KR101363354B1 - Source container and reactor for vapor phase deposition - Google Patents

Abstract

The present invention relates to a source container and a reactor for vapor deposition. A source container according to an embodiment of the present invention includes an inner container in which a source material is accommodated; An outer container accommodating the inner container; A source amount measuring member coupled to the outer container to sense a load of the inner container; And a controller electrically connected to the source amount measuring member and deriving the amount of source material contained in the inner container based on the load of the inner container sensed by the source amount measuring member.

Description

Source container and reactor for vapor phase deposition

The present invention relates to a vapor deposition technique, and more particularly, to a source container for storing a source material for forming a thin film in a reactor and a reactor for vapor deposition comprising the same.

In a semiconductor manufacturing device or a display manufacturing device, a source container provided separately in a reactor for forming a thin film by a vapor deposition method such as chemical vapor deposition (CVD), atomic layer deposition (ALD) or organic vapor deposition (OVPD or condensation coating). Is often used. Solid or liquid source material, or source chemical, may be charged in the source container, and the source material is heated to generate a gaseous precursor in the source container, and the virtual precursor is introduced into the reactor by a suitable carrier gas. Can be delivered.

In general, the source material contained in the source container is depleted as the process proceeds, so it is necessary to periodically fill the source material. When the source material of the source container is insufficient, it may cause a defect of the manufactured device and a decrease in the process progress speed. Also, in general, the accurate confirmation and refilling of the source material is not only cumbersome, but also time consuming, since the source container must be manually unsealed and confirmed by the user in order to accurately confirm the remaining amount of the source material.

SUMMARY OF THE INVENTION The present invention has been made in an effort to provide a source container capable of reducing device defects and easily managing source materials to improve productivity.

Another technical problem to be solved by the present invention is to provide a reactor for vapor deposition including a source container having the above advantages.

Source container according to an embodiment of the present invention for achieving the above technical problem, the inner container in which the source material is accommodated; An outer container accommodating the inner container; A source amount measuring member coupled to the outer container to sense a load of the inner container; And a controller electrically connected to the source amount measuring member and deriving the amount of source material contained in the inner container based on the load of the inner container sensed by the source amount measuring member.

In some embodiments, the source amount measuring member may include a load cell. In some embodiments, the load cell includes: a load terminal protruding from the bottom surface of the outer container to contact the inner container; And a signal generator for generating an electrical signal whose value varies depending on the load applied to the load terminal. In some embodiments, the signal generator may include any one or both selected from strain gauges and piezoelectric elements.

In some embodiments, the source amount measuring member may be provided in plural and may be provided in a plurality of regions divided at regular intervals on the inner bottom surface of the outer container. In addition, the source container may further include a display unit for displaying information on any one or a combination of the derived amount of the source material, the temperature and pressure of the source container. In some embodiments, the controller may display whether the remaining amount of the source material is less than or equal to the reference value through the display unit.

In some embodiments, the source container may further include a temperature measuring member coupled to the outer container to sense a temperature inside the source container. In some embodiments, the outer container has a structure that can be opened or taken out of the inner container and the upper or lower is open, and may include a lid portion or a bottom portion for opening and closing the opened upper or lower portion. Can be.

In some embodiments, the inner container defines at least a portion of a first space in which the source material is received and a second space in which carrier gas introduced into and in contact with the first space and vapor generated from the source material are mixed; The source container may include a carrier gas inflow passage communicating an outside of the outer container with the second space and including an inlet port exposed in the second space; And a mixed gas discharge flow path communicating the outside of the outer container with the second space and including a discharge port exposed in the second space.
In some embodiments, the carrier gas inlet flow passage extends from the outside of the outer container to the second space past the first space, and the mixed gas discharge flow path extends from the second space to the outside of the outer container. Can be.

