KR101329048B1 - Substrate Transfer device using Wire - Google Patents

Abstract

The present invention relates to a substrate transfer apparatus using a wire, the substrate transfer apparatus in a vacuum chamber, comprising: a plurality of wires having an endless track; A roller unit comprising a first driving roller for rotating the plurality of wires, a driving roller consisting of a second driving roller and a third driving roller, and a plurality of moving rollers for maintaining respective tensions of the plurality of wires; And a plurality of tension sensing control units configured to include a frame, a bellows-type elastic member, a load cell, and a tension control motor so as to detect and control the tension of the wire in connection with the plurality of moving rollers, respectively. The substrate transfer device according to the present invention facilitates the transfer of a large-area thin film substrate and prevents the substrate from sagging as well as improves the deposition efficiency and enables the continuous process, and the number of components provided in the process chamber is simplified, thereby generating particles. This is prevented and there is an effect that can improve the PM cycle.

Description

Substrate Transfer device using Wire

The present invention relates to a substrate transfer apparatus, and more particularly, it is possible to transfer a large area substrate at high speed without sagging without providing a plurality of rollers in a vacuum chamber, and to provide a simplified chamber. The present invention relates to a substrate transfer device using wires that are easily controlled and control particle generation due to equipment.

In recent years, as the thickness of the electronics industry and the parts are required to be large, the large-area touch screen panel, the display substrate, or the solar cell substrate can be continuously supplied into the process chamber, and a thin film is continuously formed on the substrate. There is a demand for a technology capable of mass production.

However, when a film is deposited on a large area substrate by a conventional bottom-up deposition method, the deposition is not formed to a desired thickness on the substrate portion due to sagging and thermal expansion due to a high temperature process, and is not flat. There is a problem that the utilization and economic efficiency of the thin film substrate is extremely degraded by the non-substrate. Therefore, many top-down deposition methods have been studied and performed to form a film on a large area substrate.

In addition, as shown in Fig. 3 (a) (b) schematically showing a conventional substrate transfer apparatus, the transfer of the substrate in the conventional process chamber 20 is a large number on both sides along the process line of the in-line process system The substrate G is heated and heated by the heater H by driving the rollers R formed adjacent to each other, or the substrate C is seated on the tray-shaped carrier C along a plurality of adjacent rollers. The substrate was configured to be transferred according to the movement of the substrate.

Such a roller configuration for transporting a conventional substrate has a disadvantage that the drive shaft is provided in association with each of the plurality of rollers, the drive shaft is provided to be controlled separately, so that the volume of the process chamber is large and difficult to control.

In addition, in order to perform the film forming process, the process chamber is usually pumped to maintain a vacuum state, in which undesired particles are generated in the chamber due to the operation of a plurality of devices provided in the process chamber, and also each device is controlled individually. There must be a problem accordingly.

In addition, the greater the number of components provided in the process chamber, the more equipment is required to be repaired. In order to repair such components, the process chamber in vacuum must be shut down, resulting in lower production efficiency. Will result.

In order to solve this problem, the applicant can transfer the large area substrate at high speed without sagging without providing a plurality of rollers in the vacuum chamber, and due to the simplified equipment provided in the chamber Subsequent to the development of a substrate transfer device using wires with reduced particle generation and easy control, large-area films and large-scale mass production were possible on large-sized substrates.

Japanese Patent Laid-Open No. 2003-128243 (2003.05.08)

The present invention has been made to solve the above problems, the first object of the present invention is to configure the substrate transfer apparatus using a wire in the in-line substrate transfer system, to prevent sagging of the large-area thin film substrate and to increase the deposition efficiency It is to provide a substrate transfer apparatus capable of continuous processing.

In addition, a second object of the present invention is to provide a substrate transfer apparatus capable of improving the PM cycle by particles by simplifying the number of components provided in the process chamber.

In order to achieve the above object of the present invention,

A substrate transfer apparatus using a wire according to the present invention is a substrate transfer apparatus in a vacuum chamber,

A plurality of wires having an orbit;

A roller unit comprising a driving roller for rotating the plurality of wires and a plurality of moving rollers for maintaining respective tensions of the plurality of wires; And

And a plurality of tension sensing controllers connected to the plurality of moving rollers, respectively, to sense and control the tension of the wire.

Here, the plurality of wires are preferably a heat resistant material or a material coated with a heat resistant agent.

In addition, the roller driving roller

A first driving roller driven by receiving power from a driving motor, a second driving roller spaced apart in parallel with the first driving roller, and a downward direction between the first driving roller and the second driving roller; It consists of a third drive roller spaced apart in parallel to the

The plurality of moving rollers of the roller portion

It is provided to be spaced apart from the lower portion of the first drive roller and the third drive roller, characterized in that configured so as to be movable.

