KR101309385B1 - Induction heating device - Google Patents

Abstract

[PROBLEMS] To provide an induction heating apparatus capable of efficiently heating an induction heating member while realizing prevention of heating of magnetic poles disposed outside the chamber. [Solution] A magnetic permeable shield plate 46 for shielding the chamber 12 constituting the process chamber and the opening 42 provided on the housing 26 constituting the chamber 12 and the outer circumference of the chamber 12. In an induction heating apparatus (10) having magnetic poles (32, 34) disposed in proximity to the magnetic poles (32, 34) and induction heating coils (36, 38) wound around the magnetic poles (32, 34), the magnetically permeable shield plate (46) and the magnetic poles. Between the 32 and 34, a cooling plate 48 having a higher thermal conductivity than the magnetically permeable shield plate 46 and a cooling tube 50 through which a refrigerant for cooling the cooling plate 48 can be inserted are provided. While closing the 48 to the magnetically permeable shield plate 46, the cooling tube 50 is brought into close contact with at least a portion of the cold plate 48, and a gap is formed between the cold plate 48 and the magnetic poles 32 and 34. It is characterized by the provision.

Description

Induction Heater {INDUCTION HEATING DEVICE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an induction heating apparatus, and more particularly, to an induction heating apparatus which is preferable for controlling the temperature of a heated object when heat-treating a large diameter semiconductor substrate.

In the case of batch processing of a large diameter semiconductor substrate, even when a metal film or the like is formed on the surface of the substrate, an induction heating apparatus capable of suppressing nonuniformity in the temperature distribution in the substrate surface by heating the metal film is known. See, for example, Patent Document 1).

The technique disclosed in Patent Document 1 includes a chamber constituting the process chamber and an induction heating coil wound around the core constituting the magnetic pole. According to the induction heating apparatus having such a configuration, the magnetic flux generated through the magnetic poles is generated in parallel with the direction in which the semiconductor substrate which is the heated object disposed in the chamber is placed. Therefore, even when a metal film or the like is formed on the surface of the semiconductor substrate, no magnetic flux is introduced in the direction intersecting with the metal film, and there is no fear that the substrate is directly heated by induction heating. As a result, nonuniformity does not occur in the temperature distribution in the substrate surface.

Patent Document 1: Japanese Patent Application Laid-Open No. 2010-59490

According to the induction heating apparatus of the structure disclosed by patent document 1, even if it is a semiconductor substrate etc. in which the metal film was coat | covered certainly on the board | substrate, there exists a possibility that a metal film may be directly heated by induction heating.

However, in the induction heating apparatus having the above-described configuration, since the partition wall constituting the chamber is made of a heat-resistant metal such as aluminum, an opening is formed in a part of the chamber in order to reach the susceptor, which is the induction heating member, with the magnetic flux generated from the magnetic poles. Need to be formed. However, when the opening is provided in the chamber, the vacuum purge inside the chamber is impossible. In addition, when the opening is sealed with a magnetic pole in order to seal the chamber, foreign matters may be mixed in the chamber.

For this reason, quartz, which has a low vacuum strength, magnetic flux permeability, heat resistance, low thermal expansion coefficient, low thermal conductivity, strong thermal shock resistance, and is free from contamination, is disposed in the openings provided in the chamber.

In the induction heating apparatus of the structure disclosed by patent document 1, in order to improve the reach | attainment range of a magnetic flux and to raise heating efficiency, it is necessary to make the distance between a susceptor and a magnetic pole small. However, in order to improve the heating efficiency of the susceptor, when the distance between the magnetic pole and the susceptor is close, the quartz is heated by the radiant heat from the susceptor, and the ratio of the magnetic pole is heated by the radiant heat from the quartz. Since transparent quartz transmits a low-wavelength hot wire, there is a fear that the direct magnetic pole is radiantly heated. Ferrite is generally used for stimulation. Since the Curie point temperature of a general ferrite core is about 100 ° C. to 460 ° C., when the heating temperature of the susceptor rises to about 1000 ° C., there is a fear that the stimulus may exceed the Curie point. When the Curie point is exceeded, the residual magnetic flux density as a magnet becomes zero, and thus it cannot be used as a magnetic pole. Therefore, in order to form a cold wall furnace, it is necessary to cool quartz which is a shielding plate. This makes it possible to prevent heat of the induction heating coil and the structure around the induction heating coil in addition to the magnetic poles.

