KR101378293B1 - Particle complex characteristic measurement apparatus exhaust system for optimal flow control - Google Patents

Abstract

An exhaust system of a particle complex characteristic measurement device for optimal flow control according to the present invention comprises; a particle focusing unit including an aerodynamic lens; and a first chamber in which one end is connected to the particle focusing unit, the internal pressure is controlled to a medium-vacuum state (1 to 10^(-3) Torr), and a nozzle is formed on the other end. The first chamber accelerates particles which are inserted through the particle focusing unit. The exhaust system of the particle complex characteristic measurement device for optimal flow control also comprises a second chamber in which one end is connected to the nozzle of the first chamber, the internal pressure is controlled to a high-vacuum state (10^(-3) to 10^(-7) Torr), and an electron gun for charging the particles accelerated in the first chamber is installed; a third chamber in which one end is connected to the second chamber and an electrostatic deflection device is installed; and a pump which is connected to the first and second chambers through an exhaust flow path and discharges gas within the first and second chambers to the outside. The electrostatic deflection device classifies particles of a specific size among particles which are charged till saturation in the electron gun by applying a specific voltage to the inner side.

Description

Particle Complex Characteristic Measurement Apparatus Exhaust System for optimal flow control

The present invention relates to an exhaust system for a particle composite property measuring apparatus for optimal flow rate control.

Conventional particle size distribution measuring apparatuses include a particle beam mass spectrometer (PBMS). The PBMS includes an aerodynamic lens, an electron gun, an electrostatic deflector, a Faraday cup, And the like.

In the PBMS, the particles contained in the gas are concentrated and accelerated in the form of a beam in a low pressure environment, and charged to a saturated state. The charged particles enter the electric field to change its traveling path, The size distribution of the particles can be known.

_{The aerodynamic lens, when} the aerosol is introduced into the inlet, is focused on the central axis via the lens of the various stages and is introduced into the focusing and accelerating state through the last acceleration nozzle to the first vacuum chamber, It is discharged by the pump because the particles are relatively light, and the particles are transferred to the electron gun. In the electron gun, the electrons from the filament collide with the particle beam and emit secondary electrons to charge them to a positive state until they reach the saturation state.

The electrostatic deflecting device is composed of a deflecting plate composed of about three sheets of meshes, and a positive (+) pole voltage is applied to a mash plate arranged in the middle to form an electric field. At this time, there may be a relationship between a specific-size particle and a specific voltage. For example, when a 1,000-V power supply is applied, when a 200-nm particle is a critical-size particle, do.

The Faraday cup is a simple metal substrate with electrodes connected to the back side. When the particles adhere to the Faraday cup, the positive ions held by the particles are transferred to the electrode, and the current value of the electrode is measured do.

In order to maintain the pressure in the first chamber to which the aerodynamic lens is connected and the second chamber in which the electron gun are installed to be 10 ^-3 Torr and 10 ^-5 Torr, A pump is connected to each of the chambers, and the gas introduced together with the particles through the aerodynamic lens is discharged to the outside.

However, when a separate pump is installed in each of the first and second chambers as described above, since a plurality of expensive pumps must be provided, there is a problem that the cost for the device configuration can be increased.

It is an object of the present invention to provide an exhaust system of a particle composite property measuring apparatus for controlling the optimum flow rate of which the structure is improved to control the pressure of the first and second chambers by using one pump.

Particle composite characteristics measuring apparatus exhaust system for optimum flow rate control according to the present invention comprises a particle focusing unit including an aerodynamic lens; A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit; A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr; A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto; And a pump connected to the first and second chambers through an exhaust passage to discharge the gas inside the first and second chambers to the outside.

The first and second chambers may be provided with first and second pressure gauges.

A first flow path having one end connected to the first chamber and the other end connected to a pump; And a second flow path having one end connected to the second chamber and the other end connected to the pump.

The first flow path may be composed of first and second pipes, and a valve member may be installed between the first and second pipes.

According to the first embodiment of the present invention, the first flow path is formed of a curved pipe, the second flow path is formed of a straight pipe, the first flow path is connected to the side wall of the second flow path, the pump It may be disposed below the second chamber.

According to the second embodiment of the present invention, the second flow path is formed of a curved pipe, the first flow path is formed of a straight pipe, the second flow path is connected to the side wall of the first flow path, and the pump It may be disposed below the first chamber.

