KR101567517B1 - System for detecting leak, system for detecting leak and method for controlling of sytem for detecting leak with utilizing smart phone - Google Patents

Abstract

The present invention relates to a leakage detection system and a control method of a leak detection system that are improved in structure and method to overcome limitations of a wired line and equipment restriction for inspection. A leak detection system according to the present invention is a leak detection system that includes a leak detector for detecting trace gas injected into an object, a first mode for bidirectional wireless communication with the leak detector and controlling the operation of the leak detector, And a second mode in which a program operating in at least one of the modes is stored. Thereby, it is possible to perform the leak test of the test object using the first mode for operating the leak detector and the storage medium storing the program capable of operating in the second mode for monitoring the information of the leak detector, Equipment constraints for inspection and leakage testing time can be reduced.

Description

TECHNICAL FIELD [0001] The present invention relates to a leak detection system, a leak detection system using a smartphone, and a control method of a leak detection system.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a leak detection system, a leak detection system using a smartphone, and a control method of a leak detection system, and more particularly, to a leak detection system for detecting leakage of a subject, And a control method of the system.

Generally, a semiconductor manufacturing apparatus and a display manufacturing apparatus are equipment for manufacturing a semiconductor and a display apparatus while maintaining a vacuum. Manufacturing apparatuses requiring vacuum maintenance such as semiconductor manufacturing apparatuses and display manufacturing apparatuses are manufactured through various processes such as material processing, welded joint, brazed joint, machining, dissimilar metal joint, and flange joint.

Here, leakage inspection is performed using a leakage inspection system or a leakage inspection apparatus when manufacturing a manufacturing apparatus requiring vacuum maintenance. In the leakage inspection method of manufacturing equipment requiring vacuum maintenance, a leakage checker is connected to a vacuum container or a pressure vessel being manufactured or assembled, and helium gas is injected to a joint or joint portion. At this time, based on the signal measured by the leakage tester, the leak area is found and repaired or reassembled, and a series of inspection processes are repeated until the leakage signal is not measured.

On the other hand, depending on the size of the vacuum container or the pressure vessel, the leakage inspection system and inspection method are different. In the case of small vacuum vessels or pressure vessels, the leak detection system incorporates controls and indicators. That is, the leakage inspection system can be directly controlled by the user, and a signal such as a detection signal can be visually recognized through a display device. Next, in the case of a medium- or large-sized vacuum container or a pressure vessel, a user is required to operate the indicator / controller of the leakage checker as well as a user spraying helium for leakage inspection, and to visually check and determine the measurement signal. This leakage inspection system is used by connecting the leakage checker and the controller that controls it and displays the measured value by wire.

However, in the conventional leak inspection system, a leakage inspection is required in addition to a wired or the like, and a specific device for leakage inspection must be provided.

Korean Patent Publication No. 10-2006-0074134; Leakage and leak detection system using gas detection

SUMMARY OF THE INVENTION An object of the present invention is to provide a leak detection system, a leak detection system and a leakage detection system using a smartphone, which are improved in structure and method to overcome limitations of a wired line and equipment for inspection.

According to a first aspect of the present invention, there is provided a leak detector comprising: a leak detector for detecting a trace gas injected into an object in accordance with the present invention; a first mode for bidirectional wireless communication with the leak detector and controlling operation of the leak detector; And a second mode for monitoring operation information of the detector. The leak detection system according to claim 1, wherein the storage medium stores a program that operates in at least one mode.

Here, the leak detector and the storage medium may include a wireless transmission / reception module for mutual two-way wireless communication.

Preferably, each of the wireless transceiver modules included in the leak detector and the storage medium may use at least one of a remote communication network and a local area network.

The telecommunication network may include any of 3G, LTE and Wi-Fi.

In addition, the local area network may include Bluetooth.

The storage medium may include a smart phone.

Preferably, the program stored in the storage medium may be an application used in the smartphone.

