KR101350509B1 - THE MoN-Cu COATING LAYER AND METHOD FOR MANUFACTURING MoN-Cu COATING LAYER - Google Patents

Abstract

The present invention relates to a MoN-Cu coating layer manufacturing method and its MoN-Cu coating layer to ensure the adhesion between the substrate and the coating layer of the intermediate layer required in the field depending on the application of the coating layer.
To this end, in order to improve adhesion between the substrate made of steel and the MoN-Cu layer coated on the substrate, the intermediate layer is sputtered on the surface of the substrate using a Mo-Cu alloy target before coating the MoN-Cu layer. It characterized in that it comprises an intermediate layer coating step of coating.
According to the above configuration, by producing a MoN-Cu coating layer having a high adhesion through the Mo-Cu interlayer or Ti interlayer coating, there is an effect that can be applied to a variety of parts that require high hardness and adhesion, and excellent friction characteristics.

Description

MENO-Cu coating layer manufacturing method and its MO-Cu coating layer {THE MoN-Cu COATING LAYER AND METHOD FOR MANUFACTURING MoN-Cu COATING LAYER}

The present invention relates to a MoN-Cu coating layer manufacturing method and its MoN-Cu coating layer, more specifically MoN-Cu to ensure the adhesion of the intermediate layer required in the component between the substrate and the coating layer according to the application of the coating layer It relates to a coating layer manufacturing method and MoN-Cu coating layer thereof.

As industrialization accelerates and resources are depleted, a variety of coating technologies have been applied to increase the efficiency of materials. As the demand for these technologies increases, research on coating characteristics is also progressing in various directions and methods.

Thus, looking at the patent application No. 2010-92005 filed by the applicant in Korea, MoN-Cu coating layer forms a high hardness thin film of 20 ~ 35 GPa, depending on the Cu content, these layers in a high temperature friction environment By forming Magelli oxide having excellent lubricity, it is considered as a next-generation automotive coating material, and can be applied to various fields requiring wear resistance and lubrication characteristics such as molds and tools. However, in order for the MoN-Cu coating layer to be used as a coating material for metal parts, molds, or tools, it is necessary to improve the adhesion between the coating layer and the base material.

Accordingly, the required adhesion force between the coating layer and the base material is different according to the application field of the coating material. An adhesion force of 30 N or more is required to be applied to an automotive coating material, and at least 50 N to be applied to a coating material of a tool and a mold. Adhesion must be secured.

On the other hand, in recent years has been researched and reported on the coating layer having a multi-purpose function, not just one function, and research on the life of the coating is also actively progressed as the demand of the coating layer increases. The most important factor that is closely related to the life of the coating layer is adhesion, and coatings that are not secured can not be applied to the product.

For example, the adhesion between the coating layer and the substrate may be improved to prevent peeling caused by the difference in physical properties (hardness, elastic modulus, thermal expansion coefficient, residual stress of the coating layer, etc.) between the high hardness coating layer and the steel base substrate. Is essential.

That is, as a method of improving the adhesion by reducing the difference in physical properties between the coating layer and the metal substrate having different properties, the most commonly used technique is to insert a buffer layer (intermediate layer) to secure the adhesion and also to provide excellent impact resistance.

FIG. 1 is a view for explaining a structure in which the buffer layer is formed. As shown in FIG. 1, at least one buffer layer of a specific material is formed under a high hardness coating layer, thereby minimizing physical property differences between the substrate and the high hardness layer, thereby reducing adhesion. Solving the problem

Thus, when looking at the factors affecting the adhesion, the three main factors are involved, such as the process part, coating, and the base material.

First of all, the factor for the process part means the coating method, and the adhesion force is caused by various coating methods (PECVD, Evaporation, AIP, Sputter, spin coating, etc.).

Second, there is a difference in adhesion between coating composition, ie, polymer, ceramic or metal, depending on the physical properties of the coating. The higher the hardness, the higher the residual stress and elastic modulus. Since there is a considerable difference in physical properties, it is difficult to secure high adhesion.