Therefore, it is an object of the present invention to provide an induction heating apparatus capable of efficiently heating an induction heating member while realizing prevention of heating of magnetic poles disposed outside the chamber.

Induction heating apparatus according to the present invention for achieving the above object is induction disposed in close proximity to the chamber constituting the process chamber, the magnetic permeable shield plate shielding the opening formed in the partition member constituting the chamber and the outer periphery of the chamber An induction heating apparatus having a core constituting a magnetic pole by winding a heating coil, characterized in that the cooling plate is provided in close proximity to or close to the magnetic permeable shield plate in order to cool the magnetic permeable shield plate. This cooling plate is required to have high thermal conductivity, having magnetic permeability and heat ray blocking property (high emissivity).

In the induction heating apparatus having the above characteristics, the cooling plate may be made of ceramic. This is because the cooling plate can block radiant heat from the susceptor.

In addition, in the induction heating apparatus having the above characteristics, it is sufficient to provide a gap between the cooling plate and the magnetic pole. By such a configuration, the heat of the magnetically permeable shielding plate transmitted through the cooling plate is not transferred directly to the magnetic poles by heat transfer, and the effect of preventing the heating of the magnetic poles (temperature rise suppression) can be enhanced.

In addition, the induction heating apparatus having the above characteristics may be provided with a cooling tube through which a refrigerant for cooling the cooling plate is inserted. It is because it becomes possible to always cool a cooling plate with a refrigerant | coolant by setting it as such a structure, and to exhibit a stable cooling effect.

In addition, the induction heating apparatus having the above characteristics may be provided with a pair of magnetic poles having different polarities, and the cooling tube may be disposed to surround both of the pair of magnetic poles. By such a configuration, the organic current (overcurrent) generated by the magnetic flux introduced into the cooling tube (made of metal) is canceled or partially canceled, and the reduction of the cooling effect due to the heating of the cooling tube itself can be prevented. In the case where a plurality of pairs of magnetic poles are gathered to form an aggregate, the cooling tube may be disposed so as to surround the magnetic poles throughout the aggregate.

In the induction heating apparatus having the above characteristics, the magnetic permeable shield plate may be made of quartz. This is because quartz has a vacuum resistance, magnetic flux permeability, heat resistance, low thermal expansion, low thermal conductivity and thermal shock resistance.

In addition, in the induction heating apparatus having the above characteristics, the induction heating coil comprises a tubular member through which a refrigerant can be inserted and a twisted line formed of a plurality of wire rods, and the tubular member is disposed on the tip side of the magnetic pole. The twisted line may be arranged behind the tubular member. This is because the heat prevention effect at the tip of the magnetic pole can be increased by such a configuration.

According to the induction heating apparatus having the above characteristics, it is possible to efficiently heat the induction heating member while realizing prevention of heating of the magnetic pole disposed outside the chamber.

1 is a plan view showing the configuration of an induction heating apparatus according to a first embodiment.
FIG. 2 is a diagram illustrating a configuration of a cross section AA of FIG. 1.
3 is a plan view showing the relationship between the angles of the two magnetic poles and the opening.
It is a figure which shows the front form of the opening part provided in the housing.
Fig. 5 is a diagram showing details of the assembly form of the magnetically permeable shield member and the cooling plate provided in the opening.
6 is a plan view for explaining the shape of the opening provided in the housing of the induction heating apparatus according to the second embodiment.
It is a figure which shows the front form of the opening part provided in the housing in the induction heating apparatus which concerns on 2nd Embodiment.
8 is a diagram illustrating an example of an arrangement form of a cooling tube in the induction heating apparatus according to the first embodiment.
9 is a diagram illustrating an example of an arrangement form of a cooling tube in the induction heating apparatus according to the second embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment which concerns on the induction heating apparatus of this invention is described in detail with reference to drawings. First, with reference to FIG. 1, FIG. 2, the outline structure of the induction heating apparatus which concerns on 1st Embodiment is demonstrated. 1 is a partial cross-sectional block diagram showing a planar configuration of an induction heating apparatus, and FIG. 2 is a block diagram showing an A-A cross section in FIG.

