KR101680602B1 - System, apparatus and method for reconstructing three dimensional internal image and non-transitory computer-readable recording medium - Google Patents

System, apparatus and method for reconstructing three dimensional internal image and non-transitory computer-readable recording medium Download PDF

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KR101680602B1
KR101680602B1 KR1020150078325A KR20150078325A KR101680602B1 KR 101680602 B1 KR101680602 B1 KR 101680602B1 KR 1020150078325 A KR1020150078325 A KR 1020150078325A KR 20150078325 A KR20150078325 A KR 20150078325A KR 101680602 B1 KR101680602 B1 KR 101680602B1
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radiation
image
subject
internal
instruction
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KR1020150078325A
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Korean (ko)
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진경찬
이성호
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한국생산기술연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/48—Thermography; Techniques using wholly visual means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/03—Investigating materials by wave or particle radiation by transmission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/306—Accessories, mechanical or electrical features computer control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/401—Imaging image processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/419—Imaging computed tomograph
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/42—Imaging image digitised, -enhanced in an image processor

Abstract

According to the present invention, the radiation dose and the rotation amount are controlled based on the degree of heat dispersion of the subject to prevent deterioration of the contrast of light and dark, and the time for image restoration is minimized through parallel processing, An image restoration system, a three-dimensional internal image restoration apparatus, a three-dimensional internal image restoration method, and a computer-readable recording medium.
According to the present invention, there is provided a stage, A thermal image acquisition device for acquiring a thermal image of the subject; A radiation image acquisition device for irradiating the subject with radiation to acquire first to nth radiation projection images of the subject (where n is a natural number of 2 or more); A rotating device for rotating at least one of the stage and the radiation image acquisition device; And a controller configured to extract the internal density distribution of the subject based on the thermal image, and to control the radiation image acquisition device and the rotation device on the basis of the internal density distribution, and based on the first to nth radiation projection images Wherein the first to n-th radiation projection images are obtained by sequentially projecting the radiation projection of the object to be inspected, which is sequentially obtained according to the rotation movement of the rotary device, A 3D internal image restoration system is provided.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a three-dimensional image reconstruction system, a three-dimensional image reconstruction apparatus,

More particularly, the present invention relates to a three-dimensional internal image restoration system, a three-dimensional internal image restoration apparatus, a three-dimensional internal image restoration method, and a computer- A 3-dimensional internal image restoration system, a 3-dimensional internal image restoration device, and a 3-dimensional internal image restoration method capable of restoring images in real time by minimizing the time required for image restoration by preventing the deterioration of contrast by controlling the entire amount And a computer-readable recording medium.

BACKGROUND ART [0002] Computed tomography (CT) is known as an inspection method for inspecting the inside of a subject. CT is a device that three-dimensionally displays tomographic images that can not be displayed by ordinary photography. CT is advantageous in that it radiates X-rays while rotating an object to obtain radiographic images at angles and obtains three-dimensional CT images of the inside of the subject, thereby enabling safe inspection without destroying the material . Therefore, CT has been used to record and display tomographic images of human body even in the medical field, and it is also used in the industrial field to know the internal shape, the empty space and the density.

Korean Patent No. 10-1312436 entitled " Computerized tomography apparatus and its control method "filed on November 14, 2011 and registered on September 23, 2013 by Samsung Electronics Co., ) Discloses a CT used in the medical field.

When used in the medical field, the X-ray in the conventional CT, that is, the transmission direction of the radiation is perpendicular to the rotation axis of the subject. In this case, it is difficult to apply the CT to an inspection of an object having a thin thickness, for example, a semiconductor package, in an industrial field.

In order to more effectively inspect a subject having a thin thickness, Oblique CT is also used in which radiation is irradiated to an object at an oblique incidence angle to obtain a radiographic image. Korean Patent No. 10-1375879 entitled " Inspection Apparatus, Stage for Inspection Apparatus and Inspection Method ", filed on November 23, 2012 and registered on March 11, 2014, 2) discloses Ableik CT.

However, the conventional CT apparatus has the following problems.

In order to acquire a three-dimensional internal image of the object using X-rays, a method of generating N projection images for each rotation angle with respect to a rotating object and reconstructing the projection images in a three-dimensional space is used. In this case, when the X-ray is operated and the X-ray is exposed, the projection data is stored in the memory of the image frame grabber board, and after the image is copied to the CPU memory, the operation of the X- To generate a reconstructed image. This method is applied to a system in which the execution time of the image restoration operation is several minutes to several tens of minutes. Since the image restoration is performed after all the projection images are acquired, the image reconstruction time is delayed by the image restoration calculation time.

In addition, image restoration using a GPU capable of real-time high-speed image processing is also being developed. In this case, when the single projection image is copied to the CPU memory, the CPU memory image is copied to the GPU memory to perform image restoration, and the GPU image restoration is performed on all the N projected images, ) To generate a reconstructed image. However, in the case of projection images of hundreds of images, the reconstruction time of the image of the 3D object is delayed due to accumulation of the image restoration calculation time, do.