Finally, the factors for the base material are different depending on the mechanical properties of the base material, such as hardness and elastic force thermal expansion, and are sensitive to surface roughness and contamination. Most of these factors are usually variables that are difficult to change once determined. Therefore, many studies have used a method of securing adhesion by inserting an intermediate layer (buffer layer) that can buffer the properties of the coating layer and the properties of the base material. It is also known to have a good effect on improving the impact resistance of.

In particular, when the adhesion improvement is not secured as an intermediate layer of one layer, two or more layers are used in combination, and when too many intermediate layer materials are used, there is a problem in that the equipment is complicated and different from the original coating materials. As a result of using a plurality of targets, the number of targets actually used for forming the coating layer is insufficient, resulting in a low coating layer deposition rate.

Therefore, the materials which are widely used as intermediate layers to date are generally developed using the raw materials used to form the high hardness coating layer. That is, Ti, Cr Al, Si, or the like used as a raw material for the formation of a high hardness coating layer such as TiN, CrN, TiAlN, or the like is used.

However, such intermediate layers are also changed according to the base material and the coating material, and the result of the optimum intermediate layer thickness is also changed depending on the environment used, and thus, research on the optimum intermediate layer formation for each coating layer is very important.

Republic of Korea Patent Publication No. 10-2009-0013719

The present invention has been made in order to solve the conventional problems as described above, MoN-Cu coating layer manufacturing method for ensuring the adhesion of the intermediate layer required in the component between the substrate and the coating layer according to the field to which the coating layer is applied and its To provide a MoN-Cu coating layer.

The coating layer manufacturing method of the present invention for achieving the above object is, before the coating of the MoN-Cu layer to improve the adhesion between the substrate made of steel and the MoN-Cu layer coated on the substrate It characterized in that it comprises an intermediate layer coating step of sputtering coating the intermediate layer using the Mo-Cu alloy target on the surface.

On the other hand, another coating layer manufacturing method, in order to improve the adhesion between the substrate made of steel and the MoN-Cu layer coated on the substrate, the intermediate layer using a Ti target on the surface of the substrate before coating the MoN-Cu layer It characterized in that it comprises an intermediate layer coating step of sputtering coating.

In the intermediate layer coating step, by controlling the thickness of the intermediate layer is coated to control the adhesion of the intermediate layer.

In the intermediate layer coating step, the thickness of the intermediate layer is formed in a thick coating in proportion to the coating process time.

On the other hand, the coating layer manufacturing method of the present invention, the impurity removal step of removing impurities by cleaning the surface of the substrate made of a steel material; An intermediate layer coating step of coating an intermediate layer by sputtering on the surface of the substrate by using a Mo—Cu alloy target; And a MoN—Cu layer coating step of nitriding the MoN—Cu layer by sputtering using a Mo—Cu alloy target and nitrogen on the surface of the intermediate layer.

Another coating layer manufacturing method includes an impurity removal step of removing impurities by cleaning a surface of a substrate made of a steel material; An intermediate layer coating step of coating the intermediate layer on the surface of the substrate by sputtering using a Ti target; And a MoN—Cu layer coating step of nitriding the MoN—Cu layer by sputtering using a Mo—Cu alloy target and nitrogen on the surface of the intermediate layer.

In the impurity removal step, the substrate is made of high-pressure steel, and the substrate is subjected to Q / T (Quenching / Tempering) heat treatment.

In the impurity removal step, the substrate is polished and polished to improve surface roughness.

The impurity removing step may include ultrasonic cleaning of the surface of the substrate using ethanol; After the substrate is charged into the chamber, a bias voltage is applied to the substrate under an Ar gas atmosphere and a pressure of 1 to 10 mtorr, thereby generating plasma around the substrate to ion-clean the surface of the substrate.