According to the third embodiment of the present invention, the first and second flow paths are formed in a curved curved tube, and each end thereof is connected to each other, and a third flow path that is a straight pipe is connected to the first and second flow paths at one end thereof. The other end thereof is connected to the pump, so that the pump may be disposed between the first and second chambers.

The first and second flow paths may have the same diameter, and the diameter of the first flow path may be larger than the diameter of the second flow path.

Particle composite characteristics measuring apparatus for the optimum flow rate control according to the fourth embodiment of the present invention exhaust system comprises a particle focusing unit including an aerodynamic lens; A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit; A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr; A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto; An exhaust passage connecting the first and second chambers; And at least one pump connected directly to the second chamber, wherein the gas of the first chamber is indirectly discharged through the exhaust passage and the air of the second chamber is directly discharged.

Particle composite characteristics measuring apparatus for the optimum flow rate control according to the fifth embodiment of the present invention exhaust system comprises a particle focusing unit including an aerodynamic lens; A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit; A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr; A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto; At least one pump connected directly to the second chamber and provided as a turbo pump for directly discharging air of the second chamber; And an exhaust passage having one end connected to the first chamber and the other end connected to the pump to discharge air from the first chamber to the outside.

According to the present invention, since the pressure in the plurality of chambers can be adjusted using one pump, the particle measuring apparatus can be configured at a lower cost.

In addition, by using the valve unit it is possible to check the capacity of the pump suitable for the system optimized according to the environmental conditions of the connection target particle inflow can be connected to the pump optimized for the system.

1 is a conceptual diagram of an exhaust system of a particle composite property measuring apparatus for optimum flow rate control having a valve unit according to an embodiment of the present invention, and
2 to 6 is a conceptual view of the exhaust system particle particle size measuring apparatus for the optimum flow rate control according to the first to fifth embodiments of the present invention.

Hereinafter, with reference to the accompanying drawings an exhaust system of the particle composite properties measuring apparatus for controlling the optimum flow rate according to an embodiment of the present invention.

1 is a conceptual diagram of an exhaust system of a particle composite property measuring apparatus for optimum flow rate adjustment having a valve unit according to an embodiment of the present invention, and FIGS. 2 to 6 are views according to the first to fifth embodiments of the present invention. A conceptual diagram of an exhaust system of a particle composite characterization device for optimum flow rate control.

The particle complexity measuring apparatus exhaust system for controlling the optimum flow rate according to the present invention includes a particle collecting unit 10, a first chamber 20, a second chamber 30, a third chamber 40, and a pump 50 .

The particle focusing unit 10 is generally an aerosol (gas and particle mixing) focusing mechanism composed of an _{aerodynamic lens} or the like. The aerosol composed of gas and particles is _injected into the electron gun 32 To the center. The particle focusing unit 10 is generally composed of, but _{aerodynamic lens} (aerodynamic lens), not limited this, if the configuration capable of condensing the gas and particles at the same time, it is any thing or available. The gas and particles flowing through the particle focusing unit 10 can be accelerated toward the electron gun 32 through the nozzle 22 formed between the first and second chambers 20 and 30.

The first chamber 20 may have a connecting portion connected to the particle collecting unit 10 at one end thereof, and the inner pressure may be a medium vacuum (1 to 10 ^-3 Torr). According to an embodiment of the present invention, the pressure of the first chamber 20 may be maintained at 10 ^-3 Torr. In order to maintain a constant pressure inside the first chamber 20, a first pressure gauge 21 is installed in the first chamber 20 and flows into the first chamber 20 through the particle focusing unit 10. The first flow path 110 for discharging the gas may be connected to the pump 50.

As shown in FIG. 1, the first flow path 110 may be composed of first and second pipes 111 and 112 having a predetermined diameter. The first and second pipes 111 and 112 may be formed. Between the valve unit 60 may be installed. The valve unit 60 adjusts the flow rate of the gas discharged through the first and second pipes 111 and 112 to adjust the conductance inside the first and second chambers 20 and 30. I can regulate it. The valve unit 60 may be formed as an angle valve, but is not limited thereto and any valve capable of adjusting the flow rate may be used. The valve unit 60 may be manually opened or closed by an operator, or may be connected to a predetermined control unit so that the opening and closing operation may be controlled according to the internal pressure of the first and second chambers 20 and 30.

