KR101408664B1 - Method for continuous supply apparatus of ingot raw material and its continuous supply apparatus - Google Patents

Abstract

The present invention relates to a method for the continuous supply of an ingot raw material and an apparatus for the continuous supply of the ingot raw material with which the raw material for ingot growth is continuously supplied at a constant amount. The present invention includes: a hopper (26) into which the raw material (23) for ingot growth is inputted; a waterwheel (30) which receives the raw material (23) dropping from the hopper (26) and discharges the raw material (23) at a constant amount; a rotating means for rotating the waterwheel (30); a controller (C) which controls the rotating means; and a supply pipe (21) which guides the raw material discharged at a constant amount from the waterwheel (30), to a space (19) between inner and outer crucibles. The ingot raw material continues to be replenished by the decreased volume for ingot growth, ingot productivity is significantly improved since the raw material for ingot growth continues to be supplied at a constant amount, and ingot quality is uniform. In addition, one or more gates are configured at the supply pipe (21), and thus high heat which flows upwards into the apparatus is blocked and an internal vacuum state is maintained during the continuous supply of the ingot raw material.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a continuous feed method for an ingot raw material,

TECHNICAL FIELD The present invention relates to a continuous feed method of an ingot raw material for continuously and continuously feeding an ingot growth raw material and a continuous feed device therefor.

Generally, an ingot growing apparatus by a Czochralski crystal growth method is a system in which a solid material such as polysilicon (or gallium arsenide) and impurities is added to a crucible provided in a hot zone region And heated and melted by an electric heater to form a silicon melt. Then, the single crystal seed is brought into contact with the silicon melt and slowly rotated and pulled up to obtain a single crystal ingot having a predetermined length and a predetermined diameter .

Chunk Poly and Granule Poly are used for the ingot growth material Poly Silicon and a predetermined amount of boron or phosphorus is used as the dopant. The boron is used for P-type ingot growth, and phosphorus is used for N-type ingot growth.

Since the raw materials are in a solid state, in order to melt them to form a silicon melt (hot melt), impurities are added to the crucible and the polysilicon masses are stacked in the form of a dome to be stacked and the polysilicon mass, Is filled in the crucible and melted, the volume of the gap formed between the silicon ingot and the lump is reduced.

Further, when the level of the silicon melt is gradually consumed as the ingot grows, and the level (liquid level) is lowered, the level displacement is detected using the distance measuring means while the crucible is elevated by the elevating means so that the silicon melt surface is kept constant However, since it is difficult to precisely control and it is not easy to supply the raw material in a fixed amount, the diameter of the ingot is not uniform, and the concentration of the impurity changes in the direction in which the ingot is pulled up, And the like.

Therefore, in order to grow the ingot uniformly while keeping the quality of the ingot uniform, it is necessary to quantitatively continue the ingot raw material (polysilicon and impurities) by the volume (or the required volume) reduced by the ingot growth A continuous supply method and apparatus for replenishment are required.

Korean Patent Laid-Open Publication No. 10-2012-0122563 (entitled "Raw material dispenser," issued on Nov. 07, 2012) Korean Patent Registration No. 10-0811989 (entitled "Intermittent injection technology for increasing the melting rate of polycrystalline silicon," published on Mar. 10, 2008)

An object of the present invention is to provide a continuous feed method of an ingot raw material continuously feeding an ingot raw material as much as a volume reduced in order to grow an ingot and a continuous feed apparatus therefor.

It is another object of the present invention to provide a continuous feed method for an ingot raw material which is improved in productivity and uniform in quality by continuously feeding raw materials required for ingot growth and supplying the feed continuously, and a continuous supply device thereof.

It is still another object of the present invention to provide a gate (opening and closing means) for shutting off a high heat which flows upward into a continuous supply device when supplying a raw material necessary for growing an ingot and maintaining a vacuum state.