Preferably, the storage medium is provided in plurality and when the leakage signal is detected, the operation of the first mode of the other storage media is stopped when any one of the storage media is operated in the first mode.

Preferably, when one of the plurality of storage media operates in the first mode, mutual control signals are transmitted and received so that the operation of the first mode of the other storage media is stopped.

More preferably, the plurality of storage media may operate in the first mode so as to resume the inspection of the subject when the leakage position of the subject to which the leak signal is sensed is determined.

According to another aspect of the present invention, there is provided a leak detector comprising: a leak detector for detecting a trace gas injected into an object to be inspected according to the present invention; a control mode for bidirectional wireless communication with the leak detector, And a monitoring mode for monitoring operation information, and a monitoring mode for monitoring operation information. The system of the present invention is also provided with a leakage detection system using a smartphone.

Here, it is preferable that a plurality of the smartphones are provided, and when the leak signal is detected, when any one of the smartphones is operated in the control mode, the operation of the control mode is suspended for the remaining smartphones.

Also, preferably, when a plurality of the smart phones operate in the control mode, the remaining smart phones may transmit and receive mutual control signals so that the operation of the control mode is stopped.

More preferably, the plurality of smart phones can operate in the control mode to resume the inspection of the subject when the leakage position of the subject to which the leak signal is generated is determined.

According to another aspect of the present invention, there is provided a method for monitoring operation of a leak detector, comprising the steps of: detecting a trace gas sprayed on an object to be inspected according to the present invention; (A) operating the leak detector using the program stored in a plurality of the storage media; and (b) detecting a leakage signal detected by the leak detector (C) activating one of the plurality of storage media and stopping the operation of the other storage media; and (d) The plurality of storage media operates the program to resume the inspection of the subject The method of controlling a leak inspection system according to claim 1, further comprising:

Here, the storage medium may include a smartphone, and the program may be an application stored in the smartphone.

Preferably, the step (a) comprises the steps of: a) a first mode of controlling the operation of the leak detector and a second mode of monitoring operation information of the leak detector, wherein the leak detector and the storage medium are two- And may operate in at least one of the modes.

In the step (c), when the leak signal is detected in the step (b), it is preferable that only one of the plurality of programs is operated and the program of the remaining storage media stops operating.

Preferably, in the step (c), a plurality of the storage media may transmit and receive a mutual control signal so that only one of the programs operates and the operation of the programs of the remaining storage media is stopped.

In addition, preferably, the step (c) includes operating the program of any one of the plurality of storage media according to the sequence connected to the leakage tester or in the order of the first mode and the second mode, The operation of the program can be stopped.

The details of other embodiments are included in the detailed description and drawings.

The leakage inspection system according to the present invention, the leakage inspection system using a smartphone, and the control method of the leakage inspection system are as follows.

First, since the leakage test of the subject can be performed by using the storage medium storing the program capable of operating in the first mode for operating the leak detector and the second mode for monitoring the information of the leak detector, And reduce the time required for leak testing.

Second, leakage inspection of the subject is performed using at least one of a long-distance communication network and a local-area communication network between the leak detector and the storage medium, thereby improving space efficiency and efficiency.

Third, the information of the leak detector can be simultaneously monitored on a plurality of storage media equipped with software, so that the efficiency of leakage inspection can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic configuration diagram of a leak detection system for a subject according to an embodiment of the present invention;
2 is a control block diagram of a leak detection system according to an embodiment of the present invention,
3 is a control flowchart of a leak detection system according to an embodiment of the present invention.

Hereinafter, a leak detection system, a leak detection system using a smartphone, and a control method of a leak detection system according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Before describing the present invention, it should be noted that the storage medium described below includes not only a smart phone but also various mobile devices capable of wireless communication, not limited to a smart phone.

It should be noted in advance that the object to be inspected specified below may be a vacuum container, but may be a pressure container requiring leak inspection.

It is to be noted in advance that the first mode and the second mode correspond to the control mode and the monitoring mode specified in the claims, respectively.

