KR101374114B1 - Backdraft damper of fan filter unit and mathod for manufacturing the same - Google Patents

Abstract

The present invention provides a backflow prevention damper of a fan filter unit and a method for assembling the same, by applying a backflow prevention damper to a fan filter unit to prevent backflow generation and to suppress the formation of backflow in a clean room to reduce manufacturing defects of the image display device. The present invention relates to a case in which a bottom surface is opened while an inner space is secured in a circular or polygonal box shape; A plurality of air inlets formed on an upper surface and at least one side of the case; It is attached to any one side of each air inlet, characterized in that provided with opening and closing shutters to open and close the respective air inlet in accordance with the air flow direction of each air inlet.

Description

BACKDRAFT DAMPER OF FAN FILTER UNIT AND MATHOD FOR MANUFACTURING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fan filter unit in a clean room used in the manufacture of an image display device. The present invention provides a fan filter unit by applying a backflow prevention damper to prevent backflow and suppress the formation of backflow in a clean room. The present invention relates to a non-return damper of a fan filter unit and a method of assembling the same, to reduce defects.

Recently, a liquid crystal display, a field emission display, a plasma display panel, and an organic light emitting diode display are used as various flat image display devices. ) Is emerging.

In order to manufacture flat panel image displays, a thin film deposition process for depositing a thin film on a glass or wafer (hereinafter referred to as a substrate), a photolithography process for exposing or hiding selected areas using photosensitive materials, and removing selected areas Etching to pattern, cleaning process to clean the substrate and the like are performed.

The clean room in which the fan filter unit is formed may be used for lines such as depositing a thin film or performing a photolithography process among the process lines of the substrate. The fan filter unit is to supply clean air to prevent foreign matter from occurring in the clean room. The fan filter unit rotates a fan by operating its own motor by external power to supply clean air to the inside of the clean room.

However, since the fan filter unit does not have a function to stop the fan when external power or power is cut off, there is a problem that a back flow occurs due to the differential pressure inside and outside the clean room when power or power is cut off, and the motor or the fan is reversed. Will occur. In particular, the lack of a reverse rotation of the motor or the fan is a cause for accelerating the reverse flow occurs.

Recently, a technology has been developed to prevent the motor from rotating in reverse by using a motor with a self-powering function. However, since the amount of power generation is small and the backflow phenomenon is not greatly reduced, it is difficult to see the effect of preventing backflow. . Therefore, at the present time, when the stationary state of the fan filter unit is detected, an on-site person moves to the site, and the upper part of the fan filter unit is sealed by using a vinyl or a corresponding tool to prevent backflow. However, since the backflow is continuously generated during the time required for moving to the site and during the work on the site, damage to the poor substrate production due to foreign matter in the clean room may occur for several minutes to several hours.

The present invention is to solve the above problems, by applying a backflow prevention damper to the fan filter unit of the clean room used in the manufacture of the image display device to prevent the backflow generation and suppress the formation of backflow in the clean room, SUMMARY OF THE INVENTION An object of the present invention is to provide a backflow prevention damper of a fan filter unit and a method of assembling the same to reduce manufacturing defects of a display device.

Backflow prevention damper of the fan filter unit according to an embodiment of the present invention for achieving the above object is a case in which the bottom is open while the inner space is secured in the form of a box of a circular or polygonal; A plurality of air inlets formed on an upper surface and at least one side of the case; It is attached to any one side of each air inlet, characterized in that provided with opening and closing shutters to open and close the respective air inlet in accordance with the air flow direction of each air inlet.

The inner surface of the case of the backflow prevention damper limits the opening and closing range of each of the opening and closing shutters, and each of the opening and closing shutters are characterized in that the bracket for preventing excessive folding or contact with the surrounding structure.

Each of the opening and closing shutters corresponds to a shape of each air inlet, and is formed to have a size to block the air inlet, and attaches one side of the sheet to one side of the air inlet by at least one rivet. And at least one fixing member attached to the seat fastening portion to be fixed and to a part of the edge and the center of the sheet, the at least one fixing member spaced apart from the seat fastening portion.

The at least one fixing member maintains the sheet shape, and the portion between the sheet fastening portion and the seat fastening portion is foldable by a distance spaced from the seat fastening portion, so that the at least one fixing member may be opened and closed as a whole.

The backflow prevention damper may be assembled by a bolt or a fastening member on the front surface of the air inlet so as to cover the air inlet of the fan filter unit.

