KR101659339B1 - The burner for manufacturing quartz glass ingot - Google Patents

Abstract

The present invention relates to a structure of a burner for manufacturing a quartz glass ingot, which comprises a raw material introduction pipe for introducing a raw material, an oxygen introduction pipe for introducing oxygen gas, a hydrogen introduction pipe for introducing hydrogen gas, and a central pipe connected to the respective pipes, And the focal distance of the path of the tubule is longer than the focal distance of the path of the outer tube. When the burner body is divided into the central portion and the tubular portion, the tubular portion has a tilted structure, The burner optimized for the design of the ejected nozzle is developed and the raw powder is melted and welded to the structure so that the transparency and uniformity of the quartz glass product can be improved.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a burner for manufacturing a quartz glass ingot,

The present invention relates to a burner for manufacturing a quartz glass ingot, and more particularly, to a quartz glass burner which is suitably used for production and processing of quartz glass by flame hydrolysis, in which raw material powder, oxygen and hydrogen are discharged To a burner for manufacturing a quartz glass ingot in which the designing structure of the nozzle is optimized.

Generally, in order to manufacture a quartz glass ingot, glass microparticles produced in a burner flame on a rotating starting member are reciprocally moved relative to a burner or a starting member to deposit and deposit a porous base material, and this is dehydrated and sintered in an electric furnace The external attaching method (OVD method) is widely used because a relatively arbitrary refractive index distribution can be obtained and a large-diameter optical fiber base material can be mass-produced.

The starting member for depositing glass microparticles (soot) is rotatably supported by an ingot chuck mechanism 4 by shaft rotation. (Steam) such as SiCl4 and combustion gas (hydrogen gas and oxygen gas) from the freely movable burner 3 disposed toward the starting member toward the starting member, and the soot generated by the hydrolysis in the oxy- By depositing on the member, an ingot is formed.

At this time. The burner is sometimes supported by a guide mechanism in a reciprocating manner in the longitudinal direction, and the flame is sprayed toward the starting member while the starting member is rotated by the shaft rotation, and the flame is generated by hydrolysis of the raw gas in the flame The glass microparticles are deposited on the starting member. At this time, the burner 3 is formed by the reciprocating movement of the starting member in the longitudinal direction of the starting member by means of the burner guide mechanism.

Further, quartz glass burners are used in various flame processing because a high temperature is obtained by flowing a combustion gas to the outer tube and combusting the combustion gas through an inner tube nozzle. In addition, a burner in which a plurality of nozzles serving as nozzles are inserted is used, a combustion gas is made to flow in the outer tube, a combustion gas is made to flow from the nozzle, a glass raw material gas is made to flow in any tubular tube, And the quartz glass microparticles are melted by decomposition.

But. In this case, depending on the particle size distribution of the raw material, even if the small-sized particles are completely melted, the large particles are welded to the quartz glass structure without being completely melted in the spark due to its weight, thereby lowering the transparency of the fused quartz glass product And there is a problem that it is unsuitable for the production of transparent flawless fused quartz glass such that the spark temperature of the oxyhydrogen flame is increased more than necessary.

In addition, the patent (Korean Patent Laid-open No. 10-2009-0092687) has a concentric multi-tube structure and has a seal gas spouting port for spraying seal gas outside the central glass raw material gas spouting port, Wherein the plurality of small aperture combustible gas spouting ports are arranged in one row or plural rows in a concentric manner with respect to the center of the glass raw material gas spouting port And the small diameter coarse gas ejection ports arranged in the same column have the same focal distance, wherein a tip end of the seal gas ejection port protrudes from the glass raw material gas ejection port, and the seal gas ejection port and the small- Characterized in that the front end of the combustible gas spouting port is protruded from the combustible gas spouting port It provides a burner for. "

However, in order to solve the problems such as lowering the transparency of the fused quartz glass product due to being deposited on the quartz glass structure in a state of being not completely melted, the design of the nozzle for discharging the raw material powder, Development is necessary.

Prior Art 1: Korean Patent Publication No. 10-2009-0092687 (September 01, 2009)

A burner optimized for the design of the nozzle through which the raw material powder and oxygen and hydrogen are discharged has been developed to solve the problem of lowering the transparency of the quartz glass product by being welded to the quartz glass structure without being completely melted. The purpose is to provide a burner.

The above object is achieved by a structure of a burner for producing a quartz glass ingot, comprising a raw material introduction pipe into which a raw material is introduced, an oxygen introduction pipe into which oxygen gas is introduced, a hydrogen introduction pipe into which hydrogen gas is introduced and a central pipe connected to the respective pipes, And the focal length of the path of the tubule is longer than the focal distance of the path of the outer tube. When the burner body is divided into the central portion and the tubular portion, the tubular portion is formed by forming the inclined structure.

