KR101692738B1 - Contamination monitoring apparatus for a gas line blocking gas leakage - Google Patents

Abstract

A contamination monitoring apparatus comprises a tube section, a light-emitting unit, a light-receiving unit, and a light-covering unit. The tube section covers a gas line which gas passes through, and includes a transparent material. The light-emitting unit is fixed to one side of the tube section to be adjoined at the gas line, so as to generate light toward the gas line. The light-receiving unit faces the light-emitting unit across the gas line, and then receives the light which is generated from the light-emitting unit and transmitted through the gas line. The light-covering unit seals the outside of the tube section, the light-emitting unit, the light-receiving unit, and creates a vacuum section between the tube section and the light-covering section. The contamination monitoring apparatus is relatively accurate at estimating the degree of contamination and can block the leakage of contaminated gas.

Description

TECHNICAL FIELD [0001] The present invention relates to a gas pipeline pollution monitoring apparatus,

The present invention relates to a pollution monitoring apparatus, and more particularly, to a pollution monitoring apparatus that monitors the pollution degree of gas passing through a gas pipeline and prevents leakage of contaminated gas.

In a semiconductor manufacturing apparatus such as a semiconductor, an LCD, or an LED, a variety of reaction gases must be supplied through the gas piping to the inside of the production chamber for manufacturing wafers and display panels. However, as the manufacturing process in the chamber is repeatedly performed, impurities generated in the chamber flow back through the gas piping, or contaminants accumulate inside the gas piping due to impurities contained in the reaction gas, The manufacturing process is adversely influenced and the reliability of the product is lowered.

Korean Patent Application No. 10-2013-0010876 discloses a technique for analyzing residual gas or contaminants in gas piping or chambers. In the case of Korean Patent Application No. 10-2013-0010876, after a process gas exhausted from a process chamber is introduced into a process chamber, Discloses a technique for analyzing residual gas in a plasma processing chamber for analyzing a spectrum through a plasma.

However, since the above-mentioned technology involves analyzing the residual gas by introducing the gas into a separate analyzing apparatus and separately adding a gas outflow pipe, the structure of the analyzing apparatus becomes complicated. In the case of applying to actual process facilities, There is a problem in that it is necessary to separately design.

Further, in order to measure the degree of contamination of the gas pipeline, the contaminated gas must be introduced into a separate analyzing apparatus. In this process, contaminated gas may be leaked.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a method and apparatus for measuring a pollution degree, And to a gas pipeline pollution monitoring apparatus capable of monitoring the leakage of polluted gas.

According to an embodiment of the present invention, a pollution monitoring apparatus includes a tube unit, a light emitting unit, a light receiving unit, and a cover unit. The tube portion covers the gas piping through which the gas passes and includes a transparent material. The light emitting unit is fixed to one side of the tube portion adjacent to the gas pipe to generate light toward the gas pipe. The light receiving unit faces the light emitting unit through the gas piping, and receives the light generated in the light emitting unit and transmitted through the gas piping. The cover unit seals the outside of the tube portion, the light emitting unit, and the light receiving unit to form a vacuum between the tube portion, the light emitting unit and the tube portion.

In one embodiment, the monitoring unit may be connected to the vacuum chamber to monitor leakage of the gas to the vacuum chamber. When the leakage of the vacuum gas from the monitoring unit is monitored, To the outside of the apparatus.

In one embodiment, the outflow unit is connected to the monitoring unit, and the gas leaked through the vacuum can be discharged to the outflow unit through the monitoring unit.

In one embodiment, the cover unit includes a front cover positioned in a direction in which gas is introduced, a rear cover positioned in a direction in which the gas flows out, and a side cover connecting the front cover and the rear cover, The outlet unit may be connected through the rear cover.

In one embodiment, the tube portion covers the gas piping along the circumferential surface of the gas piping in a cylindrical shape, and may include a transparent material.

In one embodiment, the light emitting unit includes a light emitting diode (LED) or a UV light source, and the light receiving unit may include an LED sensor or a UV sensor.

In one embodiment, the intensity of the light sensed in the light receiving unit can be measured to evaluate the contamination degree of the gas passing through the gas piping or the gas piping.

