KR101514249B1 - Image acquisition apparatus with improved visibility - Google Patents

Abstract

The present invention provides an image acquisition apparatus including: a lighting unit which irradiates an object with light; an image acquisition unit which obtains an image of the object; a wave front acquisition unit which obtains wave front distortion information of a light signal reflected by the object; a role divider which divides the wave front distortion information obtained from the wave front acquisition unit; an inclination mirror which corrects inclination distortion from the wave front distortion information divided by the role divider; a precise control support unit which receives the wave front distortion information, divided by the role divider, except the inclination distortion and generates precise control signals; a wave front control unit which receives the precise control signals, generated by the precise control support unit, and corrects the wave front distortion except inclination distortion; and a control unit that outputs an image of the object generated by the image acquisition unit, receives the divided wave front information, generated by the role divider, controls a reflection angle of the inclination mirror, generates correction signals for correcting the front wave distortion, and transmits the correction signals to the precise control support unit.

Description

[0001] IMAGE ACQUISITION APPARATUS WITH IMPROVED VISIBILITY [0002]

The present invention relates to an apparatus for acquiring an improved image by correcting distortion caused by a wavefront of light.

Obtaining an image using the reflected light of an object located at a remote location can not obtain a clear image because of the wavefront distortion of the light. For example, when you acquire an image of an object located in a field where haze is present, the image is distorted. This image distortion is due to the wavefront distortion of the light caused by the escaping haze.

Therefore, development of a device for acquiring a clear image quality even in an environment where a wavefront distortion phenomenon of light occurs can be considered.

An object of the present invention is to provide an image acquiring apparatus capable of correcting a wavefront distortion of light in order to acquire an image of a clear image quality of an object located at a remote location.

According to an aspect of the present invention, there is provided an image capturing apparatus including an illumination unit configured to illuminate a target object with light, an image acquiring unit configured to acquire an image of the target object, A role divider for dividing the wave front distortion information obtained by the wave front obtaining unit, a slope for correcting tilt distortion in the wave front distortion information divided by the role dividing unit, A precise control support unit for receiving the wavefront distortion information except for the skew distortion among the wavefront distortion information divided by the role divider to generate a precise control signal, and receiving the precise control signal generated by the precise control support unit, A wavefront controller for correcting the wavefront of the object, And a controller for receiving the divided wave front distortion information generated by the role divider to generate a correction signal for controlling the reflection angle of the tilt mirror and for correcting the wave front distortion and transmitting the correction signal to the precision control support unit .

According to an example of the present invention, the wavefront control unit may include a plurality of deformed mirrors for controlling the light wavefront reflected by the object, and a plurality of deformed mirror drivers for respectively controlling the plurality of deformed mirrors.

According to another embodiment of the present invention, the wavefront obtaining unit may include a wavefront sensor for obtaining wavefront distortion information for one area of the object, wavefront distortion information for another area of the object that is not obtained by the wavefront sensor, And a wavefront signal processor for extracting the wavefront distortion information supplemented by the wavefront compensator. The wavefront compensator compensates the wavefront compensator by interpolation from neighboring wavefront distortion information obtained from the wavefront sensor.

According to another embodiment of the present invention, the role divider may divide the wavefront distortion information obtained by the wavefront obtaining unit according to the number of modified mirrors, the specific Zernike coefficient, or the wavefront area.

According to another embodiment of the present invention, the precise control support unit includes a plurality of channel compensators, and the channel compensator may calculate a voltage value to be applied to each channel of the deformed mirror in a wave front distortion correction signal received from the control unit And the voltage value of the channel for which the voltage value is not set can be compensated by using or interpolating the voltage value of the neighboring channel.

Wherein the fine control support unit further includes a plurality of channel stabilizers, wherein the channel stabilizer determines whether the correction signals applied to the wavefront control unit are valid correction signals, and when the correction signals are valid signals, If the correction signal is an invalid signal, the correction of the channel can be stopped.

When the effective value of the wavefront of the object is equal to or less than a specific boundary value and the similarity between the wavefront shape before correction and the wavefront shape after correction is equal to or greater than a specific value, Is less than or equal to a specific threshold value, or when the similarity of the voltage distribution type applied to each channel of the deformed mirror and the shape of the voltage distribution before correction is greater than or equal to a specific value, the correction signal is determined to be invalid and the correction of the channel is stopped .

