KR101300287B1 - A haptic actuator process with film shape based on cellulose - Google Patents

Abstract

The present invention relates to a method for manufacturing a cellulose-based haptic actuator, and more specifically, (1) attaching a lower plate in the form of a thin film on the upper surface of the substrate; (2) applying a photoresist on the upper surface of the lower plate; (3) performing an exposure process using a photomask; (4) forming a support by partially removing the photoresist applied in step (2); (5) attaching an operation part composed of a cellulose thin film whose shape is modified in accordance with an electrical signal applied on the support formed in step (4); And (6) removing the substrate of step (1).
According to the manufacturing method of the cellulose-based film-type haptic actuator proposed in the present invention, by manufacturing a haptic actuator including a cellulose thin film as the lower plate and the operating portion, it is possible to manufacture in a thin film form and high transparency applied to the visual display device It is possible to manufacture this possible haptic actuator. In addition, according to the present invention, an environmentally friendly and human-friendly haptic actuator can be manufactured by using a cellulose thin film which is an environmentally friendly material.

Description

Manufacturing method of cellulose-based haptic actuator {A HAPTIC ACTUATOR PROCESS WITH FILM SHAPE BASED ON CELLULOSE}

The present invention relates to a method for manufacturing a haptic actuator, and more particularly to a method for manufacturing a cellulose-based haptic actuator.

Haptics is a technology that makes the user feel the sense of touch, power, and movement through the keyboard, mouse, joystick, and touch screen, which are the input devices of the user. The word comes from the Greek adjective haptesthai, which means touching.

In the existing computer technology, audiovisual information is mainly used to exchange information between humans and computers. However, the user wants more specific and realistic information through virtual reality, and the haptic technology that is developed to satisfy it is a haptic technology that delivers touch and power. Haptic technology is used in touch screens of computers and the like. In addition, haptic devices and haptic renderings can be widely applied to various fields including medical simulators, aircraft and fighter simulators, vehicle simulators, and game simulators. In the future, haptic devices are expected to be installed as well as monitors and speakers used as output devices of computers. In addition, since the economic potential is very high in connection with the leisure industry, research on haptic technology is expected to be very active in the future.

However, the conventional haptic device is difficult to be applied to a visual display such as a monitor or liquid crystal due to its large size and thick thickness. In addition, the transparency is low, it cannot be applied on the visual display device, and there is a limit to be embedded inside the device. In addition, a component such as a polymer (polymer) used in the haptic device has a problem that becomes a source of environmental pollution.

The present invention has been proposed to solve the above problems of the conventionally proposed methods, by manufacturing a haptic actuator including a cellulose thin film as the lower plate and the operating portion, it is possible to manufacture a thin thin film form and high transparency visual display device It is an object of the present invention to provide a method for producing a cellulose-based haptic actuator, which can produce a haptic actuator applicable to the above.

In addition, another object of the present invention is to provide a method for manufacturing a cellulose-based haptic actuator, which can produce an environmentally friendly and human-friendly haptic actuator by using a cellulose thin film that is an environmentally friendly material.

Method for producing a cellulose-based film-type haptic actuator according to a feature of the present invention for achieving the above object,

(1) attaching a lower plate in the form of a thin film on the upper surface of the substrate;

(2) applying a photoresist on the upper surface of the lower plate;

(3) performing an exposure process using a photomask;

(4) forming a support by partially removing the photoresist applied in step (2);

(5) attaching an operation part composed of a cellulose thin film whose shape is modified in accordance with an electrical signal applied on the support formed in step (4); And

(6) It is characterized by its structural features including the step of removing the substrate of step (1).

Preferably, in the step (1)

The lower plate can be a cellulose thin film.

More preferably, the lower plate and the operation unit,

Cellulose acetate thin film.

Even more preferably, the lower plate and the operating portion,

It may be a cellulose acetate thin film prepared by the rotary coating method.

Preferably, in the step (2)

The photoresist may be applied to 90 ~ 110㎛.

Preferably, in the step (3)

An exposure process may be performed using a photomask of a lattice or line pattern in pixels.

Preferably,

Further comprising the step of forming an adhesive layer on the support formed in the step (4),

In the step (5),

The operation part may be attached onto the formed adhesive layer.