The induction heating apparatus 10 according to the present embodiment is a batch type in which a heat treatment is performed by stacking the wafer 60 as a heated object and the susceptor 16 as a heated member (heating element) in multiple stages.

The induction heating apparatus 10 is comprised based on the chamber 12, the excitation part 28 arrange | positioned at the exterior of the chamber 12, and the power supply part 40. As shown in FIG.

The chamber 12 is a process chamber configured based on the boat 14, the turntable 18, and the housing 26. The boat 14 is constructed by stacking a plurality of susceptors 16 on which the wafers 60 to be heated are placed in a plurality of vertical directions.

A supporting member (not shown) is disposed between each susceptor 16, and is configured to maintain a predetermined interval for disposing the wafer 60. The support member which is not shown in figure is not influenced by a magnetic flux, What is necessary is just to consist of a member with high heat resistance and a small coefficient of thermal expansion, specifically, it is good to comprise using quartz etc.

The susceptor 16 may be made of a conductive member. For example, the susceptor 16 may be made of graphite, SiC, SiC coated graphite, a heat resistant metal, or the like.

The rotating table 18 is comprised based on the table 20, the rotating shaft 22, and the base 24. As shown in FIG. The table 20 is a stand for supporting the boat 14 which consists of the several susceptor 16 laminated | stacked, and the support part which is not shown in figure is provided. The rotating shaft 22 is an axis fixed to the center of rotation of the table 20, and rotates the table 20 by receiving a driving force from a driving source (not shown), thereby allowing a plurality of susceptors mounted on the table 20. 16) Rotate The base 24 is a foundation having a drive source such as a motor for rotating the rotary shaft 22, and secures a stable state of the table 20. By rotating the boat 14 by the turntable 18, even when the excitation part 28 which is a heating source is arrange | positioned with respect to the induction heating apparatus 10, the susceptor 16 can be heated uniformly. Further, by arranging the excitation portions 28, the induction heating device 10 can be miniaturized as compared with the case where the induction heating device 10 is evenly arranged on the outer periphery of the boat 14 (chamber 12).

The housing 26 is a partition wall for maintaining the inside of the chamber 12 in a vacuum. The housing 26 in embodiment can make shape formation easy by making a planar shape polygonal (hexagonal in the example shown in FIG. 1). As a constituent member of the housing 26, aluminum or stainless steel is used from a process side. Here, aluminum is disadvantageous in shape formation or welding surface for shape formation, and also has low heat resistance compared to stainless steel. For this reason, stainless steel is often used as a constituent member of the housing 26. At least a portion of the housing 26 is provided with an opening 42, as shown in FIGS. 3 to 5, and the magnetic permeable shielding plate 46 and the magnetic permeable cooling plate 48 are closely connected to each other. Laminated | stacked so that it may approach. The magnetic permeable shielding plate 46 is a member for isolating the inner region and the outer region of the chamber 12, and may be a member having vacuum strength, magnetic flux permeability, heat resistance, low thermal expansion, low thermal conductivity, and thermal shock resistance. For example, quartz may be mentioned. On the other hand, the cooling plate 48 cools the magnetic permeable shield plate 46 by conducting the temperature of the refrigerant delivered from the cooling tube 50, which will be described later, and the magnetic poles caused by heating of the magnetic permeable shield plate 46 ( 32 (32a ~ 32c), 34 (34a ~ 34c) serves to prevent overheating. As a structural member of the cooling plate 48, ceramic members, such as aluminum nitride, SiC, and alumina, are mentioned, for example.