The OL / SL value is "0.33 to 0.75" when the focal length of the path of the tubules is OL and the focal distance of the exterior is SL.

When the inclined portion of the burner guide portion is expressed by a tangent value when the tubular portion is distinguished from the portion excluding the burner guide portion and the portion excluding the burner guide portion, the value ranges from "0.27 to 0.6" If the gradient is also expressed as a tangent value, the range of the value is "0.19 to 0.44".

According to the present invention, a burner optimized for the designing structure of the raw material powder, the nozzle through which oxygen and hydrogen are discharged is developed, and the raw powder is melted and fused to the structure, thereby increasing transparency and uniformity of the quartz glass product .

1 is a view showing the principle that a raw material is supplied to a burner and a quartz ingot is formed by a burner.
2 is a view of an embodiment showing a conventional quartz glass burner.
3 is a diagram of an embodiment showing a quartz glass burner optimized for design construction.
Figure 4 is an illustration of an embodiment showing the internal flow of a burner optimized design structure.
Fig. 5 is a view showing an embodiment showing the focal length of a path through which a raw material and oxygen are discharged.
6 is a view of an embodiment showing the overall design structure of the burner of the present invention.

Hereinafter, the structure of a burner for manufacturing a quartz glass ingot according to an embodiment of the present invention will be described in detail.

The detailed description of common techniques necessary for explaining the present invention can be omitted.

The present invention relates to a structure of a burner for manufacturing quartz glass for efficiently melting a raw powder such as quartz glass powder or silica sand for producing a quartz glass ingot. In particular, it relates to a quartz glass raw material powder, And a plurality of supply nozzles whose supply is directed from the outer periphery toward the center of the flame for melting.

The burner material should be manufactured using 99.99% high purity quartz glass for the production of high purity quartz glass ingot for semiconductor and solar power.

Generally, high purity quartz glass is an indispensable material in the semiconductor industry, and its demand is continuously increasing with the development of the semiconductor industry. Therefore, various melting methods and apparatuses such as electric furnace melting, arc melting, oxyhydrogen flame melting, and the like have been devised and used as quartz melting methods for producing high purity quartz glass. In particular, acid fire flame is the most commonly used method for melting quartz glass and manufacturing ingots because the device is simple and inexpensive to construct.

1 is a view showing the principle that a raw material is supplied to a burner and a quartz ingot is formed by a burner.

In general, a quartz melting apparatus using an oxyhydrogen flame has a structure in which a nozzle of a burner generating an oxyhydrogen flame and a separate powder raw material supply port are provided in the front part thereof as disclosed in U.S. Patent Nos. 3,128,166 and 60-22641 And quartz powder as a raw material is supplied from the outside of the burner through the burner central tube.

That is, as shown in 1, the powder raw material is supplied to the burner 100 through the raw material supply tank 10, and oxygen and hydrogen are also supplied to the burner 100. A system 20 using cooling water is also provided and a quartz ingot 50 is made from above the quartz glass structure (Target) 51 inside a fireproof muffle 30. At this time, a supporting plate (supporting plate) 40 for supporting the quartz ingot and a lifting gear 60 for adjusting the height of the supporting plate are further provided.

A quartz glass burner 100 having a multi-tube structure is provided at the top of the synthesis furnace 30 toward the tip of the target 51. The furnace wall is composed of a notch and a refractory, and is provided with an upper observation window 53a and a lower observation window 53b, an IR camera 52 and an exhaust system for observing the inside with fire resistance.

2 is a view of an embodiment showing a conventional quartz glass burner.

As shown in FIG. 2, the conventional burner has a concentric multi-tube structure. A plurality of small-diameter gas ejection tubes 111 are contained in the outer tube 120, and these small- And are arranged at equal intervals on the same circle with respect to the center tube 110. Such a structure is branched from the burner main pipe to form a small-diameter gas blowing tail pipe 111.

Meanwhile, quartz powder, which is a raw material, is supplied from the outside of the burner, and the quartz powder is moved in the flame direction simultaneously with the melting due to the flow of the flame, and is deposited on the quartz glass structure (Target) Is injected into the nozzle and the hydrogen supply port at the same time and is ignited by the ignition device from the bottom of the raw material supply port 110 by the separate ignition device and is supplied to the quartz glass structure 51 And the ingot 50 is grown and manufactured.

