WO2016170848A1

WO2016170848A1 - Multiaxial force sensor

Info

Publication number: WO2016170848A1
Application number: PCT/JP2016/056324
Authority: WO
Inventors: アレクサンダーシュミッツ; ソフォンソムロア; リチャードハルタント; 重樹菅野
Original assignee: 学校法人早稲田大学
Priority date: 2015-04-20
Filing date: 2016-03-02
Publication date: 2016-10-27
Also published as: JP2016205942A

Abstract

The purpose of the present invention is to provide a multiaxial force sensor that can accurately detect force components with respect to an external force applied from the periphery, and that can make the overall constitution compact. A six-axis force sensor 10 comprises a sensor unit 11 in which a plurality of pressure sensors 16 capable of detecting a pressing force in one direction are provided, a cover 12 that is provided at the periphery of the sensor unit 11 and that is constituted to be capable of transmitting an applied external force to the sensor unit 11, and a calculation unit 13 that finds by calculation the force components of an external force in a plurality of axis directions on the basis of the detection value from each pressure sensor 16. Each pressure sensor 16 is arranged in a manner capable of detecting a pressing force from a mutually different direction, and the sensor unit 11 is provided in a manner capable of detecting a pressing force by at least some of the pressure sensors 16 even when an external force is applied to the cover 12 in any of the orthogonal three-axis directions.

Description

Multi-axis force sensor

The present invention relates to a multi-axis force sensor capable of detecting force components in the multi-axis direction of an applied external force.

Recently, robots that coexist with human beings have been put into practical use. However, since the robots have overlapping action ranges with humans, it is important to ensure safety by contact with humans. Therefore, for example, a robot hand includes a six-axis force sensor that detects translational forces acting in the three orthogonal axes directions and a moment around the three orthogonal axes, and a tactile sensor that detects pressing force and shear force acting on the surface. Are appropriately arranged, and based on the detection values of the six-axis force sensor and the tactile sensor, operation control of the robot hand when a human or an object contacts the robot hand is performed.

The six-axis force sensor includes a strain gauge type force sensor and a capacitance type force sensor, as described in Patent Documents 1 and 2. As described in each of these documents, the conventional strain gauge type force sensor has a complicated structure and lacks compactness. Therefore, the degree of freedom of installation is small. For example, many sensors are arranged on a robot arm or robot hand. It is difficult to do. Therefore, Patent Documents 1 and 2 propose a capacitive force sensor as a six-axis force sensor applied to a robot.

Patent Document 3 discloses a tactile sensor in which three dielectric layers that react corresponding to the directions of three orthogonal axes are stacked, and two external shearing forces and one compressive force are detected with respect to the applied external force. Has been proposed.

JP 2012-145497 A JP 2007-108079 A JP 2012-247297 A

However, in the force sensor according to Patent Document 1, it is necessary to ensure a large displacement width of the electrode portion that changes the capacitance according to the applied external force due to the structure, and this is a detection value. This is an obstacle to accurate acquisition. Moreover, in the force sensor according to Patent Document 2, various sensors, spheres, and the like are arranged in a complicated manner, and a compact configuration cannot be obtained. In addition, the action part of the external force to the sensor is plate-shaped (upper plate 2 in the same document), and only the six-axis direction force component with respect to the external force acting on the upper plate 2 can be detected. It is not possible to detect force components in the 6-axis direction with respect to the external force applied from.

In addition, the tactile sensor of Patent Document 3 must have three dielectric layers that become anisotropic sensors having different characteristics depending on the deformation in each axial direction, and this stacked structure reduces the size of the sensor. Not only is this difficult to achieve, but the spatial resolution is reduced, making it difficult to obtain a quick response.

The present invention has been devised in order to solve the above-described problems, and an object of the present invention is to detect a force component with respect to an external force applied from the surroundings with high accuracy and to make the entire configuration compact. An object of the present invention is to provide a multi-axis force sensor that can be used.

