KR101482378B1 - Micro Electro Mechanical Systems device - Google Patents

Abstract

A MEMS device according to the present invention includes a flexible portion including a mass, a first flexible portion joined to one surface of the mass, and a second flexible portion bonded to the other surface of the mass, and a flexible portion having an end fixed to the flexible portion, And a piezoelectric member or a piezoresistive member is provided on one surface of the flexible portion.

Description

[0001] MEMS DEVICE [0002]

The present invention relates to MEMS devices.

MEMS (Micro Electro Mechanical Systems) is a technology to fabricate ultrafine mechanical structures such as ultra-dense integrated circuits, sensors, and actuators by processing silicon, quartz, and glass. MEMS devices have micrometer (less than one millionth of a meter) precision, and structurally, it is possible to mass-produce very small-sized products at low cost by applying semiconductor fine processing technology which repeats deposition and etching processes.

Among the MEMS devices manufactured through this process, the sensor can be used for a variety of applications such as air bag, ESC (Electronic Stability Control), vehicle black box (automobile) such as automobile, camcorder shake prevention, It is used for various purposes such as motion sensing of game machines and navigation.

In order to measure acceleration, angular velocity or force, such a sensor is generally a structure in which a mass is bonded to an elastic substrate such as a membrane. Through this structure, the sensor can measure the inertia force applied to the mass body to calculate the acceleration, or the inertia sensor that calculates the angular velocity by measuring the Coriolis force applied to the mass, or the inertia sensor that measures the external force applied directly to the mass body, Pressure sensor or the like.

In particular, the inertial sensor is used for military airbags such as air bag, ESC (Electronic Stability Control), vehicle black box, camera shake prevention camcorder, mobile phone, game machine, navigation for satellite, missile and unmanned airplane And so on.

The inertial sensor is divided into an acceleration sensor capable of measuring linear motion and an angular velocity sensor capable of measuring rotational motion.

The acceleration can be obtained by Newton's law of motion "F = ma", where "m" is the mass of the moving object and "a" is the acceleration to be measured. The angular velocity can be obtained by the formula "F = 2m? V" for the Coriolis Force where "m" is the mass of the moving object, "?" Is the angular velocity to be measured, "v" Mass is the speed of motion. Further, the direction of the Coriolis force is determined by the rotation axis of the velocity (v) axis and the angular velocity (?).

Such an inertial sensor can be divided into a ceramic sensor and a MEMS (Microelectromechanical Systems) sensor according to the manufacturing process. Dual MEMS sensors are classified into capacitive type, piezoresistive type, and piezoelectric type according to the sensing principle.

In particular, since the MEMS sensor according to the prior art including the prior art document is made compact and lightweight, the function of the inertial sensor is also continuously evolving.

However, the MEMS sensor according to the related art has a problem that it is difficult to precisely drive and sense one axis due to an external shock or interference due to driving of another axis.

US 20090282918 A1

An aspect of the present invention is to provide a MEMS device capable of precisely driving and sensing only one axis by interrupting driving to another axis.

A MEMS device according to an embodiment of the present invention includes a flexible portion including a mass, a first flexible portion joined to one surface of the mass, and a second flexible portion bonded to the other surface of the mass, And a supporting portion to which the end portion is coupled, and a piezoelectric member or a piezoresistive member is provided on one surface of the flexible portion.

In the MEMS device according to an embodiment of the present invention, the first flexible portion and the second flexible portion are overlapped with each other in the form of a membrane or a bridge.

In the MEMS device according to an embodiment of the present invention, the mass body includes a first mass body and a second mass body overlapping or abutting with each other in the uniaxial direction.

In the MEMS device according to an embodiment of the present invention, the first flexible portion or the second flexible portion may include a driving electrode and a sensing electrode on one side, and may perform an actuator operation using the driving electrode and the sensing electrode, Or the pressure or acceleration is detected by using the sensing electrode.

