KR101325366B1 - Metal Foil Manufacturing Apparatus Comprising Perpendicular Type Cell - Google Patents

Abstract

The present invention relates to a horizontal cell electroplating apparatus for producing a metal foil by an electrolytic reaction,
The present invention relates to a horizontal cell pole apparatus for supplying a uniform electrolyte solution at a high speed. An electrolyte supply for supplying an electrolyte solution including metal ions to a surface of an anode electrode and a conductive mother plate horizontally supplied in one direction spaced at a predetermined interval from the anode electrode. And an electrolyte supply apparatus including an electrolyte supply pipe for supplying an electrolyte solution on the conductive mother plate, wherein the electrolyte supply pipe is separated to supply the electrolyte solution in the forward and reverse directions with respect to the moving direction of the conductive mother plate. Provides a cell pole.

Description

Horizontal pole device {Metal Foil Manufacturing Apparatus Comprising Perpendicular Type Cell}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a horizontal cell electroplating apparatus for producing metal foil by electrolytic reaction, and to a horizontal cell electroplating apparatus for supplying a uniform electrolyte solution at high speed.

The most common method of producing metal foil by the pole casting method is to use a drum cell. The drum cell pole device includes a cathode electrode on a rotating drum and an anode electrode which is arranged to bend to face the circumferential shape of the cathode electrode, and electrolyte solution supply means for supplying an electrolyte solution in a downward direction between the cathode electrode and the anode electrode. It is comprised so that metal foil may be obtained by continuously peeling the metal foil electrodeposited to the drum surface by the electrolytic precipitation of the metal ion in electrolyte solution from a rotating cathode electrode.

It is necessary to have a high current density in order to secure the efficiency of the process of producing metal foil by the electroforming method. On the other hand, when the current density reaches a threshold, the resulting metal foil will have a black color and a defect will occur. Therefore, in order to improve productivity while obtaining a high quality metal foil, it is necessary to supply sufficient metal ions to the surface of the mother board at high speed while increasing the current density.

In order to solve such a problem, Japanese Laid-Open Patent Publication No. 2001-095612 includes a plate damper body extending in the width direction of the rotating cathode drum above the electrolyte supply port to increase the supply speed of the solution by using forced convection. Is disclosed.

Korean Patent Laid-Open Publication No. 2001-0069820 discloses that the method described in the above patent document supplies an electrolyte solution to form a flow field at a uniform speed in the electrolytic drum width direction in order to reduce thickness variation in the width direction of the resulting metal foil. Forming a predetermined length along the axial direction of the drum means formed to rotate about the axis of the liquid supply means, while providing a distribution pipe having a plurality of discharge parts inward to form a liquid supply pipe in the form of a double pipe An electrolytic copper foil manufacturing apparatus is disclosed.

However, the patent documents use a drum cell pole device, and since the electrolyte is supplied onto the circumference of the cathode drum, it is difficult to supply the electrolyte solution at a high speed to maintain a high flow rate, and the supplied electrolyte solution Since it moves along the principal plane, the electrolyte changes direction continuously, causing flow loss and making it difficult to maintain the initial feed flow rate. As a result, the drum cell pole device has a fundamental limitation in supplying the electrolyte solution at a high speed flow, and thus has an unsuitable property for high speed metal foil production.

On the other hand, in the case of using a horizontal cell, the electrolyte is vertically supplied from the top and bottom of the mother plate between the base plate in contact with the anode and the cathode on the horizontal, Japanese Patent Laid-Open No. 195-278878 using a slit nozzle to vertically up and down the mother plate The technique of supplying electrolyte solution is disclosed. However, when the electrolyte collides vertically with respect to the mother plate, as in the above patent document, the flow field fails to apply current to the region where the flow field is stabilized and the electrodeposition area decreases, and the pressure of the electrolyte supplied vertically up and down This nonuniformity has a limitation in forming a nonuniform electrodeposition layer by generating vibration in the mother plate.

According to one embodiment of the present invention, by supplying a sufficient amount of electrolyte to the horizontal cell pole device at high speed to provide a horizontal pole device that can obtain a high-quality metal foil with a maximum current density.

According to another embodiment of the present invention, to stabilize the flow field of the electrolyte supplied at high speed to prevent vortex formation to maximize the electrodeposition area to provide a horizontal pole device that can improve the productivity.

According to another embodiment of the present invention, it is intended to provide a horizontal pole device which can produce a metal foil having a uniform composition, a uniform surface and a uniform thickness by inducing a stable electrolytic reaction.