In order to achieve the above object, the present invention mainly includes a sensor unit provided with a plurality of pressure sensors capable of detecting a pressing force in one direction and an external force that is provided around the sensor unit and acts on the sensor unit. In the multi-axis force sensor comprising a cover configured to be able to transmit and a calculation unit for calculating force components in a plurality of axial directions of the external force based on detection values from the pressure sensors, the sensor unit includes: The pressure sensors are arranged so as to be able to detect pressing forces from different directions, and even when an external force is applied to the cover from any of the three orthogonal axes, at least a part of the pressure sensors is used. The configuration is such that the pressure can be detected.

In the claims and the present specification, unless otherwise specified, as a term representing a position or direction, FIG. 1, FIG. 3 (A), or FIG. The standard. That is, unless otherwise specified, “front” means the near side in the x-axis direction of the coordinate axes of each figure, “rear” means the same depth side in the x-axis direction, and “right” Means the same right side (front side) in the same y-axis direction, “left” means the same left side (same depth side) in the same y-axis direction, and “upper” means the same in the same z-axis direction. “Lower” means the lower side in the z-axis direction.

According to the present invention, when a plurality of pressure sensors capable of detecting a pressing force in one direction are arranged, the detection surfaces of the pressure sensors are arranged on different spaces so that the pressing forces from different directions can be detected. Thus, each pressure sensor can be arranged in a compact manner, and a reduction in manufacturing cost can be expected. Also, with this configuration, it is not necessary to ensure a large displacement width of the electrode portion as in the force sensor of Patent Document 1, and sensitivity can be improved compared to the force sensor. In addition, even when an external force is applied to the cover from any of the three orthogonal axes, the detection surfaces of the pressure sensors are set on different spaces so that the pressing force can be detected by at least a part of each pressure sensor. Since it can arrange | position to a surface, the force component with respect to the external force which acted from the space around a sensor unit can be detected with high precision.

Furthermore, the pressure sensor is arranged so as to stand upright at a predetermined angle with respect to the base, and in accordance with the external force applied to the cover, the base is separated from the base with the joint portion as a fixed end. As a triaxial force sensor for obtaining a triaxial force component consisting of two orthogonal shear forces on a predetermined plane and a pressing force on the predetermined plane. Thus, a compact configuration can be achieved, and a reduction in manufacturing cost can be expected.

1 is an overall configuration diagram including a schematic perspective view of a six-axis force sensor according to a first embodiment. FIG. (A) is the schematic sectional drawing which looked at FIG. 1 from the right side (A direction in the figure), (B) is the schematic sectional drawing which looked at the figure from back (B direction in the figure). (C) is the schematic sectional drawing which looked at the figure from the upper part (A direction in the figure). (A) is a schematic perspective view of the sensor unit which comprises the 6-axis force sensor of FIG. 1, (B) is a partial exploded perspective view of (A). The schematic perspective view of the pressure sensor which comprises the said sensor unit. The whole block diagram including the schematic perspective view which decomposed | disassembled some 6-axis force sensors which concern on 2nd Embodiment. FIG. 6 is a partial cross-sectional view of FIG. 5 viewed from the rear. (A) is a whole block diagram including a schematic perspective view of a three-axis force sensor according to the third embodiment, and (B) is a schematic perspective view of a sensor unit constituting the three-axis force sensor of (A). is there. The schematic plan view of the sensor unit of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)

FIG. 1 shows an overall configuration diagram including a schematic perspective view of a six-axis force sensor according to the first embodiment. FIG. 2 (A) shows FIG. 1 from the right side (A direction in FIG. 1). It is the schematic sectional drawing seen, the figure (B) is the schematic sectional drawing seen from the back (same B direction), and the figure (C) is the schematic sectional view seen from the same upper direction (same A direction) FIG. In these drawings, the 6-axis force sensor 10 is configured to calculate the force component in the 6-axis direction of the applied external force, that is, the respective translational force in the orthogonal 3-axis direction (xyz axis direction in FIG. 1). Each moment around each axis is provided so as to be detectable. Although not particularly limited, in this embodiment, the rear end side of the six-axis force sensor 10 is attached to an end effector of a robot such as a robot fingertip or a robot arm (not shown) via a connecting member J. .

