KR101584128B1 - Sample aggregate and apparatus for measuring a optical constant using the same - Google Patents

Sample aggregate and apparatus for measuring a optical constant using the same Download PDF

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KR101584128B1
KR101584128B1 KR1020140025001A KR20140025001A KR101584128B1 KR 101584128 B1 KR101584128 B1 KR 101584128B1 KR 1020140025001 A KR1020140025001 A KR 1020140025001A KR 20140025001 A KR20140025001 A KR 20140025001A KR 101584128 B1 KR101584128 B1 KR 101584128B1
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electromagnetic wave
sample
optical constant
laser beam
aggregate
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KR20150103488A (en
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이종석
한정우
고도경
유난이
이규섭
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광주과학기술원
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Priority to PCT/KR2014/013063 priority patent/WO2015133715A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length

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Abstract

The present invention relates to a sample aggregate and an optical constant measuring apparatus using the sample aggregate. The sample aggregate of the present invention includes an electromagnetic wave generator for generating a first electromagnetic wave by interacting with a laser beam emitted from a laser beam oscillator and a sample layer on which the sample is stacked, Layer and is oscillated as a second electromagnetic wave. The optical constants measuring device using the sample aggregate of the present invention may further comprise a laser beam oscillator for emitting a laser beam, a sample aggregate for interacting with the laser beam emitted from the laser beam oscillator to oscillate a first electromagnetic wave, And an optical constant calculating unit for receiving the second electromagnetic wave and calculating an optical constant for the sample using the first electromagnetic wave and the second electromagnetic wave. According to the present invention, by stacking a sample layer that transmits or reflects electromagnetic waves to an electromagnetic wave generating portion that interacts with a laser beam to oscillate the electromagnetic wave, an optical constant for the sample can be measured using electromagnetic waves oscillating in multiple paths There is an advantage.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a sample aggregate and an optical constant measuring apparatus using the sample aggregate.

The present invention relates to a sample aggregate and an optical constant measuring apparatus using the sample aggregate.

A device for measuring the optical constant of a sample is used to obtain information about the material. Using such an optical constant measuring device, noninvasive information on the sample or material contained in the sample can be obtained.

Conventional optical constants measuring apparatuses should be used differently depending on whether the sample is transparent or opaque. Such an optical constant measuring device uses a lens or a mirror to measure electromagnetic waves to measure an optical constant.

On the other hand, a reflection type optical constant measuring device for measuring the optical constant of an opaque sample is more complicated than a transmission type optical constant measuring device in terms of characteristics. The complexity of such a device configuration poses technical problems, particularly in the region where the frequency characteristic is in terahertz. That is, when focusing a light using a lens or a mirror, the minimum focusing area increases in proportion to the wavelength (diffraction limit), so that in the case of a terahertz wave having a wavelength of approximately mm, the diameter of the focused beam is approximately several mm Lt; / RTI >

As described above, when the optical constant of an opaque sample is measured, if the sample size of the sample is small, the size of the lens or mirror must be increased accordingly. Therefore, according to the conventional optical constant measuring apparatus, it is difficult to measure a sample having a small size.

The sample aggregate of the present invention aims to oscillate electromagnetic waves in multiple paths by laminating a sample layer that transmits or reflects electromagnetic waves generated by an electromagnetic wave generating unit that interacts with a laser beam to oscillate electromagnetic waves.

In addition, the optical constants measuring apparatus of the present invention using such a sample aggregate aims at measuring optical constants for samples using electromagnetic waves oscillating in multi-paths in a sample aggregate.

The objects of the present invention are not limited to the above-mentioned objects, and other objects and advantages of the present invention which are not mentioned can be understood by the following description and more clearly understood by the embodiments of the present invention. It will also be readily apparent that the objects and advantages of the invention may be realized and attained by means of the instrumentalities and combinations particularly pointed out in the appended claims.

In order to accomplish the above object, the present invention provides a sample assembly comprising an electromagnetic wave generator for generating a first electromagnetic wave by interacting with a laser beam emitted from a laser beam oscillator, and a sample layer on which the sample is stacked, And the first electromagnetic wave is reflected by the sample layer and is oscillated by the second electromagnetic wave.

The optical constants measuring device using the sample aggregate of the present invention may further comprise a laser beam oscillator for emitting a laser beam, a sample aggregate for interacting with the laser beam emitted from the laser beam oscillator to oscillate a first electromagnetic wave, And an optical constant calculating unit for receiving the second electromagnetic wave and calculating an optical constant for the sample using the first electromagnetic wave and the second electromagnetic wave.

