIS K 7361-1

As described above, in the present invention, by combining the first tube 10 having a relatively high transparency and the second tube 20 having a relatively low transparency but excellent physical properties, the total transparency of the multi-layer tube is improved, And other physical properties such as fluid permeability and elastic modulus can be improved. In addition, since the two tubes 10 and 20 constituting the multi-layer tube are formed in the form of a layer, the overall transparency of the multi-layer tube can be improved while maintaining excellent physical properties (low permeability, etc.) of the second tube 20 .

The image clearness measured by the JIS K 7374 of the first tube 10 was 98 to 100% based on the width of 2 mm of the optical comb, 96 to 97.9% on the basis of the width of 1 mm, 94 To 96.9%, from 91 to 93.9% based on the width of 0.25 mm, and from 80 to 90.9% based on the width of 0.125 mm.

The image clearness measured by the JIS K 7374 of the second tube 20 is 92 to 100% based on the width of 2 mm of the optical comb, 83 to 91.9% based on the width of 1 mm, 65 To 82.9%, a width of 48 to 64.9% based on a width of 0.25 mm, and a width of 30 to 47.9% based on a width of 0.125 mm.

Table 2 illustrates the image clearness of the first tube 10 and the second tube 20 which can be particularly preferably used in the present invention. As the width of the optical comb increases, the image clearness increases.

division Image clearness (%) for each width of the optical comb 2.0 mm 1.0 mm 0.5 mm 0.25 mm 0.125 mm The first tube 98.2 97.5 95.3 91.8 88.9 The second tube 94.5 89.9 75.3 55.8 40.5 Test standard: JIS K 7374

Although the thickness of the first tube 10 and the second tube 20 is not particularly limited, it is preferable that the thickness of the first tube 10 is equal to or greater than the thickness of the second tube 20. That is, the thickness of the second tube 20 may be equal to or smaller than the thickness of the first tube 10. Since the transmittance (transparency) of the second tube 20 is lower than that of the first tube 10, the thickness of the second tube 20 is preferably as thin as possible in order to improve the transparency of the multi-layer tube and the identification of the fluid . The smaller the thickness of the second tube 20, the better the transparency of the second tube 20 itself, and thus the overall transparency of the multi-layer tube can also be improved. The thickness of the second tube 20 may vary depending on the diameter of the multi-layer tube, for example, the thickness of the second tube 20 may be 0.1 to 2 mm, preferably 0.1 to 1 mm.

The diameters of the first tube 10 and the second tube 20 are not particularly limited and may be generally used in a large amount, such as 1/4 inch, 3/8 inch, 1 inch, 1 and 1/2 inch, The diameter of the tube can be used. For example, if the tube diameter is 1/4 inch, the tube thickness may be 1.2 +/- 0.102 mm. If the tube diameter is 3/8 to 1 inch, the tube thickness may be 1.57 +/- 0.102 mm. If the tube diameter is 1 and 1/2 inch, then the tube thickness may be 2.2 +/- 0.102 mm.

The first tube 10 and the second tube 20 may each independently comprise a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer having a weight average molecular weight (Mw) of 500,000 to 700,000. The molecular weight of the polymer resin can not be measured by conventional techniques. The melt mass-flow rate (MFR) is inversely proportional to the viscosity, and the viscosity is directly proportional to the molecular weight of the polymer. Therefore, if the MFR of the polymer is the same, the average molecular weight may be substantially the same. MFR, etc., the weight average molecular weight (Mw) of the polymer resin may be in the range of 500,000 to 700,000.

