KR101594144B1 - Hydraulic actuator for applying mechanical lock structure used poppet and spring - Google Patents

Hydraulic actuator for applying mechanical lock structure used poppet and spring Download PDF

Info

Publication number
KR101594144B1
KR101594144B1 KR1020150156958A KR20150156958A KR101594144B1 KR 101594144 B1 KR101594144 B1 KR 101594144B1 KR 1020150156958 A KR1020150156958 A KR 1020150156958A KR 20150156958 A KR20150156958 A KR 20150156958A KR 101594144 B1 KR101594144 B1 KR 101594144B1
Authority
KR
South Korea
Prior art keywords
hole
poppet
spring
piston
hydraulic actuator
Prior art date
Application number
KR1020150156958A
Other languages
Korean (ko)
Inventor
이용준
이대철
Original Assignee
이용준
이대철
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이용준, 이대철 filed Critical 이용준
Priority to KR1020150156958A priority Critical patent/KR101594144B1/en
Application granted granted Critical
Publication of KR101594144B1 publication Critical patent/KR101594144B1/en

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/02—Mechanical layout characterised by the means for converting the movement of the fluid-actuated element into movement of the finally-operated member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/02—Mechanical layout characterised by the means for converting the movement of the fluid-actuated element into movement of the finally-operated member
    • F15B15/06—Mechanical layout characterised by the means for converting the movement of the fluid-actuated element into movement of the finally-operated member for mechanically converting rectilinear movement into non- rectilinear movement
    • F15B15/065—Mechanical layout characterised by the means for converting the movement of the fluid-actuated element into movement of the finally-operated member for mechanically converting rectilinear movement into non- rectilinear movement the motor being of the rack-and-pinion type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/26—Locking mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation
    • F16K35/04—Means to prevent accidental or unauthorised actuation yieldingly resisting the actuation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
    • F15B2211/72—Output members, e.g. hydraulic motors or cylinders or control therefor having locking means

Abstract

The present invention relates to a hydraulic actuator for applying a mechanical lock apparatus of a poppet and a spring. The hydraulic actuator comprises: a housing (10) for forming a first hole (11) to move a piston (12) for forming a rack gear engaged with a pinion gear (13) at a main side surface; a side cover (20) individually combined at both sides of the housing (10), for forming a second hole (21) for being opened to a first hole (11) side and capable of moving a rock holder (14) to a piston (12) end part of both sides, and including an external side end unit to block a second hole (21) from the outside by a combination of a plug (22); and a stopper (30) for controlling the movement of the piston (12) by making the poppet (32) come out of the second hole (21) by the pressure of oil supplied to the second hole (21) and an elastic force of the spring by being individually included on the outer circumference at the side cover (20) of the both sides. The present invention enables the stable operation of an operating unit by allowing unlocking, piston movement, and piston locking only when the oil pressure of a fluid selectively supplied to the side cover (20) of the both sides is equal to or higher than a predetermined pressure.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a hydraulic actuator for applying a mechanical lock to a poppet and a spring,

The present invention relates to a hydraulic actuator using a mechanical locking device of a poppet and a spring. More particularly, the present invention relates to a hydraulic actuator which is adapted to move and fix a piston only by supplying a normal hydraulic pressure and to prevent the piston from moving further By applying the mechanical locking device of the poppet and the spring which can precisely restrict the travel distance of the piston by precisely limiting the operation distance of the valve, The present invention relates to a hydraulic actuator.

In general, the opening and closing of various valves is performed by automatic or manual operation, while valves of relatively small size are manually operated, whereas valves installed in large size or in a place where direct operation is difficult are operated by automatic operation .

The valve actuating means for automatically opening and closing the valve is driven by an electric actuator using a solenoid and a hydraulic actuator using air and oil.

Such a valve drive actuator generally employs an electric actuator in a valve of a relatively small size and a hydraulic actuator in a middle or large valve in which a large driving force is required depending on a valve drive method and size.

Particularly, the hydraulic actuator is similar to that of a hydraulic cylinder, but allows various operating means such as a valve to be rotationally operated by a rack and a pinion connection method by a piston slidingly moved by hydraulic pressure in a hydraulic cylinder.

However, if the hydraulic pressure supplied to the hydraulic actuator does not reach the operating pressure at any moment, the operating means will cause an operating error, and if this operating means is applied to control the supply of dangerous materials, Which is a cause of the problem.