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In some embodiments, the source container may further include a heating member for uniform heat supply inside the source container. In some embodiments, the source material is liquid or solid, and the source material may have a vapor pressure of 10 ⁻⁶ Torr to 10 ³ Torr within the range of 50 ° C. to 550 ° C.

The vapor deposition reactor according to an embodiment of the present invention for achieving the above another technical problem may be coupled to the mixed gas discharge passage of the source container described above. The vapor deposition reactor is for manufacturing an organic light emitting device (OLED).

According to an embodiment of the present invention, the container of the source container is composed of a dual structure of the inner container that accommodates the source material and the outer container that accommodates the inner container, the mass of the inner container through the source amount measuring member and its change When the remaining amount of the derived source material is displayed to the outside, accurate remaining amount of the source material can be checked and filled, thereby reducing process defects and facilitating operation of the source container.

In addition, when the inside of the container of the source container is washed after the process is completed, the cleaning process of the source container can be achieved only by removing and replacing the inner container or washing the source container. To improve productivity by minimizing this and increase the life of the equipment through periodic replacement of the inner container.

1 is a cross-sectional view showing a source container according to an embodiment of the present invention.
FIG. 2 is an enlarged cross-sectional view of the source amount measuring member of the source container shown in FIG. 1.
3 is a cross-sectional view illustrating a state in which the inner container of the source container shown in FIG. 1 is taken out to the outside.
4A and 4B are cross-sectional views illustrating embodiments of the display unit illustrated in FIG. 1.
5 is a cross-sectional view showing a source container according to another embodiment of the present invention.
6A is a sectional view showing a source container according to another embodiment of the present invention.
FIG. 6B is a cross-sectional view of the source container shown in FIG. 6A taken along line I-II.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more faithful and complete, and will fully convey the scope of the invention to those skilled in the art.

In addition, in the following drawings, the thickness or size of each layer is exaggerated for convenience and clarity of description, the same reference numerals in the drawings refer to the same elements. As used herein, the term "and / or" includes any and all combinations of any of the listed items.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise "and / or" comprising "when used herein should be interpreted as specifying the presence of stated shapes, numbers, steps, operations, elements, elements, and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

1 is a cross-sectional view showing a source container 100 according to an embodiment of the present invention. The direction is represented through a Cartesian coordinate system, and the y direction represents a direction perpendicular to the ground.

Referring to FIG. 1, the source container 100 includes an inner container 10, an outer container 20, a source amount measuring member 30, and a controller 40. In addition, the source container 100 may further include a display unit 50, a carrier gas inflow passage 60, and a mixed gas discharge passage 70. In the container of the source container 100, the inner container 10 may be accommodated in the outer container 20 so that the container has a double structure. The source amount measuring member 30 is coupled to the outer container 20 so as to sense the mass of the inner container 10.

Source materials (SM) suitable for use in the source container 100 are liquid or solid materials having a vapor pressure of 10 ⁻⁶ Torr to 10 ³ Torr in the range of 50 ° C. to 550 ° C., and are suitable for vapor phase deposition of organic molecules, conjugates. Polymer, organometallic complex or inorganic source material, for example C ₂₇ H ₁₈ AlN ₃ O ₃ (AlQ ₃ ) and N, N′-Bis (naphthalene-1-yl) -N, N′-bis ( Known materials such as phenyl) benzidine (NPB) can be used.

The source material SM is accommodated in the inner container 10. The inner container 10 has a space for accommodating the source material SM inwardly. The inner container 10 may be formed to have a predetermined thickness, and may have an open top shape. The inner container 10 may have a suitable shape corresponding to the inner space of the outer container 20 to be accommodated in the outer container 20. In addition, when the outer container 20 of the source container 100 is heated and needs heat transfer to the inside of the source container 100, the outer side of the inner container 10 may be fixed by contacting at least a part of the outer container 20. It may have a corresponding shape or other member.

