KR101450050B1 - Micro force generation and measurement device and method for using the same - Google Patents

Abstract

The present invention relates to a device for generating and measuring micro-force to which a zero method is applied. More specifically, the present invention relates to a device for generating and measuring micro-force, which includes a five-link mechanism made up of five links, and generates force in a linear actuator connected to one link in order to offset displacement of a neighboring link by force generated from a voice coil motor unit formed in another link among the five-link mechanism or measures the amount of current applied to the voice coil motor unit to determine the amount of force exerted to the voice coil motor unit in order to offset the displacement of the link by the force generated from the linear actuator.

Description

[0001] Micro force generation and measurement apparatus and method thereof [0002]

More particularly, the present invention relates to a micro force generating and measuring apparatus using a five-link mechanism, and more particularly, to a micro force generating and measuring apparatus having a five-link mechanism comprising five links, To cancel the displacement of the neighboring link due to the force, a force is generated in the linear actuator connected to another link or is applied to the voice coil motor part to cancel the displacement of the link due to the force generated in the linear actuator The present invention relates to a micro force generating and measuring apparatus capable of measuring an amount of current applied to a micro force generator and measuring an applied force.

In a micro-nano field, a deflection method is used in a device for measuring a minute force, in which a deformation of an object is measured and converted into a force.

The displacement method is a method in which a measurement is performed by comparing the deviation with the scale by causing a deviation in the indicator of the measuring instrument by the action of the quantity to be measured. In the case where a force is applied to one side of the link mechanism or an elastic hinge And the displacement is measured through the strain gauge attached thereto, so that the mass of the applied force or the object can be calculated.

The null method is a method in which when a voltage or a current is measured, a known standard amount is prepared and balanced with this to determine the measured amount. When a force is applied and a displacement of the mechanism occurs, To generate the opposite Lorentz force so that the mechanism is always in the zero position.

At this time, the force applied is measured by using the proportional relationship between the applied force and the current applied to the coil.

The deflection method is advantageous in that the precision is somewhat low, but it is inexpensive and easy to manufacture. The operating method is more precise than the displacement method, but has a disadvantage that the response is somewhat slow because of the zero point control.

In this paper, "Mechanism Design of Micro Weighing Apparatus Using Retroreflective Method", published in the Journal of the Korean Society of Mechanical Engineers, 2003, presents the mechanical characteristics and the design method for improving the performance of the micro- (Hereinafter, referred to as prior art 1).

The control method is mainly used for the analytical balance for measuring the mass in the balance. The prior art 1 is limited to the measurement of the mass of the object in the direction of gravity similarly to the measurement apparatus using the conventional method, There are many restrictions to apply to

Particularly, it is suitable for a measuring mechanism by the operating method in order to apply a fine force to a sample having micro or nano shape or to accurately measure an applied force, but it is applied to a micro or nano force generating device or a measuring device The development of the technology is not enough.

(Mechanics Design of Micro Weighing Apparatus Using Name Method, Author: In-Mook Choi et al. 3)

SUMMARY OF THE INVENTION The present invention has been conceived to solve the above-mentioned problems, and it is an object of the present invention to provide a voice coil motor having a five-link mechanism composed of five links, To cancel the displacement of the neighboring link due to the force, a force is generated in the linear actuator connected to another link or is applied to the voice coil motor part to cancel the displacement of the link due to the force generated in the linear actuator And a micro force generating and measuring device using the operating method is provided.

The micro force generating and measuring device of the present invention comprises a first link formed on the same plane in a flat measurement plate and extending in the y axis direction, a first link connected to the first link by an elastic hinge, 2 link, a third link connected to the second link by an elastic hinge and formed to be parallel to the first link at a predetermined distance in the x-axis direction, and a second link formed at both sides of the third link and the first link by elastic hinges A 5 link mechanism comprising a fourth link extending in the x-axis direction and a measurement plate as a fixed link; A voice coil motor unit controlling a current flowing through the coil to apply a force to the first link in a y-axis direction; A displacement measuring unit formed at the second link end on a side opposite to the side connected to the first link and measuring a displacement of the second link; A linear actuator for applying a force in a y-axis direction to a test piece connected to the third link end on a side opposite to a side connected to the second link; A control unit for controlling the voice coil motor unit, the displacement measuring unit, and the linear actuator; And a control unit.

