KR101673773B1 - Apparatus for photosensitive resin coating - Google Patents

Apparatus for photosensitive resin coating Download PDF

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Publication number
KR101673773B1
KR101673773B1 KR1020150075938A KR20150075938A KR101673773B1 KR 101673773 B1 KR101673773 B1 KR 101673773B1 KR 1020150075938 A KR1020150075938 A KR 1020150075938A KR 20150075938 A KR20150075938 A KR 20150075938A KR 101673773 B1 KR101673773 B1 KR 101673773B1
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KR
South Korea
Prior art keywords
roller
photosensitive resin
driving unit
controls
nozzle
Prior art date
Application number
KR1020150075938A
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Korean (ko)
Inventor
조명우
하석재
김기범
김병찬
조용규
송기혁
Original Assignee
인하대학교 산학협력단
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Priority to KR1020150075938A priority Critical patent/KR101673773B1/en
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Publication of KR101673773B1 publication Critical patent/KR101673773B1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The present invention relates to a photosensitive resin coating apparatus for forming a photosensitive resin layer on a surface of a roller, comprising: a first driving unit connected on a center axis of the roller to rotate the roller; A nozzle for supplying the photosensitive resin to the surface of the roller; A second driving unit for causing the nozzle to reciprocate in parallel with the center axis of the roller; And a control unit for counting the first to fifth times and controlling the operation of the nozzle, the first and second driving units during the first to fifth times.
In the present invention, after a photosensitive resin is applied to the surface of a roller, the roller is rotated at a predetermined speed for a predetermined time to form a uniform photosensitive resin layer on the surface of the roller.

Description

[0001] Apparatus for photosensitive resin coating [0002]

The present invention relates to a photosensitive resin coating apparatus, and more particularly, to a photosensitive resin coating apparatus capable of uniformly forming a photosensitive resin layer on a surface of a roller used for pattern formation using an exposure process.

Various methods are used to form a pattern on the surface of a light guide plate, a substrate, and the like.

When a pattern is formed using a conventional tool (such as a cutter), there is a limit to a pattern that can be produced depending on the size of the tool. In addition, if the size of the pattern to be manufactured becomes finer, the production time is increased and the productivity is lowered.

In order to solve the above problems, a method of forming a pattern on the surface of a roll by using a lithography process and printing it on a predetermined substrate has been disclosed. At this time, a photosensitive resin layer is formed on the surface of the roll on which the pattern is formed for performing the exposure process.

The photosensitive resin layer on the roll surface can be formed as follows.

There is a method in which rolls for forming photosensitive resin layers and rolls for resin coating work are prepared and brought into contact with each other in a roll to roll manner so that a photosensitive resin layer is formed on the roll surface to be formed with the photosensitive resin layer.

There is also a method of preparing a resin-coated sheet on which a roll of a photosensitive resin layer is to be formed and a resin, followed by bringing the roll and the sheet into contact with each other to form a resin layer on the surface of the roll to be formed of the photosensitive resin layer.

When the photosensitive resin layer is formed on the surface of the roll in the same manner as described above, the roll or sheet for resin coating work must be changed according to the size of the roll to be formed with the photosensitive resin layer. However, This is not easy.

Prior arts of the present invention can be exemplified by the patents of Japanese Patent Application No. 2002-0067242 and No. 10-0976808.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide an image forming apparatus in which a photosensitive resin is applied to the surface of a roller used for forming a pattern using an exposure process and the number of revolutions of the roller is controlled in the order of acceleration, And it is an object of the present invention to provide a photosensitive resin coating apparatus which forms a uniform photosensitive resin layer on the surface of a roller.

According to an aspect of the present invention, there is provided a photosensitive resin coating apparatus for forming a photosensitive resin layer on a surface of a roller, comprising: a first driving unit connected on a center axis of the roller to rotate the roller; A nozzle for supplying the photosensitive resin to the surface of the roller; A second driving unit for causing the nozzle to reciprocate in parallel with the center axis of the roller; And a control unit for counting the first to fifth times and controlling the operation of the nozzle, the first and second driving units during the first to fifth times.