In addition, according to one embodiment of the present invention, it is an object of the present invention to provide a horizontal electric pole device to prevent the occurrence of non-uniform electrodeposition by suppressing the vibration generated in the mother plate by supplying the electrolyte solution as horizontally as possible with respect to the mother plate surface.

Furthermore, according to one embodiment of the present invention, it is intended to provide a horizontal electroforming apparatus that can prevent the formation of eddy currents by suppressing the formation of vortices due to the instability of the flow field of the electrolyte.

The present invention relates to a horizontal cell pole device, according to one embodiment, the horizontal cell pole device includes an anode electrode and a metal ion on the surface of the conductive mother plate horizontally supplied in one direction spaced at regular intervals from the anode electrode And an electrolyte supply device for supplying an electrolyte solution, wherein the electrolyte supply device includes an electrolyte supply pipe for supplying an electrolyte solution to the surface of the conductive mother plate, wherein the electrolyte supply pipe is separated to supply electrolyte in a forward and reverse direction to a moving direction of the conductive mother plate. It is.

In another embodiment, the electrolyte supply device may be provided with a honeycomb inside the electrolyte supply pipe.

As another embodiment, the electrolyte supply apparatus may include a nozzle bent to supply the electrolyte between the conductive mother plate and the anode electrode at the end of the electrolyte supply pipe.

And, as another embodiment, the electrolyte supply apparatus has a De Laval nozzle cross section to supply the electrolyte between the conductive mother plate and the anode electrode at the end of the electrolyte supply pipe, in the width direction of the conductive mother plate An extended dispenser may be provided. Furthermore, the dispenser may be formed at the end of the curved nozzle.

Further, the electrolyte supply device may be installed to supply the electrolyte solution to both sides of the mother plate.

According to one embodiment of the present invention, according to the horizontal cell solution supply device, it is possible to supply the electrolyte at a high speed to produce a metal foil at high speed.

In addition, according to one embodiment of the present invention, it is possible to structurally prevent the vibration of the mother plate to uniformize the flow field of the electrolyte solution to induce stable electrolytic precipitation, furthermore, having a uniform composition, uniform surface and uniform thickness Excellent quality metal foil can be produced.

Furthermore, according to one embodiment of the present invention, it is possible to enlarge the area where the electrolytic precipitation reaction occurs, thereby improving the productivity of the metal foil.

In addition, when the electrolyte is vertically supplied, it is unnecessary to use a mask used to prevent electrodeposition defects occurring in the vortex section due to the instability of the flow field, thereby providing a simple horizontal pole apparatus.

1 is a view schematically showing a horizontal cell of a horizontal cell pole apparatus according to an embodiment of the present invention.
2 is a view schematically showing a horizontal cell of the horizontal cell pole apparatus according to another embodiment of the present invention.
3 is a view schematically showing a cross-sectional shape of the DeLaval nozzle formed at the end of the electrolyte supply pipe according to another embodiment of the present invention.
4 is a view schematically showing the electrolyte supply pipe used in the embodiment, (a) is an electrolyte supply pipe for showing a conventional electrolyte supply structure, (b) and (c) is bent in accordance with an embodiment of the present invention Indicates a jin nozzle.
FIG. 5 is a diagram illustrating a streamline of an electrolyte flow field when an electrolyte is supplied in a laminar flow through each electrolyte supply pipe of FIG. 4.
FIG. 6 is a diagram illustrating a streamline of an electrolyte flow field when an electrolyte is supplied in turbulent flow through each electrolyte supply pipe of FIG. 4.

The present invention relates to a horizontal cell pole casting apparatus for producing a metal foil by a pole casting method. In particular, to improve the means for supplying the electrolyte in the horizontal cell of the pole apparatus, the horizontal cell pole apparatus according to an embodiment of the present invention is an electrolyte containing a metal ion between the anode electrode and the conductive mother plate supplied in the horizontal direction It includes an electrolyte supply device for supplying.

Hereinafter, each embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The pole cell used in the horizontal pole device according to the embodiment of the present invention is a horizontal cell 20 in which the base plate 1 on which the electrodeposition layer is formed by electrolytic precipitation is horizontally supplied in a constant direction.

The base plate 1 as described above is continuously supplied into the pole cell, and is supplied in a constant direction. Here, the 'electrode cell' may be defined as a unit cell in which an electrolyte is supplied onto the mother plate 1, and metal ions are electrodeposited onto the mother plate 1 by electrolytic precipitation to form a metal layer. In addition, the term “uniform direction” means that the mother board 1 proceeds in one direction without changing the advancing direction of the mother board 1 until the mother cell 1 is supplied into the pole cell at least. In this specification, the advancing direction of the base plate 1 may be referred to as a 'horizontal direction' or simply 'horizontal' in some cases. Furthermore, the base plate 1 advances the pole cell in the horizontal direction to allow metal ions in the electrolyte. In order to show that it electrolytically precipitates in this mother board 1, the said pole cell is also represented by a "horizontal cell."