In order to achieve the above object, the present invention proposes an image acquisition apparatus according to another embodiment. Wherein the image acquiring device includes: an illumination unit that generates light to irradiate a target object; a tilt mirror that reflects light reflected from the target; a plurality of deformation mirrors that reflect light reflected from the tilt mirror; An image acquiring unit that extracts an electrical image signal of the object from the reflected light; a wavefront acquiring unit that acquires wavefront distortion information excluding tilt distortion and tilt distortion of the object from the transmitted light; A control unit for outputting an image of the object generated by the image acquisition unit and receiving the remaining wavefront distortion information from the wavefront acquisition unit and generating a correction signal of the remaining wavefront distortion, To generate precise control signals. Wherein the tilt mirror is configured to adjust a reflection angle of the tilt mirror by the controller receiving the tilt distortion information generated by the wavefront obtaining unit, A voltage is applied to each channel to correct the wavefront distortion.

According to an example of the present invention, the wavefront obtaining unit may include a wavefront sensor that obtains wavefront information on one region of the wavefront of the object from the transmitted light, and a wavefront sensor that is not measured from the neighboring wavefront information acquired by the wavefront sensor And a wavefront compensator that obtains the compensated wavefront information by interpolating another region.

The apparatus may further include a role divider that divides the wave-front distortion information received from the wave-front obtaining unit and transmits the divided wave-front distortion information to the controller so that the wave-front distortion information obtained by the wave-front acquiring unit can be divided and processed.

According to an embodiment of the present invention, the precise control support unit includes a channel compensator, and the channel compensator may adjust the magnitude of the voltage of the channel in which the correction signal is not generated in the controller, Interpolation from the magnitude of the voltage or by setting the voltage magnitude of the neighboring channel to produce a precise control signal.

Wherein the precision control support unit determines whether the precision control signal is a valid signal,

And a channel stabilizer for transmitting a valid precision control signal to the plurality of distortion mirrors when the precision control signal is a valid signal and stopping the correction of the channel if the precision control signal is an invalid signal.

The image acquiring apparatus of the present invention can generate a precise correction signal by supplementing and acquiring information about a specific region of a wavefront that can not be measured by a wavefront sensor by an interpolation method.

In addition, the image acquiring apparatus of the present invention can efficiently correct the wavefront distortion by dividing and correcting the wavefront distortion information acquired by the wavefront acquiring unit by a specific ratio.

In addition, the image acquisition device of the present invention improves the accuracy of correction by complementing the channel voltage of the deformed mirror in which the correction signal is not generated to the neighboring effective channel voltage, and also determines whether the correction signal is valid, So that the efficiency of correction can be improved.

1 is a conceptual diagram illustrating an image acquisition apparatus according to an embodiment of the present invention;
2 is a conceptual diagram showing in detail the path of light in the image acquisition apparatus shown in FIG.
3 is a conceptual view showing a wavefront area measured by the wavefront sensor shown in Fig.
FIG. 4 is a conceptual view showing channels constituting the deformed mirror shown in FIG. 1; FIG.
FIG. 5 is a graph showing the rms value and the maximum-minimum value of the wavefront phase according to the number of corrections measured in the state where the channel ballast shown in FIG. 1 is not operated.
6 is a graph showing a voltage value of a channel according to a number of corrections obtained as a result of correction for fixed wavefront distortion measured in a state where the channel ballast shown in FIG. 1 is not operated.
FIG. 7 is a graph showing the rms value and maximum-minimum value of the wavefront phase according to the number of corrections measured in a fixed wavefront distortion environment in which the channel ballast shown in FIG. 1 operates.
8 is a graph showing voltage values of a channel according to the number of correction measured in a state in which the channel ballast shown in FIG. 1 is operated.
9 is an image showing an image of a target object acquired in an environment where fixed wavefront distortion occurs.
10 is an image showing an image of a target object acquired using the image acquisition device shown in FIG. 1 under the condition shown in FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an image capturing apparatus with improved visibility according to the present invention will be described in detail with reference to the accompanying drawings.

In the present specification, the same or similar reference numerals are given to different embodiments in the same or similar configurations. As used herein, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise.