According to the present invention as described above, by stacking a sample layer that transmits or reflects electromagnetic waves generated by an electromagnetic wave generating portion that interacts with a laser beam to oscillate electromagnetic waves, electromagnetic waves that oscillate in a multi- There is an advantage that the constant can be measured.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view for explaining a conventional optical constant measuring method for measuring an optical constant for an opaque sample. FIG.
2 is a configuration diagram of a conventional optical constant measuring apparatus for measuring optical constants for opaque samples.
3A is a configuration diagram of a sample aggregate according to an embodiment of the present invention.
FIG. 3B is a perspective view of a sample assembly according to an embodiment of the present invention. FIG.
4 is a configuration diagram of an optical constant measuring apparatus according to an embodiment of the present invention.
5 is a graph for explaining an optical constant calculation process according to an embodiment of the present invention.
6 is a graph showing the results of optical constant measurement for exemplary samples.

The above and other objects, features, and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings, which are not intended to limit the scope of the present invention. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to denote the same or similar elements.

1 is a view for explaining a conventional optical constant measuring method for measuring an optical constant for an opaque sample. Referring to FIG. 1, a conventional optical constant measuring method irradiates an electromagnetic wave to each of the reference sample 102 and the reflection sample 104 to measure an optical constant for an opaque sample. Here, the reference sample 102 is a material that reflects electromagnetic waves as close as 100%, such as gold and silver. When an electromagnetic wave is irradiated to the reflection specimen, the electromagnetic wave is reflected without passing through the specimen. The conventional optical constant measuring method measures a light beam reflected by a reference sample 102 and a light beam reflected by a reflection specimen 104, and compares the measured values to calculate an optical constant.

More specifically, the electric field of the light ray incident on the reference sample 102

Figure 112014020789027-pat00001
) Is the electric field reflected by the reference sample 102
Figure 112014020789027-pat00002
) And the following equation (1).

[Equation 1]

Figure 112014020789027-pat00003

here,

Figure 112014020789027-pat00004
Can be expressed as a function of n and k with reflection Fresnel coefficients, where n is the refractive index and k is the extinction coefficient. That is, the reflection Fresnel coefficient is

Figure 112014020789027-pat00005

As a function of refractive index and extinction coefficient. Using the equation (1), the reflection Fresnel coefficient for the reflection specimen 104 can be calculated in the same manner as the reference specimen 102, and the refraction coefficient and extinction coefficient can be calculated accordingly.

That is, in the conventional optical constant measuring method of FIG. 1, the electromagnetic wave reflected from a reference sample such as air or a reference sample is measured and compared with the electromagnetic wave reflected through the reflection sample 104 to be measured to obtain an optical constant do.

However, when the optical constants are compared with the measured values of the target sample based on the measured values of the reference samples, the reflectance of the reference sample and the target sample become similar (for example, the reflectance is close to 99% there is a problem that it is difficult to measure the optical constant in the region where the value of k is about 100 or more).

 2 is a block diagram of a conventional optical constant measuring apparatus for measuring an optical constant for an opaque sample. 2, a conventional optical constant measuring apparatus includes a laser beam oscillator 202, a time delay device 204 including a plurality of plane mirrors, an electromagnetic wave generator 206, a parabolic mirror 208, 210, a sample 212, and an electromagnetic wave detecting unit 214.

More specifically, the laser beam oscillated in the laser beam oscillator 202 is changed in the path through the time delay device 204, which includes a plurality of plane mirrors, and the time it takes for the laser beam to reach the sample or sample Delayed. The laser beam oscillates in the electromagnetic wave generating section 206 as an electromagnetic wave, and the frequency characteristic of the electromagnetic wave may be a terahertz region. Electromagnetic waves oscillating in different directions in the electromagnetic wave generating section 206 are focused on the sample 212 through the parabolic mirror 208 and the convex lens 210. The electric field of the electromagnetic wave reflected by the reflection specimen 212 can be detected through the electromagnetic wave detection unit 214 and the optical constant for the specimen 212 can be obtained using the measurement value.

That is, in the conventional optical constant measuring apparatus of FIG. 2, the sample 212 is disposed at a different position from the electromagnetic wave generating unit 206 which interacts with the laser beam to oscillate the electromagnetic wave. Such a structure increases the complexity of the measuring apparatus, and there is a problem that an error occurs in the optical constant measurement due to the measurement position of the sample and the shrinkage / expansion of the sample portion according to the temperature change.