The outer shape of the inner container 10 may be a cylindrical shape having a central axis in the z direction, but is not limited thereto, for example, an ellipsoid having a shaft in the transverse direction (x or y direction) or a longitudinal direction (z direction) or rolling. Can be. However, since the inner container 10 is housed in the outer container 20, it is preferable to have a structure that is easy to receive.

The inner container 10 is generated from the source gas SM and the carrier gas introduced into the inner container 10 while contacting the first space V1 and the first space V1 containing the source material SM. Some or all of the second space V2 in which the mixing of the vapor and the carrier gas takes place can be defined. The illustrated first space V1 is a region in which the source material SM can be accumulated, and the second space V2 is a gaseous phase generated from the source material SM due to vaporization and / or sublimation of the source material SM. It is a region filled with vapor which is a precursor.

Some or all of the material of the inner container 10 may be any one of metal materials such as stainless steel, aluminum, titanium, copper, quartz, glass, or a material such as ceramic having an insulating effect. It can be selected from a combination of and the present invention is not limited thereby.

The outer container 20 in which the inner container 10 is housed has a bottom surface 20W for supporting the inner container 10, and, for example, a carrier gas inflow passage 60 in the center of the bottom surface 20W. An opening may be formed to penetrate).

The outer container 20 may be composed of a plurality of parts, and the plurality of parts may be configured to be detachable from each other for charging and periodic cleaning of the source material SM. For example, as shown in FIG. 1, the outer container 20 may be composed of three independent parts, such as the bottom portion 20_1, the body portion 20_2, and the lid portion 20_3. In another embodiment, the bottom portion 20_1 and the body portion 20_2 of the outer container 20 may be integrated. The number of parts described above constituting the outer container 20 is exemplary, and the present invention is not limited thereto. For example, the outer container 20 may consist of four or more separate parts. These parts are joined to each other by fastening members 20C such as bolts / nuts, joints, and / or clamps or threaded couplings or flange structures therebetween to maintain mechanical bond strength or to maintain airtightness. And a sealing member 20D such as an O-ring.

The inner container 10 and the outer container 20 may be made of different materials. The inner container 10 and the outer container 20 are preferably made of a material having high thermal conductivity while being resistant to heat deformation so as not to be affected by the high temperature source material SM, and in the case of the inner container 10 together with chemical resistance It is desirable to have.

The source amount measuring member 30 may be coupled to the outer container 20 so as to sense the mass of the inner container 10. The source amount measuring member 30 detects the mass of the inner container 10 to generate an electrical signal for detecting the load of the source material SM based on the detected mass of the inner container 10 and controls the control unit 40. To provide.

Since the quantity measuring object of the present invention is a source material SM containing a high temperature solid or liquid chemical, the total mass of the inner container 10 containing the source material SM is sensed and accommodated in the inner container 10. It is easy to use a method of estimating the mass of the source material SM. Alternatively, there may be a gauge indicating method using a buoy member floating on the fluid surface, but due to the fluidity of the fluid, there is a high probability that a gauge error occurs due to the nature of the source material SM, and the buoy member and There is a disadvantage that the associated apparatus must be installed and that deterioration and particles of the source material SM can occur.

The source amount measuring member 30 may include a load cell coupled to the bottom surface 20W of the outer container 20 to sense a load of the inner container 10. The load cell includes a load sensor for converting a physical quantity such as force or load into an electrical signal to measure force or load. The load cell will be described with reference to FIG. 2.

The control unit 40 is electrically connected to the source amount measuring member 30 and based on the mass of the inner container 10 sensed by the source amount measuring member 30, the source material SM received in the inner container 10. ) Mass. The controller 40 is connected to the source amount measuring member 30 through electrical wiring, and is provided on one side of the outer container 20, or is separated from the outer container 20, for example, a source container ( It may be provided in the control system of the vapor deposition reactor including a 100, or may have a control unit of the control system.