FIG. 1 is a schematic block diagram of a leakage detection system for a subject according to an embodiment of the present invention, and FIG. 2 is a control block diagram of a leakage detection system according to an embodiment of the present invention.

1 and 2, a leak detection system 10 according to an embodiment of the present invention includes a leak detector 300 and a storage medium 500. As shown in FIG. In addition, the leakage detection system 10 according to the embodiment of the present invention further includes a gas supply unit 100 for supplying a trace gas for detecting leakage.

The gas supply part 100 injects a trace gas for leakage inspection into a vacuum container which is an object 1 to be inspected. The gas supply part 100 includes a receiving part 120 and a jet part 140. The trace gas accommodated in the accommodating portion 120 of the gas supply portion 100 is not limited to the helium gas which is most effective for the leakage inspection. Then, the jetting section 140 injects the trace gas onto the leak inspection site of the inspection object. The trace gas is mainly injected to the joint or junction of the object 1, for example, a flange or the like.

The leak detector (300) senses the trace gas injected to the subject (1). The leak detector 300 senses the trace gas injected to the subject 1 and transmits the sensed signal to the storage medium 500. The leak detector 300 is in two-way wireless communication with the storage medium 500, respectively. The leak detector 300 includes a detection sensor 320, a detector transmission / reception module 340, and a sensor control module 360 as one embodiment of the present invention.

The sensing sensor 320 senses the trace gas injected from the gas supply unit 100. The sensing signal sensed by the sensing sensor 320 is transmitted to the sensor control module 360. The detector transmission / reception module 340 is provided for bi-directional wireless communication with the storage medium 500. In detail, the detector transmission / reception module 340 bidirectionally communicates with the storage medium transmission / reception module 520 of the storage medium 500 to be described later. The sensor transmission / reception module 340 transmits a sensing signal sensed by the sensing sensor 320 to the storage medium 500 or receives a control signal from the storage medium 500.

The sensor control module 360 controls the operation of the sensor transmission / reception module 340 based on the sensing signal transmitted from the sensing sensor 320 or controls the operation of the sensing sensor 320 based on the control signal received by the sensor transmission / .

The storage medium 500 is then bidirectionally wirelessly communicated with the leak detector 300 to provide a first mode of controlling operation of the leak detector 300 and a second mode of monitoring operation information of the leak detector 300, Stores programs that operate in one mode. Here, the storage medium 500 includes a smartphone, and the program stored in the storage medium 500 operating in the first mode and the second mode becomes an application (application) stored in the smartphone. The storage medium 500 includes a storage medium transmission / reception module 520, a display unit 540, an input unit 560, and a storage medium control module 580.

The storage medium transmission / reception module 520 performs bidirectional wireless communication with the detector transmission / reception module 340 of the leak detector 300. The storage medium transmission / reception module 520 performs bidirectional wireless communication with the detector transmission / reception module 340 using at least one of a remote communication network and a local area network.

For example, the distant communications network of the detector transmit / receive module 340 and the storage medium transmit / receive module 520 may include any of 3G, LTE, and Wi-Fi. Of course, the remote communication network of the detector transmission / reception module 340 and the storage medium transmission / reception module 520 may use a communication protocol that is continuously developed in addition to the communication method described above. The local communication network of the sensor transmission / reception module 340 and the storage medium transmission / reception module 520 includes Bluetooth. That is, the detector transmission / reception module 340 and the storage medium transmission / reception module 520 use a local communication network when they are close to each other and use a remote communication network when they are located at a distance from each other.

Here, the detector transmission / reception module 340 and the storage medium transmission / reception module 520 according to the embodiment of the present invention are configured with at least one channel for transmitting and receiving mutual information. As described above, the detector transmission / reception module 340 and the storage medium transmission / reception module 520 may include one or more channels for communication, but the sensor transmission / reception module 340 and the storage medium transmission / It is preferable to transmit and receive information by using two channels, i.e., a multi-channel system.

