KR101620639B1 - Alloy Deposition Apparatus - Google Patents
Alloy Deposition Apparatus Download PDFInfo
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- KR101620639B1 KR101620639B1 KR1020090092628A KR20090092628A KR101620639B1 KR 101620639 B1 KR101620639 B1 KR 101620639B1 KR 1020090092628 A KR1020090092628 A KR 1020090092628A KR 20090092628 A KR20090092628 A KR 20090092628A KR 101620639 B1 KR101620639 B1 KR 101620639B1
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Abstract
There is provided an alloy coating apparatus for coating (depositing) an alloy film on an object.
The alloy coating apparatus includes a plurality of evaporation vessels for generating metal vapor and a plurality of evaporation vessels connected to the evaporation vessels, wherein the metal vapor inflow space and the metal vapor are mixed with each other to be deposited and formed as an alloy film of the object to be coated And a steam mixing unit configured such that at least a part of the steam mixing space discharged into the alloy steam is blocked and configured for steam mixing. Preferably, the steam mixing unit may include a slit for blocking the steam inlet space and the steam mixing space.
According to the present invention, it is possible to realize smooth mixing of vaporized metal vapor from two evaporation sources, and in particular to provide an improved coating material for preventing deposition deviation of an object to be coated and ultimately uniformizing the thickness or component distribution of the alloy coating Effect can be obtained.
Alloy film, mixed induction, deposition, uniform component distribution, uniform thickness distribution
Description
The present invention relates to an alloy coating apparatus for coating (depositing) an alloy coating film made of metals of different components on a coating object, more particularly, And more particularly to an alloy coating apparatus in which the longitudinal directional deposition deviation of an object to be coated is prevented and ultimately the thickness or the component distribution of the alloy coating is uniformly uniform.
Vacuum coating (vapor deposition) is one of physical vapor deposition techniques that use vacuum to coat materials such as zinc, aluminum, silver, gold, copper, and tin into materials such as metal, glass, and plastic. Since the physical vapor deposition technique does not affect the environment compared to the conventional wet plating, its application is gradually increasing to meet the trend of emphasizing the eco-friendly manufacturing environment.
As a method for producing a thin film by vacuum coating (vapor deposition), a resistance heating type vacuum deposition, an induction heating type vacuum deposition or an electron beam heating type vacuum deposition method and the like are known.
In contrast, when the alloy is used as compared with a single metal, the corrosion resistance is increased due to the unique properties of the alloy. In this case, after two evaporation sources are positioned close to each other so as to facilitate alloying, Thereby forming a film.
However, in the case of forming the alloy film by the above-described method, when the composition of the object to be coated, that is, the alloy of the alloy formed on the substrate is largely varied in the width or the longitudinal direction of the object, The distribution becomes larger.
Another method for forming an alloy film is to evaporate the parent alloy by using the parent alloy as a vaporizing material. This is to form a film on an object (substrate) to be coated by placing a parent alloy in which an alloy component is predetermined in an evaporation source, It is possible to coat easily. However, it is not easy to form an alloy film because of the difference in vapor pressure or the fact that two alloys are easily separated when they are melted.
Another problem that arises when the alloy coating is formed using vacuum deposition is that the evaporation mass adheres to the substrate or clusters are formed to deteriorate the surface appearance, and in particular, the evaporation instability of the metal vapor and The variation of the evaporation rate caused by the variation of the composition of the alloy forming the film as well as the variation of the thickness distribution.
In the meantime, Patent Application No. 2006-0135674, which includes a part of inventors of the present invention and applied for a patent in the Republic of Korea, discloses a method of controlling the composition and thickness distribution of an alloy by providing a nozzle type distribution slit for solving the above- There is a problem that clogging of the nozzle type distribution slit easily occurs.
That is, the clogging of the nozzle-shaped distribution slit is easily generated, the period of use of the evaporation source is shortened, and a coating failure occurs due to clogging of the nozzle.
Accordingly, the applicant of the present invention has proposed the present invention, which facilitates the formation of an alloy film not of a single metal, and in particular, prevents the length, the width direction component and the thickness variation of the object (substrate, steel plate, etc.).
It is an object of the present invention to solve the above-mentioned problems of the prior art, and it is an object of the present invention to provide a vapor deposition apparatus which can smoothly mix vaporized metal vapor from two evaporation sources, prevent deposition deviation of an object to be coated, And to provide an alloy coating apparatus in which the film thickness or the component distribution is made uniform.
According to an aspect of the present invention, there is provided an evaporation apparatus including: a plurality of evaporation vessels for generating different metal vapors; And
Wherein at least a part of the vapor mixing space discharged from the alloy vapor, which is mixed with the metal vapor inflow space and the metal vapor and is deposited as an alloy film of the object to be coated, is interrupted and mixed with the steam mixture unit;
And an alloy coating apparatus comprising the same.
Preferably, the apparatus further comprises a connection pipe connected between the evaporation vessel and the steam mixing unit, wherein the connection pipe further comprises a vapor uniform discharge means provided so as to realize a uniform discharge of the metal vapor.