In the ingot growth of the present invention, the glass raw material gas and the combustible gas O2 are ejected from the glass raw material gas ejection nozzle at the center of the burner, H2 is ejected from the combustible gas ejection nozzle, and the small diameter nozzles contained in the combustible gas ejection nozzle The combustible gas O2 is ejected.

Such a burner is ejected by different nozzles when the powder raw material is ejected and oxygen is ejected. In order to avoid the structural problem, the condition that the powder raw material is melted sufficiently is set. If such a solution can not be provided, there is a drawback that the loss of the raw material is large due to the vibration of the raw material and the weight variation of the raw material particles, and the melting position of the raw material and the melting state of the raw material are not uniform.

Particularly, depending on the particle size distribution of the raw material, even if the small-sized particles are completely melted, the large particles are welded to the quartz glass structure without being completely melted in the flame due to its weight, thereby lowering the transparency of the fused quartz glass product And the temperature of oxyhydrogen flame must be increased more than necessary. Thus, it has various problems unsuitable for the production of transparent and defect-free fused quartz glass.

3 is a diagram of an embodiment showing a quartz glass burner optimized for design construction.

As shown in FIG. 3, a raw material introduction pipe 101 is provided at the upper center, raw material powder and hydrogen are supplied through the raw material introduction pipe, and the raw material introduction pipe is further separated into four pipes 101a, The raw material ejected from the four tubes 101a escapes toward the outer tube 120 and the speed thereof is also high. Therefore, the inclination and the appearance of the four tubes 101a 120 are equal to each other, the jetting efficiency can be further increased.

On the other hand, the introduction pipe 102 is connected to the inner center pipe 105, and the diameter of the center pipe is widened to extend toward the outer pipe 120. The oxygen introduction pipe 103 formed of two pipes at the upper edge of the burner is connected to the plurality of tubular pipes 111 in a curved shape on the side of the center pipe. Oxygen is discharged through the tubules.

At this time, when the oxygen is discharged, it is not discharged straightly, and it is necessary to discharge the fuel so as to have a constant inclination angle so as to be collected at one point (focus), and the appearance of the raw material and the hydrogen discharged therefrom must have a constant inclination angle. Thereby improving the efficiency.

Figure 4 is an illustration of an embodiment showing the internal flow of a burner optimized design structure.

The raw material introduction pipe 101 is provided at the upper center and the raw material introduction pipe is further divided into four pipes 101a and extended to the outer pipe 120. Therefore, And the hydrogen tube is separated into four outer tubes, and the four tubes 101a are connected to the outer tube 120 and then discharged. At this time, the number of the upper orifices 101a is not limited to four. If necessary, it can be branched into 6 to 8 tubes.

Further, the hydrogen introduction pipe 102 provided at the side of the raw material introduction pipe is connected to the internal central pipe 105, and the diameter of the central pipe is widened, and is connected to the external pipe 120 and discharged.

On the other hand, the oxygen introduction pipe 103 formed by two pipes at the upper edge of the burner is connected to the side of the center pipe in a curved shape and connected to the tubular pipe 111.

At this time, the central pipe 105 is composed of an inner central pipe 105b and an outer central pipe 105c. Therefore, the hydrogen supplied to the hydrogen introduction 102 is connected to the tubular tube 111 through the inner central tube 105b of the central tube 105. The oxygen introduction pipe 103 is connected to the outer pipe 120 through the outer pipe 105c of the central pipe. Therefore, it is possible to separately discharge them into the tubules 111 and the outer tube 120, respectively.

As described above, the raw material introduction pipe 101 is divided into four pipes 101a and connected to the outer wall 120, and the oxygen introduction pipe 103 is connected to the side of the main pipe in a curved shape. Also, as shown in the drawing, the center pipe has a structure in which the diameter thereof is widened through the center pipe inclined portion 105a so as to be connected to the plurality of the tubular pipes 111.

In addition, it is possible to optimize various nozzle diameter and length adjustments so as not to affect the combustion efficiency (temperature).

On the other hand, the outer diameter of the outer tube 120 becomes smaller toward the outlet.

The structure of the present invention as described above can be explained in more detail. That is, the raw material supply tank 10 is tapered to a lower portion thereof, and a raw material injection port is elongated at the center. An inlet chamber for introducing oxygen into the oxygen introduction pipe 103 for oxygen supply is provided below the raw material supply port, The oxygen introduction pipe 103 is installed around the periphery of the raw material introduction pipe 101 installed downward from the central position. At this time, although two oxygen introduction pipes are provided in the embodiment of the present invention, two or more oxygen introduction pipes may be provided.

The oxygen introduction pipe is inclined toward the center and has a structure shorter than that of the raw material introduction pipe so that the action of concentrating the flame forward and the raw material powder which is melted by the injection force from the oxygen introduction pipe are dropped from the tip of the raw material introduction pipe .