The intermediate layer coating step includes a Mo-Cu alloy target or a Ti target for coating the intermediate layer inside the chamber, the sputtering method using the target at an Ar gas atmosphere and a pressure of 1 ~ 10 mtorr inside the chamber. An intermediate layer is coated on the surface of the substrate.

The MoN-Cu layer coating step is provided with a target for coating the MoN-Cu layer inside the chamber, the sputtering method using the target in the gas atmosphere of Ar and N2 and the pressure of 1 ~ 10 mtorr inside the chamber The NiN-Cu layer is nitride coated on the surface of the substrate.

On the other hand, the coating layer of the present invention, the intermediate layer coated by the Mo-Cu alloy target between the substrate and the MoN-Cu layer to improve the adhesion between the substrate made of steel and the MoN-Cu layer coated on the substrate It characterized by including.

Another coating layer of the present invention, an intermediate layer coated by a Ti target between the substrate and the MoN-Cu layer to improve the adhesion between the substrate made of steel and the MoN-Cu layer coated on the substrate; It is characterized by.

The present invention through the above problem solving means, by producing a MoN-Cu coating layer having a high adhesion through the coating of the Mo-Cu interlayer or Ti interlayer, it is applicable to a variety of parts requiring high hardness, adhesion and excellent friction properties It works.

In particular, both Mo-Cu interlayer or Ti interlayers exhibit 30N adhesion and excellent friction characteristics, which are required in the automotive sector, leading not only the major components of the automotive field but also the various components requiring coating technology in the automotive field. There is also an effect that can be applied to parts.

Furthermore, in the case of the Ti interlayer, a high adhesion force of 50N or more is secured, so that the Ti interlayer can be applied to various tools, molds, and mechanical parts for preventing wear.

1 is a view showing a shape in which an intermediate layer is formed for improving adhesion of a general high hardness coating layer;
2 is a view schematically showing a structure in which an intermediate layer and a MoN-Cu layer are coated on a substrate by a method of manufacturing a MoN-Cu coating layer of the present invention;
3 is a view schematically showing equipment applied to the production of MoN-Cu coating layer of the present invention,
Figure 4 shows the Mo-Cu intermediate layer and Ti intermediate layer according to the present invention, and after the stretch test of the coated intermediate layers as a comparative example, the critical load was analyzed by optical,
Figure 5 is a view showing a comparison of the elastic modulus of the material used in the coated intermediate layer and the material used in the intermediate layer coated by the present invention,
FIG. 6 shows the steps of HF1 to HF6 with the MoN-Cu coating layer coated with the Ti intermediate layer of the present invention, and the Rockwell C test indentation traces for the MoN-Cu coating layer coated without and without the intermediate layer as another example. Indentation shape data,
7 is AFM data of measuring the roughness of the MoN-Cu coating layer according to the Cu content in the Mo-Cu alloy target according to the present invention,
8 is an HRTEM analysis of the MoN-Cu coating layer of the present invention,
9 is a result of measuring the friction coefficient in the dry environment and oil environment according to the composition ratio of Mo and Cu in the MoN-Cu coating layer of the present invention,
10 is a view showing the size of the wear track measured after the wear test by the ball on disc method in the dry environment and oil environment by the composition ratio of Mo and Cu in the MoN-Cu coating layer of the present invention,
11 is a view showing a comparison of the shape of the wear track after the abrasion test in GF4 (MoDTC) oil MoN-10at% Cu coating layer and DLC according to the present invention,
12 is a scratch test results for each thickness of the Ti intermediate layer according to the present invention,
13 is a view showing the main parts of the automotive field applicable to the MoN-Cu coating layer according to the present invention,
14 is a view showing a representative part (left) to which coating technology is applied in a vehicle, and a driving part (right) to which a DLC coating is applied;
15 is a view showing a mold, a tool, and various mechanical parts applicable to the MoN-Cu coating layer according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a diagram illustrating a structure in which the intermediate layer 20 and the MoN-Cu layer 30 are coated on the substrate 10 according to the present invention.