In addition, the micro-force generating and measuring device may be configured such that a force is generated in the linear actuator to cancel a displacement of the second link due to a force generated in the voice coil motor portion, The applied force can be calculated by measuring the amount of current applied to the voice coil motor portion to offset the displacement of the second link.

The voice coil motor unit may include a yoke having a vertical cross section in a z-axis direction as a closed curve, the voice coil motor unit being spaced apart from both side surfaces in the x-axis direction and both side surfaces in the z-axis direction of the first link. A coil formed on the first link and through which a current flows; Permanent magnets which are spaced apart from each other at both sides in the z-axis direction of the coil and have a pair of permanent magnets of N poles and S poles, respectively; May be formed.

The displacement measuring unit may include a laser penetrating hole formed in the second link in the z-axis direction; A light emitting element that emits light so as to pass through the laser through hole at a distance from the one side surface in the z-axis direction of the second link; A light receiving element which is spaced apart from the other side surface in the z-axis direction of the second link and absorbs light passing through the laser through hole; As shown in FIG.

The displacement measuring unit may measure the displacement of the second link through the amount of light received by the first light receiving unit and the second light receiving unit, .

The micro force generating and measuring device may further include a specimen mounting part connected to the third link and the linear actuator by an elastic hinge and having the specimen mounted and fixed on one side thereof.

The elastic hinge may include: a first elastic hinge connecting one side of the first link to the second link in the y-axis direction; A second elastic hinge connecting one side of the third link in the y-axis direction with the second link; A third elastic hinge connecting one side of the fourth link in the y-axis direction with the third link; A fourth elastic hinge connecting one side of the fourth link in the y-axis direction with the first link; A fifth elastic hinge connecting one side of the second link in the y-axis direction and the measurement plate; A sixth elastic hinge connecting one side of the fourth link in the y-axis direction and the measurement plate; A seventh elastic hinge connecting the specimen mounting part and the third link; And an eighth elastic hinge connecting the specimen mounting part and the linear actuator. As shown in FIG.

The linear actuator may include a first block connected to the eighth elastic hinge; A pair of second blocks connected to both sides of the first block in the x-axis direction by a ninth elastic hinge; A pair of third blocks connected to the second block by a tenth elastic hinge and extending in the y-axis direction; A fourth block spaced a certain distance in the y-axis direction from the first block and integrally formed with the measurement plate; A pair of fifth blocks connected to both sides in the x-axis direction of the fourth block by a eleventh resilient hinge, the third block and the twelfth resilient hinge; A piezoelectric element extending in the x-axis direction between the first block and the fourth block and connected to the third block, As shown in FIG.

According to another aspect of the present invention, there is provided a micro force generating method using a micro force generating and measuring apparatus, comprising: a) controlling a current flowing through a coil of a voice coil motor unit to apply a force to the first link; b) displacing the second link by deformation of the first link; c) inputting a control signal to the linear actuator by the control unit to cancel a displacement of the second link measured by the displacement measuring unit; d) a force is generated in said linear actuator by said control signal to offset the displacement of said second link, and said specimen is tensioned by said force; And a control unit.

Also, the micro force measurement method using the micro force generation and measurement apparatus of the present invention comprises the steps of: a) applying a force to the linear actuator to stretch or compress the specimen in the y-axis direction; b) displacing the second link by deformation of the third link; c) inputting a control signal to the voice coil motor unit by the control unit to cancel a displacement of the second link measured by the displacement measurement unit; d) calculating a force applied to the linear actuator by applying a current to the coil of the voice coil motor unit by the control signal to cancel the displacement of the second link and measuring an amount of current applied to the coil; And a control unit.

The micro force generating and measuring device of the present invention is formed by including a five-link mechanism consisting of five links and offsetting the displacement of a neighboring link due to a force generated in a voice coil motor portion formed on one of the five link mechanisms , The amount of current applied to the voice coil motor portion is measured to precisely generate micro-scale micro-force in the linear actuator connected to another link or offset the displacement of the link due to the force generated in the linear actuator So that it is possible to find out the minute force in micro units.

That is, the micro-force generating and measuring apparatus of the present invention can precisely generate microscopic force in units of micro-meters by using the driving method in one system, can measure the generated force, It is advantageous that the measurement system used can overcome the limitation mainly limited to measuring the mass of the object in the direction of gravity and precisely control the force generated on the plane.