The features of the present invention can be added as follows. The technology of the present invention is not limited to the circular shape of the raw material introduction pipe and the hydrogen introduction pipe constituting the one body.

Therefore, the body (or the central pipe 105) may be formed as a rectangular structure or the raw material introduction pipe 101 may be formed in a rectangular shape, and the oxygen introduction pipes 103 may be provided at both sides thereof at regular intervals. In addition, at least one raw material introduction pipe 101 located at the center of the body may be provided.

At this time, too, the oxygen introduction pipe is inclined toward the center, and has the same function as the above-mentioned structure with a configuration shorter than the material injection port. In the case where the quartz glass burner according to the present invention is constituted as described above and a raw material powder such as quartz or the like having a high purity is placed in the raw material introduction pipe, the ignition device The raw material is discharged to the discharge port connected to the raw material introduction pipe, and at the same time, the raw material is melted by the high temperature flame and is attached to the lower quartz glass structure 51.

In order to generate flame by using hydrogen and oxygen fuel and to increase the melting amount of the raw material, the raw material introduction pipe is positioned at the center of the flame flame, but the fuel is easily supplied according to the natural law .

Fig. 5 is a view showing an embodiment showing the focal length of a path through which a raw material and oxygen are discharged.

The raw material (silicon or sand) is ejected through the outer tube 120, and when the oxygen is ejected through the plurality of tubules 111, there is a point that is collected at one point, and this point is called the focal point.

When the focal distance of the outer tube 120 from which the raw material is ejected is denoted by SL and the focal length of the plurality of tubules 111 through which oxygen is ejected is represented by OL, the ratio of the focal length is as follows.

                   R = SL / OL

The optimum focal length " SL " of the outer tube 120 was 140 mm and the optimum focal length " OL " of the tubular tube 111 was 240 mm. Therefore, the optimum focal length ratio is as follows.

R = 140 mm / 240 mm = 0.583

However, the optimum R value means the optimum value, and the objective of the present invention can be achieved even when the value of " SL " is changed from 100 mm to 180 mm. The object of the present invention can be achieved even when the value of " OL " is varied from 240 mm to 300 mm.

Therefore, the R value can have a range of "0.33 (100/300) to 0.75 (180/240) ".

6 is a view of an embodiment showing the overall design structure of the burner of the present invention.

In the embodiment of FIG. 5, the focal distance of the nozzle where the oxygen is ejected and the tube from which the raw material is ejected is described. In order to present the focal distance, a total size of the burner is required. 5 is a view showing an embodiment showing design values of respective parts of the burner used in the present invention.

That is, FIG. 5 is a graph showing the design values of the center portion 130 where the center tube is present and the tubular portion 140 having a plurality of tubules.

In the burner according to the present invention, the length of the narrow tubular portion 140 is 95.5 mm, the length of the central portion 130 is 79.5 mm, and thus the total length of the central portion and the narrow tubular portion, . Therefore, it is possible to consider the above-described focal length based on the total length of the central portion and the narrowed portion of 175 mm.

That is, since the object of the present invention can be achieved even when the focal distance of the inclination of the outer tube 120 based on the length of the burner body (the portion including the central portion and the narrow tube portion) is varied from 100 mm to 180 mm, The ratio of the focal length "SL" value of the reference based on the reference can be expressed as follows.

R1 = SL / Length of burner body

The range of the value of R1 is equal to "0.57 (100 mm / 175 mm) to 0.75 (180 mm / 175 mm)".

In other words, since the object of the present invention can be achieved even if the focal length of the slope of the tubule 111 is varied from 200 mm to 280 mm on the basis of the length of the burner body (the portion including the central portion and the narrow tubular portion) The ratio of the focal length "OL" of the custom tube based on the size can be expressed as follows.

R2 = OL / Length of burner body

The range of the value of R2 is equal to "1.14 (200 mm / 175 mm) to 1.6 (280 mm / 175 mm)".

Therefore, the combination of the embodiment of FIG. 5 and the embodiment of FIG. 6 of the present invention provides the following results.

    1.14 ≤ OL / burner body ≤ 1.6

    0.417? SL / OL? 0.75

In addition, the design value of other parts of the burner body can be optimized. The width of the central part 130 is 120 mm, the width of the bottom part in the case of the tubular part 140 is 66 mm, Is 96 mm in width.

Therefore, the ratio of the lowest point of the uppermost portion of the tubular portion is 0.69 (66 mm / 96 mm), but this does not mean that the value of 0.69 should be fixed as it is. That is, in the case of the tubular portion 140, the object of the present invention can be achieved even when the width of the uppermost portion is fixed to 96 mm and the width of the lowest portion is changed to 50 mm to 72 mm.

