KR101464180B1 - X-ray Three-dimensional restore method - Google Patents

Abstract

The present invention relates to a method of restoring a 3-dimensional X-ray using a distinguishing specimen of an X-ray examination apparatus, which calculates a desired position and angle information of an X-ray examination apparatus by using a given specimen to accurately restore a 3-dimensional internal/external shape of an object to examine an irregularity of a structure of the object. The method of an exemplary embodiment of the present invention uses an X-ray examination apparatus constituted by an X-ray tube, a detector and a stage, and includes: (A) installing and initializing the detector and the X-ray tube at a position of an angle of 0 degree; (B) attaching a distinguishing specimen to a fixed X-ray tube; (C) photographing an image; (D) calculating an accurate position and an amount of an inverse direction movement of the distinguishing specimen, in which an image of the distinguishing specimen varies, when a position of a spot of the X-ray tube based on the photographed image is varied; (E) electronically adjusting or compensating the spot position of the X-ray tube or physically moving the entire stage including a target object and the detector with respect to the fixed X-ray tube based on the amount of the inverse direction movement calculated in step (D); and (F) repeating the steps (D) and (E) to fix a focalspot to the X-ray tube.

Description

{X-ray Three-dimensional restoration method using X-ray inspection machine distinguishable specimen}

The present invention relates to an X-ray 3D reconstruction method using an X-ray tester, and more particularly, to an X-ray three-dimensional reconstruction method using an X-ray tester, Dimensional reconstruction method using an X-ray tester distinguishing specimen for accurately restoring a three-dimensional inner / outer shape of an object.

Generally, in the field of semiconductor and SMT, it is necessary to reconstruct 3-dimensional X-ray shape in addition to 2-dimensional X-ray image of X-ray inspection apparatus, and it is necessary to reconstruct 3-dimensional shape of high precision minute parts and signal connecting line. At this time, Cone Beam or OCT is used as an X-ray 3D shape reconstruction method, and 2D X-ray images are taken at an omnidirectional angle and combined.

However, in the past, since a three-dimensional shape was restored through precise control of a mechanism, there was a problem that it was difficult to accurately restore the semiconductor device in a semiconductor field requiring super precise driving.

As a background of the present invention, Patent Registration No. 0943002, "X-ray Inspection Apparatus" (Patent Document 1) is available. In the above-mentioned background art, "x-ray tube" which is composed of a stage, an x-ray tube, and a detector in a case, places a to-be-measured object on the stage, irradiates the x- ray inspection apparatus according to claim 1, wherein the stage is a rotary stage configured to be rotatable, or is configured such that a circular rotary stage is rotatable in a through hole and a through hole biased to one side, a connecting rod is formed at a lower portion of the rotary stage, A rotary motor is disposed at a lower end of the connecting rod, and is fixed to the stage by a fixed frame, the rotary stage is rotated by the rotation of the rotary motor, and is configured to be horizontally movable in the x and y axes, Wherein the detector is supported by a support bracket, The X-ray inspection apparatus can be configured to be able to flow along the work and to obtain a variety of incident angles with respect to the inspection site, thereby securing three-dimensional image information and performing inspection at various angles, Device ".

However, in the background art, the accuracy is determined according to the variation of the size and position of the focus of the X-ray tube. In the semiconductor inspection, the tube spot has a low energy and the exposure time is long. During this time, There is a problem that accuracy is degraded. In addition, since the stage on which the object is placed rotates, the image is picked up. Therefore, there is a problem that precision three-dimensional reconstruction is difficult due to the limitation of eccentricity error and position repetition performance of the rotary motor.

Patent Registration No. 0943002 "X-ray Inspection Device"

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to collect information on the positions and angles of an X-ray source, an object, and an X-ray detector at all angles in order to restore a shape with a desired precision (high resolution) Dimensional reconstruction method using a specimen of an X-ray tester capable of precisely restoring a three-dimensional image even in a semiconductor field requiring super-precise measurement by allowing information to be calculated using a given specimen.

(A) installing and initializing a detector and an X-ray tube at an angle of 0 degree; (B) attaching the discriminating specimen to the fixed x-ray tube; (C) image photographing step; (D) calculating a backward movement amount of an accurate position of the discrimination sample, in which the image of the discrimination specimen changes, when the position of the spot of the X-ray tube is changed based on the photographed image; (E) electronically adjusting and correcting the spot position of the x-ray tube based on the backward movement amount calculated in the step (d), or physically moving the entire stage including the object and the detector to the fixed x-ray tube ; (F) Repeating the steps (D) and (E) to fix the focal spot to the x-ray tube. The amount of change in which the spot of the x- Dimensional reconstructed image by electronically correcting the error and reconstructing the 3D image. The X-ray three-dimensional reconstruction method using the X-ray diffraction specimen is provided.