Referring to the drawings, the method of manufacturing a MoN-Cu coating layer according to the present invention, the impurity removal step of removing impurities by cleaning the surface of the substrate 10 made of a steel material, Mo-Cu on the surface of the substrate 10 Interlayer coating step of coating the intermediate layer 20 by the sputtering method using the alloy target, MoN-Cu layer 30 by the sputtering method using Mo-Cu alloy target and nitrogen on the surface of the intermediate layer 20 It comprises a MoN-Cu layer coating step of nitriding the coating.

Here, the Ti target may be applied instead of the Mo-Cu alloy target as the target applied to the intermediate layer 20.

By the method of manufacturing the coating layer, the intermediate layer 20 of Mo-Cu or Ti may be coated on the surface of the substrate 10, and the MoN-Cu layer 30 is coated on the surface of the intermediate layer 20 to form MoN- Cu coating layer can be manufactured.

In the present invention, in the impurity removal step, the substrate 10 is made of High Speed Steel (HSS), and the substrate 10 is subjected to Q / T (Quenching / Tempering) heat treatment. That is, in the case of automotive parts through the above Q / T heat treatment, to have a surface hardness obtained during carburization, which may be a hardness of 700Hv or more.

The present invention is to improve the surface roughness by polishing and polishing the substrate 10 in the impurity removing step, and the surface roughness Ra is increased by mechanically polishing the steel.

Looking specifically at the step of removing impurities of the present invention, first using the ethanol to ultrasonically clean the surface of the substrate 10 for 10 to 20 minutes. Thereafter, after charging the substrate 10 into the chamber 40, Ar gas is introduced into the chamber 40, and the process pressure inside the chamber 40 is set to 1-10 mtorr using a vacuum pump or the like. Keep it. That is, by applying a bias voltage of 600 V or less to the substrate 10 in the pressure of 1 to 10 mtorr with the Ar gas atmosphere inside the chamber 40, a plasma is generated around the substrate 10 to generate plasma. Ionize the surface for about 10-30 minutes.

The intermediate layer coating step includes a Mo-Cu alloy target or Ti target for coating the intermediate layer 20 inside the chamber 40, and an Ar gas atmosphere and a pressure of 1 to 10 mtorr in the chamber 40. The intermediate layer 20 is coated on the surface of the substrate 10 by the sputtering method using the target.

That is, in a state where the substrate 10 is loaded in the chamber 40, Ar gas is introduced into the chamber 40, and the process pressure in the chamber 40 is increased by 1 to 10 mtorr using a vacuum pump or the like. Maintain pressure Then, by applying a power of 300 ~ 400W to the substrate 10 to coat the intermediate layer 20 on the surface of the substrate 10 for 10 to 20 minutes.

The MoN-Cu layer coating step, having a target for coating the MoN-Cu layer 30 in the chamber 40, the gas atmosphere of Ar and N ₂ and 1 ~ 10 mtorr in the chamber 40 NiN coating the MoN—Cu layer 30 on the surface of the substrate 10 by the sputtering method using the target at a pressure of.

That is, in a state where the substrate 10 is loaded in the chamber 40, Ar and N ₂ gas are introduced into the chamber 40 at a volume ratio of 1: 0.1 to 10, and the chamber is formed using a vacuum pump or the like. 40 maintains the process pressure inside the pressure of 1 ~ 10mtorr to coat the MoN-Cu layer 30 on the surface of the substrate 10 for 10 to 20 minutes.

On the other hand, MoN-Cu coating layer of the present invention, the substrate 10 and the MoN to improve the adhesion between the substrate 10 made of steel and the MoN-Cu layer 30 coated on the substrate 10 It is configured to include an intermediate layer (20) coated by the Mo-Cu alloy target between the -Cu layer (30). Here, the intermediate layer 20 may be coated by a Ti target instead of Mo-Cu alloy target.

