KR101332323B1 - Apparatus for manufacturing roll stamp, method for manufacturing roll stamp using the same and method for manufacturing replication stamp - Google Patents

Apparatus for manufacturing roll stamp, method for manufacturing roll stamp using the same and method for manufacturing replication stamp Download PDF

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Publication number
KR101332323B1
KR101332323B1 KR1020130035234A KR20130035234A KR101332323B1 KR 101332323 B1 KR101332323 B1 KR 101332323B1 KR 1020130035234 A KR1020130035234 A KR 1020130035234A KR 20130035234 A KR20130035234 A KR 20130035234A KR 101332323 B1 KR101332323 B1 KR 101332323B1
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South Korea
Prior art keywords
stamp
roll
replica
substrate
manufacturing apparatus
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KR1020130035234A
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Korean (ko)
Inventor
이재종
임형준
최기봉
김기홍
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한국기계연구원
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

The present invention relates to a roll stamp manufacturing apparatus, a roll stamp manufacturing method and a duplicate stamp manufacturing method using the same, and provided with a heating device and a cooling device therein, the rotational roll is inserted into a cylindrical roll stamp substrate on the outer peripheral surface at a constant speed Roll stamp manufacturing apparatus that allows the surface of the roll stamp substrate to be heated to a uniform temperature distribution so that the pattern of the replica stamp can be uniformly transferred to the surface of the roll stamp substrate, and the pattern can be transferred to various materials. The present invention relates to a roll stamp manufacturing method and a duplicate stamp manufacturing method using the same.

Description

Apparatus for manufacturing roll stamp, method for manufacturing roll stamp using the same and method for manufacturing replication stamp

The present invention relates to a roll stamp manufacturing apparatus, a roll stamp manufacturing method and a duplicate stamp manufacturing method using the same, and provided with a heating device and a cooling device therein, the rotational roll is inserted into a cylindrical roll stamp substrate on the outer peripheral surface at a constant speed Roll stamp manufacturing apparatus that allows the surface of the roll stamp substrate to be heated to a uniform temperature distribution so that the pattern of the replica stamp can be uniformly transferred to the surface of the roll stamp substrate, and the pattern can be transferred to various materials. The present invention relates to a roll stamp manufacturing method and a duplicate stamp manufacturing method using the same.

In general, in the semiconductor manufacturing process, a shape of a mask or a stamp is transferred to a substrate such as silicon and glass to produce a micrometer or a nanometer-sized microstructure in large quantities.

In the method of transferring the shape of the mask or stamp, photolithography using a mask aligns the mask on a resist-coated substrate, and then irradiates with light to cure the resist. .

Imprint Lithography, which uses stamps, uses a method such as placing a stamp on a substrate on which the resist is applied and then placing the stamp on the substrate to which the stamp and the substrate are in close contact with each other. Cure.

On the other hand, a large number of roll stamps are used for patterning, and in order to produce a roll stamp of transparent or opaque material required for this purpose, a method of directly patterning the roll surface is performed by using a laser interferometer after coating a resist. Method of ② patterning using electron beam lithography, ③ method of forming a pattern on a thin film substrate and attaching it to a roll surface, ④ coating a resist on a flat master stamp and transferring the master pattern to the surface of the roll Method, ⑤ photolithography method to align the mask on the substrate on which the resist is applied, and then irradiate light to cure the resist; Imprint Litography of Curing Resist Using Etc. hography) method.

At this time, the method ① and the method ② take a long time according to the work, the rigidity of the resist to be used is low, and after patterning, pattern transfer is performed on the roll surface through a separate etching process. It takes a lot of cost and time to implement the pattern, there is a disadvantage that there is a limit to the implementation of the nanopattern.

In addition, the method ③ and the method ④ do not coat the resist on the roll surface, but PC, PMMA, PET, etc. are used, so that the ductility is high, and the glass transition temperature is low, which limits the use at high temperatures. Difficult problems include. Therefore, the method as described above has a limitation in uniformly implementing a nanopattern or a submicrosized pattern.