The second chamber 30 is connected to the first chamber 20 at one end and connected to the third chamber 30 at the other end and the inner pressure can be formed at a high vacuum of 10 ^-3 Torr to ^10-7 Torr have. The pressure inside the second chamber 30 is preferably 10 ^-5 Torr. A second pressure gauge 31 is installed in the second chamber 30 so as to maintain a constant pressure in the second chamber 30, and among the gases introduced through the particle focusing unit 10, The second flow path 120 for discharging the gas that has not been discharged from the first chamber 20 may be connected to the pump 50. The second chamber 30 may be provided with an electron gun 32 capable of charging a gas containing accelerated particles through the nozzle 22 until the gas is saturated.

The third chamber 40 may have an electrostatic deflector 42 installed therein. The electrostatic deflecting device 42 is for classifying the size of the particles. The electrostatic deflecting device 42 can transmit only a specific size of particles to a particle collecting unit (not shown) such as a Faraday cup by hanging a specific voltage on a load. The electrostatic deflecting device 42 can be configured so that the particle trajectory included in the aerosol flowing through the particle focusing unit 10 can be vertically changed, and generally has an angle of 45 degrees with respect to the entering direction of the charged particles . Therefore, the positive ions contained in the particles transferred to the particle collecting unit are transferred to the electrode provided on the back surface of the particle collecting unit, and the current value detected by the electrode can be measured by a predetermined meter.

The pump 50 is installed to form a vacuum state in the first and second chambers 20 and 30. As described above, the internal pressure of the first chamber 20 is 10 ^-3 Torr, And the gas introduced into each of the chambers 20 and 30 may be discharged to the outside of the chamber so that the pressure inside the second chamber 30 becomes 10 ^-5 Torr. At this time, since the particles of the aerosol flowing through the particle collecting unit are not affected by the pump 50 because the inertial force is larger than that of the gas, the gas is supplied to the first and second chambers 20 30). ≪ / RTI > On the other hand, in the past, the pump for forming the high vacuum of the first chamber 20 and the pump for forming the high vacuum of the second chamber 30 are separately installed, but the present invention is a pump for forming a high vacuum of the second chamber (30) It is characterized in that it is connected to the exhaust flow path 100 to perform the intermediate vacuum formation of the first chamber 20 by using.

According to an embodiment of the present invention, the pump 50 may be connected to the first and second chambers 20 and 30 and the discharge passage 100. The discharge passage 100 may be the first and second chambers. It may include a flow path (110, 120). According to an embodiment of the present invention, the pump 50 may be formed of any one of a diffusion pump, a turbomolecular pump, an adsorption pump, a low temperature cooling pump, an ion pump, a cryo pump, and a sublimation pump. The pump 50 is preferably operated at a constant speed.

Meanwhile, the first flow path 110 may be connected to the first chamber 20 and the second flow path 120 may be connected to the second chamber 30. The first and second flow paths 110 and 120 may have the same size or may be formed to have different diameters.

As described above, the valve unit 60 may be installed on the first flow path 110 to set the size of the pump 50 having a capacity suitable for the environmental conditions of the system 200 for measuring the particle size.

For example, the aerosol that has passed through the particle focusing unit 10 connected to the system 200 under a predetermined pressure condition may pass through the first flow path 110 such that the pressure inside the first chamber 20 may be 10 ⁻³ Torr. The gas forming the aerosol may be discharged to the outside of the first chamber 20. At this time, since the pump 50 is operated at a constant speed, when the valve unit 60 is opened 100%, the gas as much as the flow rate set in the pump 50 can be discharged to the outside of the first chamber 20 . If the capacity of the pump 50 is set too large, the internal pressure of the first chamber 20 may be lower than 10 ^-3 Torr when the valve unit 60 is opened 100% If the capacity of the first chamber 20 is insufficient, the internal pressure of the first chamber 20 may be higher than 10 ^-3 Torr even if the valve unit 60 is opened 100%. If the capacity of the pump 50 is excessive, the opening degree of the valve unit 60 may be adjusted to form the first flow path 110 at a flow rate at which the proper pressure is provided, and the capacity of the pump 50 may be insufficient. In this case, a larger capacity pump 50 may be replaced.