According to the manufacturing method of the cellulose-based film-type haptic actuator proposed in the present invention, by manufacturing a haptic actuator including a cellulose thin film as the lower plate and the operating portion, it is possible to manufacture in a thin film form and high transparency applied to the visual display device It is possible to manufacture this possible haptic actuator.

In addition, according to the present invention, an environmentally friendly and human-friendly haptic actuator can be manufactured by using a cellulose thin film which is an environmentally friendly material.

1 is a view showing a flow of a manufacturing method of a cellulose-based film-type haptic actuator according to an embodiment of the present invention.
2 is a diagram illustrating a haptic actuator manufactured by a method for manufacturing a cellulose-based film-type haptic actuator according to an embodiment of the present invention.
Figure 3 is a view showing the side of the cellulose acetate thin film prepared by the rotation coating method in the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.
4 is a view showing a process according to the flow of the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, in order that those skilled in the art can easily carry out the present invention. In the following detailed description of the preferred embodiments of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. In the drawings, like reference numerals are used throughout the drawings.

In addition, in the entire specification, when a part is referred to as being 'connected' to another part, it may be referred to as 'indirectly connected' not only with 'directly connected' . In addition, the term 'comprising' of an element means that the element may further include other elements, not to exclude other elements unless specifically stated otherwise.

1 is a view showing a flow of a manufacturing method of a cellulose-based film-type haptic actuator according to an embodiment of the present invention. As shown in Figure 1, the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention, the step of attaching a lower plate on the upper surface (S100), the step of applying a photoresist on the upper surface of the lower plate (S200), performing an exposure process using a photo mask (S300), partially removing the applied photoresist to form a support (S400), attaching an operation part on the support (S600) ), And removing the substrate (S700), and further including forming an adhesive layer on the support (S500).

That is, the method for manufacturing a cellulose-based film-type haptic actuator according to an embodiment of the present invention may be performed on a substrate, and first, a lower plate in the form of a thin film may be attached to the upper surface of the substrate. In this case, the lower plate may be a cellulose thin film. A photoresist is formed on the upper surface of the lower plate, an exposure process is performed using a photomask, and then the photoresist is partially removed to form a support. By attaching an operating part made of a cellulose thin film whose shape is deformed according to an applied electrical signal on the support, a cavity can be formed between the lower plate and the operating part while the support is connected and supported between the lower plate and the operating part. By removing the substrate after attaching the operation portion, it is possible to manufacture a film-type haptic actuator manufactured according to an embodiment of the present invention.

2 is a diagram illustrating a haptic actuator manufactured by a method for manufacturing a cellulose-based haptic actuator according to an embodiment of the present invention. As shown in FIG. 2, the haptic actuator manufactured according to the method for manufacturing a cellulose-based haptic actuator according to an embodiment of the present invention includes a lower plate 10, an operation unit 20, and a support 30. It may be configured to include, and may further comprise an electrode (50).

That is, the haptic actuator manufactured by the present invention, as shown in Figure 2, by including a lower plate 10, the operation unit 20 and the support 30, between the lower plate 10 and the operation unit 20 The cavity 40 can be formed. When electricity is applied from the outside, the electrostatic force is induced in the cavity 40, the thickness of the cavity 40 is changed according to the type and size of the induced electrostatic force, and the operating part 20 is changed in accordance with the thickness change of the cavity 40. It is characterized by being deformed. At this time, when the repulsive force is induced in the cavity 40, the cavity 40 expands to convexly deform the operating part 20, and when the attraction force is induced, the cavity 40 is compressed to deform the operating part 20 concavely. , According to the thickness change of the cavity 40, the user can feel the tactile. In particular, the operation unit 20 may be made of a thin film based on cellulose that can change its shape according to the cavity 40 to be expanded or compressed, so that the user can feel the deformation state of the cavity 40.

The electrode 50 serves to apply electricity from the outside, it may be composed of a pair of electrodes 50 as shown in FIG. The electrode 50 may be made of an electrically conductive metal such as gold, but the metal component may be adjusted in consideration of the unit cost. In FIG. 2, the electrodes 50 are disposed on the upper surfaces of the lower plate 10 and the operation unit 20, but the electrodes 50 may be disposed on the lower surfaces of the lower plate 10 and the upper surfaces of the operation unit 20, respectively. In addition, the arrangement of the electrodes 50 may be changed as much as necessary.