A first detector formed at a position corresponding to the X-ray tube and the X-ray tube; a second detector positioned at a predetermined inclined angle with respect to the X-ray tube by a curved guide or an inclined fixing device; (A) an X-ray tube (not shown), which is composed of an X-ray tube and an X-ray tube, Positioning and initializing the second detector at a predetermined tilt angle with respect to the first detector; (b) initializing the rotation motor of the rotation stage and adjusting it to 0 degree; (c) fixing the discriminating specimen to the rotating stage and fixing the object to the upper portion of the discriminating specimen; (d) moving the base stage on the x, y, and z axes to move the object P to be imaged to a predetermined position; (e) moving an object between the spot of the fixed x-ray tube and the second detector to match the imaging magnification, and causing the second detector to photograph the specimen with the desired size differentiated from the object; (f) moving the rotating stage to photograph a region of interest of the object P; (g) photographing an X-ray image; (h) calculating differential feature values of the discriminated specimen in the X-ray image; (i) calculating and storing a deviation of an angle and a rotation center position of the rotation motor of the rotation stage by comparing the reference information of the discrimination specimen and the specimen discrimination feature value calculated in the X-ray image; (j) driving the rotary motor to rotate the rotary stage to rotate at a next photographing angle; (k) repeating the above steps (g) to (j) until the X-ray image is taken at all desired omnidirectional angles, Dimensional restoration method of the X-ray inspection apparatus according to the present invention is characterized in that deviation and angles of the center position of the X-ray detector are obtained, thereby improving accuracy in restoring the three-dimensional internal / external structure of the object.

In the step (g), when the X-ray image is shot, the specimen is simultaneously photographed at the same time, or if the specimen is not included in the image, it is distinguished from the target object through the two- The specimen can be photographed.

A first detector positioned at a position corresponding to the x-ray tube and the x-ray tube, a second detector positioned at a predetermined tilt angle with respect to the x-ray tube by a curved guide or a tilt fixation device, (A ') using an x-ray inspection apparatus which is composed of a base stage, which is located between the base stage and the base stage, on which movement means for moving in the x, y and z axes are formed, Locating and initializing the second detector at a predetermined tilt angle relative to the x-ray tube; (b ') initializing the rotation motor of the rotation stage and adjusting it to 0 degree; (c ') fixing the specimen to the rotary stage, and fixing the object to the upper portion of the specimen; moving the stage (d ') based on the x, y, and z axes to move the object to be imaged to a predetermined position; moving the object between the spot of the fixed X-ray tube and the second detector so as to match the photographing magnification, and causing the second detector to photograph the object to be discriminated at a desired size; (f ') moving the rotating stage to capture an area of interest of the object; (g ') photographing an X-ray image; (h ') calculating distinction feature values of the discrimination specimen in the X-ray image; calculating and storing a deviation of an angle and a rotational center position of the rotary motor of the rotary stage by comparing the reference information of the discriminated specimen with the specimen distinguishing feature values calculated in the X-ray image; (j ') calculating an amount of correction of the x, y, and z axes of the base stage using the error of the rotation motor; (k ') If the calculated correction amount is within the tolerance, the next step is executed. If the calculated correction value deviates from the tolerance, the base stage is moved by x, y, z axis by the correction amount, g ') to (k'); (l ') driving the rotating motor to rotate at the next photographing angle; (m ') repeating the steps (g') - (l ') until the X-ray image is taken at all desired omnidirectional angles, Dimensional reconstruction method using an X-ray tester differentiated from the X-ray tester, characterized in that accuracy is restored in reconstructing a three-dimensional inner / outer structure of a target object using a center position and an angle of a rotary motor.

In the step (g '), when the X-ray image is photographed, the specimen is simultaneously photographed with the object and if the specimen is not included in the image, the object is moved through the base stage twice, It is possible to photograph the discriminated specimen.