Therefore, the range of the value of (the length of the lowest portion of the tubular portion) / (the length of the uppermost portion of the tubular portion) becomes "0.52 (50 mm / 96 mm) to 0.75 (72 mm / 96 mm)".

In addition, the degree of inclination of the tubular portion 140 is not uniform as a whole. As shown in the drawing of FIG. 6, the inclination degree of the upper part (burner guide, 30 mm distance part) and the inclination degree of the lower part are different among 95.5 mm of the total length of the tubular part.

That is, since the burner guide portion of the tubular portion is reduced from 96 mm to 86.6 mm, 9.4 mm is reduced through a distance of 30 mm, and when the inclination is represented by a tangent value, the inclination becomes 0.31 (9.4 mm / 30 mm).

In order to achieve the object of the present invention, when the longest portion of the burner guide portion is 96 mm, the object of the present invention can be achieved even if the distance of the shortest portion of the burner guide portion is from 88 mm to 78 mm. The range of the value is "0.27 ((96-88) mm / 30mm) to 0.6 ((96-78) mm / 30mm)" when the inclination of the portion is expressed by the tangent value.

6, the length of the longest portion of the lower portion of the tubular portion is 86.6 mm, and the length of the longest portion of the lower portion of the tubular portion is 86.6 mm. In other words, Is 65 mm (95.5 mm - 30 mm), the length of the lower part of the tubular section is reduced by 20.6 mm, so that the inclination below the tubular section can be expressed as a tangent value. That is, the tangent tangent value under the tubular portion becomes "0.31 (20.6 mm / 65.5 mm)".

On the other hand, the tangent value of 0.31 is not always fixed, and it is of course possible to have a certain range. That is, the object of the present invention can be achieved even when the shortest length under the tubular portion is changed from 58 mm to 74 mm. Therefore, the range of the tangent value under the tubular portion becomes "0.19 (12.6 mm (86.6 mm - 74 mm) / 65.5 mm) to 0.44 (28.6 mm (86.6 mm - 58 mm) / 65.5 mm)".

On the other hand, the central portion 130 is preferably designed so as not to have a slope for the ejection effect inside the burner,

At this time, in order to have the design value, another design value of the burner should be presented so that an optimized burner can be provided, and another design value used in the present invention can be described as follows.

- Diameter of tube 101 into which material and hydrogen are introduced: 8.5 mm

- Outer diameter of pipe 101 into which material and hydrogen are introduced: 13 mm

- Diameter of the tube into which oxygen or hydrogen is injected: 6.5 mm

- Outer diameter of pipes (102) and (103) into which oxygen or hydrogen is injected: 10 mm

- Inner diameter of the tubing (111): 2 mm

- Outer diameter of the tubing (111): 4.5 to 6 mm

- Length of raw material introduction pipe (101): 100 to 116 mm

- Length of oxygen and hydrogen introduction pipes (102) and (103): 86 to 98 mm

- Length of central tube (105): 25 to 35 mm

Table 1 shows the temperature when the burner of the present invention was manufactured. As shown in Table 1, the average temperature was maintained at 1448.4 ° C in the upper observation window and 1455.4 ° in the lower observation window. By using the optimized burner as described in the present invention, the raw material powder was completely melted and deposited on the structure The transparency and uniformity of the quartz glass product can be increased.

 Table 1

101: raw material introduction pipe 102: hydrogen introduction pipe
103: oxygen introduction pipe 103a: connection portion
105: central pipe 110: central pipe (raw material supply pipe)
111: Customs House 120: Appearance

Claims (4)

delete delete 1. A burner for producing a quartz glass ingot, comprising a raw material introduction pipe for introducing a raw material, an oxygen introduction pipe for introducing oxygen gas, a hydrogen introduction pipe for introducing hydrogen gas, and a central pipe connected to the respective pipes,
The focal length of the path of the tubule is longer than the focal length of the path of the outer tube,
When the burner body is divided into a central portion and a tubular portion, the tubular portion has an inclined structure,
When the inclined portion of the burner guide portion is represented by a tangent value, the value ranges from "0.27 to 0.6" when the tubular portion is distinguished from the portion excluding the burner guide portion and the portion excluding the burner guide portion. And the tilt angle of the portion is represented by a tangent value, the range of the value is " 0.19 to 0.44 ".
The method of claim 3,
Wherein the focal length of the path of the tubules is OL and the focal distance of the outer tube is SL, the value of SL / OL is " 0.33 to 0.75 ".

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