FIG. 1 is a conceptual diagram showing an image capturing apparatus 100 according to an embodiment of the present invention, and FIG. 2 is a conceptual diagram showing a path of light in the image capturing apparatus 100 shown in FIG. 1 in detail.

1 and 2, an image acquisition apparatus 100 includes an illumination unit 110, an image acquisition unit 120, a wavefront acquisition unit 130, a role divider 140, a tilt mirror 150, A wavefront controller 160, a wavefront controller 170, and a controller 180.

The illumination unit 110 irradiates the object 10 with light. For example, the illumination unit 110 includes a light source (not shown) for generating light, and irradiates the light generated from the light source to the object 10. The light may be formed by infrared rays. Further, the light can be reflected by the mirror 20 and irradiated onto the object 10.

The image acquiring unit 120 acquires an image of the object 10. For example, the image acquisition unit 120 includes an image acquisition sensor (not shown) that extracts an optical signal as an electrical image signal to acquire an image of the object 10.

The wavefront obtaining unit 130 obtains wavefront distortion information of the optical signal reflected from the object 10. The wavefront obtaining unit 130 may include a wavefront sensor 131, a wavefront compensator 133, and a wavefront signal processor 135.

The wavefront sensor 131 acquires wavefront distortion information for one region of the object 10. [ The wavefront sensor 131 may be a Shack-Hartmann wave front sensor.

The wavefront compensator 133 compensates the wavefront distortion information of the object 10 which is not obtained by the wavefront sensor 131 because the degree of the wavefront distortion is severe by interpolation from the wavefront distortion information acquired by the wavefront sensor 131 can do.

The wavefront signal processor 135 may extract the wavefront distortion information from the data supplemented by the wavefront compensator 133.

The wavefront sensor 131 and the wavefront signal processor 135 are devices for acquiring wavefront distortion information of light and can measure the wavefront tilt information. For example, when the object 10 is a point image, a center of mass (center) method for finding the center of the image pixel intensity formed in the array lens to obtain the center point position in each array lens in the wavefront signal processor 135 ) Is used to measure the wavefront tilt information.

Alternatively, when the wavefront sensor 131 acquires the wavefront information for the object 10, which is a plane image, a similarity relation with the reference wavefront is calculated using the sum of absolute difference (SAD) And then extracts the wavefront tilt information from the array lens by interpolation in detail.

For example, the X-axis slope Tilt _x and the Y-axis wavefront slope Tilt _y information for the point images formed by the respective alignment lenses by the center-of-gravity method can be _calculated by the following equations (1-1) and .

식 (1-1)

(1-1)

식 (1-2)

Equation (1-2)

Here, I _{i, j} is the X-axis is i and the pixel intensity at the (i, j) in the Y-axis j position, NxN is a value setting a search area of each view image set by the user, in pixels.

The wavefront tilt information in the image formed on each array lens by the relational method for finding the similarity is expressed by Equation (2-1) representing the relationship between the current input image I _L (NxN) and the reference image I _R (MxM, M <N) ) To extract the correlation by the above-mentioned absolute difference technique.

식 (2-1)

Equation (2-1)

After extracting the correlation, detailed slope information in sub-pixel units in the X and Y directions can be obtained by the interpolation method as shown in Equation (2-2) and Equation (2-3).

식 (2-2)

(2-2)

식(2-3)

Equation (2-3)

Here, (x _min , y _min ) denotes an X-axis pixel position x _min and a Y-axis pixel position y _min which are minimum values in D _LR (x, y).

The control unit 180 outputs the image of the object 10 generated by the image obtaining unit 120 and receives the wavefront distortion information generated by the wavefront obtaining unit 130 to control the reflection angle of the tilt mirror 150, Generates a correction signal for correcting the wave front distortion, and transmits the correction signal to the precise control support unit 160. [

Specifically, when the wave front distortion information generated by the wave front obtaining unit 130 is transmitted to the controller 180, the controller 180 calculates a correction voltage value for correcting the distortion of the wave front using equation (3-1) Controls the tilting mirror 150 according to the voltage value, and transmits the wave front correction information to the precise control support unit 160 to correct the wave front distortion.

[V] = [T] [Z] Expression (3-1)

Here, Z is a Zernike coefficient matrix for wavefront distortion measured by the wavefront sensor 131, and T is a coefficient matrix generated by equation (3-2).