The six-axis force sensor 10 includes a sensor unit 11 that detects a pressing force for the applied external force in each of the three axis directions, a cover 12 that is disposed so as to surround the outside of the sensor unit 11, and detection of the sensor unit 11. Based on the results, a calculation unit 13 is provided that calculates force components in the six-axis directions of external forces by calculation.

As shown in FIG. 3, the sensor unit 11 is arranged at an inner support 15 (see FIG. 3B) having a T-shaped block shape in plan view and at a plurality of locations on the surface of the inner support 15. In addition, the pressure sensor 16 is configured to detect a pressing force in one direction.

The internal support 15 is connected to the front at a substantially rectangular center position in the left-right direction of the first part 15A in the shape of a rectangular parallelepiped located on the rear side, and the width in the left-right direction is the first part 15A. And a second portion 15B having a cubic shape formed to be approximately half the size.

As shown in FIG. 4, the pressure sensor 16 includes a lower fixed electrode 18 in FIG. 4 and a movable electrode 19 on the upper side in FIG. A capacitance type pressure sensor having the following is used. That is, in this pressure sensor 16, the movable electrode 19 is arranged with a gap with respect to the fixed electrode 18, and the static electrode corresponding to the difference in the separation distance from the fixed electrode 18 based on the pressing force to the movable electrode 19 is provided. The pressing force can be detected by changing the electric capacity. Although not particularly limited, in this embodiment, the movable electrode 19 is made of beryllium copper capable of optimizing sensitivity, and a cylindrical button-shaped protrusion 19A is formed on the surface of the movable electrode 19. Is adopted. The projecting portion 19A displaces the movable electrode 19 substantially parallel to the opposed surface of the fixed electrode 18, so that crosstalk can be minimized.

As shown in FIGS. 2 and 3, the pressure sensor 16 is fixedly disposed at 12 locations on the outer surface of the internal support 15 so as to be able to detect pressing force from the top, bottom, left, and right and front and rear. .

Specifically, as the pressure sensor 16 for detecting the pressing force from above, the first and second sensors S1, S2 arranged in two places on the upper surface of the first portion 15A in the left-right direction, The third sensor S3 is disposed at one location on the upper surface of the portion 15B. On the other hand, as the pressure sensor 16 for detecting the pressing force from below in the opposite direction, the first and second portions 15A are opposed to the first, second and third sensors S1, S2 and S3. , 15B, fourth, fifth and sixth sensors S4, S5, S6. Here, as mainly shown in FIG. 2B, the first and fourth sensors S1, S4 are relatively arranged in the vertical direction, and the second and fifth sensors S2, S5 are relatively arranged in the vertical direction. As mainly shown in FIG. 5A, the third and sixth sensors S3 and S6 are relatively arranged in the vertical direction.

Further, as the pressure sensor 16 for detecting the pressing force from the left side, the seventh sensor S7 disposed on the left side surface of the first portion 15A and the left side surface of the second portion 15B are disposed on the left side surface. And an eighth sensor S8 disposed in front of the seventh sensor S7 through a step. On the other hand, as the pressure sensor 16 for detecting the pressing force from the right side which is the opposite direction, the first and

second portions

15A and 15B are arranged so as to be symmetrical to the seventh and eighth sensors S7 and S8. It is comprised by 9th and 10th sensor S9, S10 arrange | positioned through each level | step difference on each right side. Here, as mainly shown in FIG. 2C, the seventh and ninth sensors S7, S9 are relatively arranged in the left-right direction, and the eighth and tenth sensors S8, S10 are relatively arranged in the left-right direction. ing.

Furthermore, the pressure sensor 16 for detecting the pressing force from the front is constituted by an eleventh sensor S11 disposed at one place on the front surface of the second portion 15B. On the other hand, as the pressure sensor 16 for detecting the pressing force from the rear in the reverse direction, a twelfth sensor disposed at one place on the rear surface of the first portion 15A and disposed symmetrically relative to the eleventh sensor S11. S12 is comprised.

