KR101683419B1 - Ball air trap - Google Patents

Abstract

The present invention relates to a ball air trap which includes: a barrel-shaped body through which a fluid flows; a pair of flanges which are arranged on both sides of the body and include combination holes to which the body is inserted and combined; a sleeve which is arranged on the upper side of the body to combine the body and the flange; and an opening and closing ball which is received inside the body and opens or closes one side of the body to which the fluid is inputted. According to the present invention, the ball air trap is conveniently and easily used by not including an additional opening and closing lever which is manually operated, by the opening and closing ball which opens or closes one side of the body into which the fluid is inputted by atmospheric pressure.

Description

BALL AIR TRAP

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air trap, and more particularly, to a ball type air trap.

In semiconductor manufacturing process, the equipment for semiconductor processing is required to continuously supply many kinds of gas and water on the first phase, and various kinds of waste gas, wastewater and condensed water generated in this process are processed through piping and duct And transport it to the facility.

In the case of ducts during the pressurization and transportation processes, the ducts are affected by temperature and humidity changes due to the production process, waste gas and human body through various equipment in the clean room. As a result, the temperature and humidity Condensation water is generated by the condensation phenomenon caused by the condensation.

A variety of impurity particles are mixed and discharged in the waste gas generated from each equipment of the manufacturing process. These impurities are combined with the condensed water in the exhaust-only duct, and are adhered to the inside of the duct by sticking or stagnation. Causing harmful exhaust gas and condensate discharge, and may lead to corrosion, peeling, and leakage.

In order to prevent such a phenomenon, the constant exhaust pressure must be maintained constantly, and the condensed water must be quickly discharged at all times to keep the environment inside the duct clean.

For this kind of environment, there is a device to discharge the condensate while keeping the pressure inside the duct by installing a trap by the agreement section of the exhaust duct. Recently, the function of discharging the digestion water quickly when discharging or discharging the sprinkler water in case of fire It is required to have improved performance by using a ball with light weight, corrosion resistance and heat resistance and negative pressure inside the duct.

Korean Registered Patent No. 10-0604403 (2006.07.18), "Ball Check Valve" Korean Unexamined Patent Publication No. 10-2008-0088077 (Oct. 2, 2008), "Confirmation structure of ball type check valve"

SUMMARY OF THE INVENTION An object of the present invention is to provide a ball air trap capable of quickly and smoothly discharging a fluid by preventing loss of exhaust pressure by using air pressure and a ball.

According to one aspect of the present invention, there is provided a ball air trap comprising: a tubular body through which a fluid passes; A pair of flanges disposed on both sides of the body and having coupling holes into which the bodies are inserted; A sleeve disposed above the body for coupling the body and the flange; And an opening / closing ball accommodated in the body and opening / closing one side of the body into which the fluid flows.

Here, the body may include a cylindrical inflow portion in which the opening / closing ball is disposed and fluid flows therein; And a tubular drainage portion disposed at a lower portion of the inflow portion and smaller than a diameter of the inflow portion.

The inflow portion and the drainage portion are arranged so that their centers are aligned with each other, and the outer circumferential surface is tapered.

Further, the cross-section of the coupling hole is formed so as to correspond to the cross-section of the drainage section.

The sleeve may include: a tubular body coupled with the flange; And a wing portion protruding outward along the outer circumferential surface of the lower surface of the body so as to correspond to the end surface of the inflow portion.

The end surface of the body corresponds to the end surface of the engagement hole.

According to another aspect of the present invention, there is provided a ball air trap comprising: a tubular body through which a fluid passes; A pair of flanges disposed on both sides of the body and having coupling holes into which the bodies are inserted; And an opening / closing ball accommodated in the body and opening / closing one side of the body into which the fluid flows.

Wherein the body includes: a tubular inlet coupled to the flange and having a fluid inlet; A passing part provided in the shape of a cylinder in which the opening and closing ball is disposed therein, the inlet part being disposed at one side thereof and being larger than the diameter of the inlet part; And a tubular drainage portion disposed on the other side of the passage portion and coupled with the flange, the drainage portion having a diameter smaller than the diameter of the passage portion.

The inflow portion and the passing portion are arranged so that their centers are coincident with each other.

Further, an end surface of the inflow portion and an end surface of the drain portion correspond to the end surface of the engagement hole.

The drainage portion and the passing portion do not coincide with each other, and one side of the outer peripheral surface of the drainage portion and one side of the outer peripheral surface of the passing portion are arranged on the same plane.

Further, a side surface of the outer circumferential surface of the drain portion facing the one side and a side surface of the outer circumferential surface of the passing portion facing the one side are tapered.