In the housing 26 which concerns on embodiment, the opening part 42 is provided in the two sides which form the main body of planar shape hexagon.

The magnetically permeable shield plate 46 according to the embodiment is pressed against and supported by the stepped portion 26b provided at the outer edge of the opening portion 42 of the housing 26 made of aluminum or the like. The cooling plate 48 is disposed closely to the outside of the magnetically permeable shield plate 46 (between the magnetically permeable shield plate 46 and the magnetic poles 32 and 24), and a coolant is inserted into the outer edge of the cooling plate 48. The penetrating cooling tube 50 is closely arranged. By such an arrangement, heat exchange is performed between the coolant inserted through the cooling tube 50 and the cooling plate 48 so that the cooling plate 48 is cooled. Since the cooling plate 48 has a higher thermal conductivity than the magnetically permeable shield plate 46, the cooling plate 48 is before or after heat exchange (heat transfer) is performed between the magnetic permeable shield plate 46 and the cooling plate 48. The whole cooling plate 48 is cooled in the process. Thereafter, heat exchange is performed between the cooled cooling plate 48 and the magnetic permeable shield plate 46, and the magnetic permeable shield plate 46 is cooled. Thereby, overheating of the stimulus due to the influence of radiant heat can be avoided.

The magnetically transparent shielding plate 46 is pressed against the step portion 26b through the O-ring 52 as shown in FIG. And the cooling plate 48 and the cooling pipe 50 are arrange | positioned. By such a configuration, the inner region and the outer region of the chamber 12 can be isolated, and the vacuum purge in the chamber 12 becomes possible.

The excitation part 28 is composed of a core 30 (30a to 30c) and induction heating coils 36 (36a to 36c) and 38 (38a to 38c). The core 30 is an iron core formed in a hoe shape. The core 30 has magnetic poles 32 (32a to 32c, 34 (34a to 34c)) formed by winding induction heating coils 36 and 38 which will be described later on both ends thereof, and is connected between both magnetic poles. It has yoke 35 (35a-35c). The end faces of the poles 32, 34 are configured to have a plane parallel to the tangent of the circular susceptor 16, ie perpendicular to the radial extension of the susceptor 16. With such a configuration, the induction heating coils 36 and 38 can be wound around the end faces of the magnetic poles 32 and 34, and leakage of magnetic flux from the magnetic poles other than the tip of the magnetic poles can be suppressed. Therefore, there is no waste in the magnetic flux injected into the susceptor 16, and the heating efficiency can be improved. The core 30 may be made of ferrite or the like. According to such a structure, the magnetic poles 32 and 34 and the yoke 35 of a desired shape can be obtained by baking after shape-forming a raw material of a clay shape. Therefore, the shape can be freely formed.

The induction heating coils 36 and 38 are conductive wires wound around both ends of the core 30 constituting the magnetic poles 32 and 34. By applying a current to the induction heating coils 36 and 38, magnetic flux is generated from the tip of the magnetic pole located in the direction orthogonal to the winding direction of the coil. In this embodiment, since the pole end surface (stimulation tip) faces the direction orthogonal to the surface on which the wafer is placed on the susceptor 16, the direction parallel to the plane on which the wafer of the susceptor 16 is placed from the pole end surface. This causes alternating magnetic flux. The induction heating coils 36 and 38 according to the embodiment prevent overheating of the induction heating coils 36 and 38 by a tubular member through which a refrigerant can be inserted (for example, a copper pipe or the like when water is used as the refrigerant). Although it is set as the structure to prevent, you may comprise by combining a tubular member and a litz wire which twists a some wire rod together. In the case of constituting the induction heating coils 36 and 38 by combining the tubular member and the litz wire, a specific configuration is used for the magnetic pole tip or the tubular member near the magnetic pole tip, and the litz wire is used for the rear end. Configuration.

