KR101372308B1 - Multyaxial force/torque sensor - Google Patents

Abstract

The present invention, the central block receiving the force and torque; First and second horizontal radiation blocks extending from both side surfaces of the central block in a predetermined direction (X-axis direction), respectively; A first longitudinal radiation block and a second longitudinal radiation block respectively extending in directions perpendicular to the X-axis direction (Y-axis direction) from two opposite sides of the central block; A first strain generator having a rear portion and a thin portion and provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block; And a second strain generator provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block to be located between the central block and the first strain generator. Provides multi-axis force / torque sensor.

Description

Multi-Axis Force / Torque Sensors {MULTYAXIAL FORCE / TORQUE SENSOR}

The present invention relates to a multiaxial force / torque sensor, and more particularly, to a multiaxial force / torque sensor capable of measuring both force in various directions and torques in various directions using an elastic body and a strain gauge attached thereto.

Recently, robots are being used for tasks such as assembly, polishing, and deburring in accordance with the trend of productivity improvement and factory automation. In addition, as the field of application of the robot expands, the functions required for the robot are also diversified. Accordingly, the necessity of precisely measuring force and torque in various directions in addition to the position control of the robot is increasing.

Forces and torques act in any direction in three-dimensional space. Therefore, when a degree of freedom force / torque sensor is used, a large number of sensors are required. However, it is not preferable to use a large number of sensors because of space constraints. Therefore, a six-axis force / torque sensor that can measure three directions of torque and three directions of torque at the same time is used.

The 6-axis force / torque sensor is a sensor that can measure both force in three directions and torque in three directions. It uses strain gauges to measure the degree of deformation of an elastic body, a method using piezoelectric elements, and a stuart platform mechanism. Can be classified.

In general, a strain gage type 6-axis force / torque sensor includes a load transmission block located at the center, a radiation block extending radially from the load transmission block, an outer block provided at an end of the radiation block, and connected to the outer block. It includes a fixed block. In addition, the radiation block and the outer block is provided with a strain generator that is a mounting portion of the strain gauge.

Korean Patent Nos. 0753755 and 0760123 disclose a strain gauge type 6-axis force / torque sensor. Each of the radiation block and the outer block of the above Korean Patent Registration is provided with a strain generator. Specifically, the radial block is provided with a strain generator in the form of a horizontally spaced parallel flat beam and a vertical spaced parallel plate beam, and the outer block is provided with a strain generator in the form of a horizontal spaced parallel flat beam.

Meanwhile, the field of application of multi-axis force / torque sensors continues to expand. In addition, the consumer demands a variety of rated capacities for each of the three-axis forces and the three-axis torques of the multi-axis force / torque sensor. Therefore, today's multi-axis force / torque sensors must be designed to easily meet the various needs of the consumer for the rated capacity of each force and torque. However, according to the technology disclosed in the Korean patents, there is a problem that does not satisfy the various needs of these consumers.

Korean Registered Patent No. 0755755

Korean Registered Patent No. 0760123

It is an object of the present invention to provide a multi-axis force / torque sensor that can easily meet the various needs of the consumer for the rated capacity of forces and torques in various directions.

The present invention to achieve the object as described above, the central block receiving the force and torque; First and second horizontal radiation blocks extending from both side surfaces of the central block in a predetermined direction (X-axis direction), respectively; A first longitudinal radiation block and a second longitudinal radiation block respectively extending in directions perpendicular to the X-axis direction (Y-axis direction) from two opposite sides of the central block; A first strain generator having a rear portion and a thin portion and provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block; And a second strain generator provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block to be located between the central block and the first strain generator. Provides multi-axis force / torque sensor.

The first strain generating unit, the vertically spaced double stair beams provided in the first longitudinal radiation block and the second longitudinal radiation block by a horizontal groove of the iron (凸) shape drilled in the X-axis direction; And vertically spaced double stair beams provided in the first horizontal radiation block and the second horizontal radiation block by iron-shaped horizontal grooves drilled in the Y-axis direction.

In contrast, the first strain generating unit is a vertically spaced double tapered beam provided in the first longitudinal radiation block and the second longitudinal radiation block by a horizontal groove of the tapered shape drilled in the X-axis direction; And vertically spaced double tapered beams provided in the first horizontal radiation block and the second horizontal radiation block by tapered horizontal grooves drilled in the Y-axis direction.

The second strain generator is a horizontally spaced double stair beam provided by iron-shaped vertical grooves drilled in a direction perpendicular to the XY plane (Z-axis direction), or a single stair beam or inclined outer surface having a stepped outer surface. It is provided in the form of a horizontally spaced double taper beam or a single flat beam provided by a vertical tapered groove formed in a single taper beam or a direction perpendicular to the XY plane (Z-axis direction).

