KR101663039B1 - Internal Coaxial Optical System with Beam Splitter of Hemisphere Prism Type - Google Patents
Internal Coaxial Optical System with Beam Splitter of Hemisphere Prism Type Download PDFInfo
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- KR101663039B1 KR101663039B1 KR1020160074994A KR20160074994A KR101663039B1 KR 101663039 B1 KR101663039 B1 KR 101663039B1 KR 1020160074994 A KR1020160074994 A KR 1020160074994A KR 20160074994 A KR20160074994 A KR 20160074994A KR 101663039 B1 KR101663039 B1 KR 101663039B1
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- prism
- light
- beam splitter
- reflected
- hemispherical
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
- G02B27/0983—Reflective elements being curved
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/141—Beam splitting or combining systems operating by reflection only using dichroic mirrors
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Abstract
The inner coaxial optical system of the present invention forms an image of a sample by using a phenomenon of optical reflection or refraction on the sensor surface. Light incident from the illumination is incident on the same line as the optical axis of the lens, And an illuminating unit for illuminating the sample. 40 to 60% of the light irradiated from the illumination unit is reflected and sent to the sample, the remaining 40 to 60% of the light is transmitted, 40 to 60% of the light reflected by the sample is transmitted, A beam splitter portion having a reflecting surface for reflecting; A telecentric lens unit in which the beam splitter unit is installed at the center and all the principal rays are parallel to the optical axis of the lens in the sample space and the upper space; And a sensor portion provided at a rear end of the upper spatial lens portion and having a sensor surface passing through the telecentric lens portion to form an image of the sample, wherein a lower surface of the beam splitter portion is a light beam passing through a balsam surface of the beam splitter portion The light transmitted through the bosensurface of the light reflected by the interface is converged at a predetermined position and is diverged so as to be reflected by the bossurface of the beam splitter portion again by the reflection at the lower interface, Is a hemispherical shape having a radius of curvature of a predetermined length so that light reflected by the sensor surface can be converged and dispersed in front of the sensor surface.
According to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention, when only the lower hemispherical prism of the beam splitter unit is hemispherical, the ratio of the misfit due to the internal reflection can be reduced from 6% to about 4% When the hemispherical shape of the lower hemispherical prism and the hemispherical prism of the beam splitter is made hemispherical, the ratio of the misfit light can be reduced from 6% to 1.8%, thereby reducing the light flux of about 70% Can be obtained.
Description
More particularly, the present invention relates to an internal coaxial optical system, and more particularly, to an optical coherent optical system that forms an image of a sample using a phenomenon of optical reflection or refraction on a camera sensor surface, In order to reduce the amount of light that is reflected by the beam splitter in the inner coaxial optical system, which is reflected by the beam splitter, by the reflection at the lower interface and the left interface, And an inner coaxial optical system having a hemispherical prism beam splitter having a hemispherical shape so that the reflected light is converged and dispersed.
The inner coaxial optical system makes the image of the sample by using the phenomenon of optical reflection and refraction on the writing surface of the camera, and the light incident from the light is incident on the same line as the optical axis of the lens, It is an optical system that makes it possible to see a character or a specimen that is reflected. Therefore, a telecentric optical system should be included.
Coaxial means that incident light is incident on the same axis, so that light incident from the light is incident on the same line as the optical axis of the lens, so that when a character or a reflecting object on the upper side of the sample is viewed And it is possible to acquire an image of the top surface of the can not be seen when using 1-2 backlight.
A telecentric optical system will be briefly described below.
The telecentric optical system refers to an optical system in which an entrance pupil and an exit pupil are at an infinite distance. This is realized by placing the aperture stop in an image space, a water space focal plane or a position conjugate to it. All main rays travel in parallel to the axis as they are in the water space or above. Therefore, even when there is an error in the setting of the object surface or the selection of the upper surface, there is an advantage that the error of the size of the image taken or measured can be reduced. Therefore, it is used in an optical system such as a profile projector or an object size measuring machine.
Wherein the inner coaxial optical system receives the light of the illumination unit through the beam splitting unit so as to form an image of the sample. The inner coaxial optical system includes a sample space lens unit installed in a sample space on the left side of the beam splitter unit, And a telecentric lens portion in which all the principal rays are parallel to the optical axis of the lens in the sample space and the upper space.