In the MEMS device according to an embodiment of the present invention, the flexible portion includes a first flexible portion joined to the upper surface of the first mass body and having a plurality of upper piezoelectric bodies on one surface thereof and fixedly connected to the first support portion; And a second flexible portion which is in contact with the lower surface of the first mass body and is bonded to the upper surface of the second mass body, has a plurality of lower piezoelectric bodies on one surface thereof, and is fixedly connected to the second support portion.

In the MEMS device according to an embodiment of the present invention, the MEMS device performs an operation of any one of an actuator, an acceleration sensor, and a pressure sensor using the upper piezoelectric body and the lower piezoelectric body.

Alternatively, a MEMS device according to another embodiment of the present invention includes a first mass; A second mass body surrounded by the first mass body and connected to the first mass body via a plurality of upper inner flexible portions and provided at the center; At least two upper outer flexible portions provided on the upper outer surface of the first mass body and connected to the supporting portion; And at least two lower outer flexible portions overlapping the upper outer flexible portion and provided on a lower outer surface of the first mass body and connected to the support portion.

In the MEMS device according to another embodiment of the present invention, the first mass body is a cylindrical member having an inner space.

In the MEMS device according to another embodiment of the present invention, the upper inner flexible portion is formed in the form of a membrane or a bridge, and has a sensing electrode for detecting the angular velocity of the second mass body on the upper surface thereof .

In the MEMS device according to another embodiment of the present invention, the upper outer flexible portion includes an upper driving electrode for driving the first mass body on one surface thereof, and the lower outer flexible portion includes a lower driving portion for driving the first mass body on one surface, And an electrode.

The MEMS device according to another embodiment of the present invention operates as an actuator using the upper driving electrode and the lower driving electrode.

In the MEMS device according to another embodiment of the present invention, the upper outer flexible portion is symmetrically connected to the support portion on both sides of the upper outer side of the first mass body.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

Prior to this, terms and words used in the present specification and claims should not be construed in a conventional and dictionary sense, and the inventor may appropriately define the concept of a term in order to best describe its invention The present invention should be construed in accordance with the spirit and scope of the present invention.

According to the present invention, it is possible to obtain a MEMS device capable of accurately driving and sensing only one axis by interrupting the driving to the other axis.

1 is a cross-sectional view of a MEMS device according to a first embodiment of the present invention;
2 is a cross-sectional view of a MEMS device according to a second embodiment of the present invention;
3 is a cross-sectional view of a MEMS device according to a third embodiment of the present invention.
4 is a schematic use state diagram for explaining the operation of the MEMS device according to the second embodiment of the present invention.
FIG. 5 is a schematic use state diagram for explaining the operation of a MEMS device according to a third embodiment of the present invention; FIG.
6A is a plan view of a MEMS device according to a fourth embodiment of the present invention;
6B is a cross-sectional view of a MEMS device according to a fourth embodiment of the present invention.
7A is a plan view of a MEMS device according to a fifth embodiment of the present invention.
7B is a cross-sectional view of a MEMS device according to a fifth embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The objectives, specific advantages and novel features of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. It should be noted that, in the present specification, the reference numerals are added to the constituent elements of the drawings, and the same constituent elements are assigned the same number as much as possible even if they are displayed on different drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view of a MEMS device according to a first embodiment of the present invention.

As shown in FIG. 1, the MEMS device 100 according to the first embodiment of the present invention includes at least one mass body 120 that translationally moves in the uniaxial direction, a plurality of masses 120 that are in contact with both surfaces of the mass body 120 The first flexible portion 131 and the second flexible portion 132 and the support portion 110 to which the ends of the first flexible portion 131 and the second flexible portion 132 are fixed, 131 and the second flexible portion 132 may have a piezoelectric body (not shown) or a piezoelectric body (not shown).

 The support 110 supports the first flexible portion 131 and the second flexible portion 132 to secure a space in which the mass 120 can cause displacement and is used as a reference when displacement occurs in the mass 120 It plays a role. Here, the support portion 110 does not necessarily have to be a separate structure, but may be an integral structure. Further, the position of the support portion 110 is not particularly limited as long as it is provided on the outer side of the mass body 120.

