KR101378301B1 - Particle complex characteristic measurement apparatus exhaust system having particle distribution measurement and calibration module - Google Patents

Abstract

A device for measuring particle complex characteristics having a module for measuring and correcting particle distribution of the present invention comprises: a particle focusing unit including an aerodynamic lens; a first chamber which has one end connecting with the particle focusing unit, controls internal pressure at medium vacuum (1 to 10-3 Torr), and has a nozzle formed at the other end so as to accelerate particles injected through the particle focusing unit; a second chamber having one end connected with the nozzle of the first chamber, and in which an electron gun is installed to control internal pressure at high vacuum (10-3 to 10-7 Torr) and charging the particles accelerated in the first chamber; a third chamber having one end connected with the second chamber, and in which an electrostatic deflecting device is installed to apply a particular voltage therein and select only particles having a particular size among those charged to be saturated in the electron gun; a pump connecting with the first and second chambers through an exhaust flow path and discharging air inside the first and second chambers to the outside; a fourth chamber having one end vertically connected with the third chamber, and which has a particle collecting device installed therein; and a particle sensing unit which is disposed to be capable of moving and tilting in a moving route of the charged particles between the particle collecting device and the electrostatic deflecting device or which is installed instead of the particle collecting device to be capable of moving and tilting on a virtual plane vertical to direction of movement of the charged particles, and which has a smaller diameter than the particle collecting device.

Description

Particle Complex Characteristic Measurement Apparatus Exhaust System having Particle distribution measurement and Calibration module

The present invention relates to a particle composite properties measurement apparatus having a module for particle distribution measurement and calibration.

Conventional particle size distribution measuring apparatuses include a particle beam mass spectrometer (PBMS). The PBMS includes an aerodynamic lens, an electron gun, an electrostatic deflector, a Faraday cup, And the like.

In the PBMS, the particles contained in the gas are concentrated and accelerated in the form of a beam in a low pressure environment, and charged to a saturated state. The charged particles enter the electric field to change its traveling path, The size distribution of the particles can be known.

_{The aerodynamic lens, when} the aerosol is introduced into the inlet, is focused on the central axis via the lens of the various stages and is introduced into the focusing and accelerating state through the last acceleration nozzle to the first vacuum chamber, It is discharged by the pump because the particles are relatively light, and the particles are transferred to the electron gun. In the electron gun, the electrons from the filament collide with the particle beam and emit secondary electrons to charge them to a positive state until they reach the saturation state.

The electrostatic deflecting device is composed of a deflecting plate composed of about three sheets of meshes, and a positive (+) pole voltage is applied to a mash plate arranged in the middle to form an electric field. At this time, there may be a relationship between a specific-size particle and a specific voltage. For example, when a 1,000-V power supply is applied, when a 200-nm particle is a critical-size particle, do.

The Faraday cup is a simple metal substrate with electrodes connected to the back side. When the particles adhere to the Faraday cup, the positive ions held by the particles are transferred to the electrode, and the current value of the electrode is measured do.

On the other hand, the three deflection plates constituting the electrostatic deflecting device is composed of a thin mesh, the outer two meshes are applied to the deflection plate disposed between the grounded and grounded mesh-type deflection plate to generate a uniform electric field Can be formed. In general, the deflection plates are installed at an inclination of 45 degrees with respect to the advancing direction of the particles, so that the particles can be sent to the Faraday cup at 90 degrees. There is a problem that the moving path of the particles bent by the plate is off the center of the Faraday cup, the size measurement accuracy of the particles measured in the Faraday cup may be inferior.

The present invention provides a particle composite characteristic measurement apparatus having a particle distribution measurement and calibration module capable of detecting an installation error of a deflection plate and determining an optimal size of a particle collecting device according to particle size by measuring particle diffusion degree. The purpose is to provide.

Another object of the present invention is to provide a particle composite property measurement device having a particle distribution measurement and calibration module that can be used for basic data collection in the development of an array type particle collection device.

Particle composite property measurement apparatus having a particle distribution measurement and calibration module according to the present invention includes a particle focusing unit including an aerodynamic lens; A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit; A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr; A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto; One pump connected to the first and second chambers through an exhaust passage and discharging the gas inside the first and second chambers to the outside; A fourth chamber having one end vertically connected to the third chamber and having a particle collecting device installed therein; And moving on an imaginary plane perpendicular to the moving direction of the charged particles on the charged particle moving path between the particle collecting device and the electrostatic deflecting device. It is arranged to be possible, the particle detection unit having a smaller diameter than the particle collecting device; characterized in that it comprises a.

The particle detection unit may be installed at the position after removing the particle collecting device.

Alternatively, the particle detection unit may be installed to be tiltable with respect to a virtual plane perpendicular to the moving direction of the charged particles.