The internal coaxial optical system has a problem in that after the misfit due to the internal reflection in the beam splitter is drawn into the sensor unit and the image formed on the sensor unit is unclear, post-processing such as contrast is required to be improved.
In the conventional inner coaxial optical system, as shown in FIG. 2, when the beam is irradiated with 100 light in the illumination part, the reflectance of the beam splitter is 50%, the internal reflectance is 0.3%, and the sample reflectance is 10% And 50 is transmitted. The amount of transmitted 50 light is reflected by the internal reflection of 0.15, 0.075 is reflected from the reflection surface of the beam splitter, and 0.0748 is entered into the sensor portion considering the transmittance of 99.7%.
In addition, the amount of light directed to the sample is 50%, which is reflected by the internal reflection of 0.15, passes through the reflection surface of the beam splitter again, passes only 50%, passes through 0.075 and has an internal reflectance of 0.3% 0.0748 is introduced into the sensor unit.
The amount of light directed to the sample is 99.7%, which is 99.7%, 49.85 is incident on the sample, and the reflectance of the sample is 10%, so the light amount of 4.99 is reflected. When the beam is transmitted again through the beam splitter, the transmittance is 99.7% 50% is transmitted through the beam splitter's reflecting surface, and 2.49 is directed toward the precursor, and 99.7% of the beam splitter's interface is subtracted from the inner reflectance of 0.3%. As a result, the amount of light reflected to the sample finally reaches 2.48.
As a result, the amount of light input to the camera sensor is 2.48 and the amount of light is 0.15, which is 6.03%, and the phase is not clear.
The present invention is to disperse light of 0.0748 which is transmitted through the bosil surface of a beam splitter and reflected light at the interface by reflection at the interface portion to such a degree as to be annihilated by convergence divergence so as to reduce the amount of light by about 70% .
According to an aspect of the present invention, there is provided a beam splitter including a beam splitter and a beam splitter, the beam splitter including a beam splitter, And a hemispherical prism beam splitter having a hemispherical shape having a radius of curvature of a predetermined length so as to be converged and dispersed in front of the sensor surface.
The inner coaxial optical system of the present invention forms an image of a sample by using a phenomenon of optical reflection or refraction on the sensor surface. Light incident from the illumination is incident on the same line as the optical axis of the lens, The illumination unit being capable of illuminating the sample; 40 to 60% of the light irradiated from the illumination unit is reflected and sent to the sample, the remaining 40 to 60% of the light is transmitted, and 40 to 60% of the light reflected by the sample is transmitted A beam slitter part having a balancing surface for reflecting the remaining 40 to 60% of light; The beam splitter unit is installed at the center of the beam splitter unit to receive the light of the illumination unit through the beam splitting unit so as to form an image of the sample. The beam splitter unit includes a sample space lens unit installed in the sample space on the left side of the beam splitter unit, A telecentric lens part in which all the principal rays are parallel to the optical axis of the lens in the sample space and the upper space; And a sensor portion provided at a rear end of the upper spatial lens portion and having a sensor surface passing through the telecentric lens portion to form an image of the sample.
The lower surface of the beam splitter portion is provided with a beam splitter portion for reflecting light reflected from a boundary surface of the beam splitter portion to reflect light reflected from the lower surface of the beam splitter portion, The light transmitted through the balsamic surface converges at a predetermined position and is emitted in a hemispherical shape having a radius of curvature of a predetermined length so that light reflected on the balsam surface can be diverged after being converged at the front of the sensor surface .
The left side surface (sample direction) of the beam splitter unit is configured so that the light reflected from the bodysurface of the beam splitter unit is again transmitted through the bodysurface of the beam splitter unit by the reflection at the left interface, The light reflected from the balsam surface converges at a predetermined position and is diverged. In order to allow the light transmitted through the balsillary surface to converge at the front of the sensor surface and then be diverged and dispersed, And has a hemispherical shape having a radius of curvature.
The cubic prism having a cubic prism shape in which the bulging portion is formed and 40 to 60% of light is transmitted and the remaining 40 to 60% is reflected; And a lower hemispherical prism having a radius of curvature of a predetermined length for generating convergent light emitted from a predetermined point forward of the sensor surface and dispersing the light, the light being internally reflected from the light passing through the cubic prism, .