The mass 120 is displaced by an inertial force, a Coriolis force, an external force, a driving force, etc. The first flexible portion 131 is joined to the upper surface along the uniaxial direction such as the Z axis, Respectively. These masses 120 are shown as one member in FIG. 1, but are not limited thereto and may be provided with two masses that are in contact with each other along a uniaxial direction such as the Z axis.

The first flexible portion 131 and the second flexible portion 132 are elastic members having a membrane or bridge shape that is elastically deformed according to the movement of the mass body 120 joined at the middle, As shown in FIG. Here, the material of the first flexible portion 131 and the second flexible portion 132 is not particularly limited, but is preferably formed using silicon or an SOI (Silicon On Insulator) substrate.

Each of the first flexible portion 131 and the second flexible portion 132 is provided with a piezoelectric body (not shown) or a piezoelectric body (not shown) on one surface thereof. The displacement of the mass body 120 through the piezoelectric body or the piezoelectric body The inertial force or pressure can be detected. Accordingly, the MEMS device 100 can be used as an inertial sensor or a pressure sensor.

Conversely, in the MEMS device 100 according to the first embodiment of the present invention, the driving voltage is applied to the piezoelectric bodies provided on the first flexible portion 131 and the second flexible portion 132, And generates a vibration force in accordance with the displacement movement, so that it can operate as an actuator.

Since the first flexible portion 131 and the second flexible portion 132 are in contact with the mass body 120 at a predetermined distance in the uniaxial direction such as the Z axis, Movements other than translational displacement can be constrained.

Hereinafter, a MEMS device 200 according to a second embodiment of the present invention will be described with reference to FIGS. 2 and 4. FIG. FIG. 2 is a cross-sectional view of a MEMS device according to a second embodiment of the present invention, and FIG. 4 is a schematic use state diagram illustrating an operation of a MEMS device according to a second embodiment of the present invention. Here, the description of the same parts as those of the MEMS device 100 according to the first embodiment of the present invention described in the description of the MEMS device 200 according to the second embodiment of the present invention will be omitted.

The MEMS device 200 according to the second embodiment of the present invention shown in FIG. 2 includes a first mass body 221 and a second mass body 222 which are in contact with each other in a uniaxial direction and translationally move, a first mass body 221 A second flexible portion 232 provided on the lower surface of the second mass body 221 in the uniaxial direction, a first flexible portion 231 provided on the upper surface of the first flexible portion 231, A support portion 211 and a second support portion 212 to which an end of the second flexible portion 232 is fixed.

The first mass body 221 and the second mass body 222 are overlapped to each other in one axial direction and the first flexible portion 231 is joined and connected to the upper surface of the first mass body 221. The second mass body 221 The second flexible portion 232 is joined and connected. The first mass body 221 and the second mass body 222 are in uniaxial direction and translationally moved in the same uniaxial direction as the Z axis so that the first mass body 221 and the second mass body 222 are separated from each other So that it is possible to maximize the degree of displacement of the mass body 120 in FIG. 1, thereby enhancing the sensing sensitivity.

The first flexible portion 231 and the second flexible portion 232 may be formed in the form of a membrane or a bridge that elastically deforms according to the movement of the first mass body 221 and the second mass body 222 bonded to the first and second flexible portions 231 and 232, And is supported by a first support part 211 and a second support part 212 connected to a rim area. Here, the material of the first flexible portion 231 and the second flexible portion 232 is not particularly limited, but is preferably formed using silicon or an SOI (Silicon On Insulator) substrate.

Each of the first flexible portion 231 and the second flexible portion 232 has a piezoelectric body and an electrode on one side in a symmetrical manner.

2, a first piezoelectric body 241 is formed on the upper surface of the first flexible portion 231 and first sensing electrodes 251-1 and 251-2 are formed on the upper surface of the first piezoelectric body 241, 251-2 and first driving electrodes 252-1, 252-2.

The second piezoelectric member 242 is formed on the lower surface of the second flexible portion 232 and the second sensing electrodes 253-1 and 253-2 are formed on the lower surface of the second piezoelectric member 242, And electrodes 254-1 and 254-2.