Accordingly, the micro force generating method and the micro force measuring method using the micro force generating and measuring apparatus according to the present invention can be applied to a specimen having a micro or nano shape by applying a minute force or a method capable of precisely measuring an applied force Lt; / RTI >

1 is a perspective view of a micro force generating and measuring apparatus according to the present invention;
2 is a conceptual diagram showing a general 4-link mechanism.
3 is a perspective view showing a voice coil motor unit of a micro force generating and measuring apparatus according to the present invention.
4 is a perspective view showing a displacement measuring unit of the micro force generating and measuring apparatus according to the present invention.
5 is a plan view showing a linear actuator of a micro force generating and measuring apparatus according to the present invention.
6 is a plan view conceptually showing an operating state of a control unit when the micro force generating method of the present invention is performed.
7 is a plan view conceptually showing an operating state of a control unit when the micro force measuring method of the present invention is performed.

Hereinafter, the micro force generating and measuring apparatus and method of the present invention will be described in detail with reference to the accompanying drawings.

Example 1

1 to 5, a micro force generating and measuring apparatus according to an embodiment of the present invention will be described.

1, the micro force generating and measuring apparatus 1 of the present invention mainly includes a five-link mechanism 100, a voice coil motor unit 200, a displacement measuring unit 300, a linear actuator (400) and a control unit (500).

The 5-link mechanism 100 includes a first link 110 formed on the same plane in the flat measurement plate 800 and extending in the y-axis direction, a first link 110 extending from the first link 110 and the elastic hinge 700 A second link 120 connected to the second link 120 by an elastic hinge 700 and connected to the first link 110 by a predetermined distance in the x- A fourth link 140 connected to the third link 130 and the first link 110 by the elastic hinge 700 and extending in the x axis direction, And a link-in measurement plate 800.

The general 5-link mechanism 100 is as shown in FIG. 2, and the micro force generating and measuring apparatus 1 of the present invention applies the same to the measurement plate 800.

The lever mechanism 100 of FIG. 2 applies the lever principle, which means that when a displacement is generated by a force in one link, it is enlarged to a larger displacement from the opposite side. When a flexible hinge is used, Displacement is possible.

When the displacement is generated in the y-axis direction on the first link 110, the left end of the second link moves in the y-axis direction and the third link The link 130 also moves in the y-axis direction.

At this time, the first link 110 and the third link 130 are displaced only vertically, and the second link 120 rotates about a portion connected to the measurement plate 800, And the right end moves in the opposite direction.

The voice coil motor unit 200 controls a current flowing through the coil 220 to apply a force to the first link 110 in the y axis direction. .

The displacement measuring unit 300 is formed at the end of the second link 120 opposite to the side connected to the first link 110 and measures the displacement of the second link 120.

The linear actuator 400 applies a force to the specimen 610 connected to the end of the third link 130 on the side opposite to the side connected to the second link 120 in the y axis direction.

The control unit 500 controls the voice coil motor unit 200, the displacement measuring unit 300 and the linear actuator 400, and may be a digital signal processor (DSP), a microprocessor, or the like.

The voice coil motor unit 200, the displacement measuring unit 300, and the linear actuator 400 will be described in more detail below.

The linear actuator 400 may be configured to compensate for the displacement of the second link 120 due to the force generated by the voice coil motor unit 200, Or by measuring the amount of current applied to the voice coil motor unit 200 so as to cancel the displacement of the second link 120 due to the force generated in the linear actuator 400, .

Accordingly, the micro-force generating and measuring apparatus 1 of the present invention can precisely generate microscopic force in units of micro-meters by using the operating method in one system, measure the generated force, We can overcome the limitations of measuring the mass of object mainly in gravity direction and precisely control the force generated on the plane.

3 to 5, the voice coil motor unit 200, the displacement measuring unit 300, and the linear actuator 400 will be described in more detail.

First, the voice coil motor unit 200 includes a yoke 210, a coil 220, and a permanent magnet.

The yoke 210 is made of a metal material and is formed so as to surround the circumference of the first link 110. The yoke 210 has both sides in the x-axis direction of the first link 110, And the vertical section in the z-axis direction may be formed so as to form a closed curve.

The coil 220 is formed on the first link 110 so that a current flows to adjust the magnetic force according to the amount of current.

The permanent magnets are disposed to face each other on the inner surface of the yoke 210. The permanent magnets are spaced a predetermined distance from both sides in the z-axis direction of the coil 220, Respectively.