Also, in the case where the object to be inspected has a flat and thick shape such as a semiconductor package and a metal component having a high density is distributed widely in the axial direction of the object to be inspected, the contrast of the projected image is X The alignment direction of the line and the detection configuration and the vertical direction in which the angle? Of the rotation axis is 0 deg. Is good, but it is deteriorated in the horizontal direction in which? Is 90 deg. This deterioration of the contrast ratio is particularly noticeable in Ableik CT.

1. Korean Patent No. 10-1312436 2. Korean Patent No. 10-1375879

An object of the present invention is to provide a three-dimensional (3D) image reconstruction method capable of realizing image restoration by minimizing the time for image restoration by preventing deterioration of contrast by controlling the amount of radiation and the amount of rotation based on the degree of heat dispersion of the subject. An internal image restoration system, a three-dimensional internal image restoration apparatus, a three-dimensional internal image restoration method, and a computer-readable recording medium.

According to an aspect of the present invention, A thermal image acquisition device for acquiring a thermal image of the subject; A radiation image acquisition device for irradiating the subject with radiation to acquire first to nth radiation projection images of the subject (where n is a natural number of 2 or more); A rotating device for rotating at least one of the stage and the radiation image acquisition device; And a controller configured to extract the internal density distribution of the subject based on the thermal image, and to control the radiation image acquisition device and the rotation device on the basis of the internal density distribution, and based on the first to nth radiation projection images Wherein the first to n-th radiation projection images are obtained by sequentially projecting the radiation projection of the object to be inspected, which is sequentially obtained according to the rotation movement of the rotary device, Dimensional image reconstruction system.

In the three-dimensional internal image restoration system according to the present invention, the three-dimensional internal image restoration apparatus can adjust the radiation dose of the radiation image acquisition apparatus based on the internal density distribution.

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In the three-dimensional internal image restoration system according to the present invention, the three-dimensional internal image restoration device may be arranged such that the rotation device rotates any one of the at least a part of the stage and the radiation image acquisition device The amount of rotation to be moved can be adjusted.

In addition, the three-dimensional internal image restoration system according to the present invention may further include a shielding unit that receives the thermal image acquisition device and shields the radiation.

Further, in the three-dimensional internal image restoration system according to the present invention, the stage may include a power applying unit for applying power to the subject.

In addition, in the three-dimensional internal image restoration system according to the present invention, the stage and the radiation image acquisition apparatus may be arranged so that the radiation is inclined to enter the subject at a predetermined angle.

The present invention also relates to a three-dimensional internal image restoration apparatus comprising a first processor, a second processor, a memory, and one or more programs stored in the memory and configured to be executed by the first processor and the second processor , The at least one program includes: a first instruction for receiving a thermal image of a subject; A second instruction for determining a radiation dose and a rotation amount related to the subject based on the thermal image; A third instruction for receiving first to nth radiation projection images of the subject sequentially generated on the basis of the radiation dose and the amount of rotation, wherein n is a natural number of 2 or more; And a fourth instruction for restoring a three-dimensional inner image of the subject based on the first through n-th radiation projection images.

In the three-dimensional internal image restoration apparatus according to the present invention, the first to third instructions may be executed by the first processor, and the fourth instruction may be executed by the second processor.

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In the three-dimensional internal image restoration apparatus according to the present invention, the first processor may be a central processing unit (CPU), and the second processor may be a GPU (Graphic Processing Unit).

Further, in the three-dimensional internal image restoration apparatus according to the present invention, the second instruction extracts the internal density distribution of the subject on the basis of the thermal image, and based on the internal density distribution, the radiation dose and the rotation amount Lt; RTI ID = 0.0 > 2-1 < / RTI >

According to another aspect of the present invention, there is provided a three-dimensional internal image reconstruction apparatus for reconstructing a three-dimensional internal image, the apparatus comprising: 2-2 < / RTI > instructions.

In the 3-dimensional internal image reconstruction apparatus according to the present invention, the third instruction may include 3-1 to 3-n instructions for receiving the first to nth radiation projection images, respectively, The instructions reconstruct the 4th through the 4th through nth instructions and the 1 st through n th instructions corresponding to the 3-1 through 3-n instructions, respectively, (N + 1) < / RTI > instruction to reconstruct the image.

In the three-dimensional internal image restoration apparatus according to the present invention, the at least one program may further include a fifth image processing unit for comparing at least one of the first through n th radiation projection images with the thermal image to extract a defect position of the subject, Instructions. ≪ / RTI >

According to another aspect of the present invention, there is provided a three-dimensional internal image restoration method performed by a three-dimensional internal image restoration apparatus, comprising the steps of: (a) receiving a thermal image of an object obtained by a thermal image acquisition apparatus; (b) determining a radiation dose of the radiation image acquisition apparatus and a rotation amount related to the subject based on the thermal image; (c) receiving first through n-th radiation projection images of the subject sequentially generated by the radiation image acquiring device (where n is a natural number of 2 or more) based on the radiation dose and the amount of rotation; And (d) reconstructing a three-dimensional inner image of the subject based on the first through n-th radiation projection images.

In the 3D image reconstruction method according to the present invention, the steps (a) to (c) are executed by a first processor of the 3D image restoration apparatus, and the step (d) Can be executed by the second processor of the image restoration device.

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In the method of restoring a 3D internal image according to the present invention, the first processor may be a CPU and the second processor may be a GPU.