Registration No. 1424423 (Jul. 23, 2014)

In order to solve the above-mentioned problems, the present invention provides a hydraulic pressure control apparatus for a hydraulic pressure control apparatus, which is capable of releasing a locked state of a piston by a normal hydraulic pressure from one side, And a hydraulic actuator using a mechanical lock device of a spring and a spring.

It is another object of the present invention to provide a hydraulic actuator using a mechanical lock device of a poppet and a spring, which enables the operation clearance of the valve to be set as a zero state by a limiter adjustment of the side cover.

In order to achieve the above-mentioned object, a hydraulic actuator using a mechanical lock device of a poppet and a spring according to the present invention forms a first hole for movably accommodating a piston formed on one main surface of a rack gear which is gear- ; A second hole which is connected to both sides of the housing and is movable toward the first hole while allowing a lock holder respectively connected to the piston ends of the two pistons to move, A side cover to be blocked; And a stopper provided on the outer circumferential surface of each of the side covers on both sides so as to allow the poppet to protrude / retract into the second hole due to the biasing force of the spring and the hydraulic pressure supplied to the second hole, thereby stopping the movement of the piston.

In the hydraulic actuator using the mechanical lock of the poppet and spring according to the present invention according to the present invention, fluid is selectively supplied to the side covers on both sides, while the side cover in which fluid is normally supplied is released from the locked state of the piston, To the side cover of the other side so as to be locked by the side cover of the other side, thereby stopping the movement of the piston when a hydraulic circuit problem occurs in accordance with the state of the hydraulic pressure supplied to the side cover, So that the occurrence is prevented.

Further, according to the present invention, the operation clearance of the valve is removed by a simple operation of the limiter in each side cover, thereby realizing more accurate valve operation.

1 is a front sectional view illustrating a hydraulic actuator to which a mechanical lock device of a poppet and a spring according to the present invention is applied;
Figure 2 is an example of a stopper in a hydraulic actuator to which a mechanical locking device of a poppet and spring according to the present invention is applied.
3 shows another example of a stopper in a hydraulic actuator to which a mechanical locking device of a poppet and a spring according to the present invention is applied
4 shows another example of a stopper in a hydraulic actuator to which a mechanical lock device of a poppet and a spring according to the present invention is applied
FIG. 5 is a diagram showing an operating state in which hydraulic pressure is supplied to a side cover of one side in a hydraulic actuator to which a mechanical locking device of a poppet and a spring according to the present invention is applied
6 is an operating state diagram illustrating a state in which a piston is locked by a hydraulic actuator to which a mechanical lock device of a poppet and a spring according to the present invention is applied
Fig. 7 is an operational state diagram illustrating a state in which the locking of the piston is released by the hydraulic actuator to which the mechanical locking device of the poppet and spring according to the present invention is applied
8 is a schematic view of a limiter operation structure of a hydraulic actuator using a mechanical lock device of a poppet and a spring according to the present invention

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of a hydraulic actuator using a mechanical lock device of a poppet and a spring according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a front sectional view illustrating a hydraulic actuator to which a mechanical lock device of a poppet and a spring according to the present invention is applied.

As shown in the drawings, the present invention includes a housing 10, a side cover 20, and a stopper 30.

In the present invention, the housing 10 is formed with a first hole 11 in which a piston 12 is received so as to be movable in the longitudinal direction, and a rack gear 120 is formed on an outer circumferential surface of the piston 12 And the pinion gear 13 is connected to the rack gear 120 of the piston 12 by gear engagement so that the pinion gear 13 is rotated by the sliding movement of the piston 12 to rotate the pinion gear 13 (Not shown) for opening and closing the valve.

At this time, the piston 12 is fixed to both ends of the lock holder 14 having a smaller outer diameter by a screw fastening method, and a stopper groove 140 having a smaller outer diameter is formed at the outer end of the lock holder 14, And the outer end of the stopper groove 140 is formed so as to have a smaller outer diameter than the outer diameter of the stopper groove 140 so that the outer circumferential surface is inclined at a predetermined angle Do.

Meanwhile, the lock holder 14 formed by both end portions of the piston 12 may be formed integrally with the piston 12. [

The side cover 20 is screwed to both sides of the housing 10.

The side cover 20 has a structure in which a second hole 21 having an inner diameter larger than the outer diameter of the lock holder 14 coupled to the end of the piston 12 of the housing 10 and opened to the housing 10 side is formed .