The multi-axis force / torque sensor may include: a first type outer block and a second type outer block respectively provided at ends of the first horizontal radiation block and the second horizontal radiation block so as to extend along the Y axis direction; A first transverse outer block and a second transverse outer block respectively provided at ends of the first longitudinal radiation block and the second longitudinal radiation block so as to extend along an X axis direction; A third strain generator provided in the first type outer block and the second type outer block; And a fourth strain generator provided in the first horizontal outer block and the second horizontal outer block.

The third strain generating portion and the fourth strain generating portion are provided in the form of a parallel plate beam formed by a single flat beam or a vertical groove, and the rear portion of the first strain generating portion and the second strain generating portion is more in the center block than the thin portion. It is located close.

The multi-axis force / torque sensor may include a plurality of X-axis force sensing strain gauges attached to the thin portion of the second strain generator or the third strain generator provided in the first longitudinal radiation block and the second longitudinal radiation block; A plurality of Y-axis force sensing strain gauges attached to the thin portion of the second strain generator or the fourth strain generator provided in the first horizontal radiation block and the second horizontal radiation block; A plurality of Z-axis torque detection is attached to the rear of the second strain generating unit provided in the first and second horizontal radiation block or the second strain generating unit provided in the first longitudinal radiation block and the second longitudinal radiation block. Strain gauge for; A plurality of Y-axis torque sensing strain gauges attached to a rear portion of the first strain generator provided in the first and second horizontal radiation blocks; A plurality of X-axis torque sensing strain gauges attached to the rear of the first strain generator provided in the first longitudinal radiation block and the second longitudinal radiation block; And a plurality of Z-axis forces attached to a thin portion of the first strain generating portion provided in the first longitudinal radiation block and the second longitudinal radiating block, or a thin portion of the first strain generating portion provided in the first transverse radiation block and the second transverse radiation block. Sensing strain gauge; includes.

When the second strain generator is provided in the form of a single flat beam, the multi-axis force / torque sensor is different from the above, the second strain generator or the third strain generator of the first longitudinal radiation block and the second longitudinal radiation block. A plurality of X-axis force sensing strain gauges attached thereto; A plurality of Y-axis force sensing strain gauges attached to the second strain generating unit or the fourth strain generating unit of the first horizontal radiation block and the second horizontal radiation block; A plurality of Z-axis torque sensing strain gauges attached to a second strain generator of the first and second lateral radiation blocks or to a second strain generator of the first and second longitudinal radiation blocks; A plurality of Y-axis torque sensing strain gauges attached to a rear portion of the first strain generator provided in the first and second horizontal radiation blocks; A plurality of X-axis torque sensing strain gauges attached to the rear of the first strain generator provided in the first longitudinal radiation block and the second longitudinal radiation block; And a plurality of Z-axis forces attached to a thin portion of the first strain generating portion provided in the first longitudinal radiation block and the second longitudinal radiating block, or a thin portion of the first strain generating portion provided in the first transverse radiation block and the second transverse radiation block. Sensing strain gauge; includes.

In the present invention, the first strain generating portion and / or the second strain generating portion has a rear portion and a thin portion, and strain gauges are attached to the rear portion and the thin portion. In addition, through the adjustment of the geometric parameters of the rear part and the thin part, the rated capacity of each of the various directions of forces and torques may be different. Thus, the present invention can easily meet the various demands of the consumer for the rated capacity of various directional forces and torques.

In addition, in the present invention, the third strain generator and the fourth strain generator is further provided. Therefore, according to the present invention, not only the demands of more diverse consumers for the rated capacity can be satisfied, but also the mutual interference rate between the ships and the torques can be maintained at a low level.

1 is a perspective view showing a first embodiment of a multi-axis force / torque sensor according to the present invention.
2 is a plan view of Fig.
3 is a cross-sectional view taken along line A-A 'in Fig.
4 is a cross-sectional view taken along line BB ′ of FIG. 2.
5 is a modification of FIG.
6 is a perspective view showing a second embodiment of the multi-axis force / torque sensor according to the present invention.
FIG. 7 is a plan view of FIG. 6.
8 is a perspective view showing a third embodiment of the multi-axis force / torque sensor according to the present invention.
Fig. 9 is a plan view of Fig. 8. Fig.
10 is a perspective view showing a fourth embodiment of the multi-axis force / torque sensor according to the present invention.
11 is a plan view of Fig.
12 is a perspective view showing a fifth embodiment of the multi-axis force / torque sensor according to the present invention.
FIG. 13 is a plan view of FIG. 12.
14 is a perspective view showing a second embodiment of the multi-axis force / torque sensor according to the present invention.
Fig. 15 is a plan view of Fig. 14. Fig.

Hereinafter, preferred embodiments of the multi-axis force / torque sensor according to the present invention will be described in detail with reference to the drawings. It is to be understood that the terminology or words used herein are not to be construed in an ordinary sense or a dictionary, and that the inventor can properly define the concept of a term to describe its invention in the best possible way And should be construed in accordance with the meaning and concept consistent with the technical idea of the present invention.