In this case, the mother plate 1 supplied to the horizontal cell 20 receives a current from the current supply device 2 through a conductor roll 3 for transporting the horizontal cell 20 into the horizontal cell 20. It functions as a cathode electrode and can be used without particular limitation as long as it is flexible and conductive. For example, stainless steel, titanium, or the like can be applied. The present invention seeks to obtain a metal foil. When the electrodeposition layer formed by electrodeposition on the mother plate 1 has a firm bond with the mother plate 1, the electrodeposition layer is separated from the mother plate 1 to obtain the metal foil. Since it is not easy, it is preferable that the oxide film is formed on the base plate 1. Even if an electrodeposition layer is formed on the mother board 1 by the oxide film on the mother board 1, since the adhesion to the surface of the mother board 1 is weak, the electrodeposited layer can be separated from the mother board 1 to easily peel off the metal foil. .

The horizontal cell 20 is disposed between the anode electrode 4 and the mother plate 1 and the anode electrode 4 which are spaced apart at regular intervals from the surface of the mother plate 1 supplied into the horizontal cell 20. It includes an electrolyte supply device for supplying an electrolyte solution.

The base plate 1 is horizontally into the horizontal cell 20 by a pair of conductor rolls 3 which contact the widthwise edge portion of the base plate 1 and transfer the base plate 1 into the horizontal cell 20. Supplied by. At this time, the electrolytic solution may be supplied to any one side of the mother plate 1 supplied into the horizontal cell 20 to carry out one-side electric pole, and the metal may be applied to both sides of the mother plate 1 by supplying the electrolyte solution to both sides. By electrolytic precipitation, the production speed of metal foil can be increased.

The anode electrode 4 and the mother plate 1 are spaced at regular intervals, and are provided in a flow path through which an electrolyte is supplied and distributed therebetween. As described above, an electrolytic reaction occurs by electrolytic precipitation of metal ions in the electrolyte on the surface of the substrate 1 by the action of the cathode 11 and the anode electrode, which are cathode electrodes. When the electrolyte is supplied at a high speed, the electrodeposition rate of the metal ions on the surface of the base plate 1 can be increased. In the case of the conventional electroforming method using a drum cell, the flow path forms a curvature, thereby gradually decreasing the flow rate of the electrolyte. There was a problem that caused a decrease in electrodeposition speed. However, in the present invention as described above, since the flow path of the electrolyte is formed in a plane, it is possible to minimize the decrease in the speed of the flow field with respect to the supply of the electrolyte, and thus increase the electrodeposition rate.

In one embodiment of the present invention, the electrolyte supply device is to supply the electrolyte solution between the mother plate 1 and the anode electrode 4 from the electrolyte reservoir 5 through the electrolyte supply pipe (8). In this case, it is preferable that the electrolyte supply pipe 8 is divided into a forward electrolyte supply pipe 9 and a reverse electrolyte supply pipe 10 so that the electrolyte supply pipe 8 can be supplied in the forward and reverse directions with respect to the traveling direction of the mother plate 1. Do. In this way, the effect of electrodeposition substantially twice can be obtained by supplying the electrolyte solution in the forward and reverse directions with respect to the advancing direction of the base plate 1. That is, the electrolyte supplied in the reverse direction can obtain the effect of primary electrodeposition, in which a relatively small amount of short time for the electrolyte to contact the mother plate 1 is electrodeposited due to the difference in relative speed with the mother plate 1, and in the forward direction. By the supply, it is possible to obtain the effect of secondary electrodeposition, in which the electrolyte solution contacts the mother plate 1 for a longer time and is electrodeposited in a larger amount than the primary electrodeposition.

In addition, the electrolyte supply pipe 8 is divided so as to be supplied in the forward and reverse directions with respect to the traveling direction of the base plate 1, thereby reducing the phenomenon of electrolytic deposition unevenly due to the non-uniform flow field of the electrolyte when the electrolyte is supplied to the base plate 1. It is possible to form a metal foil having a more uniform thickness. To this end, the electrolyte supply pipe 8 is preferably inclined in the forward and reverse directions with respect to the traveling direction of the base plate (1).