In the method of restoring a three-dimensional internal image according to the present invention, the step (b) may include extracting an internal density distribution of the subject on the basis of the thermal image, and calculating, based on the internal density distribution, And dynamically determining the entire amount.

In the method for restoring a three-dimensional inner image according to the present invention, the step (b) dynamically determines the radiation dose and the amount of rotation based on the thermal image for each of the first through nth radiation projection images Step < / RTI >

In the method of restoring a three-dimensional inner image according to the present invention, the step (c) includes steps (c-1) to (cn) for obtaining the first to nth radiation projection images, (d) includes the steps of (d-1) to (dn) restoring the first to n-th images corresponding to the steps (c-1) to And a d- (n + 1) step of restoring the 3D internal image.

In the method of restoring a three-dimensional internal image according to the present invention, the method may further include: (e) applying power to the subject before the step (a).

The method may further include the step of (f) extracting a defect position of the subject by comparing at least one of the first through n-th radiation projection images with the thermal image .

In the method of restoring a three-dimensional internal image according to the present invention, radiation irradiated from the radiation image capturing apparatus may be incident on the subject at a predetermined angle.

The present invention also provides a computer-readable recording medium on which a program for executing each step of the above-described three-dimensional internal image restoration method is recorded.

According to the present invention, irradiation of radiation is controlled on the basis of the degree of heat dispersion of the object to prevent deterioration of contrast of light and darkness, and the time for image restoration is minimized through parallel processing, System, a three-dimensional internal image restoration apparatus, a three-dimensional internal image restoration method, and a computer-readable recording medium.

1 is an exemplary block diagram of a three-dimensional internal image restoration system in accordance with the present invention;
FIG. 2 through FIG. 3 illustrate a process of acquiring a radiation projection image of a radiation image acquisition apparatus in a three-dimensional internal image reconstruction system according to the present invention.
4 to 5 are views showing gray levels of a projection image according to an internal density distribution of an object in a three-dimensional internal image restoration system according to the present invention.
FIG. 6 is a diagram illustrating adjustment of a radiation dose in a three-dimensional internal image restoration system according to the present invention. FIG.
7 is a diagram illustrating adjustment of the amount of rotation in a three-dimensional internal image restoration system according to the present invention.
8 is a view exemplarily showing the arrangement of a radiation image capturing apparatus and a subject in a three-dimensional internal image restoring system according to the present invention.
9 is an exemplary block diagram of a 3D internal image restoration apparatus according to the present invention.
10 is an exemplary block diagram of a program of a three-dimensional internal image restoration apparatus according to the present invention.
11 is a diagram illustrating a process of image restoration performed by a three-dimensional internal image restoration apparatus according to the present invention.
12 is an exemplary flowchart of a 3D internal image restoration method according to the present invention.

Hereinafter, embodiments of the three-dimensional internal image restoration system, the three-dimensional internal image restoration apparatus, the three-dimensional internal image restoration method, and the computer readable recording medium of the present invention will be described in detail with reference to the accompanying drawings.

1 is an exemplary block diagram of a 3D internal image restoration system in accordance with the present invention.

1, a 3D internal image restoration system according to the present invention includes a 3D internal image restoration apparatus 100, a stage 200, a radiation image acquisition apparatus 300, a thermal image acquisition apparatus 400 And a rotating device 500, In addition, the 3D internal image restoration system according to the present invention may further include a shield 600 referring to FIG. In addition, in the three-dimensional internal image restoration system according to the present invention, the stage 200 may further include a power application unit 270.

The stage 200 is placed on the object to be inspected (250 in Fig. 2).

For example, when the three-dimensional internal image restoration system according to the present invention is applied to the medical field, the object to be inspected may be a human body, or a semiconductor package when applied to an industrial field.

The radiation image acquisition apparatus 300 irradiates the subject with radiation, and acquires the first to nth radiation projection images (where n is a natural number of 2 or more) of the subject.

The radiation image capturing apparatus 300 includes, for example, a radiation irradiating section (330 of FIG. 2) for irradiating radiation and a detecting section (360 of FIG. 2) for detecting radiation transmitted through the subject after being irradiated by the radiation irradiating section 330 .

The first to nth radiation projection images are angle projection images of the subject.

The thermal imager 400 acquires a thermal image of the subject.

The thermal image acquisition device 400 is, for example, a device that detects infrared rays emitted from an object to be inspected.

The rotating apparatus 500 rotates at least one of the stage 200 and the radiographic image capturing apparatus 300.

More specifically, in the case of the three-dimensional internal image restoration system according to the present invention, in accordance with the rotation of at least a part of the configuration of the stage 200 or the rotation of the radiation image capturing apparatus 300, The nth radiation projection image, that is, the radiation projection image by angle, can be obtained.

For example, in the case of the medical field, the stage 200 is fixed, and the radiation image acquiring apparatus 300 can acquire a radiation projection image of the subject by angle through the radiation image acquiring apparatus 300 while rotating by angle.

For example, in the industrial field, the radiation image capturing apparatus 300 is fixed, and at least a part of the stage 200 is rotationally moved by angles to obtain a radiographic projection image of the subject through the radiographic image capturing apparatus 300 . That is, for example, a portion of the stage 200 on which the subject is placed rotates and rotates by angles, and a radiation projection image for each angle of the subject can be obtained through the radiation image acquisition device 300.