In addition, the method ⑤ is impossible to transfer the pattern to the cylindrical substrate, and the method ⑥ is most commonly used in the case of a flat plate, and a roll stamp with a pattern is necessary to transfer the pattern to the roll-shaped substrate.

Related publications include Korean Patent Publication No. 2010-0135353 (published on Dec. 27, 2010, entitled: Imprint or Low Print Lithography Stamp Manufacturing Apparatus and Manufacturing Method), but the same problem as described above is improved. This is necessary.

Domestic Publication No. 2010-0135353 (published Dec. 27, 2010, Name: Stamp manufacturing apparatus and manufacturing method for imprint or low-print lithography)

An object of the present invention is provided with a heating device and a cooling device therein, by rotating a rotating roll in which the cylindrical roll stamp substrate is fitted on the outer peripheral surface at a constant speed, so that the surface of the roll stamp substrate is heated to a uniform temperature distribution The pattern of the replica stamp is to be uniformly transferred to the surface of the roll stamp substrate, and to provide a roll stamp manufacturing apparatus capable of transferring the pattern to a variety of materials, a roll stamp manufacturing method and a duplicate stamp manufacturing method using the same.

In the apparatus for manufacturing a roll stamp to be used in the imprint process according to the invention, the rotation around the axis of rotation by a motor drive, a heating device and a cooling device is provided therein, the cylindrical roll stamp substrate is fitted to the outer peripheral surface Losing rolling rolls; A replication stamp provided below the rotary roll to contact the roll stamp substrate and having a resist applied to the upper surface on which the pattern is formed so that the pattern is transferred onto the roll stamp substrate; A first fixing chuck for fixing the replica stamp to an upper side thereof; A horizontal conveying apparatus for conveying the rotating rolls in a horizontal direction; And a vertical conveying apparatus for conveying the rotary roll in a vertical direction. And is formed to include a plurality of protrusions.

In addition, the roll stamp manufacturing apparatus is connected to the vertical transfer device so that a uniform pressure is applied to the surface in contact with the roll stamp substrate and the replica stamp, cushioning unit having a certain elasticity; It may be formed to include.

In addition, the roll stamp manufacturing apparatus includes a temperature sensor for measuring the surface temperature of the rotary roll and the roll stamp substrate; And a pressure sensor measuring a degree of pressure applied between the roll stamp substrate and the replica stamp. It may be formed to include more.

In addition, the roll stamp manufacturing apparatus is a temperature control plate that the first fixing chuck is disposed on the upper surface; A second fixing chuck on which a flat substrate or a replica stamp is fixed to an upper side thereof is disposed on an upper side thereof, and an ultraviolet irradiation unit to which ultraviolet rays are irradiated in an upward direction; And an index table for rotating the position of the temperature control plate and the ultraviolet irradiation unit by a predetermined angle. It may be formed to include.

In addition, the roll stamp manufacturing apparatus is a temperature control plate that the first fixing chuck is disposed on the upper surface; A second fixing chuck on which a flat substrate or a replica stamp is fixed to an upper side thereof is disposed on an upper side thereof, and an ultraviolet irradiation unit to which ultraviolet rays are irradiated in an upward direction; And a substrate transfer device for swapping positions of a replica stamp fixed to the first fixing chuck and a substrate or replica stamp fixed to the second fixing chuck. It may be formed to include.

In addition, the cooling device is formed along the inner circumferential surface of the rotary roll, the cooling medium flow portion flowing cooling medium; An inlet valve through which a cooling medium flows into the cooling medium flow unit; And a discharge valve discharging a cooling medium to the cooling medium flow unit. It may be formed to include.

In addition, a method of manufacturing a roll stamp using the roll stamp manufacturing apparatus comprises the steps of: 1) arranging a replica stamp having a pattern to be transferred to the roll stamp substrate to be positioned below the rotary roll; 2) applying a resist to the top surface of the replica stamped with an anti-stick coating; 3) using the horizontal feeder and the vertical feeder, the roll stamp substrate is located on one side of the edge of the replica stamp, and the roll stamp substrate and the replica stamp are pressed to be in contact with a predetermined pressure; And 4) the roll is rotated at a constant speed so that a resist is coated on the roll stamp substrate, and the resist coated by UV and heat is cured on the surface of the roll stamp substrate. . ≪ / RTI >

In addition, the roll stamp manufacturing method after the step 2), the step of heating the rotary roll through the heating device located inside the rotary roll (S121), and after the step 4), the rotary roll located inside the The method may further include cooling through a cooling device (S141).

