KR101626516B1 - Electron Beam Gun having Concave Cathode and Holder - Google Patents

Abstract

The present invention relates to an electron beam emitting apparatus having a concave cathode and a holder which are more stable and capable of operating with high output by suppressing the generation of an arc. According to one embodiment of the present application, An anode disposed on one side of the housing for emitting electrons, an anode for accelerating the electrons emitted from the cathode, the anode being spaced apart from the cathode in the housing in the other direction, And an insulating holder for fixing the cathode, wherein the cathode has a gradient such that a surface facing the anode is concave, and a rim of the surface on which the gradient of the cathode is formed is rounded.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an electron beam emitting apparatus having a concave cathode and a holder,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron beam emitting apparatus including a concave cathode and a holder, and more particularly, to an electron beam emitting apparatus having a concave cathode and a holder which are more stable and capable of high- .

The electron beam emitting apparatus is an apparatus for processing various kinds of materials such as melting or modifying the surface of a workpiece by emitting electrons by using high energy. Recently, the application field has been applied to various processing apparatuses beyond image display means and non-wave inspection apparatuses .

The electron beam emitting apparatus generally uses a thermal method in which a high voltage and a high current are applied to a filament to emit an electron beam. However, it is difficult to maintain a high degree of vacuum and it is difficult to manufacture filaments. .

On the other hand, an electron beam emitting apparatus of the cold type as compared with the above-mentioned thermal type is also introduced. Various types of electron emission devices of the cold type are also introduced.

1 is a view showing an electron beam emitting apparatus using a concave cathode in an electron beam emitting apparatus of a cold system.

1, a conventional electron beam emitting apparatus may include a cathode 20 and an anode 30, an insulating portion 40, and a tube 50.

The cathode (20) is disposed at one end of the tube (50), and a gradient is formed such that the downward facing surface is concave.

The anode 30 is disposed at the other end of the tube 50 and is spaced apart from the cathode 20.

The cathode 20 is fixed to the tube 50 by an insulating part 40 and a driving part 60 for controlling an electric energy applied to the cathode 20 is provided outside the insulating part 40, And a cooling unit 70 for cooling the cathode 20 is provided.

Meanwhile, the tube 50 is made of a quartz material which can be insulated while observing the internal state and at the same time, being able to withstand high temperatures.

In addition, a focusing unit 80 and a deflecting unit 90 are provided below the anode 30 to focus and deflect the emitted electron beam.

Accordingly, the electrons emitted from the cathode 20 are accelerated by the anode 30 and are emitted to form an electron beam. The electrons are converged while passing through the focusing unit 80, and emitted through the deflection unit 90 The direction can be deflected.

However, the conventional electron beam emitting apparatus has the following problems.

2, when the rim 22 of the cathode 20 is formed in a tip shape and high energy is applied, an arc is generated at the rim 22 of the cathode 20, (10) becomes unstable and becomes a limit point for raising the output.

Secondly, a quartz tube is used as the tube 50, which is liable to be damaged by impact applied during operation of the apparatus and repeated thermal shock.

Thirdly, when metal is processed as an object to be processed in the electron beam emitting apparatus 10, a metal vapor evaporated by an electron beam may be adhered to the tube to deposit the metal vapor. An arc is generated during the operation of the tube, which limits the use time of the tube.

Fourth, when electrons are reflected from the anode 30, harmful radiation such as X-rays may be generated. Since the quartz tube can not block such radiation, there is a problem that a harmful environment can be created to the operator.

US registered patent 4,998,044

SUMMARY OF THE INVENTION It is an object of the present invention to provide an electron beam emitting apparatus capable of stably operating for a long time and capable of high output.

The problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a method of manufacturing a plasma display panel, including: a housing having a space in which an electron beam is accelerated and an opening through which an electron beam is emitted on the other side; An anode for accelerating electrons emitted from the cathode, the insulating holder being located apart from the cathode in the housing to the other side, an insulating holder for insulating the cathode from the housing and fixing the cathode, An electron beam emitting apparatus is disclosed in which a gradient is formed so that the surface on which the anode is viewed is concave and the edge of the surface on which the gradient of the cathode is formed is rounded.

The insulating holder may be formed to extend to the rounded portion of the rim of the cathode, which surrounds the rear surface of the surface on which the gradient of the cathode is formed and the side surface of the cathode.

The cathode may be disposed such that a surface thereof facing the anode is closer to the anode than the insulating holder.

And a tube of a metal material forming the side surface of the housing may be provided.

The tube is insulated from the cathode and can be grounded.

A cooling unit for cooling the cathode by air cooling may be further provided between the cathode and the insulating holder.

The cooling unit is composed of an upper plate and a lower plate, and a channel through which air flows may be formed between the upper plate and the lower plate.

The electron beam emitting apparatus of the present application has the following effects.