According to the embodiments of the present invention, the pollution degree of the gas passing through the gas pipe or the gas pipe can be measured based on the intensity of the light generated in the light emitting unit and passing through the gas pipe and received by the light receiving unit, So that a simple and accurate measurement can be performed.

In particular, a tube of transparent material is formed to cover the gas pipe, so that the light emitting unit and the light receiving unit can be fixed adjacent to the gas pipe, so that the pollution degree can be easily measured.

Further, the light emitting unit is an LED or a UV light source, and the light receiving unit is an LED sensor or a UV sensor, and can be manufactured at a relatively low manufacturing cost, and can provide a wide range of wavelengths depending on the light wavelength of the LED or UV , It is possible to more accurately and effectively measure the degree of contamination depending on the type of gas piping or gas requiring the pollution degree measurement.

Further, since the tube unit, the light emitting unit, and the light receiving unit are hermetically sealed through the cover unit, leakage of gas leaked through the tube unit can be prevented. Particularly, since the tube portion is formed of a transparent material such as quartz, it is damaged and is vulnerable to leakage of gas, and most of the gas may include toxic substances. Therefore, gas leakage to the outside is prevented through the cover unit, It can be kept safe.

Further, since the monitoring unit is connected to the vacuum between the tube unit and the cover unit, the monitoring unit can immediately monitor the leakage of the toxic gas. In addition, since the discharge unit is connected to the vacuum chamber, when the gas leakage is sensed through the monitoring unit, the leakage gas can be immediately discharged to the external gas treatment unit.

In this case, by connecting the monitoring unit and the outflow unit, the structure of the pollution monitoring device can be relatively simplified, and space utilization can be improved.

In particular, since the vacuum unit is maintained in a vacuum state, when leakage of the gas is sensed, the leakage gas can be immediately discharged to the outside through the outflow unit.

1 is a schematic diagram showing a contamination area and a monitoring area in which a pollution monitoring device according to an embodiment of the present invention is installed.
FIG. 2 is a schematic view showing a state in which the pollution monitoring apparatus of FIG. 1 is installed in a piping section. FIG.
3 is a cross-sectional view of the pollution monitoring device of FIG.
4 is a cross-sectional view of a pollution monitoring apparatus according to another embodiment of the present invention.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms.

The terms are used only for the purpose of distinguishing one component from another. The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the term "comprises" or "comprising ", etc. is intended to specify that there is a stated feature, figure, step, operation, component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram showing a contamination area and a monitoring area in which a pollution monitoring device according to an embodiment of the present invention is installed.

1, in a manufacturing facility 1 for manufacturing a conventional semiconductor wafer, a display panel such as an LCD or an LED, a wafer or a panel is placed in a process chamber 32 of a chamber portion 30 And then supplies the gas 11 for the processor in the chamber 32 from the gas supply unit 10.

In this case, the gas 11 is supplied to the chamber portion 30 from the gas supply portion 10 through the piping portion 20. The piping portion 20 is connected to the gas piping 20 through which the gas 11 passes, (21) and a valve portion (22) for controlling the supply of the gas (11).

Meanwhile, in the case of the gas piping 21, as the process in the chamber 32 progresses due to continuous gas supply or the like, the inside of the gas piping 21 increases in pollution degree, and the gas piping 21 The pollution degree of the passing gas 11 also increases.

The contamination degree of the gas pipe 21 is increased in the monitoring area 26 which is close to the chamber cover part 31 of the chamber part 30, 26 is directly related to the efficiency of the process in the chamber part 30, so evaluation and management thereof are important.

Accordingly, the pollution monitoring apparatus 100 according to the present embodiment is installed in the monitoring area 26 of the piping unit 20 to detect the gas 11 (see FIG. 1) passing through the gas piping 21 or the gas piping 21 ), Which will be described in detail below. Of course, the pollution monitoring apparatus 100 may be installed at various positions of the piping unit 20 as needed.

Particularly, the pollution monitoring apparatus 100 according to the present embodiment may be fixedly installed at an arbitrary position in the piping section 20 to measure the degree of pollution, and the gas piping 21 of the piping section 20 may be provided with a valve So that the degree of contamination can be measured.