In addition, the roll stamp manufacturing method occurs in the step 4) when the replica is fixed by the second fixing chuck, and the ultraviolet irradiation unit irradiated with ultraviolet rays upward in the lower fixing chuck, Resist hardening can be characterized by ultraviolet irradiation.

Method for manufacturing a duplicate stamp used in the roll stamp manufacturing apparatus includes a) mounting a spacer on the edge of the mold for producing a duplicate stamp (S210); b) allowing the pattern of the master stamp on which the pattern to be transferred to the replica stamp is formed to be located on the lower side, and then covering and fixing the cover of the mold for producing the replica stamp (S220); c) injecting a resist into the space between the master stamp and the mold for producing a replica stamp, and hardening it (S230); d) separating each of the master stamp, the spacer, and the mold for making a duplicate stamp to complete a duplicate stamp (S240); Is formed, including, but may be an anti-stick film treatment on the surface of the pattern of the master stamp.

In addition, the surface of the completed replica stamp may be an anti-stick film treatment.

Roll stamp manufacturing apparatus according to the present invention, a roll stamp manufacturing method and a duplicate stamp manufacturing method using the same is provided with a heating device and a cooling device therein, rotating the rotary roll in which the cylindrical roll stamp substrate is fitted on the outer peripheral surface at a constant speed By doing so, the surface of the roll stamp substrate is heated to a uniform temperature distribution so that the pattern of the replica stamp can be uniformly transferred to the surface of the roll stamp substrate, and pattern transfer is possible for various materials.

In addition, the present invention can transfer the pattern to the surface of the transparent or opaque cylindrical roll stamp substrate using a plate-shaped replica stamp, to produce a roll stamp, it is possible to continuously pattern using the manufactured roll stamp This not only improves productivity, reduces production costs, but also allows for patterning in large areas.

In addition, the present invention can be used to transfer shapes to flexible substrates such as polycarbonate (PC), polydimethylsiloxan (PDMS), and polymethylmethacrylate (PMMA), in addition to rigid substrates such as silicon and glass, such as flexible displays, solar cells, and LEDs. Applicable to various fields.

1 is a schematic view showing a roll stamp manufacturing apparatus according to the present invention.
Figure 2 is a partial cross-sectional view showing the internal configuration of the rotary roll of the roll stamp manufacturing apparatus according to the present invention.
Figure 3 is a flow chart showing a duplicate stamp manufacturing method used in the roll stamp manufacturing apparatus according to the present invention.
4 and 5 are a front view schematically showing a roll stamp manufacturing method using a roll stamp manufacturing apparatus according to the present invention.

Hereinafter, a roll stamp manufacturing apparatus according to the present invention as described above, a roll stamp manufacturing method and a duplicate stamp manufacturing method using the same will be described in detail with reference to the accompanying drawings.

Example 1

In Example 1 will be described with respect to the roll stamp manufacturing apparatus according to the present invention with reference to FIG.

Roll stamp manufacturing apparatus according to the present invention relates to a device for manufacturing a roll stamp used in the imprint process, largely, the rotary roll 100, the replica stamp 200, the first fixing chuck 310, horizontal transfer device 410 and the vertical transfer device 420 is formed.

First, the rotary roll 100 is to be rotated by a motor drive around the rotation axis, the heating device 110 and the cooling device 120 is provided inside, the cylindrical roll stamp substrate 220 on the outer peripheral surface Is fitted.

The rotary roll 100 is made of a metal material is formed so that the heat conduction by the heating device 110 and the cooling device 120 provided therein.

In this case, the roll stamp substrate 220 may be a transparent or opaque material, and in addition to a rigid substrate such as silicon and glass, a flexible substrate such as polycarbonate (PC), polydimethylsiloxan (PDMS), and polymethylmethacrylate (PMMA) may be used. It may be.

