KR101416881B1 - Power BJT with base ballast resistor - Google Patents

Power BJT with base ballast resistor Download PDF

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Publication number
KR101416881B1
KR101416881B1 KR1020130137927A KR20130137927A KR101416881B1 KR 101416881 B1 KR101416881 B1 KR 101416881B1 KR 1020130137927 A KR1020130137927 A KR 1020130137927A KR 20130137927 A KR20130137927 A KR 20130137927A KR 101416881 B1 KR101416881 B1 KR 101416881B1
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South Korea
Prior art keywords
base
region
bipolar transistor
collector
surface resistance
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KR1020130137927A
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Korean (ko)
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이용학
김태한
이은구
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에이피반도체 주식회사
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0804Emitter regions of bipolar transistors
    • H01L29/0817Emitter regions of bipolar transistors of heterojunction bipolar transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73Bipolar junction transistors
    • H01L29/7302Bipolar junction transistors structurally associated with other devices
    • H01L29/7304Bipolar junction transistors structurally associated with other devices the device being a resistive element, e.g. ballasting resistor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73Bipolar junction transistors
    • H01L29/732Vertical transistors
    • H01L29/7322Vertical transistors having emitter-base and base-collector junctions leaving at the same surface of the body, e.g. planar transistor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73Bipolar junction transistors
    • H01L29/737Hetero-junction transistors
    • H01L29/7371Vertical transistors

Abstract

The present invention relates to a power bipolar junction transistor having a base ballast resistor in a base region, capable of varying a resistance value of the base ballast resistor in accordance to a distance from an output terminal to make a uniform potential difference between the base and an emitter. According to the present invention, the power bipolar junction transistor is formed by a plurality of unit bipolar transistor cells connected in parallel with each other, and each unit bipolar transistor cells has the base ballast resistor. The base ballast resistor is produced in the same layer as the base region using the same material and the same production process as the base region, and protrudes in a ′��prime; shape in a region between a collector region and the base region for a power bipolar junction transistor structure; and the resistance value of the base ballast resistor becomes high as the base ballast resistor is closer to an output side. Therefore, the present invention improves the current driving capability of the power transistor, and prevents thermal runaway which occurs when the emitter current concentrates on one location, enabling the emitter current to flow evenly by controlling the potential difference between the base and the emitter to be applied uniformly.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a power bipolar transistor having a base stabilization resistor,

The present invention relates to a power bipolar transistor having a base stabilization resistor, which improves the current driving capability and uniformly applies the potential between the base and the emitter, thereby preventing the occurrence of thermal runaway by directing the emitter current to one place. To a power bipolar transistor having a base stabilizing resistor.

Bipolar Junction Transistor (BJT) is superior to MOS transistor (MOS TR) in current performance, speed, and gain, And is widely used in RF IC design.

A bipolar transistor composed of an emitter, a base, and a collector can be divided into a vertical bipolar transistor and a horizontal bipolar transistor according to the direction of charge transfer from the emitter.

In a vertical bipolar transistor, charges emitted from the emitter move in a direction perpendicular to the surface of the semiconductor substrate and flow to the collector. The vertical bipolar transistor is composed of an emitter of the first conductivity type, a base of the second conductivity type surrounding the emitter, and a collector of the first conductivity type surrounding the base.

Here, the first conductivity type and the second conductivity type may be p-type and n-type, respectively, or vice versa, and are thus determined as a pnp transistor and an npn transistor, respectively.

Generally, the power bipolar transistor has a ballast resistance in series with the emitters to avoid thermal runaway due to local current increase of one of the emitter-base regions.

When the emitter resistance is used to secure the stability of the power bipolar transistor (SOA, Safe Operating Area), the emitter resistance is placed between the input terminal and the output terminal of the bipolar transistor, Since the voltage is partially consumed, the unit power bipolar transistor narrows the operating range of the Forward Active Region to reduce the current driving capability of the chip used for the power stage such as the LDO (Low Dropout) Regulator and DC-DC Converter .

This is because, if the potential difference between the collector and the emitter of the LDO regulator is large, all unit power bipolar transistors operate in a forward active region having a large base and collector current gain, If the applied potential difference between the collector and the emitter gradually decreases, part or all of the unit power bipolar transistor operates in a saturation region in which the current gain is small, and the current driving capability of the LDO is greatly reduced.