[T] = [M ⁺ ] [Z _b ]

Wherein, M ⁺ is similar to the inverse of the deformation of the mirror influence function M, the matrix Z _b is a Zernike basic function matrix a collection, each Zernike coefficient gradient extracted by the Zernike coefficients, the default image function.

For example, the deformation mirror effect function matrix M when the number of array lenses of the 샥-Hartmann wavefront sensor is 2N and the driving axes of the deforming mirrors 171 and 172 are K, can be expressed as follows.

는 K 번째 변형거울 구동기에 일정한 전압을 인가하였을 때 10번째 파면센서 배열렌즈의 점 영상의 Y축 방향의 기울기 데이터이다. Here,

Axis slope data of the point image of the tenth wavefront sensor array lens when a constant voltage is applied to the Kth distortion mirror driver.

The role divider 140 divides the wavefront distortion information acquired by the wavefront deriving unit 130 into a specific ratio.

Specifically, the role divider 14 can divide the amount of distortion of a specific Zernike coefficient by N% to M%. (N + M = 100%) or the role divider 140 divides the first transform mirror 171 from N1 to N2 by the Zernike coefficient and the second transform mirror 172 from N2 + 1 to N3, Can be divided to take charge. In addition, the role divider 140 may divide the correction amount by the area of the wave front. Accordingly, when the degree of the wave front distortion is large, the correction amount is divided into a plurality of deformed mirrors 171 and 172, so that efficient control is possible.

The tilt mirror 150 is configured to correct tilt distortion in the wavefront distortion information divided by the role divider 140. For example, since the Zernike coefficients 1 and 2 of the tilt mirror 150 are the tilt values in the X and Y axis directions, it is possible to correct the tilt distortion using the method described above.

The precise control support unit 160 receives the wavefront distortion information excluding the tilt distortion from the divided wavefront distortion information in the role divider, and generates a precise control signal. The detailed mechanism of the precise control support unit 160 will be described below with reference to Figs. 3 to 7. Fig.

The wavefront controller 170 receives the control signal generated by the precise control support unit 160 and controls the wavefront distortion information. The wavefront control unit 170 may include a plurality of deformed mirrors 171 and 172 and a plurality of deformed mirror drivers 175 and 176. The deformed mirrors 171 and 172 control the optical wavefront and the deformed mirror drivers 175 and 176 receive control signals from the precise control support unit 160 to control the deformed mirrors 171 and 172.

Hereinafter, a mechanism for supplementing the wavefront information of the wavefront compensator 133 will be described in detail with reference to FIG.

3 is a conceptual diagram showing a wavefront area measured by the wavefront sensor shown in Fig. For example, as shown in FIG. 3, in the wavefront sensor 131 constituted by the 15x15 array lens, the area measured by the wavefront sensor 131 by the wavefront sensor 131 is the area A, Assuming that an area which can not be measured due to noise is an outer part of the B area B and an area where the actual measurement is possible is a B area B, the effective actual area is a B area B ).

At this time, the wavefront compensator 133 performs an operation of supplementing the area not measured in the entire area A, which is the entire area, from the wavefront distortion information of the effective actual area B obtained from the wavefront sensor 131. [

The compensating operation is performed by interpolating the measured data from the wavefront sensor 131. [ For example, when using a simple linear interpolation method between two pixels, the wavefront value at the positions (8, 1), (1,8), (15,8) and (8,15) W (8,1), W (1,8), W (15,8) and W (8,15) can be calculated as follows.

W (8,1) = W (8,2) + D _YU (8,2)

W (1,8) = W (2,8) + D _XR (2,8)

W (15,8) = W (14,8) + D _XL (14,8)

W (8,15) = W (8,14) + D _YD (8,14)

At this time, D _YU (8,2) = W (8,2) -W (8,2 + 1)

D _XR (2,8) = W (2,8) -W (2 + 1,8),

D _XL (14,8) = W (14,8) -W (14-1,8),

D _YD (8, 14) = W (8, 14) -W (8, 14-1).

Such an interpolation method may be interpolated in a non-linear manner. For example, the non-linear method may use cubic B-spline curves in two-dimensional images.

Hereinafter, the detailed mechanism of the precise control support unit 160 will be described in detail with reference to FIG. 4 to FIG.