The controller 40 may perform overall control of the vapor deposition reactor including the source container 100 or the source container 100. The control unit 40 may be hardware such as an electronic control unit (ECU) or a micro control unit (MCU) or software running on these hardware, or may be a combination of these. In some embodiments, the controller 40 may further include units for signal amplification and / or noise filtering, or may be connected to separate units provided externally.

The controller 40 may derive the mass of the source material SM through an arithmetic operation from the load of the inner container 10 sensed by the source amount measuring member 30. For example, since the inner container 10 contains the source material SM, at the load of the inner container 10 in the state where the source material SM is accommodated, the inside of the state in which the source material SM is not accommodated. Subtracting the mass of the container 10 alone may yield the mass of the source material SM. Here, the data on the mass of the inner container 10 in the empty state may be stored in a predetermined memory in advance. For example, if the load sensed by the current source amount measuring member 30 is 5 kg, and the pre-stored inner container 10 has a mass of 2 kg, the mass of the source material SM currently accommodated in the inner container 10 is 3 kg. Can be estimated as

However, the theoretical model described above can be modified as follows. For example, since the source container 100 is a closed system, the load measured by the source amount measuring member 30 is not only the mass of the liquid or solid source material, but also the pressure of the mixed gas in the second space V2. The temperature of the source container 100 can also affect the load that is measured as a result. For example, according to the gas equation, the pressure inside the source container 100 is proportional to the absolute temperature, and the resulting gas pressure is multiplied by the area component, such as the lower cross-sectional area of the inner container 20, resulting from the vapor of the mixed gas. The contribution of the load component can be taken into account.

In addition, since the amount of source material is reduced as the process proceeds, process cumulative time may be considered. Therefore, the parameter for detecting a suitable amount of the source material SM by mass measurement may include any one or two or more selected from the mass, temperature and process accumulation time of the inner container 10 itself. As such, the controller 40 may derive the mass and vapor pressure of the source material SM in various ways using the source amount measuring member 30, but the present invention is not limited thereto.

The source container 100 may further include a display unit 50. The display unit 50 determines the information of the source material SM in order to effectively manage the process by finding information inside the source container, such as the mass of the source material SM derived by the control unit 40 or the replacement time and pressure of the source material. Residual amount and / or source container pressure may be indicated. In addition, the display unit 50 may display various messages transmitted from the control unit 40. For example, text information such as time information for notifying the replacement cycle of the source material SM, the temperature of the source container 100, whether the source container 100 has failed, a measurement error, or the like, and graphic elements such as a gauge and a scale are displayed. This can provide information to the user.

The display unit 50 may be implemented through a separate monitoring device mounted on the side of the outer container 20 or electrically connected to the source container 100, or may be configured together with the control unit 40. Additional embodiments of the display unit 50 will be described later with reference to FIGS. 4A and 4B.

The carrier gas inflow passage 60 and the mixed gas discharge passage 70 communicate the second space V2 with the outside of the outer container 20. The carrier gas inflow flow path 60 and the mixed gas discharge flow path 70 are formed through the inner container 10 and the outer container 20. The carrier gas may be introduced into the second space V2 from the outside through the carrier gas inflow passage 60 (carrier gas IN). The carrier gas is a gaseous fluid for delivering a gaseous precursor of the source material SM from the source container 100 to the reactor where the deposition process takes place. The carrier gas may be, for example, an inert gas such as helium, nitrogen and argon, which is heated and supplied to prevent condensation of the source material used, or a reactive gas such as oxygen, ozone and carbon dioxide.

The carrier gas introduced into the second space V2 is mixed with the vapor of the source material SM diffused into the second space V2 and transferred to the reactor through the mixed gas discharge passage 70 (mixed gas). OUT). The reactor is, for example, a vapor deposition apparatus for manufacturing a semiconductor device, such as a memory or logic circuit, in which a device layer is formed by deposition of vapor or a reaction product thereof from a liquid or solid source material, or an organic EL (or It may be applied to a vapor deposition apparatus for manufacturing a display device such as an organic light emitting diode (OLED). However, this is exemplary and may be applied to other devices having a photovoltaic device, for example, an electrochemical cell, a photoconductive cell, a photoresistor, a photo switch, a phototransistor, and a phototube, depending on the source material SM. .

