KR101674313B1

KR101674313B1 - A bellows apparatus

Info

Publication number: KR101674313B1
Application number: KR1020150115254A
Authority: KR
Inventors: 김철의; 최무겸
Original assignee: 주식회사 지피케이; 김철의
Priority date: 2015-08-17
Filing date: 2015-08-17
Publication date: 2016-11-08

Abstract

The present invention relates to a bellows device which breaks from a bellows structure of a bellows type to be easily manufactured, be advantageous in installation and maintenance, and be used for a variety of uses. The bellows device comprises: a plurality of plates having a flow passage formed to penetrate the center of a plate-shaped body wherein gas can move through the flow passage, and ring grooves are formed to face each other along edges of both surfaces of the body so that the plurality of plates are sequentially arranged while maintaining a set distance; a plurality of sealing rings inserted into the ring grooves of the plurality of plates to maintain tightness; and a coupling member configured to couple the plurality of plates to prevent separation of the plurality of plates.

Description

{A BELLOWS APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bellows device, and more particularly, to a bellows device capable of easily bending a bellows structure of a corrugated tube shape, being advantageous in installation and maintenance, and being used for various purposes.

In general, many processes and equipment are required for semiconductor manufacturing. In particular, physical vapor deposition (PVD) such as chemical vapor deposition (CVD) or sputtering, and processes for etching and ion implantation are performed under a vacuum and low pressure environment.

However, there are many cases where a facility member operates in two kinds of spaces in an operation for transferring a wafer across a process space of vacuum and atmospheric pressure in a plurality of facilities. However, for the mechanical movement, when moving through the wall separating the vacuum and the atmospheric space, a space is required between the wall and the movement member for movement, even if the space is fine, and the vacuum is likely to leak through the space. Therefore, a means for effectively preventing the leakage of the vacuum while enabling the movement of the operating member is required in such a portion, and usually a bellows is mainly applied. Of course, bellows is widely used in many fields to adjust vibration absorption and relative displacement.

Such a bellows is a corrugated tube having a predetermined length and is formed by connecting a thin plate made of metal or synthetic resin to each other to form a corrugated tube and make it easy for the tube to shrink and expand. 0072496 (hereinafter referred to as Reference 1) and Japanese Patent Application Publication No. 1999-0086797 (hereinafter referred to as Reference 2).

The bellows proposed in References 1 and 2 are usually made of a corrugated pipe structure in which mountains and bones are repeatedly formed by alternately joining the inner and outer rims of a metallic disk having a central opening by welding or the like, do.

In this case, the conventional bellows is expensive because it is expensive to manufacture. Therefore, it takes a lot of installation cost, and when the bellows is broken, the bellows must be replaced with a full bell.

In addition, the conventional bellows is limited in its use because the bellows is mainly circular in cross section so as to be advantageous for shrinking and relaxing in vacuum.

Reference 1: Published Patent No. 10-2006-0072496 Reference 2: Published Japanese Patent Application No. 1999-0086797

Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a new type of bellows device, which is easy to manufacture, and is convenient for installation and maintenance, by breaking away a bellows structure of a corrugated pipe shape, The purpose is to provide.

Another object of the present invention is to provide a bellows device having a polygonal shape such as a rectangular or hexagonal shape as well as a circular shape in cross section so that it can be utilized for various purposes.

In order to solve such a technical problem,

A plurality of plates successively disposed in the ring grooves of the plurality of plates with a predetermined distance being formed in a ring groove formed opposite to the both side edges of the body so as to allow passage of gas through the center of the plate- And a binding member for binding the plurality of plates to prevent the plurality of plates from being separated from each other.

At this time, the plurality of plates are formed with a channel through which gas can move in the center of the plate-shaped body, and a plurality of support holes are formed along the body edge; And the binding member is composed of a bolt body and a nut body so as to be supported on the front and rear surfaces of the plates through the support holes formed at the same positions formed in the plurality of plates.

A cylindrical bush of a steel material is mounted on the support holes of the plurality of plates, and the bolt body is formed with a spherical joint portion capable of contacting the inner circumferential surface of the bush on the outer circumferential surface of the body.

The front and rear plates constituting the plurality of plates are formed with front and rear extending portions projecting forward and rearward, and front and rear flanges are integrally formed at the ends of the front and rear extending portions.