In addition, the method for assembling the backflow prevention damper of the fan filter unit according to the embodiment of the present invention for achieving the above object is the upper surface and at least one of the case is open at the bottom while the inner space is secured in the form of a box of a circular or polygonal Forming a plurality of air inlets on the side; Attaching opening and closing shutters to one side of each of the air inlets to open and close the air inlets according to the air flow direction of the respective air inlets; And assembling the case with a bolt or a fastening member on the front surface of the air inlet so as to cover the air inlet of the fan filter unit.

Restricting the opening and closing range of each of the opening and closing shutters on the inner surface of the case of the non-return damper, and further comprising a bracket for preventing each of the opening and closing shutters to be excessively folded in the opposite direction or to prevent contact with the surrounding structure do.

Each of the opening and closing shutters corresponds to a shape of each air inlet, and is formed to have a size to block the air inlet, and attaches one side of the sheet to one side of the air inlet by at least one rivet. And at least one fixing member attached to a seat fastening portion to be fixed and a portion of an edge and a center of the sheet to be spaced apart from the seat fastening portion.

The at least one fixing member maintains the sheet shape, and the portion between the sheet fastening portion and the seat fastening portion is foldable by a distance spaced from the seat fastening portion, so that the at least one fixing member may be opened and closed as a whole.

The backflow prevention damper of the fan filter unit and the assembly method thereof according to an embodiment of the present invention having the various technical features as described above by applying a backflow prevention damper to the fan filter unit of the clean room to quickly reverse the flow of external power and power. Blocking and backflow can be prevented. Therefore, even when the external power or power is cut off abruptly, it is possible to reduce backflow formation in the clean room, thereby reducing manufacturing defects of the image display device.

1 is a schematic diagram showing a clean room equipped with a fan filter unit according to an embodiment of the present invention.
Figure 2 is an exploded perspective view of the fan filter unit and the backflow prevention damper according to an embodiment of the present invention.
3 shows a non-return damper assembled in a fan filter unit.
4A and 4B are perspective views illustrating the backflow damper of FIGS. 2 and 3 in detail.
5A and 5B are views for explaining the operation of the backflow prevention damper according to the driving of the fan filter unit.
6 is a perspective view specifically showing the opening and closing shutter shown in FIGS. 4A and 4B.
7 is an exploded perspective view of the opening and closing shutter shown in FIG. 6.

Hereinafter, a backflow prevention damper of a fan filter unit and an assembly method thereof according to an embodiment of the present invention having the above characteristics will be described in detail with reference to the accompanying drawings.

1 is a block diagram schematically showing a clean room equipped with a fan filter unit according to an exemplary embodiment of the present invention. 2 is an exploded perspective view of the fan filter unit and the backflow prevention damper according to the embodiment of the present invention, and FIG. 3 is a view illustrating the backflow prevention damper assembled in the fan filter unit.

The clean room CR in which the fan filter unit 10 is formed may be used in process lines such as depositing a thin film or performing a photolithography process among the process lines of the substrate.

The fan filter unit 10 is to supply clean air to prevent foreign matter from occurring in the clean room CR. The fan filter unit 10 rotates the fan by operating its own motor by external power DC to clean the air. Is fed into the interior of the clean room.

As illustrated in FIG. 1, the fan filter unit 10 may be installed at an upper portion of the clean room CR, and the differential pressure may be generated between the inside and the outside of the clean room CR because the fan filter unit 10 supplies the clean air to the inside of the clean room. do. At this time, since the inside of the clean room is maintained at a positive pressure while the outside of the clean room has a relatively negative pressure, air is not moved from the inside of the clean room (CR) to the outside due to the pressure difference when the fan filter unit 10 is stopped. Must be blocked

2 and 3, the backflow prevention damper 20 is coupled to the front surface of the air inlet to cover the air inlet of the fan filter unit 10. Therefore, when clean air is introduced into the fan filter unit 10, clean air flows into the air inlet of the fan filter unit 10 through the backflow prevention damper.

The non-return damper 20 may be combined instead of the inlet protection cover of the fan filter unit 10. Accordingly, the backflow prevention damper 20 may be more easily installed by using a fastening member such as a bolt to the fastening portion to which the inlet protection cover is fastened.

4A and 4B are perspective views illustrating the backflow damper of FIGS. 2 and 3 in detail.