First, since the edge of the cathode does not form peak, generation of arc is suppressed, so that operation can be performed more stably and the limit output can be further increased.

Secondly, since the space between the cathode and the insulation holder is reduced, the space for storing the electric charge is reduced, so that the capacitance is reduced between the cathode and the insulation holder, so that generation of arc is suppressed so that the operation can be stably performed. have.

Third, since the tube is made of a metal material, there is no possibility of breakage due to thermal shock such as thermal expansion and heat shrinkage and impact applied from the outside, and generation of arc due to fume is suppressed due to grounding, , The lifetime of the equipment can be increased.

Fourth, since the tube is made of a metal material, X-rays generated when electrons are reflected from the anode side can be blocked, and safety of the worker is improved. The effects of the present invention are not limited to the above- And other effects not mentioned may be clearly understood by those skilled in the art from the description of the claims.

The foregoing summary, as well as the detailed description of the preferred embodiments of the present application set forth below, may be better understood when read in conjunction with the appended drawings. For the purpose of illustrating the invention, there are shown preferred embodiments in the figures. It should be understood, however, that this application is not limited to the precise arrangements and instrumentalities shown.
1 is a cross-sectional view of a conventional electron beam emitting apparatus;
FIG. 2 is an enlarged cross-sectional view of a portion of FIG. 1; FIG.
3 is a cross-sectional view showing an example of an electron beam emitting apparatus according to the first embodiment of the present application;
4 is an enlarged cross-sectional view of a portion of FIG. 3;
5 is a cross-sectional view showing an example of an electron beam emitting apparatus according to a second embodiment of the present application; And,
6 is an enlarged cross-sectional view of a portion of FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted.

The electron beam emitting apparatus 100 according to the first embodiment of the present application may include a housing 150, a cathode 120, an anode 130, and an insulating holder 140, as shown in FIG.

The housing 150 includes a cathode 120, an anode 130, and the like. The housing 150 is a component for forming a space in which an electron beam is accelerated. An opening 132 through which accelerated electron beams are emitted may be formed on the other side And the inside of the housing 150 can form a vacuum atmosphere.

A cathode 120 is provided on one side of the housing 150. The cathode 120 is a component that receives electrons and emits electrons. In this embodiment, the cathode 120 is formed of a metal and has a predetermined thickness.

The anode 130 may be spaced apart from the cathode 120 in the housing 150. The anode 130 is an element for receiving electrons and accelerating the electrons emitted from the cathode 120. An opening 132 through which accelerated electrons pass may be formed.

The insulating holder 140 isolates the cathode 120 from the housing 150 and fixes the cathode 120 to the housing 150.

A driving unit 160 for supplying electrical energy to the cathode 120 or the anode 130 and a cooling unit 170 for cooling the cathode 120 may be provided on one side of the insulating holder 140.

Although not shown in the drawing, a focusing unit (not shown) and a deflecting unit (not shown) for focusing or deflecting the electron beam passing through the opening 132 of the anode 130 are provided on the other side of the anode 130 .

Therefore, when electric energy is applied to the cathode 120 and the anode 130, electrons are emitted from the cathode 120 and accelerated toward the anode 130, and then emitted through the opening 132 of the anode 130 .

According to the electron beam emitting apparatus according to the first embodiment of the present invention, as shown in FIGS. 3 and 4, the cathode may have a concave surface facing the anode 130.

The rim 122 of the cathode 120 may be rounded.

The insulating holder 140 is formed to surround the rear surface of the surface of the cathode 120 where the gradient of the cathode 120 is formed and the side surface of the cathode 120. The insulating holder 140 surrounds the side surface of the cathode 120 The wrapping portion may be formed to extend to the rounded portion 122 of the cathode rim.

Accordingly, since the tip of the cathode 120 is not formed with a pointed tip, arc generation is prevented, and stable operation is possible.

In addition, the insulating holder 140 may extend to the side of the cathode 120 to prevent arcing between the housing 150 and the cathode 120.

Hereinafter, the electron beam emitting apparatus 200 according to the second embodiment of the present application will be described.

FIG. 5 illustrates an electron beam emitting apparatus according to the present embodiment, and may include a housing 250, a cathode 220, an anode 230, and an insulating holder 240.

In the present embodiment, the housing 250, the cathode 220, and the anode 230 are substantially the same as those in the above-described embodiment, and thus a detailed description thereof will be omitted.

The insulating holder 240 according to the present embodiment extends to cover the rear surface of the surface on which the gradient of the cathode 220 is formed and the side surface of the cathode 220 similar to the embodiment described above, Likewise, the portion of the cathode 220 that surrounds the side surface may be extended to cover a part of the rounded portion 222 of the cathode edge.

That is, the cathode 220 may be positioned closer to the anode 230 than the insulating holder 240.