The nozzle includes a nozzle body having a resin inlet port through which the photosensitive resin flows in at one end thereof and a resin outlet port through which the photosensitive resin is discharged at the other end thereof, A screw that is disposed inside the nozzle body and applies pressure to the introduced photosensitive resin toward the resin discharge port at the resin inlet port and a motor that provides power to rotate the screw.

The controller may cause the roller to operate at the first rotation speed and the second rotation speed.

The first rotation number may be 500 rpm, and the second rotation number may be 3000 rpm.

Wherein the control unit controls the first driving unit such that the number of revolutions of the roller reaches the first number of revolutions during the first time period and controls the second driving unit to be in a rest state, Controls the motor so that the photosensitive resin is discharged in a fixed amount through a discharge port, controls the first driving unit such that the roller operates at a first rotational speed, controls the second driving unit such that the nozzle reciprocates, The controller controls the motor and the second driving unit to be in a dormant state for 3 hours and controls the first driving unit such that the rotation number of the roller is increased from the first rotation number to the second rotation number, Controls the first driving unit such that the number of revolutions of the roller is maintained at the second number of revolutions, and during the fifth time period, the number of revolutions of the roller is reduced to zero at the second number of revolutions It is possible to control the first drive unit.

In the present invention as described above, a photosensitive resin is applied to the surface of a roller used for forming a pattern using an exposure process, and the number of revolutions of the roller is controlled in the order of acceleration, Thereby forming a photosensitive resin layer.

1 is a view showing an example of a configuration of a photosensitive resin coating apparatus according to an embodiment of the present invention.
2 is a graph showing an example of the operation control of the roller by the control unit used in the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view showing an example of a configuration of a photosensitive resin coating apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a photosensitive resin coating apparatus 100 according to an embodiment of the present invention includes a first driving unit 120, a nozzle 130, a second driving unit 140, and a controller 160.

The roller 110, which is an object of the work in which the photosensitive resin layer is formed, is cylindrical in shape with a predetermined diameter and length and is configured to be rotatable with respect to the central axis.

The first driving unit 120 allows the roller 110 to rotate at a predetermined speed. The driving shaft of the first driving part 120 is connected to the central axis of the roller 110. At this time, the driving shaft of the first driving part 120 may be connected directly to the central axis of the roller 110 or via a gear box having a predetermined gear ratio.

The rotation speed of the first driving unit 120 can be changed by the control of the controller 160, which will be described later. Here, the first driving unit 120 causes the roller 110 to operate at the first and second rotational speeds R1 and R2. Here, the first rotation speed R1 is the number of revolutions that causes the resin to be uniformly applied to the surface of the roller 110, and the second rotation speed R2 is the number of revolutions that causes the applied resin to be diffused to a uniform thickness.

In this embodiment, the first rotation speed R1 may be set to 500 rpm, and the second rotation speed R2 may be set to 3000 rpm. The first rotation speed R1 and the second rotation speed R2 can be changed according to the diameter of the roller, the type of resin, and the like. In the present embodiment, the first driving unit 120 causes the roller 110 to operate with the first and second rotations R1 and R2, but the control rotation speed is set to be more than .

The nozzle 130 supplies the photosensitive resin to the surface of the roller 110 to form a photosensitive resin layer on the surface of the roller 110.

The nozzle 130 includes a nozzle body 134, a screw 136, and a motor M.

The nozzle body 134 has a predetermined diameter and length and provides space therein. In the present embodiment, the nozzle body 134 is cylindrical, but may be of various shapes according to the needs of the user.

One end of the nozzle body 134 is connected to a photosensitive resin reservoir (not shown), and a resin inlet 131 is formed to allow the photosensitive resin to flow inward. A resin discharge port 132 through which the photosensitive resin is discharged toward the roller 110 is disposed at the other end of the nozzle body 134.

The other end of the nozzle body 134 in which the resin discharge port 132 is disposed is preferably a tapered shape whose diameter decreases toward the end portion as shown in the figure.

The screw 136 is rotatably disposed inside the nozzle body 134. The screw 136 is formed to have a predetermined diameter and length, and a thread is formed on the outer circumferential surface. The rotation center axis of the screw 136 is preferably aligned with the central axis of the nozzle body 134.