In some embodiments, the carrier gas inlet flow path 60 may extend from the outside of the outer container 20 to the second space V2 from the outside of the outer container 20, as shown in FIG. 1. . In this case, the inflow port 60P of the carrier gas inflow passage 60 may protrude above the surface of the source material SM and be exposed to the second space V2. However, in other embodiments, the carrier gas inlet flow path 60 may extend directly from the exterior of the vessel 10 to the second space V2.

In the source container 100 shown in FIG. 1, the carrier gas inflow flow path 60 is defined relative to the mixed gas discharge flow path 70 based on the surface of the source material SM. Since it is below, it is a bottom-up flow method. In order to implement the bottom-up flow method, the inlet port 60P of the carrier gas inlet flow path 60 is not limited to extending to the second space V2 after passing through the first space V1 as shown in the drawings. It is also possible for the inflow port 60P of the inflow flow path 60 to be disposed lower than the discharge port 70P with respect to the surface of the source material SM in the second space V2.

As described above, when the flow path 60 passes through the first space V1, the bottom surface 10W of the inner container 10 may contain the source material SM while the flow path 60 passes. As shown in FIG. 1, the side wall 10S may extend along the flow path 60. The top of the inner container 10 shown in FIG. 1 is fully open, but may also include a top wall (not shown) for closing at least a portion of the top. In addition, the upper wall may extend along the flow path 70 as the side wall 10S.

According to the above-described embodiment, the container of the source container 100 is composed of a dual structure of the inner container 10 in which the source material SM is accommodated and the outer container 20 in which the inner container 10 is accommodated. By detecting the load of the inner container 10 through the source amount measuring member 30 and displaying the remaining amount of the derived source material to the outside for easy understanding, it is possible to easily check the accurate remaining amount check and replacement cycle of the source material SM. It becomes possible.

In addition, when the cleaning of the source container is required by the double structure, the cleaning can be achieved only by cleaning or replacing only the inner container 10 that is in direct contact with the source material SM. You can increase the time.

2 is a cross-sectional view of a source amount measuring member according to an exemplary embodiment.

2, the source amount measuring member may include a load cell 31. The load cell 31 is coupled to and supported by the bottom portion 20_1 on the outer container 20, and detects a load by contacting the inner container 10. The load cell 31 protrudes from the load cell housing 33, the bottom surface 20W of the outer container 20, and loads applied to the load terminal 35 and the load terminal 35 contacting the inner container 10. It may include a signal generator 37 for generating an electrical signal whose value is different. The signal generator 37 may include, for example, an elastic member 37_1 and a strain gauge 37_2.

The load cell 31 includes a load terminal 35 inserted into an upper portion of the load cell housing 33, and an elastic member deformed according to the degree of pressure of the load terminal 35 below the load terminal 35. 37_1) may be installed. The rod terminal 35 is installed to contact the rear surface of the bottom surface 10W of the inner container 10. The load terminal 35 is pressed according to the load applied by the inner container 10 containing the source material SM. The elastic member 37_1 is deformed according to the degree of pressurization of the rod terminal 35, and, for example, the electrical resistance of the strain gauge 37_2 is changed according to the strain of the elastic member 37_1. In this case, the strain gauge 37_2 may include an electric circuit such as a Wheatstone bridge, and may convert a change in a current value changed by a resistance value into an electric signal.

However, this is exemplary, and the strain gauge 37_2 may be a transducer such as a piezoelectric element that generates a change in capacitance according to the strain of the elastic member 37_1. The controller 40 receiving the electric signal calculates the amount of the source material SM according to the algorithm described above.

3 is a cross-sectional view illustrating a state in which the inner container of the source container 100 shown in FIG. 1 is taken out to the outside.