In the perfluoroalkyl group of the first tube 10, the number of carbon atoms is 105 to 300 and the number of fluorine atoms is 210 to 500. In the perfluoroalkyl group of the second tube 20, the number of carbon atoms is 1 to 104 and the number of fluorine atoms is 1 to 209 Lt; / RTI > For example, in the perfluoroalkyl group of the first tube 10, the number of carbon atoms is 150 and the number of fluorine atoms is 300, and the number of carbon atoms in the perfluoroalkyl group of the second tube 20 is 60 and the number of fluorine atoms is 120. [

In particular, the polymer resin is very suitable as a tube resin for semiconductor equipment. The first tube 10 and the second tube 20 may be made of only a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, and if necessary, additives such as pigment may be added to the polymer resin. The content of the additive may be, for example, 0.01 to 10 parts by weight based on 100 parts by weight of the polymer resin.

The melting point of the first tube 10 according to ASTM D3418 is 300 to 314 占 폚, the crystallization temperature according to ASTM D3418 is 280 to 295 占 폚 and the elongation according to ASTM D638 is 23 占 폚 370 to 384% and 510 to 530% at 200 DEG C, Flexural Modulus according to ASTM D790 is 350 to 515 MPa at 23 DEG C, 40 to 52 MPa at 200 DEG C, Compressive Modulus according to ASTM D695, Is from 350 to 535 MPa at 23 DEG C and from 75 to 90 MPa at 200 DEG C, the linear coefficient of expansion according to ASTM D696 is from 10 to 12.89 x 10 < ^-5 > / k at 25 to 50 DEG C, 10 to 17.34 x 10 < ^-5 > / k.

The melting point of the second tube 20 according to ASTM D3418 is 315 to 330 占 폚, the crystallization temperature according to ASTM D3418 is 296 to 310 占 폚, the elongation according to ASTM D638 is 385 to 400% at 23 占 폚, 490 to 509 at 200 占 폚 %, The flexural modulus according to ASTM D790 is 516 to 700 MPa at 23 DEG C, 53 to 65 MPa at 200 DEG C, the compression modulus according to ASTM D695 is 536 to 700 MPa at 23 DEG C, 60 to 74 MPa at 200 DEG C, ASTM D696 May have a coefficient of linear expansion of 12.9 to 16 x 10 < ^-5 > / k at 25 to 50 DEG C and 17.35 to 25 x 10 < ^-5 >

The specific gravity according to ASTM D792 is 2 to 2.3, the tensile strength according to ASTM D638 (manufactured by ASTM D638), the specific gravity according to ASTM D792 is 10 to 5 g / Tensile Strength) may be 25 to 35 MPa at 23 ° C, 10 to 24 MPa at 200 ° C, and Deflection Temperature under Load according to ASTM D648 may be 180 to 300 ° C.

Table 3 illustrates various basic properties of the first tube 10 and the second tube 20 which can be particularly preferably used in the present invention.

Properties ASTM
Test method The first tube The second tube MFR (g / 10 min) D1238 1-3 1-3 importance D792 2.149 2.153 Melting point (캜) D3418 310 320 Crystallization temperature (캜) 290 302 The tensile strength
(MPa) 23 ℃ D638 30 30 200 ℃ 18 18 Elongation
(%) 23 ℃ 380 390 200 ℃ 520 500 Flexural modulus
(MPa) 23 ℃ D790 430 600 200 ℃ 50 55 Compression modulus
(MPa) 23 ℃ D695 470 600 200 ℃ 80 70 Coefficient of linear expansion
(10 < ^-5 > / k) 25 ~ 50 ℃ D696 12.6 13.2 25 to 200 ° C 17.0 17.7 Load deformation temperature (℃) 0.45 MPa D648 > 200 > 200

The first tube 10 and the second tube 20 are suitable for a large size and high integration semiconductor manufacturing process and in particular the second tube 20 is superior to the first tube 10 in quality . Specifically, the second tube 20 by improving the purity of the fluorination (fluorination), low extractable fluoride ion (low extractable F ^- ion), low-TOC (low Total Organic Carbon), low particle (low particle) Effect can be obtained. Further, the second tube 20 can be made to have low permeability, high thermal stability, high load-strain temperature, high-temperature modulus effect by improving the crystallinity . In addition, the second tube 20 minimizes the spherulite, thereby improving surface smoothness, low permeability, and high temperature stability. In addition, the second tube 20 has a high melting point, a high freezing point, and a high glass transition point, thereby achieving high temperature strength improvement, high load-strain temperature and high temperature modulus effect have.