At this time, the first drive roller and the second drive roller is rotated in the same direction, the third drive roller is characterized in that the first drive roller and the second drive roller is rotated in the opposite direction.

In addition, the first drive roller, the second drive roller and the body of the third drive roller is characterized in that a plurality of annular concave grooves are formed.

In addition, the moving roller is preferably in a pulley shape.

In addition, an auxiliary roller is further provided between the first driving roller and the second driving roller.

In addition, the tension detection control unit

A frame having one end coupled to both sides of the rotation shaft of the moving roller;

An elastic member provided on the outside to correspond to the through hole formed at one side of the lower side of the vacuum chamber, and the other end of the frame fixedly coupled to the bottom surface;

A load cell fixed outside the bottom of the elastic member; And

And a tension control motor connected to the load cell to control the difference sensed by the load cell.

In addition, the elastic member is a bellows-type, characterized in that the moving is moved in accordance with the shangdong of the moving roller.

In addition, the substrate transfer apparatus using a wire according to the present invention,

In a substrate transfer apparatus in a vacuum chamber,

A plurality of wires having an orbit;

A first drive roller driven by receiving power from a drive motor, a second drive roller spaced apart in parallel with the first drive roller, and in a downward direction between the first drive roller and the second drive roller; It is composed of a third drive roller spaced apart in parallel, the drive roller for rotating the plurality of wires and the first drive roller and the third drive roller is provided to be spaced apart so as to be movable in the lower portion, the plurality of A roller portion composed of a plurality of moving rollers for maintaining each tension of the wire; And

A frame having one end coupled to both sides of the rotation shaft of the moving roller; A bellows type elastic member which is sealed on the outside so as to correspond to the through hole formed at one side of the vacuum chamber, and the other end of the frame is fixedly coupled to the bottom surface; A load cell fixed outside the bottom of the elastic member; And a tension control motor connected to the load cell to control the difference sensed by the load cell.

The substrate transfer apparatus using the wire according to the present invention having the above-described configuration facilitates the transfer of the large-area thin film substrate and prevents the substrate from sagging, and has the effect of enabling a continuous process while increasing the deposition efficiency.

In addition, the number of components provided in the process chamber is simplified by the substrate transfer device according to the present invention, thereby preventing particles from being generated and improving the PM cycle.

1 is a side view schematically showing a substrate transfer apparatus according to the present invention;
Figure 2 is a schematic perspective view of the substrate transfer apparatus according to the present invention.
Figure 3 is a schematic view showing a conventional substrate transfer apparatus.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Embodiment of the present invention may be modified in various forms, the scope of the present invention should not be construed as limited to the embodiments described below. This embodiment is provided to explain in detail the present invention to those skilled in the art. Accordingly, the shape of each element shown in the drawings may be exaggerated to emphasize a clearer description.

1 is a side view schematically showing a substrate transfer apparatus according to the present invention, Figure 2 is a schematic perspective view of the substrate transfer apparatus according to the present invention.

1 to 2, the substrate transfer apparatus using the wire according to the present invention is for transferring the substrate (G) in the vacuum chamber 10, the wire 100, the roller portion 200 , And the tension sensing control unit 300. Of course, the substrate transfer apparatus using the wire according to the present invention can also be used for substrate transfer in other chambers other than the vacuum chamber.

First, the vacuum chamber 10 in which the substrate transfer apparatus using the wire according to the present invention is mounted is conventional, and the deposition sources S are provided in the upper portion of the vacuum chamber. In addition, a heat source (not shown) may be disposed below the wire 100 between the first driving roller and the second driving roller, which will be described later.

Wire 100 is for transporting the substrate (G) is provided with a plurality, each of the plurality of wires are configured to have an orbit and rotate by the driving of the roller unit 200 to be described later. The material of the wire 100 is preferably a heat resistant material, and may be coated with a heat resistant agent on the wire to prevent thermal deformation. As the wire material, materials such as stainless steel, neo-ceramic, and culture, which are materials that do not cause thermal problems even at a temperature of about 600 ° C., are preferable.

Although four wires are shown in the present invention, the number of wires can be added or subtracted according to the size and use of the substrate.

In addition, the substrate G may be transported alone or mounted on a carrier.

The roller unit 200 is composed of a driving roller for rotating a plurality of wires and a plurality of moving rollers for maintaining each tension of the plurality of wires. The driving rollers are driven by receiving power from a driving motor (not shown). The drive shaft includes a bar-shaped first drive roller 210, a second drive roller 220 and a third drive roller 230, the plurality of moving roller 250 is a pulley shape that can be moved. .

Here, the first drive roller 210 is located in the transverse direction at the inlet side of the vacuum chamber 10, the second drive roller 220 is located in the transverse direction at the outlet side of the vacuum chamber 10 and the first drive The roller 210 is fixedly spaced apart in parallel on the same line. In addition, the third driving roller 230 is fixedly spaced apart in parallel downward between the first driving roller 210 and the second driving roller 220.