The replica stamp 200 is provided on the lower side of the rotary roll 100 so as to contact the roll stamp substrate 220, the resist 210 is applied to the upper surface formed with a pattern to the roll stamp substrate 220 Allow the pattern to be transferred.

The replica stamp 200 is subjected to an anti-adhesion coating on the surface, so that the resist 210 applied to the surface is adhered to the surface of the roll stamp substrate 220.

As the anti-sticking film, materials such as spin-on-glass (SOG), polyurethan acrylate (PUA), polyvinyle silazine (PVSZ), and an organic / inorganic polymer may be used.

In other words, the roll stamp manufacturing apparatus of the present invention, when the resist 210 applied on the surface of the replica stamp 200 is pressed to a predetermined pressure in contact with the roll stamp substrate 220, the rotary roll 100 The roll stamp substrate 220 is heated to a predetermined temperature through the heating device 110 provided therein. At this time, the resist 210 is hardened after the resist 210 is adhered to the roll stamp substrate 220 having a relatively high adhesive force.

Through this, the pattern of the duplicated stamp 200 is duplicated and formed on the surface of the roll stamp substrate 220, and the continuous pattern transfer is performed on the surface as the roll stamp substrate 220 is continuously rotated and moved. Will be done.

On the other hand, the first fixing chuck 310 is to ensure that the replica stamp 200 is fixed to the upper side, it is possible to prevent the position of the replica stamp 200 is not fixed pattern transfer is inaccurate.

The horizontal feeder 410 allows the rotary roll 100 to be transferred in the horizontal direction, and the vertical feeder 420 allows the rotary roll 100 to be transferred in the vertical direction.

The horizontal transfer apparatus 410 serves to arrange the roll stamp substrate 220 at one edge of the pattern of the replica stamp 200 before the pattern transfer starts, and the roll of the roll stamp substrate 220 is prepared. The rotating roll 100 is horizontally transferred in a direction opposite to the direction in which the stamp substrate 220 rotates, so that the pattern of the replica stamp 200 is continuously transferred.

The vertical transfer device 420 adjusts the height and pressure to contact the roll stamp substrate 220 and the replica stamp 200 at a predetermined pressure fitted to the outer circumferential surface of the rotary roll 100, the pattern transfer is completed, The roll stamp substrate 220 is separated from the replica stamp 200.

In the roll stamp manufacturing apparatus of the present invention, when the roll stamp substrate 220 and the replica stamp 200 are in contact with each other and the pattern is transferred, a uniform pressure is applied in the longitudinal direction of the roll stamp substrate 220, and the overall It is connected to the vertical transfer device 420 to uniformly transfer the pattern, it may be formed further comprising a cushioning unit 430 having a predetermined elasticity.

In addition, the roll stamp manufacturing apparatus of the present invention is the surface temperature of the rotary roll 100 and the roll stamp substrate 220 by the heating device 110 and the cooling device 120 provided inside the rotary roll 100. It may further include a temperature sensor for measuring the temperature so that the temperature can be properly adjusted, and a pressure sensor for measuring the degree of pressure applied between the roll stamp substrate 220 and the replica stamp 200.

Through this, the roll stamp manufacturing apparatus of the present invention can appropriately control the temperature for melting and curing the resist 210, the pattern of the replica stamp 200 to the roll stamp substrate 220 in a uniform thickness The contact pressure can be adjusted to be transferred.

As shown in FIG. 2, the heating device 110 may be formed by an induction heating method in the form of a coil, or may be formed in the form of a cartridge heater.

The cooling device 120 is formed along the inner circumferential surface of the rotary roll 100, and a cooling medium flow part 121 through which a cooling medium flows, and an inlet valve 122 through which a cooling medium flows into the cooling medium flow part 121. ) And a discharge valve 123 through which a cooling medium is discharged to the cooling medium flow part 121.