The cover 12 is not particularly limited, but has a substantially rectangular parallelepiped outer shape as shown in FIG. 1 and the like, and as shown in FIG. A space 12A is formed to be accommodated in a state where the protrusions 19A (see FIG. 4) of the 11 pressure sensors 16 are in contact with each other. That is, the cover 12 covers the sensor unit 11 while supporting the sensor unit 11 so as not to be relatively movable. Therefore, even when an external force is applied to each outer surface of the cover 12 from any one of the front, rear, left, and right directions, the pressing force based on the external force is detected by any one of the pressure sensors 16.

The calculation unit 13 calculates the force component in the six-axis direction of the external force acting on the cover 12 based on the detection result of each pressure sensor 16 according to the following equation.

In the following expression, the translational force in the three axes directions of the xyz axis is (Fx, Fy, Fz), and the moment (torque) around the three axes direction is (Mx, My, Mz). Note that the translational force and moment with a minus sign next to the translational force F and moment M represent components in the opposite direction in the axial direction represented by the character. The detection values of the first and fourth sensors S1 and S4 that are opposed in the vertical direction are f _1a and f _1b, and the detection values of the second and fifth sensors S2 and S5 that are opposed in the vertical direction are f _2a , Let f _2b be the detection values of the third and sixth sensors S3 and S6 facing in the up-down direction, f _3a and f _3b . The detection values of the seventh and ninth sensors S7 and S9 that are opposite in the left-right direction are f _4a and f _4b, and the detection values of the eighth and tenth sensors S8 and S10 that are opposite in the left-right direction are f _5a , f _4b . Let f _5b . Furthermore, detection values of the eleventh and twelfth sensors S11 and S12 facing in the front-rear direction are set to f _6a and f _6b . Furthermore, Kn (n = 1, 2,...) And Ln (n = 1, 2,...) Are constants that are set in advance and stored in the calculation unit 13, and Kn is the value of each pressure sensor 16. Ln is a constant for performing adjustment based on the difference in performance. In addition to the adjustment between the sensors, Ln represents the distance of each pressure sensor 16 from a reference point (the center of gravity of the six-axis force sensor 19). This is a constant taken into account. In the following equation, the crosstalk process is omitted.

Next, another embodiment of the present invention will be described. In the following description, the same reference numerals are used for the same or equivalent components as in the first embodiment, and the description is omitted or simplified.

(Second Embodiment)
As shown in FIGS. 5 and 6, the present embodiment has a configuration of a six-axis force sensor 30 having a shape different from that of the first embodiment. It can be detected.

In the six-axis force sensor 30, electrostatic pressure sensors 33 having the same principle as the pressure sensor 16 of the first embodiment are arranged on the six surfaces serving as the surfaces of the cubic internal support 32, respectively. The sensor unit 11 is characterized. Although not shown, also in this embodiment, when a cover is covered around the sensor unit 11 and an external force is applied to each outer surface of the cover from one of the front, rear, left, and right directions. In addition, the pressing force based on the external force is detected by any one of the pressure sensors 33.

The pressure sensor 33 used in the present embodiment has a shape such that the fixed electrode 18 is divided into two with respect to the pressure sensor 16 used in the first embodiment, and the divided movable electrodes 18 are not mutually separated. It is configured so as to cause interference, and a single pressure sensor 16 is provided to allow moment measurement.

In the present embodiment, the pressure sensor 33 disposed on the upper surface of the internal support 32 detects a pressing force from above. Here, the pressure sensor 33 is arranged in a direction in which the fixed electrode 18 is divided into left and right. For convenience of explanation, a portion where a signal is detected by the left fixed electrode 18 is referred to as a first sensor S1, and the right sensor A portion where a signal is detected by the fixed electrode 18 is referred to as a second sensor S2. On the other hand, the pressure sensor 33 disposed on the lower surface of the internal support 32 detects a pressing force from below. The pressure sensor 33 here is also arranged in a direction in which the fixed electrode 18 is divided into left and right. For convenience of explanation, a portion where a signal is detected by the left fixed electrode 18 is referred to as a third sensor S3, A portion where a signal is detected by the fixed electrode 18 is referred to as a fourth sensor S4. Here, the first and third sensors S1, S3 are relatively arranged in the vertical direction, and the second and fourth sensors S2, S4 are relatively arranged in the vertical direction.