Therefore, in order to increase the potential between the collector and the emitter of the unit power bipolar transistor, the emitter resistance must be designed to have a small value as small as possible. Therefore, if the stable resistor used to secure the maximum operating stability (SOA) is changed from the emitter to the base, the voltage consumed due to the resistance between the input terminal and the output terminal of the LDO regulator can be minimized, And the chip's cross-sectional area can be reduced, thereby ensuring price competitiveness of the chip.

The present invention provides a base stabilization resistor in the base region, thereby avoiding a decrease in the voltage applied between the collector and the emitter due to the emitter stabilization resistance, thereby improving the current driving capability and reducing the cross sectional area of the chip.

In order to realize the base stabilization resistance, the emitter current is made uniform by adjusting the base stabilization resistance so that the potential difference between the base and the emitter is uniformly applied by varying the value of the base stabilization resistance according to the distance from the output terminal, And a base stabilization resistor for preventing a thermal runaway phenomenon from occurring due to the bias of the power transistor.

In addition, since the manufacturing process of the base stabilization resistor is the same as that of the base region, an additional manufacturing process for manufacturing the base stabilization resistor is not required.

According to an aspect of the present invention, there is provided a structure of a power bipolar transistor including a plurality of unit bipolar transistor cells connected in parallel, each of the unit bipolar transistor cells including a base stabilization resistor, And the resistor has a larger resistance value toward the output side.

The base stabilization resistor is formed of a sheet resistance, and the base surface resistance is formed in a space between the collector region and the base region by being joined to the base and being projected in a stepped shape.

The base surface resistance is characterized in that the pattern length and width are the same in the unit bipolar transistor and the position of the metal contact in the base surface resistance region is moved away from the uppermost base metal contact in the base region to increase the resistance value .

The base surface resistance is set such that the width of the surface resistance is the same in the unit bipolar transistor and the length of the surface resistance is made longer as the distance from the output side becomes longer.

The base surface resistances are configured such that the length of the surface resistances of the unit bipolar transistors is the same while the width of the surface resistors is narrower as the distance from the output side is closer to increase the resistance value.

The base stabilizing resistor is fabricated in the same layer through the same manufacturing process as the same material as the base region.

The base stabilizing resistor is characterized in that boron or BF2 is produced by a diffusion process after ion implantation.

The unit bipolar transistor is characterized in that a collector epilayer is stacked on the collector buried layer and a collector sink is connected to the collector buried layer.

The present invention can reduce the cross-sectional area of the entire power bipolar transistor by improving the current driving ability by increasing the collector current by avoiding reduction of the applied voltage between the collector and the emitter according to the emitter stabilizing resistance by providing the base stabilizing resistor in the base region There is an effect.

In addition, by varying the base resistance value according to the distance from the output terminal, the potential between the base and the emitter is uniformly applied to the emitter current, thereby preventing thermal runaway phenomenon and increasing the stable operation region It is effective.

Also, the manufacturing process of the base resistor is performed through the same manufacturing process as the base region, so that the manufacturing cost is not increased and the manufacturing time is not increased.

1 is a vertical cross-sectional view and equivalent circuit showing the structure of a unit bipolar transistor of a power bipolar transistor having a base stabilization resistor according to an embodiment of the present invention.
2 is a plan view showing the layout of four unit bipolar transistors.
FIG. 3 is a perspective view showing the layers of four unit bipolar transistors. FIG.
FIG. 4 is a perspective view of a layout of a metal of an input pad, an output pad, a collector metal, an emitter metal, a base metal, and a base surface resistance region of a power bipolar transistor having a base stabilization resistor according to an embodiment of the present invention.
FIG. 5 is a perspective view of a layout of the collector metal, the emitter metal, the base metal, and the base surface resistance region of FIG. 4, in which the metal is removed.
Fig. 6 is a plan view of Fig. 5. Fig.
7 is a plan view showing the structure of the base surface resistance according to the first embodiment.
8 is a perspective view showing the structure of the base surface resistance according to the first embodiment.
9 is a perspective view showing the structure of the base surface resistance according to the second embodiment.
10 is a perspective view showing the structure of the base surface resistance according to the third embodiment.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and the manner of achieving them, will be apparent from and elucidated with reference to the embodiments described hereinafter in conjunction with the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. In order to facilitate a thorough understanding of the present invention, the same reference numerals are used for the same means regardless of the number of the drawings.

