KR101639812B1

KR101639812B1 - Apparatus for floating and heating material

Info

Publication number: KR101639812B1
Application number: KR1020090092627A
Authority: KR
Inventors: 정용화; 정우성; 엄문종; 이상철; 김경보; 김태엽; 곽영진; 이동열; 남경훈; 박상훈
Original assignee: 주식회사 포스코
Priority date: 2009-09-29
Filing date: 2009-09-29
Publication date: 2016-07-15
Also published as: KR20110035071A

Abstract

A floatation heating device of a material capable of being heated to a high temperature in a state where a large amount of material is floated is disclosed.

The floating heating apparatus of the material includes: a first member that is wound to generate an alternating electromagnetic field; And an electromagnetic electromagnetic field is generated in cooperation with the first member so that the first member side is wide and the opposite side is narrow in shape so as to prevent leakage of the material in one region, And a second member that is wound so as to have a predetermined length.

According to the floating heater of such a material, it is possible to prevent leakage of the material floated through the second member that is wound so as to have one side wide and one side narrow in one region, so that the large- .

Electromagnetic field, deposition, levitation, heating, coil

Description

[0001] APPARATUS FOR FLOATING AND HEATING MATERIAL [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a floating heating apparatus for a material, and more particularly, to a floating heating apparatus for heating a conductive material used as a material in a floating state to generate coating steam.

When the upper and lower coils are configured so that current flows in opposite directions, the conductive material is heated between the upper and lower coils where the magnetic fields generated by the coils cancel each other.

At this time, the conductive material is held in parallel with the gravity of the material while the conductive material floats in the vertical direction due to the eddy current generated in the conductive medium by the electromagnetic induction and the magnetic field of the induction coil.

There is known a technique in which metal vapor is generated in a vacuum by using a floating heating apparatus of such a material to coat the same.

Such an apparatus relates to physical vapor deposition in which a substrate is coated by generating metal vapor in a vacuum chamber. Generally, in the physical vapor deposition method, a coating material, i.e., a deposition material is heated in a crucible, and a coating material is melted by heating to generate a coating vapor.

In the method using a crucible, energy loss for cooling the crucible is large, and the crucible can be eroded by the coating medium. In order to prevent this, the conductive material is melted and heated while keeping the floating material in a noncontact state with the crucible by using the floating heating device of the above-mentioned material.

However, the conventional lifting heating apparatus has proposed the concept of electromagnetic induction, but it fails to provide a specific implementation technique for the electromagnetic coil for maintaining a high evaporation rate by keeping and heating a large-capacity conductive medium .

An object of the present invention is to provide a flotation heating apparatus for a material which can be heated to a high temperature in a state where a large amount of material is floated.

A floatation heating apparatus for a material according to the present invention comprises: a first member which is wound to generate an alternating electromagnetic field; And

The first member side is wide and the opposite side is narrowed so as to prevent the leakage of the material in one region. A second member that is wound to have the first member;

And a heating device for heating the material.

The second member may include an inclined portion formed to be inclined downward toward the lower side.

The second member may further include a parallel portion disposed below the inclined portion.

The parallel portion may be wound at least twice.

The second member may be wound so as to have a 'V' character or a 'Y' character so that a magnetic field is strongly generated in the lower central portion of the workpiece.

The first member and the second member may be wound in opposite directions to each other.

The first member may be wound to have a cylindrical shape such that the vaporized material is discharged to the upper side.

The second member may be wound such that the inner diameter of the lowermost end thereof is 25 to 30 mm.

The first and second members may include a tube member having a cooling water passage through which cooling water for cooling flows.

The tube member may have a bent portion on the inner peripheral surface to improve the cooling efficiency.

The inner diameter of the lowermost end of the wound second member may be 1.5 to 2 times the outer diameter of the tube member.

The second member may have the same number of windings as the first member or a larger number of windings than the first member.

The interval between the windings of the first and second members wound may be 3 to 5 mm.

According to the present invention, it is possible to prevent leakage of a material floated through a second member that is wound so as to have a wide shape on one side and a narrow shape on the other side, so that the effect of heating a large- have.

Hereinafter, a floatation heating apparatus according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic view showing a workpiece lifting and heating apparatus according to an embodiment of the present invention, FIG. 2 is a structural view showing a workpiece lifting and heating apparatus according to an embodiment of the present invention, Fig. 2 is a configuration diagram showing a floatation heating device of a material according to an embodiment. Fig.

