KR101639813B1 - Continuous Coating Apparatus - Google Patents

Abstract

There is provided a continuous coating apparatus which enables high-speed coating of a coating object such as a continuously moving substrate (steel plate) or the like.

The continuous coating apparatus includes a vacuum chamber unit through which a coating object passes; Heating means disposed in the vacuum chamber unit to vaporize the supplied coating material to generate vaporized vapor; And a coating material supply unit connected to at least one of the upper side and the lower side of the lifting-and-heating means so as to supply a liquid coating material to the outside of the vacuum chamber unit.

According to the present invention, a coating material (molten metal) in a liquid state can be supplied to a lifting-and-heating space and diversification of the supply path can be realized while enabling high-speed coating of a substrate (steel sheet) , It is possible to obtain an improved effect of precisely controlling the supply flow rate of the liquid coating material and simplifying the structure.

Physical vapor deposition (PVD), continuous coating, flotation induction heating

Description

[0001] Continuous Coating Apparatus [0002]

The present invention relates to a continuous coating apparatus capable of high-speed coating of a substrate (steel sheet) which is a continuously moving coating object, and more particularly to a continuous coating apparatus which supplies a liquid coating material (molten metal) The present invention relates to a continuous coating apparatus which is capable of precisely controlling the supply flow rate of the liquid coating material and ultimately enhancing the operation and precision of the coating and structuring thereof.

The molten metal can be coated on a substrate, for example, a continuously running steel sheet (cold rolled steel sheet) by various known methods of depositing in a vacuum atmosphere. Techniques for heating (and evaporating) a solid coating material into a gas phase and coating (depositing) the same on a substrate are typically classified according to the heating method. Typical vacuum deposition techniques include thermal evaporation, electron beam evaporation electron beam evaporation, and electro-magnetic levitation evaporation.

The thermal evaporation method is a method in which the coating material is heated and evaporated to coat the substrate. However, since the coating material can not be heated by resistance heating and coating of a high melting point material such as titanium or chromium is almost impossible, Zn), magnesium (Mg), and the like. In addition, the coating speed is also limited. For example, in the case of magnesium, the coating speed is only 30 탆 · m / min.

On the other hand, in the electron beam evaporation method, a solid coating material is charged into a crucible, and then the coating material is locally heated by the electron beam to evaporate the high melting point material. However, due to heat loss due to contact between the evaporated material and the crucible Energy efficiency and coating speed are low. For example, in the case of aluminum, the coating speed is 20 μm · m / min.

Other deposition techniques are disclosed in PCT International Publication No. WO 2006/021245 (or Korean Patent Application No. 2007-7006446), and US Publication No. 2005/0064110.

That is, by heating the coating material in a floating state through an alternating electromagnetic field generated upon application of a high frequency alternating current to an electromagnetic coil surrounding the coating material, metal (coating) vapor is generated without heat loss by the crucible, .

However, in the case of the abovementioned International Publication, only the basic concept of lifting by the alternating electromagnetic field and coating by heating is shown. In the case of the US publication, the evaporation space is vacuum-isolated to coat the substrate, There is a problem that the supply path (position) of the wire, which is a coating material in particular, is restricted to the side (horizontal direction) while being supplied through the wire supplying device.

In addition, in the case of the above-mentioned U.S. Publication, there is another problem that the solid wire is supplied to the space where the alternating electromagnetic field is generated and floated and heated, so that the coating speed is lowered or the cost is increased due to the increase of the heating load.

The present invention has been made in order to solve the above-mentioned problems of the prior art, and it is an object of the present invention to provide a coating material (molten metal) And to provide a continuous coating apparatus in which the supply path is diversified.

It is another object of the present invention to provide a continuous coating apparatus which can precisely control the supply flow rate of the liquid coating material and ultimately improve the operation and precision of the coating and the structure is simplified.

According to an aspect of the present invention, there is provided a vacuum chamber comprising: a vacuum chamber unit through which a coating object passes; Heating means disposed in the vacuum chamber unit and having at least one electromagnetic coil provided to generate a deposition vapor by levitating and heating the supplied coating material with an electromagnetic force; A vapor inducing means disposed inside said vacuum chamber unit and surrounding said at least a portion of said lifting and heating means to induce said deposition vapor generated therein to induce and spray said deposition object; And a coating material supply unit connected to at least one of the upper side and the lower side of the vapor induction means out of the lifting and heating means and connected to the outside of the vacuum chamber unit to supply the liquid coating material to the vapor induction means The present invention also provides a continuous coating apparatus including the above-

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Preferably, the coating material supply unit includes a crucible disposed outside the vacuum chamber unit and storing a liquid coating material, and a supply pipe associated with the crucible and the lifting-and-heating means disposed inside the vacuum chamber unit .