The first support portion 211 and the second support portion 212 are separately provided to fix the first flexible portion 231 and the second flexible portion 232 respectively but the present invention is not limited thereto and the first support portion 211 and the second support portion 212 The support portion 212 may be integrally formed to fix both the first flexible portion 231 and the second flexible portion 232 together.

Accordingly, the MEMS device 200 according to the second embodiment of the present invention includes a piezoelectric body, a sensing electrode, and a driving electrode, and can perform functions of an actuator and an acceleration sensor.

Specifically, as shown in FIG. 4, for example, a "+" voltage is applied to the first driving electrodes 252-1, 252-2 and the second sensing electrodes 253-1, 253-2, Voltage is applied to the sensing electrodes 251-1 and 251-2 and the second driving electrodes 254-1 and 254-2 so that the MEMS device 200 according to the second embodiment is moved in the direction of one axis of the arrow As shown in Fig. Of course, it may also act as an actuator that applies a voltage in the opposite direction and resonates in the opposite direction of the arrow.

In addition, apart from this, the MEMS device 200 according to the second embodiment can operate as a pressure sensor or an acceleration sensor, so that when the external force is applied, the first piezoelectric body 241 and the second piezoelectric body 242 are proportional to the external force It is possible to sense the displacement D1 of the first mass body 221 and the second mass body 222 in the uniaxial direction using a piezoelectric effect in which positive and negative charges are generated.

That is, the first sensing electrodes 251-1 and 251-2 or the second sensing electrodes 253-1 and 253-2 change the vibration change D1 of the first mass body 221 and the second mass body 222 And a control unit (not shown) detects pressure or vibration according to the information of the vibration change D1 received from the first sensing electrodes 251-1 and 251-2 or the second sensing electrodes 253-1 and 253-2, The acceleration can be detected.

Hereinafter, a MEMS device 300 according to a third embodiment of the present invention will be described with reference to FIGS. 3 and 5. FIG. FIG. 3 is a cross-sectional view of a MEMS device according to a third embodiment of the present invention, and FIG. 5 is a schematic use state diagram illustrating an operation of a MEMS device according to a third embodiment of the present invention.

The MEMS device 300 according to the third embodiment of the present invention includes a plurality of upper piezoelectric bodies 341 to 344 bonded to the upper surface of the first mass body 321, The first flexible portion 331 and the lower portion of the first mass body 321 are bonded to the upper surface of the second mass body 322 and a plurality of lower piezoelectric bodies 351 to 354 are provided on one surface, And a second flexible portion 332 fixedly connected to the second flexible portion 332.

The first mass body 321 and the second mass body 322 are overlapped with each other and the upper surfaces thereof are joined to the first flexible portion 331 and the second flexible portion 332, respectively.

The first mass body 321 and the second mass body 322 overlap each other in the uniaxial direction, for example, in the uniaxial direction such as the Z axis, and the first mass body 321 and the second mass body 322 are separately moved Since the translational motion is performed, the degree of displacement can be maximized to increase the sensing sensitivity.

The first flexible portion 331 and the second flexible portion 332 are elastic members having a membrane shape or a bridge shape that elastically deforms according to the movement of the first mass body 321 and the second mass body 322 bonded to the first and second flexible portions 331 and 332 A first support portion 211 and a second support portion 212 connected to the edge region. Here, the material of the first flexible portion 231 and the second flexible portion 232 is not particularly limited, but is preferably formed using silicon or an SOI substrate.

Each of the first flexible portion 331 and the second flexible portion 332 includes a plurality of upper piezoelectric bodies 341 to 344 on the other surface corresponding to the surfaces of the first mass body 321 and the second mass body 322, And lower piezoelectric bodies 351 to 354.

When the first mass body 321 and the second mass body 322 receive an external force proportional to the acceleration, the upper piezoelectric bodies 341 to 344 and the lower piezoelectric bodies 351 to 354 are separated from the first mass body 321 The deflection of each of the first flexible portion 331 and the second flexible portion 332 due to the warping of each of the second mass bodies 322 is detected by a change in resistance value. The detected resistance value change information is transmitted to the control unit, and the control unit can detect the uniaxial acceleration in accordance with the resistance value change information.