As shown in FIG. 3, the permanent magnets are spaced a certain distance from both sides of the coil 220 in the z-axis direction. The permanent magnets are formed of a pair of N poles and S poles. So as to have a polarity opposite to that of the permanent magnet.

When the Fleming's left-hand rule is applied, permanent magnets positioned on the upper side of the coil 220 in the z-axis direction are arranged in the order of S pole and N pole from the upper side in the y axis direction, When the lower permanent magnets are arranged in the order of N pole and S pole,

a current flows from the left to the right in the x-axis direction and the magnetic field is formed from the lower side to the upper side in the z-axis direction in the coil 220 located on the upper side in the y-axis direction.

Accordingly, a downward force is applied to the first link 110 to generate a displacement, and the left end of the second link 120 adjacent to the first link 110 moves upward.

4, the displacement measuring unit 300 includes a laser through hole 310 formed in the second link 120 to pass through the z-axis direction, A light emitting device 320 which emits light to pass through the laser through hole 310 at a predetermined distance from the one side surface of the second link 120, And a light receiving element 330 that absorbs light that has passed through the through hole 310.

As described above, when the left end of the second link 120 is moved upward by a force applied to the first link 110, the displacement measuring unit 300 measures the displacement of the first link 110, The amount of light absorbed by the light receiving element 330 is reduced as compared with that before the movement so that light can not pass through the center of the laser through hole 310 and the amount of displacement of the second link 120 is measured do.

In this case, the light receiving element 330 of the displacement measuring unit 300 may be divided into two parts, that is, a first light receiving part 331 and a second light receiving part 332. The first light receiving part 331 and the second light receiving part 332 of the second link 120 can detect not only the amount of displacement of the second link 120 but also the direction in which the displacement is generated.

For example, if the amount of light received by the first light receiving portion 331 is greater than the amount of light received by the second light receiving portion 332, the end portion of the second link 120 moves upward If the amount of light received by the first light receiving portion 331 is smaller than the amount of light received by the second light receiving portion 332, the end of the second link 120 may be seen to move downward .

When the specimen 610 is pulled downward in the linear actuator 400, the left end of the second link 120 moves downward, When a force is generated in the downward direction in the voice coil motor unit 200, the left end of the second link 120 moves upward, so that the displacement is measured according to the result measured by the displacement measuring unit 300 The method of control by the control unit 500 for canceling is also different.

Therefore, it is also important that the displacement measuring unit 300 not only measure the amount of displacement but also sense the direction in which the displacement occurs.

The micro force generating and measuring device 1 of the present invention is connected between the third link 130 and the linear actuator 400 by an elastic hinge 700 and the specimen 610 is mounted and fixed And a test piece mounting unit 600 for mounting the test piece.

The specimen 610 may be fixed to the specimen mounting part 600 through a fixing jig or may be fixed with an adhesive.

The elastic hinge 700 may be formed of the first through twelfth elastic hinges 712.

1, the first elastic hinge 701 connects the upper side of the first link 110 to the second link 120 in the y-axis direction, and the second elastic hinge 702 Axis direction of the third link 130 and the third elastic hinge 703 connects the upper side and the second link 120 in the y-axis direction of the third link 130, And connects the side and the third link 130.

The fourth elastic hinge 704 connects the upper side of the fourth link 140 in the y-axis direction with the lower side of the first link 110, and the fifth elastic hinge 705 connects the upper side of the fourth link 140, Axis direction of the second link 120 and the sixth elastic hinge 706 connects the measurement plate 800 to the lower side of the fourth link 140 in the y- Plate 800 is connected.

The seventh elastic hinge 707 connects the upper surface of the specimen mounting part 600 and the lower surface of the third link 130 and the eighth elastic hinge 708 connects the specimen mounting part 600 The linear actuator 400 is connected.

In this case, the fifth elastic hinge 705 and the sixth elastic hinge 706 function as a portion fixed to the paper in the five-link mechanism 100 shown in FIG. 2, Lt; / RTI >

5, the linear actuator 400 includes a first block 410 connected to the eighth elastic hinge 708 and a second block 410 connected to both sides of the first block 410 in the x- A pair of second blocks 420 connected to a ninth elastic hinge 709; A pair of third blocks 430 connected to the second block 420 by a tenth elastic hinge 710 and extending in the y axis direction; A fourth block 440 spaced a certain distance from the first block 410 in the y-axis direction and integrally formed with the measurement plate 800; The fourth block 440 is connected to both sides of the fourth block 440 in the x-axis direction by the eleventh elastic hinge 711. The fifth block 450 is connected to the third block 430 and the twelfth elastic hinge 712, ; And a piezoelectric element 460 extending in the x-axis direction between the first block 410 and the fourth block 440 and connected to the third block 430 having opposite ends facing each other. have.