The second hole 21 of the side cover 20 is fully opened only to the first hole 11 side of the housing 10 and the second hole 21 corresponding to the second hole 21 is communicated with the outside So that the plug 22 is screwed.

A limiter 23 is screwed to the end of the plug 22 on the side of the second hole 21 at the outer end of the side cover 20 where the plug 22 is engaged, So as to be movable.

That is, the limiter 23 in the side cover 20 separates the plug 22 from the side cover 20 and then rotates using a separate mechanism so that the second hole 21 is rotated by a predetermined pitch, So that the movement length of the piston 12 is limited.

The stopper 30 is provided on the outer circumferential surface of the both side cover 20 of the present invention.

The stopper 30 of the present invention has the third hole 31 formed in the side cover 20 on both sides so as to communicate with the second hole 21 from the outer circumferential surface thereof, And the end of the third hole 31 on the outer circumferential surface side of the side cover 20 is covered by the cover plate 34. [

At this time, the end surface of the third hole 31 on the side of the second hole 21 is formed to be smaller in diameter than the third hole 31, so that it communicates with the second hole 21.

In the stopper 30, the poppet 32 has a body 320 inserted into the third hole 31, and a hole 321 formed at one side of the body 320 so as to communicate with the second hole 21, And a spring groove 322 is formed at the end of the body 320 corresponding to the rod portion 321 so that the spring groove 322 is formed in the spring groove 322 The spring 33 is provided between the cover plate 34 and the cover plate 34 covering the third hole 31 from the outer circumferential surface of the side cover 20 while partially inserting it.

The body 320 of the poppet 32 is slidably movable along the inner circumferential surface of the third hole 31 so that the rod 321 is pressed against the second hole 21 by the elastic force of the spring 322, And is inserted into the third hole 31 by a hydraulic pressure greater than or equal to a predetermined value supplied to the second hole 21.

The length of the body 320 is shorter than the length of the third hole 31 so that the elastic force of the spring 33 acting in the opposite direction and the hydraulic pressure in the second hole 21 cause the third hole 31).

In the stopper 30 of the present invention, the poppet 32 may be provided with the O-ring 323 between the body 32 and the third hole 31 as shown in FIG. 2. However, It is possible to carry out the configuration without the O-ring 323.

4, the stopper 30 can be formed to have a tubular sleeve 324 between the inner circumferential surface of the third hole 31 and the body 320 of the poppet 32. [

It is most preferable that the diameter of the bar 321 formed in the poppet 32 of the stopper 30 is larger than the width of the stopper groove 140 formed in the lock holder 14.

In the drawing, reference numeral 24 denotes a flow path through which the fluid moves.

The operation and effect of the hydraulic actuator using the mechanical lock of the poppet and spring according to the present invention will be described in more detail as follows.

The hydraulic pressure is not formed in the second holes 21 on both sides when the hydraulic pressure is not supplied to the side cover 20 coupled to both sides of the housing 10 according to the present invention.

1, the poppet 32 of each stopper 30 is pushed toward the second hole 21 by the spring force of the spring 33, so that the second hole 21, the rod portion 321 of the poppet 32 protrudes to the maximum extent.

5, when hydraulic pressure of a certain pressure is supplied to the second hole 21 of the side cover 20 on one side through the oil passage 24, the oil pressure is applied to the poppet 32 of the stopper 30, The rod 33 is slid along the third hole 31 while the spring 33 is compressed so that the rod 321 protruding toward the second hole 21 is inserted into the third hole 31, (12) is slid to the other side.

The pinion gear 13 engaged with the rack gear 120 of the piston 12 is rotated by the movement of the piston 12 so that the valve is rotated by the rotation of the valve shaft for pinning the pinion gear 13.

At this time, in the side cover 20 on the other side where the piston 12 moves, the lock holder 14 is inserted into the second hole 21 side to move the stopper 30 in the inclined outer peripheral surface of the lock holder 14 The bar 321 of the poppet 32 protruding from the third hole 31 toward the second hole 21 is brought into contact.

The rod 321 of the poppet 32 is moved in the direction of the axis of the lock holder 14 by the continuous movement of the piston 12 even when the inclined outer peripheral surface of the lock holder 14 is in contact with the rod 321 of the poppet 32. [ And physically pushed along the inclined outer circumferential surface.

When the stopper groove 140 formed at the outer end of the lock holder 14 is positioned on the same vertical line as the rod 321 of the poppet 32 by the continuous movement of the piston 12, The rod 321 of the poppet 32 is inserted into the stopper groove 140 by the elastic force of the piston 32 so that the piston 12 can no longer move.