When the valve unit 60 is installed in such a manner, the capacity of the pump 50 suited to environmental conditions varying depending on the connected system is reversely calculated, ). In particular, when the internal air pressure of the system 200 is provided as a semiconductor process equipment operating at a low pressure lower than 760 Torr, the pump 50 has a capacity of 300 L / s lower than that of the existing 500 L / s. This is because the pressure of the first and second chambers 20 and 30 can be controlled sufficiently even if

As described above, once the capacity of the pump 50 optimized for the system 200 to be connected is set, it is no longer necessary to install the valve unit 60. Therefore, as shown in FIG. 2, the system for configuring the particle composite property measuring apparatus for optimum flow rate adjustment according to the first embodiment of the present invention may be configured with the valve unit 60 (see FIG. 1) removed. Can be. In this case, the diameters of the first and second flow paths 110 and 120 forming the discharge flow path 100 may also be formed in the same manner as described above, but the present invention is not limited thereto and may have different diameters as necessary. Can be formed.

According to the first embodiment of the present invention, as shown in Figure 2, the second flow path 120 is provided in a straight pipe shape, the second chamber 30 and the pump 50 may be connected in a straight line, The first flow path 110 is formed in a curved curved tube, and the first flow path 110 may be connected to one wall surface of the second flow path 120.

According to the second embodiment of the present invention, as shown in Figure 3, the first flow path 110 is provided in a straight pipe shape, the first chamber 20 and the pump 50 may be connected in a straight line, The second flow path 120 may be configured in the form of a curved curved tube, and the second flow path 120 may be connected to one wall surface of the first flow path 110.

According to the third embodiment of the present invention, as shown in FIG. 4, the first flow path 110 and the second flow path 120 are each formed in a curved curved tube shape, and both ends thereof may be connected to each other. A straight pipe 130 connected to the second flow paths 110 and 120 may be connected to the pump 50. In this case, the pump 50 may be disposed between the first and second chambers 20 and 30, in which case the lengths of the pipes of the first and second flow paths 110 and 120 may be the same. Can be.

According to the fourth embodiment of the present invention, as shown in FIG. 5, the pump 50 is directly connected to the second chamber 30 and connects the first and second chambers 20 and 30. A U-shaped exhaust passage 150 is formed below the nozzle 22 to connect the first and second chambers 20 and 30. On the other hand, the shape of the exhaust flow path 150 is not limited to the U-shape, the installation position is also a shape and position that can connect the first and second chambers 20, 30, such as the upper side rather than the lower side of the nozzle 22 Ramen can be varied. At this time, the pump 50 may be provided as a turbo pump, although not shown, an auxiliary pump for operating the turbo pump may be connected to the pump 50. In this case, the auxiliary pump may be provided as a rotary pump or a dry pump.

According to this configuration, the second chamber 30 may be the internal gas is discharged by the pump 50 directly connected, the gas inside the first chamber 20 is the second chamber through the exhaust flow path 150 It may be discharged to the outside through the pump 50 via the (30).

According to the fifth embodiment of the present invention, as shown in FIG. 6, the pump 50 is directly connected to the second chamber 30 to discharge the gas inside the second chamber 30, and the first The chamber 20 may be connected to the pump 50 through the exhaust passage 160 to discharge the gas inside the first chamber 20 to the outside. At this time, although not shown, when the pump 50 is provided as a turbo pump, an auxiliary pump provided as a rotary pump or a dry pump for its operation may be further installed, wherein the exhaust passage 160 is the auxiliary pump. It can also be connected to. Therefore, the gas of the first chamber 20 may be discharged to the outside by using an auxiliary pump, or when the auxiliary pump is not used, the first chamber may be operated by the operation of the pump 50 connected to the exhaust passage 160. 20) Internal gas can be discharged to the outside.

According to the fourth and fifth embodiments described above, since the pump 50 is directly connected to the second chamber 30, the volume for piping configuration can be reduced, and the pump 50 in the second chamber 30 can be reduced. Is directly connected, the pump operating efficiency can be improved because the distance between the pump 50 and the second chamber 30 is closer.

According to the present invention as described above, since the first and second chambers 20 and 30 can be pressure-controlled to have different pressures by using one pump 50, a plurality of pumps are used as before. It is possible to reduce the manufacturing cost than the particle composite properties measuring apparatus.