The particle detecting unit may move in the radial direction of the particle collecting unit.

The particle detection unit may detect the distribution of charged particles by moving once from one end of the particle collecting unit to the other end.

The particle detection unit may be installed in the fourth chamber.

The particle detection unit may detect a distribution of charged particles through at least one of linear and tilt motions within the area of the particle collecting unit.

The particle detection unit may be removed from the installation position when the correction of the electrostatic deflection device is completed.

The electrostatic deflector may be installed to adjust the angle.

According to the present invention, by installing a particle detecting unit in the space between the particle collecting unit and the electrostatic deflector, it is possible to detect in advance how much the particles delivered to the particle collecting unit are distributed from the center of the particle collecting unit, this data It is possible to correct the installation angle of the electrostatic deflector through.

In addition, the particle detection unit can be used to determine the degree of diffusion of charged particles when the charged particles are delivered to the particle collecting device through the electrostatic deflector, so that the optimal size of the particle collecting device can be determined using this information. . Therefore, data collection for the development of an array type particle collecting device is possible.

1 is a conceptual diagram of a particle composite property measurement apparatus having a particle distribution measurement and calibration module according to an embodiment of the present invention;
2 is a conceptual diagram schematically showing a path of particles bent by an electrostatic deflector and delivered to a particle collecting unit;
Figure 3 is a schematic diagram showing a method of moving the particle detection unit according to an embodiment of the present invention,
4 and 5 are graphs measuring the distribution of particles delivered to the particle collecting device using the particle detection unit according to the present invention, and
6 is a view schematically showing a moving device of the particle detection unit according to an embodiment of the present invention.

Hereinafter, an apparatus for measuring a particle composite property having a particle distribution measuring and calibrating module according to an exemplary embodiment of the present invention will be described with reference to the accompanying drawings.

1 is a conceptual diagram of a particle composite property measurement apparatus having a particle distribution measurement and calibration module according to an embodiment of the present invention, Figure 2 is a schematic diagram showing the path of the particles bent by the electrostatic deflector to the particle collection unit 3 is a schematic view illustrating a method of moving a particle detection unit according to an embodiment of the present invention, and FIGS. 4 and 5 are distributions of particles delivered to a particle collecting device using the particle detection unit according to the present invention. 6 is a graph illustrating a moving device of a particle detection unit according to an embodiment of the present invention.

Particle complex characteristic measurement apparatus having a particle distribution measurement and calibration module according to the present invention is the particle focusing unit 10, the first chamber 20, the second chamber 30, the third chamber 40, the pump 50 ), The fourth chamber 60 and the particle detection unit 100 may be included.

The particle focusing unit 10 is generally an aerosol (gas and particle mixing) focusing mechanism composed of an _{aerodynamic lens} or the like. The aerosol composed of gas and particles is _injected into the electron gun 32 To the center. The particle focusing unit 10 is generally composed of, but _{aerodynamic lens} (aerodynamic lens), not limited this, if the configuration capable of condensing the gas and particles at the same time, it is any thing or available. The gas and particles flowing through the particle focusing unit 10 can be accelerated toward the electron gun 32 through the nozzle 22 formed between the first and second chambers 20 and 30.

The first chamber 20 may have a connecting portion connected to the particle collecting unit 10 at one end thereof, and the inner pressure may be a medium vacuum (1 to 10 ^-3 Torr). According to an embodiment of the present invention, the pressure of the first chamber 20 may be maintained at 10 ^-3 Torr. A first pressure gauge 21 is installed in the first chamber 20 so as to maintain a constant pressure in the first chamber 20 and flows into the first chamber 20 through the particle concentration unit 10 A first flow path 51 for discharging the gas may be connected to the pump 50.

The second chamber 30 is connected to the first chamber 20 at one end and connected to the third chamber 30 at the other end and the inner pressure can be formed at a high vacuum of 10 ^-3 Torr to ^10-7 Torr have. The pressure inside the second chamber 30 is preferably 10 ^-5 Torr. A second pressure gauge 31 is installed in the second chamber 30 so as to maintain the pressure inside the second chamber 30 constant and the pressure of the gas introduced through the particle concentration unit 10, The second flow path 52 for discharging gas that has not been discharged from the first chamber 20 can be connected to the pump 50. [ The second chamber 30 may be provided with an electron gun 32 capable of charging a gas containing accelerated particles through the nozzle 22 until the gas is saturated.