The pressure sensor 33 disposed on the left side surface of the internal support 32 detects a pressing force from the left side. Here, the pressure sensor 33 is arranged in a direction in which the fixed electrode 18 is divided into the front and the rear. For convenience of explanation, a portion where a signal is detected by the front fixed electrode 18 is referred to as a fifth sensor S5, and the rear side. A portion where a signal is detected by the fixed electrode 18 is referred to as a sixth sensor S6. On the other hand, the pressure sensor 33 disposed on the right side surface of the internal support 32 detects a pressing force from the right side. The pressure sensor 33 here is also arranged in a direction in which the fixed electrode 18 is divided into the front and the rear. For convenience of explanation, a portion where a signal is detected by the front fixed electrode 18 is referred to as a seventh sensor S7. A portion where a signal is detected by the fixed electrode 18 is referred to as an eighth sensor S8. Here, the fifth and seventh sensors S5, S7 are relatively arranged in the left-right direction, and the sixth and eighth sensors S6, S8 are relatively arranged in the left-right direction.

Furthermore, the pressure sensor 33 disposed on the front surface of the internal support 32 detects a pressing force from the front. Here, the pressure sensor 33 is arranged in a direction in which the fixed electrode 18 is vertically divided. For convenience of explanation, a portion where a signal is detected by the upper fixed electrode 18 is referred to as a ninth sensor S9. A portion where a signal is detected by the fixed electrode 18 is referred to as a tenth sensor S10. On the other hand, the pressure sensor 33 disposed on the rear surface of the internal support 32 detects a pressing force from the rear. Here, the pressure sensor 33 is disposed so as to penetrate the connecting member J having a U-shape in plan view and exposed to the inside thereof, and is disposed in a direction in which the fixed electrode 18 is divided vertically. Here, for convenience of explanation, a portion where a signal is detected by the upper fixed electrode 18 is referred to as an eleventh sensor S11, and a portion where a signal is detected by the lower fixed electrode 18 is referred to as a twelfth sensor S12. Here, the ninth and eleventh sensors S9 and S11 are relatively disposed in the front-rear direction, and the tenth and twelfth sensors S10 and S12 are relatively disposed in the front-rear direction.

In the calculation unit 13 in the present embodiment, the force components in the six-axis directions of the external force acting on the cover (not shown) are calculated using the detection result of each pressure sensor 33 according to the following equation.

Also in the following equations, the translational force in the three axis directions and the moments about the same axis are represented by the same characters as described in the first embodiment, and the translational force in the three axis directions of the xyz axis is expressed as (Fx , Fy, Fz), and the moment (torque) around the three axis directions is (Mx, My, Mz). Also, the detection values of the first and third sensors S1, S3 facing in the vertical direction are f _1a , f _1b, and the detection values of the second and fourth sensors S2, S4 facing in the vertical direction are f _2a , Let _f2b . Further, the detection values of the fifth and seventh sensors S5 and S7 facing in the left-right direction are f _3a and f _3b, and the detection values of the sixth and eighth sensors S6 and S8 facing in the left-right direction are f _4a , f _3b . Let _f4b . Further, the detection values of the ninth and eleventh sensors S9, S11 that are opposed in the front-rear direction are f _5a and f _5b, and the detection values of the tenth and twelfth sensors S10, S12 that are opposed in the front-rear direction are f _6a , Let _f6b . Furthermore, Kn and Ln are the constants described in the first embodiment.

Therefore, according to the second embodiment described above, it can be made more compact than the structure of the first embodiment.