At this time, the cooling device 120 may be used to cool the surface of the rotary roll 100 heated to a predetermined temperature or more by the heating device 110, and after the pattern transfer operation is completed, the inlet valve 122 Through the low-temperature silicon oil, nitrogen gas or air through the circulating the cooling medium flow unit, it is configured to be cooled through the process to be discharged to the discharge valve (123).

Accordingly, the roll stamp manufacturing apparatus according to the present invention is provided with a heating device 110 and a cooling device 120 therein, the rotational roll 100 is fitted with a cylindrical roll stamp substrate 220 on the outer circumferential surface By rotating at a speed, the surface of the roll stamp substrate 220 is heated to a uniform temperature distribution so that the pattern of the replica stamp 200 can be uniformly transferred to the surface of the roll stamp substrate 220, and various materials. There is also an advantage that pattern transfer is possible for.

In addition, the roll stamp manufacturing apparatus according to the present invention by using the plate-shaped replica stamp 200, by transferring the pattern to the surface of the transparent or opaque cylindrical roll stamp substrate 220, it is possible to manufacture a roll stamp.

On the other hand, as shown in Figure 1, the roll stamp manufacturing apparatus according to the present invention is the temperature control plate 330, the first fixing chuck 310 is disposed on the upper surface, the flat substrate or replica stamp 200 The second fixing chuck 320 fixed to the upper side may be disposed on the upper surface, and may further include an ultraviolet irradiating unit irradiated with ultraviolet rays upward.

At this time, the replication stamp 200 may be fixed to the second fixing chuck 320 when the pattern is transferred to the roll stamp substrate 220 by an ultraviolet curing method.

The ultraviolet irradiation part is provided with a transparent glass plate on the upper side is formed to be irradiated with ultraviolet rays to the replication stamp 200 fixed to the fixing chuck.

In addition, the roll stamp manufacturing apparatus of the present invention to be fixed to the substrate in a flat state to the second fixing chuck 320, the roll through the replication stamp 200 fixed to the first fixing chuck 310 After the pattern transfer to the stamp substrate 220 is completed, the second fixing chuck 320 is positioned on the lower side of the roll stamp substrate 220, the pattern formed on the roll stamp substrate 220 May be transferred directly to the substrate fixed to the second fixing chuck 320.

To this end, the roll stamp manufacturing apparatus of the present invention is the position of the replication stamp 200 fixed to the first fixing chuck 310 and the substrate or replica stamp 200 fixed to the second fixing chuck 320. Substrate transfer device (not shown) to replace each other, or an index table for rotating the position of the temperature control plate 330 and the ultraviolet irradiation at an angle may be further provided.

Accordingly, the present invention can be continuously patterned using the manufactured roll stamp, thereby improving productivity and reducing production cost.

The temperature control plate 330 serves to heat or cool the replica stamp 200 fixed to the first fixing chuck 310 to perform pattern transfer through heat curing.

The roll stamp manufacturing apparatus of the present invention is a heating device 110 and a cooling device provided in the rotary roll 100, when the resist 210 is applied to the surface of the replica stamp 200 is a thermosetting resist 210 ( The resist 210 may be cured through the 120, and the resist 210 may be cured through the temperature control plate 330.

In addition, the roll stamp manufacturing apparatus of the present invention, when the resist 210 applied to the surface of the replica stamp 200 is an ultraviolet curable resist 210, the roll stamp substrate on the second fixing chuck 320 ( After fixing the replica stamp 200 on which the pattern to be transferred is formed on 220, the replica stamp 200 is operated by the ultraviolet irradiation unit to manipulate the index table so that the replica stamp 200 is in contact with the rotating roll 100. ) And the surface where the roll stamp substrate is in contact with each other may be irradiated with ultraviolet rays.

Example 2

In Embodiment 2, a method of manufacturing a replica stamp 200 used in a roll stamp manufacturing apparatus according to the present invention will be described with reference to FIG.

The replica stamp 200 is a pattern to be transferred to the roll stamp substrate 220 is inserted into the rotary roll 100 is formed, the master stamp 610 is formed by copying.

