KR101680828B1 - An analysis device of fluorescent x-ray - Google Patents

An analysis device of fluorescent x-ray Download PDF

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Publication number
KR101680828B1
KR101680828B1 KR1020150099101A KR20150099101A KR101680828B1 KR 101680828 B1 KR101680828 B1 KR 101680828B1 KR 1020150099101 A KR1020150099101 A KR 1020150099101A KR 20150099101 A KR20150099101 A KR 20150099101A KR 101680828 B1 KR101680828 B1 KR 101680828B1
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South Korea
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ray
disposed
unit
sample
cap
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KR1020150099101A
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Korean (ko)
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안길훈
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한국원자력 통제기술원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/501—Detectors array

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

An embodiment of the present invention relates to a fluorescent analysis device of X-ray, which comprises: a head unit including an X-ray irradiator; a sample unit arranged on the lower unit of the head unit; a detection unit arranged on the lower unit of the same unit; and a beam stopper arranged on an extended line of the central axis of the X-ray irradiator. The detection unit comprises: a cap for collecting the X-ray; and an optical receiver inserted into the cap.

Description

AN ANALYSIS DEVICE OF FLUORESCENT X-RAY

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray fluorescence analyzer, and more particularly, to an X-ray fluorescence analyzer including a cap for detecting noise and a beam stopper for disposing a detector at an angle to improve efficiency of light collection.

An X-ray fluorescence analyzer refers to a device that irradiates a sample with an X-ray and thereby measures and analyzes the X-rays generated from the sample. X-ray fluorescence spectrometers are used in non-destructive testing to check quality or condition of products.

In addition, X-ray fluorescence spectrometry is used to confirm the exposure of radiation. For example, an X-ray fluorescence analysis apparatus can be used to irradiate an X-ray to a sample exposed to radiation, thereby measuring an X-ray generated in the sample. In this case, the measured x-rays can be converted into data to confirm the type and amount of radiation.

In recent years, X-ray fluorescence spectrometry has been used as a main device for analyzing components in a variety of fields such as environment, new material development, and semiconductor fixation. These X-ray fluorescence analyzers require accurate measurements.

That is, it is important that the X-ray fluorescence analysis apparatus irradiate the X-ray to the sample and improve the accuracy by removing the noise in the process of measuring the X-ray generated from the sample again.

An embodiment of the present invention is to provide an X-ray fluorescence analysis apparatus capable of improving the efficiency of light collection and removing noise.

An X-ray fluorescence analysis apparatus according to an embodiment of the present invention includes a housing, a head part including a cylindrical X-ray irradiator disposed inside the housing and irradiating an X-ray, a sample part disposed below the head part, And a detection unit for detecting an X-ray, wherein the detection unit includes a cap and a cylindrical light receiver, wherein the cap includes a guide unit having a through-hole through which the X-ray enters, And a body portion, wherein one end of the light receiver is inserted into the body portion.

The detector may be arranged such that an extension line of the center axis of the light receiver and an extension line of the central axis of the X-ray irradiator form an angle of 55 °.

The apparatus further includes a beam stopper disposed at a lower portion of the sample portion and disposed on an extension of a central axis of the X-ray irradiator.

The beam stopper may include a bottom portion facing the X-ray irradiator, a sidewall portion bent upward from an edge of the bottom portion, and a ceiling portion positioned at an upper end of the sidewall portion and substantially parallel to the bottom portion, And the ceiling portion has an opening through which the X-ray is incident.

Further, the opening is smaller than the bottom.

The guide portion may have an inner diameter that increases as the distance from the through hole increases, and increases at an angle of 45 degrees with respect to the center axis of the light receiver.

The diameter of the through hole is 3 mm or more and 4 mm or less.

In addition, a sealing member is further provided between the light receiver and the cap.

According to an embodiment of the present invention, a cap may be disposed at one end of a photodetector constituting a detection unit to collect x-rays generated from a specimen and prevent scattered x-rays from being incident on other components such as a housing.

Further, the beam stopper disposed at the lower portion of the sample portion is disposed on the extension line of the central axis of the X-ray irradiator. The beam stopper has a bottom portion facing the X-ray irradiator and an opening through which the X-ray is incident on the top of the bottom portion. Here, the size of the opening is smaller than the size of the bottom portion. Therefore, it is possible to prevent the X-ray incident on the opening portion from being absorbed or scattered inside the beam stopper, but being leaked to the outside. Thereby, noise can be removed.