≪ Embodiment 1 >

The first embodiment 100 of the present invention takes the form of a central block 110, radial blocks, outer blocks, and circular arcs that receive force and torque from the outside as shown in Figures 1 to 4 While it includes a fixed block 200 for connecting the outer blocks.

The radiation blocks are blocks extending radially from the central block 110, and the first horizontal radiation block 120 and the second horizontal block extending from both sides of the central block 110 in a predetermined direction (X-axis direction), respectively. Radiating block 130 and the first longitudinal radiation block 140 and the second longitudinal radiation block 150 extending in a direction perpendicular to the X-axis direction (Y-axis direction) from the other two sides of the central block 110 It includes.

The radiation blocks are provided with a first strain generator. In the present embodiment, the first strain generator is provided in the form of vertically spaced double staircases 122, 132, 142, and 152. The vertically spaced double stairways 122 and 132 provided in each of the lateral blocks 120 and 130 are spaced apart in the Z-axis direction due to the horizontal groove of the iron shape drilled in the Y-axis direction. The vertically spaced double stairways 122 and 132 provided in each of the longitudinal radiation blocks 140 and 150 are spaced apart in the Z-axis direction due to the horizontal groove of the iron shape drilled in the X-axis direction. Meanwhile, the rear portion (thick portion) of the vertically spaced double staircases 122, 132, 142 and 152 is located closer to the central block 110 than the thin portion (thin portion).

The vertically spaced double stair beams 122, 132, 142, and 152 formed as described above are deformed by the X-axis torque, the Y-axis torque, and the Z-axis force. Therefore, four strain gauges for detecting X-axis torque (S_tx1, S_tx2, S_tx3, S_tx4) for detecting magnitude of torque in the X axis, and four strain gauges for detecting Y-axis torque for detecting magnitude in Y-axis torque (S_ty1, S_ty2, S_ty3, S_ty4) and four Z-axis force sensing strain gauges S_fz1, S_fz2, S_fz3, and S_fz4 for detecting the magnitude of the Z-axis force, with respect to the center point of the center block 110. It is attached to the vertically spaced double stair beams (122. 132. 142. 152) to achieve point symmetry.

More specifically, the X-axis torque sensing strain gauges (S_tx1, S_tx2, S_tx3, S_tx4) is attached to the rear upper and lower surfaces of the vertically spaced double stairs (142, 152) provided in the longitudinal radiation blocks (140, 150), Strain gauges S_ty1, S_ty2, S_ty3, and S_ty4 for Y-axis torque sensing are attached to the rear upper and lower surfaces of the vertically spaced double stairways 122 and 132 provided in the lateral blocks 120 and 130. The strain gages S_fz1, S_fz2, S_fz3, and S_fz4 for detecting Z-axis force are thin top, bottom, or horizontal radiating blocks 120 of the vertically spaced double stairways 142 and 152 provided in the longitudinal radiating blocks 140 and 150. And attached to upper and lower surfaces of the thin portions of the vertically spaced double staircases 122 and 132 provided at 130.

The radiation blocks are also provided with a second strain generator. The second strain generator is positioned between the central block 110 and the first strain generator, and is provided in the form of horizontally spaced double stairways 124, 134, 144, and 154. The horizontally spaced double stair beams 124, 134, 144, and 154 are spaced apart in the X-axis or Y-axis direction due to the vertical grooves of the iron shape drilled in the Z-axis direction. Meanwhile, the rear part (thick part) of the horizontal spaced double stair beams 124, 134, 144 and 154 is located closer to the central block 110 than the thin part (thin part).

The horizontally spaced double stair beams 124, 134, 144, and 154 formed as described above are deformed by an X-axis force, a Y-axis force, and a Z-axis torque. Therefore, four X-axis force sensing strain gauges for detecting the magnitude of the X-axis force (S_fx1, S_fx2, S_fx3, S_fx4) and four Y-axis force sensing strain gauges for detecting the magnitude of the Y-axis force (S_fy1, S_fy2, S_fy3, S_fy4) and four Z-axis torque sensing strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for detecting the magnitude of the torque in the Z-axis are with respect to the center point of the center block 110. Attached to the horizontally spaced double stair beams 124, 134, 144, 154 to achieve point symmetry.

More specifically, the X-axis force sensing strain gauges (S_fx1, S_fx2, S_fx3, S_fx4) is attached to the thin left and right sides of the horizontally spaced double staircases (144, 154) provided in the longitudinal radiation blocks (140, 150) Strain gauges S_fy1, S_fy2, S_fy3, and S_fy4 for Y-axis force sensing are attached to thin left and right sides of horizontally spaced double stairways 124 and 134 provided in the lateral blocks 120 and 130. The strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for Z-axis torque sensing may include rear left, right, or longitudinal radiating blocks of horizontally spaced double stairways 124 and 134 provided in the lateral blocks 120 and 130. It is attached to the rear left and right sides of the horizontal spaced double stair beams (144, 154) provided in 140, 150.