In addition, the basket may further include a basket-shaped basket which is disposed inside the body, accommodates the opening and closing ball therein, and has a plurality of drain holes formed on an outer surface thereof.

According to the ball air trap according to the embodiment of the present invention,

First, since it is not necessary to provide a separate opening / closing lever manually operated by the opening / closing ball for opening / closing one side of the body into which fluid is introduced due to atmospheric pressure, it is convenient and easy.

Second, since the diameter of the drainage part of the body is smaller than the diameter of the inlet part, the fluid can be passed quickly because of the venturi effect.

Third, the center of the inflow portion and the drain portion are equally disposed, and the fluid can flow in the shortest distance vertically.

Fourth, since the outer peripheral surface of the inflow portion and the outer peripheral surface of the discharge portion are tapered, the venturi effect can be maximized.

Fifth, since the diameter of the drainage part of the body is smaller than the diameter of the passage part, the venturi effect can be obtained and the fluid can be passed quickly.

Sixthly, since one side of the outer circumferential surface of the drainage portion and one side of the outer circumferential surface of the passing portion are disposed on the same plane, no fluid remains in the passage portion when passing through the fluid, and the fluid can be efficiently passed.

Seventh, since the other side of the outer peripheral surface of the drainage portion and the other side of the outer peripheral surface of the passing portion are tapered, the venturi effect can be maximized.

Eighth, since the opening and closing ball is disposed inside the basket and the movement distance is limited, one side of the body into which the fluid flows can be quickly opened and closed.

Ninth, it is possible to withstand the instantaneous change of pressure by the opening and closing ball which is resistant to corrosion resistance, heat resistance and durability without deformation, thereby preventing pressure loss.

In the tenth, the opening / closing ball is provided in a spherical shape to minimize the frictional resistance generated in the flow of the fluid, so that the fluid can be quickly and smoothly discharged.

1 is a perspective view of a ball air trap according to an embodiment of the present invention.
2 is an exploded perspective view of the ball air trap shown in Fig.
3 is a partially cutaway perspective view of the ball air trap shown in Fig.
Figure 4 is a perspective view of the body shown in Figure 1;
5 is a cross-sectional view of the body shown in Fig.
Figure 6 is a perspective view of the sleeve shown in Figure 1;
7 is a perspective view of the basket shown in Fig.
8 is an operational sectional view of the ball air trap shown in Fig.
Fig. 9 is an operational sectional view of the ball air trap shown in Fig. 1. Fig.
10 is a perspective view of a ball air trap according to another embodiment of the present invention.
11 is an exploded perspective view of the ball air trap shown in Fig.
12 is a partially cutaway perspective view of the ball air trap shown in Fig.
13 is a perspective view of the body shown in Fig.
14 is a sectional view of the body shown in Fig.
15 is an operational sectional view of the ball air trap shown in Fig.
16 is an operational sectional view of the ball air trap shown in Fig.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Note that, in the drawings, the same components are denoted by the same reference symbols as possible. Further, the detailed description of known functions and configurations that may obscure the gist of the present invention will be omitted. For the same reason, some of the components in the drawings are exaggerated, omitted, or schematically illustrated.

FIG. 1 is a perspective view of a ball air trap according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of the ball air trap shown in FIG. 1, FIG. 3 is a partially cutaway perspective view of the ball air trap shown in FIG. 1, Fig. 4 is a perspective view of the body shown in Fig. 1, Fig. 5 is a sectional view of the body shown in Fig. 4, Fig. 6 is a perspective view of the sleeve shown in Fig. to be.

1 to 7, a ball air trap 100 according to an embodiment of the present invention installed vertically in a semiconductor manufacturing process apparatus includes a body 110, a flange 120, a sleeve 130, And a ball 140.

The body 110 is provided in a cylindrical shape through which the fluid passes, and includes an inlet portion 111 and a drain portion 112.

The inlet portion 111 is provided in a cylindrical shape as an upper portion of the body 110 into which the fluid flows, and the basket 140 is disposed therein.

The drainage part 112 is provided in the shape of a cylinder and disposed at a lower part of the inlet part 111 and is smaller than the diameter of the inlet part 111 and drains the fluid flowing into the inlet part 111.

The center C of the inflow portion 111 and the center C 'of the drain portion 112 are arranged to coincide with each other.

Further, the outer circumferential surfaces of the inflow portion 111 and the drain portion 112 may be tapered.

Since the diameter of the drainage part 112 is smaller than the diameter of the inlet part 111, a venturi effect is generated inside the body 110, so that the fluid can be passed quickly.