On the other hand, the detection unit is disposed so that the extension line of the center axis of the X-ray irradiator and the extension line of the center axis of the light receiver form an angle of 55 °. This has the effect of collecting the largest number of x-rays in the radial direction (4π direction).

1 is a perspective view showing an X-ray fluorescence analysis apparatus according to an embodiment of the present invention.
FIG. 2 is a view showing the interior of the X-ray fluorescence analysis apparatus shown in FIG. 1. FIG.
FIG. 3A is a view showing an embodiment of a door unit according to the present invention.
Fig. 3B is a view showing a state in which the door of Fig. 3A is opened.
FIG. 4 is a view showing the sample portion of FIG. 2. FIG.
FIG. 5 is a diagram showing the detection unit of FIG. 2. FIG.
6 is a cross-sectional view of the cap of Fig.
FIG. 7 is a view showing the beam stopper of FIG. 2. FIG.
8 is a graph for explaining the detection ability according to the arrangement of the detection unit shown in Fig.

Hereinafter, the present invention will be described in detail with reference to embodiments. However, the scope of the present invention is not limited by the drawings or embodiments described below. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings are merely exemplary and illustrative of various embodiments of the invention.

In order to facilitate the understanding of the invention, each component and its shape or the like in the drawing may be briefly drawn or exaggerated, and components in an actual product may be omitted without being represented. Accordingly, the drawings are to be construed as illustrative of the invention. In the drawings, the same elements are denoted by the same reference numerals.

Throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "electrically connected" with another part in between . Also, when an element is referred to as "comprising ", it means that it can include other elements as well, without departing from the other elements unless specifically stated otherwise.

The terms first, second, third, etc. in this specification may be used to describe various components, but such components are not limited by these terms. The terms are used for the purpose of distinguishing one element from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second or third component, and similarly, the second or third component may be alternately named.

It is also to be understood that where a layer or element is referred to as being "on the surface" of another layer or element, it is to be understood that not only is the layer or element disposed in direct contact with the other layer or element, To the case where the third layer is disposed interposed between the first and second layers.

Hereinafter, an X-ray fluorescence analysis apparatus 10 according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing an X-ray fluorescence analysis apparatus 10 according to an embodiment of the present invention, FIG. 2 is a diagram showing the inside of the X-ray fluorescence analysis apparatus 10 shown in FIG. 1, FIG. 3B illustrates an embodiment of the door unit 110 according to the present invention, and FIG. 3B illustrates a state in which the door unit 110 of FIG. 3A is opened.

1, 2, 3A and 3B, an embodiment of the X-ray fluorescence analysis apparatus 10 according to the present invention includes a housing 100, a door unit 110, a head unit 200, a sample unit 300, A detection unit 400, and a beam stopper 500.

In addition, an embodiment of the X-ray fluorescence analysis apparatus 10 according to the present invention may further include a control unit 700 and a power supply unit 600.

The housing 100 forms the outer shape of the X-ray fluorescence analysis apparatus 10 according to the present invention. An opening is formed at one side of the housing 100. The opening portion is shielded or opened by the door portion 110.

The door unit 110 includes a window 111, a first bracket 112, a second bracket 113, a third bracket 114, a proximity switch 115, a first link 116, a second link 117 ).

At least a part of the window 111 is made of a transparent material such as glass. Therefore, the inside of the housing 100 can be observed through the window 111. [

The first bracket 112 and the second bracket 113 are disposed on the inner surface of the window 111 facing the inside of the housing 100. Here, the first bracket 112 and the second bracket 113 are spaced apart from each other. On the other hand, the third bracket 114 is disposed inside the housing 100.

The first link 116 connects the first bracket 112 and the third bracket 114 and the second link 117 connects the second bracket 113 and the third bracket 114. [ Specifically, one end of the first link 116 is connected to the first bracket 112 by a hinge, and the other end is connected to the third bracket 114 by a hinge. One end of the second link 117 is connected to the second bracket 113 by a hinge and the other end is connected to the third bracket 114 by a hinge.

Here, the first link 116 includes a first rod 116a inserted into the first cylinder 116b and the first cylinder 116b. The second link 117 also includes a second rod 117a inserted into the second cylinder 117b and the second cylinder 117b. The first rod 116a moves along the longitudinal direction of the first cylinder 116b inside the first cylinder 116b. In addition, the second rod 117a moves along the longitudinal direction of the second cylinder 117b inside the second cylinder 117b.