The first driving roller 210 and the second driving roller 220 rotate in the same direction, that is, clockwise, and the third driving roller 230 is opposite to the first and second driving rollers 210 and 220. Ie rotate counterclockwise. The rotation of the drive rollers is such that the wire rotates in the clockwise direction.

In addition, between the first driving roller 210 and the second driving roller 220 may further include an auxiliary roller (not shown) to prevent sagging of the wire 100 and to smoothly transfer the substrate. .

In addition, the plurality of moving rollers 250 are provided below the first driving roller 210 and the third driving roller 230, respectively, and are configured to be movable. Shanghai copper of such a moving roller 250 is according to the tension of the corresponding wire (100).

In addition, the plurality of wires 100 prevent the movement of the driving rollers 210, 220, 230 in the longitudinal direction of the first, second, and third driving rollers 210, 220, 230 and the wires according to the rotation of the roller part 200. It is preferable that the annular concave grooves 212, 222, and 232 are formed where the wires 100 are positioned so that the 100 rotates smoothly.

In addition, the first driving roller 210, the second driving roller 220, and the plurality of moving rollers 250 are positioned inside the closed curve formed by the corresponding wires 100, and the third driving roller 230 is The wire 100 is positioned outside the closed curve.

Here, the material of the first driving roller 210, the second driving roller 220 and the third driving roller 230 disposed close to the heat source is preferably a material that does not have thermal problems such as titanium, nac, ceramic, graphite, and the like. . This is to prevent the roller from being deformed in a high temperature deposition process so that a smooth deposition process according to a stable transfer is achieved. In addition, it is also preferable to prevent the thermal deformation of the roller portion by forming a shield (not shown) that can separate the roller portion and the heat source (not shown) so that heat is not applied to the roller as much as possible.

In addition, each of the plurality of moving rollers 250 is provided in the auxiliary space 20 formed separately on one side of the lower side of the vacuum chamber. In the present invention, although the plurality of moving rollers 250 is provided in a separate auxiliary space portion 20 outside the vacuum chamber 10, it is obvious that the present invention is not limited thereto, and the inside of the vacuum chamber 10 is provided. Of course it can be.

The plurality of moving rollers 250 having such a configuration are coupled to one end of the frame 310 on both sides of each of the rotation shafts 255, and the other end of each of the frames 310 is the lower portion of the auxiliary space 20 or vacuum Via the through hole (h) formed in the lower chamber 10, the through hole (h) is fixed and coupled to the bottom of the bellows-type elastic member 320 is formed to protrude out of the chamber.

The tension sensing controller 300 includes the frame 310, the elastic member 320, the load cell 330, and the tension control motor 340.

Frame 310 is to connect the moving roller 250 and the load cell 330 to transfer the tension change amount of the wire to the load cell 330 as the load change, one end of the frame rotation shaft 255 of the moving roller 250 It is coupled to both sides and the other end is fixedly coupled to the bottom of the elastic member (320).

Elastic member 320 is a bellows type capable of shrinkage, the open top is fixedly coupled to the outside of the through-hole (h) formed on the lower side of the auxiliary space 20 or the lower side of the vacuum chamber 10, the closed bottom The other end of the frame is fixedly coupled to the inside as described above, and the load cell 330 described later is fixedly coupled to the bottom of the lower bottom.

The bellows-type elastic member 320 is fixedly coupled to correspond to the through hole (h) below the auxiliary space portion 20 or the lower portion of the vacuum chamber 10 of the vacuum chamber 10 to seal the through hole. The vacuum chamber 10 ) Also serves as a seal to maintain vacuum.

The load cell 330 is an elastic body with a strain gage, and is a load sensing sensor that changes a load change due to an external force detected by the elastic body into a change in resistance in a strain gage and converts it into an electrical signal. The upper end of the load cell 330 is fixedly coupled to the outer bottom of the lower surface of the elastic member 320, and the lower end of the load cell 330 is fixedly coupled to the bottom of the support part 30.

The support 30 is fixed to the lower portion of the auxiliary space 20 or the lower portion of the vacuum chamber to fix the lower end of the load cell 330, thereby making it easy for the load cell to detect the load change.

The tension control motor 340 is located outside the bottom of the support part 30 and is connected to the load cell 330 to operate when the load cell 330 detects a difference in resistance change value with respect to a set load change. The tension of the wire 100 can be maintained by the operation of the tension control motor 340 as described above.

Each of the moving rollers 250 of the substrate transfer apparatus using the wire according to the present invention may be provided with a corresponding tension sensing controller 300, respectively.

Hereinafter, the operation of the substrate transfer apparatus of the present invention with reference to FIGS. 1 and 2 are as follows.

