KR101686328B1 - Electrical Resistivity Measuring Apparatus - Google Patents

Electrical Resistivity Measuring Apparatus Download PDF

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Publication number
KR101686328B1
KR101686328B1 KR1020150072885A KR20150072885A KR101686328B1 KR 101686328 B1 KR101686328 B1 KR 101686328B1 KR 1020150072885 A KR1020150072885 A KR 1020150072885A KR 20150072885 A KR20150072885 A KR 20150072885A KR 101686328 B1 KR101686328 B1 KR 101686328B1
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South Korea
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electrical resistivity
temperature
measuring
specimen
chamber
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KR1020150072885A
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Korean (ko)
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KR20160139092A (en
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이동복
박상환
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성균관대학교산학협력단
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Priority to KR1020150072885A priority Critical patent/KR101686328B1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Abstract

The present invention relates to an electrical resistivity measurement apparatus, and an electrical resistivity measurement apparatus according to an embodiment of the present invention includes a chamber; A terminal portion located inside the chamber and electrically connected to a wire attached to the specimen; And a measuring unit for measuring an electrical resistivity of the specimen by an electrical signal received from the terminal unit, wherein the terminal unit includes a housing having an opening for inserting the wire, And a pressing member for pressing the wire inserted through the opening in an inelastic manner to electrically contact the terminal, wherein the electrical resistivity of the sample is measured directly at a high temperature .

Description

[0001] Electrical Resistivity Measuring Apparatus [0002]

The present invention relates to an apparatus for measuring electrical resistivity. More specifically, the present invention relates to a device capable of measuring direct electrical resistivity even at high temperatures.

Materials such as Ni alloys used mainly in power plants are exposed to the environment at 700 ° C, and semiconductors and other components used in the displays are also exposed to the environment at about 200 ° C.

When exposed to such a high temperature environment for a long time or periodically, the physical properties of the material such as electrical resistivity are changed.

Therefore, when manufacturing or using a product exposed to a high temperature environment, information on how the electrical resistivity of the material used in the product changes in a high temperature environment should be known in advance.

Therefore, a company that manufactures materials such as Ni alloys predicts the electrical resistivity at high temperature using a linear approximation after measuring the electrical resistivity of the material manufactured and sold by itself at a low temperature.

However, even if the composition of the materials is the same, the electrical resistivity varies depending on the distribution and type of precipitates due to the damage in the material and the heat treatment conditions. Therefore, the electrical resistivity of the material does not increase or decrease linearly, Big.

Nevertheless, it is difficult to measure the electrical resistivity of the specimen directly at high temperature because the current electrical resistivity measuring device is inevitably damaged due to the measurement terminal contacting with the specimen using the elastic body in a high temperature environment.

Therefore, the inventors of the present invention have developed a new type of electrical resistivity measuring apparatus capable of directly measuring the electrical resistivity of a specimen even at a high temperature.

Korean Patent No. 10-1266909 "Electrical Resistivity Investigation Device and Electrical Resistivity Investigation Method Using It"

It is an object of the present invention to provide an electrical resistivity measuring device capable of directly measuring an electrical resistivity of a specimen at a high temperature.

Another object of the present invention is to provide an apparatus for measuring electrical resistivity which does not cause damage to a measuring terminal even at a high temperature.

It is still another object of the present invention to provide an apparatus for measuring electrical resistivity capable of measuring an electrical resistivity of a sample directly at a high temperature and providing an accurate electrical resistivity value at a high temperature.

It is still another object of the present invention to provide an apparatus for measuring electrical resistivity capable of suppressing oxidation of a specimen by using a vacuum chamber.

It is still another object of the present invention to provide an electrical resistivity measuring apparatus which can minimize a temperature difference between a measurement environment and an actual specimen using a plurality of heaters.

The above and other objects of the present invention can be all attained by an electrical resistivity measuring apparatus according to the present invention.

An apparatus for measuring electrical resistivity according to an embodiment of the present invention includes a chamber; A terminal portion located inside the chamber and electrically connected to a wire attached to the specimen; And a measuring unit for measuring an electrical resistivity of the specimen by an electrical signal received from the terminal unit, wherein the terminal unit includes a housing having an opening for inserting the wire, A terminal electrically connected to the measuring unit, and a pressing member for pressing the wire inserted through the opening in an inelastic manner to electrically contact the terminal.

The chamber may be a vacuum chamber.