In the X-ray three-dimensional reconstruction method using the X-ray tester of the present invention, the X-ray three-dimensional reconstruction method attaches the discriminated specimen to the x-ray tube, performs imaging, calculates the spot movement error of the x- ray tube, electronically corrects this error, Dimensional error of the rotary motor and the mechanism error due to the limitation of the repeatability of the position are calculated and corrected so that it is possible to correct and restore the three-dimensional image precisely even in the semiconductor field requiring super precise driving .

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments of the invention and, together with the description, serve to explain the principles of the invention, Shall not be construed as limiting.
FIG. 1 is a perspective view schematically showing an X-ray inspection apparatus used in an X-ray three-dimensional reconstruction method using a specimen of an X-ray inspection apparatus according to the present invention.
FIG. 2 is a partially cutaway perspective view schematically showing an X-ray inspection apparatus used in the X-ray three-dimensional reconstruction method using the differentiated specimen of the X-ray inspection apparatus of the present invention.
3A is a side view of the X-ray inspection apparatus showing the position of the discrimination test piece 2 in the second embodiment of the present invention.
3B is a side view of the X-ray inspection apparatus showing the positions of the differentiated specimen 2 and the measured object P in the third embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the embodiments shown in the accompanying drawings, but the present invention is not limited thereto.

 Hereinafter, the technical structure of the present invention will be described in detail with reference to the preferred embodiments.

FIG. 1 is a perspective view schematically showing an X-ray inspection apparatus used in the X-ray three-dimensional reconstruction method using the X-ray inspection apparatus of the present invention. FIG. 2 is a cross- FIG. 2 is a partially cutaway perspective view schematically showing an X-ray inspection apparatus used in a restoration method. FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

The first embodiment of the present invention uses an x-ray inspection apparatus composed of an x-ray tube 10, a detector 20 and a stage 30 as in a general x-ray inspection apparatus and uses an x- . Therefore, only the x-ray tube 10, the detector 20 and the stage 30 are configured in Fig. 1 and Fig.

First, the detector 20 and the X-ray tube 10 are installed and initialized at an angle of 0 degree (A).

First, the tube 10 is fixed vertically and a detector 20 is installed to detect the movement of the focus of the tube 10 by imaging.

Then, the differentiated specimen 2 is attached to the fixed X-ray tube 10 (B).

The specimen 2 is attached to the lower portion of the tube 10 fixed to the X-ray examination apparatus in order to sense the position signal on the image in proportion to the change of the focal position of the tube 10. That is, the distinction specimen 2 is fixed to the tube 10, and the image signal is accurately measured even when the tube 10 is changed to a small focal position.

Thereafter, the image is photographed (C).

When the focus position of the tube 10 is changed, the image is captured in real time to detect the changed focus position as an image.

The backward movement amount of the distinction specimen 2 in which the image of the discrimination specimen 2 is changed is accurately calculated (D) when the spot position of the X-ray tube 10 is changed based on the photographed image.

The amount of movement of the focus of the tube 10 is indicated by the position of the fixed specimen moving in the opposite direction in the captured image. And the movement amount is calculated by the position difference.

Thereafter, the spot position of the x-ray tube 10 is electronically adjusted or moved based on the backward movement amount calculated in the step (D), or the entire stage 30 including the object P and the detector 20 is moved (E) to physically move relative to the fixed x-ray tube 10.

The position of the focus of the tube 10 is electronically adjustable. Thus, the focus position of the moved tube 10 can be compensated through electronic control.

Thereafter, steps (D) and (E) are repeated to fix the focal spot to the x-ray tube 10 (F).

The above-mentioned position compensation is repeatedly applied to the fixed tube 10 by repeating the error measurement process and the error correction process so that the focal position is fixed to the fixed tube 10 continuously in real time.

The amount of change of the spot of the x-ray tube 10 moving with time is determined by fixing the specimen 2 in advance through the above process, and the error is corrected electronically to restore the three-dimensional image.

3A is a side view of the X-ray inspection apparatus showing the position of the discrimination test piece 2 in the second embodiment of the present invention.

3A, the second embodiment of the present invention differs from the first embodiment in that a first detector 20, which is formed at a position corresponding to the x-ray tube 10 and the x-ray tube 10, A second detector 20a positioned at a predetermined inclined angle (for example, between 50 degrees and 70 degrees) with respect to the x-ray tube 10 by a curved guide 21, A base stage 30 which is located between the detectors 20 and 20a and on which moving means for moving in the x, y and z axes are formed; And a rotary stage 40 for rotating the entirety of the base stage 30.