The rotating apparatus 500 rotates at least one of the stage 200 and the radiographic image capturing apparatus 300 as described above. When at least a part of the stage 200 and the radiation image acquiring apparatus 300 are rotationally moved according to the rotational movement of the rotating apparatus 500, the first through the first radiation projected images are transmitted to the rotating apparatus 500 Are sequentially obtained in accordance with the rotational movement.

More specifically, for example, when the rotating device 500 rotates at least a part of the stage 200, the rotating device 500 rotates at least a part of the stage 500, for example, by a predetermined angle, And acquires the first radiation projection image through the image acquisition device 300. FIG. Thereafter, at least a part of the stage 500 is rotated, for example, by 20 degrees again, and a second radiation projection image is acquired through the radiation image acquisition apparatus 300. This rotational movement is repeated until the nth radiation projection image is obtained.

FIGS. 2 to 3 are views illustrating a process of acquiring a radiation projection image of a radiation image acquisition apparatus in a three-dimensional internal image reconstruction system according to the present invention.

2 and 3, only a part of the structure of the 3D internal image restoration system according to the present invention is shown for convenience of description, and the 3D internal image restoration system is viewed from the top. 2 and 3, it is assumed that a portion of the stage (200 in FIG. 1) on which the test object 250 is placed rotates.

2, the subject 250 is placed on a stage 200 (FIG. 1), the radiographic image acquisition device 300 (FIG. 1) and the subject 250 are aligned, The first radiation projection image is acquired through the detection unit 330 of the radiation image acquisition apparatus 300 (FIG. 1) by irradiating the subject 250 with the radiation through the radiation irradiation unit 330 of FIG.

Next, referring to FIG. 3, the subject 250 is rotated by a predetermined angle, for example, 20 degrees, and the subject 250 is rotated through the irradiation unit 330 of the radiation image acquisition apparatus 300 (FIG. 1) And acquires a second radiation projection image through the detection unit 330 of the radiation image acquisition apparatus 300 (FIG. 1).

Thereafter, similarly, the subject 250 is rotated, the radiation is irradiated through the radiation image acquisition apparatus 300 (FIG. 1), and the next radiation projection image is transmitted through the detection unit 330 of the radiation image acquisition apparatus 300 And obtains the first to n-th radiation projection images.

The 3D internal image restoration apparatus 100 controls at least the radiation image acquisition apparatus 300 and the rotation apparatus 500 and reconstructs a three-dimensional internal image of the subject based on the first through n-th radiation projection images.

More specifically, the 3D internal image restoration apparatus 100 extracts the internal density distribution of the subject based on the thermal image acquired through the thermal image acquisition apparatus 400, and acquires the radiation image acquisition Thereby controlling the apparatus 300 and the rotating apparatus 500. [

For example, the 3D internal image restoration apparatus 100 determines the radiation dose of the radiation image acquisition apparatus 300 based on the internal density distribution.

Generally, radiation, for example, X-rays, is transmitted through a small amount to a hard object such as a metal object and other substances.

For example, the amount of the radiation transmitted through the subject (250 in Fig. 2) varies depending on the rotation of the subject. That is, since the distribution of the metal component disposed in the path of the radiation advances according to the rotation of the object (250 in FIG. 2), when the radiation is transmitted and finally the radiation projection image is generated, Occurs.

When a large amount of radiation is transmitted, the gray level of the image is high. When the radiation is little, the gray level of the image is low.

4 to 5 are views showing gray level of a projection image according to an internal density distribution of an object in a 3D internal image restoration system according to the present invention.

Referring to FIG. 4, there is shown a gray level of a radiation projection image in a case where most of the metal component is present in a path along which the radiation advances into the subject in the three-dimensional internal image restoration system according to the present invention. As shown in FIG. 4, the radiation projected image has mostly a high gray level.

Referring to FIG. 5, in a three-dimensional internal image restoration system according to the present invention, a gray level of a radiation projection image is shown when a metal component and other components are mixed in a path along which radiation advances into an object. As shown in FIG. 5, the radiation projection image has gray levels distributed at several levels.

On the other hand, if the degree of dispersion of heat is detected based on the thermal image, the internal density distribution of the object can be extracted. For example, when a projection image is obtained in the case where most of the metal component is present in the path along which the radiation advances to the inside of the object to be inspected, the portion corresponding to the case of FIG. 4 is obtained. In this case, it is necessary to increase the dose of radiation to increase each gray level and thus to increase the contrast of the radiographic image.

For example, in the case where a plurality of metal components and other components are mixed in the path along which the radiation advances into the object, a projection image is obtained in the case of FIG. In this case, the contrast of the radiographic image can be maintained without increasing the radiation dose.

The radiation dose can be increased by increasing the tube current, for example, when the X-ray imaging apparatus 300 uses X-rays.

FIG. 6 is a diagram illustrating adjustment of a radiation dose in a three-dimensional internal image reconstruction system according to the present invention.