As shown in FIG. 4, since the rim 122 of the cathode is rounded, a space C may be formed between the insulating holder 140 and the cathode 120.

6, the cathode 220 is electrically connected to the insulating holder 240, and the cathode 220 is electrically connected to the insulating holder 240. In this case, The gap between the cathode 220 and the insulating holder 240 is reduced and the space C where the charge is stored is reduced so that the gap between the cathode 220 and the insulating holder 240 is reduced, The generation of arc is suppressed because the turn is reduced, so that the operation can be performed more stably and the limit output can be further increased.

Hereinafter, an electron beam emitting apparatus according to a third embodiment of the present application will be described with reference to FIGS. 3 and 5. FIG.

The electron beam emitting apparatus according to the present embodiment may include the housings 150 and 250, the cathodes 120 and 220, the anodes 130 and 230, and the insulating holders 140 and 240.

In the present embodiment, the cathodes 120 and 220, the anodes 130 and 230, and the insulation holders 140 and 240 are the same as those of the above-described embodiment, and thus a detailed description thereof will be omitted. 150 and 250 will be described. Since the tubes 152 and 252 forming the housings 150 and 250 have different materials and other structures are the same, the same reference numerals are used for the electron beam emitting apparatuses according to the first and second embodiments .

The housing 150, 250 of the electron beam emitting apparatus according to the present embodiment includes tubes 152, 252 that form the circumference of the side surface thereof.

In this case, the tubes 152 and 252 may be formed of a metal material and may be insulated from the cathodes 120 and 220. Insulators 154 and 254 may be provided between the tubes 152 and 252 and the cathodes 120 and 220 and the tubes 152 and 252.

And, ground 156, 256 can be made.

When the metal is processed as the electron beam emitting apparatus, metal vapor is generated from the molten metal, and the generated metal vapor can be deposited on the inner surface of the tubes 152 and 252.

At this time, since the tubes (152, 252) are grounded (156, 256), the electrons around the metal vapor adhered to the inner surfaces of the tubes (152, 252) flow to the ground The arc is prevented from being generated, so that stable operation can be performed and the limit output can be raised.

In addition, due to the nature of the metal material, the external impact and repetition are resistant to thermal shock, and semi-permanent use is possible because operation is possible without removing the deposited metal vapor.

In addition, when electrons are reflected from the anode or the like, harmful radiation such as X-rays may be generated. Since the tube is made of a metal material, such radiation can be shielded and safety of the operator can be improved.

5, the cooling unit 270 includes an upper plate 272 and a lower plate 274, and a flow path 276 through which air flows can be formed inside the cooling plate 270. As shown in FIG. Also, the cooling air supply device (not shown) outside the flow path 276 is connected to the cooling air supply device (not shown) so that external air is circulated to cool the cathode 220 in an air-cooling manner.

When the cathode 220 is cooled by water-cooling using cooling water, a current leakage phenomenon may occur in which a current applied to the cathode 220 flows to the cooling water side despite the insulation when a high voltage is applied to the cathode 220 , The present application can eliminate the current leakage phenomenon by cooling the cathode 220 in an air-cooling manner.

It will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit or scope of the invention as defined in the appended claims. It is obvious to them. Therefore, the above-described embodiments are to be considered as illustrative rather than restrictive, and the present invention is not limited to the above description, but may be modified within the scope of the appended claims and equivalents thereof.

100, 200: electron beam emitting device 120, 220: cathode
122, 222: Rounded portion of the cathode rim
130, 230: anode 132, 232: opening
140, 240: Insulation holder 150, 250: Housing
152, 252: Tube 154: 254: Insulator
156, 256: ground 160, 260:
170, 270:

Claims (7)

A housing having a space through which the electron beam is accelerated and an opening through which the electron beam is emitted;
A cathode disposed at one side of the housing to emit electrons;
An anode positioned within the housing and spaced apart from the cathode to accelerate electrons emitted from the cathode;
An insulating holder for insulating the cathode from the housing and fixing the cathode;
/ RTI >
The cathode has a gradient such that the surface facing the anode is concave, and the edge of the cathode has a rounded edge.
Wherein the insulating holder surrounds the rear surface of the surface on which the gradient of the cathode is formed and the side surface of the cathode and extends to the side of the rim of the cathode,
Wherein the cathode is disposed such that a surface thereof facing the anode is closer to the anode than the insulating holder.
delete delete The method according to claim 1,
And a tube made of a metal material forming the side surface of the housing. 5. The method of claim 4,
Wherein the tube is insulated from the cathode and grounded. The method according to claim 1,
And a cooling unit for cooling the cathode by air cooling is further provided between the cathode and the insulating holder. The method according to claim 6,
Wherein the cooling section is composed of an upper plate and a lower plate, and a flow path through which air flows is formed between the upper plate and the lower plate.

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