In the multiaxial force / torque sensor 100 described above, the first strain generating portion and the second strain generating portion have a rear portion and a thin portion, and strain gauges are attached to the rear portion and the thin portion. Therefore, if the geometrical parameters (thickness, length, etc.) of the rear and thin sections are appropriately selected, the rated capacity of each of the triaxial forces and the triaxial torques of the multiaxial force / torque sensor 100 may be different. And because of this the multi-axis force / torque sensor 100 can easily meet the various needs of the consumer for the rated capacity of each force and torque.

On the other hand, the first strain generating unit and the second strain generating unit may not be able to meet the demand of the consumer for the rated capacity may occur. In addition, even if the user's demand for the rated capacity is met, a large amount of interference may occur, thereby degrading the performance of the sensor. Accordingly, the multi-axis force / torque sensor 100 includes outer blocks having another strain generator.

The outer blocks are provided at the end of the first horizontal radiation block 120 and extend along the Y axis direction, and are provided at the ends of the second horizontal radiation block 130 and along the Y axis direction. The second longitudinal outer block 170 and the first longitudinal radiation block 140 extending at the end of the first horizontal outer block 180, extending along the X-axis direction, and the second longitudinal radiation block 150 A second transverse outer block 190 is provided at the end and extends along the X-axis direction.

The first strain outer block 160 and the second strain outer block 170 are provided with a third strain generator. The third strain generator has a form of parallel flat beams 162a and 172a (FIGS. 1 and 2) or single flat beams 162b and 172b (FIG. 5) formed by vertical grooves. The parallel flat beams 162a and 172a or the single flat beams 162b and 172b are symmetrically positioned at both sides with respect to the point where the lateral radiating members 120 and 130 and the longitudinal outer blocks 160 and 170 meet.

A first strain generator is provided in the first horizontal outer block 180 and the second horizontal outer block 190. The fourth strain generator has a form of parallel flat beams 182a and 192a (FIGS. 1 and 2) or single flat beams 182b and 192b (FIG. 5) formed by vertical grooves. The parallel flat beams 182a and 192a or the single flat beams 182b and 192b are symmetrically positioned at both sides based on a point where the longitudinal radiating members 140 and 150 and the transverse outer blocks 180 and 190 meet.

When the multi-axis force / torque sensor 100 includes the third strain generator as described above, the X-axis force sensing strain gauges S_fx1, S_fx2, S_fx3, and S_fx4 attached to the first strain generator generate a third strain. Can be attached to the part. For example, any one of the strain gages S_fx1, S_fx2, S_fx3, and S_fx4 for X-axis force sensing may be a predetermined position X1_1, X2-1, X3 of the parallel plate 162a or the single plate 162b. -1, X4-1, the remaining three X-axis force sensing strain gauges (S_fx2, S_fx3, S_fx4) is the predetermined position (X1_1, X2-1, X3) with respect to the center point of the central block 110 Point symmetry with (-1, X4-1) ((X1-2, X1-3, X1-4), (X2_2, X2-3, X2-4), (X3_2, X3-3, X3-4) , (X4_2, X4_3, X4_4)). Therefore, the third strain generator is a problem that occurs when attaching the X-axis force sensing strain gauges (S_fx1, S_fx2, S_fx3, S_fx4) to the first strain generator (the problem that does not meet the demand of the consumer for the rated capacity) Or mutual interference problems).

In addition, when the multi-axis force / torque sensor 100 is provided with a fourth strain generating portion, the strain gauges (S_fy1, S_fy2, S_fy3, S_fy4) for detecting Y-axis force attached to the first strain generating portion are the fourth strain generating portion. It can be attached to. For example, any one of the strain gauges S_fy1, S_fy2, S_fy3, and S_fy4 for Y-axis force sensing may be a predetermined position Y1_1, Y2-1, or Y3 of the parallel plate 182a or the single plate 182b. -1, Y4-1, the remaining three Y-axis force sensing strain gauges (S_fy2, S_fy3, S_fy4) is the predetermined position (Y1_1, Y2-1, Y3 with respect to the center point of the central block 110) Point symmetry with (-1, Y4-1) ((Y1-2, Y1-3, Y1-4), (Y2_2, Y2-3, Y2-4), (Y3_2, Y3-3, Y3-4) , (Y4_2, Y4_3, Y4_4)). Therefore, the fourth strain generator is a problem that occurs when attaching the Y-axis force sensing strain gauges (S_fy1, S_fy2, S_fy3, S_fy4) to the first strain generator (the problem that does not meet the demand of the consumer for the rated capacity) Or mutual interference problems).

1 and 2, both the third strain generator and the fourth strain generator are illustrated as parallel flat beams, and in FIG. 5, all are illustrated as single flat beams. However, the third strain generator may be provided as a parallel plate beam and the fourth strain generator may be provided as a single plate beam, and on the contrary, the third strain generator may be provided as a single plate beam and the fourth strain generator may be provided as a parallel plate beam.

≪ Embodiment 2 >

The second embodiment 200 of the present invention is the same as the first embodiment 100 except for the second strain generator as shown in FIGS. 6 and 7. Therefore, hereinafter, only the second strain generator is described.