Furthermore, the pollution monitoring apparatus 100 according to the present embodiment is not limited to measuring the degree of contamination of the gas 11 by being fixed to the piping unit 20, The gas leaked through the unit 190 flows out to the gas treatment section 195 to detoxify the contaminated gas.

Thus, the production facility 1 can prevent the contaminated gas from leaking to the outside, thereby keeping the working environment safe. Particularly, in the present embodiment, the pollution monitoring apparatus 100 can be detachably attached to the piping unit 20, and as described later, since the pollution monitoring apparatus 100 includes a transparent material, leakage of gas may occur, It is necessary to monitor and process it immediately.

FIG. 2 is a schematic view showing a state in which the pollution monitoring apparatus of FIG. 1 is installed in a piping section. FIG. 3 is a cross-sectional view of the pollution monitoring device of FIG.

2 and 3, the pollution monitoring apparatus 100 according to the present embodiment includes a tube unit 120, a light emitting unit 130, a light receiving unit 140, a cover unit 150, 160, a second connection unit 170, a monitoring unit 180, and an outflow unit 190.

As described above, the pollution monitoring device 100 according to the present embodiment can be installed at any position around the monitoring area 26 of the gas pipe 21, fixedly installed, Or the like.

Accordingly, the first and second connection units 160 and 170 may be omitted when the pollution monitoring apparatus 100 is fixedly installed in the gas piping 21, The first and second connection portions 160 and 170 may be connected to the gas pipe 21 so that the pollution monitoring device 100 may be connected to the gas pipe 21.

That is, the first connection part 160 is connected to the gas pipe 21 in a detachable manner so that the gas 11 introduced through the inlet part 23 passes through the tube part 120, The gas 11 having passed through the tube part 120 is drawn out to the drawing part 24 through the second connecting part 170 connected to the gas pipe 21 in a detachable manner.

In this case, the first and second connection portions 160 and 170 are fixed to the gas pipe 21 so that they can be attached and detached, and various types of connection units can be applied.

The tube unit 120, the light emitting unit 130, the light receiving unit 140 and the cover unit 150 are positioned between the first and second connection units 160 and 170, The pollution degree of the gas 11 passing through the gas pipe 21 or the gas pipe 21 is measured.

In this case, if the pollution monitoring apparatus 100 is fixedly installed on the gas piping 21, the gas piping 21 corresponds to the gas piping formed on the production facility 1. Alternatively, if the pollution monitoring device 100 is detachably attached to the gas piping 21, the gas piping 21 may be a component of the pollution monitoring device 100, And may be installed so as to allow the gas 11 to pass therethrough.

In either case, the pollution monitoring device 100 can measure the degree of pollution of the gas 11 passing through the gas piping 21 and the gas piping 21.

The tube portion 120 is formed outside the gas pipe 21 so as to surround the gas pipe 21.

For example, the tube portion 120 may have a cylindrical shape and may be formed to cover the periphery of the gas pipe 21. Alternatively, the tube portion 120 may be formed in the form of a square column or a polygonal column And may be formed to cover the periphery of the gas piping 21.

When the tube part 120 has a cylindrical shape, it is possible to cover the outside of the gas pipe 21 with a uniform thickness.

The tube portion 120 may include a transparent material such as quartz so that the gas piping 21 can be observed from the outside through the tube portion 120. In particular, The transmittance of light generated in the light emitting unit 130 can be improved.

The light emitting unit 130 includes a first light emitting support part 131, a second light emitting support part 132, and a light emitting sensor 133.

The first light emitting support part 131 is fixed to the cover unit 150 and the second light emitting support part 132 is connected to the first light emitting support part 131 and is fixed to the cover unit 150 . 3, the second light-emitting support part 132 may be a part of the tube part 120, and the second light-emitting part 132 may be a light- And may have a thin plate shape fixed on the outer surface. For this, the outer surface of the tube part 120 on which the second light emitting support part 132 is mounted may be formed in a plane shape.