The operation of the first link 116 and the second link 117 may vary depending on the positions of the first bracket 112 and the second bracket 113 spaced apart from each other. That is, the lengths of the first link 116 and the second link 117 can be increased or decreased in the same way or can be increased or decreased differently.

In one embodiment, when the window 111 moves away from the housing 100, that is, when the window 111 is opened, the first rod 116a gradually advances from the first cylinder 116b, 1 link 116 can be extended. Alternatively, the second rod 117a may be gradually retracted into the second cylinder 117b, thereby reducing the length of the second link 117.

Conversely, when the window 111 is closed, the first rod 116a gradually moves backward into the first cylinder 116b, and the length of the first link 116 may be reduced. Alternatively, the second rod 117a may be gradually advanced from the second cylinder 117b so that the length of the second link 117 may be extended.

The proximity switch 115 may be disposed on at least one of the first bracket 112 and the second bracket 113. The proximity switch 115 may be operated by the first link 116 or the second link 117. [ For example, when the proximity switch 115 is disposed on the second bracket 113, the proximity switch 115 can be operated by advancing or retracting the second rod 117a. At this time, it is possible to confirm whether the window 111 is open or closed by the signal detected from the proximity switch 115.

Referring to FIG. 2, the head unit 200 is disposed inside the housing 100. The head unit 200 includes an X-ray irradiator 210 for irradiating X-rays, a vertical transfer unit 230 for vertically transferring the X-ray irradiator 210, a sub-housing 250 for supporting the vertical transfer unit 230, And a collimator 270 disposed in the sub-housing 250.

The vertical transfer unit 230 includes a support shaft 233 and a connection portion 231 and is fixed to the housing 100 and the sub housing 250. More specifically, one end of the support shaft 233 may be fixed to the housing 100, and the other end may be fixed to the sub-housing 250. The X-ray irradiator 210 is connected to the support shaft 233 by a connection portion 231. Accordingly, the X-ray irradiator 210 can be vertically transferred along the support shaft 233. [

Here, the X-ray irradiator 210 is cylindrical, and can irradiate a hot electron generated by heating filaments in a vacuum state to accelerate at a high voltage to collide with a metal target to generate X-rays. Here, the metal target may be silver (Ag).

When the hot electrons are accelerated and collide with the silver (Ag) particles, the energy level of the electrons constituting the silver (Ag) atoms changes. Such changes in the energy level can lead to x-rays having an energy of 20 keV or more. Therefore, it is possible to detect the characteristic radiation generated from uranium (Uranium) and plutonium (Plutonium).

The collimator 270 is disposed in the sub-housing 250 and is located under the X-ray irradiator 210. The collimator 270 has an irradiation hole 271 located on the extension of the center axis of the X-ray irradiator 210. The X-ray irradiated from the X-ray irradiator 210 passes through the irradiation hole 271 and is irradiated to the sample portion 300.

4 is a perspective view showing the sample unit 300 of FIG.

4, the sample unit 300 includes a first horizontal transfer unit 310, a second horizontal transfer unit 330, a support frame 370, a drive motor 350, and a sample holder 390 .

The sample holder 390 is disposed below the X-ray irradiator 210. The upper surface of the sample holder 390 is partially open. The detecting unit 400 disposed at the lower portion of the sample holder 390 can detect the X-ray through the opened region.

The second horizontal transfer unit 330 includes a second guide rail 331, a second transfer portion 333, and a second wheel 335. In one embodiment, the second guide rail 331 may be disposed on the upper surface of the support frame 370. A second wheel 335 is mounted on both ends of the second carrying portion 333. Accordingly, the second carrying portion 333 can be moved along the second guide rail 331. That is, along the second direction y.

The first horizontal transfer unit 310 includes a first guide rail 311, a first conveying unit 313, and a first wheel 315. In one embodiment, the first guide rail 311 may be disposed on one side of the second carrying portion 333. A first wheel 315 is mounted at both ends of the first carrying part 313. Accordingly, the first carrying portion 313 can be moved along the first guide rail 311. [ That is, along the first direction x.

The driving motor 350 generates a driving force to transfer the first conveying unit 313 and the second conveying unit 333 in the first direction x or the second direction y.

FIG. 5 is a view showing the detection unit 400 of FIG. 2, and FIG. 6 is a sectional view showing the cap 450 of FIG.