The vapor induction unit may include a vapor deposition unit in which a supply pipe provided in the coating material supply unit is connected to at least one of upper and lower parts to supply a liquid coating material and is surrounded by a lifting and heating unit, And a deposition vapor nozzle part connected to the vapor deposition part or the vapor induction part and having an ejection port formed corresponding to the width of the coating object.

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At least one of the vapor induction unit and the deposition vapor nozzle unit may be connected to a heating unit such that the heating unit and the vapor induction unit are connected to each other. .

Preferably, the apparatus further comprises a woven filter member formed of a heat-resistant metal or a ceramic material so as to allow the vapor to pass through the vicinity of the injection port provided in the vapor-spray nozzle unit.
Preferably, at least one of the valve means provided in the supply pipe and the submerged valve means provided in the lower portion of the lifting arm, which is partially lifted and immersed in the coating material of the crucible, has an opening / To control the supply amount of the coating material.
More preferably, the coating material supply unit may further include heating means associated with the crucible and the supply pipe provided in the coating material supply unit.

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More preferably, the coating object is in the form of a substrate which continuously passes through the vacuum chamber unit, and the liquid coating material is provided as molten metal.

More preferably, the heating means on the steam induction means side or the heating means on the supply pipe side are spaced apart by an interval of at least two times larger than the coiled inner diameter of the adjacent electromagnetic coils.

According to the continuous coating apparatus of the present invention, the deposited vapor generated by using an electromagnetic force in a vacuum atmosphere is deposited and coated on a continuously moving substrate. However, unlike a conventional coating material such as a wire, Since the coating material (molten metal) is fed into the flotation-heating space to produce the deposited vapor, the time and cost associated with the production of the metal vapor can be reduced.

In particular, the supply of the molten metal and the vapor generation of the flotation-heating are smooth, so that the coating speed can be stably maintained while facilitating the high-speed coating of the substrate.

In addition, the present invention particularly relates to a method for controlling the flow rate of a liquid coating material (molten metal), which can diversify the supply path of the molten metal and precisely control the supply flow rate of the liquid coating material (molten metal) Excellent effects can be provided.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

First, FIG. 1 shows the entire construction of a continuous coating apparatus 1 according to the present invention. Hereinafter, the coating object will be described as a substrate 10 that continuously passes through the vacuum chamber unit, and the liquid coating material will be described as molten metal (m). At this time, the substrate 10 may be a continuous steel sheet (cold rolled steel sheet).

Although only the lower surface of the substrate 10 is shown in FIG. 1, in reality, the upper surface of the upper surface of the substrate is coated with the lifting-heating means 50 on the upper side and the crucible 72 of the coating material supply unit 70 The upper and lower surfaces of the substrate can be coated in one vacuum chamber unit by connecting the associated supply pipes 74, or two vacuum chamber units can be formed to sequentially coat the lower surface and the upper surface of the substrate (or vice versa) It is a matter of course that the line can be constituted.

The continuous coating apparatus 1 of the present invention comprises a vacuum chamber unit 30 through which a coating object is passed, a vaporizing unit 30 for vaporizing the coating material supplied to the vacuum chamber unit 30, A heating means 50 and a coating material supply unit 70 connected to at least one of the upper side and the lower side of the lifting and heating means so as to supply a liquid coating material to the outside of the vacuum chamber unit, Can be provided.

Thus, by using the apparatus of the present invention, the continuously moving substrate 10 is allowed to flow through the vacuum chamber unit 30 while the liquid molten metal supplied from the coating material supply unit 70, which will be described in detail below, (Metal vapor) (G in Fig. 1 and Fig. 3) successively in the means 50. The deposition vapor may be formed of a single component of zinc vapor or an alloy of zinc (Zn) -magnesium (Mg) vapor, and may be continuously coated while being deposited on a substrate.

1, the inside of the vacuum chamber unit 30 is maintained in a vacuum atmosphere through a vacuum pump (not shown), while the front and rear of the vacuum chamber unit 30 support the continuous movement of the substrate Guide rolls 34 are also provided for sealing the opening portion of the vacuum chamber unit 30 for passing through the substrate.