3A is a configuration diagram of a sample aggregate according to an embodiment of the present invention. Referring to FIG. 3A, the sample aggregate includes an electromagnetic wave generating section 302 and a sample layer 304.

The electromagnetic wave generator 302 generates a laser beam (laser beam)

Figure 112014020789027-pat00006
) To interact with the first electromagnetic wave
Figure 112014020789027-pat00007
). That is, the laser beam primarily interacts with the surface of the electromagnetic wave generator 302 to generate a first electromagnetic wave
Figure 112014020789027-pat00008
). ≪ / RTI > Further, the first electromagnetic wave (
Figure 112014020789027-pat00009
May be radiated to the outside of the electromagnetic wave generating section 302, and at the same time, may be transmitted to the inside and propagate.

The sample layer 304 is formed by stacking samples in the electromagnetic wave generating section 302. The samples forming the sample layer 304 are the first electromagnetic waves (e. G., ≪ RTI ID = 0.0 >

Figure 112014020789027-pat00010
Can be reflected. When the sample forming the sample layer 304 is a reflection specimen, the first electromagnetic wave (the first electromagnetic wave
Figure 112014020789027-pat00011
Is reflected by the sample layer 304 composed of the reflection specimen at the interface 306 of the electromagnetic wave generating section 302 and the specimen layer 304. The reflected first electromagnetic wave (
Figure 112014020789027-pat00012
Is transmitted to the outside through the electromagnetic wave generating section 302, and the second electromagnetic wave
Figure 112014020789027-pat00013
Is transmitted to the inside of the electromagnetic wave generator 302 through the first electromagnetic wave
Figure 112014020789027-pat00014
Is reflected by the sample layer 304 and radiated to the outside of the electromagnetic wave generating section 302. [ The third electromagnetic wave and the fourth electromagnetic wave may be oscillated through the same process. In the present invention, the second electromagnetic wave includes all the secondary electromagnetic waves such as the second electromagnetic wave, the third electromagnetic wave and the fourth electromagnetic wave.

More specifically, the laser beam is irradiated to the electromagnetic wave generator 302 and then interacts with the surface of the electromagnetic wave generator 302 to generate a first electromagnetic wave

Figure 112014020789027-pat00015
). ≪ / RTI > The first electromagnetic wave (
Figure 112014020789027-pat00016
Can be radiated to the outside of the electromagnetic wave generating section 302 or can be transmitted to the inside at the same time. The electromagnetic wave transmitted to the inside of the electromagnetic wave generating section 302 is reflected by the sample layer and is radiated to the outside of the electromagnetic wave generating section 302,
Figure 112014020789027-pat00017
)to be.

In other words, the first electromagnetic wave

Figure 112014020789027-pat00018
) Is an electromagnetic wave that oscillates primarily by interacting with the surface of the electromagnetic wave generating section 302 and the second electromagnetic wave is a part of a first electromagnetic wave
Figure 112014020789027-pat00019
Is radiated to the outside of the electromagnetic wave generating section 302 by being reflected from the sample layer. Thus, the first electromagnetic wave (
Figure 112014020789027-pat00020
) Than the second electromagnetic wave (
Figure 112014020789027-pat00021
) Becomes longer, which means that the first electromagnetic wave (< RTI ID = 0.0 >
Figure 112014020789027-pat00022
) And the second electromagnetic wave (
Figure 112014020789027-pat00023
) Can be separated from each other.

3B is a perspective view of a sample aggregate according to an embodiment of the present invention. Referring to FIG. 3B, the sample assembly 310 may include a sample 312, an electromagnetic wave generator 314, and a sample pedestal 316. That is, the sample 312 is stacked on the electromagnetic wave generating unit 314 and fixed through the sample support 316 to form the sample aggregate 310.

3A and 3B can oscillate the first electromagnetic wave and the second electromagnetic wave having frequency characteristics in the terahertz (10 12 Hz) region. That is, the laser beam can oscillate with an electromagnetic wave having a frequency characteristic of a terahertz region by interacting with the electromagnetic wave generating portion. As described above, the electromagnetic wave generating part of the present invention can be used as a first electromagnetic wave that oscillates primarily by interacting with a laser beam emitted from a laser beam oscillator, and a second electromagnetic wave that is reflected by a sample layer stacked on the electromagnetic wave generating part, have. The first electromagnetic wave and the second electromagnetic wave can be terahertz files having a frequency characteristic of a terahertz region.