The replica stamp 200 protects the master stamp 610, which is the original, and has interfacial properties of the master stamp 610 and interfacial properties of the roll stamp substrate 220, that is, anti-sticking film and adhesive strength. In consideration of this, it may be made of various materials such as PDMS and PUA.

Method for producing a replica stamp 200 of the present invention comprises the steps of: a) mounting a spacer 630 on the edge of the mold 620 for making a replica stamp (S210); b) allowing the pattern of the master stamp 610 on which the pattern to be transferred to the replica stamp 200 is formed to be located on the lower side, and then covering and fixing the cover of the mold 620 for producing the replica stamp (S220); c) injecting and curing the resist 210 into a space between the master stamp 610 and the mold for producing a duplicate stamp (620) (S230); d) separating the master stamp 610, the spacer 630, and the replica stamp forming template 620 in order of completion of the replica stamp 200 (S240); .

Referring to Figure 3, the method of manufacturing a replica stamp 200 of the present invention in order to form a portion having a pattern of the replica stamp 200 higher than the remaining area in the mold 620 for replica stamp manufacturing, the replication It includes mounting on the edge of the stamping mold 620.

Thereafter, the replica stamp 200 is positioned on the lower side of the master stamp 610 on which the pattern to be transferred is formed, and then the cover of the replica stamp manufacturing form 620 is fixed to cover the master stamp 610. And a resist 210 is injected into the space between the mold 620 for forming the duplicate stamp and curing.

At this time, the master stamp 610 is treated with an anti-stick film so as not to adhere to the resist 210 on the side on which the pattern is formed.

After the resist 210 is cured, when the cover 210, the master stamp 610, and the spacer 630 of the replica stamp manufacturing form 620 are separated in the reverse order of assembly, the resist 210 is separated from the master stamp 610. The replica stamp 200 has a shape.

After the replica stamp 200 is completed, the surface is subjected to an anti-stick coating process, and in the process of transferring the pattern onto the roll stamp substrate 220, the resist 210 applied to the surface is the roll stamp substrate ( It is formed to be hardened by being adhered to 220).

The replication stamp 200 is uniformly fixed using the first fixing chuck 310 or the second fixing chuck 320, and transfers a pattern in contact with the roll stamp substrate 220, wherein the replication is performed. The pattern is transferred to the roll stamp substrate 220 to have a shape opposite to the pattern formed on the surface of the stamp 200. As a result, the pattern having the same shape as the pattern of the master stamp 610 is the roll stamp substrate. To be transferred to 220.

Example 3

In Example 3, a method of manufacturing a roll stamp using a roll stamp manufacturing apparatus according to the present invention with reference to Figures 4 and 5 will be described.

The method of manufacturing a roll stamp of the present invention includes the steps of: 1) arranging a replica stamp 200 having a pattern to be transferred to the roll stamp substrate 220 to be positioned below the rotary roll 100 (S110); 2) a step in which the resist 210 is applied to the top surface of the replica stamp 200 subjected to the anti-sticking film in a flat manner (S120); 3) The roll stamp substrate 220 is positioned on one side of the edge of the replica stamp 200 by using the horizontal transfer apparatus 410 and the vertical transfer apparatus 420, and the roll stamp substrate 220 is formed. And pressing the replica stamp 200 to be in contact with a predetermined pressure (S130). And 4) the rotation roll 100 rotates at a constant speed so that the resist 210 is coated on the roll stamp substrate 220, and the resist 210 coated by ultraviolet rays and heat is applied to the roll stamp substrate 220. ) Hardening at the surface (S140); .

4 illustrates an initial stage of the method for manufacturing a roll stamp according to the present invention, wherein a replica stamp 200 having a pattern to be transferred to the roll stamp substrate 220 is aligned to be positioned below the rotary roll 100. It's a step.

At this time, the roll roll 100 is fixed to the roll stamp substrate 220, and then fixed to the horizontal transfer unit 410 and the vertical transfer unit 420.

Next, the replication stamp 200 subjected to the anti-sticking film treatment is coated with a resist 210 to be transferred to the roll stamp substrate 220 on an upper surface thereof, and the resist 210 is a thermosetting resist 210. In one case, the first fixing chuck 310 is fixed, and when the resist 210 is an ultraviolet curable resist 210, the second fixing chuck 320 is fixed.