The piston 12 is stopped from moving by the bar 321 of the poppet 32 inserted into the stopper groove 140 of the lock holder 14 at the other side cover 20 and at the same time the valve operation is stopped do.

When the oil pressure is supplied to the second hole 21 on the side cover 20 side where the piston 12 is locked, the oil pressure supplied to the second hole 21 of the side cover 20, The rod 321 of the lock holder 32 is pushed toward the third hole 31 and the locking state of the lock holder 14 is released.

When the lock of the lock holder 14 is released, the piston 12 is slid by the hydraulic pressure supplied to the second hole 21, so that the valve is rotated in the reverse direction.

The stopper groove 140 of the lock holder 14 connected to the end of the piston 12 in the second hole 21 on the side of the side cover 20 to which the oil pressure is not supplied as described above continues to move, The rod 321 of the poppet 32 is inserted into the locked state and stops moving any more.

In this way, by selectively supplying hydraulic pressure equal to or higher than a predetermined pressure to the second holes 21 on the side covers 20 on both sides, the valve is rotated 90 degrees by the amount of sliding movement of the piston 12, .

In the second hole 21 on the side cover 20 to which the hydraulic pressure is not applied, the piston 12 is kept in the locked state by the poppet 32, So that the operating state at the normal pressure can be maintained even if the flow path 24 connected to the pressure regulating valve 21 is in an abnormal pressure state lower than the set pressure.

In other words, if a hydraulic pressure lower than the set pressure is supplied to the second hole 21 on the side cover 30 side to which the hydraulic pressure is to be supplied at one time due to the problem of the oil passage 24, The spring 33 for resiliently supporting the poppet 32 protruding from the piston 31 is compressed only by the hydraulic pressure equal to or higher than the set pressure so that the poppet 32 can not be moved so that the lock state of the lock holder 14 can not be released .

Accordingly, when the oil passage 24 connected to the hydraulic actuator of the present invention has a problem and the hydraulic pressure supplied to the second hole 21 is lower than the set pressure, the locking state of the piston 12 is maintained and the valve is not operated .

When the normal oil pressure is not supplied to the second hole 21 of the side cover 20 due to a failure or failure of the hydraulic pressure generating part such as a check valve among the hydraulic circuit for supplying fluid to the oil passage 24, (12), the operation of the valve is stopped so that the operation failure of the operation means such as the valve, as well as the prevention of the further damage and trouble caused by the operation failure can be prevented.

Thus, the present invention makes it possible to prevent malfunctions caused by these operating errors as well as operational errors of the operating means, thereby enabling more secure operation of the valves.

8, the limiter 23 is screwed to the inside of the plug 22 coupled to the side covers 20 on both sides so that the piston 12 To be precisely limited.

That is, in the present invention, when the valve is closed, the limiter 23 is brought into contact with one end of the piston 12 at that time so that the valve clearance is removed, and the limiter 23 at the other end is moved by a predetermined pitch Move.

In other words, since the valve is at an angle of exactly 90 degrees from the closed state to the open position, the travel distance of the piston 12 is accurately determined.

Accordingly, the piston 12 is pushed to one side in a state in which the valve is closed, so that the limiter 23 is brought into close contact with the end face of the lock holder 14 of the eccentrically located piston 12. [

The limiter 23 of the side cover 20 on one side is brought into close contact with the end surface of the lock holder 14 so that the limiter 23 rotates the predetermined pitch on the side cover 20 on the other side.

When the plug 22 of the side cover 20 is detached at the time of assembling the present invention for the first time, if the limiter 23 is rotated by using a separate tool, the limiter 23 is moved toward the second hole 21, It is possible to limit the moving distance of the motor 12.

The restriction of the movement distance of the piston 12 can eliminate the clearance when the valve is opened and closed by the hydraulic pressure, so that the correct operability of the valve can be maintained.