FIG. 4 is a conceptual view showing a channel constituting the deformed mirror shown in FIG. 1, FIG. 5 is a graph showing a correction value obtained by correcting the fixed wavefront distortion measured in a state where the channel ballast shown in FIG. And FIG. 6 is a graph showing the rms value and the maximum-minimum value of the wavefront phase according to the number of correction channels, which is a correction result for the fixed wavefront distortion measured in the non- FIG. 7 is a graph showing the rms value and the maximum-minimum value of the wavefront phase according to the number of correction measured in a fixed wavefront distortion environment in which the channel ballast shown in FIG. 1 operates and FIG. 8 is a graph 1 is a graph showing a voltage value of a channel according to a number of corrections measured in a state in which a channel ballast shown in FIG.

Referring to FIGS. 4 to 8, the precise control support unit 160 may include a plurality of channel compensators 161 and 162.

The channel compensators 161 and 162 recognize the voltage values to be applied to the respective channels of the distortion mirrors 171 and 172 in the wave front distortion correction signal transmitted from the controller 180. The voltage values of the channels, The voltage value of the channel is used or interpolated to compensate the voltage value applied to the channel.

Specifically, the channel compensators 161 and 162 complement the channel of the deformed mirror that does not directly contribute to the wavefront compensation. For example, FIG. 4 shows each channel from 1 to 225 of the deformed mirrors 171, 172. Assuming that a channel in the rectangle of the correction region C excluding the outer portions of the deformed mirrors 171 and 172 is used for the actual wavefront correction, each channel in the correction region C is continuously applied to correct the wavefront distortion The voltage changes. On the other hand, a channel located outside the correction region C is applied with a fixed value of 0V or a basic bias voltage value to which no voltage is applied. In this case, the point image of the wavefront sensor 131 measured near the boundary surface of the correction region C may cause a large distortion.

At this time, the channel compensators 161 and 162 compensate the channel disposed in the outer portion of the correction region C by an interpolation method, and compensate the wavefront sensor 131 for precise measurement. The method of compensating a channel disposed in the outer region of the correction region C may be a zero order hold (ZOH) method, that is, a voltage value of a neighboring channel may be filled in as it is and interpolation may be performed by linear interpolation in a two- . For example, assuming that the ZOH method is used, the channel voltages of channels 23, 107, 119, and 203 have voltage values of channels 38, 108, 118, and 188, respectively. In addition, the channel voltages of channels 8, 106, 120, and 218 have channel voltage values of channels 23, 107, 119, Thus, by reducing the distortion of the point image captured by the wavefront sensor 131, it is possible to precisely measure the wavefront distortion.

Meanwhile, the precision control support unit 160 may include a plurality of channel stabilizers 165 and 166.

The channel stabilizers 165 and 166 determine whether the correction signals applied to the wavefront controller 170 are valid correction signals and if the correction signals are valid signals, the wavefront controller 170 transmits a valid correction signal to correct the wavefront distortion .

Specifically, when the image acquiring apparatus 100 completes the correction of the wave front distortion close to the limit but continues to perform the correction, it is possible to obtain the image with the wavefront corrected, but the voltage resources of the channels of the distortion mirrors 171 and 172 Consumes. For example, as shown in FIGS. 5 and 6, correction of the wave front distortion is completed close to the limit by actually correcting 2 or 3 times, but correction is normally performed when the correction is repeated continuously. However, as shown in FIG. 6, as the voltage applied to the channel reaches + 150V or -150V, which is the limit voltage, wasted is consumed in advance to consume the resources required to compensate for the incident wavefront distortion.

The channel stabilizers 165 and 166 may be used when the RMS value of the present wavefront is less than or equal to a certain threshold or when the similarity of the wavefront shape before correction to the wavefront shape after correction is greater than or equal to a certain value, When the applied voltage value is equal to or less than a specific boundary value or when the shape of the channel voltage of the deformed mirrors 171 and 172 before correction and the similarity of the corrected wavefront shape are equal to or greater than a specific value, . 7 and 8, when the correction of the wave front is completed by the operation of the channel stabilizers 165 and 166, the correction of the wave front is completed, and the channel voltage of the deformed mirrors 171 and 172 The efficiency of the image capturing apparatus 100 can be improved.