The third chamber 40 may have an electrostatic deflector 42 installed therein. The electrostatic deflecting device 42 is for classifying the size of particles, and it is possible to transmit only a specific size of particles to a particle collecting unit 61 side such as a Faraday cup by hanging a specific voltage on a load. The electrostatic deflecting device 42 can be configured so that the particle trajectory included in the aerosol flowing through the particle focusing unit 10 can be vertically changed, and generally has an angle of 45 degrees with respect to the entering direction of the charged particles . Therefore, the positive ions contained in the particles transferred to the particle collecting unit are transferred to the electrode provided on the back surface of the particle collecting unit, and the current value detected by the electrode can be measured by a predetermined meter.

The electrostatic deflector 42 may include first to third deflection plates 42a, 42b and 42c, as shown in FIG. 2, wherein the first and third deflection plates 42a and 42c are provided. Is grounded, and power is applied to the second deflection plate 42b to transfer the charged particles to the particle collecting unit 61 which will be described later. The electrostatic deflecting device 42 may be provided in a mesh form.

According to an embodiment of the present invention, the electrostatic deflecting device 42 is a particle collecting device which will be described later by charged particles when the mesh structure of the first to third deflecting plates 42a to 42c is deformed or the angle is changed. Since it may not be accurately transmitted to the center of the 61, it can be provided so that the angle can be changed so that it can be corrected at an appropriate angle. This angle change may be made manually, or may be automatically adjusted using a predetermined control unit and a mobile unit.

The pump 50 is installed to form a vacuum state in the first and second chambers 20 and 30. As described above, the internal pressure of the first chamber 20 is 10 ^-3 Torr, And the gas introduced into each of the chambers 20 and 30 may be discharged to the outside of the chamber so that the pressure inside the second chamber 30 becomes 10 ^-5 Torr. At this time, since the particles of the aerosol flowing through the particle collecting unit are not affected by the pump 50 because the inertial force is larger than that of the gas, the gas is supplied to the first and second chambers 20 30). ≪ / RTI > Although the pump for forming the medium vacuum in the first chamber 20 and the pump for forming the high vacuum in the second chamber 30 are separately provided in the prior art, The first and second flow passages 51 and 52 may be connected to each other through the exhaust passage so that the vacuum chamber of the first chamber 20 can be formed. The pump 50 may be formed of any one of a diffusion pump, a turbo molecular pump, an adsorption pump, a cryogenic cooling pump, an ion pump, a cryo pump, and a sublimation pump. The pump 50 preferably operates at a constant speed.

As shown in FIG. 1, the fourth chamber 60 may be connected to the third chamber 40 at an angle of 90 degrees, and a particle collecting device 61 may be installed therein. The particle collecting device 61 may be provided as a Faraday cup.

The particle detection unit 100 may be disposed on a particle movement path between the particle collecting device 61 of the fourth chamber 60 and the electrostatic deflecting device 42 of the third chamber 40. As an example, as shown in FIG. 1, the fourth chamber 60 may be disposed at a position that does not interfere with the particle collecting device 61.

As shown in FIG. 3, the particle detection unit 100 is formed to have a diameter smaller than that of the particle collecting device 61, and has an x-axis or y-axis in an inner space of the particle collecting device 61. It can move in all directions in the x- and y-axis directions and can be installed to tilt forward and backward. However, the movement direction may be disposed on a plane perpendicular to the movement trajectory of the charged particles.

The diameter of the particle detection unit 100 is preferably smaller than the diameter of the particle collecting device 61, it may be provided with a size of about 5% of the diameter of the particle collecting device for a more precise scanning operation. For example, when the diameter of the particle collecting device 61 is 100mm, the diameter of the particle detection unit 100 may be provided as 5mm. If the size of the particles increases, it is preferable that the particles are formed to be large to correspond to them.

The particle detection unit 100 collects charged particles deflected by the electrostatic deflecting device 42 before the particle collecting device 61 and looks at the distribution. As illustrated in FIG. 3, the particle collecting device ( It is possible to detect the charged particles deflected by the electrostatic deflector 42 while moving in the x-axis or y-axis direction within the diameter range of 61).

At this time, the distribution of the charged particles can be confirmed as a percentage (%) of the average amount of current as shown in the graphs of FIGS. 4 and 5 according to the diameter of the charged particles.

4 shows that when the diameter of the charged particles is 100 nm, the diameter of the particle detection unit 100 is changed to 5, 10, and 20 mm, respectively, when the center position of the particle collecting device 61 provided with the Faraday cup is set to 0 mm. This is a graph measuring the distribution of charged particles. At this time, the x-axis is the center position of the particle collecting device 61, the y-axis is the ratio of the current measurement value of the particle detection unit 100 and the current measurement value of the particle collecting device 61 at the same position as a percentage. .