The nitrogen permeability of the first tube 10 is 7.6 to 10.5 × 10 ^-11 cm 3 · cm / cm 2 · sec · cm Hg, the nitrogen permeability of the second tube 20 is 4 to 7.5 × 10 ^-11 cm 3 · cm 2 / · Sec · cmHg. Nitrogen permeability test was carried out on a tube with a diameter of 150 mm and a thickness of 0.3 mm. The permeation area was 100 cm 2, the measuring device was GT6 (Toyo seiki), the carrier gas was He, the measuring gas was nitrogen, atm. As a result of the nitrogen permeability test, the nitrogen permeability of the existing PTFE (Polytetrafluoroethylene) tube was about 15.5 × 10 ^-11 cm 3 · cm / cm 2 · sec · cm Hg, and the nitrogen permeability of the conventional PFA (perfluoroalkoxy) tube was about 11.5 × 10 ^-11 cm 3 · The nitrogen permeability of the first tube 10 is about 9 x 10 ^-11 cm < 3 > / cm < 2 >, and the nitrogen permeability of the second tube 20 is about 6.5 x 10 & ^-11 cm < 3 >. cm / cm < 2 > That is, the nitrogen permeability of the first tube 10 and the second tube 20 is lower than that of the conventional resin tube so that the first tube 10 and the second tube 20 have lower permeability to nitrogen than conventional resin tubes , In particular the nitrogen permeability of the second tube (20) was lower than that of the first tube (10).

The 30-day hydrogen chloride permeability of the first tube 10 may be 2250 to 3300 占 · / cm2, and the 30-day hydrogen chloride permeability of the second tube 20 may be 1000-2249 占 퐂 / mm2. The HCl permeability test was conducted on a 1 mm thick tube, and the chemical was tested under conditions of 35% HCl, a test period of 30 days, and a temperature of 70 ° C. As a result of the HCl permeability test, the permeability of each tube increased with time. At 30 days, the HCl permeability of the conventional PFA tube was about 3,400 · · mm / ㎠, the HCl permeability of the first tube 10 was about 2750 ㎍ Mm / cm 2, and the HCl permeability of the second tube 20 was about 1750 · · mm / cm 2. That is, the HCl transmittance of the first tube 10 and the second tube 20 is lower than that of the conventional resin tube so that the first tube 10 and the second tube 20 are less permeable to HCl than conventional resin tubes , In particular the HCl permeability of the second tube (20) was lower than that of the first tube (10).

After 55 days of contact with the photoresist stripping solvent of the first tube 10, the weight change was 0.41 to 0.5 g, the change in the transmittance after 55 days of contact with the photoresist stripping solvent was 18.5 to 21 g / m 2 · day Lt; / RTI > The weight change of the second tube 20 after 55 days of contact with the photoresist stripping solvent may be 0.2 to 0.409 g, and the change in the transmittance after 55 days of contact with the photoresist stripping solvent may be 15 to 18.4 g / m 2 · day. The stripping solvent permeability test was conducted on a tube with a thickness of 1 mm. The cup method was used to bring the chemical (stripping solvent) into contact with the tube, and the difference in weight of the tube was measured. Respectively. Specifically, a stripping solvent was put into a cup-shaped container, the thinly cut tube was placed in a cup containing the solvent, sealed with a stopper, turned over, and then heated and dried in an oven. As a chemical substance, TOK106 (photoresist stripper: Tokyo Ohka Kogyo Co., Ltd.) was used and the permeation area was about 7.07 cm 2 (cup diameter: 30 mm), the test period was 70 days, . As a result of the stripping solvent permeability test, the accumulated weight change and permeability change of each tube increased with time. At about 55 days, the accumulated weight change of the conventional PFA tube was about 0.53 g, The accumulated weight change was about 0.42 g, and the accumulated weight change of the second tube 20 was about 0.38 g. At about 55 days, the permeability change of the conventional PFA tube was about 22 g / m 2 · day, the permeability change of the first tube 10 was about 19 g / m 2 · day, the permeability change of the second tube 20 Was about 17 g / m 2 · day. That is, the stripping solvent permeability of the first tube 10 and the second tube 20 is lower than that of the conventional resin tube so that the first tube 10 and the second tube 20 are less permeable to the stripping solvent than the conventional resin tube Respectively. In particular, the swelling of the second tube 20 is greatest, so that the cup with the second tube 20 ruptured about 63 days, indicating that the chemical permeability of the second tube 20 is very low .