The floating heating apparatus 100 according to the present invention is configured such that a magnetic field generated by an input high frequency power source and an induced current induced in the material interact with each other. That is, the induction heating apparatus 100 is configured such that a strong induction eddy current is generated in the material 10, which is a conductive medium, so that the material 10 is heated to a sufficiently high temperature in a floating state.

On the other hand, the material 10, which is a conductive medium, may be a deposition material that is deposited on the object.

1 to 3, the floating heating apparatus 100 of the workpiece may be connected to an individual current source (not shown) or the same current source (not shown).

The floating heating apparatus 100 of the present invention may also include a first member 120 that is wound and generates an alternating electromagnetic field and a second member 120 that generates an alternating electromagnetic field, And a second member 140 that is disposed to be heated in a state where it is wound.

That is, the second member 140 may be disposed below the first member 120. The first and second members 120 and 140 are spaced apart from each other by a predetermined distance so as to be heated in a floating state between the first member 120 disposed at the upper portion of the material 10 and the second member 140 disposed at the lower portion. .

In addition, since the position where the workpiece 10 floats is variable according to the intensity of the current applied to the first and second members 120 and 140, the spaced apart intervals of the first and second members 120 and 140 are narrowed as narrow as possible, The first and second members 120 and 140 may be disposed such that the amount of heat generated by the members 120 and 140 is increased.

Meanwhile, the first and second members 120 and 140 may be formed into a coil shape in which the workpiece 10 is floated at the center. The coiled coil shape may be a shape symmetrical in the axial direction such as a circle or a square.

Further, the first member 120 and the second member 140 can be wound in opposite directions to each other. As a result, current flows in the opposite direction through the first and second members 120 and 140, so that a canceling magnetic field can be generated in the first and second members 120 and 140.

Then, the first and second members 120 and 140 are wound so as to have substantially the same center line. So that the material 10 can be trapped between the magnetic fields generated by the first and second members 120 and 140.

On the other hand, the first member 120 can be wound to have a cylindrical shape and can be wound slightly larger than the outer diameter of the material 10 to be lifted. That is, the inner diameter of the first member 120 is larger than that of the workpiece 10 so that the workpiece 10 can be disposed inside the first member 120, 10). &Lt; / RTI >

Thus, it is possible to prevent the floated material 10 from escaping to the upper side of the first member 120. [ In addition, the first member 120 can be coiled to prevent the floated material 10 from escaping to the upper side. That is, the number of windings to be wound can be changed according to the size of the floated material 10 in the first member 120.

Further, since the first member 120 is wound so as to have a cylindrical shape, the material to be heated and vaporized can be easily discharged from the first member 120. In other words, the vaporized deposition material can be discharged to the upper side through the center portion of the first member 120 wound to have the cylindrical shape.

In addition, the second member 140 may have the same number of windings as the first member 120 or more windings than the first member 120. Accordingly, the magnetic field of the second member 140 is stronger than the magnetic field of the first member 120, so that the magnetic field generated from the second member 140 cancels the gravity, (120, 140).

On the other hand, the second member 140 may be wound such that one side is wide and the other side is narrow to prevent leakage of the floated material 10 in one region. That is, the second member 140 can be wound so as to have a wide shape at one side and a narrow shape at the other side so as to concentrate the magnetic field generated at the central portion of the one region, It is possible to prevent leakage at the lower center of the second member 140.

In addition, one region of the second member 140 may be an inclined portion 142 formed to be inclined downward toward the lower side. That is, the second member 140 may have a sloped portion 142 having a wide upper side and a narrower lower side so that the floated material 10 leaks from the lower center of the second member 140 .

On the other hand, the second member 140 may have a shape of 'Y' or 'V', for example. That is, the second member 140 may be formed in a 'Y' shape or a 'V' shape having the inclined portion 142.

The second member 140 can be wound such that the inner diameter d of the lowermost end thereof is 25 to 30 mm, so that a sufficient current can be supplied to maintain the floating state of the workpiece 10. That is, if the inner diameter of the lowermost end of the second member 140 is too small, the second member 140 is overheated by self mutual induction of the second member 140, thereby supplying a sufficient current to the second member 140 I can not. As a result, the floating state of the work 10 can not be maintained.

The second member 140 should be wound such that the inner diameter d of the lowermost end of the second member 140 is 25 to 30 mm.

The second member 140 may further include a parallel portion 144 disposed at a lower portion of the inclined portion 142. That is, the second member 140 may be provided with a parallel portion 144 that is wound at least twice at an inner diameter d of 25 to 30 mm. As a result, a sufficient current can be more stably supplied to the second member 140.