(Third embodiment)
As shown in FIG. 7 and FIG. 8, the present embodiment uses a pressure sensor 16 having a structure substantially the same as that of the first embodiment, as shown in FIGS. 7 (A) and FIG. 8 is characterized in that a three-axis force sensor 40 capable of detecting a shear force in the x-axis direction and the y-axis direction) and a pressing force in the z-axis direction in FIG. The triaxial force sensor 40 is used as, for example, a tactile sensor disposed on the surface of a robot arm or the like.

The triaxial force sensor 40 includes a sensor unit 41 that detects the magnitude of the applied external force in a predetermined direction, a rubber cover 42 that is disposed so as to surround the outside of the sensor unit 41, and is elastically deformable, and a sensor. Based on the detection result of the unit 41, there is provided a calculation unit 43 that calculates the shear force in the biaxial direction and the pressing force on the xy axis plane by calculation.

As shown in FIG. 7B, the sensor unit 41 of the present embodiment has a predetermined angle (for example, 45 degrees) for each of the pressure sensors 16 at a plurality of portions of the base 45 disposed on the lower side in the figure. It is supported by standing up. Further, when an external force is applied from any direction around the cover 42, each pressure sensor 16 elastically deforms the cover 42 with the external force, so that the joint portion with the base 45 serves as a fixed end. It is arranged so as to be elastically displaceable in a direction approaching and separating from 45.

The pressure sensor 16 is disposed in the first to fourth regions A1 to A4 obtained by dividing the upper surface of the base 45, which has a substantially rectangular shape in plan view, into four, and the inclination directions are different from each other. That is, the pressure sensor 16 is provided so as to be displaceable in opposite directions by external forces acting on the cover 42 in each of the two orthogonal axes (x-axis and y-axis directions). In each region A1 to A4, two

pressure sensors

16, 16 are arranged in parallel to each other. First and second sensors S1, S2 are arranged in the first area A1 at the upper left in FIG. 8 so as to incline to the left in the figure. Further, in the second area A2 at the upper right in the figure, third and fourth sensors S3 and S4 are arranged so as to incline upward in the figure. Further, fifth and sixth sensors S5 and S6 are arranged in the third area A3 at the lower left in the figure so as to incline downward in the figure. Further, in the fourth area A4 at the lower right in the figure, seventh and eighth sensors S7 and S8 are arranged so as to incline to the right in the figure. That is, the

pressure sensors

16 and 16 arranged in the first and fourth regions A1 and A4 are arranged point-symmetrically with respect to the center of the base 45, and when an external force compressing the cover 42 is applied, FIG. They fall in opposite directions along the horizontal direction (x-axis direction), which is the middle / left / right direction. The

pressure sensors

16 and 16 arranged in the second and third regions A2 and A3 are also arranged point-symmetrically with respect to the center of the base 45, and when an external force that compresses the cover 42 is applied, They are tilted in opposite directions along the vertical direction (y-axis direction), which is the middle / up / down direction. When the pressure sensor 16 is displaced with respect to the base 45 according to the external force acting on the cover 42 and the external force does not act on the cover 42, the pressure sensor 16 elastically returns to the original posture before the external force action. It is like that.

With the above configuration, for example, when a pressing force in the vertical direction (z-axis direction) acts on the upper surface of the cover 42, the pressure sensors 16 in the first to fourth regions A1 to A4 move toward the base 45. It falls down with the same amount of displacement, and the same detection value is obtained for all. On the other hand, if a shearing force acts on the upper surface of the cover 42 in the xy-axis direction, the pressure sensors 16 in the first to fourth regions A1 to A4 are inclined in the shearing force acting direction. The pressure sensor 16 is the maximum amount of displacement. Therefore, by using the detection values of the pressure sensor 16 in the first to fourth areas A1 to A4, the three-axis direction consisting of the shearing force in the xy-axis direction and the pressing force (compression force) in the z-axis direction is used. The force component can be detected.