In the present embodiment 200, the second strain generating unit is located between the central block 110 and the first strain generating unit, and is provided in the form of a single staircase 224, 234, 244, 254. The single staircases 224, 234, 244, and 254 have opposite sides, both sides having a stepped shape. And the rear part (thick part) of the single staircase (224, 234, 244, 254) is located closer to the central block 110 than the thin part (thin part).

The single stepped beams 224, 234, 244, and 254 formed as described above are deformed by the X-axis force, the Y-axis force, and the Z-axis torque. Therefore, four X-axis force sensing strain gauges for detecting the magnitude of the X-axis force (S_fx1, S_fx2, S_fx3, S_fx4) and four Y-axis force sensing strain gauges for detecting the magnitude of the Y-axis force (S_fy1, S_fy2, S_fy3, S_fy4) and four Z-axis torque sensing strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for detecting the magnitude of the torque in the Z-axis are with respect to the center point of the center block 110. Attached to the single stepped beams 224, 234, 244, 254 to achieve point symmetry.

More specifically, the X-axis force sensing strain gauges (S_fx1, S_fx2, S_fx3, S_fx4) are attached to the thin left and right sides of the single staircase (244, 254) provided in the longitudinal radiation blocks (140, 150), Y Strain gauges S_fy1, S_fy2, S_fy3, and S_fy4 for axial force sensing are attached to the thin left and right sides of the single stair beams 224 and 234 provided in the lateral blocks 120 and 130. The strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for Z-axis torque sensing may include rear left, right, or longitudinal radiating blocks 140 of the single stair beams 224 and 234 provided in the lateral blocks 120 and 130. It is attached to the rear left and right sides of the single staircase (244, 254) provided in 150.

Meanwhile, FIGS. 6 and 7 show both the third strain generator and the fourth strain generator as parallel flat beams. However, the third strain generating portion and the fourth strain generating portion may be provided as a single flat beam as described in the first embodiment, or may be provided as a combination of parallel flat beam and single flat beam.

≪ Third Embodiment >

The third embodiment 300 of the present invention is the same as the first embodiment 100 except for the second strain generator as shown in FIGS. 8 and 9. Therefore, hereinafter, only the second strain generator is described.

In the present embodiment 300, the second strain generator is located between the central block 110 and the first strain generator, it is provided in the form of a single taper beam (324, 334, 344, 354). The single taper beams 324, 334, 344, and 354 have opposite sides, both of which are inclined surfaces. The rear portion (thick portion) of the single tapered beams 324, 334, 344 and 354 is located closer to the central block 110 than the thin portion (thin portion).

The single taper beams 324, 334, 344 and 354 made as described above are deformed by the X-axis force, the Y-axis force and the Z-axis torque. Therefore, four X-axis force sensing strain gauges for detecting the magnitude of the X-axis force (S_fx1, S_fx2, S_fx3, S_fx4) and four Y-axis force sensing strain gauges for detecting the magnitude of the Y-axis force (S_fy1, S_fy2, S_fy3, S_fy4) and four Z-axis torque sensing strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for detecting the magnitude of the torque in the Z-axis are with respect to the center point of the center block 110. Attached to the single tapered beams 324, 334, 344, 354 to achieve point symmetry.

More specifically, the X-axis force sensing strain gauges (S_fx1, S_fx2, S_fx3, S_fx4) is attached to the thin left and right sides of the single tapered beams (344, 354) provided in the longitudinal radiation blocks (140, 150), Y Strain gauges S_fy1, S_fy2, S_fy3, and S_fy4 for sensing axial force are attached to the thin left and right sides of the single tapered beams 324 and 334 provided in the lateral blocks 120 and 130. The strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for Z-axis torque sensing may include rear left, right, or longitudinal radiating blocks 140 of the single tapered beams 324 and 334 provided in the transverse blocks 120 and 130. It is attached to the rear left and right sides of the single tapered beams (344, 354) provided in 150.

8 and 9, the third strain generator and the fourth strain generator are shown as parallel flat beams. However, the third strain generating portion and the fourth strain generating portion may be provided as a single flat beam as described in the first embodiment, or may be provided as a combination of parallel flat beam and single flat beam.

Fourth Embodiment

The fourth embodiment 400 of the present invention is the same as the first embodiment 100 except for the second strain generator as shown in FIGS. 10 and 11. Therefore, hereinafter, only the second strain generator is described.

In the present embodiment 300, the second strain generator is positioned between the central block 110 and the first strain generator, and is provided in the form of horizontally spaced double tapered beams 424, 434, 444, and 454. The horizontally spaced double taper beams 424, 434, 444, and 454 are spaced apart in the X-axis or Y-axis direction due to the tapered vertical grooves bored in the Z-axis direction. Meanwhile, the rear portion (thick portion) of the horizontally spaced double tapered beams 424, 434, 444 and 454 is located closer to the central block 110 than the thin portion (thin portion).