The light emitting sensor 133 is mounted on the second light emitting support part 132 and is inserted into the tube part 120 and fixed in the inserted state of the tube part 120. In this case, the light emitting sensor 133 is inserted into the tube portion 120 so as to be positioned adjacent to the gas pipe 21. For this purpose, the tube portion 120 is connected to the light emitting sensor 133 A space for positioning is formed.

The light emission sensor 133 generates light toward the gas pipe 21. For example, the light emission sensor 133 may be a light emitting diode (LED), and the light generated thereby may be a blue light B, a red light R, or a green light G, Since light has different wavelengths, light of a suitable wavelength can be generated depending on the type of gas 11 that passes through the gas piping 21 or the gas piping 21.

Alternatively, the light emission sensor 133 may be a UV light source for generating ultraviolet rays (UV), or a light source for generating light of various wavelengths.

Further, the wavelength of the light emitted from the light emission sensor 133 may be varied, for example, in the range of 100 nm to 1,000 nm.

As described above, by applying various kinds of light and wavelengths, it becomes possible to measure the degree of contamination through the optimum light according to the kind of the gas 11. [

The light emitted from the light emitting sensor 133 passes through the tube portion 120 and passes through the gas pipe 11 and the gas pipe 21 to be described later, Unit 140 as shown in FIG.

The light receiving unit 140 is formed symmetrically with respect to the light emitting unit 130 so as to face the gas piping 21. The first light receiving portion 141, the second light receiving portion 142, 143).

In this case, the first light receiving portion 141 is fixed to the cover unit 150, the second light receiving portion 142 is fixed to the first light receiving portion 141, And is fixed to the outer surface. 3, the second light receiving and supporting part 142 may be a part of the tube part 120. The second light receiving part 142 may be a substrate part for driving the light receiving sensor 143. In this case, And may have a thin plate shape fixed on the outer surface. For this, the outer surface of the tube part 120 on which the second light receiving and supporting part 142 is mounted may be formed in a plane shape. Accordingly, the tube part 120 may be formed on both surfaces facing each other And may have a cylindrical shape formed in a plane.

The light receiving sensor 143 is mounted on the second light receiving and supporting portion 142 and is inserted into the tube portion 120 and is inserted and fixed in the tube portion 120. In this case, a space for the light receiving sensor 143 is formed in the tube part 120.

The light receiving sensor 143 is positioned symmetrically with respect to the center of the gas pipe 21 so as to face the light emitting sensor 133. Accordingly, And receives light.

The light receiving sensor 143 is a sensor that receives light generated from the light emitting sensor 133. If the light emitting sensor 133 is an LED, the light receiving sensor 143 may be an LED sensor that receives the LED .

Similarly, if the light emission sensor 133 is a UV light source, the light receiving sensor 143 may be a UV sensor that receives UV light.

The light emitted from the light emission sensor 133 passes through the gas piping 21 and the gas 11 passing through the gas piping 21 and is received by the light receiving sensor 143. Therefore, if the pollution degree of the gas 11 passing through the gas piping 21 or the gas piping 21 is increased, the light passing through the gas piping 21 and the gas 11 will not flow into the pollutant The intensity of the light received by the light receiving sensor 143 is lowered.

Therefore, by measuring the intensity of the light received by the light receiving sensor 143, it is possible to directly predict the contamination degree of the gas piping 21 or the gas 11, and accordingly, And to stop the process process.

The cover unit 150 covers the tube part 120, the light emitting unit 130 and the light receiving unit 140 and includes a front fixing part 151, a front cover 152, a side cover 153, And a rear cover 154.

The front fixing part 151 is fixed to the front part of the tube part 120 to fix the front cover 152 and the tube part 120. The rear cover 154 is fixed to the tube part 120, And the rear surface of the housing is fixed.

The second light-emitting support portion 132 and the second light-receiving support portion 142 may be fixed to the rear cover 154. Although not shown, the first light-emitting support portion 131 and the first light- 141 may be fixed to the front cover 152 through the front fixing part 151. [

The side cover 153 connects between the front cover 152 and the rear cover 154 and covers a side surface of the tube portion 120. When the tube portion 120 has a cylindrical shape, The cover 153 may also be formed in a cylindrical shape.