For example, it is assumed in FIG. 6 that the case where most of the metal component in the path of the radiation advances to the inside of the object (250 in FIG. 2) is rotated 180 degrees from the reference, It is assumed that a large number of metal components are disposed in the path along which the radiation advances. In this case, as shown in FIG. 6, the tube current is increased to increase the irradiation dose in the section corresponding to the position range where the subject (250 in FIG. 2) is rotated 90 to 270 degrees from the reference. Therefore, the contrast of contrast can be increased as described above.

For example, the 3D image reconstruction apparatus 100 determines the amount of rotation of the rotary device 500 based on the internal density distribution.

For example, when the subject acquires a projection image with respect to a portion including a large number of metal components, the internal density distribution is increased, so that the amount of rotation must be adjusted more finely. For example, when the radiation projection image of the object is obtained by rotating the object 500 by a predetermined angle?, For example, by 20 degrees through the rotary device 500, the angle? The rotation amount of the rotating device 500 can be controlled so as to acquire a projection image of the radiation.

7 is a diagram illustrating adjustment of the amount of rotation in the 3D image restoration system according to the present invention.

Referring to FIG. 7, it is assumed that the case where most of the metal component is present in the path along which the radiation advances into the subject 250 (FIG. 2) is the position where the subject 250 (FIG. 2) , And the object to be inspected (250 in FIG. 2) is rotated 90 to 270 degrees from the reference, it is assumed that a lot of metal components are arranged in the path along which the radiation advances. In this case, as shown in FIG. 7, in a section corresponding to the position range where the subject (250 in FIG. 2) is rotated 90 to 270 from the reference, the amount of rotation is reduced to obtain a more accurate projection image.

Referring to FIG. 1, the 3D image restoring system according to the present invention may further include a shielding unit 600.

The shield 600 receives the thermal imager 400 and shields the radiation.

The shielding portion 600 is made of a radiation shielding material such as transparent lead glass, for example, and shields radiation from being transmitted to at least the thermal imaging apparatus 400.

In addition, in the three-dimensional internal image restoration system according to the present invention, the stage 200 may further include a power application unit 270.

For example, when a conductive material such as a semiconductor package is to be inspected, power can be applied to the object to be inspected so that thermal images of the object can be more clearly obtained through the thermal imaging apparatus 400.

Meanwhile, in the three-dimensional internal image restoration system according to the present invention, the stage 200 and the radiation image acquisition apparatus 300 can be aligned while being inclined so that the radiation enters the subject at a predetermined angle. That is, the stage 200 and the radiation image capturing apparatus 300 may be inclined at a predetermined angle, such as Ableik CT.

8 is a diagram exemplarily showing the arrangement of a radiation image capturing apparatus and a subject in a three-dimensional internal image restoring system according to the present invention.

In FIG. 8, only a part of the 3D internal image restoration system according to the present invention is shown for the convenience of explanation, and the 3D internal image restoration system is viewed from the side.

8, the subject 250 and the radiation image acquiring apparatus 300 placed on the stage 200 (FIG. 1) are arranged such that the radiation is inclined at a predetermined angle to the subject, And can be aligned so as to be inclined. That is, the subject 250 mounted on the stage (200 of FIG. 1) and the radiation image capturing apparatus 300 may be inclined at a predetermined angle like Ableik CT.

9 is an exemplary block diagram of a 3D internal image restoration apparatus according to the present invention.

9, a 3D internal image restoring apparatus 100 includes a first processor 110, a second processor 120, a memory 130, a first processor 110 And one or more programs 150 configured to be executed by the second processor 120.

The first processor 110 and the second processor 120 read and execute the program 150 stored in the memory 130. [ The first processor 110 may be a CPU (Central Processing Unit), the second processor 120 may be a GPU (Graphic Processing Unit), and the second processor 120 may be operated under the control of the first processor 110 can do.

The memory 130 stores one or more programs 150. The memory 130 is a recording medium such as a nonvolatile memory or a volatile memory that can be recorded and read. Although the memory 130 is shown as one, a plurality of storage means, that is, a memory may be used. Also, although the one or more programs 150 are also shown as one, a plurality of programs may be used.

The 3D internal image restoration apparatus 100 may further include other components besides the first processor 110, the second processor 120, the memory 130, the one or more programs 150, and the like.

10 is an exemplary block diagram of a program of a 3D internal image restoration apparatus according to the present invention.

Referring to FIG. 10, one or more programs 150 include first to fourth instructions 150-1 to 150-4. Also, the one or more programs 150 may further include a fifth instruction 150-5.

The first instruction 150-1 receives the thermal image of the subject (250 in Fig. 2).

2) based on the thermal image of the subject (250 in FIG. 2) received through the first instruction 150-1 and the second instruction 150-2 .

(300 in FIG. 1) by means of a rotation device (500 in FIG. 1) or a rotation device (300 in FIG. 1) by means of the radiation dose of the subject Determines the amount by which at least a portion of the stage (200 in FIG. 1) is rotated.

10, the second instruction 150-2 includes at least one of the 2-1 instruction 150-2-1 and the 2-2 instruction 150-2-2.

The second-instruction 150-2-1 outputs the internal density of the subject (250 in Fig. 2) based on the thermal image of the subject (250 in Fig. 2) received via the first instruction 150-1 The distribution is extracted, and the dose of radiation and the amount of rotation are dynamically determined based on the extracted internal density distribution.