Such an electrolyte supply pipe 8 may include a honeycomb 13 therein. By including such a honeycomb 13, the electrolyte solution supplied to the surface of the base plate 1 through the electrolyte supply pipe 8 can be induced to form a laminar flow. When the electrolyte is supplied in laminar flow as described above, a phenomenon in which an eddy current of the electrolyte is formed on the surface of the mother plate 1 can be minimized. Furthermore, even when the electrolyte is supplied at high speed, vibration of the mother plate 1 generated when the electrolyte collides with the surface of the mother plate 1 can be suppressed, thereby providing an effect of suppressing non-uniform electrodeposition.

More preferably, the electrolyte supply pipe may form a nozzle 11 bent in the forward and reverse directions with respect to the traveling direction of the base plate 1 so as to supply the electrolyte solution between the base plate 1 and the anode electrode 4. have. Such curved nozzles are, for example, as shown in FIGS. 4B and 4C. By forming such a curved nozzle 11 at the end of the electrolyte supply pipe 8, it is possible to suppress the non-uniform flow field of the electrolyte solution supplied between the mother plate 1 and the anode electrode 4 to stabilize the flow field. Through the stabilization of the flow field of the electrolyte, it is possible to prevent the formation of vortex of the electrolyte when supplying the electrolyte to the surface of the base plate 1, thereby increasing the area of uniform contact, and consequently to increase the electrodeposition rate by electrolytic precipitation. Can be. Furthermore, metal foil which has a uniform composition, a uniform surface, and a uniform thickness can be obtained by this. In addition, when the electrolyte is vertically supplied to both the upper and lower sides of the base plate 1, vibration of the base plate 1 may occur due to a pressure difference supplied from the upper and lower parts of the base plate 1, causing uneven electrodeposition. Such a problem can be solved by forming the nozzle 11 and supplying the electrolyte in the horizontal direction.

Experimentally confirmed that the flow field is stabilized in the case of having the curved nozzle 11 according to the embodiment of the present invention as described above.

In another embodiment of the present invention, the electrolyte supply pipe 8 may be provided with a dispenser 12 at its end. The dispenser 12 may uniformly distribute the electrolyte solution supplied to the surface of the mother plate 1 through the electrolyte supply pipe 8 in the width direction of the mother plate 1. Even if the electrolyte is supplied to the flow path of the electrolyte formed by the anode electrode 4 and the mother plate 1 through the electrolyte supply pipe 8, the electrolyte supplied in the width direction of the mother plate 1 may be relatively smaller than the center portion. In this case, since the current density at the edge of the base plate 1 is low, it may be difficult to ensure uniformity of the electrodeposition layer, and thus the electrolyte may be uniformly supplied to the entire base plate 1 through the dispenser 12.

Preferably, the dispenser 12 preferably has a cross section like a DeLaval nozzle as shown in FIG. 3. Since the dispenser 12 has the shape of a DeLaval nozzle, the electrolyte supplied through the electrolyte supply pipe 8 can be uniformly supplied in the width direction of the mother plate 1 and without decreasing the flow length of the electrolyte.

The dispenser 12 may be provided at the end of the curved nozzle 11 formed at the end of the electrolyte supply pipe 8 in the embodiment. By having such a structure, the flow field stability of electrolyte solution can be aimed at the same time, and the effect which can supply electrolyte solution to the whole base plate 1 uniformly can be acquired.

As described above, by providing the curved nozzle 11, the dispenser 12, or the curved nozzle 11 and the dispenser 12 at the end of the electrolyte supply pipe (8), the effect to be obtained in the present invention as described above It is possible to achieve all or part of the above, as well as to suppress non-uniform electrodeposition that may occur up to the point where the unstable flow field of the electrolyte is stabilized when the electrolyte is supplied vertically, thereby uniformizing the thickness of the finally obtained metal foil. Can be.

In the present invention, the electrolyte solution includes a metal ion, and the metal ion is not particularly limited as long as the electrolytic precipitation reaction can occur by the electroforming method, for example, Cu, Fe, Ni, Zn, Cr, Co , Ag, Pd, Al, Sn, or an alloy thereof.

Meanwhile, the electrolyte storage tank 5 is an electrolyte heater (not shown) for heating the electrolyte, an electrolyte filter 6 for removing impurities such as sludge included in the electrolyte, and an electrolyte solution for supplying the horizontal cell 20. Accessories such as the electrolyte pump 7 may be further included.

After discharging the mother plate 15 having the electrodeposition layer formed as described above through the outlet-side conductor roll 5, the metal foil can be obtained by separating the mother plate 1 and the electrodeposition layer by applying shear stress.

Example

Hereinafter, for example, in accordance with an embodiment of the present invention will be described experimentally that can be stabilized of the flow field.