More preferably, the steam mixing unit comprises: a unit body, which is connected to both sides of a lower portion of a connection pipe connected to the evaporation vessel; and at least a part of the steam introduction space and the steam mixing space, And a slit for separating and forming the slits.
At this time, the slits are arranged vertically apart from the unit body connection point of the coupling pipe while being spaced apart from each other in the unit body of the steam mixing unit, so that the steam passing gap is formed adjacent to the unit body surface so as to allow uniform discharge of the alloy vapor .
More preferably, the slit further includes a cut-off surface formed at both lower edges of the slit to control the steam flow.
The slit may be vertically installed on both sides of a lower portion of a slit mount through which an alloy vapor outlet is formed, mounted on an opening formed on a unit body of the steam mixing unit, and a sealing sheet may be interposed between the slit mount and the unit body. have.
In addition, the apparatus further includes an alloy vapor nozzle unit disposed on the alloy vapor outlet of the slit mount and equipped with a nozzle orifice for discharging alloy vapor deposited on the object to be coated.
Preferably, the apparatus further comprises a screen member interposed between the alloy vapor nozzle unit and the slit mounting member mounted on the steam mixing unit or the mixing unit.
More preferably, the apparatus further comprises a vapor guide unit interposed between the screen member and the nozzle unit and having a vapor passage opening.
At this time, the evaporation vessel, the connection pipe, the steam mixing unit, and the guide unit may be further provided with heating means disposed at least close to the evaporation vessel and the connection pipe.
More preferably, the cut length d of the slit cut surface is in the range of 1/6 - 1/12 of the slit length D.
According to the alloy coating apparatus of the present invention, in addition to uniformly inducing the supply of the metal vapor from the evaporation vessel to the vapor mixing unit (tank), the mixing ability of each metal vapor introduced into the vapor mixing unit is maximized, , It is possible to suppress the concentration of the film on the central portion of the object to be coated, thereby providing an effect of highly uniformizing the composition or the thickness distribution of the film formed on the object to be coated.
In addition, since it is deposited on the object to be coated after passing through the screen member provided on the lower side of the nozzle unit, the mixing ability of the metal vapor is further improved and the clogging of the nozzle by the vapor mass is prevented.
Therefore, in the case of the alloy coating apparatus of the present invention, it is possible to easily form a wide range of alloy coatings such as a steel sheet having a width, because a coating having a uniform component or thickness distribution is formed by vapor deposition. As a result, the present invention will improve the quality of the coating product.
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
1 and 2, an overall configuration of an
1 and 2, the
For example, in the
The gaseous vapor (g1 ', g2' in FIG. 1) is mixed and discharged in a single
1, the object to be coated 10, for example, a substrate and the like are schematically shown in the drawings, but they are mounted on a substrate holder 14 (in a cylindrical shape) (G) that is evaporated as it evaporates can be deposited, and between the substrate and the apparatus of the present invention, the deposition of the unstable alloy vapor (G) Can be disposed.
Further, as shown by a dotted line in Fig. 1, it is preferable to form at least a region where the alloy vapor is deposited and coated on the surface of the object to be coated, in a vacuum atmosphere (vacuum chamber 4).
Needless to say, the size of the
Therefore, in the
Preferably, a connection pipe 70 (which may be a tube or a duct) is connected between the
2 and 3, the steam uniform discharge means 72 is mounted on the upper side of the
That is, when the metal vapor g1 (g2) generated by heating by the heating means 150 in the
Therefore, in the present invention, as shown in FIG. 1, the metal vapor passes through the orifice, which is the steam uniform discharge means 72, immediately before flowing into the
3, the ratio of the inner diameter S1 of the orifice which is the vapor uniform discharge means 72 to the inner diameter S2 of the connecting tube S2 is made smaller than 1/2.
For example, if the ratio of the inner diameter of the orifice to the inner diameter of the connecting tube is larger than 1/2, the effect of uniformly discharging the metal vapor is small, so that it is preferable to maintain the above ratio.
Next, as shown in Figs. 1 to 3, in the
For example, the
3, the
3, vapors of Zn and Mg, which are generated in the
Then, steam flows from the bottom of the inflow space A1 to the upper layer, and the steam collides with the inflow space and is mixed in the steam mixing space through the steam passage gap A3.
As a result, the
In addition, steam mixing will be improved in the steam mixing space through intergranular collision and vortex during steam flow in the steam inflow space where a part is separated and blocked by the slit.
Even if the inflow amount of the metal vapor introduced into the vapor mixing space A1 formed by the slit is unstable, the metal vapor flows only through the narrow vapor passage gap A3 between the slit end and the unit body side and the bottom, So that the metal vapor always flows into the vapor mixing space at a constant rate and at a constant rate in a stable state, resulting in uniform distribution of the composition and thickness distribution of the
2 and 3, the
Therefore, as shown in FIG. 3, since the cut-off
In this case, when the cut area d * d (d is the cut length and width of the slit edge) of the slit cut-off
For example, when the cut area d * d of the
1 and 2, the
That is, the slit can be attached and detached via a mounting hole on the steam mixing unit of the apparatus, and it is possible to adjust the size of the slit to adjust the cut-off area of the steam passage gap A3 and the cut- .