In the heating method in which the magnetic flux is generated in the horizontal direction with respect to the surface on which the wafer of the susceptor 16 is placed, the frequency of the current supplied to the induction heating coils 36 and 38 is several tens of kHz. When copper is used for the tubular member, the copper pipe having a thickness of about 1 mm is subjected to induction heating, and the heating efficiency of the susceptor 16 decreases and the power loss increases. On the other hand, in the case of a Litz wire using an element wire of about 0.18 φ, the magnetic flux is considered to be transmitted. However, since there are many chain bridge magnetic fluxes at the tip portions of the magnetic poles 32 and 34, the induction heating is performed. When a Ritz wire which does not have a cooling action generates heat by induction heating, the temperature rises and may exceed the use temperature limit. Therefore, by disposing a tubular member having a cooling action on the tip end side and a Litz wire on the rear end side, power loss can be suppressed and overheating of the coil can be prevented. Moreover, by setting it as such a structure, the heating prevention effect of a pole tip can be heightened by the cooling effect of a tubular member.

The excitation part 28 is comprised by arranging the core 30 and the induction heating coils 36 and 38 of the above structure along the lamination direction of the susceptor 16 (three in the example shown in FIG. 2). have.

In the excitation portion 28 as described above, the core 30 of the embodiment is formed by a line extending from the center point O of the susceptor 16 toward the center of each end face of the magnetic pole as shown in FIG. 3. It is comprised so that angle (theta) may become a predetermined angle (depending on the angle which the housing 26 makes). After the angles are given between the magnetic poles 32 and 34, the polarity of the magnetic poles 32 and 34 is reversed, thereby causing the generated magnetic flux to reciprocate between the magnetic poles 32 and 34. FIG. This makes it possible to generate the magnetic flux through the center side of the susceptor 16 rather than the magnetic flux generated by the single magnetic pole 32 (34).

The power supply unit 40 includes an inverter (not shown) corresponding to the induction heating coils 36 and 38 wound around the magnetic poles 32 and 34 of each core 30 in units of the core 30, and an AC power source (not shown). And an unillustrated power control unit and the like, and are configured to adjust current, voltage, frequency, and the like supplied in units of induction heating coils 36 and 38 provided in each core 30. In the induction heating apparatus 10 according to the embodiment, the induction heating coils 36 and 38 (for example, the induction heating coils 36a and 34a wound around the magnetic pole 32a) wound around the single core 30. The induction heating coil 38a wound around is made to have the same winding direction in a parallel or series relationship on the circuit, and then reverses the direction of input of current. Thereby, the polarity of two magnetic poles (for example, magnetic pole 32a and magnetic pole 34a) in each core 30 can be made into the opposite direction. In this case, when using a resonant type inverter as the inverter, it is preferable to connect the resonant capacitors according to the control frequencies in parallel so that the frequency can be easily switched, and configured to be switched in accordance with the signal from the power control unit. .

The power control section according to the embodiment has zone control means (not shown). The zone control means controls the input power to each of the induction heating coils 36 and 38 while avoiding the influence of mutual induction occurring between the induction heating coils 36 and 38 wound around the cores 30 arranged adjacently. Play a role.

Since the induction heating coils 36 and 38 wound around the cores 30 stacked in close proximity to each other are operated as individual induction heating coils, the induction heating coils vertically adjacent to each other (for example, induction heating coils ( There is a case where mutual induction occurs in 38a) and induction heating coil 38b) and adversely affects individual power control. Therefore, the zone control means matches the frequency of the current input to the induction heating coils arranged adjacently based on the frequency or waveform (current waveform) of the detected current, and also synchronizes the phase of the current waveform (phase difference is 0 or phase difference). Is controlled to maintain a predetermined phase difference, thereby enabling power control (zone control control) that avoids the effect of mutual induction between adjacent induction heating coils.