The 2-2th instruction 150-2-2 is a circuit for generating the first to nth radiation projection images based on the thermal image of the subject (250 in FIG. 2) received through the first instruction 150-1 The dose of radiation and the amount of rotation are dynamically determined.

The third instruction 150-3 is a first to nth radiation projection image of the subject (250 in FIG. 2) sequentially generated based on the radiation dose and the amount of rotation determined through the second instruction 150-2 And n is a natural number of 2 or more).

That is, the subject (sequentially generated according to the operation of the radiation image acquisition apparatus 300 (FIG. 1) and the rotation apparatus (500 of FIG. 1) according to the radiation dose and the amount of rotation determined through the second instruction 150-2 2 of the first to nth radiation projection images.

The third instruction 150-3 may include a third-first instruction 150-3-1 through a third-n instruction 150-3-n that respectively receive first through nth radiation projection images. have.

The fourth instruction 150-4 restores the three-dimensional internal image of the subject (250 in FIG. 2) based on the first through nth radiation projection images received through the third instruction 150-3.

The fourth instruction 150-4 is a fourth instruction 150-4 for restoring the first through n-th images corresponding to the 3-1 instruction 150-3-1 through the 3-n instruction 150-3-n, respectively. (N + 1) instruction 150 (n + 1) for reconstructing the three-dimensional internal image by reconstructing the first through n-th instructions 150-4-1 through 150- (N + 1)).

The first to fourth instructions 150-1 to 150-4 are preferably executed in parallel.

The first instruction 150-1 through the third instruction 150-3 may be executed in the first processor 110 and the fourth instruction 150-4 may be executed in the second processor 120. [

11 is a diagram illustrating a process of image restoration performed by the 3D internal image restoration apparatus according to the present invention.

As shown in FIG. 11, the image restoration process is performed by the first to fourth threads.

The third thread corresponds to the first instruction 150-1 and receives the column image. Receiving the thermal image is repeatedly performed for each projection step, i.e., "projection 1" to "projection n", as shown in FIG.

The second thread corresponds to the second instruction 150-2, and determines the dose of radiation and the amount of rotation. The determination of the dose of radiation and the amount of rotation is repeatedly performed for each projection step, i.e., "projection 1" to "projection n", as shown in FIG.

The first thread corresponds to the third instruction 150-3 and receives the first to n th radiation projection images, respectively, and copies them to the memory of the first processor 110, for example, the CPU.

The first thread is performed for each projection step, i.e., "projection 1" to "projection n", for example, by the third-first instruction 150-3-1 through the third-n instruction 150-3-n .

The fourth thread corresponds to the fourth instruction 150-4, and restores the three-dimensional internal image of the subject (250 in Fig. 2) based on the first through nth radiation projection images.

More specifically, the fourth thread is executed for each projection step of the first thread, and for example, corresponding to the third-first instruction 150-3-1 to the third-n instruction 150-3-n, N-th instruction and a fourth-n instruction 150-4-n for reconstructing the n-th image and the n-th image, 4- (n + 1) instruction 150-4- (n + 1).

Meanwhile, referring to FIG. 10, one or more programs 150 may further include a fifth instruction 150-5. The fifth instruction 150-5 compares the thermal image of at least one of the first to nth radiation projected images with the thermal image of the subject (250 in FIG. 2) to extract the defect position of the subject (250 in FIG. 2).

As described above, according to the three-dimensional internal image restoration apparatus of the present invention, the radiation dose and the rotation amount are controlled based on the degree of heat dispersion of the subject to prevent deterioration of the contrast of contrast, It is possible to restore the image in real time by minimizing the time for image restoration.

12 is an exemplary flowchart of a 3D internal image restoration method according to the present invention.

Referring to FIG. 12, a thermal image of an object (250 in FIG. 2) acquired by a thermal image acquisition apparatus (400 in FIG. 1) is received (S100).

Next, the amount of radiation to be irradiated and the amount of rotation associated with the subject (250 in FIG. 2), for example, the rotation device (500 in FIG. 1), based on the thermal image received through step S100, (S200).

2) of the subject (250 in FIG. 2) sequentially generated in the radiation image acquisition apparatus (300 in FIG. 1) based on the radiation dose and the amount of rotation determined through step S200 Where n is a natural number of 2 or more) (S300).

Next, the three-dimensional internal image of the object (250 in FIG. 2) is reconstructed based on the first through n-th radiation projection images received through step S300 (S400).

Steps S100 to S400 correspond to the first instruction 150-1 to the fourth instruction 150-4 of the program 150 shown in FIG. 10, and thus a detailed description thereof will be omitted.

Meanwhile, referring to FIG. 12, the method for restoring a three-dimensional internal image according to the present invention may further include a step S500 of applying power to an object (250 in FIG. 2). By applying power to the subject (250 in Fig. 2) to heat the subject (250 in Fig. 2), a thermal image can be acquired more clearly.

12, a method for reconstructing a three-dimensional internal image according to an exemplary embodiment of the present invention includes extracting a defect position of an object (250 in FIG. 2) by comparing at least one of first through nth radiation projected images with a thermal image S600). Step S600 corresponds to the fifth instruction 150-5 of the program 150 referring to FIG. 10, and therefore, a detailed description thereof will be omitted.