5, when an external force is applied to the MEMS device 300 according to the third embodiment of the present invention and the first mass body 321 and the second mass body 322 displace each other (D2) The upper piezoelectric bodies 341 to 344 provided in the first flexible portion 331 and the lower piezoelectric bodies 351 to 354 provided in the second flexible portion 332 change their resistance values when they are made of a piezo resistor.

As to the resistance change information, the control unit detects the resistance value change of the inner piezoelectric bodies 342, 343, 352 and 353 as "+ ", the change in resistance value of the outer piezoelectric bodies 341, 344, 351 and 354 as" - & The acceleration or pressure in the Z-axis direction can be detected through the arithmetic processing as shown in Equation (1).

Conversely, by applying a voltage to the upper piezoelectric bodies 341 to 344 and the lower piezoelectric bodies 351 to 354, the MEMS device 300 according to the third embodiment can operate as an actuator that generates a displacement in the direction of one axis of the arrow .

Accordingly, the MEMS device 300 according to the third embodiment of the present invention functions as an acceleration sensor or a pressure sensor by using the upper piezoelectric bodies 341 to 344 and the lower piezoelectric bodies 351 to 354, The actuator can be used to perform the function.

Hereinafter, a MEMS device according to a fourth embodiment of the present invention will be described with reference to FIGS. 6A and 6B. FIG. 6A is a plan view of a MEMS device according to a fourth embodiment of the present invention, and FIG. 6B is a cross-sectional view of a MEMS device according to a fourth embodiment of the present invention. Here, the MEMS device 400 according to the fourth embodiment of the present invention relates to an angular velocity sensor for detecting angular velocity and a MEMS device capable of performing the functions of an actuator.

The MEMS device 400 according to the fourth embodiment of the present invention includes the first mass body 421-1 and the first mass body 421-1 surrounded by the plurality of inner flexible portions 441, A first mass portion 421-2 provided at the center of the first mass body 421-1 connected to the first mass portion 421-1 and a plurality of upper outer flexible portions 421-2 provided on the upper outer surface of the first mass body 421-1, A plurality of lower outer flexible portions 451 which are provided on the lower outer surface of the first mass body 421-1 and which are connected to the supporting portions 411 and 412 and which overlap the plurality of upper outer flexible portions 431 which are the second flexible portions, ).

The first mass body 421-1 is a rectangular tubular member having an inner space and surrounds the second mass body 421-2 via a plurality of inner flexible portions 441 on the upper side of the inner space of the first mass body 421-1 .

The upper outer flexible portion 431 is connected between the upper outer surface of the first mass body 421-1 and the supporter and the upper driving electrode 430 is provided on the upper surface of the second mass body 421-2 to apply a Coriolis force (F) and causes the first mass body 421-1 to drive to vibrate.

The inner flexible portion 441 is an elastic member having a membrane shape or a bridge shape that is elastically deformed in accordance with the movement of the second mass body 421-2. For example, the inner flexible portion 441 is provided with four bridges as shown in Fig. 1 mass body 421-1 and the second mass body 421-2. The inner flexible portion 441 is provided with a sensing electrode 440 on the upper surface thereof to detect the angular velocity according to the Coriolis force F generated in the second mass body 421-2.

The lower outer flexible portion 451 is connected between the lower outer surface of the first mass body 421-1 and the supporting portion in such a manner as to overlap the upper outer flexible portion 431 as shown in FIG. 6B, and the upper outer flexible portion 431 A lower driving electrode 450 for vibrating the first mass body 421-1 is provided on the bottom surface.

In order to generate the Coriolis force F for measuring the angular velocity OX of the second mass body 421-2 that rotates about the X axis, the MEMS device 400 according to the fourth embodiment has four The second mass body 421-2 must be vibrated in the uniaxial direction such as the Z axis perpendicular to the X axis by using the upper outer flexible portions 431-1, 431-2, 431-3, 431-4. Here, "F" is a Coriolis force acting on the second mass 421-2, "m" is a second Coriolis force acting on the second mass 421-2, Quot; XX "is the uniaxial angular velocity to be measured, and" VZ "is the vibration velocity of the second mass body 421-2.