A continuous ingot raw material feeder according to the present invention comprises a hopper into which raw materials for growing an ingot are fed, a turbine to receive a raw material falling from the hopper, a turbine to rotate the turbine, a controller to control the turbine, To a space between the inner and outer crucibles.

Wherein the aberration includes at least one of front and rear discs, a connecting member connecting the front and rear discs, a plurality of insulating members located radially outside the connecting member, a raw material receiving groove formed between the insulating members, And a shaft hole formed in the center.

And an inner surface formed in the receiving groove, wherein the inner surface is an arcuate protrusion, a flat surface portion, and an arc-shaped recessed portion.

The present invention further includes a plurality of opening and closing means installed in a pipe line of the supply pipe and alternately opened and closed to block the rising heat and maintain the vacuum state.

The present invention further includes a ramp at a predetermined angle positioned between the aberration and the opening and closing means.

The present invention relates to a method for producing a silicon melt, comprising the steps of: inputting an ingot growth material into a hopper of a continuous raw material feed device; detecting a level displacement of the silicon melt surface contained in the crucible; determining a raw material supply amount based on the level displacement; A step of rotating the aberration to discharge the raw material of the hopper in a fixed amount, a step of supplying a raw material discharged in a predetermined amount by using a supply pipe to the crucible, and a step of detecting the level displacement of the silicon melt surface contained in the crucible, To continuously supply the raw materials continuously is provided.

The present invention further includes a step of opening / closing a plurality of opening / closing means alternately to open / close the pipe of the supply pipe to shut off the high heat which is raised before and after the supply of the raw material, and to maintain the vacuum state.

In order to grow the ingot, the ingot raw material is continuously supplied in a reduced volume, and since the ingot growing raw material is continuously supplied in a constant amount, the productivity of the ingot is greatly improved and the quality is uniformly effected .

The present invention can continuously supply the raw material (23) necessary for growing the ingot so that the size (diameter and / or length) of the ingot can be adjusted.

The present invention is characterized in that when the quantitative ingot material (23) is continuously supplied, the high temperature raised by the opening / closing means (24) (25) provided in the conduit (21b) And the growth of the ingot is not disturbed while the state is maintained.

1 is a process diagram showing an example of the present invention.
2 is a cross-sectional view showing an example of the present invention.
3 is a main part perspective view of the constant-quantity continuous feeder shown in one example of the present invention.
4 is a cross-sectional view showing a main portion of the constant-quantity continuous feeder shown in one example of the present invention.
Fig. 5 is a sectional view showing the state of use of the constant-quantity continuous feeder shown in one example of the present invention, in which the quantitatively improved raw material has fallen to the closed upper gate.
Fig. 6 is a sectional view showing the state of use of the constant-quantity continuous feeder shown in one example of the present invention, in which the quantitatively improved raw material has dropped to the lower gate.
Fig. 7 is a sectional view showing the state of use of the constant-quantity continuous feeder shown in the embodiment of the present invention,
The state where the upper gate is closed and the lower gate is opened and the raw material is put into the crucible.
8 is a cross-sectional view of another embodiment of the aberration shown as one example of the present invention.
9 is a sectional view of still another embodiment of the aberration shown as one example of the present invention.
10 is a circuit block diagram of the controller shown as one example of the present invention.
11 is a flowchart showing the continuous supply of the raw materials shown as one example of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following description of the embodiments of the present invention, the same components as in the drawings are denoted by the same reference numerals as possible, and detailed descriptions of known configurations and functions are omitted so as not to obscure the gist of the present invention.

Fig. 1 shows a continuous feeding method of the ingot raw material according to the present invention,

a. Feeding the ingot growth material into a hopper of the continuous feed apparatus,

b. Detecting a level displacement of the silicon melt surface contained in the crucible,

c. Determining a raw material supply amount based on the level displacement,

d. Rotating the aberration with the driving means to discharge the raw material of the hopper in a fixed amount,

e. Supplying a raw material to be discharged in a crucible by a predetermined amount using a supply pipe;

g. If the level displacement of the silicon melt surface contained in the crucible is detected and the feedstock is required, ~ e. The steps are repeated to achieve a constant supply of raw materials.