That is, as shown in FIG. 2, the intermediate layer 20 of Mo-Cu or Ti is coated on the surface of the substrate 10 by using a Mo-Cu alloy target or a Ti target, and the surface of the intermediate layer 20 is coated on the surface of the substrate 10. MoN-Cu layer 30 is coated.

The operation and effects of the present invention will be described with reference to the accompanying drawings.

The present invention was coated with a MoN-Cu coating having a hardness of 25 to 27 GPa on a high speed steel (HSS) by sputtering, and the adhesion and fracture behaviors of the intermediate layer 20 (buffer layer) were examined. In addition, the optimum thickness and mechanical properties of the intermediate layer 20 were confirmed.

For this coating, the high-speed steel was made to have a hardness of about 700 Hv equal to the surface hardness obtained during carburization through Q / T heat treatment, and also polished to have a surface roughness (Ra) of 0.01 μm by mechanical polishing. It was.

In addition, the surface of the substrate 10 by ultrasonic cleaning for 15 minutes using ethanol before the coating process. The Ar gas is introduced into the chamber 40 and a bias voltage of 600 V or less is applied to the substrate 10 while maintaining the inside at a process pressure of 5 mtorr, thereby generating a plasma and cleaning the substrate 10 by ion cleaning for 20 minutes. Impurities) were removed on the substrate.

After that, as shown in FIG. 3, the target for coating the intermediate layer 20 and the alloy target for coating the MoN-Cu layer 30 are simultaneously installed in the chamber 40 to coat the intermediate layer 20 and the MoN-Cu layer 30. Formed. The size of the target used as above may be a size having a diameter of about 3 inches.

Looking at the method of coating the intermediate layer 20 in detail, the substrate 10 is rotatably provided on the lower portion of the target for the intermediate layer 20 coating, by adjusting the distance between the substrate 10 and the target to about 7 cm In the Ar gas atmosphere, the intermediate layer 20 is coated for about 15 minutes at a process pressure of 5 mtorr. At this time, the power applied to the substrate 10 is 300 ~ 400W to form a coating layer.

Thereafter, the substrate 10 is rotated to move the substrate 10 under the Mo-Cu alloy target, and the position of the substrate 10 and the target is 7 cm. In the chamber 40, a reactive nitriding process is performed at a process pressure of 5 mtorr in an Ar and N ₂ gas atmosphere.

In order to confirm the properties of the intermediate layer 20 coated by the above method, the intermediate layer 20 was tested under various coating conditions, which are summarized in Table 1 below.

Experimental Example Comparative specimen MoN-Cu coating on substrate without interlayer
Specimen Specimens for Interlayers

Cr interlayer MoCu Interlayer Mo interlayer Ti interlayer
Specimen by Thickness of Interlayer
Ti interlayer (coated for 5 minutes) Ti interlayer (coated for 15 minutes) Ti interlayer (coated for 30 minutes)

As summarized in Table 1 above, as the material of the intermediate layer, Mo-10at% Cu capable of film formation through Cr, Ti, Mo and alloy targets was selected. In addition, as a comparative specimen, a MoN—Cu layer was directly coated on the substrate 10 without an intermediate layer.

After the optimum coating layer was selected, the thickness effect of the coating layer was evaluated using 5, 15, and 30 minutes treated specimens. In the present invention, Ti was used.

The scratch test and the 150 kg Rockwell C scale indentation test (Benz test) may be used as a method for testing the adhesion of the intermediate layer.

Scratch test is a method of increasing the load on the coating by using a round stylus and moving the substrate 10 at a constant speed to estimate the adhesive force with a critical load value when the thin film is peeled off. Scratch test has the advantage of easy specimen preparation and quick measurement, but it is a destructive analysis on the coating surface and the result is difficult to interpret because the relationship between coating and adhesion is not clearly identified.