In addition, in the continuous coating apparatus 1 of the present invention, the inside of the vacuum chamber unit 30 is provided with at least a part of the lifting-and-heating means 50 in association with the coating material supply unit 70 as shown in FIG. And a vapor induction unit 36 provided so as to induce and spray the deposition vapor G generated in the inside thereof to the coating object.

That is, the steam guiding means 36 is a means for guiding the liquid coating material, that is, the molten metal m supplied into the inside through the surrounding lifting-and-heating means 50, as described in detail in FIG. 5, When the vaporized vapor G is generated while being heated and vaporized, the coating is performed while being deposited on the substrate 10 passing through the inside of the vacuum chamber unit.

1, the steam guiding means 36 is arranged so that the molten metal m supplied therein is lifted up by the electromagnetic force of the electromagnetic coil of the lifting-and-heating means 50, which will be described in detail later, (G), which is finally deposited on the substrate and is coated on the substrate, is prevented from spreading in all directions when the substrate (10) is heated and evaporated, and the substrate (10) So that it can be smoothly performed.

1, the steam guiding means 36 of the present invention is schematically illustrated. However, as shown in detail in FIG. 5, the steam guiding means 36 may be a 'T' shape corresponding to the width of the substrate when viewed from the front as a whole.

5, the supply pipe 74 provided in the coating material supply unit 70 is connected to the lower part and / or the upper part or both of them to implement a plurality of supply paths And a deposition vapor generating portion 36a in which a liquid coating material is supplied to one or both of the supply paths selected as needed and surrounded by a lifting-heating means.

As shown in FIG. 5, the vapor induction unit 36 of the present invention includes a vapor induction unit 36b connected to the upper portion of the vapor deposition steam generator 36a, And may include a vaporized vapor nozzle portion 36c formed to be long corresponding to the width of the coating object while being connected and including an injection port 38. [ Most preferably, all of the vaporized vapor generating portion 36a, the vapor guiding portion 36b and the vaporized vapor nozzle portion 36c are assembled into an integral or flanged structure.

5, the vaporized vapor generating portion 36a and the vapor guiding portion 36b of the vapor generating means are formed in the shape of a tube, and the vaporized vapor nozzle portion 36c is formed by coating at least the injection port 38 Or may be provided in a casing structure of a pipe or a cross-section rectangular body that is formed longer than the maximum width of the substrate.

1 and 5, a plurality of holes (circular or rectangular) may be formed in the nozzle hole 36c of the evaporation vapor nozzle unit 36c, It may be a rectangular shape) may be formed in a predetermined pattern.

More preferably, the vaporized vapor generating portion 36a, which is a space for lifting and heating the supplied molten metal, may be provided with an electric nonconductor, for example, a ceramic.

In addition, as shown in Figs. 1 and 5, not only the steam guiding portion 36b but also the vaporized vapor nozzle portion 36c (not shown in Fig. 5) are provided with a vapor- It is preferable that the heating means 90, for example, a heater or the like is connected.

In FIG. 5, although the heating means 90 provided in the form of surrounding the outer circumference of the steam guiding portion 36b in FIG. 5, it is also possible to arrange the heating means 90 inside thereof.

5, the heating means 90 associated with the steam induction portion 36b is a heating coil of the coiled inner diameter of the upper first electromagnetic coil 52 of the lifting and heating means 50, Is disposed at least twofold apart from each other in order to prevent the heater itself, which is the heating means, from being overheated due to the influence of the electromagnetic force during the flotation-heating.

1 and 2, the coating material supply unit 70 in the continuous coating apparatus 1 of the present invention includes a crucible 72 disposed outside the vacuum chamber unit and containing molten metal, And a supply pipe (74) connected between the crucible (72) and the vapor induction means (36) surrounded by the electromagnetic coil passing through the vacuum chamber unit.

On the other hand, although shown schematically in the drawing, the crucible is supplied with solid metal and heated to store molten metal in the liquid phase and to be supplied continuously to the lifting-and-heating means 50.

The lower end portion of the supply pipe 74 is immersed in the molten metal m of the crucible 72 and the upper end of the supply pipe 74 is connected to the steam induction means 36 disposed inside the vacuum chamber unit 30 , The vacuum chamber unit is in a vacuum atmosphere and the crucible is placed under the atmosphere so that the molten metal m flows through the vacuum and the atmospheric pressure difference of about 1 bar to form the vapor of the vapor inducing means 36 And is then supplied to a portion 36a.