The present invention relates to the above d. E. (Step < RTI ID = 0.0 > f) < / RTI > of opening and closing the channel of the supply pipe by alternately opening and closing a plurality of opening and closing means between the steps, Thereby protecting the apparatus and maintaining a vacuum state.

Fig. 2 shows an example of a Czochralski method ingot growing apparatus (or ingot producing apparatus) to which continuously supplying apparatus 20 of the present invention for continuously and quantitatively feeding an ingot growing raw material is additionally provided.

The ingot growing apparatus comprises a main chamber 1 provided with a cooling means, an inner crucible 2 and an outer crucible 3 installed inside the main chamber 1 for melting polysilicon and an inner crucible 3, A pedestal 5 for supporting the inner and outer crucibles 2 and 3 and a plurality of heaters 4 for heating the inner and outer crucibles 2 and 3, Power supply means for supplying a large electric power to the electrically heated heater 6 and a drive shaft for supporting, rotating, raising and lowering the inner and outer crucibles 2 and 3 and the pedestal 5 A dome chamber 9 provided above the main chamber 1 and a gate valve and a viewport provided in the dome chamber 9 and a pull chamber A pulling means 12 installed in the pulling means 10 for pulling up the ingot 11 and a pulling means for pulling up the ingot 11 are provided in the pulling chamber 10, A seed chuck 13 provided at the lower end of the pulling cable 11 and a CCD camera and laser distance meter 15 for picking up the melt surface ML of the silicon melt M through the viewport 14 ), A vacuum means, a cooling means, a sensing means, a control means, and a measuring means.

3 is a diagram showing the construction of the continuous feeder 20 shown in the embodiment of the present invention. The hopper 26 into which the raw material 23 for growing the ingot is fed and the raw material 23 falling from the hopper 26 are received, A controller C for controlling the rotating means and a raw material 23 discharged in a predetermined amount from the aberration 30 are disposed in the inside and outside of the aberration 30, And a supply pipe 21 for guiding to the space 19 between the crucibles 2 and 3.

The present invention is characterized in that it is provided with an opening / closing means installed in the duct 21b of the supply pipe 21 to protect the continuous supply device 20 by shutting off the rising heat and maintaining the vacuum state, 24) and a lower opening / closing means (25).

The present invention further includes driving means (actuator) for opening / closing the upper opening / closing means (24) and the lower opening / closing means (25), respectively.

The driving means may be an air cylinder, a hydraulic cylinder, or a motor and a power transmitting means. In the present invention, a motor and a power transmitting means are exemplified.

The present invention includes a plurality of detecting means for detecting (detecting) the opening / closing states of the upper opening / closing means (24) and the lower opening / closing means (25), respectively.

The detecting means may be an encoder, a touch sensor, a proximity sensor, an optical sensor, or the like. In the present invention, an encoder is exemplified for convenience of explanation.

As shown in FIGS. 3 to 7, the hopper 26 has a funnel shape with a wide upper portion and a narrow bottom portion so that the raw material 23 can be easily injected. On the upper surface, A hopper gate 27 which is opened and closed around the hopper 28 is provided and when the predetermined amount of the raw material 23 is supplied, the hopper 26 is closed so that airtightness of the upper portion of the hopper 26 can be maintained, ) Is prevented.

As sealing means between the hopper 26 and the hopper gate 27, a sealing member such as an O-ring or a packing excellent in wear resistance and airtightness (airtightness) is used.