The eluted fluoride ion concentration of the first tube 10 and the second tube 20 according to the purity test was 0.025 / / cm 2 or less in the case of pellets and 0.03 / / cm 2 or less in the case of tubing, Mu] g / cm < 2 >. Purity test (extractable fluorinated ion) was performed on 10 g pellets and tubes having an outer diameter of 25.4 mm, an inner diameter of 22.2 mm and a length of 180 mm. In the case of the pellet, the pellet was sealed in a plastic container filled with ion-extractable solution (deionized water, methanol, TISAB II). In the case of the tube, the ion-extractable solution was put in a tube and the both ends of the tube were sealed with a stopper Respectively. Thereafter, the sample was allowed to stand at room temperature for 24 hours, and the extractable fluorinated ion was measured. As a result of the purity test, it was found that the concentration of fluorinated ion in the conventional PFA tube was about 0.03 占 퐂 / cm2 for the pellet and about 0.04 占 퐂 / cm2 for the tube, The fluoride ion concentration was about 0.015 ㎍ / ㎠ for pellets and about 0.005 ㎍ / ㎠ for tubes.

The first tube 10 may have an Ra roughness of 0.04 to 0.09 mu m and an Rz roughness of 0.3 to 0.5 mu m. The Ra roughness of the second tube 20 may be 0.01 to 0.039 mu m, and the Rz roughness may be 0.1 to 0.29 mu m. The inner surface smoothness test was performed on a 1 inch diameter tube, and the 3D image was implemented using a surface shape measuring instrument or the like. As a result of the test, the conventional PFA tube had an Ra roughness of about 0.10 탆 and an Rz roughness of about 0.54 탆. The first tube 10 had an Ra roughness of about 0.05 탆 and an Rz roughness of about 0.34 탆, The Ra roughness was about 0.03 mu m, and the Rz roughness was about 0.25 mu m.

The rupture pressure of the first tube 10 may be 1.8 to 1.89 MPa at 30 占 폚 and 0.95 to 1.029 MPa at 100 占 폚. The rupture pressure of the second tube 20 may be 1.9 to 2 MPa at 30 占 폚 and 1.03 to 1.2 MPa at 100 占 폚. The rupture pressure test was performed on 1-inch diameter tubes and measured at 30 ° C and 100 ° C, respectively. As a result of the test, the burst pressure of the conventional PFA tube was about 1.88 MPa at 30 DEG C and about 0.91 MPa at 100 DEG C, and the burst pressure of the first tube 10 was about 1.87 MPa at 30 DEG C and about 1.02 MPa at 100 DEG C, The rupture pressure of the second tube 20 was about 1.93 MPa at 30 占 폚 and about 1.04 MPa at 100 占 폚. Since the first tube 10 and the second tube 20 have high crystallinity and high melting point, they have higher durability at higher temperature than conventional resin tubes.

The multi-layer tube can be manufactured by a method such as extrusion. For example, after the first tube 10 is extruded, the second tube 20 may be extruded inside and / or out of the first tube 10. Also, a co-extrusion method for simultaneously extruding the first tube 10 and the second tube 20 may be used. Alternatively, the first tube 10 and the second tube 20 may be fitted together to form a multi-layer tube, or the first tube 10 and the second tube 20 may be bonded together with an adhesive to form a multi-layer tube.