Indentation method is a method of indenting the adhesion force by indentation of the Rockwell C Vickers (Rokwell. C, Vickers) on the coating by the indentation trace and the crack length generated in the surroundings. Using the Rockwell C test method in the present invention, the indentation traces were divided into HF1 to HF6 steps to be identified as an additional method. In addition, the nanoindenter was measured to analyze the hardness and elastic properties of the intermediate layer, the surface was observed through FE-SEM, and AFM measurement was performed to confirm the roughness of the surface.

In FIG. 4, after forming an intermediate layer using various materials, a MoN-Cu coating layer was formed using a Mo-10at% Cu target, and the results of the scratch test are summarized.

Both the MoN-Cu coating layer without the intermediate layer and the MoN-Cu coating layer coated with the bias without the intermediate layer showed low adhesion of 10.5N and 10.4N. In addition, when the Cr intermediate layer was formed, the adhesion was about 10.2N, showing almost similar values. However, when Mo was used as the material of the intermediate layer, the adhesion increased by about 70% to 17.4N, but in this case, the adhesion was lower than that required by the automobile parts.

On the other hand, when the intermediate layer was formed using the alloy target Mo-10 at% Cu, the adhesion increased to 31N or more, and when Ti was used, the adhesion increased to 50N or higher to observe a high adhesion to be used for tools and molds. It became.

As a result of the scratch evaluation, the intermediate layer using the Mo-Cu alloy target and the Ti target showing excellent adhesion showed an excellent elasticity similar to that of the material of the substrate as shown in FIG. 5. In addition, in the case of the Mo-Cu interlayer, when 10 at% Cu is used, it has a high hardness of 15 GPa in the unnitrided state, and thus will serve as an intermediate layer between the high hardness MoN-Cu layer and the 8GPa substrate. Expected.

6 is a result of confirming the adhesion through the indentation traces by the Rockwell C test method. In the case of specimens formed by applying the bias voltage without the interlayer without MoN-Cu coating and the interlayer without adhesion of about 10N, the adhesion was low, and the results of Rockwell test showed the results of HF5 ~ 6.

The MoN-Cu coating layer coated with the Mo-Cu alloy target showed excellent adhesion as HF2, and the coating layer coated with Ti as the intermediate layer showed the best adhesion as the HF1 level even by the indentation test example. .

As a result of the experiment, as shown in FIG. 6, the specimen without the intermediate layer was severely collapsed around the indentation and showed the same shape as HF6, and the indentation trace of the Mo specimen was confirmed to have a shape in which the peripheral coating was split. However, the Ti specimen confirmed that the coating layer was clean around the indentation part. This corresponds to HF1 in the HF index in the Rockwell C test method. On the right side of FIG. 6, the reference figure used as the comparison object of the indentation test was put together.

MoN-Cu coating layer formed on the various intermediate layers had a difference in hardness value, but showed a hardness value of 22 GPa or more. In particular, the coating layer formed on the Mo-Cu intermediate layer exhibiting the highest adhesion showed the lowest 23 GPa, but the coating layer formed on the Ti intermediate layer exhibiting the highest adhesion showed the highest hardness value of 27 GPa. In particular, the composition of each coating layer was shown to be the same as that of the target irrespective of the intermediate layer.

As a result, the coating layer made of the alloy target was composed of a hardened layer containing nitrogen in the same composition as the intermediate layer of Mo-10at% Cu composition, this layer has a high hardness of 23GPa and 30N or more required for automotive parts Adhesion was maintained, and surface roughness of Ra value of 0.1 ㎛ or less showed very good physical properties when applied to automobile parts.

7 is a view showing the results of measuring the roughness of the coating layer on which the MoN-Cu layer is formed by AFM after forming the intermediate layer using the Mo-Cu alloy target, showing that the Ra value of 0.1 nm or less in all compositions Able to know.