The present invention also provides a computer-readable recording medium on which a program for realizing each step of the 3D internal image restoration method according to the present invention described above is recorded.

The computer-readable recording medium refers to any kind of recording apparatus in which data, that is, data in the form of a code or a program, is stored so as to be readable by a computer system. Such a computer-readable recording medium is, for example, a memory such as a ROM and a RAM, a storage medium such as CD-ROM and DVD-ROM, a magnetic storage medium such as a magnetic tape and a floppy disk, The present invention is not limited thereto. Such a computer-readable recording medium may also be distributed over a networked computer system so that computer readable data can be stored and executed in a distributed manner.

However, detailed description of such a computer-readable recording medium is omitted because it is redundant to the 3D image reconstruction method according to the present invention described with reference to FIGS. 1 to 12.

Although the present invention has been described in detail, it should be understood that the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications may be made without departing from the essential characteristics of the present invention. Will be possible.

Therefore, the embodiments disclosed in the present specification are intended to illustrate rather than limit the present invention, and the scope and spirit of the present invention are not limited by these embodiments. The scope of the present invention should be construed according to the following claims, and all the techniques within the scope of equivalents should be construed as being included in the scope of the present invention.

According to the present invention, the radiation dose and the rotation amount are controlled based on the degree of heat dispersion of the subject to prevent deterioration of the contrast of light and dark, and the time for image restoration is minimized through parallel processing, An image restoration system, a three-dimensional internal image restoration device, a three-dimensional internal image restoration method, and a computer-readable recording medium.

100: 3D internal image restoration device 110:
120: second processor 130: memory
150: Program 200: Stage
250: object to be inspected 270:
300: Radiographic image acquisition device 330:
360: detection unit 400: thermal image acquisition device
500: rotating device (500) 600: shielding part

Claims (26)

A stage on which an object to be inspected is placed;
A thermal image acquisition device for acquiring a thermal image of the subject;
A radiation image acquisition device for irradiating the subject with radiation to acquire first to nth radiation projection images of the subject (where n is a natural number of 2 or more);
A rotating device for rotating at least one of the stage and the radiation image acquisition device; And
Extracting an internal density distribution of the subject based on the thermal image, and controlling the radiation image acquisition device and the rotation device based on the internal density distribution, and based on the first to nth radiation projection images, A three-dimensional internal image restoration device for restoring a three-dimensional internal image of a subject;
Lt; / RTI >
Wherein the first to nth radiation projection images are radiation projection images of the subject sequentially obtained in accordance with rotational movement of the rotating device. delete The method according to claim 1,
Wherein the 3D internal image restoration device adjusts a radiation dose of the radiation image acquisition device based on the internal density distribution. The method according to claim 1,
Wherein the three-dimensional internal image restoration device adjusts the amount of rotation by which the rotating device rotates one of the at least a part of the stage and the radiation image acquiring device based on the internal density distribution, system. The method according to claim 1,
And a shield for receiving the thermal image acquisition device and shielding the radiation. The method according to claim 1,
Wherein the stage includes a power application unit for applying power to the object to be inspected. The method according to claim 1,
Wherein the stage and the radiation image acquisition apparatus are arranged so that the radiation is inclined to be incident on the subject at a predetermined angle. A three-dimensional internal image reconstruction apparatus comprising a first processor, a second processor, a memory, and one or more programs stored in the memory and configured to be executed by the first processor and the second processor,
Wherein the one or more programs include:
A first instruction for receiving a thermal image of a subject;
A second instruction for determining a radiation dose and a rotation amount related to the subject based on the thermal image;
A third instruction for receiving first to nth radiation projection images of the subject sequentially generated on the basis of the radiation dose and the amount of rotation, wherein n is a natural number of 2 or more; And
A fourth instruction for restoring a three-dimensional inner image of the subject based on the first through n-th radiation projection images;
Dimensional image reconstructing apparatus. delete 9. The method of claim 8,
Wherein the first to third instructions are executed by the first processor,
And the fourth instruction is executed by the second processor. 9. The method of claim 8,
The first processor is a central processing unit (CPU)
Wherein the second processor is a GPU (Graphic Processing Unit) 9. The method of claim 8,
And the second instruction includes a second instruction for extracting an internal density distribution of the subject based on the thermal image and dynamically determining the radiation dose and the amount of rotation based on the internal density distribution In 3D image reconstruction apparatus. 9. The method of claim 8,
Wherein the second instruction comprises a second-2 instruction to dynamically determine the radiation dose and the amount of rotation based on the thermal image for each of the first through nth radiation projected images, Device. 9. The method of claim 8,
And the third instruction includes third to n-th instructions to receive the first to n-th radiation projection images, respectively,
Wherein the fourth instruction comprises: (4-1) th to (4-n) th instructions for restoring the first through n-th images corresponding to the third through n-th instructions, And a 4- (n + 1) instruction for restoring a 3-dimensional inner image. 9. The method of claim 8,
Wherein the one or more programs include:
A fifth instruction for comparing a thermal image with at least one of the first through n th radiation projected images to extract a defect position of the inspection object,
Dimensional image reconstructing apparatus. A 3D internal image restoration method performed in a 3D internal image restoration apparatus,
(a) receiving a thermal image of an object to be inspected obtained by the thermal imaging apparatus;
(b) determining a radiation dose of the radiation image acquisition apparatus and a rotation amount related to the subject based on the thermal image;
(c) receiving first through n-th radiation projection images of the subject sequentially generated by the radiation image acquiring device (where n is a natural number of 2 or more) based on the radiation dose and the amount of rotation; And
(d) reconstructing a three-dimensional internal image of the subject based on the first through n-th radiation projection images;
And reconstructing the three-dimensional inner image. delete 17. The method of claim 16,
Wherein the steps (a) to (c) are executed by a first processor of the 3D internal image restoration apparatus,
Wherein the step (d) is executed by a second processor of the 3D internal image restoration apparatus. 19. The method of claim 18,
Wherein the first processor is a CPU,
Wherein the second processor is a GPU. 17. The method of claim 16,
Wherein the step (b) comprises the steps of: extracting an internal density distribution of the subject on the basis of the thermal image, and dynamically determining the radiation dose and the amount of rotation based on the internal density distribution; Internal image restoration method. 17. The method of claim 16,
Wherein the step (b) includes dynamically determining the radiation dose and the rotation amount based on the thermal image for each of the first through nth radiation projected images. 17. The method of claim 16,
Wherein the step (c) includes steps (c-1) to (cn) for obtaining the first to n-th radiation projection images, respectively,
The step (d) includes the steps of (d-1) to (dn) restoring the first to n-th images corresponding to the steps (c-1) to And reconstructing the 3D internal image to reconstruct the 3D internal image. 17. The method of claim 16,
(e) applying power to the subject before the step (a)
And reconstructing the three-dimensional inner image. 17. The method of claim 16,
(f) extracting a defect position of the subject by comparing at least one of the first through n-th radiation projection images with the thermal image
And reconstructing the three-dimensional inner image. 17. The method of claim 16,
Wherein the radiation irradiated from the radiation image capturing device is incident on the subject at a predetermined angle. Wherein the step of reconstructing the three-dimensional internal image comprises the steps of: reconstructing the three-dimensional internal image according to any one of claims 16 to 18;
KR1020150078325A 2015-06-03 2015-06-03 System, apparatus and method for reconstructing three dimensional internal image and non-transitory computer-readable recording medium KR101680602B1 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180074575A (en) * 2016-12-23 2018-07-03 에프이아이 컴파니 High Frequency Lock-In Thermography Using Single Photon Detectors
CN111462268A (en) * 2020-03-31 2020-07-28 北京市商汤科技开发有限公司 Image reconstruction method and device, electronic equipment and storage medium
KR102399718B1 (en) * 2021-08-24 2022-05-19 주식회사 네프 Method for Controlling Output of X-ray of System for Inspecting Defects of Structure By Use of X-Ray
US11585768B1 (en) 2021-08-24 2023-02-21 Neuf Inc. System and method for inspecting defects of structure by using x-ray