When the screw 136 rotates, the screw 136 applies pressure to the resin discharge port 132 side from the resin inlet 131 with respect to the photosensitive resin so that the photosensitive resin can be discharged in a fixed amount from the resin discharge port 132. The nozzle using a screw makes it easier to dispense a high viscosity fluid such as a photosensitive resin in a fixed quantity compared with a nozzle using a piston.

A driving shaft of the motor M is connected to the rotating shaft of the screw 136 so that the screw 136 can rotate at a predetermined speed. The motor M may be disposed inside or outside the nozzle body 134 according to the needs of the user.

The operation of the motor M is controlled by a control unit 160, which will be described later. That is, the controller 160 can change the operation of the motor M in accordance with the viscosity of the supplied resin, the diameter of the resin discharge port, and the like.

The second driving unit 140 allows the nozzle 130 to move along the surface of the roller 110. At this time, the second driving unit 140 moves the nozzle 130 in parallel with the central axis of the roller 110.

The second driving unit 140 moves the nozzle 130 from one end of the roller 110 to the other end so that when the roller 130 reaches the other end of the roller 110,

The operation of the first driving unit 120 and the second driving unit 140 is controlled by a control unit 160, which will be described later.

The control unit 160 counts a predetermined time and controls the operations of the motor M, the first driving unit 120, and the second driving unit 140 for the counted time.

This will be described in more detail.

2 is a graph showing an example of the operation control of the roller by the control unit used in the present invention.

Referring to FIG. 2, the controller 160 counts the first through fifth times t1, t2, t3, t4, and t5 and outputs the first through fifth times t1, t2, t3, t4, And controls the motor M and the first and second driving units 120 and 140 as follows.

Here, the first to fifth times (t1, t2, t3, t4, t5) are previously set on the control unit 160. [ Each of the first to fifth times t1, t2, t3, t4 and t5 is set to a predetermined time such as 5 seconds or 10 seconds according to the user's needs. However, , The size of the roller, and the like.

The control unit 160 performs control as follows.

The control unit 160 counts the first time t1. While the first time t1 is being counted, the controller 160 controls the first driving unit 120 so that the number of rotations of the roller 110 reaches 0 to the first rotation number R1. Meanwhile, the motor M and the second driving unit 140 are kept in a rest state.

The coefficient of the first time t1 starts with the start of operation of the apparatus according to the present invention and ends when the number of rotations of the roller 110 reaches zero at the first rotation speed R1.

When the coefficient of the first time t1 is ended, the coefficient of the second time t2 is started.

The control unit 160 counts the second time t2. While the second time t2 is being counted, the controller 160 causes the motor M to operate so that the photosensitive resin is discharged in a fixed amount from the nozzle 130.

The control unit 160 controls the first driving unit 120 so that the number of rotations of the roller 110 is maintained at the first rotation speed R1 and moves the nozzle 130 in parallel with the center axis of the roller 110 The second driving unit 140 is controlled. The control unit 160 controls the second driving unit 140 such that the nozzle 130 reaches the other end of the roller 110 when the nozzle 130 reaches one end of the roller 110.

The coefficient of the second time t2 is performed during the supply of the photosensitive resin over the entire surface of the roller 110. [

When the coefficient of the second time t2 is ended, the coefficient of the third time t3 is started.

The controller 160 counts the third time t3. While the third time t3 is being counted, the controller 160 stops the operation of the motor M so that the supply of the photosensitive resin through the nozzle 130 is stopped. The control unit 160 controls the first driving unit 120 such that the number of rotations of the roller 110 increases from the first rotation number R1 to the second rotation number R2. In addition, the controller 160 controls the second driver 140 to stop the movement of the roller 110.

The coefficient of the third time t3 lasts while the number of rotations of the roller 110 is increased from the first number of rotations R1 to the second number of rotations R2.

When the coefficient of the third time t3 is ended, the coefficient of the fourth time t4 is started.

The controller 160 counts the fourth time t4. While the fourth time t4 is being counted, the controller 160 controls the operations of the motor M and the second driving unit 140 to be stopped. The control unit 160 controls the first driving unit 120 so that the roller 110 maintains the second rotation speed R2.

The thickness of the photosensitive resin applied to the surface of the roller 110 can be made constant by the centrifugal force of the roller 110 while the roller 110 maintains the second rotation speed R2.