In the calculation unit 43, the force component in the three-axis direction of the external force acting on the cover 42 is calculated using the detection result of each pressure sensor 16 according to the following equation. Here, one detection value is specified for each of the first to fourth regions A1 to A4 from the detection value of the pressure sensor 16 provided in each of the first to fourth regions A1 to A4. . This specification is performed based on preset processing such as an average value, a maximum value, a minimum value, and the like of each of the two

pressure sensors

16 and 16. The pressure sensors 16 provided in each of the regions A1 to A4 can be one each, or three or more. As described above, by adopting a configuration in which the plurality of pressure sensors 16 are inclinedly arranged in the same direction for each of the first to fourth regions A1 to A4, more pressure sensors are provided in a limited region of the base 45. 16 can be arranged, and the sensor can be compact and have high spatial resolution.

In the following equation, the shearing force in the x-axis direction is Fx, the shearing force in the y-axis direction is Fy, and the pressing force in the z-axis direction is Fz. Further, the detected values of the pressure sensor 16 in the first, second, third, and fourth regions A1, A2, A3, and A4 are defined as f ₁ , f ₂ , f ₃ , and f ₄ . Kn (n = 1, 2,...) Is a constant that is set in advance and stored in the calculation unit 43, and that is adjusted based on a difference in performance of each pressure sensor 16.

Note that the pressure sensor in the present invention is not limited to the beryllium copper capacitive pressure sensor 16 of each of the embodiments described above, and various pressure sensors can be used as long as a pressing force in one direction can be similarly detected. be able to.

Further, as the pressure sensor 16, a structure in which the

movable electrodes

19, 19 are arranged on the upper and lower surfaces of the fixed electrode 18 in FIG. In this case, since the detection values from the two

movable electrodes

19 and 19 can be used at one place, the sensitivity can be doubled.

In addition, the configuration of each part of the apparatus according to the present invention is not limited to the illustrated configuration example, and various modifications are possible as long as substantially the same operation is achieved.

10 6-axis force sensor (multi-axis force sensor)
11 Sensor unit 12 Cover 13 Calculation unit 16 Pressure sensor 30 6-axis force sensor
33 Pressure sensor 40 3-axis force sensor (multi-axis force sensor)
41 Sensor unit 42 Cover 43 Calculation unit 45 Base A1 to A4 First to fourth areas

Claims

A sensor unit provided with a plurality of pressure sensors capable of detecting a pressing force in one direction, a cover provided around the sensor unit and configured to transmit an applied external force to the sensor unit; and each pressure sensor In a multi-axis force sensor comprising a calculation unit that calculates a force component in a plurality of axial directions of the external force based on a detection value from
Each of the pressure sensors is arranged so that the pressing force from different directions can be detected, and the sensor unit has at least one of the pressure sensors even when an external force is applied to the cover from any of the three orthogonal directions. A multi-axis force sensor characterized in that the pressing force can be detected in part.
The pressure sensor is fixed to each outer surface of the polyhedral internal support at least one place, and is arranged so as to be able to detect the pressing force from the front and rear, left and right, and up and down directions,
The multi-axis force sensor according to claim 1, wherein the calculation unit obtains a force component in a six-axis direction including a translational force in three orthogonal axes and a moment around the three axes.
3. The multi-axis force sensor according to claim 2, wherein the pressure sensor is fixed at two locations on each outer surface of the internal support made of hexahedron.
The multi-axis force sensor according to claim 2 or 3, wherein the pressure sensors are arranged so as to be symmetrical in the front-rear direction, the left-right direction, and the up-down direction.
The sensor unit includes a base that supports the pressure sensor in an upright state,
The pressure sensor is disposed so as to stand upright at a predetermined angle with respect to the base, and in accordance with an external force applied to the cover, a joint portion with the base is used as a fixed end on the base. It is arranged to be displaceable in the direction of approaching,
2. The multi-axis force sensor according to claim 1, wherein the calculation unit obtains a force component in a triaxial direction composed of a biaxial shear force on a predetermined plane and a pressing force with respect to the predetermined plane.
The pressure sensor is provided in a plurality of regions of the base so that each of the two orthogonal axes can be displaced in opposite directions by an external force acting on the cover. 5. The multi-axis force sensor according to 5.