In addition, the gap g between the windings of the first and second members 120 and 140 may be 3 to 5 mm. That is, if the interval between the windings is narrowed, the electromagnetic flux can be increased by reducing the leakage magnetic flux, thereby increasing the lifting force and the calorific power of the material 10. Therefore, the first and second members 120 and 140 can be wound so that the gap g between the windings of the first and second members 120 and 140 is 3 to 5 mm.

Meanwhile, as shown in FIG. 4, the first and second members 120 and 140 may include tube members 128 and 148 having cooling water passages 126 and 146 through which cooling water for cooling flows. Further, the tube members 128 and 148 may be provided with bent portions 128a and 148a on the inner circumferential surface to improve the cooling efficiency. That is, since the tube members 128 and 148 have the bent portions 128a and 148a, the contact area is increased, thereby increasing the contact area with the cooling water.

As a result, the cooling efficiency can be increased by the bent portions 128a and 148a to reduce the energy loss.

In detail, when the outer diameter of the tube members 128 and 148 is increased, that is, when the cooling water passages 126 and 146 are extended, the cooling efficiency is increased and the intensity of the electric current can be increased. However, when the same current is supplied, the density of the current flowing into the tube members 128 and 148 having larger outer diameters is lower than that of the tube members 128 and 148 having a smaller outer diameter, so that the floating power and the calorific power are lowered.

Accordingly, the tube members 128 and 148 according to the embodiment of the present invention have the bent portions 128a and 148a on the inner circumferential surface thereof in order to improve the cooling efficiency while preventing the deterioration of the electrical heating and the lifting efficiency.

In addition, the tube members 128 and 148 may be formed to have a sunflower shape in cross section as an example.

On the other hand, the inner diameter d of the lowermost end of the wound second member 140 may be 1.5 to 2 times the outer diameter of the tube members 128 and 148. As a result, a sufficient current can be supplied to the second member 140, and the substrate 10 can be heated in a floating state.

Meanwhile, a table for an experimental example in which zinc (Zn) is heated in a floating state by means of a material floating heater 100 according to an embodiment of the present invention is shown below.

The number of turns of the second member (inclined portion + parallel portion) The outer diameter of the tube member The winding inner diameter of the first member The winding inner diameter of the second member Deposition weight Experimental Example 1 4 + 2 15.88mm 90mm 28.14mm Zn 450g Experimental Example 2 5 + 2 18mm 132mm 28.79mm Zn 1600g

In the above experiment, the second member 140 was formed to have a 'Y' shape and the first and second members 120 and 140 were applied with an alternating current of 3500 A at a frequency of 80 kHz.

In this experimental example, the material (that is, zinc used as the deposition material) was heated in a floating state between the first and second members 120 and 140, and the floating heating apparatus 100 of the material generated a calorific value of 20 kW or more.

As described above, it is possible to prevent the leakage of the material 10 floated through the second member 140 wound on one side so as to have a wide side and a narrow shape on the other side, so that the large- It is possible to vaporize the evaporation material 10 by heating.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be apparent to those skilled in the art that such variations or modifications are within the scope of the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a lifting and heating apparatus for a work according to an embodiment of the present invention; FIG.

FIG. 2 is a view showing a floating heater of a work according to an embodiment of the present invention.

3 is a schematic view showing a floating heating apparatus for a work according to an embodiment of the present invention.

4 is a cross-sectional view illustrating a tube member according to an embodiment of the present invention.

Description of the Related Art

100: Float heating device of material

120: first member

140: second member

142:

144: parallel portion

Claims

A first member for generating an alternating electromagnetic field, the first member being wound in a cylindrical shape so that the vaporized material is discharged to the upper side;

The first member side is wide and the opposite side is narrowed so as to prevent the leakage of the material in one region. A second member wound with a greater number than said first member; And

A cooling water passage through which cooling water flows for cooling the first and second members is formed in the first and second members, and a bent portion is formed on the inner peripheral surface so as to have a sunflower shape in cross- A tube member formed,

The second member has an inclined portion formed to be inclined downward so as to become narrower toward the lower side, and a parallel portion disposed at the lower portion of the inclined portion and wound at least twice. The 'Y' And the inner diameter of the lowermost end is wound to be 25 to 30 mm which is 1.5 to 2 times the outer diameter of the tube member,

Wherein the first and second members are wound so that the interval between the windings is 3 to 5 mm and the first and second members are wound in opposite directions so as to generate a countermagnetic field in the first and second members.

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