The coefficient of the fourth time t4 lasts while the photosensitive resin supplied to the surface of the roller 110 forms a uniform layer. The fourth time t4 may be changed depending on the viscosity of the resin used and the like. The fourth time t4 is set to a predetermined time by the user.

When the coefficient of the fourth time t4 is ended, the coefficient of the fifth time t5 is started.

The controller 160 counts the fifth time t5. While the fifth time t5 is being counted, the control unit 160 maintains the motor M and the second driving unit 140 in a stopped state. The control unit 160 controls the first driving unit 120 so that the number of rotations of the roller 110 is reduced from the second rotation number R2 to zero.

The coefficient of the fifth time t5 is performed until the number of rotations of the roller 110 becomes zero at the second number of rotations R2.

According to the present invention configured as described above, after the photosensitive resin is applied to the surface of the roller, the roller is rotated at a predetermined speed for a predetermined time so that a uniform photosensitive resin layer is formed on the surface of the roller.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

100: photosensitive resin coating device
110: roller 120: first driving part
130: nozzle 140: second driving part
160:
t1, t2, t3, t4, t5: first time, second time, third time, fourth time, fifth time
R1: first rotation number R2: second rotation number

Claims (5)

A photosensitive resin coating apparatus for forming a photosensitive resin layer on a surface of a roller,
A first driving unit connected on the center axis of the roller to rotate the roller;
A resin inlet port through which the photosensitive resin is introduced and a resin outlet through which the photosensitive resin is discharged are disposed at one end and a space is provided at the inside of the resin outlet port; And a motor for supplying power to rotate the screw, the photosensitive resin being disposed on the surface of the roller, the photosensitive resin being disposed on the surface of the roller, A nozzle for supplying the nozzle;
A second driving unit for causing the nozzle to reciprocate in parallel with the center axis of the roller;
Counting the first to fifth times and controlling the operation of the nozzle, the first and second driving units during the first to fifth times so that the roller is operated at the first rotation speed and the second rotation speed And a control unit,
Wherein,
The controller controls the first driving unit such that the number of revolutions of the roller reaches the first number of revolutions during the first time period,
Controls the motor so that the photosensitive resin is discharged in a fixed quantity through the resin discharge port during the second time period, and controls the first driving part such that the roller operates at the first rotation speed, 2 driving unit,
Controls the motor and the second driving unit to be in a rest state during the third time period and controls the first driving unit such that the rotation number of the roller is increased from the first rotation number to the second rotation number,
Controls the first driving unit such that the rotation number of the roller is maintained at the second rotation number during the fourth time,
And controls the first driving unit such that the number of revolutions of the roller is reduced to zero at the second number of revolutions during the fifth time period.

delete delete The method according to claim 1,
The first rotation number is 500 rpm,
And the second rotation number is 3000 rpm.
delete
KR1020150075938A 2015-05-29 2015-05-29 Apparatus for photosensitive resin coating KR101673773B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150075938A KR101673773B1 (en) 2015-05-29 2015-05-29 Apparatus for photosensitive resin coating

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Application Number Priority Date Filing Date Title
KR1020150075938A KR101673773B1 (en) 2015-05-29 2015-05-29 Apparatus for photosensitive resin coating

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KR101673773B1 true KR101673773B1 (en) 2016-11-09

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007271951A (en) * 2006-03-31 2007-10-18 Kyocera Mita Corp Developing device and image forming apparatus
JP2007275749A (en) * 2006-04-05 2007-10-25 Kaneka Corp Method for manufacturing resin roller, and coater of resin liquid for forming resin layer equipped with the manufacturing method
KR20110044141A (en) * 2009-10-22 2011-04-28 도쿄엘렉트론가부시키가이샤 Priming method and priming apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007271951A (en) * 2006-03-31 2007-10-18 Kyocera Mita Corp Developing device and image forming apparatus
JP2007275749A (en) * 2006-04-05 2007-10-25 Kaneka Corp Method for manufacturing resin roller, and coater of resin liquid for forming resin layer equipped with the manufacturing method
KR20110044141A (en) * 2009-10-22 2011-04-28 도쿄엘렉트론가부시키가이샤 Priming method and priming apparatus

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