The cubic prism is divided into upper diagonal lines from the upper right corner to the lower left corner, It consists of a lower prism at the bottom, separated diagonally from the top right corner to the bottom left corner.
The lower prism and the lower hemispherical prism are integral.
The upper prism and the left hemispherical prism are integral.
Reflective and transmissive materials are coated on the lower surface of the upper prism and the upper surface of the lower prism to form the balsam surface.
The lower surface of the upper prism and the upper surface of the lower prism are bonded with a UV adhesive.
All of the outer surfaces of the
The problems to be solved by the present invention can be solved by the internal coaxial optical system described above.
According to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention, when only the lower hemispherical prism of the beam splitter unit is hemispherical, the ratio of the misfit due to the internal reflection can be reduced from 6% to about 4% When the hemispherical shape of the lower hemispherical prism and the hemispherical prism of the beam splitter is made hemispherical, the ratio of the misfit light can be reduced from 6% to 1.8%, thereby reducing the light flux of about 70% Can be obtained.
FIG. 1 is a diagram illustrating a coaxial-use image and a backlight-
2 is a graph showing the relationship between the ratio
3 is an overall schematic view of a first embodiment of an inner coaxial optical system having a hemispherical prism beam splitter of the present invention
4 is a schematic view of an entire second embodiment of an internal coaxial optical system having a hemispherical prism beam splitter of the present invention
FIG. 5 is a schematic diagram of a first embodiment optical path according to an inner coaxial optical system having a hemispherical prism beam splitter of the present invention.
FIG. 6 is a schematic view of a second embodiment optical path according to an inner coaxial optical system having a hemispherical prism beam splitter of the present invention.
7 is a perspective view of the beam splitter when the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is the complete hemisphere of the first embodiment (when the radius of curvature is short)
8 is a schematic view of a beam splitter when the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is the complete hemisphere of the first embodiment (when the radius of curvature is short)
9 is a perspective view of the beam splitter when the radius of curvature of the first embodiment of the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is long
10 is a schematic view of a beam splitter when the radius of curvature of the first embodiment of the lower hemispherical prism according to the inner coaxial optical system with the hemispherical prism beam splitter of the present invention is long
11 is a perspective view of the beam splitter when the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is the complete hemisphere of the second embodiment (when the radius of curvature is short)
12 is a schematic view of a beam splitter when the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is the complete hemisphere of the second embodiment (when the radius of curvature is short)
13 is a perspective view of the beam splitter when the radius of curvature of the second embodiment of the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is long
14 is a schematic view of a beam splitter when the radius of curvature of the second embodiment of the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is long
15 shows an example of the path of light in the concave mirror
16 is a view for explaining a convergence divergence of a light beam due to a light path and internal reflection in a beam splitter according to an inner coaxial optical system having a hemispherical prism beam splitter of the present invention
Fig. 17 is a graph showing the relationship between the first embodiment of the present invention
FIG. 18 is a graph showing the second embodiment of the present invention,
19 shows the lens reflectance of the AR coated surface and the lens reflectance of the uncoated surface to be applied to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.
The term "inner coaxial optical system having a hemispherical prism beam splitter " in accordance with the present invention can be used as the term " inner coaxial optical system having a hemispherical prism beam splitter" according to the present invention because the terms described below are defined in consideration of functions in the present invention, The present invention is not limited to these embodiments.
Hereinafter, a preferred embodiment of the "inner coaxial optical system having a hemispherical prism beam splitter" according to the present invention will be described in detail.
The following examples are merely illustrative of the present invention and are not intended to limit the scope of the present invention.