The volume of the hopper 26 is large enough to accommodate the raw material 23 in an amount exceeding the amount necessary to grow the ingot 11 once, and an outlet having a reduced inner diameter is formed in the lower portion. The housing 31 of the aberration 30 is hermetically coupled and the upper end of the supply tube 21 is connected to the lower portion of the housing 31 so as to be kept airtight. The lower part of the supply pipe 21 is connected to the space portion formed between the inner and outer crucibles 2 and 3 through the base chamber 1 and the upper and lower opening and closing means 24 and 25, And the raw material 23 can be supplied to the raw material feeder 19.

The supply pipe 21 located between the aberration 30 and the upper opening and closing means 24 forms a ramp 21a at a predetermined angle 2 and a predetermined amount of the raw material 23 discharged from the aberration 30 is discharged The raw material 23 is prevented from falling down freely, so that the upper gate 34 is protected from the impact.

The predetermined angle 2 of the ramp 21a may be set to an appropriate slope in the range of 30 ° to 60 ° depending on the physical properties, size, and weight of the raw material 23.

The aberration 30 includes front and rear discs 43 and 44 spaced apart from each other by a predetermined distance, a connecting member 46 connecting the front and rear discs 43 and 44 so as to maintain a predetermined distance, A plurality of separating members 45 radially disposed at a predetermined angle ? 1 outside the separating member 45 and a receiving groove 47 formed between the separating member 45 and opened outward to receive the raw material 23, And a shaft hole formed at the center of the front and rear discs 43 and 44 and the connecting member 46 so that the shaft rod 42 of the rotating means (motor) can be engaged.

The inner surface 46a of the receiving groove 47 may be an arc-shaped protrusion having a predetermined distance L1 from the edge of the front and rear discs 43 and 44 as shown in Fig. 4, 43) 44 or an arc-shaped recessed portion having a predetermined distance L3 from the edge of the front and rear circular plates 43, 44 as shown in Fig. 9 Shaped protrusions, the volume of the raw material 23 is the smallest in the planar portion, and the volume of the raw material 23 is the largest in the arc-shaped recessed portion.

The volume of the receiving groove 47, adjusting the predetermined angle (θ1) of the isolation member 45, or isolated diameter of the member 45 controlling the number, or before and after the original plate 43, 44 of the (isolated The length of the member 45), or by adjusting the outer diameter of the connecting member 46, or the like.

The raw material 23 discharged from the hopper 26 is accommodated in the plurality of receiving grooves 47 formed in the aberration 30 and the aberration 30 is rotated forwardly in the A direction by the rotating means as shown in Fig. The raw material 23 flowing into the lower surface receiving groove 47 slides along the inclined path 21b of the supply pipe 21 as shown in FIG. 5 while being freely dropped in the direction B and the amount of rotation of the aberration 30 (Rotational angle, etc.) of the raw material 23 is controlled so that the raw material 23 is supplied in a constant amount.

The shaft 32 of the motor 32 is rotatably supported by the front and rear disks 43 and 44. The shaft 32 of the motor 32 is rotatably supported by the front and rear disks 43 and 44, And a flat portion is formed at one side of the shaft rod 42 and the shaft hole to prevent slip.

A first encoder 33 for detecting the amount of rotation (or rotation angle or angular displacement) of the aberration 30 and inputting the detected amount to the controller c is provided at the end of the shaft rod 42 of the motor 32.

Since the lower part of the supply pipe 21 is located in the hot zone area and is exposed to high temperature (high temperature), it is made of a material having sufficient heat resistance, or a water cooling chamber is formed to be forced water cooling.

5 to 7 show a state in which the upper and lower opening and closing means 24 and the lower opening and closing means 25 are alternately opened and closed to supply the raw material 23 discharged in a fixed amount to the crucible space 19, Supply of the raw material 23 is achieved in a state in which airtightness is maintained by the upper opening and closing means 24 and the lower opening and closing means 25. [

The upper opening and closing means 24 and the lower opening and closing means 25 are provided on the upper and lower portions of the pipe line 21b of the supply pipe 21 and are respectively provided with an upper gate 34 and a lower gate 39 A driving means and a power transmitting means for causing the upper gate 34 and the lower gate 39 to move back and forth and a plurality of detecting means for detecting (detecting) the opening and closing states of the upper gate 34 and the lower gate 39, Means.