Since the center C of the inflow section 111 and the center C 'of the drain section 112 are arranged to coincide with each other, the fluid can quickly pass on a straight line of the shortest distance.

Further, since the outer peripheral surfaces of the inflow portion 111 and the discharge portion 112 are tapered, the venturi effect can be maximized.

The flanges 120 are provided on both sides of the body 110 and are formed with coupling holes 121 through which the body 110 is inserted.

The end surface of the coupling hole 121 is formed to correspond to the end surface of the drainage portion 112 of the body 110.

The sleeve 130 is disposed above the body 120 to engage the body 110 and the flange 120.

The sleeve 130 includes a body 131 and a wing 132.

The body 131 is formed in a tubular shape and is engaged with the flange 120 and the end surface of the body 131 is provided to correspond to the end surface of the coupling hole 121 of the flange 120.

 The wing portion 132 protrudes outward along the outer peripheral surface of the lower surface of the body 131 so as to correspond to the end surface of the inlet portion 111 of the body 110.

The cross section of the coupling hole 121 of the flange 120 is formed so as to correspond to the cross section of the drainage section 122 of the body 120 so that the inlet section 121 and the flange 120 can not be directly coupled.

Therefore, the sleeve 130 can be disposed on the upper surface of the inflow portion 111 to indirectly couple the inflow portion 111 and the flange 120.

The opening and closing ball 140 is accommodated in the body 110 and opens and closes the inlet portion 111 of the body 110 into which the fluid flows.

Furthermore, the opening and closing ball 140 may have a spherical shape and may be made of a material having a high corrosion resistance, heat resistance, durability, and a density lower than that of water.

Thus, the opening and closing ball 140 is made of a material having high corrosion resistance, heat resistance, and durability, and can withstand a change in instantaneous pressure without deformation, thereby preventing pressure loss.

In addition, the opening / closing ball 140 is provided in a spherical shape to minimize the frictional resistance generated in the flow of the fluid, so that the fluid can be quickly and smoothly discharged.

In addition, the ball air trap 100 may further include a basket 150 disposed within the body 110.

The basket 150 is formed in a basket shape and has a plurality of drain holes 151 formed on the outer surface thereof. The basket 150 is disposed inside the body 110 and accommodates the open / close ball 140 therein.

Since the opening and closing ball 140 is disposed inside the basket 150, the moving distance of the opening and closing ball 140 is limited, and the inlet 111 of the body 110 into which the fluid flows can be quickly opened and closed.

8 and 9 are operational cross-sectional views of the ball air trap shown in FIG. 1. Referring to FIGS. 8 and 9, the operation of the ball air trap 100 according to the embodiment of the present invention will be described.

The ball air trap 100 is a condensate discharge trap used in a semiconductor manufacturing process apparatus and is used for discharging fluids such as condensed water and extinguishing water in the exhaust duct through which waste gas used in a semiconductor manufacturing process is discharged.

The ball air trap 100 may be formed of a transparent material so as to be visually recognized and managed by operating the inside of the ball trap 100 and a pipe such as a pipe through which the fluid can move.

Figures 8 and 9 show the operation of the ball air trap 100 without the basket 150 and Figures 8 and 9 show the operation of the ball air trap 100 with the basket 150, (100).

8 and 9 (a), when the ball air trap 100 does not discharge the fluid, the ball air trap 100 is lifted by the negative pressure inside the exhaust duct, 110). ≪ / RTI >

When a fluid such as condensed water is generated in the exhaust duct, the negative pressure inside the exhaust duct lowers and the inflow portion 111, which is closed by the opening and closing ball 140 is blocked as shown in FIGS. 8 and 9 (b) Will be opened.

8 (b) shows a ball air trap 100 without a basket 150. In this case, when the opening and closing ball 140 descends and a fluid flows into the inlet portion 111, the opening and closing ball 140 Is made of a material having a density lower than that of water, the floating ball 140 floats on the fluid due to buoyancy, so that the opening and closing ball 140 does not block the drainage part 112 and the fluid can be discharged.

When the fluid in the exhaust duct is discharged, the opening and closing ball 140 again blocks the inlet 111 by the negative pressure of the exhaust duct.

 9 (b) shows a ball air trap 100 having a basket 150. In this case, the opening and closing ball 140 descends to allow the fluid to flow into the inflow part 111, So that the fluid flows to the drain hole 151.

Similarly, when the fluid of the exhaust duct is discharged, the opening and closing ball 140 again blocks the inlet 111 by the negative pressure of the exhaust duct.

As a result, in the absence of condensed water in the exhaust duct, the ball air trap 100 is closed by the negative pressure to close the inflow part 111, and when the condensed water is formed in the exhaust duct, The ball 140 descends to open the inflow section 111.