FIG. 2 is a perspective view of a conventional coaxial optical system, and FIG. 3 is a perspective view of a first embodiment of an inner coaxial optical system having a hemispherical prism beam splitter of the present invention FIG. 4 is an overall schematic view of a second embodiment of an inner coaxial optical system having a hemispherical prism beam splitter of the present invention, and FIG. 5 is a schematic view of an inner coaxial optical system having a hemispherical prism beam splitter of the present invention, And FIG. 6 is a second embodiment optical path according to an inner coaxial optical system having a hemispherical prism beam splitter of the present invention, and FIG. 7 is a view showing an optical path of the lower hemispherical prism according to an inner coaxial optical system having the hemispherical prism beam splitter of the present invention Fig. 8 is a perspective view of a beam splitter in the full hemisphere of one embodiment (when the radius of curvature is short), and Fig. 8 is a perspective view of the inside of the hemispherical prism beam splitter of the present invention 9 is a schematic view of a beam splitter when the lower hemispherical prism according to the axial optical system is the complete hemisphere of the first embodiment (when the radius of curvature is short), and Fig. 9 is a schematic view of the lower hemispherical prism according to the inner co- Fig. 10 is a perspective view of the beam splitter when the radius of curvature of the first embodiment of the present invention is long. Fig. 10 is a view of the beam splitter of the first embodiment of the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention, 11 is a perspective view of the beam splitter when the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is the complete hemisphere of the second embodiment (when the radius of curvature is short), and Fig. When the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is the complete hemisphere of the second embodiment (when the radius of curvature is short) 13 is a perspective view of the beam splitter when the radius of curvature of the second embodiment of the lower hemispherical prism according to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention is long, 15 is a schematic diagram of a beam splitter when the radius of curvature of the second embodiment of the lower hemispherical prism according to the second embodiment of the inner coaxial optical system having the prism beam splitter is long, FIG. 15 is an example of the path of light in the concave mirror, FIG. 17 is an explanatory diagram of a convergence divergence of a light path in a beam splitter and an interference due to internal reflection according to an internal coaxial optical system having a prism beam splitter, and FIG. 17 is a cross- FIG. 18 is a second embodiment of the light-to-noise ratio according to the internal coaxial optical system having the hemispherical prism beam splitter of the present invention, and FIG. 19 Lens reflectance of the AR coating surface to be applied to the internal coaxial optical system having a semi-spherical prism beam splitter of the invention and a reflectance of the lens compared to non-coated surface.
As shown in Fig. 3, the inner coaxial optical system A of the first embodiment of the present invention forms an image of a sample by using a phenomenon such as optical reflection or refraction on the
The internal coaxial optical system (A) of the first embodiment comprises: an illumination unit (1) for illuminating a sample with illumination; 40 to 60% of the light irradiated from the illumination unit 1 is reflected to the sample, and the remaining 40 to 60% of the light is transmitted through the illumination unit 1, A
The reflectance and transmittance of the
The lower surface of the
The
The illuminating unit 1 may emit the entire surface of the sample with a balanced light beam.
The illumination unit 1 includes an LED light source unit for emitting light in order to supply light; A condensing lens unit for condensing the light emitted from the LED light source unit in a small solid angle and forming an image on the lower side; An illumination uniformizing filter unit that uniformizes an intensity profile of light passing through the condenser lens unit; A field stop unit for focusing the light condensed by the condensing lens unit and adjusting the periphery of the field of view to prevent the reflected light and unnecessary light from entering, thereby efficiently removing the flare; And a condenser lens unit which is located at a focal distance of the field stop unit and allows the light emitted from the image formed on the field stop to be a flat light beam to illuminate the entire surface of the sample.
The smoothing filter used in the lighting uniformizing filter unit may include an apodizing filter that partially blocks the light passing through the central portion of the circular shape and allows all the light passing through the outer periphery of the circular portion to pass therethrough to evenly pass the light, (Neutral Density Filter) that uniformly reduces the amount of incident light over the propagation wavelength band without changing the spectral composition of the incident light.
The
After convergence, the amount of noise is reduced by about 70%, and the overall amount of light is reduced by 35%.
As shown in Fig. 4, the inner coaxial optical system A of the second embodiment of the present invention forms an image of a sample on the
The inner coaxial optical system (A) of the second embodiment includes an illumination unit (1) for illuminating the sample with illumination; 40 to 60% of the light irradiated from the illumination unit 1 is reflected to the sample, and the remaining 40 to 60% of the light is transmitted through the illumination unit 1, A
The reflectance and transmittance of the
The lower surface of the
The light reflected from the
The
In designing the
The
In summary, since the light transmitted through the
As shown in FIGS. 5 and 6, the light path of the illumination of the inner coaxial optical system A is such that 40 to 60% of the light beam of the illumination unit 1 is reflected by the
However, in the description of the embodiment, the reflectance and the transmittance are respectively 50%.