The apparatus for measuring electrical resistivity according to an embodiment of the present invention may further include a heater unit for adjusting the temperature inside the chamber; A temperature measuring device for measuring the temperature inside the chamber; And a control unit for controlling the heater unit based on the measured value by the temperature measuring unit to set the temperature inside the chamber to a predetermined temperature.

The control unit receives the measured electrical resistivity value from the measurement unit and outputs it as the electrical resistivity value of the specimen at the set temperature.

The heater unit may include two or more heaters spaced apart from the space in the chamber.

The pressing member may be a screw member, and the housing may have a coupling opening for the screw member to penetrate therethrough, and a male thread corresponding to a female thread of the screw member may be formed in the coupling opening.

The present invention can measure the electrical resistivity of a specimen directly without damaging the measuring terminal even at a high temperature and to suppress the oxidation of the specimen and minimize the temperature difference between the measuring environment and the actual specimen to provide an accurate electrical resistivity value The present invention has the effect of providing an electrical resistivity measuring device capable of measuring the electrical resistivity.

1 is a block diagram of an electrical resistivity measuring apparatus according to an embodiment of the present invention.
2 is a view showing a terminal portion of an electrical resistivity measuring apparatus according to an embodiment of the present invention.

Hereinafter, an electrical resistivity measuring apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

In the following description, only parts necessary for understanding an electrical resistivity measuring apparatus according to an embodiment of the present invention will be described, and descriptions of other parts may be omitted so as not to disturb the gist of the present invention.

In addition, terms and words used in the following description and claims should not be construed to be limited to ordinary or dictionary meanings, but are to be construed in a manner consistent with the technical idea of the present invention As well as the concept.

FIG. 1 shows an electrical resistivity measuring apparatus according to an embodiment of the present invention.

1, the apparatus for measuring electrical resistivity according to the present invention includes a chamber 10, a measuring unit 20, and terminal portions 30: 30-1, 30-2, 30-3, and 30-4. .

The chamber 10 provides a space for measuring the electrical resistivity of the specimen 1. In particular, the electrical resistivity measuring apparatus according to an embodiment of the present invention directly measures the electrical resistivity of a specimen even in a high temperature environment exceeding 700 ° C, so that the chamber 10 is a vacuum chamber so that the specimen is not oxidized in a high temperature environment desirable.

The measuring unit 20 is a device capable of measuring the electrical resistivity of a specimen by measuring a voltage value by providing a current to the specimen in order to measure the electrical resistivity of the specimen. To this end, the wire 2 is connected to the specimen 1 and the wire 2 is spot welded to the specimen 1 because the wire 2 is reliably connected to the specimen 1 even in a high temperature environment spot welding method.

It is possible to connect the four wires 2 to the face or edge of the specimen in order to measure the electrical resistivity and to weld the specimen 1 to the surface of the specimen 1, It is more preferable to connect to the edge because the electrical resistivity can be free from the shape factor of the sample material.

The measuring unit 20 supplies a current I 13 to two neighboring wires (for example, 2-1 and 2-3) for measuring the electrical resistivity of the sample (the current direction of I 13 is 1-> 3 ), and the other two wires (2-2, 2-4), the voltage V 24 is measured in (V 24 = V4-V2), the current I 34 again with the other two wires (2-3, 2-4) And the voltage V 21 is measured at the remaining two wires 2-1 and 2-2, and the electrical resistivity (rho) of the specimen can be calculated as follows.

Figure 112015050122167-pat00001

Where t is the thickness of the specimen and R s is the sheet resistance of the specimen and can be calculated from the following formulas:

Figure 112015050122167-pat00002

The current supplied from the measuring unit 20 can be supplied to the wire 2 connected to the test piece 1 through the terminal unit 30 and the voltage value between the wires can be measured by the measuring unit through the terminal unit 30. [ have.

To this end, the terminal portion 30 has a terminal electrically connected to the measuring portion 20, and the other end of the wire 2 connected to the test piece at one end is electrically connected to the terminal.

2, the terminal unit 30 may include a housing 31, a terminal 32, and a pressing member 33. The housing 31 includes a housing 31, a terminal 32, and a pressing member 33. As shown in FIG.

A terminal 32 electrically connected to the measurement unit 20 is disposed in the housing 31. One end of the wire may be inserted into the housing through an opening formed at one side of the housing as shown in FIG.

The end of the wire 2 thus inserted can be in electrical contact with the terminal 32 by being pressed by the pressing member 33 pressing the end of the wire toward the terminal.