Such control detects the current value, the frequency of the current, the voltage value, and the like input to each of the induction heating coils 36 and 38, and inputs the same to the zone control means. In the zone control means, for example, the phases of the current waveforms between the induction heating coils 36a and 38a wound around the core 30a and the induction heating coils 36b and 38b wound around the core 30b are respectively detected. Control to maintain synchronization or a predetermined phase difference. Such control is performed by outputting a signal for instantaneously changing the frequency of the current applied to each induction heating coil to the power control unit.

In the case of the same configuration as the induction heating apparatus 10 according to the present embodiment, the power control is performed on the basis of a control map (vertical temperature distribution control map) stored in a storage unit (memory) (not shown) provided in the power control unit. What is necessary is just to output the signal for outputting the input electric power which changes by the elapsed time unit from the start. In addition, the control map corrects the temperature change between the stacked susceptors from the start of the heat treatment to the end of the heat treatment, and gives each induction heating coil to obtain an arbitrary temperature distribution (for example, a uniform temperature distribution). The power value may be recorded together with the elapsed time from the start of the heat treatment. In addition, when the measuring means (not shown) which measures the temperature of the susceptor 16 is provided, what is necessary is to feed back the susceptor temperature in each zone, and to perform temperature control (power control).

In the power supply unit 40 having such a configuration, the frequency of the current input to each of the induction heating coils 36 and 38 is instantaneously adjusted based on the signal from the power control unit, and the phase control of the current waveform is performed. Temperature control in the vertical direction in the boat 14 can be controlled by performing power control for each induction heating coil 36, 38.

Moreover, according to the induction heating apparatus 10 of such a structure, since the magnetic flux acts horizontally with respect to the wafer 60, even if the conductive member, such as a metal film, was formed in the surface of the wafer 60, the wafer 60 There is no fear of disturbing the temperature distribution.

According to the induction heating apparatus having such a configuration, the susceptor 16 serving as the induction heating member can be efficiently heated while realizing prevention of heating of the magnetic poles 32 and 34 arranged outside the chamber 12.

Next, a second embodiment according to the induction heating apparatus of the present invention will be described in detail with reference to the drawings. Most configurations of the induction heating apparatus according to the present embodiment are the same as those of the induction heating apparatus 10 according to the first embodiment described above. Therefore, in the present embodiment, only the main parts having different configurations from those of the induction heating apparatus 10 according to the first embodiment will be described and described, and the same reference numerals are given to the drawings to designate the same parts. Is omitted. In addition, a difference from the induction heating apparatus 10 according to the first embodiment is in the form of the opening 142 provided in the housing 26. Specifically, the opening part 42 in 1st Embodiment provides the opening part 42 in each of the two sides of the housing 26 which makes a planar polygon (a hexagon in the example shown in FIG. 1), and opens the opening 42 ), The magnetically permeable shield plate 46 and the cooling plate 48 are arranged separately. In contrast, in the induction heating apparatus according to the present embodiment, as shown in FIGS. 6 and 7, the single magnetically transparent shielding plate 46 and the single cooling plate (not including the housing 26 in the opening portion 142). 48) the opening 42 is shielded.

Even in such a configuration, by providing the magnetically permeable shield plate 46, the cooling plate 48, and the cooling tube 50, heating of the magnetic poles 32, 34 can be prevented. In addition, the other structure, effect | action, and effect are the same as that of the induction heating apparatus 10 which concerns on 1st Embodiment mentioned above.

In addition, in the induction heating apparatus of the above configuration, the cooling tube 50 is made of a metal. This is because the metal has a higher thermal conductivity than a resin or the like, so that the cooling effect by the refrigerant penetrating the inside can be enhanced. By the way, when the cooling tube 50 is made of metal, since the cooling tube 50 is disposed near the magnetic poles 32 and 34, it is affected by the magnetic flux, and there is a concern that an organic current (overcurrent) is generated inside and induction heating. There is. Therefore, what is necessary is just to set it as the structure which arrange | positions so that the cooling pipe arrange | positioned so that the opening part 42 may be able to pass through the reach | attainment range of the magnetic flux of both magnetic poles 32 and 34 of different polarity may be carried out.