At this time, 50% of the light transmitted through the 50% light reflected by the sample side is transmitted through the interface (outer surface of the beam splitter part), and when the anti reflection coating is applied, the internal reflectance is 0.3 %, And when light passes through the uncoated glass surface, about 4% of light is reflected at each interface, and when it is incident on the
When light is incident on the object surface, ie, the sample, about 10% of the light is reflected, and the sample reflectance is about 10%.
In the inner coaxial optical system (A) of the present invention, parallelly illuminated light is incident on the camera in parallel because the telecentric property of the object plane is parallel to the optical axis, reflected from the sample, And all of the principal ray moves parallel to the optical axis of the lens in the sample space and the upper space. Because of this, the internal coaxial illumination can only be used in telecentric optics
7 and 8 show an example A of the
The
The
However, in the description of the embodiment, the reflectance and the transmittance are respectively 50%.
The
The
The bottom surface of the
The lower surface of the
All surfaces of the
The core of the first embodiment A of the present invention is that since the lower
9 and 10 illustrate a
The
The
However, in the description of the embodiment, the reflectance and the transmittance are respectively 50%.
The
The
The bottom surface of the
The lower surface of the
All surfaces of the
In the first embodiment B of the present invention, since the lower
FIGS. 11 and 12 are views showing an example of the second embodiment of the
The
The
However, in the description of the embodiment, the reflectance and the transmittance are respectively 50%.
The
The
The
The bottom surface of the
The lower surface of the
All the outer surfaces of the
The core of the second embodiment A of the present invention is that since the lower
The light transmitted through the bulging
In addition, light reflected from the
Therefore, the light reflected by the balsam surface 213 (light going to the left hemispherical prism 23) and the light reflected by the interface (light going to the lower hemispherical prism 22) and then reflected at the interface are 70% The total amount of light is reduced by about 70%.
FIGS. 13 and 14 are views showing the
The
The
However, in the description of the embodiment, the reflectance and the transmittance are respectively 50%.
The
The
The
The bottom surface of the
The lower surface of the
All the outer surfaces of the
The core of the second embodiment B of the present invention is that since the lower
The light transmitted through the bulging
In addition, light reflected from the
Therefore, the light reflected by the balsam surface 213 (light going to the left hemispherical prism 23) and the light reflected by the interface (light going to the lower hemispherical prism 22) and then reflected at the interface are 70% The total amount of light is reduced by about 70%.
FIG. 15 is a view for explaining the application principle of the lower
The light parallel to the concave mirror is reflected and passes through the concave mirror. The light passing through the focus is reflected parallel to the concave mirror. The light passing through the center of the concave mirror is reflected back to the center of the concave mirror. Is moved in a direction symmetrical with respect to the mirror axis after reflection.
In the present invention, the light radiated in parallel to the lower
FIG. 16 is a view for explaining the principle of reducing the incidence of misfit due to internal reflection on the lower surface of the
It is also the same principle that a light beam due to internal reflection at the left side portion of the
However, the transmittance and the reflectance on the
50% of the light emitted from the light source of the illumination unit 1 is reflected by the
The reflected 0.15% is transmitted at 0.075% by the transmittance of 50% at the
0.075% of the transmitted 0.075% converges on the focus of the lower
17 is an explanatory view for explaining the ratio of the light intensities according to the first embodiment of the inner coaxial optical system A having the hemispherical prism beam splitter of the present invention. The transmittance and the reflectance on the
4.98 is reflected by the sample reflectance of 10%, and is incident on the
The amount of incident light due to the amount of reflection toward the sample side was 0.3% at the boundary point of the
The amount of incident light due to the permeation amount on the balsamic surface is 0.075, which is 50% passing through the
Therefore, the odds ratio is (0.0748 + 0.02244) /2.48*100=3.92%.
It can be seen that the amount of light when the lower surface of the
18 is an explanatory view for explaining the ratio of the light spots according to the second embodiment of the inner coaxial optical system A having the hemispherical prism beam splitter of the present invention. When the light generated from the light source of the illumination unit 1 is 100, 50% is reflected from the
4.98 is reflected by the sample reflectance of 10%, and is incident on the
The amount of incident light due to the amount of reflection toward the sample side was 0.3% at the boundary point of the
The amount of incident light due to the permeation amount on the balsamic surface is 0.075, which is 50% passing through the
Therefore, the odds ratio is (0.02244 + 0.02244) /2.48*100=1.81%.