1 is a vertical sectional view and equivalent circuit showing the structure of a unit bipolar transistor 100 of a power bipolar transistor having a base stabilization resistor according to an embodiment of the present invention. And FIG. 3 is a perspective view showing each of four layers of four unit bipolar transistors.

1, a unit bipolar transistor 100 according to an embodiment of the present invention includes an emitter region 10, a base region 20, a base surface resistance region 21, and a collector region 30 .

The unit bipolar transistor includes an n + type collector buried layer 37, a collector sink layer 36, and an n-type collector epitaxial layer 38 formed by implanting n-type impurity ions. Type base region 20 and a base surface resistance region 21 are formed on a collector epi layer and an n < + > -type emitter region 10 Is formed. That is, the charges emitted from the emitter move in a direction perpendicular to the surface of the semiconductor substrate and flow to the collector. Although the base resistance (base sheet resistance) region 21 is separated from the base 20 region in the prior art, the present invention is not separated and the base region and the base stable resistance region are formed of the same material in the same layer and in the same manufacturing process .

The collector region 30 is composed of a collector epitaxial layer 38 and a collector sink layer 36 on the collector buried layer 37 as shown in FIGS. 1 and 3, And is connected to the collector buried layer 37. The n + type collector buried layer 37 is a region formed by implanting n + type impurity at a high concentration, so that the current injected from the collector sink layer 36 flows through the collector buried layer 37 Area. The collector epitaxial layer 38 is formed by depositing Silicon atoms mixed with n-type impurities, which are much lower than the collector buried layer, on the surface of the wafer at a high temperature. The collector epitaxial layer 38 has a size similar to that of the impurity implanted into the wafer But the polarity is opposite to the p-type wafer. The collector sink layer 36 provides a path of current flow with a small resistance from the silicon surface to the collector buried layer 37. The resistivity of the collector is reduced by forming the buried layer 37, and the breakdown voltage is increased by forming the collector epitaxial layer 38 of low concentration. Here, n-type impurities such as arsenic (As), phosphorus (P) and antimony (Sb) are applied to the collector region.

The impurity concentration of the base 20 region is lower than that of the emitter region but higher than that of the collector epitaxial layer 38. A p-type impurity is ion-implanted on the collector epilayer region to form a diffusion process. And has a function of controlling the magnitude of the current injected into the emitter region via the base region in the collector region. The collector current is proportional to the exponential function of the applied potential difference between the emitter and base. Here, p-type impurities such as boron (B), boron fluoride (BF2), gallium (Ga), and indium (In) in the base region are applied.

2 and 3, the base region of the present invention is divided into a base region 20 and a base sheet resistance region 21 in the form of a L-shaped protrusion, Is composed of three elements of the resistance of the metal contact (23) in the base surface resistance region (21) and the base surface resistance region and the resistance of the metal (25) in the base surface resistance region, and a resistance Component is the sum of the resistance of the metal contact 23 of the base surface resistance region and the base surface resistance region 21 component.

The base surface resistance region 21 is fabricated using a narrow space between the region of the base 20 and the region of the collector 30 and is manufactured through the same manufacturing process as that of the base region, No additional manufacturing steps are required. The base surface resistance region 21 occupies a minimum space between the base region and the collector region in order to reduce the chip area by utilizing a narrow space between the base 20 region and the collector 30 region. It has the shape of a non-straight-pointed protrusion when viewed from the base area in order to design it to have the desired resistance while occupying a minimum space.

The base surface resistance can be made by changing the width and length of the surface resistors as the resistance value increases as the resistance width decreases and as the resistance value increases as the resistance length increases. The base resistance of the unit bipolar transistor of the present invention is not designed to have the same value but the resistance value of the unit bipolar transistor is different and the value of the stability resistance of the unit bipolar transistor is shifted from the output pad 4 And the resistance value is decreased.

The emitter (10) region is a region where a high concentration n + type impurity is implanted and has a larger impurity concentration than the base region. Ion implantation of n-type impurities having a very high concentration in the base region. The current flowing through the base region flows out to the external electrode through the emitter region. The amplifying action of the current is proportional to the ratio of the impurity concentration sum of the base and emitter regions. If the sum of the emitter impurity concentration is larger than the sum of the impurity concentration of the base region by 100 times or more, the ratio of the current flowing into the emitter through the base region in the collector region becomes 100 times Or more. Here, n-type impurities such as arsenic (As), phosphorus (P), and antimony (Sb) are applied to the emitter region.