That is, the second detector 20a, the rotation stage 40, and the like are additionally configured in a general X-ray inspection apparatus.

First, the second detector 20a is positioned at an inclined angle with respect to the x-ray tube 10 and initialized (a).

In order to find out the structure of an object in three dimensions, it is necessary to photograph and combine an object at all angles (360 degrees). In this second embodiment, 360 degrees of an object The description is limited to the method of capturing all images. However, this method can be applied to all types of CT as well as this method.

Thereafter, the rotation motor of the rotation stage 40 is initialized and adjusted to zero (b).

This is to initialize to capture both 0 degree to 360 degree images.

Thereafter, as shown in Fig. 3A, the differentiated specimen 2 is fixed to the rotating stage 40, and the object P is fixed to the upper portion of the differentiated specimen 2 (c).

Then, the base stage 30 is moved on the x, y, and z axes to move the object P to be imaged to a predetermined position (d).

And moves the object to a predetermined position such that the object is positioned on the line from the focus of the tube 10 to the second detector 20a.

Thereafter, the object P is moved between the spot of the fixed x-ray tube 10 and the second detector 20a in order to match the photographing magnification, and the second detector 20a is distinguished from the object P by the second detector 20a. (2) to be photographed in the desired size (e).

The object is moved on the line between the upper tube and the image second detector 20a to adjust the magnification to be photographed. Moving the object toward the tube 10 further increases the magnification.

Thereafter, the rotary stage 40 is moved to photograph the region of interest of the object P (f).

It is necessary to rotate the rotation stage 40 at an angle to be captured at the current time since the image must be captured at every angle of 360 degrees.

Thereafter, the X-ray image is photographed (g), and the characteristic value of the discriminating specimen 2 (for example, vertex and line segment when the discriminating specimen is a hexahedron) is calculated in the X-ray image (h).

When the object P and the discriminating specimen 2 are not included in one image, it is possible to photograph the object P and the discriminating specimen 2 at the same time during the x- The object P and the distinction specimen 2 may be photographed through two movements, respectively.

The discrimination test piece (2) can use only corner vertices and can use line segments between vertices simultaneously. When using a line segment with a vertex, the calculation precision is improved.

Then, the reference information of the discriminating specimen 2 is compared with the specimen characteristic values calculated in the X-ray image, and the error of the angle and the rotational center position of the rotating motor of the rotating stage 40 is calculated (i).

The error is calculated by comparing the state of the desired device with the state after the present control. The error calculated from the above process at each angle is stored in a specific place for later use in software error compensation.

Thereafter, the rotary motor 40 is driven to rotate the rotary stage 40 to rotate at the next shooting angle (j).

Since the image should be taken at 360 degrees full angle, rotate the rotation stage at the next angle.

Finally, steps (g) to (j) are repeated until the X-ray image is taken at all desired omnidirectional angles (k).

As described above, the deviation and the angle of the center position of the rotation motor are obtained for all the X-ray images obtained in the above step, thereby improving the accuracy of reconstruction of the three-dimensional inner / outer structure of the object P.

3B is a side view of the X-ray inspection apparatus showing the positions of the differentiated specimen 2 and the measured object P in the third embodiment of the present invention.

3B, the third embodiment of the present invention includes a first detector 20 formed at a position corresponding to the x-ray tube 10 and the x-ray tube 10 in the same manner as the second embodiment, A second detector 20a positioned at a predetermined inclined angle with respect to the X-ray tube 10 by a guide 21 of the X-ray tube 10 or the detector 20, A base stage 30 formed on the base stage 30 and having a moving means for moving the base stage 30 in the x, y and z axes, (40). ≪ / RTI >

First, the second detector 20a is positioned at an inclined angle with respect to the x-ray tube 10 and initialized (a ').

In order to find out the structure of an object in three dimensions, it is necessary to capture and combine an object at all angles (360 degrees). In this third embodiment, 360 degrees of an object The description is limited to the OCT method for picking up all the images. However, this method can be applied not only to this method but also to all kinds of CT.

Thereafter, the rotation motor of the rotation stage 40 is initialized and adjusted to zero (b ').

It is to initialize to capture all 0 ° to 360 ° images.

3B, the differentiated specimen 2 is fixed to the rotary stage 40, and the object P is fixed to the upper part of the differentiated specimen 2 (c '). Then, as shown in Fig. 3B, (30) is moved on the x, y, and z axes to move the object P to be photographed to a predetermined position (d ').