FIG. 2 is a perspective view of a multi-layer tube according to a second embodiment of the present invention. The multi-layer tube according to this embodiment is composed of a second tube 20 disposed on the outside and a first tube 10 disposed on the inside It is a double tube.

FIG. 3 is a perspective view of a multi-layer tube according to a third embodiment of the present invention. The multi-layer tube according to this embodiment includes a first tube 10, a second tube 20, And a tube 12. The first first tube 10 and the second first tube 12 may be tubes of the same material.

FIG. 4 is a perspective view of a multi-layer tube according to a fourth embodiment of the present invention, in which the multi-layer tube according to this embodiment includes a first second tube 20, a first tube 10, And a tube (22). The first second tube 20 and the second second tube 22 may be tubes of the same material.

Fig. 5 is a perspective view of a multi-layer tube according to a fifth embodiment of the present invention. Fig. 5 is a perspective view of a multi-layer tube according to a fifth embodiment of the present invention, in which the second tube 20, Lt; / RTI > The colored layer may be any one of the first tubes 10 and 12 instead of the second tube 24, and the plurality of layers may be colored layers.

The kind of the pigment is not particularly limited and any kind of pigment can be used. The color of the pigment is not particularly limited, and various colors can be applied. Further, when a plurality of fluids is transferred to a plurality of independent tube lines, the colors of the respective tube lines may be set differently for each fluid, so that each fluid can be discriminately applied. For example, you can apply red for a tube line with hydrofluoric acid and blue for other fluids, so you can identify the type of fluid just by looking at the color of the tube line.

Even after applying the pigment to the multi-layer tube, it is preferred that the multi-layer tube maintain transparency for fluid identification. For this purpose, the amount of the pigment to be added is preferably small. For example, the amount of the pigment to be added to 100 parts by weight of the tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer is 0.001 to 5 parts by weight, preferably 0.01 to 5 parts by weight, 3 parts by weight.

Fig. 6 is a perspective view of a multi-layer tube according to a sixth embodiment of the present invention, which is a triple tube as in Fig. 4, in which the first tube 10 as an intermediate layer is a colored first tube 14 Lt; / RTI > The colored layer may be any one of the second tubes 20 and 22 instead of the first tube 14, and the plurality of layers may be colored layers.

The structure of the multi-layer tube is not limited to that shown in the drawings, and can be variously changed as needed. For example, a quadruple tube, a twin tube, or the like is also possible.

10, 12: first tube
14: colored first tube
20, 22: second tube
24: colored second tube

Claims (8)