The horizontally spaced double taper beams 424, 434, 444, and 454 made as described above are deformed by the X-axis force, the Y-axis force, and the Z-axis torque. Therefore, four X-axis force sensing strain gauges for detecting the magnitude of the X-axis force (S_fx1, S_fx2, S_fx3, S_fx4) and four Y-axis force sensing strain gauges for detecting the magnitude of the Y-axis force (S_fy1, S_fy2, S_fy3, S_fy4) and four Z-axis torque sensing strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for detecting the magnitude of the torque in the Z-axis are with respect to the center point of the center block 110. Attached to the horizontally spaced double tapered beams 424, 434, 444, 454 to achieve point symmetry.

More specifically, the X-axis force sensing strain gauges (S_fx1, S_fx2, S_fx3, S_fx4) is attached to the thin left and right sides of the horizontally spaced double tapered beams (444, 454) provided in the longitudinal radiation blocks (140, 150) Strain gauges S_fy1, S_fy2, S_fy3, and S_fy4 for Y-axis force sensing are attached to thin left and right surfaces of the horizontally spaced double tapered beams 424 and 434 provided in the lateral blocks 120 and 130. The strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for Z-axis torque sensing may include rear left, right, or longitudinal radiating blocks of horizontally spaced double tapered beams 424 and 434 provided in the lateral blocks 120 and 130. It is attached to the rear left and right sides of the horizontally spaced double tapered beams (444, 454) provided in 140, 150.

Meanwhile, FIGS. 10 and 11 show both the third strain generator and the fourth strain generator as parallel flat beams. However, the third strain generating portion and the fourth strain generating portion may be provided as a single flat beam as described in the first embodiment, or may be provided as a combination of parallel flat beam and single flat beam.

Fifth Embodiment

The fifth embodiment 500 of the present invention is the same as the first embodiment 100 except for the second strain generator as shown in FIGS. 12 and 13. Therefore, hereinafter, only the second strain generator is described.

In the present exemplary embodiment 500, the second strain generator is located between the central block 110 and the first strain generator, and is provided in the form of a single flat plate 524, 534, 544, or 554. The single flat beams 524, 534, 544, 554 have opposing sides, both sides being parallel.

The single flat beams 524, 534, 544, and 554 made as described above are deformed by the X-axis force, the Y-axis force, and the Z-axis torque. Therefore, four X-axis force sensing strain gauges for detecting the magnitude of the X-axis force (S_fx1, S_fx2, S_fx3, S_fx4) and four Y-axis force sensing strain gauges for detecting the magnitude of the Y-axis force (S_fy1, S_fy2, S_fy3, S_fy4) and four Z-axis torque sensing strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for detecting the magnitude of the torque in the Z-axis are with respect to the center point of the center block 110. Attached to the single flat beams 524, 534, 544, 554 to achieve point symmetry.

More specifically, the X-axis force sensing strain gauges (S_fx1, S_fx2, S_fx3, S_fx4) is attached to the left and right sides of the single flat beams 544, 554 provided in the longitudinal radiation blocks (140, 150), Y-axis The force sensing strain gauges S_fy1, S_fy2, S_fy3, and S_fy4 are attached to the left and right sides of the single flat beams 524 and 534 provided in the lateral blocks 120 and 130. The strain gauges S_tz1, S_tz2, S_tz3, and S_tz4 for Z-axis torque sensing may have left and right or longitudinal radiating blocks 140 and 150 of single flat beams 524 and 534 provided in the transverse blocks 120 and 130. It is attached to the left and right sides of the single flat beam (544, 554) provided in the).

12 and 13, both the third strain generator and the fourth strain generator are illustrated as parallel flat beams. However, the third strain generating portion and the fourth strain generating portion may be provided as a single flat beam as described in the first embodiment, or may be provided as a combination of parallel flat beam and single flat beam.

Sixth Embodiment

In the first to fifth embodiments, the first strain generator is provided in the form of a vertically spaced double stair beam. However, in the exemplary embodiment 600, as illustrated in FIGS. 14 and 15, the first strain generator is provided in the form of vertically spaced double tapered beams 622, 632, 642, and 652.

The vertically spaced double tapered beams 622 and 632 provided in the lateral blocks 120 and 130 are spaced apart in the Z-axis direction due to the tapered horizontal grooves drilled in the Y-axis direction. The vertically spaced double tapered beams 622 and 632 provided in each of the longitudinal radiation blocks 140 and 150 are spaced apart in the Z-axis direction due to a tapered horizontal groove formed in the X-axis direction. Meanwhile, the rear portion (thick portion) of the vertically spaced double tapered beams 622, 632, 642 and 652 is located closer to the central block 110 than the thin portion (thin portion).