At this time, an elastic body such as a spring, which presses the wire toward the terminal by using an elastic force, should not be used as the pressing member (33). This is because the elastic force of the elastic body is lowered as the internal temperature of the chamber 1 is raised to measure the electrical resistivity at a high temperature, so that the contact between the wire and the terminal is deteriorated and the electrical resistivity of the specimen can be measured This is because it is absent.

Therefore, the electrical resistivity measuring apparatus according to the embodiment of the present invention uses a screw member as the pressing member 33 for pressing in an inelastic manner.

More specifically, as shown in FIG. 2, a coupling opening is formed in the upper portion of the housing 31 so that the screw member can pass therethrough. In the coupling opening, male threads corresponding to female threads of the screw member 33 And the screw member is coupled to the housing upper engagement opening.

Therefore, when the end of the wire 2 is inserted into the housing 31, the inserted wire turns the screw member in one direction (clockwise or counterclockwise) so that the inserted wire can come into contact with the terminal 32 located under the housing And this type of coupling can reliably maintain the contact between the wire 2 and the terminal 32 even during the electrical resistivity measurement at high temperatures.

The apparatus for measuring electrical resistivity according to an embodiment of the present invention may further include a heater unit 40, a temperature meter 50, and a controller 60 as shown in FIG. 1 to create a high-temperature measurement environment have.

The heater unit 40 is installed inside the chamber 10 to adjust the temperature inside the chamber. Since the apparatus for measuring electrical resistivity according to an embodiment of the present invention is an apparatus for directly measuring the electrical resistivity of a specimen even in a high temperature environment, the heater unit 40 is formed of a heater capable of heating the temperature inside the chamber to 700 ° C or more desirable.

It is also desirable to arrange a plurality of heaters (dual heaters) within the chamber to minimize the temperature difference between the measurement environment and the actual specimen and to allow the temperature of the specimen to reach a higher temperature faster in the vacuum chamber.

The temperature measuring device 50 is a device for measuring the temperature inside the chamber 10, and a thermocouple or the like capable of reliably operating at a high temperature can be used as the temperature measuring device. In addition, a plurality of temperature measuring instruments may be installed in the chamber to check an even temperature distribution inside the chamber.

Particularly in the present invention, when the chamber 10 is a vacuum chamber, a temperature difference between the temperature of the specimen and the temperature inside the chamber is severely generated. Therefore, it is preferable that at least one temperature measuring instrument among a plurality of temperature measuring instruments is installed so as to be in contact with the test piece as shown in FIG. 3 so that the temperature of the test piece can be confirmed. It is also preferable that the heater is a dual heater positioned at the upper portion and the lower portion of the specimen 1 as shown in Fig.

The control unit 60 is a device that can control the heater unit 40 and the control unit 20 and can receive temperature information from the temperature measuring unit 50. [

More specifically, the control unit 60 can receive the temperature information of the current chamber and the temperature of the specimen from the temperature measuring unit 50. When the temperature of the specimen does not reach the target temperature A even if the temperature inside the chamber reaches the set temperature A, the control unit controls the temperature of the inside of the chamber The heater section 40 is operated again so that the temperature of the specimen reaches the new set temperature B which causes the temperature of the specimen to reach the target temperature. When the temperature of the specimen reaches the target temperature A through the above operation, the controller operates the measuring unit 20 to measure the electrical resistivity of the specimen, and outputs the measured electrical resistivity as the electrical resistivity of the specimen at the temperature A do. If the control unit stores the information about the temperature B inside the chamber that makes the target temperature A, the control unit inputs the temperature B inside the chamber, which sets the target temperature A, to the set temperature without the above process, The target temperature A can be easily reached.

Hereinafter, a method for measuring electrical resistivity of a sample using the electrical resistivity measuring apparatus according to one embodiment of the present invention will be briefly described.

First, the user who wants to measure the electrical resistivity of the specimen, prepare four wires (Cu, Pt wire, etc.) and attach the wire 2 by spot welding to the edge of the specimen 1 It is also possible to do).

The other end of the wire 2 not welded to the test piece 1 is inserted into the opening formed in the housing 31 of the terminal portion 30 and the pressing member 33 is rotated to connect the inserted wire 2 to the terminal 32 ).

The control unit 60 operates the heater unit 40 until the temperature measuring unit 50 indicates the set temperature. When the temperature measuring unit 50 indicates the set temperature, the controller 60 operates the measuring unit 20 to measure the electrical resistivity And outputs the measured result as the electrical resistivity value at the set temperature.