According to the sample assembly of the present invention, the sample layer 304 that reflects the first electromagnetic wave is stacked on the electromagnetic wave generating section 302 that interacts with the laser beam to oscillate the electromagnetic wave, 2 Electromagnetic waves can be oscillated.

4 is a configuration diagram of an optical constant measuring apparatus according to an embodiment of the present invention. The optical constant measuring apparatus of the present invention includes the sample aggregate of FIG. 3A. 4, the optical constant measuring apparatus includes a laser beam oscillator 402, a laser beam splitter 404, a time delay device 406, a sample aggregate 408, a parabolic mirror 414, and an optical constant calculator 420 ).

The optical constants measuring apparatus according to the embodiment of the present invention can use the sample aggregates described in FIG. 3A. As described above, the sample aggregate 408 interacts with the laser beam emitted from the laser beam oscillator to oscillate the first electromagnetic wave. More specifically, the sample assembly 408 includes a sample layer 412 on which an electromagnetic wave generating portion 410 and an electromagnetic wave generating portion 410 are stacked. The electromagnetic wave generating unit 410 interacts with the laser beam to oscillate the first electromagnetic wave, and the first electromagnetic wave is reflected from the sample layer 412 and oscillated as the second electromagnetic wave. Also, the first electromagnetic wave and the second electromagnetic wave may have a frequency characteristic of terahertz (10 12 Hz).

The laser beam oscillator 402 performs a function of oscillating a laser beam. For example, a femtosecond laser can be used, which means a laser that can emit a laser beam for a very short period of time. Femtosecond lasers typically have a pulse width of several hundred femtoseconds (fs) at tens of femtoseconds (fs).

The laser beam splitter 404 transmits or reflects a laser beam emitted from the laser beam oscillator 402 to change the path of the laser beam.

The time delay device 406 may include a plurality of planar mirrors. It is possible to change the path of the laser beam through the plane mirror and to delay the time it takes for the laser beam to reach the sample aggregate 408. [

The optical constant measuring apparatus of the present invention may include a plane mirror, a paraboloid mirror 414, and a convex lens. The planar mirror functions to change the path of the laser beam. The parabolic mirror and the convex lens are used to focus the first electromagnetic wave and the second electromagnetic wave oscillating in the sample aggregate 408.

The optical constant calculator 420 receives the first electromagnetic wave and the second electromagnetic wave, and calculates an optical constant for the sample using the received first electromagnetic wave and the second electromagnetic wave. An optical constant is a value representing the optical property of a material and can be expressed by a refractive index and an extinction coefficient.

As described above, since the first electromagnetic wave and the second electromagnetic wave have different optical paths, the optical constant calculator 420 for receiving the first electromagnetic wave and the second electromagnetic wave separates the first electromagnetic wave and the second electromagnetic wave on the time axis can do. The optical constant calculator 420 may calculate the optical constant for the sample using the temporally separated first electromagnetic wave and the second electromagnetic wave.

Preferably, the optical constant calculator 420 of the present invention separates the first electromagnetic wave and the second electromagnetic wave on the time axis, Fourier-transforms the separated first electromagnetic wave and the second electromagnetic wave, So that the optical constant can be calculated.

&Quot; (2) "

Figure 112014020789027-pat00024

here,

Figure 112014020789027-pat00025
The electric field of the first electromagnetic wave,
Figure 112014020789027-pat00026
Is a spectrum obtained by Fourier transforming the electric field of the second electromagnetic wave.
Figure 112014020789027-pat00027
,
Figure 112014020789027-pat00028
The function of
Figure 112014020789027-pat00029
Can be defined as a function.
Figure 112014020789027-pat00030
The
Figure 112014020789027-pat00031
(C is the speed of light and? Is the length of the wavelength).
Figure 112014020789027-pat00032
Means a path length difference from the laser beam irradiated to the electromagnetic wave generating portion 410 through the electromagnetic wave generating portion 410 to being reflected from the sample layer 412.
Figure 112014020789027-pat00033
Is defined as 1 as the refractive index of air.

Figure 112014020789027-pat00034
Is defined as a reflection Fresnel coefficient of the sample layer 412 by the equation (3).