The power transmission means for transmitting the rotational force of the motors 37 and 42 to the upper and lower gates 34 and 39 is composed of an upper gate motor 37 and a lower gate motor 42, A ball screw 36 and 41 connected to the rotating shaft of the motor 37 and 42 and a nut fastened to the ball screw 36 and 41 and fixed to the upper gate 34 and the lower gate 39, A plurality of detecting means for detecting the opening and closing states of the upper and lower gates 34 and 39 and inputting them to the controller C such as the second and third encoders 38 and 38 And a space or an accommodating groove is formed in the upper gate 34 and the lower gate 39 to allow the ball screws 36 and 41 to pass therethrough so that the upper gate 34 and the lower gate 39 ) Can be moved forward and backward.

The second and third encoders 38 and 43 detect the amount of rotation (or rotation angle or angular displacement) of the gate motors 37 and 42 and the rotational load and input them to the controller C, (C) compares the amount of rotation input from the second and third encoders 38 and 43 with the preset reference signal to determine the open or closed state and controls the gate motors 37 and 42 .

The upper and lower gates 34 and 39 are accommodated in the housing 35 and 40 in which the ball screws 36 and 41 are installed so that when the channel 21b is opened, A thread is formed.

The airtightness (vacuum or vacuum) holding means between the upper gate 34 and the conduit 21b and between the lower gate 39 and the conduit 21b may be an o-ring or a packing having excellent heat resistance, wear resistance and airtightness Is used.

5 shows a case where a predetermined amount of raw material 23 is supplied to the upper gate 21a along the ramp 21a in a state in which the upper gate 34 and the lower gate 39 are respectively closed and the upper and lower airtightness of the pipeline 21b is maintained. 6 shows a state in which the lower gate 39 closing the channel 21b in a state in which the raw material 23 falls and moves to the lower gate 39 while the upper gate 34 is opened 7 shows that when the pipeline 21b is closed by the upper gate 34 and the airtightness is maintained, the lower gate 39 is opened and a predetermined amount of the raw material 23 is dropped The lower gate 39 is advanced by the driving means as shown in Fig. 5 and is supplied to the furnace space 19b as shown in Fig. 5 when the lower gate 39 is fully opened and the raw material 23 drops all the way ) Is closed and airtightness is maintained, and a continuous supply of the quantitative raw material is achieved by repeating this process.

10 is a diagram showing an example of an input of a controller Ca constituted by a circuit block road of a controller C shown in the present invention and a PLC or a central processing unit or a microcomputer, (S) composed of a plurality of keypads, a touch screen, and the like so as to be able to input and set various data, A first encoder 33 for detecting the amount of rotation of the aberration 30; a second encoder 38 for detecting the open / closed state of the upper gate 34; A CCD camera and a laser distance meter 15 for measuring the temperature and level (or level displacement) of the silicon melt surface ML are provided in the input / output of the control unit Ca, .

The display unit D displays various operating states, operating modes, set values, current values, operation states of various devices, various kinds of abnormalities, and the like, An upper gate motor 37 for opening and closing the upper gate 34 and a lower gate motor 43 for opening and closing the lower gate 39 are connected to each other.

The input / output of the control unit Ca includes a memory unit composed of various types of recording media such as a hard disk, a flash memory, a ROM (Read Only Memory), and an SSD (Solid State Driver) Stored in the memory unit, read out from the memory unit, and updated and stored.

Although not shown in the drawing, a driving drive for driving various actuators is connected to the output of the control unit Ca, and the setting unit S can use or mix a normal keypad, a switch group, a touch screen, etc., respectively.

The display unit D displays an operation state of a power indicator, a power indicator, and various sensors and actuators to display a power supply state. The display unit D includes a liquid crystal display (LCD), a seventh segment, a light emitting diode, Accordingly, the display unit can be configured with a touch screen to facilitate the use.