The emitter 10 region, the base region 20 and the base surface resistance region 21 and the collector 30 region (collector sink layer 36) are electrically connected as shown in FIGS. 2 and 3, respectively The emitter metal contact 12, the base metal contact 22, the base surface resistance region metal contact 23, and the collector metal contact 32 are formed. In order for the current to flow in and out of each region, it is necessary to be connected to the metal region. However, since the silicon surface is a region where current can flow, an insulating material (not shown) is formed by covering the insulating material. Here, the insulating film may be any one selected from an oxide film, a nitride film, an oxide film / nitride film, and the like. If the surface of the emitter, base, and collector of the bipolar transistor is partially removed from the insulating film region to fill the metal region having a very small resistance, the emitter, base, and collector surface regions of the bipolar transistor and the metal Can be connected.

A chemical method is performed in which a hole is drilled in an insulator covering an emitter, a base, and a collector region, a photoresist is applied to make such a hole, and then an exposure is performed to etch the hole, and a conductive material A method of forming metal contacts 12, 22, 23, 32 in the holes by drilling a hole (concave groove shape) in the insulator by using the plasma to form the metal contacts 12, 22, 23, Etc. may be employed. The materials of the metal contacts 12, 22, 23 and 32 are made of the same material (electrically conductive material) as the metals 14, 24, 25 and 34.

The metal region is for connection with an external electrode or another bipolar transistor electrode when the bipolar transistor region is made, and the metal is made of metal such as ordinary aluminum, copper, gold, or silver. The circuit is constructed assuming that the resistance is 0 when designing the circuit. However, in areas where a large current flows, such as a power bipolar transistor, a circuit must be designed including a fine resistor because a minute resistance is affected. In the present invention, the collector metal 34 has a circuit structure electrically connected to the input pad 3, and the emitter metal 14 has a circuit structure electrically connected to the output pad 4. The base metal 24 is connected to the base metal contact 22 of each unit bipolar base 20 to reduce the resistance component in the base region and is separated from the metal 25 in the base surface resistance region. The metal 25 in the base surface resistance region allows the distance between the contact 23 in the base surface resistance region and the uppermost base metal contact 22 in the base region to act as a base stability resistance as a base surface resistance region.

Figs. 4 to 6 relate to the appearance of a power bipolar transistor having a base stabilization resistor according to an embodiment of the present invention.

FIG. 4 is a cross-sectional view of an input pad 3, an output pad 4, a collector metal 34, an emitter metal 14 and a base metal 24 of a power bipolar transistor having a base stabilization resistor according to an embodiment of the present invention. And the layout of the metal 25 in the base surface resistance region.

A power bipolar transistor having a base stabilization resistor according to the present invention is mainly constituted by an integrated circuit chip structure in which a plurality of unit bipolar transistors are connected in parallel between an input pad 3 and an output pad 4 It is a form.

The input pad 3 is electrically connected to the collector metal 34 via a conductive contact such that the collector metal 34 is in contact with the collector metal contacts 32 of all the unit bipolar transistors, It is connected in parallel with the bipolar transistor.

Similarly, the out pad 4 is electrically connected to the emitter metal 24 through a conductive contact, which contacts the emitter metal contacts 12 of all the unit bipolar transistors And is connected in parallel with a plurality of unit bipolar transistors.

The base metal 24 is connected to the base metal contact 22 of each unit bipolar base 20 to reduce the resistance component in the base region and is separated from the metal 25 in the base surface resistance region.

The metal 25 in the base surface resistance region allows the distance between the contact 23 in the base surface resistance region and the uppermost base metal contact 22 in the base region to act as a base stability resistance as a base surface resistance region.

5 is a perspective view of a layout in which the collector metal 34, the emitter metal 14, the base metal 24, and the metal 25 in the base surface resistance region are removed in FIG. 4, and FIG. 6 is a cross- FIG.