&Quot; (3) "

Figure 112014020789027-pat00035

Equation (3) reflects the electromagnetic wave reflected from the sample layer 412 through the electromagnetic wave generator 410.

Figure 112014020789027-pat00036
Is defined as a transmission Fresnel coefficient of the electromagnetic wave generating unit 410 as shown in Equation (4).

&Quot; (4) "

Figure 112014020789027-pat00037

Equation 4 reflects the transmission at the interface between the electromagnetic wave generating unit 410 and the air when the electromagnetic wave reflected from the sample layer 412 interacts with the electromagnetic wave generating unit 410 and oscillates with the second electromagnetic wave.

In equations (3) and (4)

Figure 112014020789027-pat00038
The refractive index of the electromagnetic wave generator 410 can be obtained through a transmission experiment.

angle of incidence

Figure 112014020789027-pat00039
For example, 45 [deg.], Depending on the installation position of the laser oscillator,
Figure 112014020789027-pat00040
Is based on Snell's law (
Figure 112014020789027-pat00041
). ≪ / RTI >

Using Equations (2) to (4), the reflection Fresnel coefficients

Figure 112014020789027-pat00042
) Of
Figure 112014020789027-pat00043
Can be obtained.
Figure 112014020789027-pat00044
Is the optical constant of the sample forming the sample layer 412.

The refractive index of the electromagnetic wave generating portion 410

Figure 112014020789027-pat00045
Can be obtained by using the following equation (5) without going through a separate experiment.

&Quot; (5) "

Figure 112014020789027-pat00046

The first electromagnetic wave may be reflected from the sample layer 412 and then transmitted through the surface of the electromagnetic wave generating portion 410 or may be reflected again. At this time, the electric field that is reflected again and transmitted from the surface of the electromagnetic wave generating portion 410

Figure 112014020789027-pat00047
to be.

As a result, through equations (2) and (5), the optical constant

Figure 112014020789027-pat00048
And
Figure 112014020789027-pat00049
Can be obtained at the same time.

Optical constant

Figure 112014020789027-pat00050
The
Figure 112014020789027-pat00051
As shown in FIG. here,
Figure 112014020789027-pat00052
Is a refractive index,
Figure 112014020789027-pat00053
Is the extinction coefficient.

5 is a graph illustrating an optical constant calculation process according to an embodiment of the present invention. Referring to FIG. 5, the screen 502, the first electromagnetic wave 504, and the second electromagnetic wave 506 showing the first electromagnetic wave and the second electromagnetic wave in the time axis are separated, and the results of optical constants calculation for the sample A screen 508 appears.

Referring to the screen 502 in which the first electromagnetic wave and the second electromagnetic wave appear in the time axis, the first electromagnetic wave is detected first and then the second electromagnetic wave is detected. Here, the first electromagnetic wave is an electromagnetic wave generated by the laser beam irradiated to the electromagnetic wave generating portion interacting with the surface, and the second electromagnetic wave is generated by the first electromagnetic wave transmitted through the electromagnetic wave generating portion, to be. As described above, there may be a component that is not transmitted through the electromagnetic wave generating portion and is reflected back to the sample layer. The second electromagnetic wave may comprise one or more components reflected from the sample layer.

As described above, the first electromagnetic wave 504 and the second electromagnetic wave 506 can be separated from each other on the time axis. The optical constant extraction unit Fourier transforms each of the separated first electromagnetic wave and the second electromagnetic wave, and then calculates an optical constant for the sample.

In the process of calculating the optical constant, equations (2) to (5) can be used.

The optical constant is the refractive index for the frequency

Figure 112014020789027-pat00054
) And extinction coefficient (
Figure 112014020789027-pat00055
). ≪ / RTI > On the screen 508 showing the result of optical constant calculation for the sample, the optical constant for the sample of the frequency can be known.

6 is a graph showing the results of optical constant measurement for exemplary samples. For the n-type InAs sample 602 and the n-type Si sample 604, the same results as those of the conventional optical constant measuring apparatus are measured in the optical constant measuring apparatus of the present invention.

Particularly, in the case of measuring the optical constant for a 60 nm gold sample 606 having a reflectance (about 99%) similar to that of the reference sample, a conventional optical constant measuring apparatus for measuring an optical constant by comparing measured values with a reference sample It is difficult to obtain an optical constant because there is little difference between the two measured values.