That is, the linear actuator 400 is fixed to the third block 430 with both ends of the piezoelectric element 460 facing each other. The linear actuator 400 is spaced upward from the piezoelectric element 460 in the y- A second block 420 connected to the third block 430 and a first block 410 positioned and connected between the second block 420 and the first block 410 connected to the piezoelectric element 460 in the y- A fifth block 450 spaced from the first block 450 by a predetermined distance and connected to the third block 430 and a fourth block 450 located between the fifth block 450 and integrally formed on the measurement plate 800. [ (440).

Accordingly, in the linear actuator 400, a force in the y-axis direction can be applied to the specimen 610 by tension or compression of the piezoelectric element 460.

In this case, the linear actuator 400 may be replaced with any other type of actuator as long as it can perform linear fine driving in addition to the piezoelectric actuator using the piezoelectric element 460.

The micro force generating and measuring device 1 of the present invention is a device for generating and measuring a micro force by the linear actuator 400 in order to offset the displacement of the second link 120 due to a force generated in the voice coil motor part 200. [ The amount of current applied to the voice coil motor unit 200 to cancel the displacement of the second link 120 due to the force generated by the linear actuator 400, It is possible to determine a minute force in units of microns applied to the specimen 610. [

Example 2

In Embodiment 2, a micro force generating method according to an embodiment of the present invention will be described with reference to FIG.

The micro force generating method of the present invention includes the steps of a) controlling a current flowing through a coil 220 of the voice coil motor unit 200 to apply a force to the first link 110, b) 1) displacement of the second link (120) is caused by a deformation of the first link (110), and c) a displacement of the second link (120) measured by the displacement measuring unit A control signal is input to the linear actuator 400 by the control unit 500 and d) a force is generated in the linear actuator 400 by the control signal to change the displacement of the second link 120 And the specimen 610 is tensioned by that force.

6, when a predetermined amount of current is applied to the coil 220 of the voice coil motor unit 200, a Lorentz force is applied to the first link 110 in a downward direction, And the left end of the second link 120 is moved upward to generate a displacement.

Accordingly, the amount of light received by the second light receiving unit 332 of the light receiving element 330 is reduced before the displacement measuring unit 300 moves. When the displacement is large, the first light receiving unit 331, The amount of light received by the light source can be reduced.

The control unit 500 calculates a displacement through the amount of light measured by the displacement measuring unit 300 and then a force enough to cancel the displacement of the second link 120 is transmitted to the linear actuator 400 A control signal is input to the linear actuator 400 so as to be applied to the specimen 610 by the control unit 610.

Next, a force is generated in the linear actuator 400 by the control signal, and the displacement of the second link 120 is canceled by moving the third link 130 along the specimen 610.

As described above, since a finely adjusted force is applied to the specimen 610, it can be seen that a micro force is generated by the operating method using the micro force measuring and generating device.

Example 3

In Embodiment 3, a micro force measurement method according to an embodiment of the present invention will be described with reference to FIG.

The micro force measuring method of the present invention comprises the steps of: a) applying a force to the linear actuator 400 to stretch or compress the specimen 610 in the y-axis direction; b) displacing the second link (120) by deformation of the third link (130); c) inputting a control signal to the voice coil motor unit 200 by the control unit 500 to cancel a displacement of the second link 120 measured by the displacement measuring unit 300; d) a current is applied to the coil 220 of the voice coil motor unit 200 by the control signal to cancel the displacement of the second link 120, and the amount of current applied to the coil 220 is measured Calculating a force applied to the linear actuator (400); .

7, when a force is applied to the linear actuator 400 and the specimen 610 is pulled in the y-axis direction, the second link 120 connected to the third link 130 is rotated, And the left end of the left side is moved downward to generate a displacement.

Accordingly, the amount of light received by the first light receiving unit 331 of the light receiving element 330 is reduced before the displacement measuring unit 300 moves. When the displacement is large, the second light receiving unit 332, The amount of light received by the light source can be reduced.

The control unit 500 calculates a displacement based on the amount of light measured by the displacement measuring unit 300 and then outputs a force enough to cancel the displacement of the second link 120, A control signal is input to the voice coil motor unit 200 so as to be generated in the voice coil motor unit 200.