The emitter 10 region, the base region 20 and the base surface resistance region 21 and the collector 30 region (collector sink layer 36) of the unit bipolar transistor are electrically connected to each other as shown in FIG. 5 The emitter metal contact 12, the base metal contact 22, the base surface resistance region metal contact 23, and the collector metal contact 32 are formed. 5, the emitter metal contacts 12, the collector metal contacts 32, and the base metal contacts 22 have the same pattern in all the unit bipolar transistors, but the base surface resistance region metal contacts 23, The positions of the unit bipolar transistors are slightly different from each other. In the embodiment, the base surface resistance region metal contacts 23 are formed so that the distance between the contact 23 and the base region of the base surface resistance region becomes smaller as the base stability resistance value becomes closer to the output pad 4 as the output side, And the distance between the uppermost base metal contacts 22 becomes longer as it is closer to the output side.

On the other hand, since a unit bipolar transistor has a weak point that a chip easily breaks when a thermal runaway occurs due to a current hogging phenomenon, the base stable Careful design of the resistor circuit can extend the lifetime of the chip.

Metal is used to connect the emitter of the unit bipolar transistor to the output terminal (Output PAD) (4). However, due to the fact that the metal also contains minute resistances, some voltage is consumed due to the metal resistance under the condition of the large current exceeding the number [A], and therefore, the unit is located far away from the output terminal as compared with the unit bipolar transistor located near the output terminal. The increase in metal resistance of the bipolar transistor results in a small value between the base and the emitter, and a current tends to flow to the unit bipolar transistor located near the output terminal.

In order to avoid such a phenomenon, it is necessary to design the voltage applied between the base 20 and the emitter 10 to have the same value for each unit bipolar transistor. If the difference between the metal resistance component (the resistance component of the metal contact and the resistance component of the metal) according to the distance of the output terminal is compensated by the base stabilization resistor, the potential difference between the base and emitter of the unit bipolar transistor can be controlled to be even So that the emitter current can flow uniformly.

In other words, the base metal resistance component and the emitter metal resistance component have a fixed value when the structure is determined, so that the controllable base surface resistance is to be adjusted. Unit Bipolar transistor Connect a large value base surface resistor to the unit bipolar transistor near the output terminal which shows a relatively small resistance value when summing up the fine resistance of the metal from the emitter to the output terminal, And a small-value base surface resistor is connected to the unit bipolar transistor having a large resistance value. As a result, the potential difference between the base and the emitter of the unit bipolar transistor is controlled uniformly. As a result, even when a large current flows into the resistor, the voltage drop is evenly increased, The emitter current of the bipolar transistor can be made to flow uniformly.

The resistance of the base surface resistance is increased by decreasing the resistance width, and by increasing the resistance length, the resistance value is increased. Therefore, the width and length of the surface resistance may be changed to vary the resistance value in order to fabricate the base surface resistance.

The embodiment of the present invention for changing the base surface resistance is as follows.

First, the length and width of the base surface resistance region are made the same, and the distance between the metal contact 23 of the base surface resistance region of the unit bipolar transistor and the uppermost base metal contact 22 of the base region is set to the input pad 3 to the output pad 4 so that the base stabilizing resistance of the unit bipolar transistor close to the output pad 4 has a larger resistance value. In this case, since the length and the width of the base surface resistance region are made the same, the shape in which the base 20 region and the base surface resistance region 21 are combined in the unit bipolar transistor has the same pattern for every unit bipolar transistor. And the position of the metal contact 23 in the surface resistance region can be adjusted.

As shown in Figs. 7 and 8, the base surface resistance region contact 23 of the unit bipolar transistor (right unit bipolar transistor of Figs. 7 and 8) near the output pad 4 and the uppermost base metal contact 22 so that the length of the base sheet resistance becomes longer so that the value of the base stability resistance becomes larger than that of the unit bipolar transistor remote from the output pad 4. [

Secondly, the width of the base surface resistance is the same and the length of the surface resistance is made larger as the direction from the input pad 3 to the output pad 4 is made to have a larger resistance value. In this case, the length of the base surface resistance region must be made different, and the length of the base surface resistance region for each unit bipolar transistor in a form in which the base 20 region and the base surface resistance region 21 are combined when the unit bipolar transistor is manufactured And the metal contact 23 in the surface resistance region is located near the outermost side of the surface resistance region on the side of the input pad 3. [

The length of the base surface resistance region 21 of the unit bipolar transistor (the right unit bipolar transistor in Fig. 9) closer to the output pad 4 as shown in Fig. 9 is shorter than the unit bipolar transistor close to the input pad 3 And the metal contact 23 of the surface resistance region is located near the outermost side of the surface resistance region of each unit bipolar transistor on the side of the input pad 3.