However, according to the optical constant measuring apparatus of the present invention, since the optical constant is measured by comparing the multiple reflected electromagnetic waves from the sample with each other, the optical constant can be measured even for a sample having a reflectance similar to that of the reference sample.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, But the present invention is not limited thereto.

Claims (8)

An electromagnetic wave generating unit to which a laser beam is incident; And
And a sample layer disposed below the electromagnetic wave generating portion,
Wherein the laser beam interacts with a surface of the electromagnetic wave generating portion to be converted into a first electromagnetic wave,
A part of the first electromagnetic wave is transmitted into the electromagnetic wave generating part, reflected by the sample layer and converted into a second electromagnetic wave,
The optical path of the second electromagnetic wave is longer than the optical path of the first electromagnetic wave,
The optical constant of the sample included in the sample layer is calculated using the electric field of the first electromagnetic wave and the second electromagnetic wave
Sample aggregate.
The method according to claim 1,
The first electromagnetic wave and the second electromagnetic wave
When the frequency characteristic is in terahertz (10 12 Hz)
Sample aggregate.
A laser beam oscillator for generating a laser beam;
A sample aggregate which interacts with the laser beam to oscillate a first electromagnetic wave and a second electromagnetic wave; And
And an optical constant calculating unit for receiving the first electromagnetic wave and the second electromagnetic wave to calculate an optical constant for a sample included in the sample aggregate,
The sample aggregate
An electromagnetic wave generating unit to which a laser beam is incident; And
And a sample layer disposed below the electromagnetic wave generating portion,
Wherein the laser beam interacts with a surface of the electromagnetic wave generating portion to be converted into a first electromagnetic wave,
A part of the first electromagnetic wave is transmitted into the electromagnetic wave generating part, reflected by the sample layer and converted into a second electromagnetic wave,
The optical path of the second electromagnetic wave is longer than the optical path of the first electromagnetic wave,
Wherein the optical constant is calculated using an electric field of the first electromagnetic wave and the second electromagnetic wave
Optical Constant Measuring Apparatus Using Sample Assembly.
delete The method of claim 3,
The first electromagnetic wave and the second electromagnetic wave
When the frequency characteristic is in terahertz (10 12 Hz)
Optical Constant Measuring Apparatus Using Sample Assembly.
The method of claim 3,
The optical constant
Including refractive index and extinction coefficient
Optical Constant Measuring Apparatus Using Sample Assembly.
The method of claim 3,
A plane mirror for changing the traveling path of the laser beam;
A parabolic mirror and a convex lens for converging the first electromagnetic wave and the second electromagnetic wave oscillating in the sample aggregate,
And an optical constant measuring device using the sample aggregate.
The method of claim 3,
The optical constant extraction unit
Separating the first electromagnetic wave and the second electromagnetic wave on a time axis,
The first electromagnetic wave and the second electromagnetic wave separated from each other are Fourier transformed
Calculating an optical constant
Optical Constant Measuring Apparatus Using Sample Assembly.
KR1020140025001A 2014-03-03 2014-03-03 Sample aggregate and apparatus for measuring a optical constant using the same KR101584128B1 (en)

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KR101877954B1 (en) * 2017-12-26 2018-07-12 주식회사 어니언소프트웨어 Air conditioning system for server room
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009036693A (en) * 2007-08-03 2009-02-19 Institute Of Physical & Chemical Research Near field micro device and spectral image acquisition method
US20130155410A1 (en) 2010-07-07 2013-06-20 Melys Diagnostics Ltd Optical Assembly and Method for Determining Analyte Concentration
KR101296748B1 (en) * 2012-03-26 2013-08-20 한국전기연구원 Spectroscopy and imaging system of high-speed and high-resolution using electromagnetic wave based on optics

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101395908B1 (en) * 2006-11-21 2014-05-15 브라운 유니버시티 Picosecond ultrasonic system incorporating an optical cavity
KR101059690B1 (en) * 2009-09-21 2011-08-26 부산대학교 산학협력단 Refractive index measurement system and method for flat media using interference between transmitted and reflected light

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009036693A (en) * 2007-08-03 2009-02-19 Institute Of Physical & Chemical Research Near field micro device and spectral image acquisition method
US20130155410A1 (en) 2010-07-07 2013-06-20 Melys Diagnostics Ltd Optical Assembly and Method for Determining Analyte Concentration
KR101296748B1 (en) * 2012-03-26 2013-08-20 한국전기연구원 Spectroscopy and imaging system of high-speed and high-resolution using electromagnetic wave based on optics

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