Figure 8 shows the results of HRTEM analysis of the microstructure of the MoN-Cu coating layer, the cross-sectional structure was a normal form in the SEM, but was observed to have a nanolayer form of less than 10nm on the TEM, 5 inside the nanolayer It was observed that less than nm grains were present. In addition, XRD analysis showed no Cu layer and Mo2N phase was formed, and the limited field diffraction analysis for HRTEM phase showed weakly observed Mo2N phase and Cu phase.

On the other hand, Figure 9 is a view showing the friction coefficient measurement results in the dry and wet environment of the MoN-Cu coating layer, Figure 10 is measured after the wear test by the ball on disc method in the dry and wet environment of the MoN-Cu coating layer This is a drawing comparing the size of the worn tracks. In order to evaluate the applicability to automobile driving parts, the ball on disc method is used in dry and wet environments (GF3 oil: A oil) and GF4 oil (B oil). The friction coefficient was measured by.

At this time, the load was 10N and measured up to 1000m at a rotational speed of 5 cm / sec. In dry environment and GF3 oil, DLC layer showed excellent characteristics, but in GF4 oil, MoN-7, 10 at.% Cu coating layer showed excellent friction characteristics.

In particular, as shown in FIG. 11, the surface layer observation of the coating layer damage showed that the DLC coating was almost damaged in the early stage, but the MoN-Cu coating layer showed excellent durability as a coating material of the next-generation automobile. .

In the case of the Ti interlayer, it has a high adhesive strength of 50N or more, so that it can be used not only for automobile parts but also for tools and molds. In order to evaluate the optimum interlayer, the Ti interlayer was formed for 5 minutes, 15 minutes, and 30 minutes, and then the MoN-Cu layer was formed to measure adhesion. The results are summarized in FIG. 12.

The thickness of each Ti intermediate layer was measured to be 0.2 μm for 5 minutes, 0.6 μm for 15 minutes, and 1.2 μm for 30 minutes. As a result of adhesion measurement, 25N and 15 minutes treated specimens increased significantly above 50N as the previous one, while 30 minutes treated specimens decreased to 15N. Eventually, by adjusting the thickness of the Ti intermediate layer, it will be possible to secure both the 30N intermediate layer applicable to the automotive parts and the adhesion force of 50N applicable to the mold tool.

As a result of evaluating the friction coefficient of the coating layer, the Mo-Cu alloy intermediate layer almost the same result was obtained. The frictional properties were found to depend on the hardness, alloy composition and roughness of the high hardness layer on the surface.

On the other hand, MoN-Cu coating layer having a high adhesion in the present invention is expected to be applicable to a variety of fields such as high hardness and adhesion, excellent friction properties.

First, in the case of a coating layer having a Mo-Cu intermediate layer or a Ti intermediate layer to show the adhesion and excellent friction characteristics of 30N or more, it will be applicable to the automobile driving parts shown in FIGS. 13 and 14 as next-generation coating materials.

That is, Figure 13 is a view showing the main parts of the automotive field applicable to the coating technology of the present invention, Figure 14 is a representative part (left) to which the coating technology is applied in the vehicle, and the driving part (right) to which the DLC coating is applied It is shown.

15 is a view showing a mold, a tool, and various mechanical parts to which a dry surface treatment process is applied, and in the case of a Ti coating layer having a high adhesion force of 50N or more, it may be applicable to various tools, molds, and mechanical parts for preventing wear. will be.

On the other hand, the present invention has been described in detail only with respect to the specific examples described above it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, it is natural that such variations and modifications belong to the appended claims. .