Third, the length of the base surface resistance is the same and the resistance width is made narrower from the input pad 3 toward the output pad 4, and the metal contact 23 of the surface resistance region of the unit power bipolar transistor and the base region The distance between the uppermost base metal contacts 22 of the unit bipolar transistor is made to be the same so that the base stabilizing resistance of the unit bipolar transistor close to the output pad 4 has a larger resistance value.

10, the width of the base surface resistance region 21 of the unit bipolar transistor (right unit bipolar transistor in Fig. 10) closer to the output pad 4 is closer to the unit bipolar transistor (Fig. 10 And the metal contact 23 of the surface resistance region is located near the outermost side of the surface resistance region of each unit bipolar transistor on the side of the input pad 3.

It is to be understood that the terms "comprises", "comprising", or "having" as used in the foregoing description mean that a component can be implied unless specifically stated to the contrary, But should be construed as further including other elements. All terms, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used terms, such as predefined terms, should be interpreted to be consistent with the contextual meanings of the related art, and are not to be construed as ideal or overly formal, unless expressly defined to the contrary.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It will be understood that the present invention can be changed.

3. Input Pad 4. Output Pad
10. Emitter 12. Emitter metal contact
14. Emitter Metal
20. Base 21. Base surface resistance area
22. Base metal contacts 23. Metal contacts in the base surface resistance area
24. Base metal 25. Base metal area of resistance area
30. Collector 32. Collector metal contacts
34. Collector metal 36. Collector sink layer
37. Collector buried layer 38. Collector epi layer

Claims (8)

A structure of a power bipolar transistor comprising a plurality of unit bipolar transistor cells connected in parallel, each base bipolar transistor cell including a base stabilization resistor,
Wherein the base stabilization resistor comprises a base surface resistance, the base surface resistance is formed in a space between the collector region and the base region,
The base stabilization resistor is fabricated in the same layer through the same manufacturing process as the base material,
Wherein the base stabilization resistor has a larger resistance value as it approaches the output side.

delete The method according to claim 1,
Wherein the base surface resistance is such that the pattern length and the width are the same in the unit bipolar transistor and the position of the metal contact in the base surface resistance region is distanced from the uppermost base metal contact in the base surface region toward the output side to increase the resistance value Power bipolar transistor.
The method according to claim 1,
Wherein a resistance value of the base surface resistor is increased by increasing the length of the surface resistance of the unit bipolar transistor while the width of the surface resistance is the same and closer to the output side.
The method according to claim 1,
Wherein the base surface resistance is set such that the length of the surface resistance in the unit bipolar transistor is the same while the width of the surface resistance is closer to the output side, thereby increasing the resistance value.
delete The method according to claim 1,
Wherein the base stabilization resistor is fabricated by a diffusion process after boron or BF2 ion implantation.
The method according to claim 1,
Wherein the unit bipolar transistor has a collector epilayer stacked on top of the collector buried layer and a collector sink connected to the collector buried layer.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0182061B1 (en) * 1995-04-07 1999-03-20 기다오까 다까시 Bipolar transistor, amplifier using this bipolar transistor and integrated circuit
KR100192543B1 (en) * 1991-01-07 1999-07-01 구본준 Manufacturing method of bipolar transistor
KR20010106037A (en) * 2000-05-20 2001-11-29 구자홍 Device for adjusting height of a display appliance
KR100749979B1 (en) * 1999-11-29 2007-08-16 페어차일드 세미컨덕터 코포레이션 Emitter ballast resistor with enhanced body effect to improve the short circuit withstand capability of power devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100192543B1 (en) * 1991-01-07 1999-07-01 구본준 Manufacturing method of bipolar transistor
KR0182061B1 (en) * 1995-04-07 1999-03-20 기다오까 다까시 Bipolar transistor, amplifier using this bipolar transistor and integrated circuit
KR100749979B1 (en) * 1999-11-29 2007-08-16 페어차일드 세미컨덕터 코포레이션 Emitter ballast resistor with enhanced body effect to improve the short circuit withstand capability of power devices
KR20010106037A (en) * 2000-05-20 2001-11-29 구자홍 Device for adjusting height of a display appliance

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