Referring to FIG. 3, the outer container 20 may have a structure in which an upper portion thereof is opened to accommodate the inner container 10 and to carry it out. To this end, the outer container 20 may include a body portion 21 including a bottom portion 20_1 and a body portion 20_2 and a lid portion 20_3 for opening and closing an open upper portion of the body portion 21. Can be. The main body portion 21 and the lid portion 20_3 may be coupled to each other by using the fastening members 20C or hinged as separate parts. When the source material SM is exhausted, the lid 20_3 may be opened to inject the source material SM into the inner container 10. Alternatively, the inner container 10 may be taken out from the outer container 20 to fill the source material SM, and then the inner container 10 may be stored in the outer container 20. In another embodiment, although not shown, the inner container 10 may be taken out through the bottom side of the source container 100 by removing the bottom portion 20_3 of the outer container 20.

The source container needs to be cleaned periodically, and shortening its time can contribute to the improvement of productivity since the deposition process is inevitable during the cleaning process. According to the exemplary embodiment of the present invention, when the source container 100 needs to be cleaned, the container may be quickly cleaned and replaced by removing the existing inner container 10 and replacing it with a new, clean inner container. Thus, the source container 100 of the present invention has the advantage of minimizing the downtime of the process according to the cleaning operation to improve productivity, and increase the life of the equipment through proper replacement of the inner container (10).

In some embodiments, on the outer circumferential surface of the inner container 10 and on the inner circumferential surface of the outer container 20, it is possible to guide the receipt and removal of the inner container 10 and to ensure accurate contact with the source amount measuring member, eg For example, a guide line (not shown) such as an uneven surface may be formed. Thereby, the flow of the inner container 10 can be prevented, and storage and carrying out can be facilitated.

In addition, the source container 100 may further include a temperature measuring member 80 installed inside the outer container 20 to sense a temperature of the inner container 10. The temperature measuring member 80 may be connected to the control unit 40 to display corresponding temperature information on the display unit 50. In addition, the temperature measured by the temperature measuring member 80 may be a parameter of the source amount measurement as described above with reference to FIG. 1. Since the source material SM can be heated in the range of 50 ° C. to 550 ° C., as the temperature is increased, the temperature extracted by the temperature measuring member 80 improves the accuracy of the source amount measurement.

4A and 4B are cross-sectional views illustrating embodiments of the display unit illustrated in FIG. 1.

4A and 4B, the display unit 50 may include display units 51a and 51b configured as light emitting diode (LED) lamps, a speaker unit 53 for outputting sound, and a warning lamp 55. . If the display unit 50 is mounted on one side of the outer container 20 or there is a heat bath surrounding the source container 100, the display unit 50 may be attached to the outside of the outer container 20 so that the user may check in real time.

The display unit 50 displays the data provided from the control unit 40 and performs the function by the control of the control unit 40. For example, a touch pad, a touch screen, a keyboard, and a mouse for inputting a user command may The same predetermined interface unit (not shown) may be further included. The type, position, shape, and size of the display unit 50 may be variously modified as necessary, but the present invention is not limited thereto.

As shown in FIG. 4A, the display unit 51a according to an exemplary embodiment may be provided in the form of a plurality of bars that light up the residual amount of the source material SM in stages so that the display 51a may be intuitively recognized. As shown in FIG. 4B, the display unit 51b of another embodiment may display more accurate and detailed information through a liquid crystal display (LCD) screen displaying a residual amount of the source material SM as a numerical value. In addition, the display unit 51b may further display the temperature of the inner container 10 detected by the temperature measuring member 80. As another example, the display 51b may include a cathode ray tube (CRT), a plasma display panel (PDP), a digital light processing (DLP), a surface-conduction electron-emitter display (SED), and a field emission display (FED). It may be implemented in the form.