It can be seen that the amount of light when the lower surface of the
19 is a graph comparing the lens reflectance of the AR coated surface and the lens non-coated surface to be applied to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention. When passing through the lens of the uncoated surface, Since it has a reflectance of 4% at the interface, only 92% is transmitted. When it passes through the lens coated with anti-reflection coating material, it has a reflectance of 0.3% at the interface as shown in FIG. .
According to the inner coaxial optical system having the hemispherical prism beam splitter of the present invention, when only the lower
A: Internal coaxial optical system
1: illumination part 2: beam splitter part
21: cubic prism 211: upper prism
212: Lower prism 213: Balsam face
22: Lower hemispherical prism 23: Left hemispherical prism
3: telecentric lens part 31: sample space lens part
32: upper space lens unit 4: sensor unit
41: Sensor part 5: Mounting casing part
6: Radius of curvature
Claims (6)
The inner coaxial optical system (A) comprises an illumination unit (1) for illuminating the sample with illumination;
40 to 60% of the light irradiated from the illumination unit 1 is reflected to the sample, and the remaining 40 to 60% of the light is transmitted through the illumination unit 1, A beam slitter section 2 having a balsam surface 213 for transmitting 40 to 60% of light and reflecting the remaining 40 to 60% of light;
The beam splitter unit 2 is installed at the center to receive the light of the illumination unit 1 through the beam splitter unit 2 so as to form an image of the sample and is installed in a sample space on the left side of the beam splitter unit 2 And an upper spatial lens section 32 provided in an upper space on the right side of the beam splitter section 2, and all the principal rays are parallel to the optical axis of the lens in the sample space and the upper space, A telecentric lens part 3 which advances;
And a sensor unit 4 provided at the rear end of the upper spatial lens unit 32 and having a sensor surface 41 through which the image of the sample passes through the telecentric lens unit 3,
The lower surface of the beam splitter unit 2 is formed so that the light transmitted through the bulging surface 213 of the beam splitter unit 2 is reflected again on the bellows surface 213 of the beam splitter unit 2, The light transmitted through the bosensurface 213 is converged at a predetermined position and is diverged to be reflected on the balsam surface 213. In order to eliminate the light reflected from the sensor unit 4, In order to allow the light to converge at the front side of the sensor surface 41 and then be diverged and dispersed,
The beam splitter unit 2 includes a cubic prism 21 having a cubic prism shape in which the bulging surface 213 is formed and 40 to 60% of light is transmitted and the remaining 40 to 60% is reflected.
The cubic prism 21 is provided at a lower portion of the cubic prism 21 and generates light converged at a certain point forward of the sensor surface 41, And a lower hemispherical prism (22) having a radius of curvature of length,
The cubic prism 21 is divided into upper diagonal lines from the upper right corner to the lower left corner,
And a lower prism 212 that is separated from the upper right corner by a diagonal line from the lower left corner to the lower left corner,
The lower prism 212 and the lower hemispherical prism 22 are integrally formed,
The lower surface of the upper prism 211 and the upper surface of the lower prism 212 are coated with a material for reflection and transmission to form the bellows surface 213,
The lower surface of the upper prism 211 and the upper surface of the lower prism 212 are bonded with a UV adhesive,
Characterized in that all the outer surfaces of the beam splitter section (2) are coated with an anti-reflection coating material in order to reduce the internal reflectance reflected at the interface, the inner coaxial optical system having a hemispherical prism beam splitter
The light reflected from the bodysurface 213 of the beam splitter section 2 is reflected again by the left boundary surface of the beam splitter section 2 to the left side of the beam splitter section 2 The light reflected from the bass surface 213 among the light reflected from the left interface is converged at a predetermined position and diverged so as to eliminate the light that is transmitted through the surface 213 and enters the sensor unit 4, 213 having a hemispherical prism beam splitter having a hemispherical shape having a predetermined radius of curvature so as to allow the light transmitted through the sensor surface 41 to converge and be dispersed in front of the sensor surface 41,
The beam splitter unit 2 includes a cubic prism 21 having a cubic prism shape in which the bulging surface 213 is formed and 40 to 60% of light is transmitted and the remaining 40 to 60% is reflected.