4A and 4B, the backflow prevention damper 20 includes a case 21 in which a bottom surface is opened while the inner space is secured in a box of a circular or polygonal shape; A plurality of air inlets 22 formed on an upper surface and at least one side of the case 21; Each opening and closing shutter 30 is attached to one side of the air inlet 22 to open and close the air inlet 22 according to the air flow direction of the air inlet 22. Here, the inner surface of the case 21 of the backflow prevention damper 20 limits the opening and closing range of the opening and closing shutters 30, and further includes a bracket for preventing the opening and closing shutters 30 from being excessively folded or coming into contact with the surrounding structure. Sometimes.

The non-return damper 20 configured as described above allows the opening and closing shutters 30 to be formed at the upper and side air inlets 22 of the case 21, respectively, so that the opening and closing shutters 30 are normally operated during the fan filter unit 10. ) Open to facilitate air inflow. On the contrary, when the fan filter unit 10 is stopped, the open / close shutters 30 are closed to block backflow.

The case 21 may be formed in the shape of a polygonal box such as a cylinder or a rectangle. The case 21 may be formed of a metal material such as zinc plated tin or stainless steel, or a material such as plastic. In general, the case 21 may be formed of the same material as the case of the fan filter unit 10.

The air inlets 22 of the case 21 may be formed in plural on the top and side surfaces of the case 21, for example, 12 may be formed on the top surface and 8 may be formed on the side surface. Opening and closing shutters 30 are attached to one side of each air inlet 22, and the opening and closing shutters 30 are opened during normal operation of the fan filter unit 10, and when the fan filter unit 10 is stopped. The opening and closing shutters 30 are closed. In this case, in order to prevent the opening and closing shutters 30 from being folded in the opposite direction or contacting the surrounding structure, a bracket is formed on the inner surface of the case 21 in the folding direction of the opening and closing shutters 30. Each of the opening and closing shutters 30 is limited to the range folded by the bracket.

5A and 5B are views for explaining the operation of the backflow prevention damper according to the driving of the fan filter unit.

As shown in FIG. 5A, when the fan filter unit 10 operates normally, clean air from the outside is supplied to the fan filter unit 10 through the air inlets 22 of the backflow prevention damper 20. In this case, the opening and closing shutters 30 of each air inlet 22 are opened in the air inlet direction of the fan filter unit 10 according to the moving direction of the clean air. Each of the opening and closing shutters 30 is limited to the folding range by the brackets 31 attached to the inner surface of the case 21.

On the other hand, when the fan filter unit 10 is stopped as shown in FIG. 5B, clean air inside the clean room CR is moved toward the backflow prevention damper 20 through the fan filter unit 10. At this time, the opening and closing shutters 30 of each air inlet 22 are opened in the direction of each air inlet 22 by the resistance of the clean air, thereby blocking each air inlet 22. Therefore, the flow of air inside the backflow prevention damper 20 and the inside of the fan filter unit 10 are stopped and the backflow of air in the clean room CR is prevented.

6 is a perspective view illustrating in detail the opening and closing shutters illustrated in FIGS. 4A and 4B, and FIG. 7 is an exploded perspective view of the opening and closing shutter illustrated in FIG. 6.

Each of the opening and closing shutters 30 illustrated in FIGS. 6 and 7 corresponds to the shape of each air inlet 22, but is formed to have a size to block the air inlet 22, and at least one rivet ( a seat fastening portion 35 for attaching and fixing one side of the seat 33 to one side of the air inlet 22 by rivets, and an edge of the seat 33 so that the shape of the seat 33 is maintained. At least one fixing member (32, 34) is attached to the central portion but formed to be spaced apart from the seat fastening portion (35).

At least one fixing member (32, 34) is attached to at least one of the front and rear surfaces of the seat (33) formed to have a size that can block the air inlet (22). The at least one fixing member 32 and 34 maintains the shape of the seat 33 so that the shape of the seat 33 is not deformed by the flowing clean air, and the shape is spaced apart from the seat fastening part 35. This holding sheet portion is allowed to flow. That is, the portion of the sheet 33 between the seat fastening portion 35 and the at least one fixing member 32 and 34 becomes foldable, thereby acting as an open / close shutter 30 as a whole.

Vinyl resin or vinyl fiber may be used as the sheet 33 of the opening and closing shutter 30. A plurality of holes are formed at one side of the seat 33 to correspond to the seat fastening part 35, and are fixed to the air inlet 22 side by at least one rivet.