On the other hand, in order to utilize the cellulose-based film-type haptic actuator manufactured according to an embodiment of the present invention as a tactile presentation device in various fields, in particular, the TAXEL module, which is a tactile input / output device, the power consumption is low and small, It is necessary to have enough strength and deformation to feel the touch.

Since the cellulose that can be used as the lower plate 10 and the operation unit 20 has more holes than other materials and can easily hold electric charges, the cellulose can be accumulated inside to generate vibration force by using electrostatic force. have. In addition, cellulose is a natural polymer material having very high transparency and flexible mechanical properties, and is environmentally and human-friendly, and has a piezoelectric effect, an ion transfer effect, and the like, which can be applied to various functional sensors. In particular, cellulose not only produces a large deformation even under a low voltage of 10V or less, but also has a great advantage in the application of a mobile device because power consumption is lower than 300 kW.

In particular, cellulose acetate (Cellulose Acetate) is a cellulose-based material consisting of an amorphous structure. Cellulose acetate has the advantages of low cost of raw materials, easy molding, and high electrostatic properties. In particular, since the cellulose acetate is composed of an amorphous structure, the recovery ability is excellent when using the electrostatic effect compared to pure regenerated cellulose with residual polarization.

The cellulose acetate thin film may be prepared in the form of a transparent thin film by a rotary coating method. Since cellulose acetate is generally manufactured in a fiber form by spinning, a rotary coating method may be applied to produce a transparent thin film having a certain strength. In other words, by dissolving cellulose acetate powder in acetone with high purity to form a cellulose acetate solution, the solution is repeatedly applied and solidified several times in a rotary applicator to obtain a cellulose acetate thin film having excellent transparency and high surface flatness. . In this case, a cellulose acetate solution in which cellulose acetate powder is dissolved in acetone by about 15 wt% may be used.

Figure 3 is a view showing the side of the cellulose acetate thin film prepared by the rotation coating method in the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention. 3 is a photograph taken with a scanning microscope, in which cellulose acetate particles are very evenly and densely distributed, and have a porous sponge structure including a fine air layer. It can be confirmed that it can be produced.

4 is a view showing a process according to the flow of the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention. Hereinafter, with reference to Figures 1, 2 and 4, it will be described in detail for the manufacturing method of the cellulose-based film-type haptic actuator according to an embodiment of the present invention.

In step S100, the lower plate 10 may be attached to the upper surface of the substrate 80. The cellulose-based haptic actuator according to an embodiment of the present invention is manufactured in the form of a thin and transparent film by attaching a plate of a very thin film form, and thus may be manufactured on the substrate 80 to facilitate the manufacture. The substrate 80 may be a silicon wafer that is widely used as a substrate 80 for making an integrated circuit or the like. In this case, the lower plate 10 attached on the substrate 80 may be a cellulose thin film.

Although the lower plate 10 may be in the form of a thin film, it is preferable to use a flexible polymer material having excellent transparency. In particular, the lower plate 10 may be a cellulose thin film excellent in electrostatic properties similarly to the operation unit 20, and more preferably may be a cellulose acetate thin film manufactured in the form of a transparent thin film by a rotation coating method.

In step S200, the photoresist 35 may be applied to the upper surface of the lower plate 10. Applying photoresist 35 is for forming support 30, as shown in FIG. 2. The photoresist 35 is a mixture of a polymer and a photosensitizer. The photoresist 35 refers to a material whose chemical properties are changed by light, and solubility in a specific solvent is greatly changed when exposed to light.

In step S200, the photoresist 35 may be coated with 90 μm to 110 μm. Since the photoresist 35 to be applied in step S200 serves as a support 30, it should maintain a height that can sufficiently support the operation of the attraction force induced in the cavity 40 of about 90 ~ 110㎛ It is preferable to form in thickness.

In operation S300, an exposure process may be performed using the photomask 60. In this case, the photomask 60 may be a grid or line pattern in units of pixels. That is, the pattern of the photomask 60 is in the form of a desired support 30, placed on the photoresist 35 applied in step S200 and exposed to light so that the pattern of the photomask 60 remains as it is. To be transferred to. In the present invention, the photomask 60 having a grid or line pattern in a pixel unit to provide a haptic sensation to the user may be used to allow the user to feel fine tactile sensations. The size of the pixel is preferably set to a size that can be recognized by the user, it can be various, such as 0.1 ~ 20mm depending on the application.