Hereinafter, a mechanism for correcting the wavefront distortion of the object 10 by the image capturing apparatus 100 according to the flow of light will be described with reference to Figs. 2, 9, and 10. Fig.

FIG. 9 is an image showing an image of a target object acquired in an environment in which a fixed wavefront distortion occurs, FIG. 10 is an image showing an image of the target object acquired using the image acquisition device shown in FIG. to be.

2, the light irradiated from the illumination unit 110 passes through the mirror 24 and the lens 26 and is irradiated onto the object 10. The light reflected from the object 10 passes through the lens 26, And passes through the mirror 150 and the plurality of deforming mirrors 171 and 172 and the lens 27. [

Among the light that has passed through the beam splitter 190 that divides the light reflected by the plurality of deforming mirrors 171 and 172 into the transmitted light and the reflected light, the optical signal of the reflected light passes through the lens 28, the spatial filter 30, The image signal is obtained as an electrical image signal by the image acquisition unit 120, and the obtained image signal is outputted as an image by the control unit 180. [

At this time, the optical signal of the transmitted light is converted into an electrical wavefront signal by the wavefront sensor 131 provided in the wavefront acquiring unit 130, and the wavefront compensator 133 converts the optical signal of the transmitted light into weak or distorted The signal is transmitted to the wavefront signal processor 135. The wavefront signal processor 135 extracts wavefront distortion information from the wavefront signal.

The extracted wavefront distortion information is divided by the number of deformed mirrors (171, 172) by the role divider (140). The controller 180 generates a correction signal for correcting the wavefront distortion of each of the divided wavefront distortion information.

The control unit 180 controls the slope distortion of the correction signal by controlling the tilting mirror 150 and transmits a correction signal capable of correcting the remaining wavefront distortion excluding the tilt distortion to the precise control support unit 160 .

The channel compensators 161 and 162 included in the precise control support unit 160 supplement the precise control signals of the channels of the deformed mirrors 171 and 172 that are not used in the precise control signal for controlling the deformed mirrors 171 and 172. The channel stabilizers 165 and 166 determine whether the precise control signal is a valid signal and transmit the precise control signal to each of the deformable mirror drivers 175 and 176 when the precise control signal is a valid precise control signal. The deformable mirror drivers 175 and 176 are provided with a plurality of deformable mirrors 171 and 172 ) To correct the wavefront distortion.

Accordingly, when the image acquisition apparatus 100 acquires an image having a point, distortion of the wavefront of the optical signal due to the phenomenon that the ambiguity rises around the point shape as shown in FIG. 9 And thus a blurred image is obtained. At this time, if the image acquisition apparatus 100 is used, the image of the improved object 10 can be acquired as shown in FIG. 10 by correcting the distortion of the wavefront.

However, the scope of the present invention is not limited to the configuration and method of the embodiments described above, and all or some of the embodiments may be selectively combined so that various modifications may be made to the embodiments. In addition, the present invention can be applied to all equivalents of inventions, such as inventions that can be modified, added, deleted, or replaced at the level of those skilled in the art, It belongs to the scope is self-evident.

100: Image acquisition device 110:
120: image acquiring unit 130: wavefront acquiring unit
140: Role divider 150: Tilt mirror
160: precision control support unit 170: wavefront control unit
180: control unit 190: beam splitter

Claims (12)