At this time, preferably, a sealing
2, a nozzle hole (not shown) for discharging the alloy vapor G deposited on the substantially object 10 to be coated, which is disposed on the
The alloy
That is, the
Next, preferably, between the
At this time, although the
More preferably, the
Accordingly, such a
That is, the alloy vapors collide with the screen member while passing through the
Eventually, the alloy vapors passing through the screen member will be more uniformly mixed and deposited on the coating object to make the composition distribution or thickness distribution of the coating more uniform.
On the other hand, as shown in Figs. 1 and 2, in the
More preferably, the
That is, it is preferable to maintain the temperature even during the movement of the vapor so as not to cause condensation of the vapor or the like due to the temperature drop.
On the other hand, FIG. 4 graphically shows the composition distribution of Mg and the thickness distribution when the Zn-Mg alloy is formed from the
For example, as shown in Fig. 1, a Zn-Mg alloy film is formed on an electrogalvanized steel sheet. A galvanized steel sheet (film metabolite (10)) having a thickness of about 0.5 mm is stretched by 70 cm in length and 30 cm in width (Vacuum chamber 4) of FIG. 1 is placed in a vacuum-sealed state in which the vacuum chamber (vacuum chamber 4) is evacuated to vacuum Vacuum evacuation is performed using a pump (not shown) to form an alloy deposition region in a vacuum atmosphere.
At this time, the
Then, the
Therefore, when the Zn-Mg alloy film is formed, as shown in the graph of FIG. 4, when the apparatus of the present invention is used, the Mg content is uniform to 10.5% on average, %. ≪ / RTI >
As a result, the
Particularly, such an alloy coating apparatus of the present invention is not structurally complicated, so that facility construction and operation will be convenient.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the following claims And can be changed. However, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.
1 is a schematic view showing an alloy coating apparatus according to the present invention
Fig. 2 is an exploded perspective view of Fig.
FIG. 3 is a side view showing a slit of the alloy vapor unit viewed in the direction of 'T' in FIG. 1
4 is a graph showing the distribution of Mg component and the thickness distribution of the alloy coated on the steel sheet through the apparatus of the present invention
Description of the Related Art [0002]
1 ....
12 ....
50 ....
54 .... slit 56 .... slit incision surface
62 ....
70 ....
90 .... alloy
110 ....
150 .... heating means
Claims (11)
Priority Applications (1)
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KR1020090092628A KR101620639B1 (en) | 2009-09-29 | 2009-09-29 | Alloy Deposition Apparatus |
Applications Claiming Priority (1)
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KR1020090092628A KR101620639B1 (en) | 2009-09-29 | 2009-09-29 | Alloy Deposition Apparatus |
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KR20110035072A KR20110035072A (en) | 2011-04-06 |
KR101620639B1 true KR101620639B1 (en) | 2016-05-13 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101314535B1 (en) * | 2012-03-12 | 2013-10-04 | 주식회사 선익시스템 | Vapor Deposition Apparatus for Deposition of Mixtures |
KR101461738B1 (en) | 2012-12-21 | 2014-11-14 | 주식회사 포스코 | Apparatus for heating materials and coatting system having the same |
KR101646185B1 (en) * | 2015-02-16 | 2016-08-16 | 주식회사 파인에바 | Linear Evaporation Deposition Apparatus |
KR101899678B1 (en) * | 2016-12-21 | 2018-09-17 | 주식회사 포스코 | Filter unit and coating apparatus having thereof |
CN112553578B (en) * | 2019-09-26 | 2022-01-14 | 宝山钢铁股份有限公司 | Vacuum coating device with flow-inhibiting nozzle |
CN113957390B (en) * | 2020-07-21 | 2024-03-08 | 宝山钢铁股份有限公司 | Vacuum coating device with air cushion buffer cavity |
CN113957389B (en) * | 2020-07-21 | 2023-08-11 | 宝山钢铁股份有限公司 | Vacuum coating device with porous noise reduction and uniform distribution of metal vapor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100669062B1 (en) | 2004-01-29 | 2007-01-15 | 미쯔비시 히다찌 세이떼쯔 기까이 가부시끼가이샤 | Vacuum evaporator |
KR100833014B1 (en) | 2006-12-27 | 2008-05-27 | 주식회사 포스코 | Evaporation apparatus for alloy deposition |
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2009
- 2009-09-29 KR KR1020090092628A patent/KR101620639B1/en active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100669062B1 (en) | 2004-01-29 | 2007-01-15 | 미쯔비시 히다찌 세이떼쯔 기까이 가부시끼가이샤 | Vacuum evaporator |
KR100833014B1 (en) | 2006-12-27 | 2008-05-27 | 주식회사 포스코 | Evaporation apparatus for alloy deposition |
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