On the other hand, the heating pipes 92 and 94 such as a heater or a high-frequency induction heating furnace for maintaining the temperature of the molten metal are preferably disposed in close proximity to the supply pipe 74 and the crucible 72, respectively.

5, the heating means 92 associated with the supply pipe 74 adjacent to the second electromagnetic coil 54 is a heater, particularly when it is a heater, as described above, (D in Fig. 3) of the lowermost coil of the electromagnetic coil 54. In this case, This is to prevent the heater itself from being overheated due to the influence of the electromagnetic force when lifting-heating.

The molten metal is stored in the molten state in the crucible and is supplied to the crucible 72 and the supply pipe 74 while being supplied as the pressure difference through the supply pipe 74 to the vapor deposition portion 36a of the vapor induction means 36. [ Can maintain an appropriate temperature.

As shown in FIG. 1, the supply pipe 74 is provided with an on / off valve for shutting off the supply pipe when forming a vacuum atmosphere in the vacuum chamber unit, or a valve for controlling the supply amount of molten metal And a valve means 76 such as a flow rate control type on / off valve that is turned on / off.

Accordingly, the supply amount of the molten metal supplied by the pressure difference between the vacuum and the atmospheric air can be adjusted through the on-off valve or the flow rate control type on / off valve, and the on / off valve cuts off the supply pipe in the initial vacuum atmosphere formation of the vacuum chamber unit.

In addition, preferably, the crucible 72 of the coating material supply unit 70 of the present invention may be provided with the submerged valve means 80 for controlling the flow rate, as shown in Figs. 1 and 2.

For example, as shown in FIG. 1, the submerged valve means 80 includes a lifting arm 82 which is lifted by a driving cylinder 86 provided in a bracket on a crucible or an electrically driven actuator and immersed in molten metal, And an opening / closing port (84) that moves toward the inlet of the supply pipe at the lower end thereof.

The opening and closing port 84, which is vertically protruded from the lower end of the lifting arm 82 according to the lift width of the lifting arm, opens and closes the inlet at the lower end of the supply pipe, The supply amount of the molten metal (m) to be supplied is controlled.

2, the submerged valve means 80 is fixed to a screw bar 88b driven by a drive motor 88a provided on a bracket on the crucible 72 and is supported by a guide rod 88d The lifting arm 82 is connected to the moving block 88c so that the lifting arm 82 and the lower opening 84 of the movable block 82 are rotated by the rotation of the screw bar by the operation of the driving motor and the lifting / ) Opens and closes the inlet of the supply pipe.

Therefore, the supply amount of the molten metal is also controlled in the case of FIG. However, the configuration of the lifting arm using the screw bar is more complicated than that of the cylinder and the actuator, but the lifting width can be adjusted more precisely.

On the other hand, in the present invention, since the molten metal in the liquid phase is supplied in comparison with the conventional solid-wire supply during the flotation-heating, the heating load is small and the deposition steam can be generated more easily than before.

Therefore, in the present invention, in particular, the structure of the coating material supply unit is improved to a structure that enables precise control of the supply flow rate while utilizing the pressure difference, and by using the submergible valve means, At least maintaining or improving the operability and precision of the coating.

Next, as shown in FIG. 3 and FIG. 4, the lifting-and-heating means 50 for substantially lifting and heating the molten metal in the continuous coating apparatus 1 of the present invention to generate vaporized vapor will now be described in detail Heating means 50 such that the first and second electromagnetic coils 52 arranged to surround the vaporized vapor generating portion 36a of the vapor inducing means 36 provided in the vacuum chamber unit 30 ) 54, which are not shown in FIG.

For example, the first and second electromagnetic coils 52 and 54 of the levitation-heating means 50 are connected to the magnetic field and the material between the electromagnetic coils generated by the high frequency power source applied through the connected AC power supply 56 The induced molten metal is heated and vaporized to a sufficiently high temperature in the floating state as shown in Fig. 3, so that the deposition vapor (G ) Is smoothly generated.

At this time, a high frequency alternating current of approximately 1 to 1000 kHz can be applied to the first and second electromagnetic coils 52 and 54 via the AC power supply 56, and the electromagnetic force in the electromagnetic coil due to the applied high frequency alternating current And the molten metal supplied to the inside thereof is heated by the induction heating principle while being levitated by the Lorentz force, and is produced by the vapor deposition.