Next, the roll stamp substrate 220 is aligned using the horizontal transfer apparatus 410 and the vertical transfer apparatus 420 so as to be positioned at one edge surface of the replica stamp 200, and the roll stamp substrate ( 220 and the replica stamp 200 is pressed to contact a constant pressure.

In other words, the rotary roll 100 is positioned by the horizontal feeder 410 so that the roll stamp substrate 220 is positioned on one side of the edge of the replica stamp 200, and then the vertical feeder ( It is vertically lowered by 420 to be in minute contact with the replica stamp 200.

Next, the rotary roll 100 is constantly rotated at a minute angle by the motor drive, through which the pattern on the resist 210 of the portion where the roll stamp substrate 220 and the replica stamp 200 contacted This is transferred, and at the same time, the resist 210 is cured by ultraviolet rays or heat.

At this time, the resist 210 is adhered to the surface of the roll stamp substrate 220 while being separated from the surface of the replica stamp 200 by the difference in the adhesive force replicated.

Accordingly, the roll stamp substrate 220 is a surface of the roll stamp substrate 220 is all of the resist 210 applied to the surface of the replica stamp 200 when one rotation of the rotary roll 100 is finished. It may be hardly adhered to and a pattern may be formed.

On the other hand, the roll stamp manufacturing method of the present invention, when the resist 210 is a thermosetting resist 210, after the step 2) (S120), through the heating device 110 located inside the rotary roll (100) Heating the rotary roll 100 (S121) and, after the step 4) (S140), cooling the rotary roll 100 through the cooling device 120 located inside the rotary roll 100. It may further include (S141).

In addition, the roll stamp manufacturing method of the present invention, when the resist 210 is an ultraviolet curable resist 210, the replica stamp 200 is fixed to the second fixing chuck 320, the second fixing chuck ( An ultraviolet irradiation part irradiated with ultraviolet rays in an upward direction is disposed below the lower portion 320, and the resist 210 may be cured by ultraviolet irradiation in step 4).

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

1: roll stamp manufacturing apparatus
100: rotary roll
110: heating device 120: cooling device
121: cooling medium flow portion 122: inlet valve
123: discharge valve
200: duplicate stamp 210: resist
220: substrate for roll stamp
310: first fixing chuck 320: second fixing chuck
330: temperature control plate 340: UV irradiation unit
350: index table
410: horizontal feeder 420: vertical feeder
430: cushioning unit
510: temperature sensor 520: pressure sensor
610: master stamp 620: template for making duplicate stamp
630: spacer
S110 ~ S140: each step of the roll stamp manufacturing method
S210 ~ S240: each step of the duplicate stamp manufacturing method

Claims (11)