A first tube having a transmittance of 73% or more based on a thickness of 1.48 mm measured by JIS K 7361-1; And
A second tube formed on at least one of the outside and inside of the first tube and having a transmittance measured by JIS K 7361-1 of less than 73% based on a thickness of 1.47 mm,
The first tube and the second tube each independently comprise tetrafluoroethylene-perfluoro alkyl vinyl ether copolymer having a weight average molecular weight of 500,000 to 700,000,
Wherein the number of carbon atoms in the perfluoroalkyl group of the first tube is 105 to 300 and the number of fluorine atoms is 210 to 500 and the number of carbon atoms in the perfluoroalkyl group of the second tube is 1 to 104 and the number of fluorine atoms is 1 to 209 tube.
The method according to claim 1,
The multi-layer tube may be a double tube composed of a first tube arranged in the inside and a second tube arranged in the outside, or a second tube arranged in the inside and a first tube arranged in the outside;
Wherein the inner tube is a triple tube composed of a first tube, a second tube, a first tube, or a second tube, a first tube and a second tube from the inside.
3. The method according to claim 1 or 2,
Wherein at least one of the first tube and the second tube has a color including a pigment.
3. The method according to claim 1 or 2,
Wherein the thickness of the first tube is equal to or greater than the thickness of the second tube and the thickness of the second tube is from 0.1 to 2 mm.
delete 3. The method according to claim 1 or 2,
The image clearness of the first tube measured by JIS K 7374 is 98 to 100% based on 2 mm width of optical comb, 96 to 97.9% on width 1 mm, width 0.5 94 to 96.9% based on the mm, 91 to 93.9% based on the width of 0.25 mm, and 80 to 90.9% based on the width of 0.125 mm;
The image clearness measured by JIS K 7374 of the second tube is 92 to 100% based on the width of 2 mm of the optical comb, 83 to 91.9% based on the width of 1 mm, 65 to 82.9% based on the width of 0.5 mm, 48 to 64.9% based on a width of 0.25 mm, and 30 to 47.9% based on a width of 0.125 mm;
And the measurement results described above are all satisfied.
3. The method according to claim 1 or 2,
The first tube had a melting point of 300 to 314 占 폚 according to ASTM D3418, a crystallization temperature of 280 to 295 占 폚 according to ASTM D3418, an elongation of 370 to 384% at 23 占 폚, 510 to 530% at 200 占 폚, an ASTM The flexural modulus according to D790 is from 350 to 515 MPa at 23 DEG C and from 40 to 52 MPa at 200 DEG C, the compression modulus according to ASTM D695 is from 350 to 535 MPa at 23 DEG C, from 75 to 90 MPa at 200 DEG C, The coefficient is 10 to 12.89 × 10 ^-5 / k at 25 to 50 ° C and 10 to 17.34 × 10 ^-5 / k at 25 to 200 ° C;
The second tube had a melting point of 315 to 330 占 폚 according to ASTM D3418, a crystallization temperature of 296 to 310 占 폚 according to ASTM D3418, an elongation according to ASTM D638 of 385 to 400% at 23 占 폚, 490 to 509% at 200 占 폚, The flexural modulus according to D790 is 516 to 700 MPa at 23 DEG C, 53 to 65 MPa at 200 DEG C, the compression modulus according to ASTM D695 is 536 to 700 MPa at 23 DEG C, 60 to 74 MPa at 200 DEG C, the linear expansion according to ASTM D696 coefficient at 25 to 50 ℃ 12.9 to 16 × 10 ^-5 / k, at 25 to 200 ℃ 17.35 to 25 × 10 ^-5 / k a;
And the measurement results described above are all satisfied.
3. The method according to claim 1 or 2,
The nitrogen permeability of the first tube was 7.6 to 10.5 × 10 ^-11 cm 3 · cm / cm 2 · sec · cm Hg, the hydrogen chloride permeability for 30 days was 2250 to 3300 μg · mm / cm 2, contact with the photoresist stripping solvent 55 The change in weight after the contact with the photoresist stripping solvent after 55 days was 18.5 to 21 g / m 2 · day, the Ra roughness was 0.04 to 0.09 μm, the Rz roughness was 0.3 to 0.5 μm, the burst pressure was 0.41 to 0.5 g, 1.8 to 1.89 MPa at 30 DEG C and 0.95 to 1.029 MPa at 100 DEG C;
The nitrogen permeability of the second tube was in the range of 4 to 7.5 × 10 ^-11 cm 3 · cm / cm 2 · sec · cm Hg, the hydrogen chloride permeability in 30 days was in the range of 1000 to 2249 μg · mm / cm 2, the weight after 55 days of contact with the photoresist stripping solvent The change in the transmittance after 55 days of contact with the photoresist stripping solvent is 15 to 18.4 g / m 2 · day, the Ra roughness is 0.01 to 0.039 μm, the Rz roughness is 0.1 to 0.29 μm, the burst pressure is 30 ° C. 1.9 to 2 MPa at 100 DEG C and 1.03 to 1.2 MPa at 100 DEG C;
And the measurement results described above are all satisfied.

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