As a result, a current is applied to the coil 220 of the voice coil motor unit 200 to apply a Lorentz force to the first link 110 in the downward direction, thereby canceling the displacement of the second link 120.

At this time, since the generated amount of current is proportional to the Lorentz force, the force applied to the specimen 610 by the linear actuator 400 can be calculated.

Accordingly, in the micro force generating method and the micro force measuring method using the micro force generating and measuring apparatus 1 of the present invention, a minute force is applied to the micro or nano-shaped specimen 610, A measuring mechanism by a measurable operating method can be provided.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

1: Micro force generation and measurement device
100: 5 link mechanism
110: first link 120: second link
130: third link 140: fourth link
200: Voice coil motor section
210: yoke 220: coil
230: permanent magnet
300: displacement measuring unit
310: laser penetration hole 320: light emitting element
330: Light receiving element
331: first light receiving section 332: second light receiving section
400: linear actuator
410: first block 420: second block
430: third block 440: fourth block
450: fifth block 460: piezoelectric element
500:
600: specimen mounting part 610: specimen
700: Elastic hinge
701 to 712: First to 12th elastic hinges
800: Measuring plate

Claims (6)

A first link formed on the same plane in the flat measurement plate and extending in the y-axis direction, a second link connected to the first link by an elastic hinge and extending in the x-axis direction, A third link which is connected to the first link by a predetermined distance in the x-axis direction and which is formed in parallel with the first link, and a fourth link which is connected to the third link and the first link by elastic hinges, A 5 link mechanism consisting of a link and a measurement plate as a fixed link;
A voice coil motor unit controlling a current flowing through the coil to apply a force to the first link in a y-axis direction;
A displacement measuring unit formed at the second link end on a side opposite to the side connected to the first link and measuring a displacement of the second link;
A linear actuator for applying a force in a y-axis direction to a test piece connected to the third link end on a side opposite to a side connected to the second link;
A control unit for controlling the voice coil motor unit, the displacement measuring unit, and the linear actuator; And the micro force generating and measuring device.
The method according to claim 1,
The micro force generating and measuring device
A force is generated in the linear actuator to cancel a displacement of the second link due to a force generated in the voice coil motor portion,
Wherein the applied force is calculated by measuring an amount of current applied to the voice coil motor unit to cancel a displacement of the second link due to a force generated in the linear actuator.
3. The method of claim 2,
The micro force generating and measuring device
An elastic hinge connected between the third link and the linear actuator,
And a specimen mounting part for mounting and fixing the specimen on one side thereof.
The method of claim 3,
The elastic hinge
A first elastic hinge connecting one side of the first link in the y-axis direction and the second link; A second elastic hinge connecting one side of the third link in the y-axis direction with the second link; A third elastic hinge connecting one side of the fourth link in the y-axis direction with the third link; A fourth elastic hinge connecting one side of the fourth link in the y-axis direction with the first link; A fifth elastic hinge connecting one side of the second link in the y-axis direction and the measurement plate; A sixth elastic hinge connecting one side of the fourth link in the y-axis direction and the measurement plate; A seventh elastic hinge connecting the specimen mounting part and the third link; And an eighth elastic hinge connecting the specimen mounting part and the linear actuator. Wherein the micro force generating and measuring device comprises a micro force generating and measuring device.
A micro force generating method using a micro force generating and measuring apparatus according to any one of claims 1 to 4,
a) controlling a current flowing through a coil of the voice coil motor unit to apply a force to the first link;
b) displacing the second link by deformation of the first link;
c) inputting a control signal to the linear actuator by the control unit to cancel a displacement of the second link measured by the displacement measuring unit;
d) a force is generated in said linear actuator by said control signal to offset the displacement of said second link, and said specimen is tensioned by said force; Wherein the micro force generating step comprises:
A micro force measurement method using a micro force generation and measurement apparatus according to any one of claims 1 to 4,
a) applying a force to the linear actuator to tension or compress the specimen in the y-axis direction;
b) displacing the second link by deformation of the third link;
c) inputting a control signal to the voice coil motor unit by the control unit to cancel a displacement of the second link measured by the displacement measurement unit;
d) calculating a force applied to the linear actuator by applying a current to the coil of the voice coil motor unit by the control signal to cancel the displacement of the second link and measuring an amount of current applied to the coil; Wherein the micro force measurement method comprises the steps of:

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