Since the sheet 33 is formed with a thin thickness of 0.5T, the edges or the central portion of the front and rear surfaces of the sheet 33 are fixed with at least one fixing member 32 and 34 to suppress vibration caused by the flow of clean air. . Here, the at least one fixing member 32, 34 is made of a metallic material such as aluminum.

On the other hand, when the opening and closing shutter 30 is closed due to the backflow phenomenon, the seat 33 moves to the left and right, and closes at an instant so that the bracket 31 of the case 21 is supported so that the direction of the opening and closing shutter 30 is not closed in reverse. do. Such a bracket 31 limits the opening range when the opening and closing shutters 30 are opened in the air inlet direction of the fan filter unit 10 even when the fan filter unit 10 operates normally.

The opening and closing shutters 30 formed on the side air inlet 22 of the case 21 are also configured in the same manner as the opening and closing shutters 30 of the upper surface, and the opening and closing shutters 30 are installed only on the upper surface of the case 21. If so, the loss due to the resistance during the air inflow is large, it is possible to smooth the inflow of air by applying the opening and closing shutters 30 on the side.

As described above, the backflow prevention damper of the fan filter unit and the assembly method thereof according to the exemplary embodiment of the present invention may be configured by applying the backflow prevention damper 20 to the fan filter unit 10 of the clean room CR. When the power is cut off, it is possible to prevent the reverse flow and the occurrence of the reverse flow quickly. As a result, the formation of backflow in the clean room CR can be suppressed even when a sudden external power or power is cut off, thereby reducing manufacturing defects of an image display device.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. Will be clear to those who have knowledge of.

CR: Clean Room DC: External Power
10: fan filter unit 20: backflow prevention damper
21: Case 22: Air Inlet
30: opening and closing unit 31: bracket
33: seat 35: seat fastening
32, 34: fixing member

Claims (9)

A case in which the bottom is opened while the inner space is secured in a circular or polygonal box shape;
A plurality of air inlets formed on an upper surface and at least one side of the case;
Attached to any one side of each air inlet is provided with opening and closing shutters to open and close the respective air inlet in accordance with the air flow direction of each air inlet,
Each of the opening and closing shutters
Corresponding to the shape of each air inlet, but formed of a size that can block the air inlet,
A seat fastening part for attaching and fixing one side of the seat to one side of the air inlet by at least one rivet, and
And at least one fixing member attached to an edge portion and a central portion of the sheet, the at least one fixing member formed to be spaced apart from the seat fastening portion. The method of claim 1,
The inner surface of the case of the non-return damper
Limiting the opening and closing range of each of the opening and closing shutters, the reverse flow prevention damper of the fan filter unit, characterized in that a bracket for preventing each of the opening and closing shutters excessively folded in contact with the surrounding structure is further formed. delete 3. The method of claim 2,
The at least one fixing member
The backflow prevention damper of the fan filter unit, which maintains the sheet shape and allows the portion between the seat fastening portion to be folded by the spaced apart from the seat fastening portion to be opened and closed. The method of claim 1,
The backflow prevention damper
Backflow prevention damper of the fan filter unit, characterized in that assembled by the bolt or fastening member on the front of the air inlet to cover the air inlet of the fan filter unit. Forming a plurality of air inlets on an upper surface and at least one side of the case where the bottom surface is opened while the inner space is secured in a circular or polygonal box shape;
Attaching opening and closing shutters to one side of each of the air inlets to open and close the air inlets according to the air flow direction of the respective air inlets; And
Assembling the case with bolts or fastening members on the front of the air inlet to cover the air inlet of the fan filter unit,
Each of the opening and closing shutters
Corresponding to the shape of each air inlet, but formed of a size that can block the air inlet,
A seat fastening part for attaching and fixing one side of the seat to one side of the air inlet by at least one rivet, and
And at least one fixing member attached to an edge portion of the sheet and a central portion thereof and spaced apart from the seat fastening portion. The method according to claim 6,
The inner surface of the case of the non-return damper
Limiting the opening and closing range of each of the opening and closing shutters, and further comprising the step of forming a bracket for preventing each of the opening and closing shutters from excessively folded in the opposite direction or contact with the surrounding structure. Assembly method. delete The method of claim 7, wherein
The at least one fixing member
A method of assembling a backflow prevention damper of a fan filter unit, wherein the fan filter unit maintains the sheet shape and is configured to be opened and closed as a part between the seat fastening portion and the seat fastening portion by a spaced distance from the seat fastening portion.

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