At this time, front and rear fastening grooves are formed in the front flange and the rear flange of the rear flange, respectively, and front and rear fastening rings made of rubber are respectively mounted, and the front and rear flanges are fastened with a plurality of first bolts And the second fixing hole is formed to pass through.

The front and rear fixing brackets are integrally formed on the rim of the front and rear flanges, respectively; The front and rear fixing brackets are formed with front and rear fixing holes, and the front and rear fixing holes penetrate the long bolt, and the both ends of the long bolt are fastened with nuts.

In this case, the body of the long bolt located between the front and rear flanges is fitted with a spacer.

The bellows device according to the present invention can easily repeatedly assemble the plate and the sealing ring so that the plate and the sealing ring can be sequentially arranged and the shrinking and relaxing can be performed so as to correspond to the pressure fluctuation Not only can the function of the bellows be faithfully performed, but even if a pressure leak occurs, it is possible to replace some of the accessories, thereby reducing the maintenance cost.

In addition, the present invention can adjust the shrinkage and relaxation of the length, and when the vacuum chamber or the vacuum pump is connected to the vacuum pump, the length can be maintained in a contracted state, It is possible to improve the working efficiency at the time of installation.

In addition, the bellows device according to the present invention can be manufactured in various shapes such as hexagonal, octagonal, as well as circular, as well as rectangular in cross section, and thus can be widely applied to various fields.

1 is a perspective view illustrating a bellows device according to the present invention.
2 is a front view of a bellows device according to the present invention.
3 is a side view of a bellows device according to the present invention.
4 is a top view of a bellows device according to the present invention.
5 is an exploded view of the bellows device according to the present invention.
6 is a cross-sectional view showing a comparative comparison of the relaxed state of the bellows device according to the present invention.
7 is a cross-sectional view illustrating a contraction state of the bellows device according to the present invention.

Hereinafter, a bellows device according to the present invention will be described in detail with reference to the accompanying drawings.

The embodiments described in the present specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention and are not intended to represent all of the technical ideas of the present invention, It should be understood that water and variations may be present.

1 to 7, a bellows device 1 according to the present invention is characterized in that a channel 12 through which a gas can move is formed at the center of a plate-shaped body 11, A plurality of plates 10 continuously arranged with the ring grooves 13 and 14 facing each other with a predetermined distance therebetween and a plurality of grooves 13 and 14 formed in the ring grooves 13 and 14 of the plurality of plates 10 A plurality of sealing rings 20 and a binding member 30 for binding the plurality of plates 10 so as to prevent the plurality of plates 10 from being separated.

Hereinafter, the constitution of each part of the present invention will be described in detail.

The plate (10) is arranged so that a plurality of the plates (10) are arranged side by side so that both surfaces are closely arranged. The plate 10 is formed of a plate-like body 11, and a channel 12 through which gas such as various gases, air, and the like can move is formed at the center of the body 11.

In this case, the body 11 has a plate-like rectangular shape, but it can be formed into a polygonal shape such as a hexagon, an octagon or the like. Of course, although the channel 12 formed at the center of the body 11 is also a rectangular shape, it may be formed in a polygonal shape such as a hexagonal shape or an octagonal shape as well as a circular shape.

The plate 10 may be made of a variety of metals and non-ferrous metals such as stainless steel, aluminum, and copper, or may be made of plastic, depending on the application. The ring grooves 13 and 14 are formed. At this time, the ring grooves 13 and 14 are preferably formed on both sides of the body 11 of the plate 10 symmetrically so as to be positioned on the same line. Of course, the thickness of the plate 10 may also be formed to various thicknesses, for example, 5 to 50 mm.

On the other hand, the sealing ring 20 is preferably made of a rubber material having elasticity and has a circular cross section, but may have a rectangular or hexagonal cross section if necessary.

The depth of the ring grooves 13 and 14 formed along the edge of the body 11 of the plate 10 may be set to 1/4 to 1/3 of the thickness of the sealing ring 20, The width W1 of the ring grooves 13 and 14 is preferably 1.3 to 2 times the width of the sealing ring 20.