An apparatus for manufacturing a roll stamp used in an imprint process,
A rotary roll rotated by a motor driving around a rotating shaft, and provided with a heating device and a cooling device therein, and having a cylindrical roll stamp substrate fitted therein with a hollow inside on an outer circumferential surface thereof;
A replication stamp provided below the rotary roll to contact the roll stamp substrate and having a resist applied to the upper surface on which the pattern is formed so that the pattern can be directly transferred to the roll stamp substrate;
A first fixing chuck for fixing the replica stamp to an upper side thereof;
A horizontal conveying apparatus for conveying the rotating rolls in a horizontal direction; And
A vertical conveying apparatus for conveying the rotating rolls in a vertical direction; Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 1,
The roll stamp manufacturing apparatus
A cushioning device unit connected to the vertical transfer device so that a uniform pressure is applied to a surface of the roll stamp substrate and the replica stamp, and having a predetermined elasticity; Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 2,
The roll stamp manufacturing apparatus
A temperature sensor for measuring a surface temperature of the rotating roll and the roll stamp substrate; And
A pressure sensor for measuring a degree of pressure applied between the roll stamp substrate and the replica stamp; Roll stamp manufacturing apparatus characterized in that it further comprises.
The method of claim 3, wherein
The roll stamp manufacturing apparatus
A temperature regulating plate on which the first fixing chuck is disposed;
A second fixing chuck on which a flat substrate or a replica stamp is fixed to an upper side thereof is disposed on an upper side thereof, and an ultraviolet irradiation unit to which ultraviolet rays are irradiated in an upward direction; And
An index table for rotating the positions of the temperature control plate and the ultraviolet irradiation part by a predetermined angle; Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 3, wherein
The roll stamp manufacturing apparatus
A temperature regulating plate on which the first fixing chuck is disposed;
A second fixing chuck on which a flat substrate or a replica stamp is fixed to an upper side thereof is disposed on an upper side thereof, and an ultraviolet irradiation unit to which ultraviolet rays are irradiated in an upward direction; And
A substrate transfer device for swapping positions of the replica stamp fixed to the first fixing chuck and the substrate or replica stamp fixed to the second fixing chuck; Roll stamp manufacturing apparatus characterized in that it comprises a.
The method of claim 1,
The cooling device
A cooling medium flow unit formed along an inner circumferential surface of the rotating roll and flowing with a cooling medium;
An inlet valve through which a cooling medium flows into the cooling medium flow unit; And
A discharge valve for discharging the cooling medium to the cooling medium flow unit; Roll stamp manufacturing apparatus characterized in that it comprises a.
delete delete delete In the method for producing a replica stamp used in the roll stamp manufacturing apparatus according to any one of claims 1 to 6,
a) mounting a spacer on an edge of the mold for making a replica stamp;
b) allowing the pattern of the master stamp on which the pattern to be transferred to the replica stamp is formed to be located on the lower side, and then covering and fixing the cover of the mold for producing the replica stamp;
c) hardening by injecting a resist into the space between the master stamp and the replica stamp manufacturing mold;
d) separating the master stamp, the spacer, and the mold for making a duplicate stamp, respectively, in order to complete a duplicate stamp; Respectively,
Duplicate stamp manufacturing method characterized in that the anti-stick film treatment on the surface on which the pattern of the master stamp is formed.
8. The method of claim 7,
On the surface of the completed replica stamp
Duplicate stamp production method characterized in that the anti-stick coating treatment.
KR1020130035234A 2013-04-01 2013-04-01 Apparatus for manufacturing roll stamp, method for manufacturing roll stamp using the same and method for manufacturing replication stamp KR101332323B1 (en)

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KR1020130035234A KR101332323B1 (en) 2013-04-01 2013-04-01 Apparatus for manufacturing roll stamp, method for manufacturing roll stamp using the same and method for manufacturing replication stamp

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150266234A1 (en) * 2013-04-24 2015-09-24 Korea Institute Of Machinery & Materials Apparatus and method for liquid transfer imprint lithography using a roll stamp
KR20170030208A (en) * 2015-09-09 2017-03-17 한국기계연구원 Apparatus for manufacturing roll stamp and method for manufacturing roll stamp using the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100071925A (en) * 2008-12-19 2010-06-29 오브듀캇 아베 Methods and processes for modifying polymer material surface interactions
KR101062128B1 (en) * 2010-06-24 2011-09-02 한국기계연구원 Imprint apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100071925A (en) * 2008-12-19 2010-06-29 오브듀캇 아베 Methods and processes for modifying polymer material surface interactions
KR101062128B1 (en) * 2010-06-24 2011-09-02 한국기계연구원 Imprint apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150266234A1 (en) * 2013-04-24 2015-09-24 Korea Institute Of Machinery & Materials Apparatus and method for liquid transfer imprint lithography using a roll stamp
US9527235B2 (en) * 2013-04-24 2016-12-27 Korea Institute Of Machinery & Materials Apparatus and method for liquid transfer imprint lithography using a roll stamp
KR20170030208A (en) * 2015-09-09 2017-03-17 한국기계연구원 Apparatus for manufacturing roll stamp and method for manufacturing roll stamp using the same
KR101721497B1 (en) 2015-09-09 2017-04-10 한국기계연구원 Apparatus for manufacturing roll stamp and method for manufacturing roll stamp using the same

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