Referring to FIGS. 2 and 5, the detection unit 400 is disposed below the sample unit 300. The detection unit 400 includes a photodetector 410, a cap 450 into which the photodetector 410 is inserted, and a fixed support 430 that supports the photodetector 410.

The cap 450 is disposed adjacent to the bottom of the sample holder 390. In one embodiment, the cap 450 may be spaced apart from the sample holder 390 by a distance of 2 mm or more and 4 mm or less.

The cap 450 receives the X-rays emitted from the X-ray irradiator 210 and reaches the sample 300a, thereby collecting the X-rays generated from the sample 300a. Meanwhile, the cap 450 may be aluminum or an aluminum alloy.

Referring to FIG. 6, the cap 450 includes a guide portion 411 and a body portion 413. The body portion 413 is cylindrical, and the end portion of the light receiver 410 is inserted. The body portion 413 has a receiving groove 415 formed therein. In one embodiment, the inner diameter of the body portion 413 may be 20 mm or more and 22 mm or less.

The receiving groove 415 is formed in a ring shape along the inner circumferential surface of the body portion 413. A sealing member 416 is inserted into the receiving groove 415. The sealing member 416 seals between the cap 450 and the light receiver 410 to remove noise due to scattered X-rays. In addition, the sealing member 416 functions to increase and fix the coupling force between the light receiver 410 and the cap 450 by the frictional force.

The guide portion 411 extends from the body portion 413 toward the sample 300a. The guide portion 411 communicates with the body portion 413 and has a through hole 411a at a position adjacent to the sample 300a.

Particularly, the inner diameter d of the guide portion 411 gradually decreases toward the direction away from the body portion 413. In one embodiment, the inner diameter d of the guide portion 411 decreases at an angle of 45 degrees with respect to the central axis c of the body portion 413. On the other hand, the diameter of the through hole 411a may be 3 mm or more and 4 mm or less, preferably about 3.8 mm.

Here, the inner diameter of the body portion 413 and the guide portion 411, and the diameter of the through hole 411a are selected in order to maximize the effect of noise removal and the collection of the x-rays.

One end of the light receiver 410 is inserted into the cap 450 and the other end is fixed to the fixed support 430. The light receiver 410 is cylindrical in shape and collects an X-ray passing through the through hole 411a of the cap 450. [

The photodetector 410 includes an X-ray conversion unit 470 for analyzing an incident X-ray. The X-ray conversion unit 470 may include a wavelength conversion element (not shown) and a photoelectric conversion element (not shown). The wavelength conversion element converts the wavelength of the X-ray incident on the light receiver 410. That is, the wavelength converting element can convert the X-ray into visible light so that it can be detected by the photoelectric conversion element.

In one embodiment, the wavelength conversion element may be a scintillator. The scintillator can be formed by growing scintillator crystals. For example, columnar crystals of CsI doped with thallium (Tl) or sodium (Na) or the like.

The photoelectric conversion element converts the information of the visible light line converted by the wavelength conversion element into an electrical signal. For example, the photoelectric conversion element may be a pin (PIN) diode.

FIG. 8 is a graph for explaining the detection ability according to the arrangement of the detection unit 400 shown in FIG.

5 and 8, the detection unit 400 is disposed at a lower portion of the sample unit 300 and is disposed at an angle of 55 ° with respect to the extension line L1 of the center axis of the X-ray irradiator 210. Specifically, the extension line L2 of the central axis of the light receiver 410 and the extension line L1 of the central axis of the X-ray irradiator 210 form an angle of 55 degrees. The fluorescent X-rays generated from the sample 330a proceed in a radial direction (4? Direction). The largest amount of x-rays in the radial direction travels at an angle of 55 ° with respect to the extension line L1 of the central axis of the x-ray irradiator 210.

FIG. 8 shows that when the detector 400 is arranged so as to have an inclination of 55 degrees, it has detected the most fluorescent X-rays. 8 shows the probability that one photon is irradiated onto the sample, thereby causing the photon generated from the sample to reach the detector. Therefore, the unit of the vertical axis shown in Fig. 8 is [% / photon].

On the other hand, the horizontal axis shown in Fig. 8 represents the distribution of energy. Therefore, the unit of the horizontal axis is [keV]. Here, the energy decreases toward the left side of the horizontal axis, and the energy increases toward the right side.