The vertically spaced double taper beams 622, 632, 642, and 652 made as described above are deformed by the X-axis torque, the Y-axis torque, and the Z-axis force. Therefore, four strain gauges for detecting X-axis torque (S_tx1, S_tx2, S_tx3, S_tx4) for detecting magnitude of torque in the X axis, and four strain gauges for detecting Y-axis torque for detecting magnitude in Y-axis torque (S_ty1, S_ty2, S_ty3, S_ty4) and four Z-axis force sensing strain gauges S_fz1, S_fz2, S_fz3, and S_fz4 for detecting the magnitude of the Z-axis force, with respect to the center point of the center block 110. Attached to the vertically spaced double tapered beams 622, 632, 642, 652 to achieve point symmetry.

More specifically, the X-axis torque sensing strain gauges (S_tx1, S_tx2, S_tx3, S_tx4) is attached to the rear upper and lower surfaces of the vertically spaced double tapered beams (642, 652) provided in the longitudinal radiation blocks (140, 150), Strain gauges S_ty1, S_ty2, S_ty3, and S_ty4 for Y-axis torque sensing are attached to the rear upper and lower surfaces of the vertically spaced double tapered beams 622 and 632 provided in the lateral blocks 120 and 130. The strain gages S_fz1, S_fz2, S_fz3, and S_fz4 for detecting Z-axis force are thin upper, lower, or lateral radiating blocks 120 of the vertically spaced double tapered beams 642 and 652 provided in the longitudinal radiating blocks 140 and 150. And attached to upper and lower surfaces of the thin spaced double tapered beams 622 and 632 provided at 130.

14 and 15, the second strain generator is shown as horizontally spaced double taper beams 424, 434, 444, 454 as in the fourth embodiment. However, the second strain generator of the present embodiment is not limited thereto, and the shape of the horizontally spaced double stair beams 124, 134, 144, and 154 of the first embodiment, or the single stair beams 224, 234, 244, and 254 of the second embodiment. It may be provided in the form of a single taper beam (324, 334, 344, 354) of the third embodiment or in the form of a single flat beam (524, 534, 544, 554) of the fifth embodiment.

14 and 15, both the third strain generator and the fourth strain generator are shown as parallel flat beams. However, the third strain generating portion and the fourth strain generating portion may be provided as a single flat beam as described in the first embodiment, or may be provided as a combination of parallel flat beam and single flat beam.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It is to be understood that various changes and modifications may be made without departing from the scope of the appended claims.

100, 200, 300, 400, 500, 600: multi-axis force / torque sensor
110: center block 120: first horizontal radiation
130: second radial block 140: first radial block
150: second type radiation block
122, 132, 142, 152: vertically spaced double stairs
124, 134, 144, 154: horizontally spaced double stairs
160: outer type 1 block 170: outer type 2 block
180: first transverse outer block 190: second transverse outer block
162a, 172a, 182a, 192a: horizontally spaced parallel flat beam
162b, 172b, 182b, 192b: single flat beam
200: fixed block
224, 234, 244, 254: single staircase
324, 334, 344, 354: single tapered beam
424, 434, 444, 454 horizontally spaced double tapered beams
524, 534, 544, 554: single flat beam
622, 632, 642, 652: vertically spaced double tapered beams

Claims (20)