When the setting of the electrostatic deflector 42 is correct, the most charged particles are detected at the center of the particle collecting device 61, and the amount of charged particles decreases toward both ends. When the electrostatic deflector 42 is turned, the central portion may be shifted according to the twisted angle. As shown in FIGS. 4 and 5, the maximum value of the charged particles detected by the particle detection unit 100 is a particle. If it is not aligned with the center of the collecting device 61 and is shifted in the positive (+) or negative (-) direction of the x-axis, by using the shifted distance, the twisted angle of the electrostatic deflecting device 42 is calculated and corrected. It is possible to do

On the other hand, as shown in Figure 5, when the diameter of the charged particles is 200nm, when the diameter of the particle detection unit 100 is 5mm it can be seen that the measured values at both ends converge to 0, which is Since the diffusivity varies depending on the size of the particles, the 200 nm particles mean less diffusion than the 100 nm particles. By using this, it is possible to set the diameter of the optimized particle collecting device 61.

On the other hand, various configurations for forming a scanning movement of the particle detection unit 100 according to an embodiment of the present invention is possible, Figure 6 is an example of the particle detection unit using the adjustment handle 51 and the screw 52 as an example It is a diagram schematically showing a configuration capable of adjusting the position of 100.

As shown in the drawing, the screw 52 is inserted into one side wall of the fourth chamber 60 to move the position of the particle detection unit 100 in synchronization with the rotational operation of the adjustment handle 51. In this case, the particle detection unit 100 may move in a predetermined direction within an area range of the particle collecting device 61. At this time, the guide member for preventing the particle detection unit 100 is rotated by the rotation of the screw 52 may be provided.

On the other hand, Figure 6, as an example, in addition to the screw structure may be installed to move the particle detection unit 100 in a variety of ways using a guide rail, etc., any configuration that can be reciprocally conveyed manually or automatically Applicable

In addition, the particle detection unit 100 may be installed in the third chamber 40 instead of the fourth chamber 60, may be installed in place of the particle collecting device. Any location may be provided as long as it does not interfere with the particle collecting device 61.

According to the present invention as described above, the current measured in the particle detection unit 100 whether the electrostatic deflector 42 is installed at the correct angle so that the charged particles can be accurately delivered to the center of the particle collecting device 61 It can be confirmed through the distribution of charged particles obtained using the value. If there is a problem in the installation angle of the electrostatic deflector 42, by using the current value measured in the particle detection unit 100 to correct the twisted angle of the electrostatic deflector 42, the charged particles are collected ( It is possible to correct the installation angle of the electrostatic deflecting device 42 so that it can be accurately transmitted to the center of the 61. In addition, by measuring the degree of diffusion of particles, it can be used as a basic research device to determine the optimized size of the particle collecting device and to develop an array type particle collecting device.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

10; A particle focusing unit 20; The first chamber
21; A first pressure gauge 30; The second chamber
31; A second pressure gauge 32; Electron gun
40; A third chamber 42; Electrostatic deflection device
50; Pump 60; The fourth chamber
61; A particle collecting device 100; Particle detection unit

Claims (9)

A particle focusing unit including an aerodynamic lens;
A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit;
A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr;
A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto;
One pump connected to the first and second chambers through an exhaust passage and discharging the gas inside the first and second chambers to the outside;
A fourth chamber having one end vertically connected to the third chamber and having a particle collecting device installed therein; And
Movement on an imaginary plane perpendicular to the movement direction of the charged particles on the charged particle movement path between the particle collecting device and the electrostatic deflecting device. Particle distribution characteristics measurement apparatus having a particle distribution measurement and calibration module comprising a; particle detection unit having a diameter smaller than the particle collecting device is arranged possible.
delete The method of claim 1, wherein the particle detection unit,
Particle composite characteristic measurement apparatus having a particle distribution measurement and calibration module moving in the radial direction of the particle collecting unit.
The method of claim 3, wherein the particle detection unit,
Particle composite characteristic measurement device having a particle distribution measurement and calibration module for moving the one time from one end of the particle collecting unit to the other end to detect the distribution of charged particles.
The method of claim 1, wherein the particle detection unit,
Particle complex characteristic measurement apparatus having a particle distribution measurement and calibration module installed in the fourth chamber.
The method of claim 1, wherein the particle detection unit,
And a particle distribution measuring and calibrating module for detecting a distribution of charged particles through at least one of linear and tilting movements within an area of the particle collecting unit.
The method of claim 1, wherein the particle detection unit,
And a particle distribution measuring and calibrating module which is removed from the installation position when the correction of the electrostatic deflecting device is completed.
The method of claim 1, wherein the particle detection unit,
And a particle distribution measuring and calibrating module installed at the position after removing the particle collecting device.
The electrostatic deflector of claim 1,
Particle compound characteristic measurement device having a particle distribution measurement and calibration module installed to adjust the angle.

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