By forming the size ratio between the ring grooves 13 and 14 and the sealing ring 20 as described above, for example, the sealing ring 20 having a circular cross section is partially seated at the time of seating, and the two plates 10 The airtightness can be maintained even when the two plates 10 'and 10 "are in a relaxed state by inserting the sealing ring 20 into the ring grooves 13 and 14' When the two plates 10 'and 10 "are close to each other, the sealing ring 20 can be stably supported in the ring grooves 13 and 14' with a longer width in the width direction.

The plurality of plates 10 are bound to the edges of the body 11 by the binding members 30 so that they are prevented from being separated from each other.

To this end, a plurality of support holes 15 are formed along the edge of the body 11 of the plate 10, and a binding member 30 is inserted through the support hole 15.

At this time, the binding member 30 passes through the support holes 15 formed at the same positions formed in the plurality of plates 10, and the bolt member 32 is supported so as to be supported on the front and rear surfaces of the plates 10a and 10b. And a nut body (33). A columnar bush 16 made of a steel material is mounted on the support hole 15 of the plate 10 and the bolt body 32 is provided with a head 32b having a curved surface portion 32a on one side, And a spherical joint portion (34) capable of contacting the inner circumferential surface of the bush (16) is formed on the outer circumferential surface. Of course, the nut body 33 screwed to the end portion of the bolt body 32 has a curved surface portion 33a. The curved surface portion 32a is formed in the head 32b of the bolt body 32 and the curved surface portion 33a is formed in the nut body 33 so that the movement of the front end and the rear end plates 10a and 10b can be made more freely .

With this structure, it is possible to flexibly cope with the contraction of the pressure in the flow path 12 and the distortion of the plate 10 upon relaxation.

The number of application of the plate 10 and the sealing ring 20 according to the overall length of the bellows device 1 can be controlled. Therefore, in the case of the long bellows device 1, a larger number of plates 10 and sealing rings 20 can be used, and in this case, the length of the binding member 30 also becomes longer.

The front and rear extensions 40 and 50 extend forward and rearward from the front and rear plates 10a and 10b of the plurality of plates 10, 50 are integrally formed with the front and rear flanges 60,

In this case, the front and rear plates 10a and 10b are integrally formed by welding the front and rear extension parts 40 and 50 of the same material and the front and rear flanges 60 and 70 in order when the front and rear plates 10a and 10b are made of metal or non- And can be integrally injection-molded at the time of production by plastic.

The front and rear flanges 60 and 70 are used for connecting other vacuum devices (for example, connection between vacuum chambers, connection between a vacuum chamber and a vacuum pump) 2 devices 100 and 200, respectively.

In this case, front and rear contact grooves 62 and 72 are formed on the front surface of the front flange 60 and the rear edge of the rear flange 70, respectively, and front and rear rubber rings 63 and 73 are mounted , And a plurality of first and second fixing holes (64, 74) are formed through the front and rear flanges (60, 70). The front face of the front flange 60 and the rear face of the rear flange 70 are brought into close contact with each other between the vacuum chambers or between the first and second devices 100 and 200 such as the vacuum chamber and the vacuum pump, Can be connected to the first and second devices 100 and 200 through the first and second fixing holes 64 and 74, respectively.

The front and rear flanges 60 and 70 of the bellows device 1 according to the present invention are integrally provided with a plurality of front and rear fixing brackets 66 and 76 connected by a fastening member 80, do.

More specifically, the front and rear fixing brackets 66 and 76 are formed with front and rear fixing holes 66a and 76a, and the front and rear fixing holes 66a and 76a are used to connect the connecting member 80 And the spacing between the plates 10 before installation of the bellows device 1 can be adjusted by fastening the nuts 82 to both ends of the long bolt 81. [ The overall length of the bellows device 1 can be adjusted.

In this case, when the nut 82 is engaged with the long bolt 81, a spacer 83 is inserted into the body of the long bolt 81 positioned between the front and rear flanges 60, Loses. Therefore, it is possible to prevent the plates (10) from being very close to each other when the nut (82) is coupled to the long bolt (81).

The front and rear fixing brackets 66 and 76 are provided on both sides of the front and rear flanges 60 and 70. However, the front and rear fixing brackets 66 and 76 may be provided on the upper and lower sides of the front and rear flanges 60 and 70, The number of the front and rear fixing brackets 66 and 76 and the number of the thermal members 80 may vary depending on the overall size and length of the bellows device 1. [

Hereinafter, an operation example of the bellows device according to the present invention will be described with reference to FIG. 1 to FIG.