11 is a flowchart showing the process of continuously feeding the ingot raw material 23 into the crucible space 19 in the present invention. In the state where the hopper gate 27 is open, The ingot growth material 23 is loaded into the hopper 26 in step S1 and then the hopper gate 27 is closed in step S2 so that the gap between the hopper 26 and the hopper gate 27 The level of the silicon melt surface ML is measured using the CCD camera and the laser distance measuring device 15 and the weight of the growing ingot 11 is measured using the load cell 13 The controller C activates the aberration motor 32 so that a predetermined amount of the raw material falls to the upper gate 34 in step S5 and the first encoder 33 (Rotation value) of the detected aberration 30 (step S6) is compared with the reference amount (reference supply value) set in the controller C If it is determined that the rotation of the car 30 is completed (the supply of the raw material is completed) (step S7), the aberration motor 32 is stopped to stop the supply of the raw material (the raw material 23 is supplied to the upper gate 34 in a fixed amount When the amount of rotation of the aberration 30 is determined to be less than the reference amount (step S7), the aberration 32 is rotated to continuously supply the raw material 23 and the supply of the raw material is completed (step S7) (Step S8) The upper gate motor 37 is rotated forward and the upper gate 34 is opened backward under the control of the controller C so that the raw material 23 of the upper gate 34 reaches the lower gate 39, And the controller C compares the signal inputted from the second encoder 38 with the reference signal. If it is judged that the opening of the upper gate 34 is completed (the state in which the material of the upper gate has fallen completely to the lower gate ) (Step S11) The upper gate motor 37 is reversely rotated (Step S12) and the upper gate 37 is advanced The upper gate 34 is closed until the opening of the upper gate 34 is completed (Step S11) (Step S9) to induce reverse opening of the upper gate 34 (step S11).

When the upper gate 34 is closed by the reverse rotation of the upper gate motor 37 in step S12 in step S14 and the lower gate motor 42 is rotated in the forward direction in step S15, When the upper gate 39 determines that the piping 21b has been closed and airtightly sealed (step S14), the lower gate motor 42 is operated to close the pipeline 21b (step S13) The upper gate motor 37 is rotated reversely (step S12) until it is determined that the upper gate 34 has not been completely closed (step S14) until the upper gate 34 is closed, Leading to the forward closing of the upper gate 34 (step S12).

The raw material 23 dropped into the lower gate 39 as shown in Fig. 7 is transferred to the supply pipe 21 while the lower gate 39 is opened by the forward rotation of the lower gate motor 39 (step S15) Is supplied to the crucible space 19 while being melted and used for ingot growth, and the level of the silicon melt M is increased.

On the other hand, when the controller C compares the signal inputted from the third encoder 43 with the reference signal and judges that the lower gate 39 is completely opened (the state where the raw material of the upper gate is supplied to the crucible) (S17 The lower gate motor 39 is reversed in step S18 and the lower gate 39 is advanced to close the pipeline 21b in step S19 and it is judged that the opening of the lower gate 39 is not completed (S17), the lower gate motor 39 is rotated in a reverse direction until the lower gate 39 is completely opened (S18).

If it is determined that the supply of the quantitative raw material 23 is completed once and the closure of the lower gate 39 is completed in the above step (S20), the silicon melt surface ML (ML) is measured using the CCD camera and the laser distance measuring device 15 And the weight of the growth ingot 11 is measured using the load cell 13 in step S3 and waits until the supply of the raw material is required. In step S3, the silicon melt M If the level is lower than the reference value, the supply of the raw material 23 is required. In this case, the desired ingot 11 grows while a constant amount of the raw material is continuously supplied by repeating the above- When the growth of the ingot 11 is completed (step S21), the (continuous) supply of the raw material is terminated.