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012042340A (en) 2010-08-19 2012-03-01 Shimadzu Corp X-ray ct equipment
KR101375879B1 (en) * 2012-11-23 2014-03-17 한국생산기술연구원 Inspection apparatus, stage used therefor and inspection method
KR101382735B1 (en) 2012-10-12 2014-04-08 전남대학교산학협력단 X-ray ct system of high resolution and method for acquiring 3d images using the same
KR101480968B1 (en) * 2013-08-23 2015-01-14 한국생산기술연구원 Inspection apparatus and inspection method using x-ray computed tomography and laser surface scanning

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012042340A (en) 2010-08-19 2012-03-01 Shimadzu Corp X-ray ct equipment
KR101382735B1 (en) 2012-10-12 2014-04-08 전남대학교산학협력단 X-ray ct system of high resolution and method for acquiring 3d images using the same
KR101375879B1 (en) * 2012-11-23 2014-03-17 한국생산기술연구원 Inspection apparatus, stage used therefor and inspection method
KR101480968B1 (en) * 2013-08-23 2015-01-14 한국생산기술연구원 Inspection apparatus and inspection method using x-ray computed tomography and laser surface scanning

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180074575A (en) * 2016-12-23 2018-07-03 에프이아이 컴파니 High Frequency Lock-In Thermography Using Single Photon Detectors
KR102255968B1 (en) 2016-12-23 2021-05-26 에프이아이 컴파니 High Frequency Lock-In Thermography Using Single Photon Detectors
CN111462268A (en) * 2020-03-31 2020-07-28 北京市商汤科技开发有限公司 Image reconstruction method and device, electronic equipment and storage medium
KR102399718B1 (en) * 2021-08-24 2022-05-19 주식회사 네프 Method for Controlling Output of X-ray of System for Inspecting Defects of Structure By Use of X-Ray
US11585768B1 (en) 2021-08-24 2023-02-21 Neuf Inc. System and method for inspecting defects of structure by using x-ray
WO2023027227A1 (en) * 2021-08-24 2023-03-02 주식회사 네프 System for inspecting defect in structure using x-rays, method for controlling x-ray output of inspection system, and method for calculating depth of defect

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