delete A central block receiving force and torque;
First and second horizontal radiation blocks extending from both side surfaces of the central block in a predetermined direction (X-axis direction), respectively;
A first longitudinal radiation block and a second longitudinal radiation block respectively extending in directions perpendicular to the X-axis direction (Y-axis direction) from two opposite sides of the central block;
A first strain generator having a rear portion and a thin portion and provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block; And
And a second strain generator provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block so as to be positioned between the central block and the first strain generator.
The first strain generator,
Vertically spaced double stair beams provided in the first longitudinal radiation block and the second longitudinal radiation block by iron grooves formed in the X-axis direction; And
And a vertically spaced double stair beam provided in the first horizontal radiation block and the second horizontal radiation block by iron-shaped horizontal grooves drilled in the Y-axis direction. 3. The method of claim 2,
The second strain generator is a horizontally spaced double staircase stepped multi-axial force / torque sensor provided by a vertical groove of the iron shape in the direction perpendicular to the XY plane (Z-axis direction). 3. The method of claim 2,
The second strain generator is a single step beam multi-axis force / torque sensor having a stepped outer surface. 3. The method of claim 2,
And said second strain generating portion is a single tapered bore multi-axis force / torque sensor having an inclined outer surface. 3. The method of claim 2,
The second strain generator is a horizontally spaced double tapered beam multi-axis force / torque sensor provided by a vertical groove of the tapered shape in a direction perpendicular to the XY plane (Z-axis direction). A central block receiving force and torque;
First and second horizontal radiation blocks extending from both side surfaces of the central block in a predetermined direction (X-axis direction), respectively;
A first longitudinal radiation block and a second longitudinal radiation block respectively extending in directions perpendicular to the X-axis direction (Y-axis direction) from two opposite sides of the central block;
A first strain generator having a rear portion and a thin portion and provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block; And
And a second strain generator provided in the first horizontal radiation block, the second horizontal radiation block, the first longitudinal radiation block, and the second longitudinal radiation block so as to be positioned between the central block and the first strain generator.
The first strain generator,
Vertically spaced double tapered beams provided in the first longitudinal radiation block and the second longitudinal radiation block by a tapered horizontal groove formed in an X-axis direction; And
And a vertically spaced double taper beam provided in the first horizontal radiation block and the second horizontal radiation block by a tapered horizontal groove formed in the Y-axis direction. 8. The method of claim 7,
The second strain generator is a horizontally spaced double staircase stepped multi-axial force / torque sensor provided by a vertical groove of the iron shape in the direction perpendicular to the XY plane (Z-axis direction). 8. The method of claim 7,
The second strain generator is a single step beam multi-axis force / torque sensor having a stepped outer surface. 8. The method of claim 7,
And said second strain generating portion is a single tapered bore multi-axis force / torque sensor having a sloped outer surface. 8. The method of claim 7,
The second strain generator is a horizontally spaced double tapered beam multi-axis force / torque sensor provided by a vertical groove of the tapered shape in a direction perpendicular to the XY plane (Z-axis direction). The method according to any one of claims 3 to 6 and 8 to 11,
A first longitudinal outer block and a second longitudinal outer block, respectively provided at ends of the first horizontal radial block and the second horizontal radial block so as to extend along a Y axis direction;
A first transverse outer block and a second transverse outer block respectively provided at ends of the first longitudinal radiation block and the second longitudinal radiation block so as to extend along an X axis direction;
A third strain generator provided in the first type outer block and the second type outer block; And
And a fourth strain generator provided in the first transverse outer block and the second transverse outer block. The method of claim 12, wherein
And the third strain generator and the fourth strain generator are parallel plate beams formed by a single plate beam or a vertical groove. 14. The method of claim 13,
And a rear portion of the first strain generator and the second strain generator is located closer to the central block than the thin portion. 15. The method of claim 14,
A plurality of X-axis force sensing strain gauges attached to the thin portion of the second strain generator or the third strain generator provided in the first longitudinal radiation block and the second longitudinal radiation block;
A plurality of Y-axis force sensing strain gauges attached to the thin portion of the second strain generator or the fourth strain generator provided in the first horizontal radiation block and the second horizontal radiation block;
A plurality of Z-axis torque detection is attached to the rear of the second strain generating unit provided in the first and second horizontal radiation block or the second strain generating unit provided in the first longitudinal radiation block and the second longitudinal radiation block. Strain gauge for;
A plurality of Y-axis torque sensing strain gauges attached to a rear portion of the first strain generator provided in the first and second horizontal radiation blocks;
A plurality of X-axis torque sensing strain gauges attached to the rear of the first strain generator provided in the first longitudinal radiation block and the second longitudinal radiation block; And
Detecting a plurality of Z-axis forces attached to the thin portion of the first strain generating portion provided in the first longitudinal radiation block and the second longitudinal radiating block or the thin portion of the first strain generating portion provided in the first horizontal radiation block and the second horizontal radiation block. Multi-axis force / torque sensor comprising a strain gauge for. 8. The method according to claim 2 or 7,
The second strain generator is a single plate beam multi-axis force / torque sensor. 17. The method of claim 16,
A first longitudinal outer block and a second longitudinal outer block, respectively provided at ends of the first horizontal radial block and the second horizontal radial block so as to extend along a Y axis direction;
A first transverse outer block and a second transverse outer block respectively provided at ends of the first longitudinal radiation block and the second longitudinal radiation block so as to extend along an X axis direction;
A third strain generator provided in the first type outer block and the second type outer block; And
And a fourth strain generator provided in the first transverse outer block and the second transverse outer block. The method of claim 17, wherein
And the third strain generator and the fourth strain generator are parallel plate beams formed by a single plate beam or a vertical groove. 19. The method of claim 18,
And a rear portion of the first strain generator is located closer to the center block than the thin portion. 20. The method of claim 19,
A plurality of X-axis force sensing strain gauges attached to the second strain generator or the third strain generator of the first longitudinal radiation block and the second longitudinal radiation block;
A plurality of Y-axis force sensing strain gauges attached to the second strain generating unit or the fourth strain generating unit of the first horizontal radiation block and the second horizontal radiation block;
A plurality of Z-axis torque sensing strain gauges attached to a second strain generator of the first and second lateral radiation blocks or to a second strain generator of the first and second longitudinal radiation blocks;
A plurality of Y-axis torque sensing strain gauges attached to a rear portion of the first strain generator provided in the first and second horizontal radiation blocks;
A plurality of X-axis torque sensing strain gauges attached to the rear of the first strain generator provided in the first longitudinal radiation block and the second longitudinal radiation block; And
Detecting a plurality of Z-axis forces attached to the thin portion of the first strain generating portion provided in the first longitudinal radiation block and the second longitudinal radiating block or the thin portion of the first strain generating portion provided in the first horizontal radiation block and the second horizontal radiation block. Multi-axis force / torque sensor comprising a strain gauge for.

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