In step S400, the photoresist 35 applied in step S200 may be partially removed to form the support 30. Since the chemical properties are changed when the photoresist 35 is exposed to light, the support 30 may be formed using a lithography technique using the photoresist 35. The support 30 is formed according to the shape of the photomask 60 of step S300. The part that is partially removed in step S400 becomes a cavity 40 later, and the user can feel the touch by the electrostatic force induced in this part.

In step S500, the adhesive layer 70 may be formed on the support 30. The adhesive layer 70 is for attaching the support 30 and the operation unit 20, and should not damage the support 30 or the operation unit 20. The adhesive layer 70 may be formed of polyvinyl acetate.

In step S600, the operation unit 20 may be attached onto the support 30 formed in step S400, and may be attached to each other by the adhesive layer 70 formed in step S500. Since the operation unit 20 can change the shape according to the electrical signal, the user can feel the touch according to the deformation of the operation unit 20. By attaching the operation part 20, the cavity 40 is formed between the lower plate 10 and the operation part 20. The operation unit 20 may be a cellulose thin film that can be modified in shape according to an electrical signal, and more preferably, may be a cellulose acetate thin film having high transparency and easy charging. In particular, as shown in Figure 3, the cellulose acetate thin film produced by the rotary coating method is high transparency and easy to charge can be used as an operating part can provide an effective haptic.

In step S700, the substrate 80 of step S100 may be removed. The substrate 80 is required to facilitate the process, and by removing the substrate 80, a cellulose-based haptic actuator having a very high transparency and a thin film form may be manufactured.

The cellulose-based haptic actuator manufactured according to the manufacturing method as described above, as well as the vibration force that can be generated by the holes of the cellulose, as well as the electrostatic force can be accumulated and eliminated a lot of charges by making a larger hole The vibration force by can be maximized. In addition, since the cellulose thin film as the operating portion can be bent up and down by the electrostatic force by the large hole in this way, it can be utilized as an effective haptic actuator by generating force as well as vibration force.

The present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics of the invention.

10: lower plate 20: operating part
30: support 35: photoresist
40: cavity 50: electrode
60: photomask 70: adhesive layer
80: substrate
S100: attaching the lower plate to the upper surface of the substrate
S200: applying photoresist on the upper surface of the lower plate
S300: performing an exposure process using a photomask
S400: forming a support by partially removing the applied photoresist
S500: forming an adhesive layer on the support
S600: Attaching the Actuator on a Support
S700: removing the substrate

Claims (7)

As a manufacturing method of a haptic actuator,
(1) attaching a lower plate in the form of a thin film on the upper surface of the substrate;
(2) applying a photoresist on the upper surface of the lower plate;
(3) performing an exposure process using a photomask;
(4) partially removing the photoresist applied in the step (2) using lithography to form a support according to the photomask shape;
(5) attaching an operation part composed of a cellulose thin film whose shape is modified in accordance with an electrical signal applied on the support formed in step (4); And
(6) The method of manufacturing a cellulose-based haptic actuator, characterized in that it comprises the step of removing the substrate of step (1).
2. The method according to claim 1, wherein in the step (1)
Method for producing a cellulose-based haptic actuator, characterized in that the lower plate is a cellulose thin film.
The method of claim 2, wherein the lower plate and the operating unit,
Method for producing a cellulose-based film-type haptic actuator, characterized in that the cellulose acetate thin film.
The method of claim 3, wherein the lower plate and the operating unit,
A method for producing a cellulose-based film-type haptic actuator, which is a cellulose acetate thin film produced by a rotation coating method.
2. The method according to claim 1, wherein in the step (2)
Method for producing a cellulose-based film-type haptic actuator, characterized in that for applying the photoresist 90 ~ 110㎛.
2. The method according to claim 1, wherein in the step (3)
Method of manufacturing a cellulose-based film-type haptic actuator, characterized in that to perform the exposure process using a pixel or grating or line pattern photomask.
The method of claim 1,
Forming an adhesive layer on the support formed in step (4)
More,
In the step (5),
Method for producing a cellulose-based film-type haptic actuator, characterized in that for attaching the operating portion on the formed adhesive layer.

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