In the step of determining the amount of the raw material 23 to be charged (step S4), as the ingot 11 grows, the amount of the raw material 23 is consumed, the level of the melt surface ML is lowered while the silicon melt M is consumed, So that the weight of the body 11 increases. Therefore, the level displacement (change) of the silicon melt surface ML is measured using the CCD camera and the laser range finder 15 and the weight of the growth ingot 11 is measured using the load cell 13 to determine the raw material 23 The raw material 23 is continuously and automatically supplied in a constant amount under the control of the controller C whenever the level displacement of the measured silicon melt surface ML deviates from the reference value.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, It is self-evident to those of ordinary skill.

(1) - main chamber (2) - internal crucible
(3) - external crucible (6) - electrothermal heater
(10) - lifting means (11) - ingot
(12) - impression cable (13) - load cell
(15) - CCD camera and laser range finder (20) - Continuous feeder
(10) - space (21) - supply pipe
(21a) - an inclined portion (21b) - a hollow portion
(23) - raw material (24) - upper gate
(25) - bottom gate (26) - hopper
(27) - hopper gate (28) - shaft
(29) - opening and closing means (30) - aberration
(31) - housing (32) - rotating means
(42) - the shaft of the rotating means (43) (44) - the disk
(45) -isolation member (46) -connection member
(46a) - the inside surface (47) of the receiving groove -
(C) -controller L1 (L2) (L3) - a predetermined distance
(M) - Silicon melt (ML) - Silicon melt surface

Claims (9)

A hopper into which the raw material for growing an ingot is injected;
Aberration for receiving and dropping the raw material falling from the hopper;
Rotating means for rotating the aberration;
A controller for controlling the rotating means;
A supply pipe for guiding a raw material to be discharged from the aberration to a space between the inner and outer crucibles; ≪ / RTI >
A plurality of opening / closing means installed on a pipe line of the supply pipe and alternately opened and closed to shut off the rising heat and maintain the vacuum state;
Further comprising the step of feeding the ingot raw material continuously. delete delete delete The method of claim 1,
The opening /
An upper gate 34 and a lower gate 39 which are installed on the upper and lower portions of the pipeline 21b of the supply pipe 21 to open the pipeline 21b;
Driving means for moving the upper gate 34 and the lower gate 39 back and forth and power transmission means;
A plurality of detecting means for detecting (detecting) the open / close states of the upper gate 34 and the lower gate 39, respectively;
The continuous feed of the ingot raw material. The method of claim 5, further comprising:
The driving means is an upper gate motor 37 and a lower gate motor 42 that rotate in normal and reverse directions,
The power transmission means is connected to the ball screws 36 and 41 and the ball screws 36 and 41 connected to the rotation shaft of the gate motors 37 and 42 and connected to the upper gate 34 and the lower gate 39 Respectively,
The detecting means includes second and third encoders 38 and 43 which are provided on the rotational axis of the gate motors 37 and 42 to detect the opening and closing states of the upper and lower gates 34 and 39 and input to the controller C, And the continuous feed of the ingot raw material. The method of claim 1,
A slope at a predetermined angle positioned between the aberration and the opening and closing means;
Further comprising: a feeder for continuously feeding the ingot raw material. a. Feeding an ingot growth material into a hopper of a continuous feed apparatus;
b. Detecting a level displacement of the silicon melt surface contained in the crucible;
c. Determining a feed amount based on the level displacement;
d. Rotating the aberration by the driving means to discharge the raw material of the hopper in a fixed amount;
e. Supplying a raw material discharged in a fixed quantity to the crucible using a supply pipe;
g. If the level displacement of the silicon melt surface contained in the crucible is detected and the feedstock is required, ~ e. And repeating the steps so as to achieve a constant supply of the raw material continuously. The method of claim 8,
d. E. Opening and closing a plurality of opening and closing means alternately between steps to open and close the pipe of the supply pipe (step f);
Further comprising the step of continuously feeding the ingot raw material.

Images