In addition, by installing the valve unit 60 in any one of the first and second flow paths 110, 120 formed between the first and second chambers 20, 30 and the pump 50, When the exhaust gas system is configured, the capacity of the pump 50 can be adjusted according to the environmental conditions of the system 200 to be connected, so that the pump 50 has a capacity. It is possible to configure the device at a lower cost by reducing the waste of parts costs that can be caused by being set too large.

In addition, as in the fourth and fifth embodiments, when directly connecting the pump 50 provided as a turbo pump to the second chamber 30, the distance between the second chamber 30 and the pump 50 is closer to each other. In addition, the pump efficiency can be improved, and the installation space can be saved, and the device can be miniaturized.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

10; A particle focusing unit 20; The first chamber
21; A first pressure gauge 30; The second chamber
31; A second pressure gauge 32; Electron gun
40; A third chamber 42; Electrostatic deflection device
50; Pump 60; Valve unit
100,150, 160; Outlet flow path 110; The first euros
120; Second flow path 200; system

Claims (12)

A particle focusing unit including an aerodynamic lens;
A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit;
A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr;
A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto; And
And a pump connected to the first and second chambers through an exhaust passage to discharge gas inside the first and second chambers to the outside.
The exhaust passage
A first flow passage formed at a curved curved pipe having one end connected to the first chamber and the other end connected to the pump; And
And a second flow path having one end connected to the second chamber and the other end formed into a straight pipe connected to the pump.
The first flow path is connected to the sidewall of the second flow path,
And the pump is disposed under the second chamber.
The method of claim 1,
Particle composite characteristics measuring apparatus exhaust system for the optimum flow rate control is installed in the first and second chambers the first and second pressure gauge.
delete The method of claim 1, wherein the first flow path,
A first pipe, one end of which is connected to the first chamber;
A second pipe, one end of which is connected to the second flow path; And
And a valve member interposed between the first and second pipes.
The other end of the first pipe and the second pipe is connected to the valve member, the particle composite characteristics measuring apparatus exhaust system for the optimum flow rate adjustment is formed through the connection of the first and second pipe.
delete delete The method of claim 1,
The second flow path is formed of a curved curved pipe, the first flow path is formed of a straight pipe, the second flow path is connected to the side wall of the first flow path,
And the pump is disposed under the first chamber.
The method of claim 1,
The first and second flow paths are formed as bent curved pipes, each end of which is connected to each other,
A third flow passage, which is a straight pipe, is connected at one end to the first and second flow paths, and the other end thereof is connected to the pump;
And said pump is disposed in the middle of said first and second chambers.
The method of claim 1,
And said first and second flow paths are exhaust system of a particle composite property measuring apparatus for optimum flow rate control in which pipes constituting the flow path have the same diameter.
The method of claim 1,
And the diameters of the pipes constituting the first flow path are larger than the diameters of the pipes constituting the second flow path.
A particle focusing unit including an aerodynamic lens;
A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit;
A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr;
A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto;
An exhaust passage connecting the first and second chambers; And
Particles directly connected to the second chamber, at least one pump for indirectly discharging the gas of the first chamber through the exhaust passage and directly discharging the air of the second chamber. Composite Characteristic Exhaust System.
A particle focusing unit including an aerodynamic lens;
A first chamber connected to the particle focusing unit at one end, the inner pressure being controlled by a medium vacuum (1 to 10 ^-3 Torr), and a nozzle formed at the other end to accelerate the particles introduced through the particle focusing unit;
A second chamber having an end connected to a nozzle of the first chamber and having an electron gun for charging accelerated particles in the first chamber while controlling an internal pressure at a high vacuum of 10 ^-3 to 10 ^-7 Torr;
A third chamber having one end connected to the second chamber and having an electrostatic deflecting device for classifying only particles of a specific size among particles charged from the electron gun to a saturated state by applying a specific voltage thereto;
At least one pump connected directly to the second chamber and provided as a turbo pump for directly discharging air of the second chamber; And
One end is connected to the first chamber, the other end is connected to the pump exhaust passage for discharging the air of the first chamber to the outside; Particle composite characteristics measuring apparatus exhaust system for optimum flow control comprising a.

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