Specifically, for example, in the case where the independent openings 42 are provided for the magnetic poles 32 and 34 as in the first embodiment, as shown in FIG. 8, the cooling pipes surround the two openings at once. This is done. With such a configuration, the coolant serving as the coolant evenly rotates around the opening portion 42 (the edge side of the cooling plate 48). In addition, since the induced currents are generated in opposite directions on the magnetic pole 32 side and the magnetic pole 34 side, they are canceled with each other, so that the heating of the cooling tube 50 due to the induction heating can be suppressed.

In addition, as in the induction heating apparatus 10 according to the embodiment, when a plurality of magnetic poles 32 and 34 having different polarities are assembled (three pairs as a pair) (in the example according to the embodiment, a stacked arrangement), an aggregate is formed. What is necessary is just to arrange a cooling tube so that this whole assembly may be enclosed.

In addition, when the magnetic pole 32 and the magnetic pole 34 are arrange | positioned with respect to one opening part 42 similarly to 2nd Embodiment, as shown in FIG. 9, simply the periphery of the opening part 42 (cooling plate 48) It is good to arrange so that the edge side of) may be surrounded. It is because both of a cooling effect and an induction heating suppression can be achieved by setting it as such a structure.

10: induction heating device 12: chamber
14 boat 16: susceptor
18: rotating table 20: table
22: rotating shaft 24: base
26: housing 28: excitation part
30 (30a-30c): core 32 (32a-32c): magnetic pole
34 (34a ~ 34c): Stimulation 35 (35a ~ 35c): York
36 (36a ~ 36c): Induction heating coil 38 (38a ~ 38c): Induction heating coil
40: power supply section 42: opening
46: magnetic permeable shield plate 48: cooling plate
50: cooling tube 60: wafer

Claims (27)

Induction heating having a chamber constituting a process chamber and a core constituting a magnetic pole by winding an induction heating coil disposed around the magnetic permeable shield plate that shields an opening provided in a partition member constituting the chamber, the outer circumference of the chamber. On the device,
A cooling plate closely or in close proximity to the magnetically permeable shield plate for cooling the magnetically permeable shield plate,
A cooling tube through which a refrigerant for cooling the cooling plate is inserted;
With a pair of magnetic poles of different polarities,
The cooling pipe is arranged to surround both of the pair of magnetic poles.
The method of claim 1,
Induction heating apparatus, characterized in that the cooling plate is made of a ceramic. The method of claim 1,
Induction heating apparatus characterized in that the gap provided between the cooling plate and the magnetic pole. The method of claim 2,
Induction heating apparatus characterized in that the gap provided between the cooling plate and the magnetic pole. The method of claim 1,
And a plurality of pairs of magnetic poles to form an aggregate, wherein the cooling tube is arranged to surround the magnetic poles throughout the assembly.
The method of claim 2,
And a plurality of pairs of magnetic poles to form an aggregate, wherein the cooling tube is arranged to surround the magnetic poles throughout the assembly.
The method of claim 3,
And a plurality of pairs of magnetic poles to form an aggregate, wherein the cooling tube is arranged to surround the magnetic poles throughout the assembly.
5. The method of claim 4,
And a plurality of pairs of magnetic poles to form an aggregate, wherein the cooling tube is arranged to surround the magnetic poles throughout the assembly.
The method of claim 1,
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. The method of claim 2,
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. The method of claim 3,
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. 5. The method of claim 4,
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. The method of claim 5,
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. The method according to claim 6,
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. The method of claim 7, wherein
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. 9. The method of claim 8,
The magnetically permeable shield plate is made of quartz, characterized in that the heating device. 17. The method according to any one of claims 1 to 16,
The induction heating coil is composed of a tubular member through which a refrigerant can be inserted, and a twisted line formed of a plurality of wire rods.
The tubular member is disposed on the tip side of the magnetic pole, and the twisted line is disposed behind the tubular member. delete delete delete delete delete delete delete delete delete delete

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