First, a wire is installed in the vacuum chamber 10 in the first driving roller 210, the second driving roller 220, the third driving roller 230 and the plurality of moving rollers 250, and the wire is set to a tension value. Adjust to have

When the substrate G is inserted into the inlet side of the vacuum chamber 10, the first driving roller 210 and the second driving roller 220 rotating in the clockwise direction, and the third driving roller 230 rotating in the counterclockwise direction. The board | substrate G is conveyed to the right side (inlet side to outlet side direction) as each wire 100 rotates by this.

The substrate G to be transferred is heated by a lower heat source and a deposition process is performed in which upper sources are deposited.

While the substrate G is transferred while the deposition process is performed, each moving roller 250 may be caused by the weight of the substrate G being transferred, the sagging of the wire 100 due to the heat source located at the lower portion, or other causes. Of Shanghai dong will occur.

The bellows type elastic member 320 is vertically moved by the frame 310 connecting the pivot shaft 255 of the moving roller 250 and the bottom surface of the bellows type elastic member 320 according to the movement of the moving roller 250. Shrink or tension as it travels.

In addition, according to the contraction or tension of the bellows-type elastic member 320, each load cell 330 detects the difference.

At this time, the tension control motor 340 is operated so that the tension of the wire 100 can maintain the originally set value.

Although the invention has been described in connection with the preferred embodiments mentioned above, other various modifications and variations will be possible without departing from the spirit and scope of the invention. It is, therefore, to be understood that the appended claims are intended to cover such modifications and changes as fall within the true scope of the invention.

10: vacuum chamber 20: auxiliary space
30: support part 100: wire
200: roller portion 210: first drive roller
220: second drive roller 230: third drive roller
250: moving roller 255: rotating shaft
300: tension detection control unit 310: frame
320: elastic member 330: load cell
340: tension control motor 212,222,232: groove
h: Through hole S: Source
G: Substrate

Claims (10)

In the substrate transfer apparatus used to process a substrate in a vacuum chamber,
A plurality of wires having an endless track;
A roller unit including a driving roller for rotating the plurality of wires and a plurality of moving rollers for maintaining respective tensions of the plurality of wires;
And a plurality of tension sensing controllers respectively connected to the plurality of moving rollers to sense and control the tension of the wire. The method of claim 1,
The plurality of wires is a heat-resistant material or substrate transfer apparatus using a wire, characterized in that the heat-resistant coating material. The method of claim 1,
The driving roller of the roller portion
A first driving roller driven by receiving power from a driving motor, a second driving roller spaced apart in parallel with the first driving roller, and a downward direction between the first driving roller and the second driving roller; It consists of a third drive roller spaced apart in parallel to the
The plurality of moving rollers of the roller portion
Substrate transfer apparatus using a wire, characterized in that spaced apart below the first drive roller and the third drive roller, configured to be movable. The method of claim 3, wherein
The first drive roller and the second drive roller is rotated in the same direction, and the third drive roller is rotated in the opposite direction to the first drive roller and the second drive roller substrate transfer using a wire Device. The method of claim 3, wherein
And a plurality of annular concave grooves are formed in the body of the first driving roller, the second driving roller and the third driving roller. The method of claim 3, wherein
The transfer roller is a substrate transfer device using a wire, characterized in that the pulley shape. The method of claim 3, wherein
Substrate transfer apparatus using a wire, characterized in that the auxiliary roller is further provided between the first drive roller and the second drive roller. The method of claim 1,
The tension detection control unit
A frame having one end coupled to both sides of the rotation shaft of the moving roller;
An elastic member provided on the outside to correspond to the through hole formed at one side of the lower side of the vacuum chamber, and the other end of the frame fixedly coupled to the bottom surface;
A load cell fixed outside the bottom of the elastic member; And
And a tension control motor connected to the load cell to control the difference sensed by the load cell. The method of claim 8,
The elastic member is a bellows type, the substrate transfer device using a wire, characterized in that the movement is moved in accordance with the movement of the moving roller. In a substrate transfer apparatus in a vacuum chamber,
A plurality of wires having an orbit;
A first drive roller driven by receiving power from a drive motor, a second drive roller spaced apart in parallel with the first drive roller, and in a downward direction between the first drive roller and the second drive roller; It is composed of a third drive roller spaced apart in parallel, the drive roller for rotating the plurality of wires and the first drive roller and the third drive roller is provided to be spaced apart so as to be movable in the lower portion, the plurality of A roller portion composed of a plurality of moving rollers for maintaining each tension of the wire; And
A frame having one end coupled to both sides of the rotation shaft of the moving roller; A bellows type elastic member which is sealed on the outside so as to correspond to the through hole formed at one side of the vacuum chamber, and the other end of the frame is fixedly coupled to the bottom surface; A load cell fixed outside the bottom of the elastic member; And a tension control motor connected to the load cell to control the difference sensed by the load cell.

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