Example 1

As the existing electrolyte supply pipe, the electrolyte solution using the shape of the electrolyte supply pipe having a structure as shown in Figure 4 (a) and the spray nozzle having a curvature proposed in the present invention having a structure as shown in Figures 4 (b) and (c) In order to analyze the degree of stabilization of the electrolyte flow field at the time of supply, the laminar and turbulent flows for each nozzle were simulated for the case where the electrolyte was supplied.

However, the conventional electrolyte supply pipe is simply configured to supply the electrolyte vertically to the mother plate, but is configured as shown in (a) of FIG. 4 in order to contrast with the curved nozzle according to the embodiment of the present invention.

Streamlines of the electrolyte flow field according to the simulation are shown in FIGS. 5 and 6, respectively. 5 shows a streamline when the electrolyte is supplied by laminar flow, and FIG. 6 shows a streamline when the electrolyte is supplied by turbulent flow. At this time, the flow field of the laminar flow was Re = 1000 in Reynolds number, and the flow field of the turbulent flow was performed in Re = 5000.

In the case of supplying the electrolyte solution to the flow field of the laminar flow, as shown in FIG. 5 (a), when the electrolyte supply pipe of the structure of FIG. 4 (a) is used, the flow field is stabilized after about 0.15 m flow of the electrolyte solution. Able to know. On the other hand, in the case of using the curved nozzle as shown in (b) of FIG. 4, the flow field was stabilized after the flow field flowed about 0.03 m as shown in (b) of FIG. 5, and the curved nozzle as shown in (c) of FIG. In the case of using, as shown in (c) of Figure 5 it can be seen that the flow field is stabilized as the electrolyte flows about 0.03m.

From this result, when the electrolyte is supplied in the laminar flow, the use of a spray nozzle having a curvature according to the embodiment of the present invention can achieve a stable stabilization of the flow field as compared with the case of the conventional electrolyte supply pipe structure. It can be seen that, furthermore, it can be expected that the area for obtaining uniform electrodeposition also increases.

On the other hand, when the electrolyte is supplied to the flow field of the turbulent flow to each nozzle, as shown in Fig. 6A, when the electrolyte supply pipe of the structure of Fig. 4A is used, the electrolyte flows about 0.15 m. It can be seen that the flow field is later stabilized. On the other hand, in the case of using the curved nozzle as shown in (b) of FIG. 4, the flow field was stabilized after the flow field flowed about 0.05 m as shown in (b) of FIG. 6, and the curved nozzle as shown in (c) of FIG. 4. In the case of using, as shown in (c) of Figure 6 it can be seen that the flow field is stabilized while the electrolyte flows about 0.05m.

From this result, when the electrolyte is supplied in turbulent flow, the use of a spray nozzle having a curvature according to the embodiment of the present invention can quickly stabilize the flow field as compared with the case of the conventional electrolyte supply pipe structure. It can be seen that, furthermore, it can be expected that the area for obtaining uniform electrodeposition also increases.

1: base plate 2: current supply
3: conductor roll 4: anode
5: electrolyte reservoir 6: filtration device
7: electrolyte pump 8: electrolyte supply pipe
9: Forward electrolyte supply pipe 10: Reverse electrolyte supply pipe
11: curved nozzle 12: dispenser
13: Honeycomb 14: electrolyte collection tube
15: Substrate with electrodeposited layer 20: Horizontal cell

Claims (5)

Electrolyte supply device for supplying an electrolyte solution containing a metal ion to the anode electrode and the surface of the conductive mother plate horizontally spaced in one direction spaced at regular intervals from the anode electrode and the metal foil electrodeposited on one or both sides of the conductive mother plate Stripping means for separating from the
The electrolyte supply apparatus includes an electrolyte supply pipe for supplying an electrolyte solution on the conductive mother plate, wherein the electrolyte supply pipe is separated to supply the electrolyte in the forward and reverse directions with respect to the moving direction of the conductive mother plate.
The horizontal cell electroplating apparatus according to claim 1, wherein the electrolyte supply device includes a nozzle bent to supply an electrolyte solution between the conductive mother plate and the anode electrode at an end of the electrolyte supply pipe.
The apparatus of claim 1, wherein the electrolyte supply device has a cross section of a De Laval nozzle to supply electrolyte between the conductive mother plate and the anode electrode at an end of the electrolyte supply pipe, and extends in a width direction of the conductive mother plate. A horizontal cell pole apparatus comprising a dispenser.
The horizontal cell electroplating apparatus according to claim 2, further comprising a dispenser extending in the width direction of the conductive base plate at a distal end of the curved nozzle.
The horizontal cell pole apparatus according to any one of claims 1 to 4, wherein the electrolyte supply device is provided to supply electrolyte solutions to both surfaces of the mother plate.

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