For example, after the first and second devices 100 and 200, which are vacuum devices such as a vacuum chamber and a vacuum pump, are installed at predetermined intervals in the front and rear fixing brackets 66 and 76, The device 1 can be mounted. In this case, the spacing between the vacuum chambers or between the large first and second devices 100, 200, such as the vacuum chamber and the vacuum pump, is generally difficult to precisely provide, so that the bellows device 1 according to the present invention can be used as the first and second When the plates 10 are inserted between the devices 100 and 200 in a compressed state and the nut 82 coupled to the long bolt 81 is gradually released, the shape of the sealing ring 20 is restored, (1) is loosened in the longitudinal direction and the front and rear faces of the front and rear flanges (60, 70) are brought into close contact with each other between the first and second devices (100, 200), and the fixing bolts (65, And the second fixing holes 64 and 74 to be connected to the first and second devices 100 and 200.

When the vacuum is formed between the first and second devices 100 and 200 after the installation, the plurality of plates 10 are brought into close contact with each other, and when the circular ring is in the circular shape, the ring grooves 13 and 14 ' The sealing ring 20 is pushed in the direction of the width W1 of the ring grooves 13 and 14 'while being close to each other so that the end surface is deformed into an elliptical shape and the edges of the plurality of plates 10 are further sealed, It can be stably maintained.

In this case, the plurality of plates 10 can be pivoted not only in the longitudinal direction but also in the vertical direction, but the stable state of support can be maintained by the binding member 30.

On the other hand, when some plates and the sealing ring 20 are broken, the binding member 30 and the connecting member 80 are simply released and the plate 10 and the sealing ring 20 at the portion where leakage occurs are separated And the coupling member 80 is fastened to the coupling member 30 again, so that the maintenance work can be performed quickly while minimizing the maintenance area.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, Various modifications may be made by those skilled in the art.

1: Bellows device 10: Plate
20: sealing ring 30: binding member
40: front extension part 50: rear extension part
60: front flange 70: rear flange
80:

Claims

A channel 12 through which gas can move is formed at the center of the plate-shaped body 11 and ring grooves 13 and 14 are formed opposite to each other along the both side edges of the body 11, A plurality of sealing rings (20) sandwiched in ring grooves (13, 14) of the plurality of plates (10) so as to maintain airtightness, and a plurality of plates (10) And a binding member (30) for binding the plurality of plates (10)
The plurality of plates 10 is formed with a channel 12 through which a gas can move in the center of the plate-like body 11, and a plurality of support holes 15 are formed along the edges of the body 11;
The binding member 30 is provided with bolt bodies 32 and 32 so that the binding members 30 can be supported on the front and rear plates 10a and 10b through the support holes 15 formed at the same positions formed in the plurality of plates 10, And a nut body (33).

The method according to claim 1,
A cylindrical bush 16 made of a steel material is mounted on the support hole 15 of the plurality of plates 10. The bolt body 32 has a spherical shape capable of contacting the inner peripheral surface of the bush 16, Wherein a joint portion (34) on the bellows is formed.

The method according to claim 1,
Front and rear extension portions 40 and 50 protruding forward and rearward extend from the front and rear plates 10a and 10b constituting the plurality of plates 10 and the front and rear extension portions 40 and 50 are extended, 50) are integrally formed with the front and rear flanges (60, 70).

The method of claim 3,
Front and rear contact grooves 62 and 72 are formed on the front surface of the front flange 60 and the rear surface of the rear flange 70 to mount front and rear rubber rings 63 and 73, Wherein a plurality of first and second fixing holes (64, 74) through which the fixing bolts (65, 75) are fastened are formed through the front and rear flanges (60, 70).

The method of claim 3,
Front and rear fixing brackets (66, 76) are integrally provided on the rim of the front and rear flanges (60, 70), respectively;
Front and rear fixing holes 66a and 76a are formed in the front and rear fixing brackets 66 and 76. Long bolts 81 are passed through the front and rear fixing holes 66a and 76a, And a nut (82) is fastened to both ends of the bellows (81).

6. The method of claim 5,
Characterized in that a spacer (83) is fitted in the body of the long bolt (81) located between the front and rear flanges (60, 70).

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