10: housing 11: first hole
12: piston 13: pinion gear
14: lock holder 20: side cover
21: second hole 22: plug
23: Limiter 30: Stopper
31: Third hole 32: Poppet
320: Body 321: Bar
322: Spring groove 323: O-ring
33: spring 34: cover plate

Claims (5)

A housing which forms a first hole for movably accommodating a piston formed on one main surface of a rack gear which is gear-engaged with the pinion gear;
A second hole which is connected to both sides of the housing and is movable toward the first hole while allowing a lock holder respectively connected to the piston ends of the two pistons to move, A side cover to be blocked;
A stopper provided on the outer circumferential surface of the side cover on both sides so that the poppet protrudes and retracts toward the second hole due to the biasing force of the spring and the hydraulic pressure supplied to the second hole so that the movement of the piston is interrupted;
A hydraulic actuator using mechanical locks of the poppet and spring.
The method according to claim 1,
The outer end of the stopper groove has an outer diameter gradually smaller than an outer diameter of the stopper groove so that the outer circumferential surface of the stopper groove has a constant outer diameter, A hydraulic actuator employing a mechanical lock of a poppet and a spring, wherein the lock holder is formed to be screwed or formed integrally with an inclined shape.
The method of claim 2,
Wherein a stopper groove of the lock holder is formed to have a width larger than a diameter of a bar of the poppet.
The method according to claim 1,
The stopper
A third hole formed in the side cover on both sides so as to communicate with the second hole from the outer peripheral surface,
A poppet in which a rod is integrally formed in a bar shape so as to protrude and retreat through a hole communicating with a second hole in a body slidably inserted into the third hole;
A spring which is partially inserted into a spring groove formed on the body opposite to the rod portion of the poppet to elastically support the poppet,
A cover plate fixed to an outer circumferential surface of the side cover so as to cover the third hole while supporting a spring partially inserted into the spring groove,
A hydraulic actuator using mechanical locks of the poppet and spring.
The method according to claim 1,
And the second hole side of the plug threaded to the side covers on both sides is moved to the second hole side by a rotation operation by a separate tool so that the movement interval of the piston is constantly restricted, Hydraulic actuator with mechanical lock of spring and poppet.
KR1020150156958A 2015-11-09 2015-11-09 Hydraulic actuator for applying mechanical lock structure used poppet and spring KR101594144B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150156958A KR101594144B1 (en) 2015-11-09 2015-11-09 Hydraulic actuator for applying mechanical lock structure used poppet and spring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150156958A KR101594144B1 (en) 2015-11-09 2015-11-09 Hydraulic actuator for applying mechanical lock structure used poppet and spring

Publications (1)

Publication Number Publication Date
KR101594144B1 true KR101594144B1 (en) 2016-02-16

Family

ID=55448103

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150156958A KR101594144B1 (en) 2015-11-09 2015-11-09 Hydraulic actuator for applying mechanical lock structure used poppet and spring

Country Status (1)

Country Link
KR (1) KR101594144B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024015155A1 (en) * 2022-07-11 2024-01-18 Lam Research Corporation Isolation valve

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101424423B1 (en) 2014-02-19 2014-08-01 아신하이밸주식회사 Hydraulic rotary actuator for valve
KR101536636B1 (en) * 2013-11-12 2015-07-15 주식회사알피엠텍 Stroke limiting device of hydraulic and pneumatic cylinder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101536636B1 (en) * 2013-11-12 2015-07-15 주식회사알피엠텍 Stroke limiting device of hydraulic and pneumatic cylinder
KR101424423B1 (en) 2014-02-19 2014-08-01 아신하이밸주식회사 Hydraulic rotary actuator for valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024015155A1 (en) * 2022-07-11 2024-01-18 Lam Research Corporation Isolation valve

Similar Documents

Publication Publication Date Title
RU2523458C2 (en) Device to switch linear drives to manual control
EP3255286B1 (en) Hydraulic actuator to which limit-adjustable mechanical lock device is applied
US3396938A (en) Valve actuating device
KR101594143B1 (en) Hydraulic actuator for applying mechanical lock mechanism
TWI421426B (en) Electric needle valve
US10378562B2 (en) Combination device for lockout and partial stroke test of valve actuators
KR101594144B1 (en) Hydraulic actuator for applying mechanical lock structure used poppet and spring
CA2945210A1 (en) Drill stem safety valve actuator
GB2599852A (en) A valve arrangement
CN111971500B (en) Lift type flow control valve
EP3022447B1 (en) Actuator
US11067194B2 (en) Combination valve
CN110893879B (en) Hydraulic power steering gear
JPH04219577A (en) Directional control valve operated from outside
CN110745181A (en) Hydraulic power steering gear
JP2008309318A (en) Slow return device
JP2015169297A (en) Valve opening regulation stopper and torque actuator for valve opening/closing operation

Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20190225

Year of fee payment: 4