Since the mass m of the second mass body 421-2 and the vibration velocity VZ are already known values, if the Coriolis force F is measured through the sensing electrode 440, The angular speed? Z can be detected.

The MEMS device 400 according to the fourth embodiment of the present invention uses the upper driving electrode 430 of the upper outer flexible portion 431 and the lower driving electrode 450 of the lower outer flexible portion 451, But may also act as an actuator resonating in the uniaxial direction.

Therefore, the MEMS device 400 according to the fourth embodiment of the present invention is an angular velocity sensor for detecting the angular velocity through the sensing electrode 440 provided on the inner flexible portion 441, or an angular velocity sensor for detecting the angular velocity of the upper outer flexible portion 431 The driving electrode 430 and the lower driving electrode 450 of the lower outer flexible portion 451 can function as an actuator.

Hereinafter, a MEMS device according to a fifth embodiment of the present invention will be described with reference to FIGS. 7A and 7B. FIG. 7A is a plan view of a MEMS device according to a fifth embodiment of the present invention, and FIG. 7B is a cross-sectional view of a MEMS device according to a fifth embodiment of the present invention. Here, the MEMS device 500 according to the fifth embodiment of the present invention has the same functions as the MEMS device 400 according to the fourth embodiment of the present invention, and is capable of performing the functions of the angular velocity sensor and the actuator for detecting the angular velocity Lt; RTI ID = 0.0 > MEMS < / RTI >

The MEMS device 500 according to the fifth embodiment of the present invention includes a first mass body 521-1 having a rectangular tubular cross-section with an internal space, an inner can body 521-1 surrounded by the first mass body 521-1, The second mass body 521-2 connected to the first mass body 421-1 by the first mass body 540 and the second mass body 521-2 provided at the center and the supporting portions 511 and 512 provided on the upper outer surfaces of both sides of the first mass body 521-1, And the upper outer flexible portions 531-1 and 531-2 which are the first flexible members connected to the lower outer side surfaces of the first mass body 521-1 and the upper outer side flexible portions 531-1 and 531-2, And lower outer flexible portions 551-1 and 551-2, which are second flexible portions connected between the first and second flexible portions 511 and 512, respectively.

The first mass body 521-1 is a member having a rectangular cross section with a circular inner space and is formed on the upper side of the inner space with a cylindrical second mass body 521-2 through an inner flexible portion 540 in the form of a membrane. .

The upper outer flexible portions 531-1 and 531-2 connect the upper outer surface of the first mass body 521-1 and the left and right support portions 511 and 512 to each other to drive the first mass body 521-1 An upper driving electrode 530 is formed on the upper surface.

The inner flexible portion 540 may be formed using, for example, a silicon or an SOI (Silicon On Insulator) substrate, and may have on its upper surface a sensing portion 420 for sensing the angular velocity in each axial direction in accordance with the vibration of the second mass 421-2 And an electrode 541.

As shown in Fig. 7B, the lower outer flexible portions 551-1 and 551-2 overlap the upper outer flexible portions 531-1 and 531-2 and extend to both sides of the lower outer surface of the first mass body 521-1 and the supporting portions 511 and 512 And a lower driving electrode 550 for vibrating the first mass body 521-1 like the upper outer flexible portions 531-1 and 531-2 is provided on the bottom surface.

The MEMS device 500 according to the fifth embodiment has the upper outer flexible portion 531-i to generate the Coriolis force F for measuring the angular velocity? X of the rotating second mass 521-2. The first mass body 521-1 is driven in the Z-axis direction by using the upper driving electrode 530 of the lower outer flexible portion 5531-1 and the lower driving electrode 550 of the lower outer flexible portion 551-1 and 551-2.

At this time, the angular speed OMX of the second mass body 521-2 can be obtained by the expression "F = 2mΩZVZ" concerning the Coriolis force F, where "F" acts on the second mass body 521-2 Quot; is the mass of the second mass body 521-2, "? X" is the uniaxial angular velocity to be measured, and "VZ" is the vibration velocity of the second mass body 521-2.