The display unit 540 is configured to display the first mode in which the leak detector 300 is operated and the operation information of the leak detector 300, that is, the operation of the leak detector 300 and the measured leak signal. The input unit 560 is configured to receive an input signal of a first mode for controlling the operation of the leak detector 300 and a second mode for monitoring operation information of the leak detector 300. Of course, when the smartphone is used as the storage medium 500, the display unit 540 and the input unit 560 can use the display of the smartphone.

The storage medium control module 580 controls the operation of the leak detector 300 according to the input signals of the first mode and the second mode input from the input unit 560. For example, when the input signal of the first mode is input by the input unit 560, the storage medium control module 580 uses the storage medium transmission / reception module 520 to generate an operation signal that enables the leak detector 300 to operate When the input signal of the second mode is inputted, the related information is displayed on the display unit 540 so as to monitor the information related to the operation of the leak detector 300 using the storage medium transmission / reception module 520.

On the other hand, a plurality of storage media 500 are provided. When a leak signal sensed by the leak detector 300 is transmitted to the storage medium 500, a plurality of storage media 500 are operated in the first mode, The operation of the first mode is stopped. Here, the plurality of storage media 500 transmits and receives mutual control signals to stop the operation of the first mode of the other storage media 500 when one of them operates in the first mode, as described above. A plurality of storage media 500 when a leak signal is detected may be operated in any one of a plurality of storage media 500 in order of being connected to the leak detector 300 or in order of a first mode and a second mode And stop the operation of the programs of the remaining storage media 500.

The plurality of storage media 500 is operated in the first mode so that the inspection of the subject 1 is resumed when the leakage position of the subject 1 on which the leak signal is sensed is determined .

3 is a control flowchart of a leak detection system according to an embodiment of the present invention.

The control flow of the control method of the leak detection system 10 according to the embodiment of the present invention will now be described.

As shown in Fig. 3, the program (application) is operated first (S100). Here, the plurality of storage media 500 may use the programs in the first mode and the second mode, respectively. It is determined whether the leak detector 300 senses the leak signal (S110). At this time, if it is determined that the leak signal is generated and detected in step S110, any one of the storage media 500 operates the program (S130). On the other hand, if it is detected in step S110 that no leak signal is generated, step S100 is continued.

In step S130, the first mode operation of the remaining storage media 500 is stopped (S132). Or stops the second mode operation of the remaining storage media 500 (S134). At this time, the plurality of storage media 500 transmit and receive mutual control signals so that steps S130, S132, and S134 may be performed.

Next, the leak position where the leak signal is generated is determined (S150). If it is determined that the leaked position of the subject 1 has leaked, the program of the plurality of storage media 500 is operated so as to resume the leakage inspection of the subject 1 (S170). On the other hand, if the leaked position of the subject 1 is not determined in step S150, the process goes back to step S130.

Therefore, the leakage inspection of the subject can be performed using the storage medium storing the program capable of operating in the first mode for operating the leak detector and the second mode for monitoring the information of the leak detector, And reduce the time required for leak testing.

In addition, leakage inspection of the subject is performed using at least one of a remote communication network and a local communication network between the leak detector and the storage medium, thereby overcoming the restriction of the space and improving the efficiency.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, . Therefore, it should be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

10: Leak detection system 100: Gas supply unit
300: leak detector 320: detection sensor
340: Detector transmission / reception module 360: Detector control module
500: storage medium 520: storage medium transmission / reception module
540: Display section 560: Input section
580: Storage medium control module
[National R & D Project Supporting the Invention]
Assignment number, department name, research project name, research project name, contribution rate, subject institution, research period
2013K000306, Future Creation Science Department, Future Infrastructure Development, Ultra High Vacuum High Energy Material Processing and System Manufacturing Technology Development, 1/1, POSTECH, 2013.07.01. ~ 2014.06.30.