An illumination unit for irradiating light to the object;
An image acquiring unit acquiring an image of the object;
A wavefront obtaining unit obtaining wavefront distortion information of the optical signal reflected from the object;
A role divider that divides the wavefront distortion information obtained by the wavefront obtaining unit;
A tilt mirror configured to correct tilt distortion in the wavefront distortion information divided by the role divider;
A precise control support unit for receiving the wavefront distortion information excluding the tilt distortion from the wavefront distortion information divided by the role divider to generate a precise control signal;
A wavefront control unit for receiving the precise control signal generated by the precise control support unit and correcting the remaining wavefront distortion; And
And outputting the image of the object generated by the image acquisition unit, receiving the split wavefront distortion information generated by the role splitter, controlling the reflection angle of the tilt mirror, and generating a tilt distortion And transmits the wave front distortion information to the precision control support unit. The method according to claim 1,
The wavefront control unit,
A plurality of deformation mirrors for controlling the optical wavefront reflected by the object; And
And a plurality of deformation mirror drivers for respectively controlling the plurality of deformation mirrors. The method according to claim 1,
The wave-
A wavefront sensor for obtaining wavefront distortion information for one region of the object;
A wavefront compensator for compensating wavefront distortion information of another region of the object not obtained by the wavefront sensor by interpolation from neighboring wavefront distortion information acquired by the wavefront sensor; And
And a wavefront signal processor for extracting the wavefront distortion information supplemented by the wavefront enhancement unit. The method according to claim 1,
The role divider includes:
Wherein the wavefront distortion information is obtained by dividing the wavefront distortion information obtained by the wavefront obtaining unit by the number of modified mirrors, the specific Zernike coefficient, or the area of the wavefront. 3. The method of claim 2,
Wherein the fine control support unit comprises a plurality of channel compensators,
Wherein the channel compensator recognizes a voltage value to be applied to each channel of the deformed mirror in a wave front distortion correction signal received from the control unit and a voltage value of a channel to which the voltage value is not set uses a voltage value of a neighboring channel And interpolating the interpolated image data. 6. The method of claim 5,
Wherein the fine control support unit further includes a plurality of channel stabilizers,
Wherein the channel stabilizer determines whether the correction signals applied to the wavefront controller are valid correction signals,
And transmits a valid correction signal to the wavefront controller when the correction signal is a valid signal,
And stops the correction of the channel when the correction signal is an invalid signal. The method according to claim 6,
Wherein the channel ballast comprises:
When the effective value of the wave front of the object is less than or equal to a specific boundary value,
Or when the similarity between the wave front shape before correction and the wave front shape after correction is equal to or greater than a specific value,
Or when the effective value of the voltage value applied to each channel of the deformed mirror is less than or equal to a certain threshold value, or
When the similarity of the voltage distribution type applied to each channel of the deformed mirror and the shape of the voltage distribution before correction is greater than or equal to a specific value,
Wherein the correction unit determines that the correction signal is invalid and stops the correction of the channel. An illumination unit for generating light to illuminate a target object;
A tilt mirror for reflecting the light reflected from the object;
A plurality of deformation mirrors for reflecting the light reflected from the tilt mirror;
A beam splitter for splitting the light reflected from the plurality of deformed mirrors into transmitted light and reflected light;
An image acquiring unit for extracting an electrical image signal of the object from the reflected light;
A wavefront obtaining unit that obtains wavefront distortion information excluding tilt distortion and tilt distortion of the object from the transmitted light;
A control unit for outputting an image of the object generated by the image acquisition unit, receiving the remaining wavefront distortion information from the wavefront acquisition unit, and generating a correction signal for the remaining wavefront distortion; And
And a precise control support unit for receiving the correction signal from the control unit and generating a precise control signal,
Wherein the tilt mirror is configured such that a reflection angle of the tilt mirror is adjusted by the controller receiving the tilt distortion information generated by the wavefront obtaining unit,
Wherein the plurality of distortion mirrors apply a voltage to each channel to correct the remaining wavefront distortion according to the precision control signal transmitted from the precision control support unit. 9. The method of claim 8,
The wave-
A wavefront sensor for obtaining wavefront information on one region of the wavefront of the object from the transmitted light; And
And a wavefront compensator for obtaining the compensated wavefront information by interpolating another unmeasured region from the neighboring wavefront information acquired by the wavefront sensor. 10. The method of claim 9,
Further comprising a role divider for dividing the wave-front distortion information received from the wave-front obtaining unit and transmitting the divided wave-front distortion information to the control unit so that the wave-front distortion information obtained by the wave-front acquiring unit can be divided and processed, Device. 9. The method of claim 8,
Wherein the fine control support unit includes a channel compensator,
The channel compensator may interpolate a voltage level of the channel in which the correction signal is not generated by the controller from a voltage level of the region where the correction signal is generated or set a voltage level of the adjacent channel And generates a precise control signal. 12. The method of claim 11,
Wherein the precision control support unit determines whether the precision control signal is a valid signal,
And transmits a valid fine control signal to the plurality of deformed mirrors when the fine control signal is a valid signal,
Further comprising a channel stabilizer for stopping the correction of the channel if the precise control signal is an invalid signal.

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