In this case, the front cover 152 and the side cover 153 may be integrally formed as shown in FIG. 3, or alternatively may be formed as separate units.

As described above, the cover unit 150 covers the outside of the light emitting unit 130 and the light receiving unit 140 including the tube unit 120, and the cover unit 150 and the tube unit 120 are formed.

The cover unit 150 seals the outside of the tube unit 120, the light emitting unit 130 and the light receiving unit 140 to separate the vacuum 121 and the external gas or air .

Therefore, even if the gas leaked through the gap generated by the damage of the gas pipe 21 or the tube part 120 leaks to the vacuum chamber 121, the leaked gas is prevented from further leakage to the outside do.

The monitoring unit 180 is connected to one side of the rear cover 154 and is connected to the vacuum 121 through a first opening pipe 156 passing through the rear cover 154.

The monitoring unit 180 includes a sensor for sensing a leaked toxic gas, though not shown, to sense the toxic gas leaking to the vacuum 121 through the first opening pipe 156.

In this case, the monitoring unit 180 may be connected to the side cover 153 or the front cover 152 to sense toxic gas leaking to the vacuum 121, in addition to that shown in FIG. 3 .

The outlet unit 190 is connected to the other side of the rear cover 154 and is connected to the vacuum 121 through a second opening pipe 157 passing through the rear cover 154.

The outflow unit 190 includes an outflow pipe 191 and a connection unit 192. The outflow pipe 191 is connected to the rear cover 154 and the connection unit 192 is connected to the gas processing unit 195 to the outlet pipe 191.

In this case, since the vacuum 121 is maintained in a vacuum state, when a gas is leaked to the vacuum 121, if a suction pressure is formed through the discharge unit 190, Gas is immediately vented through the outflow unit (190).

The leaking gas is discharged from the gas treatment unit 195 to the outside.

Meanwhile, when the monitoring unit 180 senses that a harmful gas is leaked to the vacuum chamber 121, the leakage unit 190 immediately releases the leaked gas.

4 is a cross-sectional view of a pollution monitoring apparatus according to another embodiment of the present invention.

The pollution monitoring apparatus 200 according to the present embodiment is substantially identical to the pollution monitoring apparatus 100 described with reference to Figs. 1 to 3 except for the cover unit 250, the monitoring unit 280 and the outflow unit 290, The same reference numerals are used and redundant descriptions are omitted.

4, the cover unit 250 in this embodiment includes a front cover 251, a side cover 252, a first rear cover 253, and a second rear cover 254. [

The front cover 251 fixes the tube part 120 at a front part of the tube part 120 and the first and second rear covers 253 and 254 cover the tube part 120 ).

The second light emission support portion 132 and the second light reception support portion 142 are fixed between the first rear cover 253 and the second rear cover 254, The fixing force of the support part 132 and the second light receiving part 142 can be improved.

The side cover 252 connects between the front cover 251 and the first rear cover 253 and covers a side surface of the tube portion 120. When the tube portion 120 has a cylindrical shape The side cover 153 may also have a cylindrical shape.

In this case, the front cover 251 and the side cover 252 may be integrally formed, or may be formed as separate units and coupled.

As described above, the cover unit 250 covers the outside of the light emitting unit 130 and the light receiving unit 140 including the tube unit 120, and the vacuum unit 121 is formed therein Is the same as that described with reference to Fig.

The monitoring unit 280 is connected to one side of the second rear cover 254 and is connected to the first and second rear covers 253 and 254 through an opening pipe 256, 121).

Although not shown, the monitoring unit 280 includes a sensor for sensing a leaked toxic gas and senses a toxic gas leaked to the vacuum 121 through the opening pipe 256. [

Alternatively, the monitoring unit 280 may be connected to the side cover 252 or the front cover 251.

The outflow unit 290 includes an outflow pipe 291 and a connection unit 292 and the outflow pipe 291 is connected to the monitoring unit 280.

That is, in this embodiment, the outflow pipe 291 of the outflow unit 290 is connected to the monitoring unit 280 without being connected to the cover unit 250, thereby reducing the connection of the cover unit 250 Thereby improving space utilization and simplifying the structure design.