The speaker unit 53 and the warning lamp 55 may notify whether the source material SM is depleted through the flashing of a predetermined sound and light, respectively. For example, the controller 40 may determine whether the residual amount of the source material SM is equal to or less than a reference value, and notify the result of the result through the speaker unit 53 and the warning lamp 55. In addition, the speaker unit 53 and the warning light 55 may be used to perform an alarm function such as whether the source container 100 is broken or the replacement cycle of the inner container 10. As such, various states of the source container 100 may be easily displayed by the user so that quick replacement and repair may be performed accordingly.

5 is a cross-sectional view showing a source container according to another embodiment of the present invention. Concerning the components having the same reference numerals as the aforementioned components, reference may be made to the above-described disclosures unless there is a contradiction, and duplicate descriptions will be omitted.

Referring to FIG. 5, the source container 100a may further include a heating member 90 for uniform heat supply therein. The heating member 90 may heat the first space V1 in which the source material SM is filled, or heat the second space V2 in which the gas is filled. The heating member 90 may be provided independently to heat the first space V1 and the second space V2, respectively.

The heating member 90 may be in the form of a rod extending in the z direction and arranged in a two-dimensional array in the x and y directions. The heating member 90 may be, for example, a resistance heater, and a shielding structure 90C may be provided to prevent direct contact of the source material SM in the first space V1. The shielding structure 90C may be assembled in a manner of being integrated with the bottom portion 20_1 of the outer container 20 or through the bottom portion 20_1 and drawn into the first space V1.

In addition to the resistance heater, the heating member 90 may be another heating member such as a radiant heater, a circulating fluid heater, and an induction heater. Further, in another embodiment, the heating member 90 is in addition to the rod shape, other linear, circular or two stacked in a concentric arrangement or Z direction about the central axis of the carrier gas inlet flow path 60 in the first space V1. It may be a dimensional surface heating body, but the present invention is not limited thereto.

Since the inner container 10a has a shape corresponding to the inner space of the outer container 20, the shape of the shielding structure 90C of the outer container 20 is formed on the first bottom surface 10W of the inner container 10a. It may also include a protrusion (10C) protruding corresponding to the. The protrusion 10C may have a structure surrounding the heating member 90.

FIG. 6A is a cross-sectional view illustrating a source container 100b according to still another embodiment of the present invention, and FIG. 6B is a cross-sectional view taken along the line I-II of the source container shown in FIG. 6A. Concerning the components having the same reference numerals as the aforementioned components, reference may be made to the above-described disclosures unless there is a contradiction, and duplicate descriptions will be omitted.

6A and 6B, a plurality of source amount measuring members 30_1, 30_2, 30_3, and 30_4 of the source container 100b of the present embodiment are provided in plural, and have a predetermined interval on the bottom surface 20W of the outer container 20. Each of the plurality of regions 20W_1, 20W_2, 20W_3, and 20W_4 divided into two regions may be provided. The regions 20W_1, 20W_2, 20W_3 and 20W_4 may be divided into quarters of equal width about the carrier gas inflow passage 60 passing through the bottom surface 20W of the outer container 20. Source portions measuring members 30_1, 30_2, 30_3, and 30_4 are provided at the centers of the regions 20W_1, 20W_2, 20W_3, and 20W_4, respectively.

Since the source container 100 has a dual structure of the inner container 10 and the outer container 20, the load cell 31 protruding from the bottom surface 20W of the outer container 20 is substantially the inner container 10. Will be supported. Therefore, the load of the inner container 10 can be concentrated on the load terminal 35 of the load cell 31. If the rod terminal 35 of the source amount measuring member has a very small contact area, the load may be concentrated and possibly damaged, and accurate load measurement may be difficult as the inner container 10 is inclined. On the contrary, the plurality of source amount measuring members 30_1, 30_2, 30_3, and 30_4 support the lower portion of the inner container 10 evenly by area so that the load of the inner container 10 is dispersed and transmitted stably and accurately. A stable and accurate detection of the load can be achieved.