The object is moved to a predetermined position such that the object P is located on the line from the focal point of the tube 10 to the detector 20a.

Thereafter, the object P is moved between the spot of the fixed x-ray tube 10 and the second detector 20a in order to match the photographing magnification, and the second detector 20a is distinguished from the object P by the second detector 20a. (2) to be photographed at a desired size (e ').

The object is moved on the line between the upper tube and the image second detector 20a to adjust the magnification to be photographed. When the object P is moved toward the tube 10, the magnification further increases.

Thereafter, the rotation stage 40 is moved (f ') in order to photograph the region of interest of the object P (FIG. Since each image must be captured at every angle of 360 degrees, the rotation stage 40 is rotated at an angle to be captured at present.

Thereafter, the X-ray image is photographed (g '), and the characteristic value of the discriminating specimen 2 (for example, the vertex and the segment when the discriminating specimen is a hexahedron) is calculated in the X-ray image (h').

When the object P and the discriminating specimen 2 are not included in one image, it is possible to photograph the object P and the discriminating specimen 2 at the same time during the x- The object P and the distinction specimen 2 may be photographed through two movements, respectively.

Distinctive specimen (2) can only use vertex points and can use line segments between vertices simultaneously. When using a line segment with a vertex, the calculation precision is improved.

Then, the deviation of the angle and the center of rotation of the rotating motor 40 of the rotating stage 40 is calculated (i ') by comparing the reference information of the discriminating specimen 2 with the specimen characteristic values calculated in the X-ray image.

The error is calculated by comparing the state of the desired device with the state after the present control.

Then, the correction amount of the x, y, and z axes of the base stage 30 is calculated using the error of the rotation motor (j ').

Thereafter, if the calculated correction amount is within the allowable error, the next step is executed. If the calculated correction value is out of the allowable error, the base stage 30 is moved in the x, y, (g ') to (j') are performed (k ').

This process, unlike the software calibration method, directly drives the instrument and attempts to compensate for this error until the error is within the acceptable range.

Thereafter, the rotating motor is driven to rotate at the next photographing angle (l ').

Since the image should be taken at 360 degrees full angle, rotate the rotation stage at the next angle.

Then, repeat step (g ') - (l') until the X-ray image is taken at all desired omnidirectional angles (m ').

As described above, accuracy is restored in restoring the three-dimensional inner / outer structure of the object P by using the center position and the angle of the rotary motor with respect to all the X-ray images obtained in the above step.

In the X-ray three-dimensional reconstruction method using the X-ray tester of the present invention having the above-described embodiment of the present invention, the X-ray three-dimensional reconstruction method of attaching the discriminated specimen to the x- In addition, by correcting the eccentric error of the rotating motor and the mechanism error due to the limit of the repeatability of the position, it is possible to compensate the 3D image accurately and precisely even in the semiconductor field requiring ultra precise driving. There is a very useful effect that can be done.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art in light of the above teachings. will be. The invention is not limited by these variations and modifications, but is limited only by the claims appended hereto.

1: X-ray inspection device
2: Distinctive Piece
P: Target object
10: X-ray tube
20: first detector
20a: second detector
30: Base stage
40: rotating stage

Claims (5)