The cubic prism 21 is provided at a lower portion of the cubic prism 21 and generates light converged at a certain point forward of the sensor surface 41, A lower hemispherical prism (22) having a radius of curvature of length;
The light transmitted from the balsam surface 213 of the light reflected from the bubbling surface 213 of the cubic prism 21 and reflected internally at the left boundary surface is reflected by the left side of the cubic prism 21, And a left hemispherical prism (23) having a radius of curvature of a predetermined length for dispersing the light by making converging light emitted from a predetermined point forward of the plane (41). The hemispherical prism beam splitter Optical system
The cubic prism 21 is divided into upper diagonal lines from the upper right corner to the lower left corner,
And a lower prism 212 that is separated from the upper right corner by a diagonal line from the lower left corner to the lower left corner,
The lower prism 212 and the lower hemispherical prism 22 are integrally formed,
The upper prism 211 and the left hemispherical prism 23 are integral with each other,
The lower surface of the upper prism 211 and the upper surface of the lower prism 212 are coated with a material for reflection and transmission to form the bellows surface 213,
The lower surface of the upper prism 211 and the upper surface of the lower prism 212 are bonded with a UV adhesive,
Characterized in that all the outer surfaces of the beam splitter section (2) are coated with an anti-reflection coating material in order to reduce the internal reflectance reflected at the interface, the inner coaxial optical system having a hemispherical prism beam splitter
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029925A (en) * | 2018-06-12 | 2018-12-18 | 中国科学院上海技术物理研究所 | It is a kind of for aim at monitoring telescope optic axis block prism light calibration device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100364053B1 (en) * | 1998-02-05 | 2003-02-07 | 에이에스엠 저펜 가부시기가이샤 | Silicon polymer insulation film on semiconductor substrate and method for forming the film |
| KR20050072466A (en) | 2002-11-05 | 2005-07-11 | 소니 가부시끼 가이샤 | Light irradiator |
| US6924897B2 (en) * | 2000-10-19 | 2005-08-02 | Robert E. Parks | Point source module and methods of aligning and using the same |
| KR20060014401A (en) * | 2003-05-16 | 2006-02-15 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | Polarizing beam splitter and projection systems using the polarizing beam splitter |
| KR101306837B1 (en) | 2005-07-08 | 2013-09-10 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | Optimizing use and performance of optical systems implemented with telecentric on-axis dark field illumination |
| KR101418781B1 (en) | 2014-01-16 | 2014-07-11 | 에스피오주식회사 | Illumination Uniformalizing Apparatus in High Resolution Optical System |
| KR101593870B1 (en) | 2015-01-11 | 2016-02-12 | 최민영 | Telecentric optics device |
-
2016
- 2016-06-16 KR KR1020160074994A patent/KR101663039B1/en active IP Right Grant
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100364053B1 (en) * | 1998-02-05 | 2003-02-07 | 에이에스엠 저펜 가부시기가이샤 | Silicon polymer insulation film on semiconductor substrate and method for forming the film |
| US6924897B2 (en) * | 2000-10-19 | 2005-08-02 | Robert E. Parks | Point source module and methods of aligning and using the same |
| KR20050072466A (en) | 2002-11-05 | 2005-07-11 | 소니 가부시끼 가이샤 | Light irradiator |
| KR20060014401A (en) * | 2003-05-16 | 2006-02-15 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | Polarizing beam splitter and projection systems using the polarizing beam splitter |
| KR101306837B1 (en) | 2005-07-08 | 2013-09-10 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | Optimizing use and performance of optical systems implemented with telecentric on-axis dark field illumination |
| KR101418781B1 (en) | 2014-01-16 | 2014-07-11 | 에스피오주식회사 | Illumination Uniformalizing Apparatus in High Resolution Optical System |
| KR101593870B1 (en) | 2015-01-11 | 2016-02-12 | 최민영 | Telecentric optics device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029925A (en) * | 2018-06-12 | 2018-12-18 | 中国科学院上海技术物理研究所 | It is a kind of for aim at monitoring telescope optic axis block prism light calibration device |
| CN109029925B (en) * | 2018-06-12 | 2023-12-26 | 中国科学院上海技术物理研究所 | Cubic prism optical correction device for sighting and monitoring telescope optical axis |
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