10 substrate 20 intermediate layer
30: MoN-Cu layer 40: chamber

Claims (13)

In order to improve adhesion between the substrate 10 made of steel and the MoN-Cu layer 30 coated on the substrate 10, the surface of the substrate 10 before coating the MoN-Cu layer 30. Method for producing a MoN-Cu coating layer, characterized in that it comprises an intermediate layer coating step of sputtering coating the intermediate layer 20 using the Mo-Cu alloy target. In order to improve adhesion between the substrate 10 made of steel and the MoN-Cu layer 30 coated on the substrate 10, the surface of the substrate 10 before coating the MoN-Cu layer 30. MoN-Cu coating layer manufacturing method characterized in that it comprises an intermediate layer coating step of sputtering coating the intermediate layer 20 using a Ti target. 3. The method according to claim 1 or 2,
In the intermediate layer coating step, MoN-Cu coating layer manufacturing method characterized in that to control the adhesion of the intermediate layer 20 by adjusting the thickness of the intermediate layer 20 is coated. The method of claim 3, wherein
In the intermediate layer coating step, MoN-Cu coating layer manufacturing method characterized in that the thickness of the intermediate layer 20 is formed in a thick coating in proportion to the coating process time. An impurity removal step of removing impurities by cleaning the surface of the substrate 10 made of a steel material;
An intermediate layer coating step of coating the intermediate layer 20 on the surface of the substrate 10 by sputtering using Mo-Cu alloy targets; And
MoN-Cu layer coating step of nitriding the MoN-Cu layer 30 by the sputtering method using a Mo-Cu alloy target and nitrogen on the surface of the intermediate layer 20; MoN-Cu Coating layer manufacturing method. An impurity removal step of removing impurities by cleaning the surface of the substrate 10 made of a steel material;
An intermediate layer coating step of coating the intermediate layer 20 on the surface of the substrate 10 by sputtering using a Ti target; And
MoN-Cu layer coating step of nitriding the MoN-Cu layer 30 by the sputtering method using a Mo-Cu alloy target and nitrogen on the surface of the intermediate layer 20; MoN-Cu Coating layer manufacturing method. The method according to claim 5 or 6,
In the impurity removal step, the substrate (10) is made of a high-pressure steel, MoN-Cu coating layer manufacturing method, characterized in that the heat treatment (Q / T (Quenching / Tempering)) the substrate (10). 8. The method of claim 7,
MoN-Cu coating layer manufacturing method characterized in that to improve the surface roughness by polishing and polishing the substrate (10) in the impurity removal step. The method according to claim 5 or 6,
Wherein the impurity removing step comprises:
Ultrasonic cleaning the surface of the substrate (10) using ethanol;
After the substrate 10 is charged into the chamber 40, a bias voltage is applied to the substrate 10 under an Ar gas atmosphere and a pressure of 1 to 10 mtorr, thereby generating plasma around the substrate 10 to generate a plasma. Method for producing a MoN-Cu coating layer, characterized in that the surface of the ion (10). The method according to claim 5 or 6,
The intermediate layer coating step,
Mo-Cu alloy target or Ti target for coating the intermediate layer 20 in the interior of the chamber 40, sputtering using the target in the pressure of Ar gas atmosphere and 1 ~ 10 mtorr inside the chamber 40 Method of manufacturing a MoN-Cu coating layer, characterized in that the coating of the intermediate layer 20 on the surface of the substrate (10) by the method. The method according to claim 5 or 6,
The MoN-Cu layer coating step,
It is provided with a target for coating the MoN-Cu layer 30 in the chamber 40, the sputtering using the target in the gas atmosphere of Ar and N ₂ and the pressure of 1 ~ 10 mtorr in the chamber 40 Method of producing a MoN-Cu coating layer, characterized in that the NiN coating the MoN-Cu layer (30) on the surface of the substrate (10) by the method. Mo-Cu between the substrate 10 and the MoN-Cu layer 30 to improve the adhesion between the substrate 10 made of steel and the MoN-Cu layer 30 coated on the substrate 10 MoN-Cu coating layer comprising a; intermediate layer 20 coated by the alloy target. The Ti target is formed between the substrate 10 and the MoN-Cu layer 30 so as to improve the adhesion between the substrate 10 made of steel and the MoN-Cu layer 30 coated on the substrate 10. MoN-Cu coating layer comprising a; intermediate layer 20 is coated by.

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