Using an x-ray inspection apparatus composed of an x-ray tube 10, a detector 20 and a stage 30,
(A) installing and initializing the detector (20) and the x-ray tube (10) at an angle of 0 degree;
(B) attaching the differentiated specimen (2) to the fixed x-ray tube (10);
(C) image photographing step;
(D) accurately calculating the backward movement amount of the discriminating specimen (2) in which the image of the discriminating specimen (2) is changed when the spot position of the X-ray tube (10) is changed based on the photographed image;
Ray tube 10 is electronically adjusted or corrected based on the backward movement amount calculated in the step (D) or the entire stage 30 including the object P and the detector 20, To a fixed x-ray tube (10);
(F) Repeating the steps (D) and (E) to fix the focal spot to the x-ray tube 10,
The X-ray inspection apparatus according to any one of claims 1 to 3, characterized in that the amount of change in which the spot of the X-ray tube (10) moves with time is determined by fixing the specimen (2) Ray three dimensional reconstruction method. A first detector 20 formed at a position corresponding to the x-ray tube 10 and the x-ray tube 10 and a second detector 20 at a predetermined inclined angle with respect to the x- A base stage 30 which is located between the x-ray tube 10 and the detectors 20 and 20a and on which moving means for moving in the x, y and z axes are formed, Ray inspection apparatus, which is composed of a rotary stage 40 which is formed on an upper portion or a lower portion of the base 30 and is rotated by a motor to rotate the base stage 30,
(a) positioning and initializing the second detector 20a at an angle inclined with respect to the x-ray tube 10;
(b) initializing the rotation motor of the rotation stage 40 to zero;
(c) fixing the discriminating sample 2 to the rotating stage 40 and fixing the object P to the upper portion of the discriminating piece 2;
(d) moving the base stage 30 on the x, y, and z axes to move the object P to be imaged to a predetermined position;
(e) Moving the object P between the spot of the fixed x-ray tube 10 and the second detector 20a in order to match the photographing magnification and causing the second detector 20a to discriminate the object P from the object P Allowing the specimen 2 to be photographed at a desired size;
(f) moving the rotating stage (40) to photograph a region of interest of the object (P);
(g) photographing an X-ray image;
(h) calculating distinction feature values of the discriminating specimen (2) in the X-ray image;
(i) calculating and storing a deviation of an angle and a rotation center position of the rotation motor of the rotation stage (40) by comparing the reference information of the discrimination specimen (2) with the specimen discrimination characteristic values calculated in the X-ray image;
(j) driving the rotary motor to rotate the rotary stage 40 to rotate at a next photographing angle;
(k) repeating the above steps (g) to (j) until the X-ray image is taken at all desired omnidirectional angles, Wherein the deviation and angles of the center position of the object P are corrected so as to improve the accuracy of reconstruction of the three-dimensional inner / outer structure of the object P, using the X-ray three-dimensional reconstruction method. 3. The method of claim 2,
In step (g)
When the X-ray image is taken, the object P and the distinction sample 2 are photographed at the same time, or when the object P and the distinction specimen 2 are not included in one image, Wherein the X-ray three-dimensional reconstruction method uses the X-ray inspection machine to distinguish the object P and the specimen 2 through the X-ray inspection method. A first detector 20 formed at a position corresponding to the X-ray tube 10 and the X-ray tube 10 and a second detector 20 formed at a predetermined tilted angle with respect to the X-ray tube 10 by a curved guide 21 or a tilt- A base stage 30 which is located between the x-ray tube 10 and the detectors 20 and 20a and on which moving means for moving in the x, y and z axes are formed, Using an x-ray inspection apparatus constituted by an upper stage or a lower stage of the stage 30 and a rotating stage 40 which is rotated by a motor to rotate the base stage 30,
(a ') positioning and initializing the second detector 20a at an angle tilted relative to the x-ray tube 10;
(b ') initializing a rotation motor of the rotation stage 40 and adjusting it to zero;
(c ') fixing the specimen (2) to the rotary stage (40) and fixing the object P to the upper portion of the specimen 2;
(d) moving the stage 30 based on the x, y, and z axes to move the object P to be imaged to a predetermined position;
the subject P is moved between the spot of the fixed X-ray tube 10 and the second detector 20a in order to match the photographing magnification of the object P to the second detector 20a, So that the discriminating sample (2) is photographed in a desired size;
(f ') moving the rotating stage (40) to photograph an area of interest of the object (P);
When the object P and the discriminating specimen 2 are simultaneously photographed or the specimen 2 different from the object P is not included in one image, An X-ray imaging step of photographing the object (P) and the specimen (2) through the X-ray imaging step;
(h ') calculating distinction feature values of the discrimination specimen (2) on the X-ray image;
(i ') comparing the reference information of the specimen (2) and the specimen distinguishing feature value calculated in the X-ray image to calculate and store the deviation of the angle and the rotational center position of the rotational motor of the rotating stage (40);
(j ') calculating the correction amounts of the x, y, and z axes of the base stage 30 using the errors of the rotation motors;
(k ') If the calculated correction amount is within the allowable error, the next step is executed. If the calculated correction value is out of the allowable error, the base stage 30 is moved by x, y, Executing steps (g ') to (j') above;
(l ') driving the rotating motor to rotate at the next photographing angle;
(m ') repeating the steps (g') - (l ') until the X-ray image is taken at all desired omnidirectional angles, Wherein the accuracy of restoring the three-dimensional inner / outer structure of the object P is improved by using the center position and the angle of the rotary motor, using the X-ray three-dimensional reconstruction method. delete

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