In order to know the electrical resistivity value of the specimen at each temperature, the controller can output the electrical resistivity value at each temperature while gradually increasing the set temperature.

Also, in order to know the change of electrical resistivity of the specimen when exposed to a high temperature environment, it is possible to operate the measuring unit 20 with time while outputting the change in electrical resistivity in a high temperature environment while keeping the temperature inside the chamber constant.

As described above, the electrical resistivity measuring apparatus according to an embodiment of the present invention can protect the terminal from contamination and external impact by allowing the terminal 33 to be located inside the housing 31. Even when the pressing member is in a high temperature environment, It is possible to directly measure the electrical resistivity without damaging the terminal portion in a high temperature environment.

Therefore, it is possible to directly measure the electrical resistivity at actual high temperature, and thus it is possible to provide an accurate electrical resistivity value as compared with the conventional method of measuring the electrical resistivity at a low temperature and predicting the electrical resistivity in a high temperature environment.

The electrical resistivity measuring apparatus according to an embodiment of the present invention has been described with reference to specific embodiments. It is to be understood, however, that the invention is not limited to those precise embodiments, and that various changes and modifications may be made therein without departing from the spirit and scope of the invention as claimed.

1: Specimen 2: Wire
10: chamber 20: measuring part
30, 30-1, 30-2, 30-3, 30-4:
31: housing 32: terminal
33: screw member 40: heater part
50: Temperature meter 60:

Claims (8)

An electrical resistivity measuring apparatus for directly measuring an electrical resistivity of a specimen in a high temperature environment of 700 DEG C or higher,
A vacuum chamber;
A terminal portion located inside the vacuum chamber and having one side electrically connected to the other side of the wire attached to the edge of the test piece by spot welding; And
A measuring unit that provides an electrical signal to the terminal unit and measures electrical resistivity of the sample with an electrical signal received from the terminal unit;
, ≪ / RTI >
Wherein the terminal portion includes a housing having an opening for inserting the other side of the wire, a terminal located inside the housing and electrically connected to the measuring portion, and a terminal of the wire inserted through the opening by an inelastic method, And a pressing member which is in electrical contact with the substrate.
delete The method according to claim 1,
A heater for adjusting the temperature inside the chamber;
A temperature measuring device for measuring the temperature inside the chamber; And
A control unit for controlling the heater unit based on the measured value by the temperature measuring unit to set the temperature inside the chamber to a predetermined temperature;
Wherein the electrical resistivity measuring device further comprises:
The method of claim 3,
Wherein the control unit receives the measured electrical resistivity value from the measurement unit and outputs the electrical resistivity value as the electrical resistivity value of the specimen at the set temperature.
The method of claim 3,
Wherein the heater portion includes two or more heaters spaced apart from the space in the chamber.
The method of claim 3,
Wherein at least one of the plurality of temperature measuring devices is in contact with the specimen to measure the temperature of the specimen.
7. The method according to any one of claims 1 to 6,
Wherein the pressing member is a screw member.
8. The method of claim 7,
Wherein the housing is provided with a coupling opening for the screw member to penetrate therethrough and a male thread corresponding to the female thread of the screw member is formed in the coupling opening.





KR1020150072885A 2015-05-26 2015-05-26 Electrical Resistivity Measuring Apparatus KR101686328B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011171506A (en) * 2010-02-18 2011-09-01 Oki Semiconductor Co Ltd Evaluation system for semiconductor integrated device, and semiconductor chip for evaluation
KR101229719B1 (en) * 2011-06-27 2013-02-04 주식회사 현대케피코 Cable Connecting Apparatus For Testing Transmission

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120074867A (en) * 2010-12-28 2012-07-06 삼성전기주식회사 Physical properties mesurements apparatus of conductive film
KR101456587B1 (en) * 2012-11-15 2014-10-31 한국표준과학연구원 The Measuring Equipment Of Material Property Inhyperbaric Environment By Electrical Resistivity
KR101266909B1 (en) 2012-11-20 2013-05-27 한국지질자원연구원 Device for electrical resistivity survey and method of electrical resistivity survey in using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011171506A (en) * 2010-02-18 2011-09-01 Oki Semiconductor Co Ltd Evaluation system for semiconductor integrated device, and semiconductor chip for evaluation
KR101229719B1 (en) * 2011-06-27 2013-02-04 주식회사 현대케피코 Cable Connecting Apparatus For Testing Transmission

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