Since the mass m and the vibration velocity VZ of the second mass body 521-2 are already known in this equation, if the Coriolis force F is measured through the sensing electrode 541, The angular speed? Z can be detected.

The MEMS device 500 according to the fifth embodiment of the present invention has a structure in which the upper driving electrode 530 of the upper outer flexible portions 531-1 and 531-2 and the lower driving electrode 530 of the lower outer flexible portions 551-1 and 551-2 The function as the actuator resonating in the uniaxial direction can be performed using the driving electrode 550. [

Accordingly, the MEMS device 500 according to the fifth embodiment of the present invention is similar to the MEMS device 400 according to the fourth embodiment of the present invention, except that the sensing electrode 541 provided on the inner flexible portion 540 An angular velocity sensor for detecting the angular velocity or an actuator functioning as an actuator through the upper driving electrode 530 of the upper outer flexible portions 531-1 and 531-2 and the lower driving electrode 550 of the lower outer flexible portions 551-1 and 551-2 Can be performed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the same is by way of illustration and example only and is not to be construed as limiting the present invention. It is obvious that the modification and the modification are possible.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100, 200, 300, 400, 500: MEMS device
110: Support
120: mass
131, 231:
132,232: a second flexible portion
211: first support portion
212: second support portion
221: First mass
222: second mass
241:
242:
341 to 344: upper piezoelectric body
351 to 354: Lower piezoelectric body

Claims (12)

Mass;
A flexible portion including a first flexible portion joined to one surface of the mass body and a second flexible portion bonded to the other surface of the mass body; And
And a support portion to which an end of the flexible portion is fixed so that the mass is lifted,
A first piezoelectric body is provided on one surface of the first flexible portion, a second piezoelectric body is provided on one surface of the second flexible portion,
Wherein at least one of the first driving electrode and the first sensing electrode is provided in the first piezoelectric member of the first flexible portion,
Wherein at least one of the second driving electrode and the second sensing electrode is provided in the second piezoelectric member of the second flexible portion,
An actuator for performing an actuator operation using the first driving electrode and the second driving electrode or a MEMS sensor for detecting an angular velocity using the first driving electrode and the second driving electrode and the first sensing electrode and the second sensing electrode, device.
The method according to claim 1,
Wherein the first flexible portion and the second flexible portion are overlapped with each other in the form of a membrane or a bridge.
The method according to claim 1,
Wherein the mass body includes a first mass and a second mass that overlap or abut against each other in the uniaxial direction.
delete The method of claim 3,
The flexible portion
A first flexible portion joined to an upper surface of the first mass body and having a plurality of upper piezoelectric bodies on one surface thereof and fixedly connected to the first support portion; And
A second flexible portion joined to an upper surface of the second mass body in contact with a lower surface of the first mass body and having a plurality of lower piezoelectric bodies on one surface thereof and fixedly connected to a second support portion;
The MEMS device comprising: a substrate;
delete Mass body;
A first flexible portion joined to one end face of the mass body,
A flexible portion including a second flexible portion joined to the other end surface of the mass body; And
And a support portion to which the end portions of the first flexible portion and the second flexible portion are coupled so that the mass moves up,
The mass portion
A first mass body, a second mass body embedded in the first mass body, and an inner flexible portion connecting the first mass body and the second mass body,
Wherein the inner flexible portion is provided with a sensing electrode for detecting the angular velocity of the second mass body,
Wherein the first flexible portion is provided with an upper driving electrode for driving the first mass body on one surface thereof and the lower flexible electrode is provided with a lower driving electrode for driving the first mass body on one surface thereof.
The method of claim 7,
Wherein the first mass is a cylindrical member having an inner space.
The method of claim 7,
Wherein the inner flexible portion is formed in the form of a membrane or a bridge.
delete The method of claim 7,
Wherein the MEMS device operates as an actuator using the upper driving electrode and the lower driving electrode.
The method of claim 7,
Wherein the first flexible portion is symmetrically connected to the support portion on both sides of the upper outer surface of the first mass body.

Images