3 and 4, the first and second electromagnetic coils 52 and 54 of the lifting-and-heating means 50 are preferably disposed at a predetermined distance S from each other, 1 electromagnetic coils 52 may be formed in a cylindrical shape to facilitate the discharge of the deposition vapor (metal vapor) (G in FIG. 3).

The second electromagnetic coil 54 may be formed in a conical shape that becomes narrower toward the lower portion to increase the lifting force of the molten metal and stably maintain the lifting and heating. For example, May be provided in the form of a 'Y' character or a 'V' character,

In this case, since the lowermost inner diameter d of the second electromagnetic coil is narrower than the inner diameter of the first electromagnetic coil on the upper side, the lifting force on the second electromagnetic coil will be increased.

However, it is also possible to form both of the first and second electromagnetic coils 52 and 54 as a cylindrical shape, though not shown in a separate drawing.

Particularly, in the present invention, as shown in FIG. 3, the vaporized vapor generating portion 36a (see FIG. 3) of the vapor inducing means 36 surrounded by the first and second electromagnetic coils 52 and 54 of the lifting- Since the supply pipe 74 of the coating material supply unit 70 is connected to one side or both sides of the lower side and the upper side so as to supply the molten metal, the supply of the conventional solid wire only in the lateral direction (horizontal direction) It is possible to diversify the supply path by realizing a supply path of a wider range of molten metal and to set the apparatus or to utilize space or to operate the coating itself.

That is, as shown in FIG. 3, in the present invention, the supply pipe 74 is connected to the lower portion of the vapor generating portion 36a of the vapor inducing means through the lower center of the second electromagnetic coil 54, The upper part of the deposition vapor generating part is connected to the upper part of the deposition source 52, and the upper and lower supply paths can be realized.

At this time, the lower part of the vapor-generating part 36a is a part where the electromagnetic force is substantially the minimum or substantially does not affect the center of the second electromagnetic coil, and the upper part of the vapor outside the first electromagnetic coil in the vapor- It is almost nothing.

On the other hand, as shown in Fig. 3, it is preferable to wind more the second electromagnetic coil 54 below the first electromagnetic coil 52 for stable lifting.

4, it is preferable that the first electromagnetic coil 52 on the upper side and the second electromagnetic coil 54 on the lower side are wound in opposite directions to each other. Since the current flows in the opposite direction, So that the molten metal is floated more stably while being generated in the coil.

It is preferable that the interval between the coils of the first and second electromagnetic coils (g in FIG. 3) is narrowed to some extent in terms of an increase in calorific power. However, if the distance is too narrow, excessive heat is generated and overheated, .

In addition, it is preferable that the first and second electromagnetic coils 52 and 54 are wound so as to have the same center line as shown in Figs. 3 and 4, and in this case, The levitation position will be adjusted to the center of the second electromagnetic coil.

Meanwhile, although not shown in the drawings, it is also possible to wind all the first and second electromagnetic coils in a cylindrical shape.

Next, as shown in FIGS. 1 and 5, a filter member 130 may be provided in the vicinity of the jet opening 38 provided in the vaporized vapor nozzle portion 36c of the vapor induction means 36. [

For example, the filter member 130 may be provided near an injection opening of the vaporized vapor nozzle portion, for example, on the inside or outside of the injection opening or on the opening formed with the injection opening, and such a filter member 130 may be provided on the generated vapor It removes the chunks that may be included.

That is, it is preferable that the filter member is disposed at least in the vicinity of the injection port 38 in the vapor deposition path before the deposition vapor is deposited on the substrate.

The filter member 130 is preferably provided in the form of a woven structure (net structure) using a heat-resistant metal or a ceramic material because the vaporized vapor G passes through the filter member 130. For example, a wire made of a metal or a ceramic material (thin wire) may be provided by woven fabric (mesh structure) so as to withstand high temperatures.

Thus, the vapor mass on passing through the filter element of the deposition vapor is removed, and the mass that has not passed through the filter element is melted and re-ignited at high temperatures, such a filter element will enable uniform deposition and coating of the substrate.

Next, as shown in FIG. 1, a level sensing sensor 110 for sensing the level of the coating material stored in the crucible 72, that is, the molten metal (bath surface) in the continuous coating apparatus of the present invention, The sensor 110 and the driving cylinder 86 (or electrically driven actuator) or the screw bar drive motor 88a of the valve means 76 and the submergible valve means 80 described above and the lifting- It is possible to electrically connect the AC power supply 56 of the AC power source 50 to the device control unit C so as to control the operation thereof.