When the fluid is discharged into the exhaust duct and the inside of the exhaust duct returns to a normal negative pressure, the opening / closing ball 140 rises and blocks the inlet 111 again.

FIG. 10 is a perspective view of a ball air trap according to another embodiment of the present invention, FIG. 11 is an exploded perspective view of the ball air trap shown in FIG. 10, and FIG. 12 is a partial cutaway perspective view of the ball air trap shown in FIG. 13 is a perspective view of the body shown in Fig. 10, and Fig. 14 is a sectional view of the body shown in Fig.

10 to 13, a ball air trap 200 according to another embodiment of the present invention installed horizontally in a semiconductor manufacturing process apparatus includes a body 210, a flange 220, and an opening / closing ball 230, .

The body 210 includes an inlet 211, a pass 212, and a drain 213.

The inlet 211 is provided in the form of a cylinder as an upper portion of the body 210 into which the fluid flows, and is engaged with the flange 220.

The passing portion 212 is formed in a cylindrical shape larger than the diameter of the inlet 211, and the inlet 211 is disposed at one side thereof and accommodates the opening and closing ball 230 therein.

The drainage portion 213 is formed in a cylindrical shape so as to be smaller than the diameter of the passage portion 212 and is disposed on the other side of the passage portion 212 and coupled to the flange 220.

The end face of the inlet 211 and the end face of the drain 213 correspond to the end face of the coupling hole 221 of the flange 220.

The center C of the inlet 211 and the center C 'of the passage 212 are arranged to coincide with each other.

The center portion C 'of the passing portion 212 does not coincide with the center C' of the drain portion 213 and one side of the outer peripheral surface of the drainage portion 213 and the outer peripheral surface of the passing portion 212 are coplanar .

Further, a side face of the outer peripheral face of the drain portion 213 and a side face of one side of the outer peripheral face of the drain portion 213 may be tapered (T).

Since the diameter of the drain portion 213 is smaller than the diameter of the passing portion 212, the venturi effect can be obtained inside the body 210, and the fluid can be passed quickly.

The structure in which one side of the outer circumferential surface of the drain portion 213 and one side of the outer circumferential surface of the passing portion 212 are disposed on the same plane makes no fluid remain in the fluid passing portion 212, .

Further, since the outer peripheral surface of the massive portion 212 and the outer peripheral surface of the drainage portion 213 are tapered (T), the venturi effect can be maximized.

The flanges 220 are provided on both sides of the body 210 and are formed with a coupling hole 221 through which the body 210 is inserted.

The end face of the coupling hole 221 is formed to correspond to the end face of the inlet portion 211 of the body 210 and the end face of the drain portion 212.

The opening and closing ball 230 is accommodated in the passing portion 212 of the body 210 and opens and closes the inlet 211 of the body 210 into which the fluid flows.

Here, the opening and closing ball 230 is provided in a spherical shape and may be made of a material having strong corrosion resistance, heat resistance, durability and lower density than water.

Thus, the opening and closing ball 230 is made of a material having high corrosion resistance, heat resistance and durability so that it can withstand a change of instantaneous pressure without deformation, thereby preventing pressure loss.

The opening and closing ball 230 is provided in a spherical shape to minimize the frictional resistance generated in the flow of the fluid, so that the fluid can be quickly and smoothly discharged.

In addition, the ball air trap 200 may further include a basket 240 disposed within the body 210.

The basket 240 is formed in a basket shape and has a plurality of drain holes 241 formed on the outer surface thereof. The basket 240 is disposed inside the body 210 and accommodates the opening and closing balls 230 therein.

Since the opening and closing ball 230 is disposed inside the basket 240, the moving distance of the opening and closing ball 230 is limited, and the inlet 211 of the body 210 into which the fluid flows can be quickly opened and closed.

15 and 16 are operational sectional views of the ball air trap shown in FIG. 10, and the operation of the ball air trap 200 according to the embodiment of the present invention will be described with reference to FIGS. 15 and 16. FIG.

The ball air trap 200 is a condensate discharge trap used in a semiconductor manufacturing process apparatus, and is used to discharge fluids such as condensed water and extinguishing water in an exhaust duct through which exhaust gas used in a semiconductor manufacturing process is discharged.

The ball air trap 200 may be formed of a transparent material so that the ball air trap 200 can be coupled with a pipe such as a pipe through which fluids can move,

15 and 16 (a) show the operation of the ball air trap 200 without the basket 240, and Figs. 15 and 16 (b) show the operation of the ball air trap 200 having the basket 240, (100).