Meanwhile, the connection unit 292 connects the outflow pipe 191 extending to the gas treatment unit 195.

In this embodiment, when the toxic gas is leaked to the vacuum chamber 121 through the monitoring unit 280, the leaked gas is immediately discharged to the gas processing unit 195 through the outflow pipe 291 Leaking is the same.

According to the embodiments of the present invention as described above, it is possible to measure the degree of contamination of gas passing through the gas piping or the gas piping, based on the intensity of light generated in the light emitting unit and passing through the gas piping and received by the light receiving unit Therefore, it is possible to measure the pollution degree directly, and simple and accurate measurement becomes possible.

In particular, a tube of transparent material is formed to cover the gas pipe, so that the light emitting unit and the light receiving unit can be fixed adjacent to the gas pipe, so that the pollution degree can be easily measured.

Further, the light emitting unit is an LED or a UV light source, and the light receiving unit is an LED sensor or a UV sensor, and can be manufactured at a relatively low manufacturing cost, and can provide a wide range of wavelengths depending on the light wavelength of the LED or UV , It is possible to more accurately and effectively measure the degree of contamination depending on the type of gas piping or gas requiring the pollution degree measurement.

Further, since the tube unit, the light emitting unit, and the light receiving unit are hermetically sealed through the cover unit, leakage of gas leaked through the tube unit can be prevented. Particularly, since the tube portion is formed of a transparent material such as quartz, it is damaged and is vulnerable to leakage of gas, and most of the gas may include toxic substances. Therefore, gas leakage to the outside is prevented through the cover unit, It can be kept safe.

Further, since the monitoring unit is connected to the vacuum between the tube unit and the cover unit, the monitoring unit can immediately monitor the leakage of the toxic gas. In addition, since the discharge unit is connected to the vacuum chamber, when the gas leakage is sensed through the monitoring unit, the leakage gas can be immediately discharged to the external gas treatment unit.

In this case, by connecting the monitoring unit and the outflow unit, the structure of the pollution monitoring device can be relatively simplified, and space utilization can be improved.

In particular, since the vacuum unit is maintained in a vacuum state, when leakage of the gas is sensed, the leakage gas can be immediately discharged to the outside through the outflow unit.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

The pollution monitoring device according to the present invention has industrial applicability that can be used in equipment for semiconductor or display manufacture.

1: semiconductor manufacturing facility 10: gas supply section
20: piping section 23: inlet piping
24: drawing pipe 30: chamber part
100, 200: Pollution monitoring device
120: tube part 130: light emitting unit
140: light receiving unit 150, 250: cover unit
160: first connection part 170: second connection part
180, 280: monitoring unit 190, 290: output unit

Claims (7)

A tube portion covering the gas piping through which the gas passes and including a transparent material;
A light emitting unit secured to one side of the tube portion adjacent to the gas pipe to generate light toward the gas pipe through a UV light source;
A light receiving unit which faces the light emitting unit through the gas pipe and receives light transmitted through the gas pipe generated in the light emitting unit and measures the intensity of light through the UV sensor;
A cover unit for sealing the outside of the tube portion, the light emitting unit and the light receiving unit to form a vacuum between the tubular portion and the tube portion;
A monitoring unit connected to the vacuum chamber to monitor leakage of the gas through the vacuum chamber; And
And an outlet unit for discharging the leaked gas to the outside when the leakage of the return path gas from the monitoring unit is monitored
The outflow unit is connected to the monitoring unit, and the gas leaked to the vacuum chamber passes through the monitoring unit and is discharged to the outflow unit.
Wherein the cover unit includes a front cover positioned in a direction in which gas flows in, a rear cover positioned in a direction in which gas flows out, and a side cover connecting the front cover and the rear cover, And is connected through a cover. delete delete delete The method according to claim 1,
Wherein the tube portion has a cylindrical shape and covers the gas piping along a circumferential surface of the gas piping, and includes a transparent material. delete The method according to claim 1,
Wherein the intensity of the light sensed by the light receiving unit is measured to evaluate the degree of contamination of gas passing through the gas pipe or the gas pipe.

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