In this case, the apparatus control unit C may control the supply amount of the molten metal by adjusting the valve means to precisely control the supply amount of the molten metal in conjunction with the level sensing sensor, and also to control the alternating current applied to the electromagnetic coil of the lifting-

Further, although not separately shown, the apparatus control unit C may also be electrically connected to the respective heating means 90, 92, and 94 to control the heating temperature.

In addition, the device controller C receives a signal from a sensor (not shown) that senses the substrate transfer speed, which is a coating object, and controls the amount of deposition vapor deposited and coated on the substrate through the above- It will be possible to make continuous coating as well as high speed coating.

While the present invention has been particularly shown and described with reference to specific embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the following claims It will be appreciated that those skilled in the art will readily understand the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the entire construction of a continuous coating apparatus according to the present invention

2 is a detailed view showing a coating material supply unit of the continuous coating apparatus of the present invention

Fig. 3 is a schematic view showing the lifting-heating means of the continuous coating apparatus of the present invention

Fig. 4 is a diagram showing an electromagnetic coil of the inventive lifting and heating means of Fig. 3

Fig. 5 is a detailed configuration diagram showing the vapor induction means of the present invention. Fig.

Description of the Related Art [0002]

1 .... Continuous coating apparatus 10 .... substrate

30 .... vacuum chamber unit 36 .... steam induction means

36a .... vaporized vapor generating portion 36b .... vapor inducing portion

36c .... Deposition steam nozzle part 50 .... lifting-heating means

52,54 .... Electromagnetic coil 70 .... Coating material supply unit

72 .... crucible 74 .... feeder

76 .... valve means 80 .... submerged valve means

90, 92, 94 .... heating means

Claims (11)

A vacuum chamber unit (30) through which a coating object passes; Heating means (50) arranged in the vacuum chamber unit (30) and having at least one electromagnetic coil provided to generate and generate vapor of the supplied coating material by electromagnetic force; A vapor inducing means (36) disposed inside the vacuum chamber unit and surrounding the at least a portion of the lifting-and-heating means to induce the evaporated vapor generated therein to induce the evaporated vapor to the coating object; And Heating means and connected to at least one of the upper side and the lower side of the vapor induction means 36 and connected to the outside of the vacuum chamber unit to supply the coating material in a liquid state to the vapor induction means, A unit 70; And a second coating layer. delete The method according to claim 1, The coating material supply unit (70) comprises: a crucible (72) disposed outside the vacuum chamber unit and storing the liquid coating material; And A supply pipe (74) connected to the crucible (72) and the lifting-and-heating means disposed inside the vacuum chamber unit; And a second coating layer formed on the second coating layer. delete The method according to claim 1, The vapor induction means (36) is provided with a supply pipe (74) provided in the coating material supply unit, which is connected to at least one of the upper portion and the lower portion to supply the liquid coating material to the inside, A deposited vapor generating portion 36a; And A vapor induction unit connected to the vapor deposition unit and a deposition vapor nozzle unit connected to the vapor deposition unit or the vapor induction unit and corresponding to a width of the coating target, ); Wherein the coating material is a coating material. 6. The method of claim 5, Wherein the vapor deposition portion and the vaporization portion are provided in the form of a tube, the vapor deposition portion is formed of an electrically nonconductive material, Wherein a heating means (90) is connected to at least one of a vapor induction portion of the vapor induction means and a deposition vapor nozzle portion. 6. The method of claim 5, Further comprising a filter member (130) of a woven structure formed of a heat resistant metal or a ceramic material so as to allow vapor to pass through near the injection port. The method of claim 3, Valve means (76) provided in said supply tube (74); And An immersion type valve means (80) having an opening / closing port (84) provided at a lower portion of a lifting arm (82) for partially lifting and lowering the coating material of the crucible to adjust an opening / closing amount of the supply pipe; Wherein the supply flow rate of the coating material is controlled. The method of claim 3, Further comprising heating means (92) (94) associated with the crucible (72) and the supply pipe (74), respectively. The method according to any one of claims 1, 3, and 5 to 9, Wherein the coating object is configured in the form of a substrate (10) that continuously passes through the vacuum chamber unit, Characterized in that the liquid coating material is provided as molten metal (m). 10. The method according to claim 6 or 9, Wherein the heating means (90) on the steam induction means side or the heating means (92) on the supply tube side are spaced apart by an interval of at least two times larger than the coiled inner diameter of the adjacent electromagnetic coils.

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