First, when the fluid is not discharged, the ball air trap 200 moves the opening / closing ball 230 to the right due to the negative pressure inside the exhaust duct as shown in FIGS. 15 and 16 (a) Blocking the inlet 211 of the body 210.

When a fluid such as condensed water is generated in the exhaust duct, the negative pressure inside the exhaust duct lowers and the opening / closing ball 230 moves to the left as shown in FIGS. 15 and 16 (b) ) Is opened.

15 (b) shows a ball air trap 200 without a basket 230. In this case, if the opening and closing ball 230 moves to the left and fluid flows into the inlet 211, Since the opening 230 is formed of a material having a density lower than that of water, the opening 230 floats on the fluid due to buoyancy, and the fluid can be discharged because the opening and closing ball 230 does not block the drainage part 213.

When the fluid inside the exhaust duct is discharged, the opening and closing ball 230 again blocks the inlet 111 by the negative pressure of the exhaust duct.

16B shows a ball air trap 200 having a basket 240. In this case, the opening and closing ball 230 moves to the left so that the fluid flows into the inflow portion 211, The fluid flows into the formed drain hole 241.

Similarly, when the fluid of the exhaust duct is discharged, the opening and closing ball 140 again blocks the inlet 111 by the negative pressure of the exhaust duct.

As a result, in the state where there is no condensed water in the exhaust duct, the ball air trap 200 moves the opening and closing ball 230 to the right by the negative pressure to close the inlet 211, and when the condensed water is formed in the exhaust duct, The opening / closing ball 230 moves to the left to open the inlet 211.

When the fluid is discharged into the exhaust duct and the inside of the exhaust duct returns to a normal negative pressure, the opening and closing ball 230 moves to the right to close the inlet 211 again.

It should be noted that the embodiments of the present invention disclosed in the present specification and drawings are only illustrative of the present invention in order to facilitate the understanding of the present invention and are not intended to limit the scope of the present invention. It will be apparent to those skilled in the art that other modifications based on the technical idea of the present invention are possible in addition to the embodiments disclosed herein.

110, 210 ... body 120, 220 ... flange
130 ... Sleeve 140, 230 ... Basket
150, 240 ... opening and closing ball

Claims (14)

A tubular body through which the fluid passes;
A pair of flanges disposed on both sides of the body and having coupling holes into which the bodies are inserted;
A sleeve disposed above the body for coupling the body and the flange; And
And an opening / closing ball disposed inside the body and opening / closing one side of the body into which the fluid flows,
The body
A cylindrical inflow portion in which the opening / closing ball is disposed and fluid is introduced; And
And a tubular drainage portion disposed at a lower portion of the inflow portion and smaller than a diameter of the inflow portion,
The inflow section and the drainage section may include:
Are arranged so that their centers are coincident with each other,
The outer peripheral surface of which is tapered,
Wherein a cross-section of the engaging hole is formed to correspond to an end face of the drain portion,
The sleeve
A tubular body engaged with the flange; And
And a wing portion protruding outward along an outer circumferential surface of the lower surface of the body so as to correspond to an end surface of the inflow portion,
Wherein an end surface of the body corresponds to an end surface of the engagement hole,
Further comprising a basket-shaped basket which is disposed inside the body and accommodates the opening and closing ball therein, and has a plurality of drain holes formed on the outer surface thereof. delete delete delete delete delete delete A tubular body through which the fluid passes;
A pair of flanges disposed on both sides of the body and having coupling holes into which the bodies are inserted; And
And an opening / closing ball disposed inside the body and opening / closing one side of the body into which the fluid flows,
The body
A tubular inlet coupled to the flange and into which fluid flows;
A passing part provided in the shape of a cylinder in which the opening and closing ball is disposed therein, the inlet part being disposed at one side thereof and being larger than the diameter of the inlet part; And
And a tubular drainage portion disposed on the other side of the passage portion and coupled with the flange, the drainage portion having a diameter smaller than the diameter of the passage portion,
Wherein the inflow section
Are arranged so that their centers are coincident with each other,
The end face of the inflow portion and the end face of the drain portion are provided so as to correspond to the end face of the engagement hole,
The drainage portion and the passing portion do not coincide with each other, and one side of the outer peripheral surface of the drainage portion and one side of the outer peripheral surface of the passing portion are arranged on the same plane,
A side surface of the outer circumferential surface of the drainage portion facing the one side and a side of the outer circumferential surface of the passing portion facing the one side are tapered,
Further comprising a basket-shaped basket which is disposed inside the body and accommodates the opening and closing ball therein, and has a plurality of drain holes formed on the outer surface thereof.
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