The second photon generated in the sample 300a is detected by the first photon irradiated by the X-ray irradiator 210 while the detection unit 400 is arranged so as to have a certain angle with reference to the extension line L1 of the central axis of the X- Probability was confirmed. As a result, it can be seen that the detection probability of the second photon having the energy of 13.6 keV is the highest when the detector 400 is arranged at an angle of 55 degrees as shown in FIG.

FIG. 7 is a diagram illustrating the beam stopper 500 of FIG.

2, 5 and 7, the beam stopper 500 is disposed on the same line as the extension line L1 of the central axis of the X-ray irradiator 210. [ Here, the beam stopper 500 is fixed to the fixed frame 120. One side of the fixed frame 120 is fixed to one side of the housing 100.

The beam stopper 500 is positioned at the top of the side wall portion 530 and the side wall portion 530 bent upward from the edge of the bottom portion 510, the bottom portion 510 facing the X-ray irradiator 210, And a ceiling portion 550 substantially parallel to the bottom portion 510. Here, the ceiling portion 550 has an opening portion 570 through which an X-ray is incident.

The opening 570 is smaller than the bottom portion 510. This causes the x-ray to be incident through the aperture 570, but to be absorbed within the beam stopper 500. That is, the incident X-rays are absorbed inside the beam stopper 500, scattered, and then leaked to the outside of the beam stopper 500 to minimize noise.

In one embodiment, beam stopper 500 is shown as a square in a plane, but is not limited thereto. That is, the beam stopper 500 may have a polygonal shape such as a triangular shape on a plane. It may also be circular or oval in plan view.

The beam stopper 500 preferably has an acute angle formed by the inner surface of the bottom portion 510 and the inner surface of the side wall portion 530. Accordingly, it is possible to minimize the amount of the X-rays incident into the beam stopper 500 from being absorbed or scattered within the beam stopper 500, but flowing out to the outside.

Meanwhile, an embodiment of the X-ray fluorescence analysis apparatus 10 according to the present invention may further include a control unit 700 and a power supply unit 600. The power supply unit 600 receives external power and supplies the power to the X-ray fluorescence analysis apparatus 10. The control unit 700 includes a vertical transfer unit 230 for vertically transferring the X-ray irradiator 210 for irradiating X-rays, a first horizontal transfer unit 310 for transferring the sample unit 300 to the left and right, Lt; / RTI >

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art. Accordingly, the technical scope of the present invention should be determined by the technical idea of the appended claims.

100: Housing
110: Door part
200:
210: X-ray irradiator
300:
400:
410: Receiver
430: Fixed support
450: cap
411: guide portion
413:
415: receiving groove
470: X-ray conversion section
500: beam stopper
510:
530:
550: The ceiling
570: opening

Claims (8)

housing;
A head unit disposed inside the housing and including a cylindrical X-ray irradiator for irradiating X-rays;
A sample portion disposed at a lower portion of the head portion;
A detector disposed under the sample unit for detecting X-rays; And
And a beam stopper disposed on the lower portion of the sample portion, the beam stopper being disposed on an extension of the central axis of the X-ray irradiator;
Wherein the detection unit includes a cap and a cylindrical light receiver,
Wherein the cap includes a guide portion having a through hole through which the X-ray enters, and a body portion extending from the guide portion,
One end of the light receiver is inserted into the body portion;
The beam stopper comprising: a bottom portion facing the X-ray irradiator;
A sidewall portion bent upward from an edge of the bottom portion; And
And a ceiling portion located at an upper end of the side wall portion and parallel to the bottom portion, wherein the ceiling portion has an opening through which an X-ray is incident, and the opening is smaller than the bottom portion. The method according to claim 1,
Wherein the detector is disposed such that an extension line of the center axis of the light receiver and an extension line of the center axis of the X-ray irradiator form an angle of 55 °. delete delete delete The method according to claim 1,
Wherein the guide portion increases in inner diameter as the distance from the through hole increases toward the body portion, and increases at an angle of 45 degrees with respect to the central axis of the light receiver. The method according to claim 6,
And the diameter of the through-hole is 3 mm or more and 4 mm or less. 8. The method of claim 7,
And a sealing member between the photodetector and the cap.
KR1020150099101A 2015-07-13 2015-07-13 An analysis device of fluorescent x-ray KR101680828B1 (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010197229A (en) * 2009-02-25 2010-09-09 Osaka City Univ Fluorescent x-ray analyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010197229A (en) * 2009-02-25 2010-09-09 Osaka City Univ Fluorescent x-ray analyzer

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