Claims (20)

A gas supply unit for supplying a trace gas to the object to be inspected;
A leak detector for detecting a trace gas injected from the gas supply unit to the inspection object;
And a storage medium in which a program operating in at least one mode of a first mode of two-way wireless communication with the leak detector and controlling operation of the leak detector and a second mode of monitoring operation information of the leak detector is stored, ,
Wherein the storage medium is provided in plurality and when the leak signal is detected, operation of the first mode of the other storage media is stopped when any one of the storage media is operated in the first mode,
Wherein the plurality of storage media operate in the first mode to resume the inspection of the test object when the leakage position of the test subject in which the leak signal is detected is determined.
The method according to claim 1,
Wherein the leak detector and the storage medium each comprise a wireless transceiver module for two-way wireless communication.
3. The method of claim 2,
Wherein each of the wireless transceiver modules included in the leakage detector and the storage medium uses at least one of a remote communication network and a local area network.
The method of claim 3,
Wherein the telecommunication network comprises any one of 3G, LTE and Wi-Fi.
The method of claim 3,
Wherein the local area network comprises Bluetooth.
The method according to claim 4 or 5,
Lt; RTI ID = 0.0 > 1, < / RTI > wherein the storage medium comprises a smartphone.
The method according to claim 6,
Wherein the program stored in the storage medium is an application used in the smartphone.
delete The method according to claim 1,
Wherein the plurality of storage media transmit and receive a mutual control signal such that when one of the plurality of storage media operates in the first mode, operation of the first mode of the other storage media is stopped.
delete A gas supply unit for supplying a trace gas to the object to be inspected;
A leak detector for detecting a trace gas injected from the gas supply unit to the inspection object;
And a smartphone in which an application (App) which is bidirectionally wirelessly communicated with the leak detector and operates in at least one of a control mode for controlling the operation of the leak detector and a monitoring mode for monitoring operation information of the leak detector and,
The smartphone is provided with a plurality of smart phones, and when a leak signal is detected, when any one of the smart phones is operated in the control mode,
Wherein the plurality of smartphones operate in the control mode to resume the inspection of the test object when a leak position of the test subject in which the leak signal is generated is determined, Detection system.
delete 12. The method of claim 11,
Wherein when one of the plurality of smartphones operates in the control mode, the remaining smartphones transmit and receive a mutual control signal to stop the operation of the control mode.
delete A leak detector for detecting a trace gas sprayed on the test object; and a program for two-way wireless communication with the leak detector and monitoring operation of the leak detector and monitoring operation information of the leak detector, comprising: a gas supply part for supplying a trace gas to an object to be inspected; A leak detection system having a plurality of storage media for storing,
(a) supplying a trace gas to the object to be inspected;
(b) operating the leak detector using the program stored in the plurality of storage media;
(c) transmitting a leak signal sensed by the leak detector to a plurality of the storage media;
(d) activating any one of the plurality of storage media, and stopping the operation of the other storage media;
(e) when the leak position of the test subject is determined, activating the program to resume the inspection of the test subject by a plurality of the storage media.
16. The method of claim 15,
Wherein the storage medium comprises a smartphone and the program is an application stored in the smartphone.
17. The method according to claim 15 or 16,
The step (b)
Wherein the leak detector and the storage medium are bidirectional wirelessly communicated,
Wherein the program operates in at least one of a first mode for controlling the operation of the leak detector and a second mode for monitoring operation information of the leak detector.
18. The method of claim 17,
The step (d)
Wherein, when the leak signal is detected in the step (c), only one of the plurality of programs is operated, and the operation of the remaining programs is stopped.
19. The method of claim 18,
The step (d)
Wherein a plurality of the storage mediums transmit and receive a mutual control signal so that only one of the programs operates and the operation of the remaining programs of the storage mediums is stopped.
19. The method of claim 18,
The step (d)
And activates the program of any one of the plurality of storage media in accordance with the order of the first mode and the second mode and stops the operation of the programs of the remaining storage media. A method of controlling a leak detection system.

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