The controller 40 stores the sum of the load values detected through the plurality of source amount measuring members 30_1, 30_2, 30_3, and 30_4 disposed in the divided regions 20W_1, 20W_2, 20W_3, and 20W_4, respectively. Convert to load by 10). That is, the residual amount of the source material SM can be derived based on the total mass obtained by adding all the load values transmitted from the respective source amount measuring members 30_1, 30_2, 30_3, 30_4. In this case, a process of adding all the divided load values in the calculation process using the single source amount measuring member may be added. Although the illustrated embodiment shows that the bottom surface 20W of the outer container 20 is divided into four areas 20W_1, 20W_2, 20W_3, 20W_4, the area dividing method and the source amount measuring member 30_1, 30_2, 30_3. , 30_4) may be modified in various ways.

In addition, although the above-described source containers relate to a bottom-up flow method, this is exemplary, and in the scope of the present invention, a carrier gas inflow flow path 60 is connected to the mixed gas discharge flow path 70 based on the surface of the source material SM. In comparison, the top-down flow method is also included. For example, referring to FIG. 6A, a carrier gas may be introduced through a flow path 70, and a mixed gas may be discharged through the flow path 60.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be clear to those who have knowledge of.

Claims (17)

An inner container defining a part or all of a first space in which a source material is accommodated, and a second space in which a carrier gas introduced into and in contact with the first space is mixed with vapor generated from the source material;
An outer container accommodating the inner container;
A source amount measuring member coupled to the outer container to sense a load of the inner container;
A control unit electrically connected to the source amount measuring member and deriving an amount of source material contained in the inner container based on a load of the inner container sensed by the source amount measuring member;
A carrier gas inlet flow path communicating the outside of the outer container with the second space and including an inlet port exposed in the second space; And
A source container comprising a mixed gas discharge passage communicating with the outside of the outer container and the second space and including a discharge port exposed in the second space. The method of claim 1,
And the control unit derives the amount of the source material based on any one or two or more selected from the mass, temperature and process cumulative time of the inner container itself as additional parameters with the load of the inner container. Source container. The method of claim 1,
And the source amount measuring member includes a load cell. The method of claim 3, wherein the load cell,
A rod terminal protruding from the bottom surface of the outer container to contact the inner container; And
And a signal generator for generating an electrical signal whose value varies depending on the load applied to the load terminal. 5. The method of claim 4,
And the signal generator includes any one or both selected from a strain gauge and a piezoelectric element. The method of claim 1,
The source amount measuring member is provided in plurality, the source container, characterized in that provided in each of the plurality of areas divided at regular intervals on the inner bottom surface of the outer container. The method of claim 1,
And a display unit for displaying information on any one or a combination of the derived amount of the source material, the temperature and the pressure of the source container. The method of claim 7, wherein
And the control unit displays via the display unit whether the residual amount of the source material is equal to or less than a reference value. The method of claim 1,
And a temperature measuring member coupled to the outer container to sense a temperature inside the source container. The method of claim 1,
The outer container has a structure that can be opened or taken out of the inner container and the outer container is opened at the top or bottom, and comprises a lid or bottom for opening and closing the open top or bottom container. delete The method of claim 1,
The carrier gas inflow passage extends from the outside of the outer container to the second space through the first space,
The mixed gas discharge passage extends from the second space to the outside of the outer container. The method of claim 1,
The source container further comprises a heating member for uniform heat supply inside the source container. The method of claim 1,
And the source material is liquid or solid. 15. The method of claim 14,
And the source material has a vapor pressure of 10 ⁻⁶ Torr to 10 ³ Torr in the range of 50 ° C. to 550 ° C. The vapor deposition reactor coupled to the mixed gas discharge passage of the source container of claim 1. 17. The method of claim 16,
The vapor deposition reactor is for producing an organic light emitting device (OLED), an electrochemical cell, a photoconductive cell, a photoresist, a photo switch, a phototransistor, and a phototube.

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